CN112410738A - Powder metallurgy target material and manufacturing method thereof - Google Patents
Powder metallurgy target material and manufacturing method thereof Download PDFInfo
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- CN112410738A CN112410738A CN202011284459.0A CN202011284459A CN112410738A CN 112410738 A CN112410738 A CN 112410738A CN 202011284459 A CN202011284459 A CN 202011284459A CN 112410738 A CN112410738 A CN 112410738A
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- metal
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
- B22F3/14—Both compacting and sintering simultaneously
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
- B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
- B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/0466—Alloys based on noble metals
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/02—Alloys based on gold
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Powder Metallurgy (AREA)
Abstract
The invention discloses a powder metallurgy target material and a manufacturing method thereof, and the technical scheme is as follows: the alloy comprises gold, metal , metal and metal nickel, wherein the mass parts of the components are as follows: gold: 95-70 parts; metal : 5-25 parts; metal : 5-15 parts; a metal nickel: 1-5 parts; the invention has the beneficial effects that: after the metallurgical target material is produced and molded, all metal powder inside the metallurgical target material is uniformly mixed, materials such as metal , metal , metal nickel and the like are added, the metal , the metal and the metal nickel have relatively good hardness, so that all the metal powder is more firmly mixed, the hardness of the molded metallurgical target material is greatly improved, the defect of low hardness of the metallurgical target material is overcome, and the normal use of the metallurgical target material is ensured.
Description
Technical Field
The invention relates to the technical field of metallurgical target materials, in particular to a powder metallurgy target material and a manufacturing method thereof.
Background
The target material for coating is a sputtering source which forms various functional films on a substrate by sputtering through a magnetron sputtering, multi-arc ion plating or other types of coating systems under proper process conditions, and in a simple way, the target material is a target material bombarded by high-speed charged particles and used in a high-energy laser weapon, and when lasers with different power densities, different output waveforms and different wavelengths interact with different target materials, different killing and destruction effects can be generated, for example: the evaporation magnetron sputtering coating is to heat evaporation coating, aluminum film and the like, and change different targets (such as aluminum, copper, stainless steel, titanium, nickel targets and the like) to obtain different film systems (such as superhard, wear-resistant and anticorrosive alloy films and the like).
The prior art has the following defects: after the metallurgical target material in the prior art is manufactured, the hardness of the metallurgical target material is relatively low, so that the metallurgical target material has certain defects after production, the normal use of the target material is seriously influenced, and the use of a user is inconvenient.
Therefore, it is necessary to invent a powder metallurgy target material and a manufacturing method thereof.
Disclosure of Invention
Therefore, the invention provides a powder metallurgy target material and a manufacturing method thereof, after the metallurgy target material is produced and molded, metal powder in the metallurgy target material is uniformly mixed, materials such as metal , metal , metal nickel and the like are added, the hardness of the formed metallurgy target material is greatly improved, the defect of low hardness of the metallurgy target material is overcome, the normal use of the metallurgy target material is ensured, the use is more convenient for a user, and the problems that the hardness of the metallurgy target material is relatively low, the metallurgy target material has certain defects after production, the normal use of the target material is seriously influenced, and the use by the user is inconvenient are solved.
In order to achieve the above purpose, the invention provides the following technical scheme: a powder metallurgy target material comprises gold, metal , metal and metal nickel, wherein the mass parts of the components are as follows:
gold: 95-70 parts;
metal : 0-25 parts;
metal : 0-15 parts;
a metal nickel: 0-5 parts.
A manufacturing method of a powder metallurgy target material comprises the following specific steps:
s1 powdering: processing gold, metal , metal and metal nickel into powder by an aerosol method;
s2 powder preparation: placing 95-70 parts of gold powder, 0-25 parts of metal powder, 0-15 parts of metal powder, and 0-5 parts of metal nickel powder inside a container;
s3 powder mixing: mixing 95-70 parts gold powder, 0-25 parts metal powder, 0-15 parts metal powder, 0-5 parts metal nickel powder inside a container by a stirrer;
s4 heating: heating the container through the heating plate while the stirrer stirs the powder inside the container;
s5 releasing the mould: placing the heated powder inside a mold;
s6, high-temperature hot pressing: carrying out hot pressing on the powder in the die through a heating plate and a hydraulic press;
s7, cooling: and after the hot pressing is finished, cooling the target material by a fan.
Preferably, in the step S1, the crushing time of the metal crusher is 30-50 min.
Preferably, in the step S3, the stirring time of the stirrer is 30-35 min.
Preferably, in the step S4, the heating temperature of the heating plate is 300-800 ℃, and the heating time is 25-30 min.
Preferably, in the step S7, the temperature of the heating plate is 250-500 ℃, and the heating time is 30-40 min.
Preferably, in the step S7, the hydraulic press is uniaxially pressed at a pressure of 1000kgf/cm 2 to 4000kgf/cm 2.
Preferably, in the step S8, the fan cooling time is 15-30 min.
The invention has the beneficial effects that:
according to the invention, after the metallurgical target material is produced and molded, all metal powder in the metallurgical target material is uniformly mixed, materials such as metal , metal , metal nickel and the like are added, the metal , the metal and the metal nickel have relatively good hardness, and the metal powder is more firmly mixed by an aerosol method, so that the hardness of the molded metallurgical target material is greatly improved, the defect of low hardness of the metallurgical target material is overcome, the normal use of the metallurgical target material is ensured, and the use of a user is more convenient.
Detailed Description
The following description of the preferred embodiments of the present invention is provided for the purpose of illustration and description, and is in no way intended to limit the invention.
Example 1:
the invention provides a powder metallurgy target material, which comprises gold, metal , metal and a metal nickel, wherein the mass parts of the components are as follows:
gold: 75 parts of a mixture;
metal : 25 parts of (1);
a manufacturing method of a powder metallurgy target material comprises the following specific steps:
s1 powdering: processing gold and metal into powder by aerosol method;
s2 powder preparation: placing 75 parts of gold powder and 25 parts of metal powder inside a container;
s3 powder mixing: mixing 75 parts of gold powder and 25 parts of metal powder inside the container by a stirrer;
s4 heating: heating the container through the heating plate while the stirrer stirs the powder inside the container;
s5 releasing the mould: placing the heated powder inside a mold;
s6, high-temperature hot pressing: carrying out hot pressing on the powder in the die through a heating plate and a hydraulic press;
s7, cooling: and after the hot pressing is finished, cooling the target material by a fan.
Further, in the step S1, the crushing time of the metal crusher is 30 min.
Further, in the step S3, the stirring time of the stirrer is 30 min.
Further, in the step S4, the heating temperature of the heating plate is 450 ℃, and the heating time is 25 min.
Further, in the step S7, the temperature of the heating plate is 250 ℃, and the heating time is 30 min.
Further, in said step S7, the hydraulic press is uniaxially pressed at a pressure of 1000kgf/cm 2.
Further, in the step S8, the fan cooling time is 15 min.
Example 2:
the invention provides a powder metallurgy target material, which comprises gold and metal , wherein the mass parts of the components are as follows:
gold: 88 parts of (C);
metal : 12 parts.
A manufacturing method of a powder metallurgy target material comprises the following specific steps:
s1 powdering: processing gold and metal into powder by aerosol method.
S2 powder preparation: 88 parts gold powder, 12 parts metal powder were placed inside the container.
S3 powder mixing: 88 parts of gold powder and 12 parts of metal powder inside the container were mixed by a stirrer.
S4 heating: heating the container through the heating plate while the stirrer stirs the powder inside the container;
s5 releasing the mould: placing the heated powder inside a mold;
s6, high-temperature hot pressing: carrying out hot pressing on the powder in the die through a heating plate and a hydraulic press;
s7, cooling: and after the hot pressing is finished, cooling the target material by a fan.
Further, in the step S1, the crushing time of the metal crusher is 40 min.
Further, in the step S3, the stirrer stirs for 33 min.
Further, in the step S4, the heating temperature of the heating plate is 800 ℃, and the heating time is 25-30 min.
Further, in the step S7, the temperature of the heating plate is 300 ℃, and the heating time is 33 min.
Further, in said step S7, the hydraulic press is uniaxially pressed at a pressure of 2000kgf/cm 2.
Further, in the step S8, the fan cooling time is 20 min.
Example 3:
the invention provides a powder metallurgy target material, which comprises gold, metal , metal and a metal nickel, wherein the mass parts of the components are as follows:
gold: 88 parts of (C);
metal : 11 parts of (1);
a metal nickel: 1 part.
A manufacturing method of a powder metallurgy target material comprises the following specific steps:
s1 powdering: processing gold, metal , metal and metal nickel into powder by an aerosol method;
s2 powder preparation: placing 88 parts of gold powder, 11 parts of metal powder, and 1 part of metal nickel powder inside a container;
s3 powder mixing: mixing 88 parts of gold powder, 11 parts of metal powder, and 1 part of metal nickel powder inside the container by a stirrer;
s4 heating: heating the container through the heating plate while the stirrer stirs the powder inside the container;
s5 releasing the mould: placing the heated powder inside a mold;
s6, high-temperature hot pressing: carrying out hot pressing on the powder in the die through a heating plate and a hydraulic press;
s7, cooling: and after the hot pressing is finished, cooling the target material by a fan.
Further, in the step S1, the crushing time of the metal crusher is 45 min.
Further, in the step S3, the stirring time of the stirrer is 333 min.
Further, in the step S4, the heating temperature of the heating plate is 800 ℃, and the heating time period is 28 min.
Further, in the step S7, the temperature of the heating plate is 450 ℃, and the heating time is 43 min.
Further, in said step S7, the hydraulic press is uniaxially pressurized at a pressure of 3800kgf/cm 2.
Further, in the step S8, the fan cooling time is 26 min.
Example 4:
the invention provides a powder metallurgy target material, which comprises gold, metal , metal and a metal nickel, wherein the mass parts of the components are as follows:
gold: 75 parts of a mixture;
metal : 20 parts of (1);
metal : 4 parts of a mixture;
a metal nickel: 1 part.
A manufacturing method of a powder metallurgy target material comprises the following specific steps:
s1 powdering: processing gold, metal , metal and metal nickel into powder by an aerosol method;
s2 powder preparation: placing 75 parts of gold powder, 20 parts of metal powder, 4 parts of metal powder, and 1 part of metal nickel powder inside a container;
s3 powder mixing: mixing 20 parts of gold powder, 6 parts of metal powder, 13 parts of metal powder and 8 parts of metal nickel powder inside a container by a stirrer;
s4 heating: heating the container through the heating plate while the stirrer stirs the powder inside the container;
s5 releasing the mould: placing the heated powder inside a mold;
s6, high-temperature hot pressing: carrying out hot pressing on the powder in the die through a heating plate and a hydraulic press;
s7, cooling: and after the hot pressing is finished, cooling the target material by a fan.
Further, in the step S1, the crushing time of the metal crusher is 50 min.
Further, in the step S3, the stirring time of the stirrer is 35 min.
Further, in the step S4, the heating temperature of the heating plate is 600 ℃, and the heating time is 30 min.
Further, in the step S7, the temperature of the heating plate is 500 ℃, and the heating time is 40 min.
Further, in said step S7, the hydraulic press is uniaxially pressed at a pressure of 4000kgf/cm 2.
Further, in the step S8, the fan cooling time is 30 min.
Example 5:
taking the methods of the above examples 1 to 4, respectively, 120 sputtering targets were fabricated in four molds of the same area, each 30 sputtering targets were divided into one group, and the hardness of the targets was measured after molding, to obtain the following data:
as can be seen from the above table, the method in example 4 is suitable, after the metallurgical target material is produced and molded, the metal powders in the metallurgical target material are uniformly mixed, and the hardness of the metallurgical target material after molding is greatly improved by adding , and a metal nickel material.
The above description is only a preferred embodiment of the present invention, and any person skilled in the art may modify the present invention or modify it into an equivalent technical solution by using the technical solution described above. Therefore, any simple modifications or equivalent substitutions made in accordance with the technical solution of the present invention are within the scope of the claims of the present invention.
Claims (8)
1. A powder metallurgy target material is characterized in that: the alloy comprises gold, metal , metal and metal nickel, wherein the mass parts of the components are as follows:
gold: 95-70 parts;
metal : 0-25 parts;
metal : 0-15 parts;
a metal nickel: 0-5 parts.
2. A manufacturing method of a powder metallurgy target material is characterized by comprising the following steps: the method comprises the following specific steps:
s1 powdering: processing gold, metal , metal and metal nickel into powder by an aerosol method;
s2 powder preparation: placing 95-70 parts gold powder, 5-25 parts metal powder, 5-15 parts metal powder, and 1-5 parts metal nickel powder inside a container;
s3 powder mixing: mixing 95-70 parts gold powder, 5-25 parts metal powder, 5-15 parts metal powder and 1-5 parts metal nickel powder inside a container by a stirrer;
s4 heating: heating the container through the heating plate while the stirrer stirs the powder inside the container;
s5 releasing the mould: placing the heated powder inside a mold;
s6, high-temperature hot pressing: carrying out hot pressing on the powder in the die through a heating plate and a hydraulic press;
s7, cooling: and after the hot pressing is finished, cooling the target material by a fan.
3. The method of claim 2, wherein the step of forming the powder metallurgy target comprises: in the step S1, the crushing time of the metal crusher is 30-50 min.
4. The method of claim 2, wherein the step of forming the powder metallurgy target comprises: in the step S3, the stirring time of the stirrer is 30-35 min.
5. The method of claim 2, wherein the step of forming the powder metallurgy target comprises: in the step S4, the heating temperature of the heating plate is 300-800 ℃, and the heating time is 25-30 min.
6. The method of claim 2, wherein the step of forming the powder metallurgy target comprises: in the step S7, the temperature of the heating plate is 250-500 ℃, and the heating time is 30-40 min.
7. The method of claim 2, wherein the step of forming the powder metallurgy target comprises: in said step S7, the hydraulic press is uniaxially pressed at a pressure of 1000kgf/cm 2 to 4000kgf/cm 2.
8. The method of claim 2, wherein the step of forming the powder metallurgy target comprises: in the step S8, the fan cooling time is 15-30 min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011284459.0A CN112410738A (en) | 2020-11-17 | 2020-11-17 | Powder metallurgy target material and manufacturing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011284459.0A CN112410738A (en) | 2020-11-17 | 2020-11-17 | Powder metallurgy target material and manufacturing method thereof |
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| CN112410738A true CN112410738A (en) | 2021-02-26 |
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| CN202011284459.0A Pending CN112410738A (en) | 2020-11-17 | 2020-11-17 | Powder metallurgy target material and manufacturing method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113652643A (en) * | 2021-08-13 | 2021-11-16 | 杭州兴宸科技有限公司 | Powder metallurgy target material purple gold coating method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020130041A1 (en) * | 2001-03-13 | 2002-09-19 | Jyh-Chung Wen | Method of regenerating a phase-change sputtering target for optical storage media |
| CN107385266A (en) * | 2017-08-03 | 2017-11-24 | 深圳市金弘珠宝首饰有限公司 | High intensity pure gold material and preparation method thereof |
| CN107470625A (en) * | 2017-08-15 | 2017-12-15 | 唐山国丰钢铁有限公司 | A kind of powder metallurgy process for preparing high-purity material |
| US20200340078A1 (en) * | 2019-04-23 | 2020-10-29 | Noppon Hirunjaru | Gold alloy including hardness improving elements |
-
2020
- 2020-11-17 CN CN202011284459.0A patent/CN112410738A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020130041A1 (en) * | 2001-03-13 | 2002-09-19 | Jyh-Chung Wen | Method of regenerating a phase-change sputtering target for optical storage media |
| CN107385266A (en) * | 2017-08-03 | 2017-11-24 | 深圳市金弘珠宝首饰有限公司 | High intensity pure gold material and preparation method thereof |
| CN107470625A (en) * | 2017-08-15 | 2017-12-15 | 唐山国丰钢铁有限公司 | A kind of powder metallurgy process for preparing high-purity material |
| US20200340078A1 (en) * | 2019-04-23 | 2020-10-29 | Noppon Hirunjaru | Gold alloy including hardness improving elements |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113652643A (en) * | 2021-08-13 | 2021-11-16 | 杭州兴宸科技有限公司 | Powder metallurgy target material purple gold coating method |
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Address after: 215300 No. 135 CHENFENG East Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Applicant after: Guangyang new material technology (Kunshan) Co.,Ltd. Address before: 215000 south of CHENFENG Road, Wusongjiang Industrial Park, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Applicant before: KUNSHAN MULTIRESOURCE TECHNOLOGY Inc. |
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