CN112362222B - Pressure monitoring system for single crystal growth process - Google Patents
Pressure monitoring system for single crystal growth process Download PDFInfo
- Publication number
- CN112362222B CN112362222B CN202011240163.9A CN202011240163A CN112362222B CN 112362222 B CN112362222 B CN 112362222B CN 202011240163 A CN202011240163 A CN 202011240163A CN 112362222 B CN112362222 B CN 112362222B
- Authority
- CN
- China
- Prior art keywords
- fixedly connected
- quartz crucible
- storage tank
- single crystal
- sealing cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/28—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds
- G01M3/2853—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds for pipe joints or seals
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/06—Means for converting reciprocating motion into rotary motion or vice versa
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/10—Structural association with clutches, brakes, gears, pulleys or mechanical starters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/10—Structural association with clutches, brakes, gears, pulleys or mechanical starters
- H02K7/116—Structural association with clutches, brakes, gears, pulleys or mechanical starters with gears
- H02K7/1163—Structural association with clutches, brakes, gears, pulleys or mechanical starters with gears where at least two gears have non-parallel axes without having orbital motion
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a pressure monitoring system in a single crystal growth process, which adopts the technical scheme that: the quartz crucible pressing device comprises a bottom plate, wherein the top of the bottom plate is fixedly connected with a quartz crucible and a gas storage tank, the quartz crucible is positioned on one side of the gas storage tank, and a pressing mechanism is arranged on one side of the quartz crucible; hold-down mechanism includes the sealed cowling, sealed cowling fixed connection is in quartz crucible one side, the sealed cowling is located quartz crucible and gas holder inboardly, the inside base that is equipped with of sealed cowling, a single crystal growth process pressure monitored control system beneficial effect is: through setting up hold-down mechanism, can be when pressure adjustment, two holders are close to simultaneously and press from both sides branch pipe and interface tightly, guarantee the reliability of interface and branch connection, avoid revealing the emergence, still can be in real time to carrying out pressure monitoring inside quartz crucible, gas holder and the sealed cowling simultaneously to accessible sealed cowling internal pressure changes and judges whether revealing, and the maintenance of good timely notice.
Description
Technical Field
The invention relates to the technical field of single crystal growth, in particular to a pressure monitoring system in a single crystal growth process.
Background
The single crystal is a covalent bond compound, is an atomic crystal, belongs to a diamond-like hexagonal crystal system, has a wurtzite crystal structure, is non-toxic, is white or grey white, and can be stabilized to 2200 ℃ at most. The strength at room temperature is high, and the strength is slowly reduced along with the increase of the temperature. The material has good thermal conductivity and small thermal expansion coefficient, and is a good thermal shock resistant material. The crucible material has strong capability of resisting the corrosion of molten metal and is an ideal crucible material for casting pure iron, aluminum or aluminum alloy. Single crystals are also electrical insulators, have good dielectric properties, and are promising for use as electrical components.
The prior art has the following defects: at present, in the crystal growth process of a single crystal, the pressure of the growth environment of the single crystal needs to be adjusted back and forth, but when the pressure is adjusted, the pressure cannot be effectively monitored, and the safety of pressure adjustment cannot be effectively guaranteed.
Therefore, it is necessary to develop a pressure monitoring system for the single crystal growth process.
Disclosure of Invention
Therefore, the invention provides a pressure monitoring system for a single crystal growth process, which is characterized in that a pressing mechanism is arranged, when the pressure is adjusted, two clamping seats are close to a branch pipe and a connector at the same time to clamp the branch pipe and the connector, so that the connection reliability of the connector and the branch pipe is ensured, the leakage is avoided, meanwhile, the pressure monitoring can be carried out on the interiors of a quartz crucible, a gas storage tank and a sealing cover in real time, whether the leakage exists can be judged through the pressure change in the sealing cover, and the maintenance can be informed in time, so that the problems that in the prior art, the pressure of the growth environment of a single crystal needs to be adjusted in a reciprocating mode in the crystal growth process, but the pressure cannot be effectively monitored during the pressure adjustment, and the safety of the pressure adjustment cannot be effectively guaranteed are solved.
