CN112374460A - Method and device for obtaining ultrapure hydrogen - Google Patents
Method and device for obtaining ultrapure hydrogen Download PDFInfo
- Publication number
- CN112374460A CN112374460A CN202011250724.3A CN202011250724A CN112374460A CN 112374460 A CN112374460 A CN 112374460A CN 202011250724 A CN202011250724 A CN 202011250724A CN 112374460 A CN112374460 A CN 112374460A
- Authority
- CN
- China
- Prior art keywords
- gas
- ultrapure hydrogen
- hydrogen
- obtaining
- temperature adsorption
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000001257 hydrogen Substances 0.000 title claims abstract description 77
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 77
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims abstract description 75
- 238000000034 method Methods 0.000 title claims abstract description 29
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 141
- 238000001179 sorption measurement Methods 0.000 claims abstract description 80
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 65
- 239000007788 liquid Substances 0.000 claims abstract description 47
- 238000005406 washing Methods 0.000 claims abstract description 30
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 20
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims abstract description 18
- 150000002431 hydrogen Chemical class 0.000 claims abstract description 18
- 239000012535 impurity Substances 0.000 claims abstract description 14
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052786 argon Inorganic materials 0.000 claims abstract description 10
- 229910002091 carbon monoxide Inorganic materials 0.000 claims abstract description 10
- 229910002092 carbon dioxide Inorganic materials 0.000 claims abstract description 9
- 239000001569 carbon dioxide Substances 0.000 claims abstract description 9
- VUZPPFZMUPKLLV-UHFFFAOYSA-N methane;hydrate Chemical compound C.O VUZPPFZMUPKLLV-UHFFFAOYSA-N 0.000 claims abstract description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 8
- 238000001914 filtration Methods 0.000 claims abstract description 8
- 239000001301 oxygen Substances 0.000 claims abstract description 8
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 8
- 238000000746 purification Methods 0.000 claims abstract description 7
- 239000002245 particle Substances 0.000 claims abstract description 5
- 239000007789 gas Substances 0.000 claims description 85
- 230000008929 regeneration Effects 0.000 claims description 15
- 238000011069 regeneration method Methods 0.000 claims description 15
- 239000002699 waste material Substances 0.000 claims description 15
- 238000001816 cooling Methods 0.000 claims description 12
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 11
- 238000003303 reheating Methods 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000010865 sewage Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 4
- 230000007613 environmental effect Effects 0.000 abstract description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000003463 adsorbent Substances 0.000 description 1
- -1 comprises a filter 1 Chemical compound 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
- C01B3/508—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by selective and reversible uptake by an appropriate medium, i.e. the uptake being based on physical or chemical sorption phenomena or on reversible chemical reactions
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
- C01B3/52—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by contacting with liquids; Regeneration of used liquids
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/0415—Purification by absorption in liquids
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/042—Purification by adsorption on solids
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/0465—Composition of the impurity
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/0465—Composition of the impurity
- C01B2203/047—Composition of the impurity the impurity being carbon monoxide
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/0465—Composition of the impurity
- C01B2203/0475—Composition of the impurity the impurity being carbon dioxide
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/0465—Composition of the impurity
- C01B2203/0495—Composition of the impurity the impurity being water
Abstract
The invention relates to a method and a device for obtaining ultrapure hydrogen. The method for obtaining the ultrapure hydrogen comprises the following steps: and sequentially filtering particle impurities in the industrial hydrogen, adsorbing and removing carbon dioxide and water at normal temperature, washing and removing carbon monoxide and argon by using liquid nitrogen, and adsorbing nitrogen and oxygen at low temperature to obtain the ultrapure hydrogen. The device for obtaining the ultrapure hydrogen mainly comprises: a filter for filtering particulate impurities from the industrial hydrogen; a normal temperature adsorption system for adsorbing and removing carbon dioxide and water at normal temperature; a liquid nitrogen washing tower for washing and removing carbon monoxide and argon by liquid nitrogen; a cryoadsorption system for cryo-adsorbing nitrogen and oxygen to obtain ultrapure hydrogen. The device for obtaining ultrapure hydrogen further comprises a cooler, a heat exchanger and two heaters. The method has the advantages of simple process, low cost, environmental protection, high efficiency, low operation requirement, good purification effect and capability of stably obtaining high-flow ultrapure hydrogen.
