CN112436711A - Displacement device - Google Patents
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- CN112436711A CN112436711A CN202011261343.5A CN202011261343A CN112436711A CN 112436711 A CN112436711 A CN 112436711A CN 202011261343 A CN202011261343 A CN 202011261343A CN 112436711 A CN112436711 A CN 112436711A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
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Abstract
The invention discloses a displacement device, which comprises at least one first frame part and at least one second frame part, wherein each first frame part and the corresponding second frame part can generate relative motion, the first frame part comprises a first frame and a plurality of coil arrays, the plurality of coil arrays are arranged on a plurality of planes of the first frame, each coil array comprises a plurality of coils, the plurality of coils are arranged adjacently in pairs along a first direction, the second frame part comprises a second frame and a plurality of magnet arrays, the plurality of magnet arrays are arranged on a plurality of planes of the second frame, each magnet array comprises a plurality of magnets, at least two magnets in the plurality of magnets have different magnetization directions, each magnet is arranged alternately along the first direction, the displacement device realizes the relative motion between the frames, can realize different distance displacement according to various requirements, and has no direct mechanical contact between the frames, the device is convenient for equipment and maintenance operation, and can effectively reduce the manufacturing and using cost for large-scale use.
Description
Technical Field
The invention relates to the field of automatic equipment, in particular to a displacement device.
Background
Microelectronics is a new technology developed with integrated circuits, especially very large scale integrated circuits. Microelectronics is a core technology of high-tech and information industries and has penetrated into various fields of modern technology and social life. The rapid development of microelectronic technology has increased the demand for automation equipment, and has raised higher requirements for the performance and productivity of automation equipment.
In the field of automatic equipment manufacturing, the technology of displacement devices, especially large-stroke displacement devices, is a core technology of an automatic equipment manufacturing system, and is always highly regarded by the industry. The performance and the productivity of the automatic equipment also put higher requirements on the performances of the displacement device such as speed acceleration, positioning accuracy and the like. The conventional large-stroke displacement device usually adopts a technical mode of combining a linear motor with a mechanical guide rail or a technical mode of combining the linear motor with an air-float guide rail. The linear motor combines the technical mode of a mechanical guide rail, mechanical friction is introduced, and the improvement of performance is limited. The linear motor is combined with the air-floating guide rail, so that the influence of mechanical friction is reduced, but the requirement on the flatness of the large-size air-floating support surface is very high, the processing and manufacturing difficulty is increased, and the production cost is increased; as the number of stations of the displacement device increases, the stroke of the carrier table increases, requiring a greater length of the base table to cover the movement stroke. The increase of the stroke and the requirement of the yield improve the requirements on indexes such as speed acceleration, motion precision and the like of the displacement device, and simultaneously, the convenience of maintenance of the displacement device is required, and the processing and manufacturing difficulty and the cost are required to be controllable. These requirements all bring great challenges and challenges to the traditional technical approach.
Disclosure of Invention
The invention aims to provide a displacement device, which solves the problem that the displacement device is applied to different travel requirements to realize different displacements.
To achieve the above object, the present invention provides a displacement device comprising at least one first frame part and at least one second frame part, each first frame part being relatively movable with the corresponding second frame part, each first frame part comprising a first frame and a plurality of coil arrays, the plurality of coil arrays comprising:
a first coil array disposed on a first plane of the first frame portion parallel to a first direction, the first coil array including a plurality of first coils disposed adjacent to each other in the first direction;
a second coil array disposed on a second plane of the first frame portion parallel to the first direction, the second coil array including a plurality of second coils disposed adjacent to each other in the first direction; wherein the first plane and the second plane are non-parallel to each other;
the second frame portion includes a second frame and a plurality of magnet arrays including:
a first magnet array arranged on a third plane of the second frame part parallel to the first plane, the first magnet array intersecting with projections of the first coil array on the first plane, respectively; the first magnet array comprises a plurality of first N magnets and a plurality of first S magnets, the first N magnets and the first S magnets are alternately arranged along the first direction, and the magnetization directions of the first N magnets and the first S magnets are different from each other;
a second magnet array disposed on a fourth plane of the second frame portion parallel to a second plane, the second magnet array intersecting projections of the second coil array on the second plane, respectively; the second magnet array comprises a plurality of second N magnets and a plurality of second S magnets, the second N magnets and the second S magnets are alternately arranged along the first direction, and the magnetization directions of the second N magnets and the second S magnets are different from each other;
the third plane is oppositely arranged and parallel to the first plane, and the fourth plane is oppositely arranged and parallel to the second plane.
According to the technical scheme provided by the invention, as the air-floating supporting surface in the existing air-floating guide rail technology is not needed, the problems of processing and manufacturing difficulty of a large-size air-floating supporting surface and difficulty in assembly and maintenance are solved, the relative movement of the frames is realized through the interaction force between the electrified coil and the magnet, different displacements can be realized according to various requirements, the frames are not in direct mechanical contact, the equipment and maintenance operation are convenient, and the manufacturing cost and the use cost can be effectively reduced for large-scale use.
