CN112481582A - Nano-coating probe and preparation method thereof - Google Patents
Nano-coating probe and preparation method thereof Download PDFInfo
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- CN112481582A CN112481582A CN202011532880.9A CN202011532880A CN112481582A CN 112481582 A CN112481582 A CN 112481582A CN 202011532880 A CN202011532880 A CN 202011532880A CN 112481582 A CN112481582 A CN 112481582A
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- 239000002103 nanocoating Substances 0.000 title claims abstract description 78
- 238000002360 preparation method Methods 0.000 title abstract description 11
- 238000000576 coating method Methods 0.000 claims abstract description 98
- 239000011248 coating agent Substances 0.000 claims abstract description 96
- 238000012360 testing method Methods 0.000 claims abstract description 31
- 238000000034 method Methods 0.000 claims abstract description 23
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 15
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000005240 physical vapour deposition Methods 0.000 claims abstract description 9
- 239000002086 nanomaterial Substances 0.000 claims abstract description 7
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- 238000006243 chemical reaction Methods 0.000 claims description 23
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 18
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 17
- 229910052737 gold Inorganic materials 0.000 claims description 17
- 239000010931 gold Substances 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 13
- 229910000831 Steel Inorganic materials 0.000 claims description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 12
- 239000000956 alloy Substances 0.000 claims description 12
- 229910045601 alloy Inorganic materials 0.000 claims description 12
- 239000010959 steel Substances 0.000 claims description 12
- 239000010936 titanium Substances 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 12
- 239000007789 gas Substances 0.000 claims description 10
- 239000002113 nanodiamond Substances 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims description 9
- -1 carbon ions Chemical class 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 7
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- 229910052721 tungsten Inorganic materials 0.000 claims description 7
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- 238000005520 cutting process Methods 0.000 claims description 6
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- 229930195733 hydrocarbon Natural products 0.000 claims description 6
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- DECCZIUVGMLHKQ-UHFFFAOYSA-N rhenium tungsten Chemical compound [W].[Re] DECCZIUVGMLHKQ-UHFFFAOYSA-N 0.000 claims description 5
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 22
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Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0635—Carbides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06755—Material aspects
- G01R1/06761—Material aspects related to layers
Abstract
The invention provides a nano-coating probe, which comprises a probe main body, a nano-coating and an insulating coating, wherein the nano-coating is coated on the outer surface of the probe main body, the probe main body comprises a testing part, a connecting part and a fixing part, the insulating coating is arranged on the nano-coating corresponding to the connecting part of the probe main body, and the nano-coating is of a nano structure. The invention also provides a preparation method of the nano-coating probe, the nano-coating is prepared by using the PVD vacuum coating method, the preparation cost is low, the nano-coating generation effect is good, and the nano-coating probe is suitable for batch production. According to the invention, the outer surface of the probe main body is coated with the nano coating which has a nano structure and can be a nano titanium nitride coating or a nano diamond-like carbon coating, so that the hardness and the wear resistance of the probe are effectively improved, the service life of the probe is prolonged, the test cost is reduced, and the test efficiency is improved.
Description
Technical Field
The invention belongs to the technical field of electronic equipment testing, and particularly relates to a nano-coating probe and a preparation method thereof.
Background
In the field of testing of integrated circuits of electronic devices, contact test probes are widely used. The existing probe is generally made of rhenium tungsten, tungsten steel, piano steel and the like, wherein the tungsten steel is the hardest and most wear-resistant material, the service life of the tungsten steel can reach 100 ten thousand times generally, and the service life of the probe made of other materials is 40-80 ten thousand times generally. Because the probe constantly needs to contact with the testing board in the use, causes very big wearing and tearing to probe itself, so when the probe reaches certain wearing and tearing degree, just need change the probe. In addition, the outer surface of the probe is generally plated with nickel or gold, and both nickel and gold are easily worn, which is not favorable for prolonging the service life of the probe. Therefore, in the testing field, because the existing probe has low hardness and poor wear resistance, the probe needs to be frequently replaced, so that the testing cost is high, and the testing efficiency is low.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, provides a nano-coating probe and a preparation method thereof, solves the problems of low hardness and poor wear resistance of the probe in the prior art, and overcomes the defects of high test cost and low test efficiency.