Description
Technical Field
The invention relates to the technical field of gas purification, in particular to a method and a device for purifying industrial hydrogen to obtain ultrapure hydrogen.
Background
The ultra-pure hydrogen is widely used in the fields of electronic information, semiconductors, LEDs, polycrystalline silicon photovoltaic power generation and the like. The methods for obtaining ultrapure hydrogen (6N) are currently in common use: (1) palladium tube diffusion method; (2) pressure swing adsorption; (3) ultra-low temperature adsorption method. The palladium tube diffusion method and the pressure swing adsorption method require high pressure of front-end hydrogen and are not easy to obtain stable and large-flow ultrapure hydrogen; the ultralow temperature adsorption method has low operating pressure, and can easily obtain stable and large-flow ultrapure hydrogen, but the adsorbent is selective for impurity gas, so that the impurity is difficult to completely remove to obtain the ultrapure hydrogen.
Disclosure of Invention
The invention aims to provide a method which has low operation requirement and good purification effect and can stably obtain high-flow ultrapure hydrogen.
In order to achieve the purpose, the invention adopts the technical scheme that:
a method for obtaining ultrapure hydrogen gas, which is used for purifying industrial hydrogen to obtain the ultrapure hydrogen gas, wherein the method for obtaining the ultrapure hydrogen gas comprises the following steps: filtering particle impurities in the industrial hydrogen to obtain primary intermediate gas, adsorbing and removing carbon dioxide and water in the primary intermediate gas at normal temperature to obtain secondary intermediate gas, washing and removing carbon monoxide and argon in the secondary intermediate gas by using liquid nitrogen to obtain tertiary intermediate gas, and adsorbing nitrogen and oxygen in the tertiary intermediate gas at low temperature to obtain ultrapure hydrogen.
Preferably, the primary intermediate gas is cooled and then adsorbed at normal temperature.
Preferably, the secondary intermediate gas is cooled and then washed by liquid nitrogen; reheating the ultrapure hydrogen, and sending the reheated ultrapure hydrogen as a product; waste liquid nitrogen generated by washing liquid nitrogen is reheated and used as regeneration gas for normal-temperature adsorption and low-temperature adsorption.
Preferably, the reheated waste nitrogen is heated again to be used as regeneration gas for normal-temperature adsorption and low-temperature adsorption.
Preferably, liquid nitrogen is used to provide the required refrigeration for the cryoadsorption.
The invention also provides a device which has lower operation requirement and good purification effect and can stably obtain high-flow ultrapure hydrogen, and the technical scheme is as follows:
an apparatus for obtaining ultrapure hydrogen gas for purification of industrial hydrogen to obtain ultrapure hydrogen gas, comprising:
a filter for filtering particulate impurities from the industrial hydrogen to obtain a primary intermediate gas;
the normal temperature adsorption system is used for adsorbing and removing carbon dioxide and water in the primary intermediate gas at normal temperature to obtain secondary intermediate gas;
a liquid nitrogen washing tower which is used for washing and removing carbon monoxide and argon in the secondary intermediate gas by liquid nitrogen to obtain a tertiary intermediate gas;
and the low-temperature adsorption system is used for low-temperature adsorption of the nitrogen and the oxygen in the three-stage intermediate gas to obtain ultrapure hydrogen.
Preferably, the means for obtaining ultrapure hydrogen further comprises a cooler for cooling the primary intermediate gas.
Preferably, the device for obtaining ultrapure hydrogen further comprises a heat exchanger for cooling the secondary intermediate gas, reheating the ultrapure hydrogen, reheating the waste liquid nitrogen generated by the liquid nitrogen washing tower to obtain the waste nitrogen which is connected to the normal-temperature adsorption system and the low-temperature adsorption system and used as regeneration gas.
Preferably, the apparatus for obtaining ultrapure hydrogen further comprises:
the first heater is used for heating the reheated polluted nitrogen gas and connecting the heated polluted nitrogen gas into the normal-temperature adsorption system to be used as regenerated gas;
and the second heater is used for heating the reheated polluted nitrogen gas and connecting the heated polluted nitrogen gas into the low-temperature adsorption system to be used as regeneration gas.
Preferably, the low-temperature adsorption system is connected with liquid nitrogen for providing required cold for the low-temperature adsorption system.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages: the method has the advantages of simple process, low cost, environmental protection, high efficiency, low operation requirement, good purification effect and capability of stably obtaining high-flow ultrapure hydrogen.
Drawings
FIG. 1 is a flow chart of the method for obtaining ultrapure hydrogen of the present invention.
Fig. 2 is a schematic view of the apparatus for obtaining ultrapure hydrogen of the present invention.
In the above drawings: 1. a filter; 2. a cooler; 3. a normal temperature adsorption cylinder; 4. a first electric heater; 5. a heat exchanger; 6. a liquid nitrogen washing tower; 7. a low temperature adsorption cylinder; 8. a second electric heater.
Detailed Description
The invention will be further described with reference to examples of embodiments shown in the drawings to which the invention is attached.
The first embodiment is as follows: as shown in fig. 1, a method for obtaining ultrapure hydrogen gas for purifying industrial hydrogen to obtain ultrapure hydrogen gas comprises the following steps in sequence: filtering, cooling, normal temperature adsorption, cooling, liquid nitrogen washing and low temperature adsorption. The specific process is as follows:
first, industrial hydrogen (crude hydrogen) as a raw material is filtered to remove particulate impurities (including oil, dust, etc.) in the industrial hydrogen, to obtain a primary intermediate gas. Cooling the primary intermediate gas obtained by removing the particle impurities, and then adsorbing at normal temperature to remove carbon dioxide and water in the primary intermediate gas to obtain a secondary intermediate gas. And after cooling the secondary intermediate gas, washing and removing carbon monoxide and argon in the secondary intermediate gas by using liquid nitrogen to obtain a tertiary intermediate gas. And finally, adsorbing nitrogen and oxygen in the three-stage intermediate gas at low temperature to obtain ultrapure hydrogen, reheating the ultrapure hydrogen, and sending the reheated ultrapure hydrogen as a product.
In the method for obtaining the ultrapure hydrogen, the polluted nitrogen gas generated by washing the liquid nitrogen is reheated to become polluted nitrogen gas which is then used as the regeneration gas for normal-temperature adsorption and low-temperature adsorption, and the reheated polluted nitrogen gas can also be used as the regeneration gas for normal-temperature adsorption and low-temperature adsorption after being heated. Liquid nitrogen is used for providing cold energy for low-temperature adsorption.
Example two: as shown in fig. 2, the apparatus for obtaining ultrapure hydrogen gas, which is used for purifying industrial hydrogen to obtain ultrapure hydrogen gas, mainly comprises a filter 1, a normal temperature adsorption system, a liquid nitrogen washing tower 6, a low temperature adsorption system, a cooler 2, a heat exchanger 5, a first heater, and a second heater. The first heater and the second heater are both electric heaters, namely a first electric heater 4 and a second electric heater 8.
The filter 1 is used for filtering particulate impurities (including oil, dust and the like) in the industrial hydrogen to obtain primary intermediate gas, a gas inlet of the filter is connected with the industrial hydrogen (crude hydrogen), and a gas outlet of the filter outputs the primary intermediate gas.
The air inlet of the cooler 2 is connected with the air outlet of the filter 1, the cooler 2 is used for cooling first-stage intermediate gas, and the cooled first-stage intermediate gas is output from the air outlet of the cooler 2.
The gas inlet of the normal temperature adsorption system is connected with the gas outlet of the cooler 2, the normal temperature adsorption system adopts molecular sieve adsorption and is used for adsorbing and removing carbon dioxide and water in the primary intermediate gas at normal temperature to obtain secondary intermediate gas, and the secondary intermediate gas is output from the gas outlet of the normal temperature adsorption system. The normal temperature adsorption system comprises two normal temperature adsorption cylinders 3 for alternately performing adsorption and regeneration, and the air inlet and the air outlet of the normal temperature adsorption cylinder 3 are respectively the air inlet and the air outlet of the normal temperature adsorption system.
And the liquid nitrogen washing tower 6 is used for washing and removing carbon monoxide and argon in the secondary intermediate gas by liquid nitrogen to obtain a tertiary intermediate gas. The gas outlet of the normal temperature adsorption system is connected to the gas inlet at the lower part of the liquid nitrogen washing tower 6 after passing through the heat exchanger 5, and the liquid nitrogen washing tower 6 is also provided with a liquid inlet at the upper part, a gas outlet at the top and a gas outlet at the bottom. Liquid nitrogen is input into a liquid inlet of the liquid nitrogen washing tower 6, after the liquid nitrogen washing is carried out in the liquid nitrogen washing tower 6, the liquid nitrogen becomes polluted nitrogen and is output from a gas outlet at the bottom, and the second-stage intermediate gas is subjected to carbon monoxide and argon removal to become third-stage intermediate gas and is output from a gas outlet at the top.
And the gas inlet of the low-temperature adsorption system is connected with the gas outlet at the top of the liquid nitrogen washing tower 6, and the low-temperature adsorption system is used for low-temperature adsorption of nitrogen and oxygen in the three-stage intermediate gas to obtain ultrapure hydrogen (6N) and outputting the ultrapure hydrogen from the gas outlet of the low-temperature adsorption system. The low-temperature adsorption system is also connected with liquid nitrogen for providing required cold for the low-temperature adsorption system. The low-temperature adsorption system comprises two low-temperature adsorption cylinders 7 for alternately carrying out adsorption and regeneration, and an air inlet and an air outlet of each low-temperature adsorption cylinder 7 are respectively an air inlet and an air outlet of the low-temperature adsorption system. The outlet of the cryoadsorption system is also connected to a heat exchanger 5.
An air outlet at the bottom of the liquid nitrogen washing tower 6 is divided into two paths after passing through the heat exchanger 5, and the two paths are respectively connected to an air inlet of the normal-temperature adsorption system and an air inlet of the low-temperature adsorption system, so that the polluted nitrogen is reheated and then sent to the normal-temperature adsorption system and the low-temperature adsorption system to be used as regenerated gas.
The first electric heater 4 is arranged between the heat exchanger 5 and an air inlet of the normal-temperature adsorption system and used for heating the reheated waste nitrogen and connecting the heated waste nitrogen into the normal-temperature adsorption system as regenerated gas. The second electric heater 8 is arranged between the heat exchanger 5 and an air inlet of the low-temperature adsorption system and used for heating the reheated waste nitrogen and connecting the heated waste nitrogen to the low-temperature adsorption system to serve as regeneration gas. The waste nitrogen generated after the regeneration of the normal temperature adsorption system and the low temperature adsorption system can be discharged.
Therefore, the heat exchanger 5 in the scheme is used for cooling the secondary intermediate gas, reheating the ultrapure hydrogen and reheating the waste liquid nitrogen generated by the liquid nitrogen washing tower 6 to form waste nitrogen which is connected to a normal-temperature adsorption system and a low-temperature adsorption system and used as regeneration gas.
By utilizing the device, the industrial hydrogen firstly passes through the filter 1 to remove particle impurities, then is cooled by the cooler 2, enters the normal temperature adsorption system to remove impurities such as carbon dioxide and water, then enters the liquid nitrogen washing tower 6 after being cooled by the heat exchanger 5 to remove impurities such as carbon monoxide and argon, finally enters the low temperature adsorption system to be adsorbed, and the ultrapure hydrogen (6N) obtained after adsorption is reheated by the heat exchanger 5 and then is sent out as a product.
The method and the device for obtaining the ultrapure hydrogen can be used for producing the large-flow ultrapure hydrogen with the purity being more than or equal to 6N, and compared with the prior art, the method and the device have the characteristics of simple process, low cost, environmental protection and high efficiency.
The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims (10)
1. A method for obtaining ultrapure hydrogen gas for purification of industrial hydrogen to obtain ultrapure hydrogen gas, characterized in that: the method for obtaining the ultrapure hydrogen comprises the following steps: filtering particle impurities in the industrial hydrogen to obtain primary intermediate gas, adsorbing and removing carbon dioxide and water in the primary intermediate gas at normal temperature to obtain secondary intermediate gas, washing and removing carbon monoxide and argon in the secondary intermediate gas by using liquid nitrogen to obtain tertiary intermediate gas, and adsorbing nitrogen and oxygen in the tertiary intermediate gas at low temperature to obtain ultrapure hydrogen.
2. The method of obtaining ultrapure hydrogen according to claim 1, characterized in that: and cooling the primary intermediate gas and then performing normal-temperature adsorption.
3. The method of obtaining ultrapure hydrogen according to claim 1, characterized in that: cooling the secondary intermediate gas and then washing with liquid nitrogen; reheating the ultrapure hydrogen, and sending the reheated ultrapure hydrogen as a product; waste liquid nitrogen generated by washing liquid nitrogen is reheated and used as regeneration gas for normal-temperature adsorption and low-temperature adsorption.
4. The method of obtaining ultrapure hydrogen according to claim 4, wherein: and heating the reheated sewage nitrogen to be used as regeneration gas for normal-temperature adsorption and low-temperature adsorption.
5. The method of obtaining ultrapure hydrogen according to claim 1, characterized in that: and liquid nitrogen is used for providing the required cold for the low-temperature adsorption.
6. An apparatus for obtaining ultrapure hydrogen gas, for purifying industrial hydrogen to obtain ultrapure hydrogen gas, characterized in that: the device for obtaining the ultrapure hydrogen comprises:
a filter for filtering particulate impurities from the industrial hydrogen to obtain a primary intermediate gas;
the normal temperature adsorption system is used for adsorbing and removing carbon dioxide and water in the primary intermediate gas at normal temperature to obtain secondary intermediate gas;
a liquid nitrogen washing tower which is used for washing and removing carbon monoxide and argon in the secondary intermediate gas by liquid nitrogen to obtain a tertiary intermediate gas;
and the low-temperature adsorption system is used for low-temperature adsorption of the nitrogen and the oxygen in the three-stage intermediate gas to obtain ultrapure hydrogen.
7. The apparatus for obtaining ultrapure hydrogen according to claim 6, wherein: the apparatus for obtaining ultrapure hydrogen further comprises a cooler for cooling the primary intermediate gas.
8. The apparatus for obtaining ultrapure hydrogen according to claim 6, wherein: the device for obtaining the ultrapure hydrogen further comprises a heat exchanger which is used for cooling the secondary intermediate gas, reheating the ultrapure hydrogen and reheating the waste liquid nitrogen generated by the liquid nitrogen washing tower to enable the waste liquid nitrogen to become waste nitrogen which is connected to the normal-temperature adsorption system and the low-temperature adsorption system and used as regeneration gas.
9. The apparatus for obtaining ultrapure hydrogen according to claim 8, wherein: the device for obtaining ultrapure hydrogen further comprises:
the first heater is used for heating the reheated polluted nitrogen gas and connecting the heated polluted nitrogen gas into the normal-temperature adsorption system to be used as regenerated gas;
and the second heater is used for heating the reheated polluted nitrogen gas and connecting the heated polluted nitrogen gas into the low-temperature adsorption system to be used as regeneration gas.
10. The apparatus for obtaining ultrapure hydrogen according to claim 6, wherein: and the low-temperature adsorption system is connected with liquid nitrogen for providing required cold energy for the low-temperature adsorption system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011250724.3A CN112374460A (en) | 2020-11-11 | 2020-11-11 | Method and device for obtaining ultrapure hydrogen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011250724.3A CN112374460A (en) | 2020-11-11 | 2020-11-11 | Method and device for obtaining ultrapure hydrogen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112374460A true CN112374460A (en) | 2021-02-19 |
Family
ID=74579745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011250724.3A Pending CN112374460A (en) | 2020-11-11 | 2020-11-11 | Method and device for obtaining ultrapure hydrogen |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112374460A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1014585A (en) * | 1961-12-13 | 1965-12-31 | Foster Wheeler Ltd | Improvements in or relating to the purification of hydrogen by scrubbing with liquidnitrogen |
| US5836172A (en) * | 1996-12-24 | 1998-11-17 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for the purification of a cryogenic fluid by filtration and/or adsorption |
| CN105466154A (en) * | 2015-12-21 | 2016-04-06 | 七台河宝泰隆煤化工股份有限公司 | Air separation technique |
| US20160146535A1 (en) * | 2013-06-26 | 2016-05-26 | Casale Sa | Process for purification of a synthesis gas containing hydrogen and impurities |
| CN107364832A (en) * | 2017-07-26 | 2017-11-21 | 深圳市海格金谷工业科技有限公司 | A kind of low temperature hydrogen purification devices and control method |
| WO2018020091A1 (en) * | 2016-07-25 | 2018-02-01 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Method and apparatus for scrubbing at cryogenic temperature in order to produce a mixture of hydrogen and nitrogen |
| CN213834533U (en) * | 2020-11-11 | 2021-07-30 | 苏州市兴鲁空分设备科技发展有限公司 | Device for obtaining ultrapure hydrogen |
-
2020
- 2020-11-11 CN CN202011250724.3A patent/CN112374460A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1014585A (en) * | 1961-12-13 | 1965-12-31 | Foster Wheeler Ltd | Improvements in or relating to the purification of hydrogen by scrubbing with liquidnitrogen |
| US5836172A (en) * | 1996-12-24 | 1998-11-17 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for the purification of a cryogenic fluid by filtration and/or adsorption |
| US20160146535A1 (en) * | 2013-06-26 | 2016-05-26 | Casale Sa | Process for purification of a synthesis gas containing hydrogen and impurities |
| CN105466154A (en) * | 2015-12-21 | 2016-04-06 | 七台河宝泰隆煤化工股份有限公司 | Air separation technique |
| WO2018020091A1 (en) * | 2016-07-25 | 2018-02-01 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Method and apparatus for scrubbing at cryogenic temperature in order to produce a mixture of hydrogen and nitrogen |
| CN107364832A (en) * | 2017-07-26 | 2017-11-21 | 深圳市海格金谷工业科技有限公司 | A kind of low temperature hydrogen purification devices and control method |
| CN213834533U (en) * | 2020-11-11 | 2021-07-30 | 苏州市兴鲁空分设备科技发展有限公司 | Device for obtaining ultrapure hydrogen |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107362683A (en) | A kind of ultra-pure gases purification devices and purification process | |
| CN213834533U (en) | Device for obtaining ultrapure hydrogen | |
| CN113277471A (en) | Method and device for recovering reduction tail gas in polycrystalline silicon production | |
| CN201240837Y (en) | Hydrogen purifying apparatus by carbon adsorption | |
| CN112374460A (en) | Method and device for obtaining ultrapure hydrogen | |
| CN111268658B (en) | Argon tail gas recovery and purification method and system | |
| CN100398181C (en) | Purifying device for air separation system | |
| CN208932988U (en) | A kind of purge drying system of food-grade carbon-dioxide | |
| CN201543362U (en) | Treatment device for treating hydrogen in polysilicon tail gas through temperature and pressure variation method | |
| CN102910580B (en) | Energy-saving device and method for decomposing ammonia to prepare high-purity hydrogen-nitrogen mixture gas | |
| CN212299665U (en) | Device for recovering argon tail gas in monocrystalline silicon production | |
| CN212450642U (en) | Argon tail gas recycling and purifying system | |
| CN210374300U (en) | Air separation device utilizing waste heat of air compressor | |
| CN201325876Y (en) | High-purity energy-saving type purifying device | |
| CN105597518B (en) | Low-temp methanol washes unit CO2Tail gas and CO2Product gas combined treatment process | |
| CN211712639U (en) | Continuous online recovery unit of single crystal growing furnace tail gas | |
| CN203333287U (en) | Continuous adsorption regeneration device for hydrogen in polycrystalline silicon tail gas recovery system | |
| CN203807153U (en) | Device for producing hyperpure hydrogen by using integrated low-temperature adsorption method | |
| CN207271059U (en) | A kind of ultra-pure gases purification devices | |
| CN220926279U (en) | Helium purification system | |
| CN215364917U (en) | Nitrogen preparation device | |
| CN219424041U (en) | Filtering system for treating polycrystalline silicon tail gas | |
| CN202880860U (en) | Energy-saving device for preparing high-purity hydrogen/nitrogen mixed gas through ammonia decomposition | |
| CN110526223A (en) | A kind of high pure nitrogen purifying technique and device | |
| CN218909868U (en) | Hydrogen purification system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |