CN112344679A

CN112344679A - Oven and air suspension device

Info

Publication number: CN112344679A
Application number: CN201911023518.6A
Authority: CN
Inventors: 许剑; 孙贤文
Original assignee: Guangdong Juhua Printing Display Technology Co Ltd
Current assignee: Guangdong Juhua Printing Display Technology Co Ltd
Priority date: 2019-10-25
Filing date: 2019-10-25
Publication date: 2021-02-09

Abstract

The invention discloses an oven and an air suspension device, wherein the air suspension device comprises an air supply source and a first air supply pipe communicated with an air outlet end of the air supply source, the first air supply pipe is provided with at least one first air outlet hole, and the first air outlet hole is used for supporting a substrate in an air suspension manner. The gas suspension device can utilize gas suspension to support the substrate, so that when the substrate is heated and dried in the oven, local heating cannot be too high, and the damage to the substrate can be avoided.

Description

Oven and air suspension device

Technical Field

The invention relates to the technical field of panel display, in particular to an oven and an air suspension device.

Background

At present, in the manufacturing process of TFT-lcd (thin Film Transistor Liquid Crystal display) and Organic Light-Emitting Diode (OLED) related devices, the glass substrate is usually cleaned and then dried in an oven.

However, the conventional oven is mainly used in the current oven, and the glass substrate is supported by the ejector pins after being conveyed into the oven, so that the glass substrate is placed above the heating element, the heating element is used for heating and drying the glass substrate, and the contact part of the glass substrate and the ejector pins is locally heated too high in the process, so that the glass substrate is easily damaged.

Disclosure of Invention

In view of the above, there is a need for an oven and an air suspension apparatus. The gas suspension device can utilize gas suspension to support the substrate, so that when the substrate is heated and dried in the oven, local heating cannot be too high, and the damage to the substrate can be avoided.

The technical scheme is as follows:

in one aspect, the application provides a gas suspension device, including the air feed source and with the first air supply pipe of the end intercommunication of giving vent to anger of air feed source, first air supply pipe is equipped with at least one first venthole, first venthole is used for gas suspension supporting substrate.

When the air suspension device is used, air is supplied by the air supply source, so that air flow is discharged through the first air supply pipe and is used for supporting the substrate in air suspension, the substrate can be arranged above the heating element in a non-contact mode without contact supports such as thimbles, local heating is over high when the substrate is heated and dried in the oven, damage to the substrate is avoided, and the improvement of the yield is facilitated.

The technical solution is further explained below:

in one embodiment, the air suspension device further includes at least three limiting members, and the limiting members are disposed at intervals and formed to limit the substrate from moving horizontally.

In one embodiment, a first switch valve is arranged between the air outlet end of the air supply source and the air inlet end of the first air supply pipe.

In one embodiment, the first air supply pipe comprises an air supply pipe body and an air outlet pipe body protruding from the air supply pipe body, a first air outlet hole is formed in one end of the air outlet pipe body, and the air outlet pipe body is provided with a flow control valve.

In one embodiment, the air supply source is further provided with an air inlet end for insertion into the oven.

In one embodiment, one of the first outlet holes corresponds to a center of gravity of the substrate; or the first air outlet holes are at least two and are arranged along the periphery of the substrate at even intervals.

In one embodiment, the number of the first gas supply pipes is at least two, and the first gas outlet holes of all the first gas supply pipes are matched for supporting the substrate in an air suspension manner.

In one embodiment, the first air supply pipe is rotatably connected with the air outlet end of the air supply source, so that the air outlet direction of the first air outlet hole is adjustable.

In one embodiment, the air suspension device further comprises a second air supply pipe communicated with the air outlet end of the air supply source, a second switch valve is arranged between the air outlet end of the air supply source and the air inlet end of the second air supply pipe, and the second air supply pipe is provided with a second air outlet hole opposite to the air outlet direction of the first air outlet hole.

On the other hand, the present application further provides an oven, including the gas suspension device described in any of the foregoing embodiments, further including a box body and a heating element disposed at the bottom of the box body, wherein the first gas supply pipe is inserted into the box body, and the first gas outlet is disposed above the heating element.

When the oven is used for heating and drying the substrate, the substrate can be moved into the oven, then the substrate is supplied with air through the air supply source, so that the air flow is discharged through the first air supply pipe and is used for supporting the substrate in an air suspension manner, the substrate can be arranged above the heating element of the oven in a non-contact manner, contact supports such as thimbles are not needed, and further, when the substrate is heated and dried in the oven, the local heating is too high, the damage to the substrate is avoided, and the improvement of the yield is facilitated.

Drawings

FIG. 1 is a schematic diagram of an embodiment of the oven;

FIG. 2 is a schematic diagram of an embodiment of an air suspension apparatus;

FIG. 3 is a schematic diagram of the oven in one embodiment;

FIG. 4 is a schematic diagram of the arrangement of the first outlet holes in one embodiment;

FIG. 5 is a schematic view of the arrangement of the first outlet holes in one embodiment;

FIG. 6 is a schematic diagram of the oven in one embodiment;

fig. 7 is a schematic structural diagram of the oven in an embodiment.

