CN112345207A - Galvanometer detection device, galvanometer detection method and readable storage medium - Google Patents
Galvanometer detection device, galvanometer detection method and readable storage medium Download PDFInfo
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Abstract
The invention discloses a galvanometer detection device, a galvanometer detection method and a readable storage medium, wherein the galvanometer detection device comprises the following components: the system comprises a light source, a photoelectric sensor, a display device and a detection terminal, wherein the light source is used for emitting an incident beam, a galvanometer is arranged in a propagation light path of the incident beam, and the galvanometer receives the incident beam and generates a reflected beam; the photoelectric sensor is arranged in a transmission light path of the reflected light beam, receives the reflected light beam and obtains a moving path of the reflected light beam; the display device is electrically connected with the photoelectric sensor, receives the moving path and is used for converting the moving path into a pulse pattern; the detection terminal is electrically connected to the display device, acquires the pulse pattern, and detects the vibration parameter of the galvanometer based on the pulse pattern. The technical scheme of the invention can effectively measure the vibration performance parameters of the galvanometer.
Description
Technical Field
The invention relates to the technical field of galvanometer detection, in particular to a galvanometer detection device, a galvanometer detection method and a readable storage medium.
Background
DLP (Digital Light Processing), which is Digital Light Processing, is a technique that digitally processes image signals and projects Light. In many DLP projection displays, a galvanometer is provided, and resolution of a projection image is improved by high-speed vibration of the galvanometer. Therefore, it can be said that the performance of the galvanometer determines the resolution of the projected image, so obtaining the vibration performance parameter of the galvanometer is important for judging the performance of the DLP. However, the vibrating mirror vibrates at a smaller vibration angle and a faster vibration speed during working, and an effective technical means for measuring the vibration performance parameters of the vibrating mirror is lacked at present.
Disclosure of Invention
Therefore, in order to solve the problem of lack of an effective technical means for measuring the vibration performance parameters of the galvanometer, it is necessary to provide a galvanometer detection method, a galvanometer detection device and a readable storage medium, which are intended to effectively measure the vibration performance parameters of the galvanometer.
In order to achieve the above object, the present invention provides a galvanometer detecting device, including:
the light source is used for emitting an incident beam, a galvanometer is arranged in a propagation light path of the incident beam, and the galvanometer receives the incident beam and generates a reflected beam;
the photoelectric sensor is arranged in a propagation light path of the reflected light beam, receives the reflected light beam and obtains a moving path of the reflected light beam;
the display device is electrically connected to the photoelectric sensor, receives the moving path and is used for converting the moving path into a pulse pattern; and
the detection terminal is electrically connected to the display device and acquires the pulse pattern, and the detection terminal detects and acquires the vibration parameters of the galvanometer based on the pulse pattern.
Optionally, the galvanometer detection device further includes: the semi-reflecting and semi-transmitting mirror is arranged in a light path between the vibrating mirror and the light source, and the photoelectric sensor is arranged on one side of the semi-reflecting and semi-transmitting mirror, which faces away from the vibrating mirror.
Optionally, the light source comprises a laser source, the display device comprises an oscilloscope, and the photosensor comprises a photoelectric position sensor.
Optionally, the galvanometer detection device further comprises a box body, the box body is provided with a closed cavity, and the light source and the photoelectric sensor are arranged in the closed cavity.
In order to achieve the above object, the present invention also provides a galvanometer detection method, including:
emitting an incident light beam to a galvanometer, wherein the incident light beam passes through the galvanometer to generate a reflected light beam;
acquiring a moving path of the reflected light beam, and converting the moving path into a pulse pattern;
and acquiring the pulse pattern, and acquiring the vibration parameters of the galvanometer based on the pulse pattern.
Optionally, the vibration parameter includes a vibration switching speed of the galvanometer;
the step of obtaining the vibration parameters of the galvanometer based on the pulse pattern comprises the following steps:
and measuring edge time in the pulse pattern, and calculating the vibration switching speed of the galvanometer according to the edge time.
Optionally, the vibration parameter further includes vibration stability of the galvanometer;
the step of obtaining the vibration parameters of the galvanometer based on the pulse pattern comprises the following steps:
and measuring overshoot and ringing in the pulse pattern, and calculating the vibration stability of the galvanometer according to the overshoot and the ringing.