In one embodiment, each coil array is a multi-dimensional array;
wherein the first array of coils further comprises a row configuration along a fourth direction; and/or
The second coil array further comprises a row configuration along a fifth direction.
In one embodiment, the plurality of coil arrays further comprises:
a third coil array disposed on a fifth plane of the first block portion parallel to the first direction, the third coil array including a plurality of third coils disposed adjacent to each other in the first direction;
wherein at least two of the first plane, the second plane, and the fifth plane are non-parallel to one another;
the plurality of magnet arrays further comprises:
a third magnet array arranged on a sixth plane of the second frame part parallel to a fifth plane, the third magnet array intersecting with projections of the third coil arrays onto the fifth plane, respectively; the third magnet array includes a plurality of third N magnets and a plurality of third S magnets, and the third N magnets and the third S magnets are alternately arranged in the first direction, and the third N magnets and the third S magnets have different magnetization directions from each other.
In one embodiment, the plurality of coil arrays further comprises:
a fourth coil array arranged on a seventh plane of the first frame section parallel to the first direction, the fourth coil array including a plurality of fourth coils arranged adjacent to each other in the first direction;
at least two of the first plane, the second plane, the fifth plane, and the seventh plane are non-parallel to each other;
the plurality of magnet arrays further comprises:
a fourth magnet array arranged on an eighth plane of the second frame part parallel to the seventh plane, the fourth magnet array intersecting with projections of fourth coil arrays on the seventh plane, respectively; the fourth magnet array at least comprises a plurality of fourth N magnets and a plurality of fourth S magnets, the fourth N magnets and the fourth S magnets are alternately arranged along the first direction, and the magnetization directions of the fourth N magnets and the fourth S magnets are different from each other.
In one embodiment, the first plane is coplanar with the fifth plane, the first plane is orthogonal to the second plane, and the fifth plane is orthogonal to the seventh plane.
In one embodiment, each coil array is a multi-dimensional array;
wherein the fourth coil array further comprises a row configuration along a seventh direction; and/or
The third coil array further comprises a row configuration along a sixth direction.
In one embodiment, the first magnet array further comprises a first H magnet, the plurality of first H magnets are arranged between the first N magnet and the first S magnet, and the first N magnet and the first S magnet are alternately arranged along the first direction, and the magnetization direction of the first H magnet is directed to the first N magnet by the adjacent first sub-S magnet and is parallel to the first direction;
and/or
The second magnet array further includes a second H magnet, the plurality of second H magnets are disposed between the second N magnet and the second S magnet, and the second N magnet and the second S magnet are alternately arranged along the first direction, and a magnetization direction of the second H magnet is directed from the adjacent second S magnet to the second N magnet and is parallel to the first direction.
In one embodiment, the displacement device further comprises a first position sensor;
one of the dimensions of the first magnet array and the first coil array in a second direction has a dimension difference portion less than the other, the dimension difference portion forming a first difference space in which the first position sensor is located to measure a moving displacement generated in the first direction;
and/or
The displacement device further comprises a second position sensor;
one of the dimensions of the second magnet array and the second coil array in the third direction has a dimension difference portion smaller than the other, the dimension difference portion forming a second difference space, and the second position sensor is located in the second difference space to measure the movement displacement generated in the first direction.
In one embodiment, the displacement device further comprises a third position sensor;
the third magnet array and the third coil array respectively have a size difference portion smaller in either one of sizes in the second direction than the other, the size difference portion forming a third difference space in which the third position sensor is located to measure a moving displacement generated in the first direction;
and/or
The displacement device further comprises a fourth position sensor;
one of the sizes of the fourth magnet array and the fourth coil array in the third direction has a size difference portion smaller than the other, respectively, the size difference portion forming a fourth difference space in which the fourth position sensor is located to measure the displacement of the motion generated in the first direction.
In one embodiment, the displacement device further comprises a power amplifier for driving the plurality of coil arrays to generate a first magnetic field, and the first magnetic field and the second magnetic field generated by the plurality of magnet arrays act respectively to generate relative movement along the first direction.
In one embodiment, the displacement device comprises at least two first frame parts; the at least two first frame parts are each controlled by independent drive; and/or
The displacement device comprises at least one second frame part, which extends linearly in the first direction by means of a mechanical splice.
In one embodiment, the displacement device comprises at least one first frame part;
the at least one first frame part is linearly extended in the first direction by mechanical splicing; and/or
The displacement device comprises at least two second frame parts; the at least two second frame parts are each controlled by independent drive.
