CN112455781A

CN112455781A - Beat type packaging method for wafer transport box

Info

Publication number: CN112455781A
Application number: CN202011435297.6A
Authority: CN
Inventors: 王迪杏; 计时鸣; 王宁
Original assignee: Wuxi Diyuante Technology Co ltd
Current assignee: Wuxi Diyuante Technology Co ltd
Priority date: 2020-12-10
Filing date: 2020-12-10
Publication date: 2021-03-09

Abstract

The invention discloses a beat type packaging method of a wafer transport box, which adopts a device comprising a moving module, a feeding station, a first preparation station, a first nitrogen-filling transition station, a first nitrogen-filling station, a second nitrogen-filling transition station, a second nitrogen-filling station, a second preparation station, a bagging station, a sealing and shaping station, a packaging and checking station, a secondary packaging transition station and a blanking station. The beat type packaging method of the wafer transport box can complete a full-automatic nitrogen-filled one-layer packaging process, has high automation degree and high packaging efficiency in the whole process, and can continuously perform simultaneous packaging of a plurality of FOSB.

Description

Beat type packaging method for wafer transport box

Technical Field

The invention relates to the field of automatic packaging of front-opening chip packaging boxes, in particular to a beat type packaging method of a wafer transport box.

Background

The wafer refers to a silicon chip made of silicon semiconductor integrated circuits, and is called a wafer because the shape of the wafer is circular, the wafer is a carrier used for producing the integrated circuits, the wafer in general meaning is basically a monocrystalline silicon wafer, the monocrystalline silicon wafer is manufactured and extracted by common silicon sand, a monocrystalline silicon rod is supported after a plurality of series of errors are dissolved, purified and distilled, and the monocrystalline silicon rod becomes the wafer after being polished and sliced. With the continuous development of the integrated circuit manufacturing technology, the characteristic size of a chip is smaller and smaller, the number of interconnection layers is larger and larger, the diameter of a wafer is also increased, the surface of the wafer must have extremely high flatness, smoothness and cleanliness to realize multilayer wiring, and the wafer cannot be randomly packaged like common equipment in the transportation process in order to realize the flatness, smoothness and cleanliness of the surface of the wafer, so that a special wafer packaging box is particularly necessary.

The front Opening wafer transport Box is called a FOSBFront Opening Shipping Box for short, which is a packaging Box specially used for wafer transport. The FOSB can protect, transport and store the wafer, prevent the wafer from rubbing or colliding in the process of transporting, and provide safety protection for the wafer during transporting, transporting and storing. The FOSB has excellent air tightness and can effectively prevent the generation of substances.

The existing FOSB needs to be packaged before storage and transportation, the existing wafer packaging basically adopts manual packaging, the whole packaging process comprises five steps of shaping a packaging bag and putting the FOSB in the packaging bag, carrying out hot vacuum hot air on the packaging bag, reshaping the packaging bag again, winding an adhesive tape on the surface of the packaging bag and labeling, the whole process is basically completed by manpower, the packaging efficiency of manual packaging is low, and the packaging rhythm is influenced by manual proficiency and other various human factors; meanwhile, the quality of manual packaging is unstable, and the quality of packaging is uneven; when the manual package is packed for a long time, the manual package is easy to generate personnel fatigue, is easy to generate industrial injury, accidents and inevitable loss, is easy to waste resources and improves the cost of the whole package; the process flow during manual packaging is basically fixed, the packaging process cannot be flexibly modified, and staff basically need to be retrained again when the whole process is required to be modified, so that a large amount of time is wasted.

Compared with manual packaging, the full-automatic packaging of the FOSB has the advantages of higher packaging efficiency, more stable packaging quality, flexible process modification, greatly reduced personnel and tool loss and greatly reduced overhead cost. However, at the present stage, only the automatic packing device of the general transport case can be found, and the full automatic packing device specially used for the FOSB is almost difficult to see, and compared with the general transport, the FOSB has high requirements for packing because the round crystal loaded by the FOSB requires better stability and air tightness.

In order to ensure the stability and the air tightness of the FOSB during transportation, when the FOSB is packaged, according to the difference of transportation distance, transportation mode and storage mode, the FOSB sometimes needs to be packaged in a single layer, sometimes needs to be packaged in a double layer, sometimes needs to be packaged in a nitrogen-filled manner, sometimes needs to be packaged in a nitrogen-free manner, and in combination, five modes are usually existed when the FOSB is packaged: nitrogen-free one-layer package, nitrogen-filled one-layer package and mixed package. The mixed packaging refers to the packaging of the FOSB of the same batch in the first four modes according to the requirement, namely, the FOSB of the same batch is partially packaged without filling nitrogen for one layer, partially packaged with filling nitrogen for one layer, and partially packaged with filling nitrogen for one layer.

The packaging that does not fill nitrogen one deck packing that current ordinary full-automatic transport box packing plant can't realize FOSB, can only realize this single packing mode of the one deck packing that does not fill nitrogen usually, want to not fill nitrogen two-layer packing then need design two continuous production lines, to the mill of actual production, two continuous packing production lines of two-layer packing design that do not fill nitrogen one deck packing can be very big improvement manufacturing cost undoubtedly, and because the reduction of a wide margin of bottleneck link packing speed, can produce the wasting of resources of machine shut down simultaneously when the bottleneck festival. In the whole packaging production line, in a common packaging mode, the links of photographing identification, moisture card and drying agent release, packaging shaping and adhesive tape winding are most time-consuming bottleneck links, in the non-nitrogen-filling packaging process of FOSB, the links need about 1 minute, the nitrogen-filling process of the whole FOSB is prolonged to more than 1 minute on an independent production line, the operation of the neck ring section of the bottle, namely nitrogen filling, needs to be waited to finish after the work of other stations is finished, the operation can be continued, the packaging time is greatly wasted, the packaging efficiency is low, and therefore, the design of the beat type packaging method of the wafer transport box which can greatly save the packaging time and is compact is particularly necessary.

Disclosure of Invention

The invention aims to solve the problems that the conventional FOSB is basically packaged by manual packaging without filling nitrogen, the packaging efficiency is low, the packaging quality is unstable, and the packaging method of a common packaging box cannot meet the requirement of the FOSB packaging without filling nitrogen, and provides a beat type packaging method of a wafer transport box, which can improve the automation degree when the FOSB packaging without filling nitrogen is required, improve the packaging efficiency of the FOSB, reduce the labor cost, improve the packaging quality of a product, reduce the waiting time of other processes in a bottleneck link and improve the overall efficiency of the FOSB packaging.

The invention realizes the purpose through the following technical scheme: a beat type packaging method for a wafer transport box adopts a device comprising a moving module, a feeding ID reading station, a first labeling station, a first transition station, a first nitrogen filling station, a second transition station, a second nitrogen filling station, a desiccant humidity card discharging station, a bagging station, a vacuumizing shaping station, a tape winding station, a second labeling station, a blanking transition station and a blanking station, the first labeling station, the first transition station, the second transition station, the drying agent humidity card placing station, the bagging station, the vacuumizing shaping station, the adhesive tape winding station, the second labeling station and the blanking transition station are sequentially arranged in a station ring shape along the clockwise direction, the feeding ID reading station is arranged on one side of an inlet of the first labeling station, the first nitrogen charging station is arranged on the side surface of the first transition station, and the second nitrogen charging station is arranged on the side surface of the second transition station; the first transition station and the second transition station are nitrogen charging transition stations, and the first nitrogen charging station and the second nitrogen charging station are nitrogen charging stations; the feeding ID reading station, the first labeling station, the first transition station, the first nitrogen charging station, the second transition station, the second nitrogen charging station, the drying agent humidity card releasing station, the bagging station, the vacuumizing shaping station, the adhesive tape winding station, the second labeling station, the blanking transition station and the blanking station are all provided with moving modules, and the moving modules realize the movement of the FOSB among the stations; the feeding ID reading station is a station A, the first labeling station is a station B, the first transition station is a station C11, the first nitrogen filling station is a station C12, the second transition station is a station C21, the second nitrogen filling station is a station C22, the desiccant humidity card placing station is a station D, the bagging station is a station E, the vacuumizing and shaping station is a station F, the second labeling station and the adhesive tape winding station are stations G, the blanking transition station is a station I, and the blanking station is a station J; the full-automatic packaging method takes 60 seconds as a beat, and specifically comprises the following steps in the order of the beat:

beat 1: manually placing the FOSB into the station A, reading the RFID of the FOSB in the station A, and carrying out first photographing identification on the FOSB to obtain the ID information of the FOSB;

beat 2: moving the FOSB from station a into station B;

beat 3: rotating the FOSB in the station B, synchronously printing an internal ID label of the FOSB, pasting the internal ID label and an internal warning label of the FOSB on the FOSB, and then carrying out secondary photographing storage on the FOSB pasted with the internal ID label and the internal warning label;

beat 4: judging whether the previous FOSB exists in the station C12 and the station C22 or not, moving the FOSB to a nitrogen charging transition station adjacent to an idle nitrogen charging station, and if the station C22 is idle, moving the FOSB from the station B to the station C21; moving the FOSB from station B into station C11 if station C12 is idle;

beat 5: moving the FOSB from the station C11 or C21 to the station D, and carrying out the operations of placing a drying agent, a humidity card and taking a picture for the third time on the FOSB in the station D;

beat 6: e, carrying out operations of bag feeding, bag spreading and bag opening on the packaging bag at the station E; moving the FOSB from the station D to the station E, enabling the FOSB to enter a packaging bag of the station E, and pressing the bag at the station E;

beat 7: the FOSB is moved from station E to station F,

beat 8: performing vacuumizing, heat sealing and shaping operation on the bagged FOSB at a working position F;

beat 9: the FOSB is moved from station F to station G,

beat 10: carrying out tape winding operation on the FOSB, synchronously printing an outer ID label of the FOSB, pasting the outer ID label and an outer warning label of the FOSB on the FOSB, and carrying out fourth photographing storage on the FOSB pasted with the outer ID label and the outer warning label;

beat 11: moving the FOSB from station G into station I;

beat 12: the FOSB is moved from station I to station J, where the FOSB performs a blanking operation.