In order to achieve the above purpose, the invention provides the following technical scheme: a pressure monitoring system for a single crystal growth process comprises a bottom plate, wherein the top of the bottom plate is fixedly connected with a quartz crucible and a gas storage tank, the quartz crucible is positioned on one side of the gas storage tank, and a pressing mechanism is arranged on one side of the quartz crucible;
the pressing mechanism comprises a sealing cover, the sealing cover is fixedly connected to one side of the quartz crucible and is positioned on the inner sides of the quartz crucible and the gas storage tank, a base is embedded in the sealing cover and is fixedly connected with one side of the quartz crucible, a motor is fixedly connected to the top of the sealing cover, a cavity is formed in the top of the base, the motor output shaft extends into the cavity, a first bevel gear is fixedly connected to the bottom end of the motor output shaft, a rotating shaft is embedded in the cavity, two ends of the rotating shaft respectively extend into two sides of the cavity, a second bevel gear is fixedly sleeved on the outer side of the rotating shaft and is positioned at the bottom of the first bevel gear, the second bevel gear is meshed with the first bevel gear, two third bevel gears are fixedly sleeved on the outer side of the rotating shaft and are respectively positioned on two sides of the second bevel gear, the inner walls of two sides of the base are respectively provided with a limiting groove, one side of the quartz crucible is fixedly connected with an interface, one end of the interface is provided with a branch pipe, one end of the branch pipe extends to the outside of one side of the sealing cover, two clamping seats are embedded in the base and are respectively positioned on two sides of the top and the bottom of the interface, two sides of the two clamping seats are respectively fixedly connected with a limiting seat, a threaded rod is embedded in each limiting groove and is sleeved in each limiting seat, the threaded rod is in threaded connection with the limiting seats, the top ends of the two threaded rods extend to the inside of the cavity, the bottom ends of the two threaded rods extend to the bottom of the base, the top ends of the two threaded rods are respectively fixedly connected with a fourth bevel gear, the two fourth bevel gears are respectively positioned at the bottoms of the two third bevel gears and are in meshed connection with the third bevel gears, one side of the gas storage tank is fixedly connected with an air pump, the air inlet end of the air pump is fixedly connected with the bottom ends of the branch pipes, the air outlet end of the air pump is fixedly connected with an air outlet pipe, the bottom end of the air outlet pipe is fixedly connected with the air storage tank, the branch pipes are provided with first electromagnetic valves, and the air outlet pipe is provided with second electromagnetic valves;
the inner wall of the top of the quartz crucible is fixedly connected with a temperature sensor, a first pressure sensor and a humidity sensor, the first pressure sensor is positioned at the inner sides of the temperature sensor and the humidity sensor, the inner wall of the top of the sealing cover is fixedly connected with a second pressure sensor, the inner wall of the top of the air storage tank is fixedly connected with a third pressure sensor, the top of the air storage tank is fixedly connected with a case, a display is fixedly embedded at the front side of the case, a central processing unit is fixedly embedded and installed in the case, and an alarm is fixedly connected to the top of the case;
inside branch pipe one end extended to the interface, the branch pipe passes through screw thread fixed connection with interface connection department, the cover is equipped with the sealing washer in the branch pipe outside, the sealing washer is located branch pipe and interface inboard.
Preferably, the temperature sensor, the first pressure sensor, the second pressure sensor, the third pressure sensor and the humidity sensor are all electrically connected with the input end of the central processing unit, and the motor, the first electromagnetic valve, the second electromagnetic valve, the display and the alarm are all electrically connected with the output end of the central processing unit.
Preferably, the four clamping seats are uniformly distributed in the two limiting grooves, and the limiting seats are matched with the limiting grooves.