In a first aspect, the invention provides a nano-coating probe, which includes a probe main body, a nano-coating and an insulating coating, wherein the nano-coating is coated on the outer surface of the probe main body, the probe main body includes a testing part, a connecting part and a fixing part, the insulating coating is arranged on the nano-coating corresponding to the connecting part of the probe main body, and the nano-coating is of a nano structure.
Further, the nano-coating is a nano-titanium nitride coating comprising nano-titanium nitride particles.
Further, the thickness of the nano titanium nitride coating is 2-3 mu m.
Further, the nano-coating is a nano-diamond like coating comprising nano-diamond like particles.
Further, the thickness of the nano diamond-like carbon coating is 1-3 mu m.
Further, the probe body is made of one of rhenium tungsten, tungsten steel and piano steel.
The probe body is characterized by further comprising a metal coating, the metal coating is coated on the outer surface of the nano coating, the insulating coating is arranged on the metal coating corresponding to the connecting part of the probe body, and the metal coating is a nickel-plated layer or a gold-plated layer.
In a second aspect, the invention provides a method for preparing the nano-coating probe, which comprises the following steps:
step S1: straightening, cutting and grinding the raw materials into a probe main body with a set shape;
step S2: plating a nano coating on the outer surface of the probe body by using a PVD vacuum coating method;
step S3: and coating an insulating coating on the nano coating corresponding to the connecting part of the probe body.
Further, when the nano-coating is a nano-titanium nitride coating, in step S2, the method includes the following steps:
step S201: cleaning and drying a probe main body by ultrasonic waves, placing the probe main body in a reaction furnace, and vacuumizing the reaction furnace;
step S202: simultaneously turning on power supplies of the titanium target, the copper-based alloy target and the gold-based alloy target, filling nitrogen, and performing plasma modification on the probe body by adopting radio frequency or intermediate frequency glow discharge;
step S203: the evaporated material and gas evaporated from the target are ionized, and the evaporated copper-based alloy, gold-based alloy, and titanium nitride, which is a reaction product of titanium and nitrogen, are deposited on the probe body under the acceleration action of the electric field, so as to form the nano titanium nitride coating.
Further, when the nano-coating is a nano-diamond like coating, in step S2, the following steps are included:
step S211: cleaning and drying a probe main body by ultrasonic waves, placing the probe main body in a reaction furnace, and vacuumizing the reaction furnace;
step S212: injecting argon into the reaction furnace, starting an ion source, activating the surface of the probe main body by the working voltage of the ion source being 2100-2400V and the working time being 40-60 min;
step S213: closing argon, loading negative bias between the probe body and the reaction furnace, and starting a titanium arc source to deposit a titanium transition layer on the surface of the probe body;
step S214: introducing nitrogen into the reaction furnace, and keeping the stability of the vacuum degree to deposit a titanium nitride transition layer on the surface of the probe main body;
step S215: starting pulse arc discharge with graphite as cathode electrode, introducing hydrocarbon gas into the reaction furnace, and allowing carbon ions formed by the pulse discharge and high-energy neutral atoms of carbon to collide with hydrocarbon gas molecules to generate new carbon ions flying to the surface of the probe body to form the nano diamond-like carbon coating.
The invention has the beneficial effects that:
1. the invention provides a nano-coating probe, wherein a nano-coating is coated on the outer surface of a probe main body, and the nano-coating has a nano structure and can be a nano titanium nitride coating or a nano diamond-like coating, so that the hardness and the wear resistance of the probe are effectively improved, the service life of the probe is prolonged, the test cost is reduced, and the test efficiency is improved.