Drawings
FIG. 1 is a perspective view of a displacement device according to a first embodiment of the present invention;
FIG. 2 is an X-Y view of a first magnet array of the first embodiment of the present invention;
FIG. 3 is an X-Z view of a first magnet array and a first coil array of the first embodiment of the present invention;
FIG. 4 is a schematic illustration of the Lorentz forces and torques of the displacement apparatus of the first embodiment of the present invention;
FIG. 5 is a schematic view of a self-stabilizing rotation adjustment mechanism of the first embodiment of the present invention;
FIG. 6 is a schematic diagram of a position sensor arrangement of a first embodiment of the present invention;
FIG. 7 is a perspective view of a displacement device according to a second embodiment of the present invention;
FIG. 8 is a schematic representation of the Lorentz forces and torques of a displacement device of a second embodiment of the present invention;
FIG. 9 is a perspective view of a displacement device according to a third embodiment of the present invention;
FIG. 10 is a perspective view of a coil array and corresponding magnet array in accordance with some embodiments of the invention;
FIG. 11 is a perspective view of a multi-stage displacement apparatus in accordance with some embodiments of the invention;
FIG. 12 is a perspective view of another multi-stage displacement apparatus according to some embodiments of the invention.
DETAILED DESCRIPTION OF EMBODIMENT (S) OF INVENTION
The embodiments of the present invention will be described in detail below with reference to the accompanying drawings in order to more clearly understand the objects, features and advantages of the present invention. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of the present invention, but are merely intended to illustrate the spirit of the technical solution of the present invention.
In the following description, for the purposes of illustrating various disclosed embodiments, certain specific details are set forth in order to provide a thorough understanding of the various disclosed embodiments. One skilled in the relevant art will recognize, however, that the embodiments may be practiced without one or more of the specific details. In other instances, well-known devices, structures and techniques associated with this application may not be shown or described in detail to avoid unnecessarily obscuring the description of the embodiments.
Throughout the specification and claims, the word "comprise" and variations thereof, such as "comprises" and "comprising," are to be understood as an open, inclusive meaning, i.e., as being interpreted to mean "including, but not limited to," unless the context requires otherwise.
Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
As used in this specification and the appended claims, the singular forms "a", "an", and "the" include plural referents unless the context clearly dictates otherwise. It should be noted that the term "or" is generally employed in its sense including "and/or" unless the context clearly dictates otherwise.
In the following description, for the purposes of clearly illustrating the structure and operation of the present invention, directional terms will be used, but terms such as "front", "rear", "left", "right", "outer", "inner", "outer", "inward", "upper", "lower", etc. should be construed as words of convenience and should not be construed as limiting terms.
A first embodiment of the present invention is described below with reference to the drawings. The movement device 10 as shown in fig. 1 includes a first frame part 11 and a second frame part 12 disposed opposite to the first frame part 11, and the second frame part 12 is located at the bottom and the outer side with respect to the first frame part 11 in a half-enclosed structure; the first frame part 11 can be displaced in relation to the second frame part 12. The first frame part 11 includes a first frame and a plurality of coil arrays, i.e., a first coil array 111 and a second coil array 112 in the embodiment of the present invention, which are fixedly arranged on two planes of the first frame, i.e., a first plane 21 and a second plane 22, respectively. Wherein both planes are parallel to the first direction (X-direction), the first plane 21 and the second plane 22 being non-parallel to each other. Preferably, the first plane 21 is orthogonal to the second plane 22, the first plane 21 is orthogonal to the third direction (Z direction), and the second plane 22 is orthogonal to the second direction (Y direction). It is understood that the first plane 21 and the second plane 23 may not be orthogonal, and the planes may be at an angle, which is not limited herein. It should be noted that the first frame part 11 and the second frame part 12 may be disposed vertically or disposed in any other direction in a space, and are not particularly limited herein. In addition, in the embodiment of the present invention, the X direction is a first direction, the Y direction is a second direction, and the Z direction is a third direction, which are taken as examples for description, however, it can be understood by those skilled in the art that the present invention is not limited thereto, and each embodiment of the present invention can be implemented by taking any direction in a three-dimensional rectangular coordinate system as the first direction, and taking the other two directions as the second direction and the third direction, respectively, and will not be repeated hereinafter.
As shown in fig. 1, the first coil array 111 includes a plurality of first coils 115, and the second coil array 112 includes a plurality of second coils 116, wherein the plurality of first coils 115 and the plurality of second coils 116 are respectively disposed adjacent to each other in the X direction. The second frame part 12 includes a second frame and a plurality of magnet arrays, in the embodiment of the present invention, a plurality of coil arrays, i.e., a first magnet array 121 and a second magnet array 122, are respectively fixedly disposed on two planes of the second frame, i.e., a third plane 23 and a fourth plane 24, wherein the third plane 23 is disposed opposite and parallel to the first plane 21, and the fourth plane 24 is disposed opposite and parallel to the second plane 22.