Preferably, the inner sides of the two clamping seats are fixedly connected with rubber anti-slip pads.
Preferably, the bottom of the sealing cover is fixedly connected with an inclined plate, and the bottom end of the inclined plate is fixedly connected with one side of the quartz crucible.
Preferably, one side of the gas storage tank is fixedly connected with a protection box, the protection box is sleeved outside the gas pump, and one side of the protection box is provided with a plurality of heat dissipation holes.
Preferably, one side of the gas storage tank is fixedly connected with a protection box, the protection box is sleeved outside the gas pump, and a heat dissipation net is fixedly embedded in one side of the protection box.
The invention has the beneficial effects that:
1. according to the invention, through arranging the motor, the rotating shaft, the threaded rod, the limiting seat, the clamping seats and other components, in practical use, after the motor works, the rotating shaft can be driven to rotate, so that the two threaded rods are driven to rotate, and finally the two clamping seats are mutually close to the clamping interface and the branch pipe, so that the reliability of the joint of the interface and the branch pipe is further improved, and the problem that the pressure leakage is caused by the looseness of the interface and the branch pipe when the pressure in the quartz crucible is adjusted, and the growth safety of a single crystal is influenced is avoided;
2. according to the invention, through arranging the first pressure sensor, the second pressure sensor and the third pressure sensor, in actual use, the air pressure in the quartz crucible, the sealing cover and the air storage tank can be monitored in real time and can be displayed through the display, so that the observation of workers is facilitated, and whether the joint of the interface and the branch pipe leaks or not can be judged through the change of the air pressure in the sealing cover, so that the workers can be warned to overhaul at the first time through the alarm, and the safety protection capability on the growth of single crystal crystals is further improved.
Drawings
FIG. 1 is a schematic view of the overall structure provided by the present invention;
FIG. 2 is a front view cross-section view provided by the present invention;
FIG. 3 is an enlarged view of the portion A of FIG. 2 according to the present invention;
FIG. 4 is a side elevation cross-sectional view provided by the present invention;
FIG. 5 is a perspective view of a cartridge provided by the present invention;
FIG. 6 is a schematic diagram of a control system according to the present invention;
fig. 7 is a perspective view of a protective box according to embodiment 2 of the present invention.
In the figure: 1 bottom plate, 2 quartz crucible, 3 gas storage tank, 4 sealing cover, 5 base, 6 motor, 7 first bevel gear, 8 rotating shaft, 9 second bevel gear, 10 third bevel gear, 11 interface, 12 branch pipe, 13 clamping seat, 14 spacing seat, 15 threaded rod, 16 fourth bevel gear, 17 air pump, 18 air outlet pipe, 19 first electromagnetic valve, 20 second electromagnetic valve, 21 temperature sensor, 22 first pressure sensor, 23 humidity sensor, 24 second pressure sensor, 25 third pressure sensor, 26 machine box, 27 display, 28 central processing unit, 29 alarm, 30 rubber non-slip pad, 31 sealing ring, 32 sloping plate, 33 protection box, 34 heat dissipation hole, 35 heat dissipation net.
Detailed Description
The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are described herein for the purpose of illustration and explanation and not limitation.