2. The invention also provides a preparation method of the nano-coating probe, the nano-coating is prepared by using the PVD vacuum coating method, the preparation cost is low, the nano-coating generation effect is good, and the nano-coating probe is suitable for batch production.
Drawings
The invention is further illustrated by means of the attached drawings, but the embodiments in the drawings do not constitute any limitation to the invention, and for a person skilled in the art, other drawings can be obtained on the basis of the following drawings without inventive effort.
FIG. 1 is a cross-sectional view of a portion of the structure of a nano-coated probe of example 1, in one embodiment.
FIG. 2 is a cross-sectional view of a partial structure of a nano-coated probe of example 1 in another embodiment.
FIG. 3 is a cross-sectional view of the center of the overall structure of one embodiment of a nano-coated probe of example 1.
FIG. 4 is a cross-sectional view of the center of the overall structure of another embodiment of a nano-coated probe of example 1.
FIG. 5 is a flow chart of a method of fabricating a nano-coated probe according to example 2.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Example 1:
referring to fig. 1, 3 and 4, embodiment 1 provides a nano-coating probe, including a probe main body 1, a nano-coating 2 and an insulating coating 3, where the nano-coating 2 covers an outer surface of the probe main body 1, the probe main body 1 includes a testing portion 11, a connecting portion 12 and a fixing portion 13, the insulating coating 3 is disposed on the nano-coating 2 corresponding to the connecting portion 12 of the probe main body 1, and the nano-coating 2 is a nano-structure.
It should be noted that, a layer of nano coating 2 is directly added on the probe main body 1, the nano coating 2 can improve the hardness of the probe main body 1 by 3-5 times, and the service life by more than 3 times, so as to greatly improve the hardness and wear resistance of the probe, and further improve the service life of the probe, and then an insulating coating 3 is arranged on the nano coating 2 corresponding to the connecting part 12 of the probe main body 1, so as to ensure the insulating property of the connecting part 12.
As an embodiment, the nano-coating 2 is a nano-titanium nitride coating, which comprises nano-titanium nitride particles. Preferably, the thickness of the nano titanium nitride coating is 2-3 μm. The addition of a nano titanium nitride coating to the probe body 1 can increase the hardness of the probe body 1 to 2000HV or more, and the outer surface of the probe body 1 turns golden yellow with a friction coefficient of less than 0.23.
As another embodiment, the nano-coating 2 is a nano-diamond like coating comprising nano-diamond like particles. Preferably, the thickness of the nano diamond-like coating is 1-3 μm. The hardness of the probe body 1 can be increased to 3000HV or more by adding a nano diamond-like carbon coating on the probe body 1, the outer surface of the probe body 1 is bright black, and the friction coefficient is lower than 0.1.
In the present embodiment, the probe body 1 is made of one of rhenium tungsten, tungsten steel, and piano steel.
Referring to fig. 2, as another embodiment, the probe further includes a metal plating layer 4, the metal plating layer 4 covers the outer surface of the nano coating layer 2, the insulating coating 3 is disposed on the metal plating layer 4 corresponding to the connecting portion 12 of the probe body 1, and the metal plating layer 4 is a nickel plating layer or a gold plating layer.
It should be noted that, for the conventional probe, only nickel plating or gold plating is needed to be performed on the probe body, and then the insulating coating 3 is coated, so that the manufacturing can be completed. However, after the nanocoating 2 is applied, a step of plating nickel or gold may be optionally applied.
When nickel plating or gold plating is needed, the process is that a nano coating 2 is coated on the probe body, then nickel plating or gold plating is carried out on the nano coating 2, and finally an insulating coating 3 is coated.
When nickel plating or gold plating is not needed, the process flow is that the probe body is coated with the nano coating 2 firstly, and then coated with the insulating coating 3, and the quality of the probe can be greatly improved under the condition that the total cost is almost unchanged due to the reduction of the process steps of nickel plating or gold plating.
As a preferred mode, the insulating coating 3 is a polyurethane layer.
Referring to fig. 3, as a preferable mode, since the insulating coating 3 has a certain thickness, that is, a height difference is formed on the probe body 1, the insulating coating 3 forms a first insulating layer section 31 and a second insulating layer section 32 on the probe body 1, the first insulating layer section 31 is adjacent to the test part 11, the second insulating layer section 32 is adjacent to the fixing part 13, a distance between an end of the test part 11 and the first insulating layer section 31 is a first distance, a distance between an end of the fixing part 13 and the second insulating layer section 32 is a second distance, the first distance and the second distance have the same length, and the probe body 1 is bilaterally symmetric. When the test part 11 is worn for a long time and reaches a scrapped state, the probe can be turned to one direction for installation, namely the test part 11 is used for fixing, the fixing part 13 is used for testing, and the relative wear condition of the fixing part 13 is not serious, so that the test function can be fully exerted, and the service life of the probe is effectively prolonged. And both ends of the probe can be used for fixed installation, so that the probe is convenient to maintain, and the test reliability and efficiency are improved.
Referring to fig. 4, as a preferable mode, the insulating coating 3 includes a first thickness insulating coating 301 and a second thickness insulating coating 302, the two layers of insulating coatings 3 are sequentially disposed on the probe body 1, and the length of the second thickness insulating coating 302 is shorter than that of the first thickness insulating coating 301, i.e., two steps are formed at both ends, the two steps are still disposed in bilateral symmetry, and the length of the first thickness insulating coating 301 exposed by the testing part 11 and the fixing part 13 is short. By arranging the two-stage step at one end, because the distance between the two probes is very small and is usually about 0.03mm in the test process, when the test part 11 is pushed to the direction of the tested plate, the second-stage step formed by the insulating coating 302 with the second thickness plays a limiting role, and when the second-stage step is subjected to resistance, the pushing of the test part 11 is proved to reach a set value; meanwhile, when the test portion 11 is powered on, in order to prevent discharge between two adjacent probes, the first-thickness insulating coating 301 plays a good insulating protection role, and the possibility of sparking is effectively reduced.
Example 2:
referring to fig. 5, this embodiment 2 provides a method for preparing a nano-coated probe applied in embodiment 1, including the following steps:
step S1: straightening, cutting and grinding the raw materials into a probe main body 1 with a set shape;
step S2: plating a nano coating 2 on the outer surface of the probe body 1 by using a PVD vacuum coating method;
step S3: and an insulating coating 3 is coated on the nano coating 2 corresponding to the connecting part 12 of the probe body 1.
The method comprises the steps of using one of rhenium tungsten, tungsten steel and piano steel as a raw material, straightening, cutting and grinding the raw material into a set shape to obtain a probe main body 1, plating a nano coating 2 on the outer surface of the probe main body 1 by using a PVD (physical vapor deposition) vacuum coating method in a physical vapor deposition mode, wherein the nano coating 2 is a nano titanium nitride coating or a nano diamond-like coating, and finally, coating an insulating coating 3 on the nano coating 2. Of course, after step S2 and before step S3, a metal plating layer 4, specifically a nickel plating layer or a gold plating layer, may be further plated on the nano-coating 2 to further improve the performance of the probe.
Thus, there are two complete manufacturing processes for probes, each comprising the following steps:
the first one is to include metal plating:
straightening the probe bar, and cutting out a bar with a proper length;
grinding two ends of the bar into a specified shape, and checking the overall appearance and shape of the probe;
plating a layer of nano coating 2 on the outer surface of the probe body 1;
inspecting the condition of the nano-coating;
aiming at the whole probe, firstly plating nickel, then plating gold or plating rhodium;
coating an insulating coating on the probe body;
and finally, checking the manufacturing condition and finishing production.
The second is to exclude the metal plating:
straightening the probe bar, and cutting out a bar with a proper length;
grinding two ends of the bar into a specified shape, and checking the overall appearance and shape of the probe;
plating a layer of nano coating 2 on the outer surface of the probe body 1;
inspecting the condition of the nano-coating;
coating an insulating coating on the probe body;
and finally, checking the manufacturing condition and finishing production.
In the case of two insulating coatings, in the process of coating the insulating coating, a first thickness insulating coating 301 may be coated on the needle body, and then a second thickness insulating coating 302 may be coated on the first thickness insulating coating 301; alternatively, the probe may be coated with a first thickness of insulating coating 301 on both ends and then coated with a second thickness of insulating coating 302 in the middle of the body. The above two modes can be interchanged.
As an embodiment, when the nano-coating 2 is a nano-titanium nitride coating, in step S2, the following steps are included:
step S201: cleaning and drying the probe body 1 by ultrasonic waves, placing the probe body in a reaction furnace, and vacuumizing the reaction furnace;
step S202: simultaneously turning on power supplies of the titanium target, the copper-based alloy target and the gold-based alloy target, filling nitrogen, and performing plasma modification on the probe body 1 by adopting radio frequency or intermediate frequency glow discharge;
step S203: the evaporated material and gas evaporated from the target are ionized, and the evaporated copper-based alloy, gold-based alloy, and titanium nitride, which is a reaction product of titanium and nitrogen, are deposited on the probe body 1 under the acceleration action of the electric field, thereby forming a nano titanium nitride coating.
The probe with the nano titanium nitride coating obtained by the method has the advantages of large binding force between the nano titanium nitride coating and the probe main body 1, high hardness, good wear resistance and corrosion resistance, good stability of the coating, self-lubricating property and low friction coefficient.
As another embodiment, when the nano-coating 2 is a nano-diamond like coating, in step S2, the following steps are included:
step S211: subjecting the probe body 1 to ultrasonic cleaningWashing, drying, putting in a reaction furnace, vacuumizing, and maintaining the vacuum degree at 3.8X 10-3Pa～4.5×10-3Pa;
step S212: argon gas was injected into the reaction furnace to maintain the degree of vacuum at 3.8X 10-3Pa～4.3×10-3Starting an ion source under the working voltage of 2100-2400V for 40-60 min under Pa, generating a large amount of argon ions to bombard the surface of the probe main body 1, and activating the surface of the probe main body 1;
step S213: closing argon, loading negative bias between the probe body 1 and the reaction furnace, and starting a titanium arc source to deposit a titanium transition layer on the surface of the probe body 1;
step S214: introducing nitrogen into the reaction furnace, and maintaining the stable vacuum degree of 1.1 × 10-2Pa～1.2×10-2Pa, depositing a titanium nitride transition layer on the surface of the probe body 1;
step S215: starting pulse arc discharge with graphite as a cathode electrode, setting the initial discharge frequency to be 20Hz, properly increasing the discharge frequency by 2200-2800 pulses per discharge with a certain pulse number per discharge, increasing the discharge frequency by 10Hz, simultaneously introducing hydrocarbon gas into the reaction furnace, colliding carbon ions formed by the pulse discharge and high-energy neutral atoms of carbon with hydrocarbon gas molecules, and generating new carbon ions to fly to the surface of the probe body 1 to form the nano diamond-like coating.
The probe with the nano-diamond-like coating obtained by the method has the advantages of large binding force between the nano-diamond-like coating and the probe main body 1, high hardness, good wear resistance and corrosion resistance, good stability of the coating, self-lubricating property and low friction coefficient.
Compared with the prior art, the invention provides the nano-coating probe, the outer surface of the probe main body 1 is coated with the nano-coating 2, the nano-coating 2 has a nano structure and can be a nano titanium nitride coating or a nano diamond-like coating, the hardness and the wear resistance of the probe are effectively improved, the service life of the probe is prolonged, the test cost is reduced, and the test efficiency is improved.
The invention also provides a preparation method of the nano-coating probe, the nano-coating 2 is prepared by using the PVD vacuum coating method, the preparation cost is low, the nano-coating 2 has good generation effect, and the preparation method is suitable for batch production.
Finally, it should be emphasized that the present invention is not limited to the above-described embodiments, but only the preferred embodiments of the invention have been described above, and the present invention is not limited to the above-described embodiments, and any modifications, equivalent substitutions, improvements, etc. within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The utility model provides a nanometer coating probe which characterized in that, includes probe main part, nanometer coating and insulating coating, the nanometer coating cladding in probe main part surface, probe main part includes test portion, connecting portion and fixed part, insulating coating locates on the nanometer coating that probe main part connecting portion correspond, nanometer coating is the nanostructure.
2. The nanocoated probe of claim 1, wherein said nanocoating is a nanocoating of titanium nitride, said nanocoating of titanium nitride comprising nanocoating particles of titanium nitride.
3. The nano-coated probe according to claim 2, wherein the nano-titanium nitride coating has a thickness of 2 to 3 μm.
4. The nano-coated probe of claim 1, wherein the nano-coating is a nano-diamond like coating comprising nano-diamond like particles.
5. The nano-coated probe according to claim 4, wherein the nano-diamond like carbon coating has a thickness of 1 to 3 μm.
6. The nano-coated probe as claimed in any one of claims 1 to 5, wherein the probe body is made of one of rhenium tungsten, tungsten steel, piano steel.
7. The nano-coating probe of claim 6, further comprising a metal coating, wherein the metal coating is coated on the outer surface of the nano-coating, the insulating coating is disposed on the metal coating corresponding to the connecting portion of the probe body, and the metal coating is a nickel-plating layer or a gold-plating layer.
8. A method of preparing a nano-coated probe applied to any one of claims 1 to 7, comprising the steps of:
step S1: straightening, cutting and grinding the raw materials into a probe main body with a set shape;
step S2: plating a nano coating on the outer surface of the probe body by using a PVD vacuum coating method;
step S3: and coating an insulating coating on the nano coating corresponding to the connecting part of the probe body.
9. The method for preparing a nano-coated probe according to claim 8, wherein when the nano-coating is a nano-titanium nitride coating, in step S2, the method comprises the following steps:
step S201: cleaning and drying a probe main body by ultrasonic waves, placing the probe main body in a reaction furnace, and vacuumizing the reaction furnace;
step S202: simultaneously turning on power supplies of the titanium target, the copper-based alloy target and the gold-based alloy target, filling nitrogen, and performing plasma modification on the probe body by adopting radio frequency or intermediate frequency glow discharge;
step S203: the evaporated material and gas evaporated from the target are ionized, and the evaporated copper-based alloy, gold-based alloy, and titanium nitride, which is a reaction product of titanium and nitrogen, are deposited on the probe body under the acceleration action of the electric field, so as to form the nano titanium nitride coating.
10. The method for preparing a nano-coated probe as claimed in claim 8, wherein when the nano-coating is a nano-diamond-like coating, in step S2, the method comprises the steps of:
step S211: cleaning and drying a probe main body by ultrasonic waves, placing the probe main body in a reaction furnace, and vacuumizing the reaction furnace;
step S212: injecting argon into the reaction furnace, starting an ion source, activating the surface of the probe main body by the working voltage of the ion source being 2100-2400V and the working time being 40-60 min;
step S213: closing argon, loading negative bias between the probe body and the reaction furnace, and starting a titanium arc source to deposit a titanium transition layer on the surface of the probe body;
step S214: introducing nitrogen into the reaction furnace, and keeping the stability of the vacuum degree to deposit a titanium nitride transition layer on the surface of the probe main body;
step S215: starting pulse arc discharge with graphite as cathode electrode, introducing hydrocarbon gas into the reaction furnace, and allowing carbon ions formed by the pulse discharge and high-energy neutral atoms of carbon to collide with hydrocarbon gas molecules to generate new carbon ions flying to the surface of the probe body to form the nano diamond-like carbon coating.
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| CN112481582B (en) | 2024-04-05 |
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