As shown in fig. 1 and 2, the first magnet array 121 includes a plurality of first magnets 125, and the first magnets 125 include at least two kinds of magnets having different magnetization directions, i.e., first N magnets 125A and first S magnets 125B, the first N magnets 125A being alternately arranged with the first S magnets 125B in the X direction. In addition, the second magnet array 122 shown in fig. 1 includes a plurality of second magnets 126, the second magnets 126 include at least two kinds of magnets having different magnetization directions, i.e., a second N magnet and a second S magnet, and the second magnets 126 are similar to the first magnets 125, and are not described again here. Among them, the N magnet and the S magnet mentioned above are named according to the functional surface used, and specifically, in general, the magnet includes an N-pole surface and an S-pole surface, and when it is necessary to use the magnetic field of the N-pole surface of the magnet, the magnet is called an N magnet, and when it is necessary to use the magnetic field of the S-pole surface of the magnet, the magnet is called an S magnet, and the names of the N magnet and the S magnet mentioned below are the same and are not repeated for the sake of brevity.
In some embodiments, the first magnet 125 may include three types of magnets, i.e., a first N magnet 125A, a first S magnet 125B, and a first H magnet 125C, as shown in fig. 2 and 3. The first H magnets 125C are disposed between the first N magnets 125A and the first S magnets 125B, and the first N magnets 125A and the first S magnets 125B are alternately arranged along the X direction, and the magnetization direction of the first H magnets 125C is directed from the adjacent first S magnets 125B to the first N magnets 125A and is parallel to the X direction. This arrangement allows the magnetic field in which the first coil 115 is located to be strengthened, whereby the interaction force of the first magnet 125 and the first coil 115 can be enhanced. Where the H magnet is named according to the functional surface it is used on, in particular, the H magnet is located between the N magnet and the S magnet, and is called the H magnet when it is desired to use the magnetic field of the magnet directed from the adjacent S magnet to the N magnet. The nomenclature of the H magnet mentioned hereinafter is the same and is not repeated for brevity.
Specifically, as shown in fig. 3, each of the first N magnets 125A and the first S magnets 125B of the first magnet array 121 has a magnetization direction orthogonal to the third plane 23, and the magnetization direction of the first N magnet 125A is directed toward the first coil 115 and the magnetization direction of the first S magnet 125B is directed away from the first coil 115 of the first coil array 111. The magnetization direction of the first H magnet 125C is parallel to the X direction, and the adjacent first S magnet 125B is directed to the adjacent first N magnet 125A, thereby providing a magnetic field space. In addition, similar to the first magnet 125, the second magnet 126 in fig. 1 may also include three types of magnets arranged in the same arrangement to enhance the magnetic field in which the second coil 116 is located, and will not be described herein.
Fig. 4 is a schematic diagram of lorentz forces and torques of the displacement device corresponding to the first embodiment, as shown in the figure, after the first coil array 111 is supplied with a driving current, the first coil array 111 interacts with the first magnet array 121, so that the first frame part 11 in fig. 1 can be driven to perform translational motions along the X direction and the Z direction relative to the second frame part 12, and the first frame part 11 can be driven to rotate along the Y direction relative to the second frame part 12. After the second coil array 112 is supplied with the driving current, the second coil array 112 and the second magnet array 122 generate interaction, and can drive the first frame part 11 to translate along the X direction and the Y direction relative to the second frame part 12, and drive the first frame part 11 to rotate along the Z direction relative to the second frame part 12.
According to the technical scheme provided by the invention, as the air-floating supporting surface in the existing air-floating guide rail technology is not needed, the problems of processing and manufacturing difficulty of a large-size air-floating supporting surface and difficulty in assembly and maintenance are solved, the relative movement of the frames is realized through the interaction force between the electrified coil and the magnet, different displacements can be realized according to various requirements, the frames are not in direct mechanical contact, the equipment and maintenance operation are convenient, and the manufacturing cost and the use cost can be effectively reduced for large-scale use.
Furthermore, with the structure of the present embodiment in which the coil and magnet interact with each other between the frames, a self-stabilizing rotation adjustment mechanism exists between the first frame part 11 and the second frame part 12, and as shown in fig. 5, when the first frame part 11 deflects relative to the second frame part 12 in the X direction, which causes the gap between the first coil array 111 and the first magnet array 121 or the gap between the second coil array 112 and the second magnet array 122 to become larger or smaller, the self-stabilizing rotation adjustment mechanism adjusts the reverse rotation of the first frame part 11 relative to the second frame part 12 in the X direction, and the gap between the first frame part 11 and the second frame part 12 is kept uniform.
Specifically, the self-stabilizing rotation adjustment mechanism between the first frame portion and the second frame portion in the embodiments of the present invention is based on the balance of force and torque between the coil array and the magnet array, and when the gap between the coil array and the magnet array changes, the corresponding force and torque also change, resulting in a displacement toward the equilibrium point, thereby maintaining the stability of the gap between the coil array and the magnet array.
Further, in some embodiments, the displacement device further comprises a first position sensor, one of the dimensions of the first magnet array and the first coil array along the second direction having a smaller differential dimension than the other, the differential dimension forming a first differential space, the first position sensor being located in the first differential space for measuring the resulting movement displacement along the first direction.
Specifically, in some embodiments, as shown in fig. 6, the size of the first magnet array 121 in the Y direction is different from the size of the first coil array 111 in the Y direction, for example, when the size of the first magnet array 121 in the Y direction is larger than the size of the first coil array 111 in the Y direction, the first magnet array 121 has a portion protruding from the first coil array 111 in the Y direction, the first coil array 111 forms a first differential space corresponding to the first magnet array 121 in the Y direction, and the first position sensor 16a can be disposed in the first differential space, it is understood that, when the size of the first magnet array 121 in the Y direction is smaller than the size of the first coil array 111 in the Y direction, the first coil array 111 has a portion protruding from the first magnet array 121 in the Y direction, and the first magnet array 121 forms a first differential space corresponding to the first coil array 111 in the Y direction, a first position sensor 16a may be provided, the first position sensor 16a being used to measure a long-distance displacement occurring in the X direction. The first position sensor 16a may be a hall sensor, or may be other sensors, and is not limited in particular.
In addition, the second magnet array 122 and the second coil array 112 are also similar to the first magnet array 121 and the first coil array 111, that is, the second magnet array 122 and the second coil array 112 form a second differential space for configuring the second position sensor 16b, and the second position sensor 16b may be the same type as the first position sensor 16a or different type, and is not repeated herein.
It should be noted that both position sensors can be used to measure the displacement in the X direction, so that the two sensors can operate at different times, and when one of the two sensors is in an operating state, the other one can be in a standby state. When the two sensors are in a working state at the same time, the two sensors can be set to be calibrated mutually, specifically, a first difference value can be set, wherein the first difference value is the difference value between the measurement value of the first position sensor at a certain position and the measurement value of the second position sensor, and the system can judge that when the first difference value exceeds a certain preset threshold value, at least one position sensor is determined to be abnormally working, so that the risk of errors of the position sensors can be better controlled.
A second embodiment of the invention relates to a displacement device. The second embodiment is based on an extension of the first embodiment, and is mainly different in that, as shown in fig. 7, the first frame portion 11 of the displacement device 10 of the second embodiment further includes a third coil array 113, the third coil array 113 is fixedly arranged on a fifth plane 25 of the first frame, and the fifth plane 25 is parallel to the X direction. Wherein at least two of the fifth plane 25, the first plane 21 and the second plane 22 are not parallel to each other. That is, the fifth plane 25 may be either coplanar or parallel to the first plane 21 or orthogonal to the first plane 21. Preferably, the fifth plane 25 is coplanar with the first plane 21, the fifth plane 25 is orthogonal to the second plane 22, and the fifth plane 25 is orthogonal to the Z-direction.
In fig. 7, the second frame part 12 further includes a third magnet array 123, and the third magnet array 123 is fixedly disposed on a sixth plane 26 of the second frame, wherein the sixth plane 26 is parallel to and opposed to the fifth plane 25. Preferably, the sixth plane 26 is coplanar with the third plane 23.
The specific arrangement of the third coil array 113 is similar to that of the first coil array 111, and the specific arrangement of the third magnet array 123 is similar to that of the first magnet array 121, which is not described herein again.
Fig. 8 is a schematic diagram of the lorentz forces and torques of the displacement device according to the second embodiment of the invention, as shown, when a driving current is applied to the third coil array 113, the third coil array 113 interacts with the third magnet array 123, causing the first frame part 11 to translate in the X-direction and the Z-direction relative to the second frame part 12 and the first frame part 11 to rotate in the Y-direction relative to the second frame part 12 in fig. 7.
In this embodiment, the interaction of the third coil array 113 and the third magnet array 123 with the interaction of the first coil array 111 and the first magnet array 121 generates a torque in the X direction, causing the first frame part 11 to rotate in the X direction relative to the second frame part 12.
Compared with the first embodiment, the displacement device 10 of the second embodiment, by adding a set of the coil array 113 and the magnet array 123, strengthens the torque in the X direction, and stabilizes the movement state in the X direction.
Further, in some embodiments, the third magnet array 123 and the second coil array 113 are also similar to the first magnet array 121 and the first coil array 111, and the third magnet array 123 and the corresponding third coil array 113 form a third difference space for configuring a third position sensor, which is not repeated here.
It should be noted that, in this embodiment, all three position sensors can be used to measure the displacement in the X direction, so that the three position sensors may not operate simultaneously, and when one of the position sensors is in an operating state, the other two position sensors may be in a standby state. Of course, three sensors may be used for mutual calibration, for example, three position sensors, and a first threshold may be set, and if the difference between the measurement value of the first position sensor and the measurement value of the second position sensor does not exceed the first threshold, and the difference between the measurement value of the second position sensor and the measurement value of the third position sensor exceeds the first threshold, it may be preliminarily determined that the third position sensor is out of order or has an error exceeding an allowable range, and the third position sensor may be checked or replaced.
Since this embodiment is an extension of the first embodiment, the related technical details mentioned in the first embodiment are still valid in this embodiment, and the technical effect achieved in the first embodiment can also be achieved in this embodiment, and is not described here again in order to reduce repetition.
A third embodiment of the present invention relates to a displacement device. The third embodiment is based on the extension of the second embodiment, and is mainly different in that, as shown in fig. 9, in the displacement device 10 of the third embodiment, the first frame portion 11 further includes a fourth coil array 114, the fourth coil array 114 is fixedly arranged on a seventh plane 27 of the first frame, the seventh plane 27 is arranged at a distance from the second plane 22 of the first frame portion 11, the seventh plane 27 is parallel to the X direction, and the second frame portion 12 is located at the bottom and the outer side with respect to the first frame portion 11 and has a half-surrounded structure. Wherein at least two of the seventh plane 27, the first plane 21, the second plane 22 and the fifth plane 25 are not parallel to each other. Preferably, the seventh plane 27 is parallel to the second plane 22, and the seventh plane 27 is orthogonal to the Y direction.
In fig. 9, the second frame part 12 further includes a fourth magnet array 124, and the fourth magnet array 124 is disposed on an eighth plane 28 of the second frame, wherein the eighth plane 28 is parallel to and opposed to the seventh plane 27.
The specific arrangement of the fourth coil array 114 is similar to that of the second coil array 112, and the specific arrangement of the fourth magnet array 124 is similar to that of the second magnet array 122, which are not described herein again.
When the fourth coil array 114 is supplied with a driving current, the fourth coil array 114 interacts with the fourth magnet array 124, causing the first frame part 11 to perform a translational motion in the X and Y directions relative to the second frame part 12, and causing the first frame part 11 to perform a rotational motion in the Z direction relative to the second frame part 12.
In this embodiment, the interaction of the fourth coil array 114 and the fourth magnet array 124 with the second coil array 112 and the second magnet array 122 enhances the translation of the first frame part 11 relative to the second frame part 12 in the Y-direction, as well as the rotation in the Z-direction.
The displacement apparatus 10 of the third embodiment has an additional set of coil arrays 114 and magnet arrays 124 compared to the second embodiment. Viewed from the X direction, the four coil arrays are in a U-shaped symmetrical layout, that is, the first coil array 111 is symmetrical to the third coil array 113, and the second coil array 112 is symmetrical to the fourth coil array 114. The U-shaped symmetrical layout is adopted, and Lorentz force and torque in all directions are strengthened. With the addition of the fourth coil array 114 and the fourth magnet array 124, mechanical resonance generated by the flexural mode is suppressed through redundant control.
Since the present embodiment is based on the extension of the first embodiment and the second embodiment, the related technical details mentioned in the first embodiment and the second embodiment are still valid in the present embodiment, and the technical effects that can be achieved in the first embodiment and the second embodiment can also be achieved in the present embodiment, and are not described herein again in order to reduce the repetition.
Further, in some embodiments, each coil array is a multi-dimensional array; wherein the first coil array further comprises a row configuration along a fourth direction; the second coil array further comprises a row configuration along a fifth direction; the third coil array further comprises a row configuration along a sixth direction; the second coil array further comprises a row configuration along a seventh direction.
Specifically, the coil arrays on the first frame part 11 may be a multi-dimensional array including a column arrangement in the X direction, a row arrangement in the Y direction, and a vertical arrangement in the Z direction, and the degree of freedom of the interaction force between the magnet and the coil can be increased by arranging the multi-dimensional array.
The coil arrays on the first frame part 11 are preferably two-dimensional arrays including both columns arranged in the X direction and rows arranged in the Y direction, for example, the first coil array 111 includes rows arranged in a fourth direction, which is preferably the same as the Y direction, but may be other directions at any angle to the Y direction.
Taking the first coil array and the first magnet array as an example, as shown in fig. 10, the first coils 115 of the first coil array 111 include a row arrangement along the Y direction in addition to two-by-two adjacent arrangements along the X direction, the first coil array 111 is arranged with two adjacent first coils 115 as one row arrangement along the Y direction, the first magnet array 121 extends linearly along the Y direction, and a projection of the first coil array 111 on the first plane intersects with a projection of the first magnet array 121 on the first plane.
The first coil array 111 includes a row arrangement in a fourth direction (preferably Y direction) in addition to a column arrangement in the first direction (X direction). With this arrangement, when current is applied to the first coil array 111, a torque in the first direction (X direction) is added by the interaction between the first coil array 111 and the first magnet array 121, which can cause the first frame part 11 to rotate in the first direction (X direction) relative to the second frame part 12.
In fig. 9, the second coil array 112, the third coil array 113, and the fourth coil array 114 may also be configured with a column configuration and a row configuration of a multi-dimensional array, and the specific implementation is similar to the first coil array 111, and is not described herein again.
Further, the displacement device in some embodiments comprises at least two first frame parts and at least one second frame part; the length of the first frame part in the first direction is smaller than the length of the second frame part, at least two first frame parts are arranged on at least one second frame part at a distance from each other along the first direction, the at least two first frame parts are respectively controlled by independent driving, and the at least one second frame part is linearly extended and integrated along the first direction through mechanical splicing. Specifically, as shown in fig. 11, the displacement device 10 includes two first frame portions 11 and two second frame portions 12, and the two first frame portions 11 are drive-controllable independently of each other so as to function as a first table and a second table, respectively. The two second frame portions 12 extend linearly as a base in the X direction to form a whole, and specifically, the connection may be achieved by mechanical splicing, and the connection may be achieved by splicing on a tooling rack, or by using a buckle of the second frame portion, which is not limited herein. The two first frame parts are arranged separately from each other at a distance on two second frame parts which are joined together. At least two first frame parts 11 and at least one second frame part 12 constitute a multi-stage displacement device system. According to the embodiment of the invention, the first workbench and the second workbench are independently driven, so that the operation freedom degree of the workbench is greatly increased, the working efficiency is improved, the modular design is adopted to meet the expansion requirement of the motion system, the motion system is extended, a new structure is not required to be redesigned, the maintenance is more convenient, and the production, manufacturing and use cost can be effectively reduced.
Further, the displacement device in some embodiments comprises at least one first frame part and at least two second frame parts, wherein the length of the first frame part in the first direction is greater than that of the second frame part, the at least two second frame parts are arranged on the at least one first frame part and spaced from each other along the first direction, the at least one first frame part extends linearly along the first direction to form a whole through mechanical splicing, and the at least two second frame parts are controlled through independent driving respectively. Specifically, as shown in fig. 12, the displacement device 10 includes two first frame parts 11 and two second frame parts 12. The first frame part 11 as a base may extend linearly or substantially linearly along the X direction to form a whole, specifically, the connection may be achieved by mechanical splicing, and the connection may be achieved by splicing on a tooling rack, or by using a self-fastening, and the connection is not limited herein. The two second frame portions 12 may be driven and controlled independently of each other to serve as a first table and a second table, respectively. The two second frame parts are arranged separately from each other at a distance on the two first frame parts which are joined together as a base. The at least one first frame part 11 and the at least two second frame parts 12 constitute a multi-stage displacement device system. According to the embodiment of the invention, the first workbench and the second workbench are independently driven, so that the operation freedom degree of the workbench is greatly increased, the working efficiency is improved, the expansion requirement of the motion system can be met by adopting a modular design, the motion system is extended, a new structure does not need to be redesigned, the maintenance is more convenient, and the production, manufacturing and use cost can be effectively reduced.
The multi-stage displacement device provided by the invention can be applied to a motion stage system of an automatic device, and the motion stage system of the automatic device can adjust the relative positions of the first frame part and the second frame part and the arrangement number of the first frame part and the second frame part according to the requirements of an actual motion stroke and a control strategy plan.
While the preferred embodiments of the present invention have been described in detail above, it should be understood that aspects of the embodiments can be modified, if necessary, to employ aspects, features and concepts of the various patents, applications and publications to provide yet further embodiments.
These and other changes can be made to the embodiments in light of the above detailed description. In general, in the claims, the terms used should not be construed to be limited to the specific embodiments disclosed in the specification and the claims, but should be construed to include all possible embodiments along with the full scope of equivalents to which such claims are entitled.
Claims (10)
1. A displacement device comprising at least one first frame part and at least one second frame part, each first frame part being movable relative to the corresponding second frame part,
each first frame portion includes a first frame and a plurality of coil arrays including:
a first coil array disposed on a first plane of the first frame parallel to a first direction, the first coil array including a plurality of first coils disposed adjacent to each other in the first direction;
a second coil array disposed on a second plane of the first frame parallel to the first direction, the second coil array including a plurality of second coils disposed adjacent to each other in the first direction; wherein the first plane and the second plane are non-parallel to each other;
the second frame portion includes a second frame and a plurality of magnet arrays including:
a first magnet array arranged on a third plane of the second frame parallel to the first plane, the first magnet array intersecting with projections of the first coil array on the first plane, respectively; the first magnet array comprises a plurality of first N magnets and a plurality of first S magnets, the first N magnets and the first S magnets are alternately arranged along the first direction, and the magnetization directions of the first N magnets and the first S magnets are different from each other;
a second magnet array disposed on a fourth plane of the second frame parallel to the second plane, the second magnet array intersecting with projections of the second coil array on the second plane, respectively; the second magnet array comprises a plurality of second N magnets and a plurality of second S magnets, the second N magnets and the second S magnets are alternately arranged along the first direction, and the magnetization directions of the second N magnets and the second S magnets are different from each other;
the third plane is oppositely arranged and parallel to the first plane, and the fourth plane is oppositely arranged and parallel to the second plane.
2. A displacement device according to claim 1 wherein each coil array is a multi-dimensional array;
wherein the first array of coils further comprises a row configuration along a fourth direction; and/or
The second coil array further comprises a row configuration along a fifth direction.
3. The displacement device of claim 1, wherein the plurality of coil arrays further comprises:
a third coil array disposed on a fifth plane of the first frame parallel to the first direction, the third coil array including a plurality of third coils disposed adjacent to each other in the first direction;
wherein at least two of the first plane, the second plane, and the fifth plane are non-parallel to one another;
the plurality of magnet arrays further comprises:
a third magnet array arranged on a sixth plane of the second frame parallel to a fifth plane, the third magnet array intersecting with projections of the third coil array on the fifth plane, respectively; the third magnet array includes a plurality of third N magnets and a plurality of third S magnets, and the third N magnets and the third S magnets are alternately arranged in the first direction, and the third N magnets and the third S magnets have different magnetization directions from each other.
4. A displacement device according to claim 3,
the plurality of coil arrays further comprises:
a fourth coil array disposed on a seventh plane of the first frame parallel to the first direction, the fourth coil array including a plurality of fourth coils disposed adjacent to each other in the first direction;
at least two of the first plane, the second plane, the fifth plane, and the seventh plane are non-parallel to each other;
the plurality of magnet arrays further comprises:
a fourth magnet array disposed on an eighth plane of the second frame parallel to the seventh plane, the fourth magnet array intersecting with projections of fourth coil arrays on the seventh plane, respectively; the fourth magnet array at least comprises a plurality of fourth N magnets and a plurality of fourth S magnets, the fourth N magnets and the fourth S magnets are alternately arranged along the first direction, and the magnetization directions of the fourth N magnets and the fourth S magnets are different from each other.
5. A displacement device according to claim 4 wherein each coil array is a multi-dimensional array;
wherein the third coil array further comprises a row configuration along a sixth direction;
and/or
The fourth coil array further comprises a row configuration along a seventh direction.
6. The displacement device according to claim 1, wherein the first magnet array further comprises first H magnets, the plurality of first H magnets are disposed between the first N magnets and the first S magnets, and the first N magnets and the first S magnets are alternately arranged along the first direction, and the magnetization direction of the first H magnets is directed from the adjacent first sub-S magnets to the first N magnets and is parallel to the first direction;
and/or
The second magnet array further includes a second H magnet, the plurality of second H magnets are disposed between the second N magnet and the second S magnet, and the second N magnet and the second S magnet are alternately arranged along the first direction, and a magnetization direction of the second H magnet is directed from the adjacent second S magnet to the second N magnet and is parallel to the first direction.
7. Displacement device according to claim 1,
the displacement device further comprises a first position sensor;
one of the dimensions of the first magnet array and the first coil array in the second direction has a smaller dimension differential than the other, the dimension differential forming a first differential space within which the first position sensor is located for measuring a moving displacement produced in the first direction;
and/or
The displacement device further comprises a second position sensor;
one of the dimensions of the second magnet array and the second coil array in a third direction has a smaller dimension differential than the other, the dimension differential forming a second differential space, the second position sensor being located within the second differential space for measuring a movement displacement generated in the first direction.
8. A displacement device according to claim 4,
the displacement device further comprises a third position sensor;
one of the dimensions of the third magnet array and the third coil array in a second direction has a smaller dimension differential than the other, the dimension differential forming a third differential space within which the third position sensor is located for measuring the resulting displacement of motion in the first direction;
and/or
The displacement device further comprises a fourth position sensor;
one of the dimensions of the fourth magnet array and the fourth coil array in the third direction has a dimension difference portion smaller than the other, the dimension difference portion forming a fourth difference space, and the fourth position sensor is located in the fourth difference space to measure a movement displacement generated in the first direction.
9. Displacement device according to one of the claims 1 to 8,
the displacement device comprises at least two first frame parts;
the at least two first frame parts are each controlled by independent drive;
and/or
The displacement device comprises at least one second frame part, which extends linearly in the first direction by means of a mechanical splice.
10. Displacement device according to one of the claims 1 to 8,
the displacement device comprises at least one first frame part;
the at least one first frame part is linearly extended in the first direction by mechanical splicing;
and/or
The displacement device comprises at least two second frame parts; the at least two second frame parts are each controlled by independent drive.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011261343.5A CN112436711B (en) | 2020-11-12 | 2020-11-12 | Displacement device |
| PCT/CN2020/131732 WO2022099797A1 (en) | 2020-11-12 | 2020-11-26 | Displacement device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011261343.5A CN112436711B (en) | 2020-11-12 | 2020-11-12 | Displacement device |
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| CN112436711A true CN112436711A (en) | 2021-03-02 |
| CN112436711B CN112436711B (en) | 2022-03-11 |
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| CN202011261343.5A Active CN112436711B (en) | 2020-11-12 | 2020-11-12 | Displacement device |
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| CN116619221A (en) * | 2023-05-09 | 2023-08-22 | 浙江大学 | Gap self-adaptive non-contact polishing device and method |
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Also Published As
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| WO2022099797A1 (en) | 2022-05-19 |
| CN112436711B (en) | 2022-03-11 |
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