CN112394836A - Touch display panel and manufacturing method thereof - Google Patents
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- CN112394836A CN112394836A CN202011286992.0A CN202011286992A CN112394836A CN 112394836 A CN112394836 A CN 112394836A CN 202011286992 A CN202011286992 A CN 202011286992A CN 112394836 A CN112394836 A CN 112394836A
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- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
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- G—PHYSICS
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- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/40—OLEDs integrated with touch screens
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- G—PHYSICS
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- G06F—ELECTRIC DIGITAL DATA PROCESSING
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- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
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- Theoretical Computer Science (AREA)
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Abstract
The invention provides a touch display panel which comprises a substrate, a touch layer, a light-emitting device layer and a packaging layer, wherein the touch layer and the light-emitting device layer are arranged on the substrate, the packaging layer is arranged on the touch layer and the light-emitting device layer, the touch layer comprises a plurality of touch electrodes, the light-emitting device layer comprises a plurality of light-emitting units, and the touch electrodes are arranged on the side surfaces of light-emitting areas of the light-emitting units. According to the touch display panel provided by the invention, the touch electrode of the touch layer is arranged on the side surface of the light emitting unit, so that the light emitting effect of the light emitting layer is not hindered, the problem of low definition of a display picture caused by the fact that the touch layer blocks the light emitting effect of the light emitting layer in the prior art is solved, meanwhile, the touch layer is not arranged on the packaging layer, the problem of packaging failure caused by a photoetching wet process is avoided, and the service life of the touch display panel is prolonged. The invention also provides a manufacturing method of the touch display panel.
Description
Technical Field
The invention relates to the technical field of display, in particular to a touch display panel and a manufacturing method thereof.
Background
In order to achieve the light and thin touch display panel, an in-cell touch technology is usually adopted to integrate the touch layer on the thin film encapsulation layer. However, in this structure, since the touch layer is located above the light emitting layer, the light emitting effect of the light emitting layer is affected, and the definition of the display screen is reduced. In addition, since a photo-etching wet process is usually adopted to prepare the touch layer on the thin film encapsulation layer, the process is complicated, the thin film encapsulation layer is easily subjected to encapsulation failure, and the service life of the touch display panel is reduced.
Disclosure of Invention
Therefore, it is necessary to provide a touch display panel and a manufacturing method thereof to solve the technical problems of low definition and short service life of the display screen of the touch display panel in the prior art.
In a first aspect, the present invention provides a touch display panel, including a substrate, a touch layer, a light emitting device layer, and a packaging layer, where the touch layer and the light emitting device layer are disposed on the substrate, the packaging layer is disposed on the touch layer and the light emitting device layer, the touch layer includes a plurality of touch electrodes, the light emitting device layer includes a plurality of light emitting units, and the touch electrodes are disposed on side surfaces of light emitting areas of the light emitting units.
In some embodiments, the touch display panel further includes a first pixel definition layer and a second pixel definition layer, the first pixel definition layer is disposed on the substrate, the touch electrodes are disposed on the first pixel definition layer, the second pixel definition layer is disposed on the touch electrodes and the first pixel definition layer, and the light emitting units are disposed in the first pixel definition layer and the second pixel definition layer.
In some embodiments, the touch electrodes are divided into a plurality of first electrodes and a plurality of second electrodes, the first electrodes are arranged in a matrix to form a plurality of parallel first electrode groups, the second electrodes are arranged in a matrix to form a plurality of parallel second electrode groups, and the first electrode groups and the second electrode groups are vertically crossed and arranged in an insulating manner to form a plurality of touch units; any two adjacent first electrodes in each first electrode group are electrically connected through a section of connecting wire, and the connecting wire is arranged on the first pixel definition layer and arranged on the same layer as the touch electrode; any two adjacent second electrodes in each second electrode group are electrically connected through a section of bridging line, and the bridging line is arranged on the second pixel definition layer and bridges the second electrodes through a through hole.
In some embodiments, the light emitting device layer includes an anode layer, a light emitting layer, and a cathode layer, the anode layer is disposed on the substrate, the first pixel defining layer is disposed on the anode layer and the substrate, the second pixel defining layer is disposed on the first pixel defining layer, the light emitting layer includes a plurality of the light emitting units, the light emitting units are disposed on the anode layer and located in the first pixel defining layer and the second pixel defining layer, and the cathode layer is disposed on the second pixel defining layer and connected to the light emitting layer.
In some embodiments, the touch display panel further includes a thin film transistor layer and a flat layer, the thin film transistor layer is disposed on the substrate, the flat layer is disposed on the thin film transistor layer, the anode layer is disposed on the flat layer and connected to a drain in the thin film transistor layer through a via hole, and the first pixel definition layer is disposed on the anode layer and the flat layer.
In some embodiments, the cathode layer and the bridge lines are disposed on the same layer and are made of the same material.
In some embodiments, the thickness of the first pixel defining layer ranges from 0.5 μm to 1 μm, and the thickness of the second pixel defining layer ranges from 0.1 μm to 0.5 μm.
In a second aspect, the present invention provides a method for manufacturing a touch display panel, where the method for manufacturing the touch display panel includes the following steps:
providing a substrate;
preparing a touch layer and a light-emitting device layer, wherein the touch layer comprises a plurality of touch electrodes, the light-emitting device layer comprises a plurality of light-emitting units, and the touch electrodes are arranged on the side surfaces of light-emitting areas of the light-emitting units;
preparing an encapsulation layer, wherein the encapsulation layer covers the touch layer and the light-emitting device layer.
In some embodiments, the step of "preparing the touch layer and the light emitting device layer" includes:
preparing an anode layer;
preparing a first pixel defining layer, wherein the first pixel defining layer is provided with a through hole so as to expose the anode layer;
preparing the touch electrode on the first pixel definition layer;
preparing a second pixel defining layer on the first pixel defining layer, wherein the second pixel defining layer is provided with a through hole to expose part of the touch electrode;
preparing a light emitting layer on the anode layer, wherein the light emitting layer comprises a plurality of light emitting units;
preparing a metal layer on the second pixel defining layer, the exposed part of the touch electrode and the light emitting layer;
and cutting the metal layer to form a cathode layer and a plurality of bridging lines, wherein each bridging line bridges two adjacent touch electrodes through the via hole of the second pixel definition layer, and the cathode layer is connected with the light emitting layer.
In some embodiments, before the step of "preparing the anode layer", the method for manufacturing the touch display panel further includes:
preparing a thin film transistor layer on the substrate;
preparing a flat layer on the thin film transistor layer, wherein the flat layer is provided with a through hole to expose a drain electrode in the thin film transistor layer, the anode layer is arranged on the flat layer and is connected with the drain electrode through the through hole of the flat layer, and the first pixel defining layer is arranged on the anode layer and the flat layer.
According to the touch display panel provided by the invention, the touch electrode of the touch layer is arranged on the side surface of the light emitting unit, so that the light emitting effect of the light emitting layer is not hindered, the problem of low definition of a display picture caused by the fact that the touch layer blocks the light emitting effect of the light emitting layer in the prior art is solved, meanwhile, the touch layer is not arranged on the packaging layer, the problem of packaging failure caused by a photoetching wet process is avoided, and the service life of the touch display panel is prolonged.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic top view of a touch display panel according to an embodiment of the invention.
Fig. 2 is an enlarged schematic view of the touch unit a of the touch display panel shown in fig. 1.
Fig. 3 is a partial cross-sectional view of the touch display panel shown in fig. 2 along the line a-a.
Fig. 4 is a partial cross-sectional view of the touch display panel shown in fig. 2 along the line B-B.
Fig. 5 is a partial cross-sectional view of the touch display panel shown in fig. 2 along the line C-C.
Fig. 6 is a flowchart of a method for manufacturing a touch display panel according to an embodiment of the invention.
Fig. 7 is a detailed expanded flowchart of step S2 in the manufacturing method shown in fig. 6.
Fig. 8 is a film diagram of the touch display panel after the step S212 shown in fig. 7 is executed.
Fig. 9 is a film diagram of the touch display panel after the step S213 shown in fig. 7 is executed.
Fig. 10 is a film diagram of the touch display panel after the step S214 shown in fig. 7 is executed.
Fig. 11 is a film diagram of the touch display panel after the step S215 shown in fig. 7 is executed.
Fig. 12 is a film diagram of the touch display panel after the step S216 shown in fig. 7 is executed.
Fig. 13 is a film diagram of the touch display panel after the step S217 shown in fig. 7 is executed.
Fig. 14 is a flowchart of a method for manufacturing a touch display panel according to an embodiment of the invention before step S211.
Fig. 15 is a detailed expanded flowchart of step S3 in the manufacturing method shown in fig. 6.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Fig. 1 is a schematic top view of a touch display panel according to an embodiment of the present invention, and as shown in fig. 1, the touch display panel includes a touch area 10, a routing area 20, and a binding area 30.
The touch area 10 includes a plurality of touch electrodes, the plurality of touch electrodes are divided into a plurality of first electrodes 1011 and a plurality of second electrodes 1021, the plurality of first electrodes 1011 are arranged in a matrix to form a plurality of parallel first electrode groups 101, the plurality of second electrodes 1021 are arranged in a matrix to form a plurality of parallel second electrode groups 102, and the first electrode groups 101 and the second electrode groups 102 are perpendicularly crossed and insulated to form a plurality of touch units as shown in fig. 2. Any two adjacent first electrodes 1011 in each first electrode group 101 are electrically connected by a section of connecting wire, and the connecting wire and the touch electrode 100 are disposed on the same layer. Any two adjacent second electrodes 1021 in each second electrode group 102 are electrically connected through a section of bridging line 1022, the bridging line 1022 is not in the same layer as the touch electrode 100, and the bridging line 1022 bridges the second electrodes 1021 through a via hole.
The first electrode 1011 and the second electrode 1021 are used for realizing a touch function of the touch display panel. If the first electrode 1011 serves as a driving electrode, the second electrode 1021 serves as a sensing electrode; if the first electrode 1011 serves as a sensing electrode, the second electrode 1021 serves as a driving electrode.
In all embodiments of the present invention, the first electrode group 101 is defined as an electrode group extending in the horizontal direction shown in fig. 1, and the second electrode group 102 is defined as an electrode group extending in the vertical direction shown in fig. 1.
A plurality of touch traces 201 corresponding to the first electrode groups 101 and the second electrode groups 102 are disposed in the trace area 20, one end of each touch trace 201 is connected to the corresponding first electrode group 101 or second electrode group 102, and the other end extends to the bonding area 30.
The binding area 30 is internally provided with a driving chip, a touch control circuit is integrated in the driving chip, one end of each touch wiring 201 extending to the binding area 30 is connected with the touch control circuit, when a hand touches the screen, the capacitance value between the first electrode 1011 and the second electrode 1021 corresponding to the touch area is changed, and the touch control circuit calculates the coordinate of the touch area by detecting the area of the capacitance value change, so as to realize touch control.
Fig. 2 is an enlarged schematic view of the touch unit a of the touch display panel shown in fig. 1, as shown in fig. 2, the touch unit a includes a first electrode group 101 and a second electrode group 102, the first electrode group 101 includes two first electrodes 1011 connected with each other, the two first electrodes 1011 are connected by a connecting line, the second electrode group 102 includes two second electrodes 1021, the two second electrodes 1021 are bridged by a bridging line 1022, wherein the bridging line 1022 specifically includes three bridging lines 1022.
The first electrode 1011 and the second electrode 1021 are both formed of mesh metal wires and are each in a rhombic mesh shape. The three bridge lines 1022 shown in fig. 2 are connected to the two second electrodes 1021 at bridge points a, b, c, a ', b ', and c ' through via holes, respectively. It should be noted that each grid shown in fig. 2 corresponds to one sub-pixel unit in the touch display panel.
Fig. 3 is a partial cross-sectional view of the touch display panel shown in fig. 2 along a line a-a, and fig. 3 shows the film structure of the touch display panel after being cut at a connection region (a region passing through b to c, which is referred to as a bridge region for convenience of description) between three bridge lines 1022 and one second electrode 1021. It should be noted that the film layer structure in the bridge region includes three sub-pixel units 40, and the following mainly describes the film layer structure in any one of the sub-pixel units 40.
As shown in fig. 3, the touch display panel includes a substrate 501, a touch layer, a light emitting device layer and a packaging layer, wherein the touch layer and the light emitting device layer are disposed on the substrate 501, the packaging layer is disposed on the touch layer and the light emitting device layer, the touch layer includes a plurality of touch electrodes 100, the light emitting device layer includes a plurality of light emitting units 606, and the touch electrodes 100 are disposed on the side surfaces of the light emitting areas of the light emitting units 606.
According to the touch display panel provided by the embodiment of the invention, the touch electrode of the touch layer is arranged on the side surface of the light emitting unit, so that the light emitting effect of the light emitting layer is not hindered, the problem of low definition of a display picture caused by the fact that the touch layer blocks the light emitting effect of the light emitting layer in the prior art is solved, meanwhile, the touch layer is not arranged on the packaging layer, the problem of packaging failure caused by a photoetching wet process is avoided, and the service life of the touch display panel is prolonged.
In some embodiments, with reference to fig. 3, the touch display panel further includes a first pixel defining layer 603 and a second pixel defining layer 605, the first pixel defining layer 603 is disposed on the substrate 501, the touch electrodes 100 are disposed on the first pixel defining layer 603, the second pixel defining layer 605 is disposed on the touch electrodes 100 and the first pixel defining layer 603, and the light emitting units 606 are disposed in the first pixel defining layer 603 and the second pixel defining layer 605.
In some embodiments, referring to fig. 1, fig. 2 and fig. 3, the touch electrodes 100 are divided into a plurality of first electrodes 1011 and a plurality of second electrodes 1021, the first electrodes 1011 are arranged in a matrix to form a plurality of parallel first electrode groups 101, the second electrodes 1021 are arranged in a matrix to form a plurality of parallel second electrode groups 102, and the first electrode groups 101 and the second electrode groups 102 are vertically crossed and insulated to form a plurality of touch units; any two adjacent first electrodes 1011 in each first electrode group 101 are electrically connected by a section of connecting wire, and the connecting wire is arranged on the first pixel definition layer 603 and is arranged on the same layer as the touch electrode 100; any two adjacent second electrodes 1021 in each second electrode group 102 are electrically connected through a section of bridging line 1022, and the bridging line 1022 is disposed on the second pixel definition layer 605 and bridges the second electrodes 1021 through the via holes.
In some embodiments, referring to fig. 3, the light emitting device layer includes an anode layer 602, a light emitting layer and a cathode layer 6072, the anode layer 602 is disposed on the substrate 501, the first pixel definition layer 603 is disposed on the anode layer 602 and the substrate 501, the second pixel definition layer 605 is disposed on the first pixel definition layer 603, the light emitting layer includes a plurality of light emitting units 606, the light emitting units 606 are disposed on the anode layer 602 and located in the first pixel definition layer 603 and the second pixel definition layer 605, and the cathode layer 6072 is disposed on the second pixel definition layer 605 and connected to the light emitting layer.
Note that the light-emitting device layer may further include a hole injection layer and a hole transport layer provided between the anode layer 602 and the light-emitting layer, and an electron transport layer and an electron injection layer provided between the light-emitting layer and the cathode layer 6072. In this case, a hole injection layer is provided over the anode layer 602, a hole transport layer is provided over the hole injection layer, a light-emitting layer is provided over the hole transport layer, an electron transport layer is provided over the light-emitting layer, an electron injection layer is provided over the electron transport layer, and a cathode layer 6072 is provided over the electron injection layer.
In some embodiments, with reference to fig. 3, the touch display panel further includes a thin film transistor layer and a flat layer 601, the thin film transistor layer is disposed on the substrate 501, the flat layer 601 is disposed on the thin film transistor layer, the anode layer 602 is disposed on the flat layer 601 and connected to a drain of the thin film transistor layer through a via, and the first pixel definition layer 603 is disposed on the anode layer 602 and the flat layer 601.
Specifically, the thin-film transistor layer includes: a buffer layer 502 provided over the substrate 501; an active layer disposed on the buffer layer 502, wherein the active layer includes a channel 5030, and a source doped region 5031 and a drain doped region 5032 disposed on two sides of the channel 5030 respectively; a first gate insulating layer 504 disposed on the buffer layer 502 and covering the active layer; a first gate electrode 505 disposed on the first gate insulating layer 504; a second gate insulating layer 506 disposed on the first gate insulating layer 504 and covering the first gate electrode 505; a second gate electrode 507 provided on the second gate insulating layer 506; an interlayer dielectric layer 508 disposed on the second gate insulating layer 506 and covering the second gate 507; and the source and drain layers are arranged on the interlayer dielectric layer 508 and comprise a source 5091 and a drain 5092, the source 5091 is connected with the source doped region 5031 through via holes arranged in the interlayer dielectric layer 508, the second gate insulating layer 506 and the first gate insulating layer 504, and the drain 5092 is connected with the drain doped region 5032 through via holes arranged in the interlayer dielectric layer 508, the second gate insulating layer 506 and the first gate insulating layer 504. The planarization layer 601 is specifically disposed on the interlayer dielectric layer 508 in the thin film transistor layer and covers the source/drain layer.
In some embodiments, with continued reference to fig. 3, the cathode layer 6072 and the bridge lines 1022 are disposed on the same layer and are made of the same material.
It can be understood that if the cathode layer 6072 and the bridge lines 1022 are disposed on the same layer and have the same material, the cathode layer 6072 and the bridge lines 1022 can be prepared by the same process, which not only reduces the thickness of the touch display panel, but also reduces the manufacturing process and saves the manufacturing cost.
In some embodiments, the thickness of the first pixel defining layer 603 ranges from 0.5 μm to 1 μm, and the thickness of the second pixel defining layer 605 ranges from 0.1 μm to 0.5 μm.
In some embodiments, with reference to fig. 3, the package layer includes a first inorganic layer 701 disposed on the second pixel defining layer 605, the bridge line 1022 and the cathode layer 6072, an organic layer 702 disposed on the first inorganic layer 701, and a second inorganic layer 703 disposed on the organic layer 702. Wherein the thickness of the first inorganic layer 701 ranges from 0.01 to 1 μm.
Fig. 4 is a partial cross-sectional view of the touch display panel shown in fig. 2 taken along line B-B, and fig. 4 shows the film layer structure of the touch display panel cut away from the non-bridging area. The film layer structure of the non-bridging region shown in fig. 4 is different from the film layer structure of the bridging region shown in fig. 3 in that the bridging lines 1022 in the film layer structure of the non-bridging region shown in fig. 4 are connected with the cathode layer 6072 to form a whole (the metal layer 607 shown in fig. 4), and the second pixel definition layer 605 completely covers the touch electrode 100 to separate the touch electrode 100 from the metal layer 607 so as to insulate the touch electrode 100 from the metal layer 607.
Fig. 5 is a partial cross-sectional view of the touch display panel shown in fig. 2 along the line C-C, and fig. 5 only illustrates a partial film structure of the whole body formed by the light emitting device layer and the touch layer of the touch display panel, as shown in fig. 5, the partial film structure includes a first pixel defining layer 603; a first electrode 1011 and two second electrodes 1021 arranged on the first pixel definition layer 603; a second pixel defining layer 605 disposed on the first pixel defining layer 603, wherein the second pixel defining layer 605 has two via holes exposing the two second electrodes 1021; the bridging line 1022 is disposed on the second pixel defining layer 605, and the bridging line 1022 is electrically connected to the two second electrodes 1021 through two vias, respectively.
Fig. 6 is a flowchart of a manufacturing method of a touch display panel according to an embodiment of the present invention, and as shown in fig. 6, the manufacturing method includes:
in step S1, a substrate 501 is provided.
Specifically, the substrate 501 may be any of rigid substrates such as a glass substrate, a quartz substrate, and a resin substrate, or may be a flexible substrate such as a flexible substrate made of polyimide.
Step S2, a touch layer and a light emitting device layer are prepared, where the touch layer includes a plurality of touch electrodes 100, the light emitting device layer includes a plurality of light emitting units 606, and the touch electrodes 100 are disposed on the side surfaces of the light emitting areas of the light emitting units 606.
Step S3, preparing an encapsulation layer, the encapsulation layer covering the touch layer and the light emitting device layer.
According to the manufacturing method of the touch display panel provided by the embodiment of the invention, the touch electrode of the touch layer is arranged on the side surface of the light emitting unit, so that the light emitting effect of the light emitting layer is not hindered, the problem of low definition of a display picture caused by the fact that the touch layer blocks the light emitting effect of the light emitting layer in the prior art is solved, meanwhile, the touch layer is not arranged on the packaging layer, the problem of packaging failure caused by a photoetching wet process is avoided, and the service life of the touch display panel is prolonged.
Fig. 7 is a detailed expanded flow chart of step S2 in the manufacturing method shown in fig. 6, and as shown in fig. 7, the step "preparing the touch layer and the light emitting device layer" includes:
in step S211, an anode layer 602 is prepared.
In step S212, referring to fig. 8, a first pixel defining layer 603 is prepared, and the first pixel defining layer 603 is formed with a via hole to expose the anode layer 602. The first pixel defining layer 603 is formed by coating, exposing, and developing, and the thickness thereof ranges from 0.5 μm to 1 μm.
In step S213, referring to fig. 9, the touch electrode 100 is prepared on the first pixel defining layer 603. The first pixel defining layer 603 is formed by depositing a layer of metal on the first pixel defining layer 603 by physical vapor deposition, and exposing and developing the layer of metal.
In step S214, referring to fig. 10, a second pixel defining layer 605 is prepared on the first pixel defining layer 603, and the second pixel defining layer 605 is formed with a via hole to expose a portion of the touch electrode 100. The second pixel defining layer 605 is formed by coating, exposing, and developing, and the thickness thereof ranges from 0.1 μm to 0.5 μm.
In step S215, referring to fig. 11, a light-emitting layer is prepared on the anode layer 602 by using an evaporation method and different masks, and the light-emitting layer includes a plurality of light-emitting units 606.
In step S216, referring to fig. 12, a metal layer is formed on the second pixel defining layer 605, the exposed portion of the touch electrode 100 and the light emitting layer.
In step S217, referring to fig. 13, the metal layer is cut by laser light to form a cathode layer and a plurality of bridge lines 1022, each bridge line 1022 bridges two adjacent touch electrodes 100 through the via hole of the second pixel definition layer 605, and the cathode layer 6072 is connected to the light emitting layer.
Fig. 14 is a flowchart of a manufacturing method of a touch display panel according to an embodiment of the present invention before step S211, and as shown in fig. 14, the manufacturing method further includes, before step S211:
s201, preparing a thin film transistor layer on the substrate 501.
S202, preparing a flat layer 601 on the thin film transistor layer, wherein the flat layer 601 is provided with a through hole to expose a drain electrode in the thin film transistor layer, an anode layer 602 is arranged on the flat layer 601 and connected with the drain electrode through the through hole of the flat layer 601, and a first pixel definition layer 603 is arranged on the anode layer 602 and the flat layer 601.
Fig. 15 is a detailed development flowchart of step S3 in the manufacturing method shown in fig. 6, and as shown in fig. 15, the step "preparing an encapsulation layer" includes:
in step S31, the first inorganic layer 701 is prepared on the second pixel defining layer 605, the bridge line 1022, and the cathode layer 6072.
In step S32, an organic layer 702 is prepared on the first inorganic layer 701.
In step S33, a second inorganic layer 703 is prepared on the organic layer 702.
Specifically, referring to fig. 3, after the touch layer and the light emitting device layer are prepared, an encapsulation layer is prepared on the touch layer and the light emitting device layer. Specifically, the first inorganic layer 701 is first deposited on the second pixel defining layer 605, the second pixel defining layer 1022 and the cathode layer 6072 by Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma Chemical Vapor Deposition (HDPCVD), Atomic Layer Deposition (ALD), Inductively Coupled Plasma Chemical Vapor Deposition (ICPCVD), or Pulsed Laser Deposition (PLD) to a thickness of 0.01 to 1um, and the preparation material of the first inorganic layer 701 is not limited to aluminum oxide (Al), and the first inorganic layer 701 is deposited by a Plasma Enhanced Chemical Vapor Deposition (PECVD), a High Density Plasma Chemical Vapor Deposition (HDPCVD), an Atomic Layer Deposition (ALD), an Inductively Coupled Plasma Chemical Vapor Deposition (ICPCVD), or a Pulsed Laser Deposition (PLD)2O3) Titanium dioxide (TiO)2) A combination of any one or more of silicon nitride (SiNx), silicon oxynitride (sion x), and silicon oxide (SiOx), the first inorganic layer 701 serving to block moisture in the external environment; then, an organic layer 702 is prepared on the first inorganic layer 701 by using an Ink Jet Printing (IJP) method or PECVD, the preparation material of the organic layer 702 is not limited to any one or a combination of Acryl (Acryl), Hexamethyldisiloxane (HMDSO), and polycarbonate, and the organic layer 702 serves to planarize foreign substances on the surface of the first inorganic layer 701, and relieve stress of the light emitting device layer when bent or folded; finally, the deposition process of the first inorganic layer 701 is repeated to prepare a second inorganic layer 703 on the organic layer 702, thereby forming an inorganic/organic/inorganic alternating structure.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. A touch display panel comprises a substrate, a touch layer, a light-emitting device layer and a packaging layer, and is characterized in that the touch layer and the light-emitting device layer are arranged on the substrate, the packaging layer is arranged on the touch layer and the light-emitting device layer, the touch layer comprises a plurality of touch electrodes, the light-emitting device layer comprises a plurality of light-emitting units, and the touch electrodes are arranged on the side faces of light-emitting areas of the light-emitting units.
2. The touch display panel according to claim 1, further comprising a first pixel definition layer and a second pixel definition layer, wherein the first pixel definition layer is disposed on the substrate, the touch electrodes are disposed on the first pixel definition layer, the second pixel definition layer is disposed on the touch electrodes and the first pixel definition layer, and the light emitting units are disposed in the first pixel definition layer and the second pixel definition layer.
3. The touch display panel according to claim 2, wherein the touch electrodes are divided into a plurality of first electrodes and a plurality of second electrodes, the plurality of first electrodes are arranged in a matrix to form a plurality of parallel first electrode groups, the plurality of second electrodes are arranged in a matrix to form a plurality of parallel second electrode groups, and the first electrode groups and the second electrode groups are vertically crossed and insulated to form a plurality of touch units; any two adjacent first electrodes in each first electrode group are electrically connected through a section of connecting wire, and the connecting wire is arranged on the first pixel definition layer and arranged on the same layer as the touch electrode; any two adjacent second electrodes in each second electrode group are electrically connected through a section of bridging line, and the bridging line is arranged on the second pixel definition layer and bridges the second electrodes through a through hole.
4. The touch display panel according to claim 3, wherein the light emitting device layer includes an anode layer, a light emitting layer, and a cathode layer, the anode layer is disposed on the substrate, the first pixel defining layer is disposed on the anode layer and the substrate, the second pixel defining layer is disposed on the first pixel defining layer, the light emitting layer includes a plurality of the light emitting cells, the light emitting cells are disposed on the anode layer and located in the first pixel defining layer and the second pixel defining layer, and the cathode layer is disposed on the second pixel defining layer and connected to the light emitting layer.
5. The touch display panel of claim 4, wherein the touch display panel further comprises a thin film transistor layer and a planarization layer, the thin film transistor layer is disposed on the substrate, the planarization layer is disposed on the thin film transistor layer, the anode layer is disposed on the planarization layer and connected to the drain of the thin film transistor layer through a via, and the first pixel definition layer is disposed on the anode layer and the planarization layer.
6. The touch display panel of claim 4, wherein the cathode layer and the bridge lines are disposed on the same layer and are made of the same material.
7. The touch display panel according to claim 2, wherein the thickness of the first pixel definition layer ranges from 0.5 μm to 1 μm, and the thickness of the second pixel definition layer ranges from 0.1 μm to 0.5 μm.
8. A manufacturing method of a touch display panel is characterized by comprising the following steps:
providing a substrate;
preparing a touch layer and a light-emitting device layer, wherein the touch layer comprises a plurality of touch electrodes, the light-emitting device layer comprises a plurality of light-emitting units, and the touch electrodes are arranged on the side surfaces of light-emitting areas of the light-emitting units;
preparing an encapsulation layer, wherein the encapsulation layer covers the touch layer and the light-emitting device layer.
9. The method for manufacturing a touch display panel according to claim 8, wherein the step of "preparing the touch layer and the light emitting device layer" includes:
preparing an anode layer;
preparing a first pixel defining layer, wherein the first pixel defining layer is provided with a through hole so as to expose the anode layer;
preparing the touch electrode on the first pixel definition layer;
preparing a second pixel defining layer on the first pixel defining layer, wherein the second pixel defining layer is provided with a through hole to expose part of the touch electrode;
preparing a light emitting layer on the anode layer, wherein the light emitting layer comprises a plurality of light emitting units;
preparing a metal layer on the second pixel defining layer, the exposed part of the touch electrode and the light emitting layer;
and cutting the metal layer to form a cathode layer and a plurality of bridging lines, wherein each bridging line bridges two adjacent touch electrodes through the via hole of the second pixel definition layer, and the cathode layer is connected with the light emitting layer.
10. The method for manufacturing a touch display panel according to claim 9, wherein before the step of "preparing the anode layer", the method for manufacturing a touch display panel further comprises:
preparing a thin film transistor layer on the substrate;
preparing a flat layer on the thin film transistor layer, wherein the flat layer is provided with a through hole to expose a drain electrode in the thin film transistor layer, the anode layer is arranged on the flat layer and is connected with the drain electrode through the through hole of the flat layer, and the first pixel defining layer is arranged on the anode layer and the flat layer.
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CN111625130A (en) * | 2020-05-15 | 2020-09-04 | 武汉华星光电半导体显示技术有限公司 | Touch display panel and touch display device |
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