Optionally, the vibration parameter includes a swing angle of the galvanometer;
the step of obtaining the vibration parameters of the galvanometer based on the pulse pattern comprises the following steps:
and measuring the vibration amplitude in the pulse pattern, and calculating the swing angle of the galvanometer according to the vibration amplitude.
Optionally, the step of emitting the incident light beam to the galvanometer comprises:
providing a dark closed environment, and placing the galvanometer in the dark closed environment.
Further, in order to achieve the above object, the present invention also provides a readable storage medium having stored thereon a galvanometer detection program, which when executed by a processor, implements the steps of the galvanometer detection method as described above.
In the technical scheme provided by the invention, the light source emits an incident light beam to the galvanometer, the galvanometer can be understood as a transparent optical sheet, and the incident light beam irradiates the surface of the galvanometer to generate a light reflection phenomenon so as to generate a reflected light beam. The photoelectric sensor receives the reflected light beam, the reflected light beam generates a light spot on a receiving surface of the photoelectric sensor, and the light spot moves along with the vibration of the vibrating mirror when the vibrating mirror is in a vibration state. Thereby creating a path of movement for the spot. The moving path reflects the vibration condition of the galvanometer, the photoelectric sensor converts an optical signal into an electric signal, namely the photoelectric sensor converts the moving path into a pulse pattern, and thus, it can be understood that the pulse pattern is fed back to the vibration condition of the galvanometer. The pulse pattern is obtained through the detection terminal and detected, and vibration parameters of the galvanometer can be obtained. According to the technical scheme, the pulse pattern reflecting the vibration state of the vibrating mirror is obtained by detecting the light spot of the light beam reflected by the vibrating mirror, the pulse pattern indirectly reflects the vibration state of the vibrating mirror, the detection of the pulse pattern is completed, and the vibration performance parameters of the vibrating mirror can be obtained.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a galvanometer detection device of the present invention;
FIG. 2 is a schematic diagram of a pulse pattern in a display device according to the present invention;
FIG. 3 is a schematic flow chart illustrating a galvanometer detection method according to a first embodiment of the present invention;
FIG. 4 is a schematic flow chart illustrating a galvanometer detecting method according to a second embodiment of the present invention;
FIG. 5 is a schematic flow chart of a galvanometer detection method according to a third embodiment of the present invention;
FIG. 6 is a schematic flow chart illustrating a galvanometer detecting method according to a fourth embodiment of the present invention;
fig. 7 is a flowchart illustrating a galvanometer detecting method according to a fifth embodiment of the present invention.
The reference numbers illustrate:
| reference numerals | Name (R) | Reference numerals | Name (R) |
| 10 | |
60 | |
| 20 | Vibrating |
70 | Half-reflecting and half-transmitting |
| 30 | |
80 | |
| 40 | |
91 | |
| 50 | Display device with a light- |
92 | Ringing |
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The galvanometer is an optical element rotating at a high speed, and reflects light signals to expand an original pixel point into two pixel points according to the visual persistence of human eyes before the human eyes respond, so that the resolution of an image is increased. However, the vibrating mirror vibrates at a smaller vibration angle and a faster vibration speed during working, and an effective technical means for measuring the vibration performance parameters of the vibrating mirror is lacked at present.
In order to solve the above problem, referring to fig. 1, a galvanometer detecting device includes: a light source 10, a photosensor 40, a display device 50, and a detection terminal 60. The light source 10 emits an incident light beam to the galvanometer 20, the photoelectric sensor 40 receives the incident light beam, the display device 50 is electrically connected to the photoelectric sensor 40, and the detection terminal 60 is electrically connected to the display device 50.
The light source 10 is used for emitting an incident light beam, a galvanometer 20 is arranged in a propagation light path of the incident light beam, and the galvanometer 20 receives the incident light beam and generates a reflected light beam; the galvanometer 20 is a transparent optical sheet. For example, the galvanometer 20 is a transparent glass sheet or plastic sheet, and the galvanometer 20 is oscillated at a high speed by a motor. The current-carrying coil may generate a torque in the magnetic field, so as to control the oscillating of the galvanometer 20, the oscillating direction is related to the current flow, and the oscillating angle is related to the current magnitude. For example, the current flows in the forward direction, the swing direction is clockwise, the current flows in the reverse direction, and the swing direction is counterclockwise. For example, the larger the current, the larger the swing angle of the galvanometer 20, and conversely, the smaller the current, the smaller the swing angle of the galvanometer 20. The galvanometer 20 may also oscillate under the influence of a drive plate 30, the drive plate 30 being used to provide motive force for the oscillating oscillation. When the incident light beam is irradiated to the vibration surface of the galvanometer 20, a light reflection phenomenon occurs at the vibration surface of the galvanometer 20, thereby generating a reflected light beam through the galvanometer 20.
The photoelectric sensor 40 is arranged in the propagation light path of the reflected light beam, and the photoelectric sensor 40 receives the reflected light beam and obtains the moving path of the reflected light beam; the photosensor 40 can convert the optical signal into an electrical signal. The reflected light beam is received by the photo sensor 40 and generates a light spot on the surface of the photo position sensor, and during the oscillation of the galvanometer 20, the position of the light spot also moves along with the oscillation of the galvanometer 20, so that the light spot generates a moving path, and the photo sensor 40 records the moving path of the light spot. This movement path reflects the vibration of the galvanometer 20.
Referring to fig. 2, the display device 50 is electrically connected to the photo sensor 40, the display device 50 receives the moving path, and the display device 50 is used for converting the moving path into a pulse pattern; the movement of the light spot can be visually observed by the pulse pattern, and the vibration of the galvanometer 20 can be visually observed.
The detection terminal 60 is electrically connected to the display device 50, the detection terminal 60 obtains the pulse pattern, and the detection terminal 60 obtains the vibration parameter of the galvanometer 20 based on the pulse pattern detection. The vibration parameters include a vibration switching speed of the galvanometer 20, a vibration stability of the galvanometer 20, and a swing angle of the galvanometer 20. These parameters directly affect the vibration of the oscillating mirror 20 and the resolution of the image. By detecting the pulse pattern, the vibration parameter of the galvanometer 20 can be indirectly obtained, and the vibration condition of the galvanometer 20 is reflected by the vibration parameter. The detection terminal 60 may be one of a smart phone, a tablet computer, or a desktop computer.
In the technical solution provided in this embodiment, the light source 10 emits an incident light beam to the galvanometer 20, and the galvanometer 20 may be understood as a transparent optical sheet, and the incident light beam irradiates the surface of the galvanometer 20 to generate a light reflection phenomenon, thereby generating a reflected light beam. The photosensor 40 receives the reflected light beam, which generates a light spot on the receiving surface of the photosensor 40, and the light spot moves with the vibration of the galvanometer 20 when the galvanometer 20 is in a vibrating state. Thereby creating a path of movement for the spot. The moving path reflects the vibration of the galvanometer 20, and the photoelectric sensor 40 converts the optical signal into an electrical signal, i.e., the photoelectric sensor 40 converts the moving path into a pulse pattern, so it can be understood that the pulse pattern feeds back the vibration state of the galvanometer 20. The pulse pattern is acquired by the detection terminal 60 and detected, so that the vibration parameters of the galvanometer 20 can be obtained. According to the technical scheme of the invention, the pulse pattern reflecting the vibration state of the galvanometer 20 is obtained by detecting the light spot of the light beam reflected by the galvanometer 20, the pulse pattern indirectly reflects the vibration state of the galvanometer 20, and the vibration performance parameter of the galvanometer 20 can be obtained by detecting the pulse pattern.
In the above embodiment, the galvanometer detection device further includes: a half-reflecting and half-transmitting mirror 70, the half-reflecting and half-transmitting mirror 70 is arranged in the light path between the vibrating mirror 20 and the light source 10, and the photoelectric sensor 40 is arranged on the side of the half-reflecting and half-transmitting mirror 70 back to the vibrating mirror 20. When the galvanometer 20 is in a static state, the vibration angle of the galvanometer 20 is 0 °, at this time, the vibration plane of the galvanometer 20 is parallel to the sensing plane of the photoelectric sensor 40, the light source 10 emits an incident light beam to the transflective mirror 70, the transflective mirror 70 reflects the incident light beam, the incident light beam is emitted to the galvanometer 20, the galvanometer 20 reflects the incident light beam to generate a reflected light beam, the reflected light beam is emitted to the transflective mirror 70 again and is transmitted to the transflective mirror 70, and the photoelectric sensor 40 receives the reflected light beam passing through the transflective mirror 70. By the arrangement mode, the space can be effectively saved, the vibrating mirror 20, the semi-reflecting and semi-transmitting mirror 70 and the photoelectric sensor 40 are arranged in one horizontal plane, and the optical axes of the vibrating mirror 20, the semi-reflecting and semi-transmitting mirror 70 and the photoelectric sensor 40 coincide.
In the above embodiment, the light source 10 includes the laser light source 10, the display device 50 includes an oscilloscope, and the photosensor 40 includes a photoelectric position sensor. The spot of the reflected light beam needs to be clearly recognized, and if the spot area formed by the spot is too dispersed, the spot is blurred, and when there is a slight change in the vibration of the galvanometer 20, the photoelectric position sensor is sometimes insufficient to recognize the moving path of the spot. Therefore, the beam includes a laser beam, and the galvanometer 20 is irradiated with the laser beam, so that the characteristic of good unidirectionality of the laser is fully utilized, and thus the divergence angle of the beam is small. After being reflected by the vibrating mirror 20, the laser beam still has a light spot with a small light spot area, so that the photoelectric position sensor can effectively distinguish a moving path of the obtained light spot. It is also convenient to distinguish slight variations in the vibration of the galvanometer 20. Thereby more accurately detecting the parameters of the galvanometer 20. In addition, the oscilloscope may be two-quadrant, as can be satisfied when galvanometer 20 has two axes of rotation, where one quadrant reflects the rotation of galvanometer 20 about one axis of rotation. The other quadrant reflects the rotation of the galvanometer 20 about the other axis of rotation. Furthermore, an optoelectronic position sensor is an optical detector that measures the continuous position of a light spot on the detector surface. Is a novel photoelectric device or coordinate photoelectric cell. It is a non-split device that converts the spot location on the photosurface into an electrical signal. The photoelectric position sensor consists of a p substrate, a pin photodiode and a surface resistor. The photoelectric position sensor has the advantages of high position resolution, high response speed, simple processing circuit and the like.
In the above embodiment, the galvanometer detection device further includes a box 80, the box 80 has a closed cavity, and the light source 10 and the photoelectric sensor 40 are disposed in the closed cavity. When the galvanometer 20 is in a bright environment, external light is also easily reflected on the surface of the galvanometer 20. Therefore, the external light and the reflected light beams are mixed together, so that the position of the light spot is not clear enough, and the specific position of the light spot is difficult to distinguish effectively. For this reason, the light source 10 and the photosensor 40 are placed in a dark environment before detection. For example, the galvanometer 20 is placed in a closed housing 80, and the photoelectric position sensor and the light source 10 are also placed in the housing 80. The box body 80 forms a closed cavity to isolate external light interference, so that the measurement result is more accurate. In addition, the galvanometer 20 may be disposed outside the case 80, and the incident light of the light source 10 may be emitted to the galvanometer 20 through a side wall opening of the case 80.
Referring to fig. 3, the present invention further provides a method for detecting a galvanometer, which includes:
step S10, emitting an incident beam to the galvanometer, wherein the incident beam generates a reflected beam through the galvanometer; the galvanometer receives the incident beam and generates a reflected beam; the galvanometer is a transparent optical sheet. For example, the galvanometer is a transparent glass sheet or plastic sheet, and the galvanometer swings at a high speed under the action of a motor. Or the electrified coil generates moment in a magnetic field to further control the oscillating of the galvanometer, the oscillating direction is associated with the current flow direction, and the oscillating angle is associated with the current magnitude. For example, the current flows in the forward direction, the swing direction is clockwise, the current flows in the reverse direction, and the swing direction is counterclockwise. The larger the current is, the larger the swing angle of the galvanometer is, and conversely, the smaller the current is, the smaller the swing angle of the galvanometer is. After the incident light beam irradiates the surface of the galvanometer, a light reflection phenomenon is generated on the surface of the galvanometer, so that a reflected light beam is generated through the galvanometer.
Step S20, obtaining the moving path of the reflected light beam, and converting the moving path into a pulse pattern; the photoelectric sensor can convert an optical signal into an electrical signal. The reflected light beam is received by the photoelectric sensor and generates a light spot on the surface of the photoelectric position sensor, and the position of the light spot also moves along with the vibrating mirror in the swinging process of the vibrating mirror, so that the light spot can generate a moving path, and the photoelectric sensor records the moving path of the light spot. The movement path reflects the vibration of the galvanometer. The moving condition of the light spot can be visually observed through the pulse pattern, and the vibration condition of the galvanometer can be visually obtained.
And step S30, acquiring a pulse pattern, and acquiring the vibration parameters of the galvanometer based on the pulse pattern. The vibration parameters comprise the vibration switching speed of the galvanometer, the vibration stability of the galvanometer and the swing angle of the galvanometer. These parameters directly affect the vibration of the vibrating mirror and the resolution of the image. Through the detection to the pulse pattern, can indirect the vibration parameter that reachs the mirror that shakes, reflect the vibration condition of mirror that shakes through the vibration parameter.
Referring to fig. 4, in the second embodiment of the galvanometer detection method of the present invention, the vibration parameter includes the vibration switching speed of the galvanometer;
the step of obtaining vibration parameters of the galvanometer based on the pulse pattern comprises the following steps:
and step S310, measuring edge time in the pulse pattern, and calculating the vibration switching speed of the galvanometer according to the edge time. The display device receives signals of a moving path of the light spot, converts the moving path into a pulse graph, and then displays the pulse graph visually through the display device. The display device comprises an oscilloscope, and the oscilloscope is an electronic measuring instrument with wide application. It can convert the invisible electric signal into visible image, and is convenient for people to research the change process of various electric phenomena. The oscilloscope generates a fine spot of light by impinging a narrow beam of electrons, consisting of high-speed electrons, on a screen coated with a phosphor. Under the action of the measured signal, the electron beam is like the pen point of a pen, and the change curve of the instantaneous value of the measured signal can be described on the screen. The oscillograph can be used to observe the waveform curve of different signal amplitudes varying with time, and it can also be used to test different electric quantities, such as voltage, current, frequency, phase difference, amplitude modulation, etc. Edge time refers to the time difference between the peaks to the valleys of the pulse pattern. For example, when the galvanometer swings clockwise, the time difference between the wave crest and the wave trough is the time when the galvanometer swings clockwise, and after the time, the galvanometer starts to swing counterclockwise. In addition, the edge time also comprises a rising edge time Tr and a falling edge time Tf, and the rising edge time Tr and the falling edge time Tf are combined to judge that the vibration switching speed of the galvanometer is more accurate.
Referring to fig. 5, in the third embodiment of the galvanometer detection method of the present invention, the vibration parameters further include the vibration stability of the galvanometer;
the step of obtaining vibration parameters of the galvanometer based on the pulse pattern comprises the following steps:
and step S320, measuring overshoot and ringing in the pulse pattern, and calculating the vibration stability of the galvanometer according to the overshoot and the ringing. Referring to fig. 2 again, the overshoot 91 indicates that the peak value or the bottom value exceeds the set value, the occurrence of the overshoot 91 indicates that the vibration is abnormal, and the smaller the overshoot 91, the smaller the value of the overshoot 91 indicates that the vibration stability of the galvanometer is higher, and conversely, the lower the vibration stability. The ringing 92 is a sharp change in the pulse pattern in a short time, and the presence of the ringing 92 indicates a deterioration in the stability of the galvanometer, so that the stability of the galvanometer can be determined by whether the ringing 92 is present or not, and the duration of the ringing 92. For example, a ringing 92 threshold may be set below which the mirror stability is passed, and above or equal to which the mirror stability is not compounded.
Referring to fig. 6, in the fourth embodiment of the galvanometer detection method of the present invention, the vibration parameter includes a swing angle of the galvanometer;
the step of obtaining vibration parameters of the galvanometer based on the pulse pattern comprises the following steps:
and step S330, measuring the vibration amplitude in the pulse pattern, and calculating the swing angle of the galvanometer according to the vibration amplitude. The distance between the vibration surface of the vibrating mirror and the induction surface of the photoelectric sensor is D, the vibration amplitude is U, the swing angle of the vibrating mirror is alpha, and then
Where K is a constant and L is the up and down movement distance of the light spot on the light spot sensor. The swing angle of the vibrating mirror can be effectively calculated through the formula.
Referring to fig. 7, a fifth embodiment of the method for detecting a galvanometer of the present invention, before the step of emitting an incident beam to the galvanometer, includes:
and step S40, providing a dark closed environment, and placing the galvanometer in the dark closed environment. When the galvanometer is in a bright environment, external light is also easily reflected on the surface of the galvanometer. Therefore, the external light and the reflected light beams are mixed together, so that the position of the light spot is not clear enough, and the specific position of the light spot is difficult to distinguish effectively. For this purpose, the light source and the photosensor are placed in a dark environment before detection. For example, the galvanometer is placed in a closed housing, and the photoelectric position sensor and the light source are also placed in the housing. The box body forms a closed cavity to isolate external light interference, so that the measuring result is more accurate. In addition, the vibrating mirror can be arranged on the outer side of the box body, and incident light of the light source is emitted to the vibrating mirror through the opening in the side wall of the box body.
The present invention also provides a readable storage medium having a galvanometer detection program stored thereon, the galvanometer detection program when executed by a processor implementing the steps of the galvanometer detection method as set forth above.
The present invention also provides a readable storage medium having a galvanometer detection program stored thereon, the galvanometer detection program when executed by a processor implementing the steps of the galvanometer detection method as set forth above.
The specific implementation of the readable storage medium of the present invention may refer to the embodiments of the galvanometer detection method described above, and will not be described herein again.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or system. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or system that comprises the element.
The above-mentioned serial numbers of the embodiments of the present invention are merely for description and do not represent the merits of the embodiments.
Through the above description of the embodiments, those skilled in the art will clearly understand that the method of the above embodiments can be implemented by software plus a necessary general hardware platform, and certainly can also be implemented by hardware, but in many cases, the former is a better implementation manner. Based on such understanding, the technical solution of the present invention may be embodied in the form of a software product, which is stored in a storage medium (e.g., ROM/RAM, magnetic disk, optical disk) as described above and includes instructions for enabling a terminal device (e.g., a mobile phone, a computer, a server, or a network device) to execute the method according to the embodiments of the present invention.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. A galvanometer detection device, characterized in that the galvanometer detection device comprises:
the light source is used for emitting an incident beam, a galvanometer is arranged in a propagation light path of the incident beam, and the galvanometer receives the incident beam and generates a reflected beam;
the photoelectric sensor is arranged in a propagation light path of the reflected light beam, receives the reflected light beam and obtains a moving path of the reflected light beam;
the display device is electrically connected to the photoelectric sensor, receives the moving path and is used for converting the moving path into a pulse pattern; and
the detection terminal is electrically connected to the display device and acquires the pulse pattern, and the detection terminal detects and acquires the vibration parameters of the galvanometer based on the pulse pattern.
2. The galvanometer detector arrangement of claim 1, further comprising: the semi-reflecting and semi-transmitting mirror is arranged in a light path between the vibrating mirror and the light source, and the photoelectric sensor is arranged on one side of the semi-reflecting and semi-transmitting mirror, which faces away from the vibrating mirror.
3. The vibroscopy apparatus of claim 1, wherein the light source comprises a laser source, the display device comprises an oscilloscope, and the photosensor comprises a photoelectric position sensor.
4. The galvanometer detection device of claim 1, further comprising a housing having a closed cavity, the light source and the photosensor being disposed in the closed cavity.
5. A galvanometer detection method, characterized by comprising:
emitting an incident light beam to a galvanometer, wherein the incident light beam passes through the galvanometer to generate a reflected light beam;
acquiring a moving path of the reflected light beam, and converting the moving path into a pulse pattern;
and acquiring the pulse pattern, and acquiring the vibration parameters of the galvanometer based on the pulse pattern.
6. The galvanometer detection method of claim 5, wherein the vibration parameter comprises a vibration switching speed of the galvanometer;
the step of obtaining the vibration parameters of the galvanometer based on the pulse pattern comprises the following steps:
and measuring edge time in the pulse pattern, and calculating the vibration switching speed of the galvanometer according to the edge time.
7. The galvanometer detection method of claim 5, wherein the vibration parameters further include vibration stability of the galvanometer;
the step of obtaining the vibration parameters of the galvanometer based on the pulse pattern comprises the following steps:
and measuring overshoot and ringing in the pulse pattern, and calculating the vibration stability of the galvanometer according to the overshoot and the ringing.
8. The galvanometer detection method of claim 5, wherein the vibration parameter comprises a swing angle of the galvanometer;
the step of obtaining the vibration parameters of the galvanometer based on the pulse pattern comprises the following steps:
and measuring the vibration amplitude in the pulse pattern, and calculating the swing angle of the galvanometer according to the vibration amplitude.
9. A galvanometer detection method according to any of claims 5 to 8, wherein the step of emitting an incident beam to the galvanometer comprises:
providing a dark closed environment, and placing the galvanometer in the dark closed environment.
10. A readable storage medium having a galvanometer detection program stored thereon, the galvanometer detection program when executed by a processor implementing the steps of the galvanometer detection method of any one of claims 5 to 9.
Priority Applications (1)
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