Embodiment 1, referring to fig. 1 to 6, a pressure monitoring system for a single crystal growth process, provided by the invention, comprises a bottom plate 1, wherein the top of the bottom plate 1 is fixedly connected with a quartz crucible 2 and a gas storage tank 3, the quartz crucible 2 is located on one side of the gas storage tank 3, and a pressing mechanism is arranged on one side of the quartz crucible 2;
the pressing mechanism comprises a sealing cover 4, the sealing cover 4 is fixedly connected to one side of a quartz crucible 2, the sealing cover 4 is positioned on the inner sides of the quartz crucible 2 and a gas storage tank 3, a base 5 is embedded in the sealing cover 4, the base 5 is fixedly connected to one side of the quartz crucible 2, a motor 6 is fixedly connected to the top of the sealing cover 4, a cavity is formed in the top of the base 5, an output shaft of the motor 6 extends into the cavity, a first bevel gear 7 is fixedly connected to the bottom of the output shaft of the motor 6, a rotating shaft 8 is embedded in the cavity, two ends of the rotating shaft 8 respectively extend into two sides of the cavity, a second bevel gear 9 is fixedly sleeved on the outer side of the rotating shaft 8, the second bevel gear 9 is positioned at the bottom of the first bevel gear 7, the second bevel gear 9 is meshed with the first bevel gear 7, and two third bevel gears 10 are fixedly sleeved on the outer side of the rotating shaft 8, two third bevel gears 10 are respectively positioned at two sides of a second bevel gear 9, the inner walls at two sides of the base 5 are respectively provided with a limiting groove, one side of the quartz crucible 2 is fixedly connected with an interface 11, one end of the interface 11 is provided with a branch pipe 12, one end of the branch pipe 12 extends to the outside of one side of the sealing cover 4, two clamping seats 13 are embedded in the base 5, the two clamping seats 13 are respectively positioned at the top and the bottom of the interface 11, two sides of the two clamping seats 13 are respectively and fixedly connected with a limiting seat 14, threaded rods 15 are embedded in the two limiting grooves, the threaded rods 15 are sleeved in the limiting seats 14, the threaded rods 15 are in threaded connection with the limiting seats 14, the top ends of the two threaded rods 15 extend to the inside of the cavity, the bottom ends of the two threaded rods 15 extend to the bottom of the base 5, and the top ends of the two threaded rods 15 are respectively and fixedly connected with a fourth bevel gear 16, the two fourth bevel gears 16 are respectively positioned at the bottoms of the two third bevel gears 10, the fourth bevel gears 16 are meshed with the third bevel gears 10, one side of the air storage tank 3 is fixedly connected with an air pump 17, the air inlet end of the air pump 17 is fixedly connected with the bottom ends of the branch pipes 12, the air outlet end of the air pump 17 is fixedly connected with an air outlet pipe 18, the bottom ends of the air outlet pipes 18 are fixedly connected with the air storage tank 3, the branch pipes 12 are provided with first electromagnetic valves 19, and the air outlet pipe 18 is provided with second electromagnetic valves 20;
the inner wall of the top of the quartz crucible 2 is fixedly connected with a temperature sensor 21, a first pressure sensor 22 and a humidity sensor 23, and the temperature sensor 21 is a sensor which can sense temperature and convert the temperature into a usable output signal. The temperature sensor 21 is a core part of a temperature measuring instrument, has various varieties, can be divided into two types of contact type and non-contact type according to measuring modes, is divided into two types of thermal resistance and thermocouple according to sensor materials and electronic element characteristics, the model of the temperature sensor 21 is FT-H50K, the humidity sensor 23 is a device capable of detecting environmental humidity, the model of the humidity sensor 23 is SD123-L501, the first pressure sensor 22 is positioned at the inner side of the temperature sensor 21 and the humidity sensor 23, the inner wall of the top of the sealing cover 4 is fixedly connected with a second pressure sensor 24, the inner wall of the top of the gas storage tank 3 is fixedly connected with a third pressure sensor 25, the pressure sensor is a device or a device capable of sensing pressure signals and converting the pressure signals into usable output electric signals according to a certain rule, the models of the first pressure sensor 22, the second pressure sensor 24 and the third pressure sensor 25 are all 630, the top of the gas storage tank 3 is fixedly connected with a case 26, a display 27 is fixedly embedded in the front side of the case 26, a central processing unit 28 is fixedly embedded in the case 26, the central processing unit 28 serves as an operation and control core of a computer system and is a final execution unit for information processing and program operation, the central processing unit 28 is a huge development on the aspects of logic structure, operation efficiency and function extension since generation, the model of the central processing unit 28 is X23600 +, and an alarm 29 is fixedly connected to the top of the case 26;
one end of the branch pipe 12 extends into the connector 11, the joint of the branch pipe 12 and the connector 11 is fixedly connected through threads, a sealing ring 31 is sleeved on the outer side of the branch pipe 12, the sealing ring 31 is positioned on the inner sides of the branch pipe 12 and the connector 11, and the sealing ring 31 can further ensure the sealing performance of the branch pipe 12 and the connector 11;
further, the temperature sensor 21, the first pressure sensor 22, the second pressure sensor 24, the third pressure sensor 25 and the humidity sensor 23 are all electrically connected to an input end of the central processing unit 28, the motor 6, the first solenoid valve 19, the second solenoid valve 20, the display 27 and the alarm 29 are all electrically connected to an output end of the central processing unit 28, the solenoid valves are industrial equipment controlled by electromagnetism, are automatic basic elements used for controlling fluid, belong to an actuator, and are not limited to hydraulic pressure and pneumatic pressure, and the models of the first solenoid valve 19 and the second solenoid valve 20 are yxxq 941F;
furthermore, the four clamping seats 13 are uniformly distributed in the two limiting grooves, and the limiting seats 14 are matched with the limiting grooves, so that the two clamping seats 13 can stably and stably move up and down in the base 5;
furthermore, rubber anti-slip pads 30 are fixedly connected to the inner sides of the two clamping seats 13, which is beneficial to reducing the possibility of damaging the branch pipe 12 and the connector 11 when the clamping seats 13 are contacted with the branch pipe 12 and the connector 11;
furthermore, the bottom of the sealing cover 4 is fixedly connected with an inclined plate 32, the bottom end of the inclined plate 32 is fixedly connected with one side of the quartz crucible 2, and the inclined plate 32, the bottom of the sealing cover 4 and one side of the quartz crucible 2 form a triangle, so that the sealing cover 4 can be supported more stably;
further, 3 one side fixedly connected with guard box 33 of gas holder, the guard box 33 cover is established in the air pump 17 outside, a plurality of louvres 34 have been seted up to guard box 33 one side, are of value to protecting air pump 17.
The using process of the invention is as follows: in the invention, after the power is turned on, in the normal working state, the temperature sensor 21, the first pressure sensor 22 and the humidity sensor 23 in the quartz crucible 2 can monitor the temperature, the pressure and the humidity in the quartz crucible 2 in real time, the second pressure sensor 24 in the sealing cover 4 and the third pressure sensor 25 in the gas storage tank 3 can monitor the pressure in the sealing cover 4 and the gas storage tank 3 in real time, then the information is transmitted to the central processing unit 28, the central processing unit 28 can transmit the information to the display 27 for displaying, which is convenient for the observation of the operator, when the pressure in the quartz crucible 2 needs to be adjusted, the central processing unit 28 controls the air pump 17 to work, and opens the first electromagnetic valve 19 and the second electromagnetic valve 20 at the same time, the air pump 17 works to pump the gas in the quartz crucible 2 through the branch pipe 12 and the interface 11, and gas is discharged into the gas storage tank 3 through the gas outlet pipe 18, meanwhile, the central processing unit 28 also starts the control motor 6, the motor 6 drives the first bevel gear 7 to rotate after working, and further drives the second bevel gear 9 and the rotating shaft 8 to rotate, so that the two third bevel gears 10 are rotated, and finally the two fourth bevel gears 16 are driven to rotate, and then the two threaded rods 15 are driven to rotate, so that the two limiting seats 14 in the limiting grooves are close to each other, so that the two clamping seats 13 are close to each other and finally fastened to the outer sides of the interface 11 and the branch pipe 12, the connection reliability of the branch pipe 12 and the interface 11 is further ensured, meanwhile, when the second pressure sensor 24 monitors that the gas pressure in the sealing cover 4 changes, the connection part of the interface 11 and the branch pipe 12 can be judged to be leaked, the central processing unit 28 controls the alarm 29 to work, and sends out an alarm to inform a worker to maintain as soon as possible, thereby ensuring the normal and safe regulation of the internal pressure of the quartz crucible 2 and facilitating the growth of the single crystal inside the quartz crucible.
The working principle is as follows: when the air pump 17 works, the protection box 33 can protect the air pump 17 to prevent an external object from accidentally colliding with the air pump 17 to damage the air pump 17, so that the internal pressure of the quartz crucible 2 and the air storage tank 3 of the whole device is unbalanced, and finally the damage of the whole device is caused, and meanwhile, the heat dissipation holes 34 can ensure that air in the protection box 33 flows, so that the heat dissipation of the air pump 17 in the working process is facilitated.
The above description is only a preferred embodiment of the present invention, and any person skilled in the art may modify the present invention or modify it into an equivalent technical solution by using the technical solution described above. Therefore, any simple modifications or equivalent substitutions made in accordance with the technical solution of the present invention are within the scope of the claims of the present invention.
Claims (7)
1. A single crystal growth process pressure monitoring system, includes bottom plate (1), its characterized in that: the top of the bottom plate (1) is fixedly connected with a quartz crucible (2) and a gas storage tank (3), the quartz crucible (2) is positioned on one side of the gas storage tank (3), and a pressing mechanism is arranged on one side of the quartz crucible (2);
the pressing mechanism comprises a sealing cover (4), the sealing cover (4) is fixedly connected to one side of the quartz crucible (2), the sealing cover (4) is located on the inner side of the quartz crucible (2) and the gas storage tank (3), a base (5) is embedded in the sealing cover (4), the base (5) is fixedly connected to one side of the quartz crucible (2), a motor (6) is fixedly connected to the top of the sealing cover (4), a cavity is formed in the top of the base (5), an output shaft of the motor (6) extends into the cavity, a first bevel gear (7) is fixedly connected to the bottom of the output shaft of the motor (6), a rotating shaft (8) is embedded in the cavity, two ends of the rotating shaft (8) extend into two sides of the cavity respectively, a second bevel gear (9) is fixedly sleeved on the outer side of the rotating shaft (8), and the second bevel gear (9) is located at the bottom of the first bevel gear (7), the second bevel gear (9) is meshed with the first bevel gear (7), two third bevel gears (10) are fixedly sleeved on the outer side of the rotating shaft (8), the two third bevel gears (10) are respectively positioned on two sides of the second bevel gear (9), limiting grooves are formed in the inner walls of two sides of the base (5), an interface (11) is fixedly connected to one side of the quartz crucible (2), a branch pipe (12) is arranged at one end of the interface (11), one end of the branch pipe (12) extends to the outer portion of one side of the sealing cover (4), two clamping seats (13) are embedded in the base (5), the two clamping seats (13) are respectively positioned on the top and two sides of the bottom of the interface (11), limiting seats (14) are fixedly connected to two sides of the clamping seats (13), threaded rods (15) are embedded in the limiting grooves, and the threaded rods (15) are sleeved in the limiting seats (14), the threaded rods (15) are in threaded connection with the limiting seats (14), the top ends of the two threaded rods (15) extend into the cavity, the bottom ends of the two threaded rods (15) extend to the bottom of the base (5), the top ends of the two threaded rods (15) are fixedly connected with fourth bevel gears (16), the two fourth bevel gears (16) are respectively positioned at the bottoms of the two third bevel gears (10), the fourth bevel gear (16) is meshed with the third bevel gear (10), one side of the air storage tank (3) is fixedly connected with an air pump (17), the air inlet end of the air pump (17) is fixedly connected with the bottom ends of the branch pipes (12), the air outlet end of the air pump (17) is fixedly connected with an air outlet pipe (18), the bottom end of the air outlet pipe (18) is fixedly connected with the air storage tank (3), the branch pipe (12) is provided with a first electromagnetic valve (19), and the air outlet pipe (18) is provided with a second electromagnetic valve (20);
the quartz crucible comprises a quartz crucible (2), a sealing cover (4) and a quartz crucible body, wherein the inner wall of the top of the quartz crucible body (2) is fixedly connected with a temperature sensor (21), a first pressure sensor (22) and a humidity sensor (23), the first pressure sensor (22) is positioned at the inner side of the temperature sensor (21) and the humidity sensor (23), the inner wall of the top of the sealing cover (4) is fixedly connected with a second pressure sensor (24), the inner wall of the top of the gas storage tank (3) is fixedly connected with a third pressure sensor (25), the top of the gas storage tank (3) is fixedly connected with a case (26), a display (27) is fixedly embedded at the front side of the case (26), a central processing unit (28) is fixedly embedded in the case (26), and an alarm (29) is fixedly connected at the top of the case (26);
branch pipe (12) one end extends to inside interface (11), branch pipe (12) pass through screw thread fixed connection with interface (11) junction, branch pipe (12) outside cover is equipped with sealing washer (31), sealing washer (31) are located branch pipe (12) and interface (11) inboard.
2. A single crystal growth process pressure monitoring system as defined in claim 1 wherein: temperature sensor (21), first pressure sensor (22), second pressure sensor (24), third pressure sensor (25) and humidity transducer (23) all with central processing unit (28) input electric connection, motor (6), first solenoid valve (19), second solenoid valve (20), display (27) and siren (29) all with central processing unit (28) output electric connection.
3. A single crystal growth process pressure monitoring system as defined in claim 1 wherein: four holder (13) are the distribution of uniform form in two spacing inslots, spacing seat (14) and spacing groove phase-match.
4. A single crystal growth process pressure monitoring system as defined in claim 1 wherein: the inner sides of the two clamping seats (13) are fixedly connected with rubber anti-slip pads (30).
5. A single crystal growth process pressure monitoring system as defined in claim 1 wherein: the bottom of the sealing cover (4) is fixedly connected with an inclined plate (32), and the bottom end of the inclined plate (32) is fixedly connected with one side of the quartz crucible (2).
6. A single crystal growth process pressure monitoring system as defined in claim 1 wherein: the air pump is characterized in that a protection box (33) is fixedly connected to one side of the air storage tank (3), the protection box (33) is sleeved on the outer side of the air pump (17), and a plurality of heat dissipation holes (34) are formed in one side of the protection box (33).
7. A single crystal growth process pressure monitoring system as defined in claim 1 wherein: gas holder (3) one side fixedly connected with guard box (33), air pump (17) outside is established in guard box (33) cover, fixed the inlaying in guard box (33) one side is equipped with radiator-grid (35).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011240163.9A CN112362222B (en) | 2020-11-09 | 2020-11-09 | Pressure monitoring system for single crystal growth process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011240163.9A CN112362222B (en) | 2020-11-09 | 2020-11-09 | Pressure monitoring system for single crystal growth process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112362222A CN112362222A (en) | 2021-02-12 |
| CN112362222B true CN112362222B (en) | 2022-03-04 |
Family
ID=74509850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011240163.9A Active CN112362222B (en) | 2020-11-09 | 2020-11-09 | Pressure monitoring system for single crystal growth process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112362222B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107794562A (en) * | 2017-11-17 | 2018-03-13 | 中国工程物理研究院材料研究所 | The crystal growing apparatus and method of a kind of gas-filled protective |
| CN108707966A (en) * | 2018-08-27 | 2018-10-26 | 山东大学 | A kind of low nitrogen content SiC single crystal grower and its application |
| CN110280739A (en) * | 2019-07-08 | 2019-09-27 | 湖北犇超有色金属铸造股份有限公司 | A kind of low pressure casting process units |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3640868A1 (en) * | 1986-11-29 | 1988-06-09 | Leybold Ag | Apparatus for determining the diameter of a crystal on pulling from a melt |
| US5085728A (en) * | 1987-05-05 | 1992-02-04 | Mobil Solar Energy Corporation | System for controlling crystal growth apparatus and melt replenishment system therefor |
| CA2305974C (en) * | 2000-04-19 | 2006-01-31 | Sawyer Research Products, Inc. | Method and apparatus for growing crystals |
| CN109186999A (en) * | 2018-09-06 | 2019-01-11 | 天津百诚阀门制造股份有限公司 | A kind of valve detection device and its application method |
| CN110095210B (en) * | 2019-05-27 | 2020-11-17 | 西安交通大学 | Silicon-based quartz MEMS resonant torque sensor for micro-nano scale material |
| CN110184649A (en) * | 2019-07-02 | 2019-08-30 | 哈尔滨科友半导体产业装备与技术研究院有限公司 | A kind of novel heat insulation material structure PVT single crystal growth device |
-
2020
- 2020-11-09 CN CN202011240163.9A patent/CN112362222B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107794562A (en) * | 2017-11-17 | 2018-03-13 | 中国工程物理研究院材料研究所 | The crystal growing apparatus and method of a kind of gas-filled protective |
| CN108707966A (en) * | 2018-08-27 | 2018-10-26 | 山东大学 | A kind of low nitrogen content SiC single crystal grower and its application |
| CN110280739A (en) * | 2019-07-08 | 2019-09-27 | 湖北犇超有色金属铸造股份有限公司 | A kind of low pressure casting process units |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112362222A (en) | 2021-02-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105203710B (en) | A kind of SF of high voltage electric equipment6Gas controlling device, method and system | |
| CN112362222B (en) | Pressure monitoring system for single crystal growth process | |
| CN110049658A (en) | A kind of power transformation operation maintenance integral control cabinet | |
| CN107642458A (en) | Wind-driven generator and wind-driven generator driveline vibrations control method | |
| CN213779505U (en) | Monitoring and protecting device for engine cooling system | |
| CN112304544A (en) | Deep sea structure vibration testing method based on underwater high-speed camera | |
| CN207442435U (en) | Switching Power Supply protective device | |
| CN214372781U (en) | Positive pressure cooling protection device of laser sensor | |
| CN207333701U (en) | A kind of abrasion resistant type shaft sealer and high gear | |
| RU2327122C1 (en) | Temperature sensor | |
| CN220063049U (en) | Monitoring device convenient to installation | |
| CN206847673U (en) | A kind of oil tank state on-line real time monitoring device | |
| CN202832766U (en) | Power machine monitoring protection system | |
| CN206329533U (en) | Pump head liner assembly, machine envelope leakage leakage detection apparatus and the system of vertical centrifugal pump | |
| CN220286604U (en) | Leakage monitoring device for safety valve of boiler | |
| CN213543258U (en) | Kiln pressure adjusting device | |
| CN209117209U (en) | A kind of motor temperature detection alarm control unit | |
| CN216081894U (en) | Manometer core detects uses heat sink | |
| CN210404085U (en) | Intelligent anti-rotation binding post applied to temperature of upper guide shoe and thrust bearing of circulating pump | |
| CN206546412U (en) | A kind of test system of semiconductor laser chip | |
| CN213748626U (en) | Low oil level monitoring and alarming device for fan | |
| CN216557870U (en) | Intelligent water cooling device for high-temperature creep fatigue testing machine | |
| CN220187204U (en) | Water pressure monitoring device of water chilling unit | |
| CN207771013U (en) | Improve the tooling of drawing by high temperature sample yield rate | |
| CN216483389U (en) | Calibration device for flow testing tool of electromagnetic flowmeter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |