CN112442673A - Film coating jig - Google Patents
Film coating jig Download PDFInfo
- Publication number
- CN112442673A CN112442673A CN202011456617.6A CN202011456617A CN112442673A CN 112442673 A CN112442673 A CN 112442673A CN 202011456617 A CN202011456617 A CN 202011456617A CN 112442673 A CN112442673 A CN 112442673A
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- Prior art keywords
- push
- strip
- groove
- pull
- hole
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- 239000007888 film coating Substances 0.000 title claims abstract description 12
- 238000009501 film coating Methods 0.000 title claims abstract description 12
- 239000011248 coating agent Substances 0.000 claims abstract description 25
- 238000000576 coating method Methods 0.000 claims abstract description 25
- 230000000903 blocking effect Effects 0.000 claims description 13
- 238000007747 plating Methods 0.000 claims 4
- 238000003780 insertion Methods 0.000 description 12
- 230000037431 insertion Effects 0.000 description 12
- 238000005452 bending Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Clamps And Clips (AREA)
Abstract
The invention discloses a film coating jig, which comprises: the body that has the recess, the fixed strip of overlap joint on the both sides upper end of recess, be equipped with a plurality of first pilot holes on the fixed strip, first pilot hole has a communicating jack portion and an opening and is less than the jack portion open-ended draw-in hole portion, remove the push-out strip of locating on the fixed strip, it is equipped with a plurality of second pilot holes to correspond on the push-out strip, through removing push-out strip to the first position, insert the jack portion of a second pilot hole and a first pilot hole that correspond about the assembly portion of a product inserts in proper order, and through removing push-out strip to the second position, it removes and blocks in the card hole portion of first pilot hole to drive messenger's assembly portion, make the product kept on coating film tool. The invention can realize one-time quick clamping of a plurality of products and effectively improve the efficiency.
Description
Technical Field
The invention relates to a coating jig for the field of coating.
Background
Such as key products, etc., have been widely used in various electronic devices (e.g., mobile phones) in the 3C industry. According to design requirements, the surface of the key product is often required to be subjected to coating (such as PVD coating).
Referring to fig. 1, a conventional key product 10 is shown. The key product 10 has the shape of an elongated circular body 11, the upper surface and side areas of which belong to the areas to be coated. The key product 10 is provided with a downward protruding pin 12 on the bottom surface, and the pin 12 has a ring groove 13 in the middle of the side surface, and the ring groove 13 (detent) can be used for assembling with an electronic device.
When the key product is subjected to film coating treatment, the key product is manually and singly arranged in an assembly hole on a common film coating jig, and the key product is manually slid and clamped on the film coating jig for clamping. However, this approach has the following disadvantages:
(1) the product is easy to be neglected or not installed in place due to human negligence.
(2) The product can only be manually clamped singly, and the clamping is very inconvenient, so that the efficiency is low.
Therefore, a novel coating jig which can be installed in place during clamping and can improve the clamping efficiency needs to be designed.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a film coating jig.
One technical solution of the present invention to achieve the above object is:
a coating jig comprising:
the body is provided with grooves arranged along the length direction;
the fixing strip is lapped on the upper ends of two sides of the groove along the length direction, a plurality of first assembling holes arranged along the length direction are arranged on the surface of the fixing strip, each first assembling hole is provided with a communicated jack part and a clamp hole part with an opening smaller than that of the jack part, and the center line of each first assembling hole is consistent with the center line of the groove in direction;
the push-pull strip is positioned on the fixing strip and is movably arranged on the upper ends of the two sides of the groove along the length direction, and a plurality of second assembling holes arranged along the length direction are formed in the surface of the push-pull strip;
the assembling portion of a product is sequentially inserted into the corresponding jack portions of the second assembling hole and the first assembling hole from top to bottom by moving the push-pull strip to the first position, and the assembling portion is driven to move and clamped into the clamping hole portion of the first assembling hole by moving the push-pull strip to the second position, so that the product is kept on the film coating jig.
Further, still include: the side plates are arranged on two sides of the body along the length direction, bent portions arranged in opposite directions are arranged at the upper ends of the side plates, so that a pair of clamping grooves are formed in the upper ends of two sides of the groove, and the push-pull strip is arranged in the clamping grooves in a matched mode.
Further, still include: a limit for constraining movement of the push-pull strip between the first position and the second position.
Furthermore, the limiting device comprises a first blocking surface arranged in the groove and used for defining the first position, a second blocking surface used for defining the second position, and a blocking block which is protrudingly arranged on the bottom surface of the push-pull strip and is accommodated between the first blocking surface and the second blocking surface in a matching manner.
Furthermore, the limit is arranged at the first end of the groove, the end surface of the fixing strip corresponding to one end is used as the first blocking surface, the first end of the groove is a blind end limited in the body, the inner wall of the blind end is used as the second blocking surface, and the stop block is arranged at the end part of the push-pull strip corresponding to one end and protrudes downwards to be accommodated between the end surface of the fixing strip corresponding to one end and the blind end of the groove.
Furthermore, the end face of one corresponding end of the fixing strip is fork-shaped, and the bottom face of the fork-shaped is used as the first blocking face.
Furthermore, the push-pull strip is of a double-layer structure which is overlapped and fixed mutually.
Further, the width of one of the push-pull strips located on the upper layer is smaller than the width of one of the push-pull strips located on the lower layer.
Furthermore, a handle is arranged at the end part of the other end of the push pull strip corresponding to the second end of the groove.
Further, the handle is T-shaped.
Compared with the prior art, the invention has the following advantages:
(1) the coating jig can be used for carrying out alignment and insertion type synchronous clamping by pre-arranging a plurality of products, and the phenomenon that the products are not installed or are not installed in place can be avoided.
(2) After a plurality of products are synchronously preassembled on the coating jig, the pushing and pulling strip only needs to be pushed once, the simultaneous clamping process of the products can be completed, and the efficiency is effectively improved.
Drawings
Fig. 1 is a schematic diagram of an outline structure of a conventional key product requiring film coating.
Fig. 2 is an exploded view of a coating fixture according to a preferred embodiment of the present invention.
Fig. 3 is an enlarged view of a portion of the fixing bar of fig. 2.
Fig. 4 is a schematic view of a combination structure between the side plate and the body in fig. 2.
Fig. 5-6 are schematic views illustrating a usage status of a coating fixture according to a preferred embodiment of the invention.
In the figure, 10 is a key product, 11 is an oblong body, 12 is a pin (assembly part), 13 is an annular groove, 20 is a coating jig, 21 is a side plate, 211 is a bending part, 22 is a body, 221 is a groove, 23 is a fixing strip, 231 is a first blocking surface, 232 is a first assembly hole, 2321 is a jack part, 2322 is a clamping hole part, 24 is a push-pull strip, 241 is a stop block, 242 is a second assembly hole, 243 is a handle.
Detailed Description
In order to better understand the technical solution of the present invention, the following detailed description is given by way of specific examples.
Please refer to fig. 2. Taking an example (but not limited to) that a coating fixture 20 of the present invention is applied to the key product 10 of fig. 1 requiring coating, a coating fixture 20 of the present invention may include: the body 22, the side plate 21, the fixing strip 23, and the push-pull strip 24. Wherein, the side plates 21 are installed on both sides of the body 22, and the fixing bar 23 and the push-pull bar 24 are sequentially installed on the upper end of the body 22.
Please refer to fig. 2. In a preferred embodiment, the body 22 may be elongated, for example, the body 22 may be rectangular and elongated. A groove 221 is provided in the upper surface of the rectangular body 22 along the length of the body 22. The opening of the groove 221 is disposed upward. The groove 221 may be open at both ends or closed (or closed at one end).
The fixing bar 23 may have a long bar shape corresponding to the body 22. The fixing strip 23 is overlapped on the upper ends of both sides of the groove 221 along the length direction of the body 22 (the groove 221), and is fixedly mounted with the upper ends of both sides of the groove 221 (the upper end of the body 22). For example, the fixing bar 23 may be welded to the upper end surfaces of the two sides of the groove 221 to block the opening of the groove 221 from above the groove 221.
A plurality of first fitting holes 232 arranged in the length direction of the fixing bar 23 are processed on the surface of the fixing bar 23. The first fitting hole 232 has a hole insertion portion 2321 and a hole locking portion 2322 that is smaller in opening than the hole insertion portion 2321 in communication therewith, as shown in fig. 3. The fastening hole 2322 may have a uniform transverse opening width, or one end of the fastening hole 2322 away from the insertion hole 2321 may have a transverse opening width slightly larger than the other end of the fastening hole 2321 close to the insertion hole 2321, so that a waist-shaped section with a contracted opening is formed at a transition region between the insertion hole 2321 and the fastening hole 2322.
The first assembling holes 232 on the fixing bar 23 are oriented in the same direction, that is, the fastening hole 2322 of each first assembling hole 232 on the fixing bar 23 is uniformly disposed toward the same end of the body 22 (the groove 221).
The first fitting hole 232 may be designed in an axisymmetrical structure. At this time, the center line (axis) of each first fitting hole 232 coincides with the center line direction of the groove 221. Further, the center lines of the first fitting holes 232 of the fixing bar 23 coincide with each other and with the center line of the groove 221.
In a preferred embodiment, the insertion hole portions 2321 on the first assembly holes 232 have a diameter (caliber) significantly larger than that of the pins (assembly portions) 12 of the key product 10, i.e., the insertion hole portions 2321 are not used for cooperating with the pins 12, but serve to allow the pins 12 to be smoothly received into the insertion hole portions 2321. In other words, the shape of the socket portion 2321 need not conform to the pin 12 (i.e., may not be limited to a circular shape) as long as the pin 12 can be smoothly inserted. The feature of the ring groove 13 on the pin 12 can be utilized to design the opening of the hole-fastening portion 2322 to be capable of fitting with the diameter of the ring groove 13 (fastening position) in a clearance manner, but smaller than the width of the other side portion of the pin 12 except the ring groove 13. Meanwhile, the thickness of the fixing bar 23 is designed to be smaller than the opening height of the ring groove 13.
Please refer to fig. 2. The push-pull strip 24 may likewise be elongated corresponding to the body 22 and disposed over the fixed strip 23. Meanwhile, the push-pull strip 24 is arranged to move lengthwise on both upper ends of the groove 221, i.e., the push-pull strip 24 can move lengthwise in translation relative to the fixed strip 23.
In an alternative embodiment, to enable the push-pull strip 24 to translate across the groove 221, a catch may be provided on the upper end of the groove 221, with the push-pull strip 24 fitting into the catch to translate along the catch relative to the underlying fixed strip 23.
In an alternative embodiment, the body 22 may be assembled to form a slot structure. For example, the upper end (in the longitudinal direction) of each side plate 21 may be bent by a pair of side plates 21 disposed separately from the body 22, so that one bent portion 211 is formed at the upper end portion of each side plate 21. Preferably, the bending angle of the bending portion 211 may be a right angle or a nearly right angle.
The two side plates 21 are connected to the two side surfaces of the body 22 in the direction opposite to the bent portions 211, and for example, the side plates 21 and the body 22 may be fixed by welding. Moreover, a certain distance is left between the bending part 211 at the upper end of the side plate 21 and the upper end surface of the groove 221, so that a pair of clamping grooves are formed on the upper end surfaces at two sides of the groove 221. The upper end surface of the groove 221 may be used as the groove bottom of the clamping groove, or the upper surface of the fixing plate may be used as the groove bottom of the clamping groove, and the inner side of the bent portion 211 of the side plate 21 may be used as the groove top of the clamping groove.
The assembly structure of the body 22 with the side plate 21 and the slot is shown in fig. 4.
The push-pull strip 24 is horizontally inserted into the slot along one end of the slot, and then can move relatively on the fixing strip 23.
A plurality of second fitting holes 242 arranged in the length direction are provided on the surface of the push-pull strip 24. The distance between two adjacent second assembling holes 242 is equal to the distance between the inserting hole portions 2321 or the distance between the clamping hole portions 2322 of two adjacent first assembling holes 232 at the corresponding positions of the lower fixing strip 23.
When the product 10 is provided with a pair of pins 12 as shown in fig. 1, for example, the second fitting holes 242 are also correspondingly provided in pairs on the push-pull strip 24, and the first fitting holes 232 are also correspondingly provided in pairs on the fixing strip 23, so that a plurality of products, for example, 8 products 10, can be simultaneously mounted on one jig according to design capability, as shown in fig. 2.
By utilizing the above-mentioned characteristic of the hole pattern of the first fitting hole 232 of the fixing bar 23, the product 10 can be mounted by the relative movement of the product 10 when being mounted and clamped in cooperation with the second fitting hole 242 of the push-pull bar 24.
For example, during clamping, the push-pull strip 24 is moved (pushed or pulled along the slot) such that each second fitting hole 242 of the push-pull strip 24 is aligned with the insertion hole 2321 of a corresponding first fitting hole 232 of the lower fixing strip 23 (defining that the push-pull strip 24 is located at the first position). Then, by pre-arranging a plurality of products 10 (for example, 8 products 10 are arranged end to end in a tray with pins 12 facing upwards), and using the coating jig 20 of the present invention, the second assembly holes 242 are inserted into the corresponding pins 12 of the products 10 in alignment, so that the ring grooves 13 on the pins 12 are exactly aligned with the first assembly holes 232, thereby achieving the simultaneous installation of 8 products 10 on the coating jig 20. Next, by moving the push-pull bar 24 in the reverse direction (pulling or pushing along the card slot), the pins 12 of the 8 products 10 that have been placed on the push-pull bar 24 are translated along with the push-pull bar 24 from the receptacle portions 2321 of the first assembly holes 232 into the card slot portions 2322 (defining that the push-pull bar 24 is in the second position at this time). In this state, the hole-locking portion 2322 is in clearance-locked engagement with the annular groove 13 of the pin 12 of the product 10, so that the product 10 is limited on the plane position of the fixing strip 23 and cannot move up and down obviously; moreover, the pins 12 of the product 10 are restrained by the push-pull strip 24 at the second position, so that the product 10 is kept on the coating jig 20 without falling off.
Please refer to fig. 2. In order to ensure that the push-pull bar 24 is accurately positioned in the first position and the second position due to being pushed and pulled, so that the second assembly hole 242 of the push-pull bar 24 is aligned with the insertion hole 2321 of a corresponding one of the first assembly holes 232 of the lower fixing bar 23, or is moved to be aligned with the blocking hole 2322 of the first assembly hole 232, a limit structure may be provided to limit the moving distance of the push-pull bar 24 between the first position and the second position.
In an alternative embodiment, the stop may include a first stop surface 231 disposed in the groove 221 for defining the first position and a second stop surface for defining the second position, and a stop 241 protruding above the bottom surface of the push-pull strip 24 and cooperatively received between the first stop surface 231 and the second stop surface.
In a preferred embodiment, the limit may be disposed at a first end (defined as the right end in the figure) of the groove 221, and an end surface of the fixing strip 23 corresponding to one end is used as the first blocking surface 231; at the same time, the first end of the groove 221 is machined to be a blind end (not shown) confined within the body 22, so that the inner wall of the blind end can serve as a second stop surface. The stopper 241 is provided at an end portion of the corresponding end of the push-pull bar 24 to protrude downward such that a lower end of the stopper 241 is received between an end surface of the corresponding end of the fixing bar 23 and a blind end of the groove 221.
As an example, an end surface of the fixing bar 23 corresponding to one end may be provided in a fork shape, and a bottom surface of the fork end surface may be used as the first blocking surface 231.
Please refer to fig. 2. In a preferred embodiment, to increase the strength of the sheet-shaped push-pull strip 24, the push-pull strip 24 may be provided as a double-layered push-pull strip 24 structure that is stacked and fixed (e.g., welded) together. Also, the thickness of one push-pull strip 24 located at the upper layer may be set to be greater than the thickness of one push-pull strip 24 located at the lower layer.
Further, the width of one push-pull strip 24 located on the upper layer may also be set smaller than the width of one push-pull strip 24 located on the lower layer. Such a configuration can satisfy the rigidity requirement of the push-pull strip 24, and on the other hand, only one push-pull strip 24 with relatively thin thickness located at the lower layer can be independently matched with the clamping groove formed between the bending part 211 of the side plate 21 and the fixing plate, so that the upper surface of the bending part 211 of the side plate 21 is not higher than the upper surface of one push-pull strip 24 located at the upper layer, which is beneficial to enlarging the sputtering coating direction.
Please refer to fig. 2. In other preferred embodiments, a pull 243 may also be provided on the push-pull strip 24. For example, the pull 243 may be provided on an end of the other end (defined as the left end as illustrated) of the push-pull strip 24 corresponding to the second end of the groove 221. As an example, the pull tab 243 may be provided as a laterally protruding T-shaped pull tab 243.
Referring to fig. 5 and 6, the push-pull strip 24 of the present invention is shown in use in a first position and a second position, respectively. When the push-pull bar 24 is in the first position due to being pulled, the stopper 241 is just stopped by the bottom surface of the fork at the end of the fixing bar 23 to be limited, and the lower ends of the prongs 12 of the product 10 received in the pair of second fitting holes 242 of the push-pull bar 24 are just positioned in the insertion hole portions 2321 of the first fitting holes 232 of the fixing bar 23. At this time, the distance between the pull tab 243 of the push-pull bar 24 and the end surface of the corresponding end of the body 22 is L1.
When the push-pull bar 24 is pushed to the second position, the stopper 241 is stopped by the inner side of the blind end of the groove 221 of the body 22, and the lower end of the pin 12 of the product 10 is translated to be positioned in the catch hole 2322 of the first assembly hole 232. At this time, the distance between the tab 243 of the push-pull bar 24 and the end surface of the corresponding end of the main body 22 is changed to L2. It can be seen that L2 > L1, the difference being exactly the distance traveled by the push-pull strip 24 between the first and second positions.
When the film coating jig is used for clamping products, the process of simultaneously clamping a plurality of products can be finished only by pushing the push-pull strip once, so that the efficiency is effectively improved, and the film coating jig has a wide application prospect.
It should be understood by those skilled in the art that the above embodiments are only for illustrating the present invention and are not to be used as a limitation of the present invention, and that the changes and modifications of the above embodiments are within the scope of the claims of the present invention as long as they are within the spirit and scope of the present invention.
Claims (10)
1. A coating jig is characterized by comprising:
the body is provided with grooves arranged along the length direction;
the fixing strip is lapped on the upper ends of two sides of the groove along the length direction, a plurality of first assembling holes arranged along the length direction are arranged on the surface of the fixing strip, each first assembling hole is provided with a communicated jack part and a clamp hole part with an opening smaller than that of the jack part, and the center line of each first assembling hole is consistent with the center line of the groove in direction;
the push-pull strip is positioned on the fixing strip and is movably arranged on the upper ends of the two sides of the groove along the length direction, and a plurality of second assembling holes arranged along the length direction are formed in the surface of the push-pull strip;
the assembling portion of a product is sequentially inserted into the corresponding jack portions of the second assembling hole and the first assembling hole from top to bottom by moving the push-pull strip to the first position, and the assembling portion is driven to move and clamped into the clamping hole portion of the first assembling hole by moving the push-pull strip to the second position, so that the product is kept on the film coating jig.
2. The plating jig of claim 1, further comprising: the side plates are arranged on two sides of the body along the length direction, bent portions arranged in opposite directions are arranged at the upper ends of the side plates, so that a pair of clamping grooves are formed in the upper ends of two sides of the groove, and the push-pull strip is arranged in the clamping grooves in a matched mode.
3. The plating jig of claim 1 or 2, further comprising: a limit for constraining movement of the push-pull strip between the first position and the second position.
4. The coating fixture according to claim 3, wherein the position limiter comprises a first stop surface and a second stop surface, the first stop surface and the second stop surface are arranged in the groove and used for defining the first position and the second position, and a stop block is protruded from the bottom surface of the push-pull strip and is accommodated between the first stop surface and the second stop surface in a matching manner.
5. The coating fixture according to claim 4, wherein the stopper is disposed at a first end of the groove, an end surface of a corresponding end of the fixing strip serves as the first stop surface, the first end of the groove serves as a blind end confined in the body, an inner wall of the blind end serves as the second stop surface, and the stopper is disposed at an end portion of a corresponding end of the push-pull strip and protrudes downward to be accommodated between the end surface of the corresponding end of the fixing strip and the blind end of the groove.
6. The coating fixture according to claim 5, wherein the end surface of the corresponding end of the fixing strip is fork-shaped, and the bottom surface of the fork-shaped is used as the first blocking surface.
7. The coating fixture of claim 1, wherein the push-pull strip is a double-layer structure stacked and fixed together.
8. The coating jig of claim 7, wherein the width of one of the push-pull bars on the upper layer is smaller than the width of one of the push-pull bars on the lower layer.
9. The plating jig according to claim 5, wherein a pull handle is provided at an end of the other end of the push-pull strip corresponding to the second end of the groove.
10. The plating jig of claim 9, wherein the pull handle is T-shaped.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202011456617.6A CN112442673A (en) | 2020-12-11 | 2020-12-11 | Film coating jig |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202011456617.6A CN112442673A (en) | 2020-12-11 | 2020-12-11 | Film coating jig |
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CN112442673A true CN112442673A (en) | 2021-03-05 |
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CN202011456617.6A Pending CN112442673A (en) | 2020-12-11 | 2020-12-11 | Film coating jig |
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CN209039576U (en) * | 2018-09-27 | 2019-06-28 | 深圳市和胜金属技术有限公司 | A kind of rolling clamp of plated film |
CN110656316A (en) * | 2019-10-31 | 2020-01-07 | 中山凯旋真空科技股份有限公司 | Clamp and coating equipment with same |
CN214244598U (en) * | 2020-12-11 | 2021-09-21 | 纳峰新能源科技(上海)有限公司 | Film coating jig |
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KR20120134368A (en) * | 2011-06-02 | 2012-12-12 | 엘아이지에이디피 주식회사 | Substrate chucking and de-chucking apparatus |
CN202401127U (en) * | 2012-03-01 | 2012-08-29 | 宸阳光电科技(厦门)有限公司 | Vacuum coating carrier for small-sized substrates |
CN205893381U (en) * | 2016-06-12 | 2017-01-18 | 鄂尔多斯市源盛光电有限责任公司 | A anchor clamps and sputter coating equipment for sputter coating equipment |
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CN214244598U (en) * | 2020-12-11 | 2021-09-21 | 纳峰新能源科技(上海)有限公司 | Film coating jig |
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