Further, the FOSB can be moved between the stations by a moving module.

Further, the packaging cycle of a single FOSB was 12 beats. In a packaging mode of a one-layer packaging without nitrogen filling, the time occupied by one FOSB packaging is 12 beats, and the redundant beats are set as misoperation beats, so that the time and space interference of mechanical action can be avoided.

Further, the material loading in station A is clapped fixedly, invariably is 2 beats of the material loading time delay of preceding FOSB. The feeding time is 2min last FOSB, and according to this material loading rhythm, no matter what kind of packing mode is adopted, the operation station chronogenesis in the beat is unanimous with the packing chronogenesis of the one deck packing that does not fill with nitrogen, need not to fill with nitrogen then cancels and fills with nitrogen action, and the spatial position when waiting also is unanimous, just so can not produce the space interference problem.

Further, when two FOSBs exist in any beat and one FOSB needs to move into a certain station and the other FOSB needs to leave the station, the movement of the FOSB with the previous sequence number is preferentially performed. Since the estimated time for the moving module to move between two stations is 16s, the previous FOSB of a certain station can be moved in and the next FOSB can be moved out completely in a single beat. The whole equipment sets up 12 beats and can have 6 FOSB to pack the operation simultaneously, and can not produce the interference each other. At most 30 FOSBs can be packaged per hour.

Further, in beat 3 ~ 5, take a picture the identification a total two kinds of purposes of the second time that carries out FOSB, one is whether correct in the interior ID label of judging the printing out, and another kind is whether the correct position of FOSB is pasted to interior ID label and interior warning label of inspection.

Further, the fourth photographing of the packaging bag of the FOSB in the beat 41-43 is performed to store two purposes, one is to judge whether the printed outer ID label is correct, and the other is to detect whether the outer ID label and the outer warning label are attached to the correct position of the FOSB.

The invention has the beneficial effects that:

1. the beat type packaging method of the wafer transport box can complete a full-automatic process of one-layer packaging without nitrogen filling, has high automation degree and high packaging efficiency in the whole process, and continuously packages a plurality of FOSB simultaneously.

2. The whole equipment adopted by the invention is arranged in a station ring manner, the whole structure is compact, the packaging efficiency is higher, the mechanical mechanism is simplified, the occupied area cost is reduced, the applicability of the whole packaging device is improved, and the research and development cost and the equipment purchase cost of a packaging manufacturer are reduced.

3. According to the station ring layout, the station ring arranges each operation work required by the FOSB packaging process along the clockwise direction, the FOSB in the package sequentially passes through different stations one by one along the clockwise direction and completes the corresponding packaging operation, the whole station ring can accommodate a plurality of FOSB to synchronously complete the packaging operation on different stations, a plurality of packages are carried out simultaneously, the whole packaging efficiency is improved, and meanwhile, the effective floor area of the FOSB is reduced.

4. The invention adopts a mode design of packaging time consumption, the packaging time consumption of all the packages is consistent, the packaging process is the simplest, the packaging process is the most efficient under the condition of avoiding errors, the time and space interference of mechanical actions generated by a plurality of FOSB packaging paper can be better avoided, and the occupied working procedure of subsequent workpieces in the packaging process can be better avoided.

5. The two nitrogen charging stations are arranged, the nitrogen charging operation can be carried out, nitrogen can be simultaneously charged into two FOSB, the time consumption of the nitrogen charging link is long, the nitrogen charging link is a bottleneck link of FOSB packaging, the overall packaging efficiency can be obviously improved by arranging the two nitrogen charging stations, the single packaging time can be reduced to half of the original packaging time, and the beat time sequence needs to be redesigned when the nitrogen charging station is applied because the nitrogen charging link is a nitrogen charging release requiring 12 minutes.

6. According to the FOSB packaging method, the packaging cycle of a single FOSB is 12 beats, the packaging time of one FOSB is 12 beats, and redundant beats are set as misoperation beats, so that the time and space interference of mechanical action can be avoided.

7. According to the feeding rhythm, no matter what packaging mode is adopted, the operation station time sequence in the rhythm is consistent with the packaging time sequence of the packaging layer without nitrogen charging, the nitrogen charging action is cancelled without nitrogen charging, and the space position during waiting is consistent, so that the problem of space interference is avoided.

8. The two-stage packaging machine is provided with the secondary packaging transition station which is arranged adjacent to the first preparation station and the blanking station, so that the FOSB after the primary packaging is finished can directly enter the blanking station to finish the packaging and can also continuously enter the station ring from the first preparation station to perform the secondary packaging, namely, the nitrogen-filled two-stage packaging can be realized, and the secondary packaging is realized in the same equipment, thereby greatly reducing the cost of the secondary packaging, reducing the cost of the whole equipment and reducing the occupied area of the equipment.

Drawings

Fig. 1 is a schematic overall flow chart of a method for packaging a wafer shipping box in a time-beat manner according to the present invention.

Wherein the solid line is a primary packaging process, and the dotted line is a secondary packaging process when secondary packaging is needed.

Fig. 2 is a schematic view showing the connection of the stations in the method for packaging the wafer shipping box in a time-beat manner according to the present invention.

FIG. 3 is an isometric view of an FOSB full-automatic packaging apparatus of the invention for nitrogen-free one-layer packaging.

FIG. 4 is a front view of an FOSB full-automatic packaging device for nitrogen-free one-layer packaging according to the present invention.

Fig. 5 is a schematic view of the overall structure of the feed ID reading station and the first labelling station of the present invention.

Fig. 6 is a schematic diagram of the overall structure of a desiccant humidity card station of the present invention.

Fig. 7 is a schematic view of the overall structure of the bagging station of the invention.

Fig. 8 is a schematic view of the overall structure of the vacuum-pumping shaping station of the present invention.

Fig. 9 is a schematic view showing the overall structure of the taping station of the present invention.

Fig. 10 is a schematic view of the overall structure of the second labelling station according to the invention.

FIG. 11 is a schematic view of the structure of the FOSB of the present invention.

Fig. 12 is a schematic structural view of a top moving module in the moving module of the present invention.

Fig. 13 is a schematic view of the construction of a rotary elevating translating conveyor belt in a moving module of the present invention.

In the figure, 1-feeding ID reading station, 2-first labeling station, 3-first transition station, 4-first nitrogen charging station, 5-second transition station, 6-second nitrogen charging station, 7-desiccant humidity card discharging station, 8-bagging station, 9-vacuumizing shaping station, 10-tape winding station, 11-second labeling station, 12-blanking transition station, 13-blanking station, 14-FOSB, 101-top moving horizontal linear module 101, 102-top moving vertical linear module 102, 103-top moving clamping jaw 103, 104-top clamping jaw connecting plate 104, 201-feeding platform 201, 202-top moving module 202, 203-ID label printing and stripping device 203, 204-warning label stripping device 204, 3-warning label stripping device 204, 205-ID label labeling device 205, 206-warning labeling device 206, 207-second shooting camera 207, 208-conveyor belt platform 208, 209-platform lifting cylinder 209, 210-platform rotating motor 210, 701-drying agent discharging bin 701, 702-humidity card discharging bin 702, 703-upper conveying device 703, 704-grabbing sucker 704, 705-cylinder pushing device 705, 706-first FOSB conveyor belt 706, 801-bag opening device 801, 802-upper end sucker three-degree-of-freedom driving device 802, 803-upper surface adsorption sucker group 803, 804-lower surface adsorption sucker group 804, 805-bag pressing device 805, 806-second FOSB conveyor belt 806, 807-bag tail positioning device 807, 808-packaging bag storage bin 808, 901-third FOSB conveyor belt 901, 902-bag pressing opening devices 902, 903-vacuum devices 903, 904-sealing devices 904, 905-sealing station horizontal driving devices 905, 906-FOSB front end shaping devices 906 and 907-FOSB rear end side shaping devices 907.

Detailed Description

The invention will be further described with reference to the accompanying drawings in which:

as shown in fig. 1-13, a beat-to-beat packing method for a wafer transport case, the adopted device comprises a moving module, a feeding ID reading station 1, a first labeling station 2, a first transition station 3, a first nitrogen charging station 4, a second transition station 5, a second nitrogen charging station 6, a drying agent humidity card discharging station 7, a bagging station 8, a vacuum-pumping shaping station 9, a tape-winding station 10, a second labeling station 11, a blanking transition station 12 and a blanking station 13, wherein the first labeling station 2, the first transition station 3, the second transition station 5, the drying agent humidity card discharging station 7, the bagging station 8, the vacuum-pumping shaping station 9, the tape-winding station 10, the second labeling station 11 and the blanking transition station 12 are sequentially arranged in a station ring-shaped manner along a clockwise direction, the feeding ID reading station 1 is arranged at one side of an inlet of the first labeling station 2, the first nitrogen charging station 4 is arranged at a side surface of the first transition station 3, the second nitrogen filling station 6 is arranged on the side surface of the second transition station 5; the first transition station 3 and the second transition station 5 are nitrogen charging transition stations, and the first nitrogen charging station 4 and the second nitrogen charging station 6 are nitrogen charging stations; the feeding ID reading station 1, the first labeling station 2, the first transition station 3, the first nitrogen filling station 4, the second transition station 5, the second nitrogen filling station 6, the drying agent humidity card placing station 7, the bagging station 8, the vacuumizing shaping station 9, the adhesive tape winding station 10, the second labeling station 11, the discharging transition station 12 and the discharging station 13 are all provided with moving modules, and the moving modules realize the movement of FOSB among the stations; the feeding ID reading station 1 is a station A, the first labeling station 2 is a station B, the first transition station 3 is a station C11, the first nitrogen filling station 4 is a station C12, the second transition station 5 is a station C21, the second nitrogen filling station 6 is a station C22, the desiccant humidity card releasing station 7 is a station D, the bagging station 8 is a station E, the vacuumizing and shaping station 9 is a station F, the second labeling station 11 and the tape winding station 10 are stations G, the blanking transition station 12 is a station I, and the blanking station 13 is a station J; the full-automatic packaging method takes 60 seconds as a beat, and specifically comprises the following steps in the order of the beat:

beat 2: moving the FOSB from station a into station B;

beat 7: the FOSB is moved from station E to station F,

beat 9: the FOSB is moved from station F to station G,

beat 11: moving the FOSB from station G into station I;

The FOSB can be moved between the stations by a moving module.

The packaging cycle of a single FOSB was 12 beats. In a packaging mode of a one-layer packaging without nitrogen filling, the time occupied by one FOSB packaging is 12 beats, and the redundant beats are set as misoperation beats, so that the time and space interference of mechanical action can be avoided.

The material loading in station A is fixed in rhythm, and invariably is 2 beats of the material loading time delay of preceding FOSB. The feeding time is 2min last FOSB, and according to this material loading rhythm, no matter what kind of packing mode is adopted, the operation station chronogenesis in the beat is unanimous with the packing chronogenesis of the one deck packing that does not fill with nitrogen, need not to fill with nitrogen then cancels and fills with nitrogen action, and the spatial position when waiting also is unanimous, just so can not produce the space interference problem.

When two FOSBs exist in any beat, and one FOSB needs to move into a certain station and the other FOSB needs to leave the station, the movement of the FOSB with the previous sequence number is preferentially carried out. Since the estimated time for the moving module to move between two stations is 16s, the previous FOSB of a certain station can be moved in and the next FOSB can be moved out completely in a single beat. The whole equipment sets up 12 beats and can have 6 FOSB to pack the operation simultaneously, and can not produce the interference each other. At most 30 FOSBs can be packaged per hour.

In beat 3 ~ 5, take a picture the recognition for the second time that FOSB goes on two total purposes, one is whether correct in the ID label of judging the printing out, and another kind is whether the correct position of FOSB is pasted to ID label in the inspection and interior warning label.

The fourth photographing and storing of the packaging bag of the FOSB in the beat 41-43 has two purposes, one is to judge whether the printed outer ID label is correct, and the other is to detect whether the outer ID label and the outer warning label are attached to the correct position of the FOSB.

The moving modules of the present invention-there are two modes of top moving module 202 and roto-translating elevator conveyor, wherein the structure of the top moving module 202 is shown in fig. 12, the top moving module 202 comprises a top moving horizontal linear module 101, a top moving vertical linear module 102, a top moving clamping jaw 103 and a top clamping jaw connecting plate 104, the top moving vertical linear module 102 is fixed on a slide block of the top moving horizontal linear module 101, the top clamping jaw connecting plate 104 is fixed on a slide block of the top moving vertical linear module 102, the top moving clamping jaw 103 is installed on the top clamping jaw connecting plate 104, when in operation, the top moving vertical linear module 102 controls the top moving clamping jaw 103 to move up and down, the top moving clamping jaw 103 is provided with an air cylinder for controlling the top moving clamping jaw 103 to open and close, the grasping part above the FOSB14 is grasped by the opening and closing of the top moving jaw 103; after grasping the FOSB14, the top moving horizontal linear module 101 drives the entire top moving jaw 103 and FOSB14 to move to an adjacent station.

The structure of the rotary translation lifting conveyor belt is shown in fig. 13, the rotary translation lifting conveyor belt comprises a conveyor belt platform 208 at the top, a platform lifting cylinder 209 for driving the conveyor belt platform 208 to lift and a platform rotating motor 210 for driving the conveyor belt platform 208 to rotate, the conveyor belt platform 208 is provided with a conveyor belt capable of moving horizontally, the platform rotating motor 210 is connected with a rotating shaft below the conveyor belt platform 208 through a synchronous belt mechanism and drives the conveyor belt platform 208 to rotate through the rotation of the rotating shaft, and the platform lifting cylinder 209 drives the conveyor belt platform 208 and the platform rotating motor 210 to lift and fall integrally.

The feeding ID reading station 1 comprises a feeding platform 201, a first shooting camera and a top moving module 202, wherein the feeding platform 201 is arranged under the top moving module 202, the feeding platform 201 is arranged on one side of a first labeling station 2, and the first shooting camera is arranged over the feeding platform 201.

The first labeling station 2 comprises an ID label printing and stripping device 203, a warning label stripping device 204, an ID label labeling device 205, a warning label labeling device 206, a rotary translation lifting conveyor belt and a second shooting camera 207, wherein the ID label printing and stripping device 203 prints an ID label and strips the ID label from base paper of label paper, and the ID label labeling device 205 adsorbs the ID label stripped by the ID label printing and stripping device 203 through a sucking disc and pastes the ID label to FOSB 14; the warning label peeling device 204 prints out a warning label and peels the warning label from the base paper of the label paper, and the warning label labeling device adsorbs the warning label peeled out by the warning label peeling device 204 through a sucking disc and pastes the warning label on the FOSB 14; the ID label printing label stripping device 203 and the warning label stripping device 204 both adopt a mode that two straight line modules are matched with a rotary cylinder to realize the transfer of the positions of the ID label and the warning label. The FOSB14 is located on a roto-translating elevating conveyor belt that is positioned in the path that the ID label labeling apparatus 205 and the warning label labeling apparatus 206 are operating through.

According to the invention, a first transition station 3 and a first nitrogen charging station 4 are arranged, a second nitrogen charging station 6 and a second transition station 5 are arranged adjacently, rotary translation lifting conveyor belts are arranged at the bottoms of the first transition station 3 and the second transition station 5, and the FOSB14 is transferred through the rotary translation lifting conveyor belts; the top moving module 202 is arranged above the first nitrogen charging station 4 and the second nitrogen charging station 6, and the FOSB14 in the first transition station 3 and the second transition station 5 is clamped into the first nitrogen charging station 4 and the second nitrogen charging station 6 by the top moving module 202.

The drying agent humidity card placing station 7 comprises a gluing device, a drying agent discharging bin 701, a humidity card discharging bin 702, an upper conveying device 703, a grabbing sucker 704, an air cylinder pushing device 705 and a FOSB conveying belt 706, wherein when the FOSB14 enters the drying agent humidity card placing station 7 from a second transition station 5, the FOSB is directly conveyed to the FOSB conveying belt 706 and is taken to a designated position by the FOSB conveying belt 706, the upper conveying device 703 is a three-degree-of-freedom driving device consisting of three groups of linear modules, the grabbing sucker 704 is fixed at the movable end of the upper conveying device 703, the gluing device is arranged above the conveying belt, the gluing device coats a layer of glue on the FOSB14, the upper conveying device 703 drives the grabbing sucker 704 to grab a drying agent and a humidity card out of the drying agent discharging bin 701 and the humidity card discharging bin 702, and the desiccant and humidity card is attached to the position where the FOSB14 is coated with glue, the cylinder pusher 705 pushes FOSB14 from the desiccant humidity card placing station 7 to the bagging station 8.

The bagging station 8 comprises a bag opening device 801, an upper end sucker three-degree-of-freedom driving device 802, an upper surface adsorption sucker group 803, a lower surface adsorption sucker group 804, a bag pressing device 805, a second FOSB conveyor belt 806, a bag tail positioning device 807 and a packaging bag storage bin 808, the upper end sucking disc three-freedom degree driving device 802 is a three-freedom degree driving mechanism consisting of three linear modules, an upper surface sucking disc group 803 is arranged at the movable end of the upper end sucking disc three-freedom degree driving device 802, sucking discs on the upper surface sucking disc group 803 are integrally T-shaped, a bag pressing device 805, a second FOSB conveying belt 806, a lower surface sucking disc group 804 and a bag tail positioning device 807 are sequentially arranged according to the moving direction of the FOSB14, when the upper end sucker three-degree-of-freedom driving device 802 moves, the upper end sucker three-degree-of-freedom driving device passes through the packaging bag storage bin 808, the lower surface adsorption sucker group 804, the bag tail positioning device 807 and the second FOSB conveyor belt 806; when the upper-end sucker three-degree-of-freedom driving device 802 works, the upper-surface sucker group 803 adsorbs a packaging bag on the packaging bag storage bin 808 and sends the packaging bag to the bag tail positioning device 807, the second FOSB conveyor belt 806 and the upper part of the lower-surface sucker group 804, the bag tail positioning device 807 positions the bag tail of the packaging bag through positioning blocks driven by two cylinders, the lower-surface sucker group 804 adsorbs the bag mouth position of the packaging bag and is matched with the upper-surface sucker group 803 to adsorb the upper half part of the packaging bag, and when the upper-surface sucker group 803 adsorbs the packaging bag, the upper-end sucker three-degree-of-freedom driving device 802 drives the upper-surface sucker group 803 to ascend to; the bag opening device 801 clamps the bag opening of the packaging bag by using electric clamping jaws driven by the two groups of linear modules to maintain the packaging bag in an unfolded state, and a track of the bag opening device 801 directly extends to the next vacuumizing shaping station 9; for the clamp plate that sets up and open through the cylinder in wrapping bag sack department, the lower part sack that can push down the wrapping bag is pushed down to the clamp plate when the wrapping bag expandes to make FOSB14 can get into the wrapping bag on the clamp plate smoothly, FOSB14 is located No. two FOSB conveyer belt 806 behind the whole entering wrapping bag of FOSB14, and No. two FOSB conveyer belt 806 is used for sending into next evacuation plastic station 9 with FOSB 14.

The vacuumizing and shaping station 9 comprises a third FOSB conveyor belt 901, a bag mouth pressing device 902, a vacuumizing device 903, a sealing device 904, a sealing station horizontal driving device 905, a FOSB front end shaping device 906 and a FOSB rear end shaping device 907, wherein the bag mouth pressing device 902, the vacuumizing device 903 and the sealing device 904 are arranged on the same movable sealing rack, the movable sealing rack is pushed by the horizontal driving device 905 to move towards the front of the FOSB14, the FOSB14 is arranged on the third FOSB conveyor belt 901, the FOSB front end shaping device 906 and the FOSB rear end shaping device 907 are arranged above the third FOSB conveyor belt 901, the bag mouth pressing device 902 presses the bag mouth of the FOSB14 through an upper pressing plate and a lower pressing plate, the vacuumizing device 903 penetrates through a duckbilled suction pipe and then extends into the packaging bag to vacuumize the FOSB14, the sealing device 904 performs sealing operation on the bag mouth pressing part of the bag mouth pressing device 902 after the vacuumizing operation is finished, the sealing operation may be a heat sealing or an ultrasonic sealing.

FOSB front end shaping device 906 includes the vertical straight line module of front end plastic, front end plastic deflector, front end plastic revolving cylinder and front end shaping plate, the front end plastic deflector is installed on the slider of the vertical straight line module of front end plastic and is set up in the positive top of FOSB14, the front end plastic deflector can flatten the positive wrapping bag of FOSB14 when descending under the drive of the vertical straight line module of front end plastic on the positive surface of FOSB14, two front end shaping plates pass through front end plastic revolving cylinder and install in front end plastic deflector both sides, thereby the rotation of front end shaping plate is pressed on FOSB 14's side to the both sides that drive the positive wrapping bag of FOSB14 to the front end plastic revolving cylinder.

The FOSB rear end side shaping device 907 comprises a movable cross beam, a ball screw system for driving the movable cross beam to vertically lift, a side shaping plate, a back shaping plate, a side shaping linear module for driving the side shaping plate to approach to the FOSB14, a back shaping linear module for driving the back shaping plate to approach to the FOSB14, wherein the side shaping linear module and the back shaping linear module are both fixed on the movable cross beam, the side shaping plate is fixed on a slide block of the side shaping linear module, the back shaping plate is fixed on a slide block of the back shaping linear module, the ball screw system drives the movable cross beam to lift so as to drive the side shaping plate and the back shaping plate, the side shaping linear module drives the side shaping plate to approach to and attach to the side front side of the FOSB14, thereby realizing the shaping of the side front side of the FOSB14, the back shaping linear module drives the back shaping plate to approach to and attach to the side rear side and the back of the, thereby realize the plastic of FOSB14 side rear side and back, the profile design of the contact surface of back shaping board and side shaping board and FOSB14 and FOSB 14's side and surface for can obtain better plastic effect during the plastic.

The adhesive tape winding station 10 comprises a rotary translation lifting conveyor belt and an adhesive tape winding mechanism, wherein the FOSB14 is arranged on the rotary translation lifting conveyor belt, and the adhesive tape winding mechanism winds the adhesive tape on the FOSB14 and then winds the adhesive tape on the FOSB14 through the rotation of the rotary translation lifting conveyor belt.

The second labelling station 11 of the present invention has a configuration identical to that of the first labelling station 2. And rotary translation lifting conveyor belts are arranged below the blanking transition station 12 and the blanking station 13.

The above embodiments are only preferred embodiments of the present invention, and are not intended to limit the technical solutions of the present invention, so long as the technical solutions can be realized on the basis of the above embodiments without creative efforts, which should be considered to fall within the protection scope of the patent of the present invention.

Claims

1. A beat type packaging method of a wafer transport box is characterized in that: the device comprises a moving module, a feeding ID reading station (1), a first labeling station (2), a first transition station (3), a first nitrogen filling station (4), a second transition station (5), a second nitrogen filling station (6), a drying agent humidity card releasing station (7), a bagging station (8), a vacuumizing shaping station (9), a tape winding station (10), a second labeling station (11), a blanking transition station (12) and a blanking station (13), wherein the first labeling station (2), the first transition station (3), the second transition station (5), the drying agent humidity card releasing station (7), the bagging station (8), the vacuumizing shaping station (9), the tape winding station (10), the second labeling station (11) and the blanking transition station (12) are sequentially distributed in a station ring along the clockwise direction, the feeding ID reading station (1) is arranged on one side of an inlet of the first labeling station (2), the first nitrogen filling station (4) is arranged on the side surface of the first transition station (3), and the second nitrogen filling station (6) is arranged on the side surface of the second transition station (5); the first transition station (3) and the second transition station (5) are nitrogen charging transition stations, and the first nitrogen charging station (4) and the second nitrogen charging station (6) are nitrogen charging stations; the feeding and ID reading station (1), the first labeling station (2), the first transition station (3), the first nitrogen filling station (4), the second transition station (5), the second nitrogen filling station (6), the drying agent humidity releasing and clamping station (7), the bagging station (8), the vacuumizing and shaping station (9), the adhesive tape winding station (10), the second labeling station (11), the blanking transition station (12) and the blanking station (13) are all provided with moving modules, and the moving modules realize the movement of the FOSB among the stations; the feeding ID reading station (1) is a station A, the first labeling station (2) is a station B, the first transition station (3) is a station C11, the first nitrogen filling station (4) is a station C12, the second transition station (5) is a station C21, the second nitrogen filling station (6) is a station C22, the desiccant humidity card placing station (7) is a station D, the bagging station (8) is a station E, the vacuumizing shaping station (9) is a station F, the second labeling station (11) and the adhesive tape winding station (10) are stations G, the blanking transition station (12) is a station I, and the blanking station (13) is a station J; the full-automatic packaging method takes 36 seconds as a beat, and specifically comprises the following steps in the order of the beat:

beat 1: manually placing an FOSB to the station A in each 12 beats, reading the RFID of the FOSB in the station A, and carrying out first photographing identification on the FOSB to obtain the ID information of the FOSB;

beat 2: moving the FOSB from station a into station B;

beat 3-5: rotating the FOSB in the station B, synchronously printing an internal ID label of the FOSB, pasting the internal ID label and an internal warning label of the FOSB on the FOSB, and then carrying out secondary photographing storage on the FOSB pasted with the internal ID label and the internal warning label;

beat 6: judging whether the previous FOSB exists in the station C12 and the station C22 or not, moving the FOSB to a nitrogen charging transition station adjacent to an idle nitrogen charging station, and if the station C22 is idle, moving the FOSB from the station B to the station C21; moving the FOSB from station B into station C11 if station C12 is idle;

beat 7: moving the FOSB from the corresponding nitrogen charging transition station into the nitrogen charging station according to the movement of the FOSB in the beat 6, and moving the FOSB from the station C11 into the station C12 if the FOSB is in the station C11; moving the FOSB from station C21 to station C22 if the FOSB is now in station C21;

beat 8-28: carrying out nitrogen filling operation on the FOSB in a nitrogen filling station, wherein the nitrogen filling time is 12 min;

beat 29: moving the current FOSB into an adjacent nitrogen-charging transition station according to the position of the current FOSB, if the current FOSB is in station C22, moving the FOSB from station C22 into C21, and if the current FOSB is in station C12, moving the FOSB from station C12 into station C11;

beat 30: moving the FOSB from station C11 or C21 to station D;

beat 31-33: placing a drying agent and a humidity card in the FOSB in the station D and carrying out a third photographing operation;

beat 34: e, carrying out operations of bag feeding, bag spreading and bag opening on the packaging bag at the station E;

beat 35: moving the FOSB from station D to station E, and enabling the FOSB to enter a packaging bag of the station E;

beat 36: performing bag pressing operation at a station E;

beat 37: the FOSB is moved from station E to station F,

beat 38-39: performing vacuumizing, heat sealing and shaping operation on the bagged FOSB at a working position F;

beat 40: the FOSB is moved from station F to station G,

beat 41-43: carrying out tape winding operation on the FOSB, synchronously printing an outer ID label of the FOSB, pasting the outer ID label and an outer warning label of the FOSB on the FOSB, and carrying out fourth photographing storage on the FOSB pasted with the outer ID label and the outer warning label;

beat 44: moving the FOSB from station G to station I;

beat 45: the FOSB is moved from station I to station J, where the FOSB performs a blanking operation.

2. The method for packaging a wafer shipping box in a time-beat manner as set forth in claim 1, wherein: the FOSB can be moved between the stations by a moving module.

3. The method for packaging a wafer shipping box in a time-beat manner as set forth in claim 1, wherein: the packaging cycle of a single FOSB was 45 beats.

4. The method for packaging a wafer shipping box in a time-beat manner as set forth in claim 1, wherein: the material loading in station A is fixed in rhythm, and invariably is 12 beats of the material loading time delay of previous FOSB.

5. The method for packaging a wafer shipping box in a time-beat manner as set forth in claim 1, wherein: in beat 3 ~ 5, take a picture the recognition for the second time that FOSB goes on two total purposes, one is whether correct in the ID label of judging the printing out, and another kind is whether the correct position of FOSB is pasted to ID label in the inspection and interior warning label.

6. The method for packaging a wafer shipping box in a time-beat manner as set forth in claim 1, wherein: the fourth photographing and storing of the packaging bag of the FOSB in the beat 41-43 has two purposes, one is to judge whether the printed outer ID label is correct, and the other is to detect whether the outer ID label and the outer warning label are attached to the correct position of the FOSB.