Description of reference numerals:

10. the oven comprises an oven body 100, an oven body 200, a heating element 300, an air suspension device 310, an air supply source 312, an air inlet end 320, a first air supply pipe 322, a first air outlet hole 324, an air supply pipe body 326, an air outlet pipe body 328, a flow control valve 330, a limiting piece 340, a second air supply pipe 350, a first switch valve 360, a second switch valve 400 and a base plate.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and the detailed description. It should be understood that the detailed description and specific examples, while indicating the scope of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.

It will be understood that when an element is referred to as being "secured to," "disposed on," "secured to," or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. When an element is perpendicular or nearly perpendicular to another element, it is desirable that the two elements are perpendicular, but some vertical error may exist due to manufacturing and assembly effects. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

References to "first" and "second" in this disclosure do not denote any particular order or quantity, but rather are used to distinguish one element from another.

As shown in fig. 1, in the present embodiment, an oven 10 is provided, which includes a box 100, a heating element 200 disposed at the bottom of the box 100, and an air suspension device 300.

Referring also to fig. 2, the levitation device 300 includes an air supply source 310 and a first air supply pipe 320 communicating with an air outlet end of the air supply source 310, the first air supply pipe 320 is provided with at least one first air outlet hole 322, the first air outlet hole 322 is used for levitating the support substrate 400, the first air supply pipe 320 is inserted into the case 100 such that the first air outlet hole 322 is disposed above the heating member 200.

As shown in fig. 1, when the oven 10 is used for heating and drying the substrate 400, the substrate 400 may be moved into the oven 10, and then the air is supplied by the air supply source 310, so that the air flow passes through the first air supply pipe 320, is exhausted through the first air outlet 322, and is used for supporting the substrate 400 in an air suspension manner, so that the substrate 400 may be disposed above the heating element 200 of the oven 10 in a non-contact manner without using contact supports such as an ejector pin, and further, when the substrate 400 is heated and dried in the oven 10, the local over-high heating may be avoided, thereby avoiding the damage to the substrate 400, and facilitating the improvement of the yield.

Further, it can be understood that in the prior art, the contact position of the substrate 400 and the ejector pins is prone to have stains and higher residual frequency of particulate matters, and the residues are difficult to remove after heating and curing; the solution of the present application adopts a non-contact manner to support the substrate 400, and no thimble is used, which naturally does not have the above-mentioned problem.

The substrate 400 includes a plate member that needs to be heated and dried, such as a glass substrate 400. Further, the air supply source 310 may be an existing air supply device such as an air compressor capable of providing an air flow.

The conversion between the air bearing force of the first air outlet and the gravity of the substrate 400 can be realized by the relationship between the air pressure principle and the gravity (F ═ P ═ S ═ mg). In addition, the air suspension support belongs to the prior art, and how to realize the balanced support of an object also belongs to the prior art, so that the excessive description is not provided.

Based on the above embodiments, as shown in fig. 2 and fig. 5, in one embodiment, the air suspension apparatus 300 further includes at least three limiting members 330, and the limiting members 330 are disposed at intervals and formed to limit the substrate 400 from moving horizontally. Thus, the at least three limiting members 330 form a limiting structure, thereby preventing the substrate 400 from moving laterally during suspension and improving the stability of the supporting substrate 400. When the substrate 400 is circular, the number of the limiting members 330 is at least 3, such as 3, 4, 5, etc.; when the substrate 400 is quadrilateral, each side is limited by at least one limiting member 330, and at this time, the number of the limiting members 330 is at least 4, such as 4, 5, 6, 8, and so on.

In any of the above embodiments, as shown in fig. 2 and 3, in one embodiment, a first on-off valve 350 is disposed between the gas outlet end of the gas supply source 310 and the gas inlet end of the first gas supply pipe 320. Thus, the first switching valve 350 can be used to control the on/off of the first gas supply pipe 320. When the substrate 400 is placed at a predetermined position, the first on-off valve 350 is opened, and the substrate 400 is supported by the airflow flowing out of the first outlet hole 322; after the base plate 400 is heated and dried, and is removed from the toaster 10, the first switching valve 350 may be closed. The first switch valve 350 may be a mechanical switch valve or an electrically controlled development valve, and may be implemented by any one of the prior arts that satisfies the requirement of use.

In addition to any of the above embodiments, as shown in fig. 3, in one embodiment, the first gas supply pipe 320 includes a gas supply pipe body 324, and a gas supply pipe body 326 protruding from the gas supply pipe body 324, one end of the gas supply pipe body 326 is provided with a first gas outlet 322, and the gas supply pipe body 326 is provided with a flow control valve 328. Thus, the flow rate of the first air outlet hole 322 is controlled by the flow control valve 328, and then the size of the air outlet flow of the first air outlet hole 322 is adjusted by adjusting the opening and closing size of the flow control valve 328 according to the distance between the air outlet ends of the first air outlet hole 322 close to the air supply source 310, so that the air flow is uniform, the substrate 400 is supported more stably, and the substrate 400 can be heated more uniformly by the uniform air flow.

In addition to any of the above embodiments, as shown in fig. 1, 3 or 6, in one embodiment, the air supply source 310 further has an air inlet end 312, and the air inlet end 312 is used for inserting into the oven 10. In this manner, the gas in the oven 10 may be circulated while avoiding excessive gas in the oven 10, which may result in excessive internal pressure. The position and number of the air inlet ends 312 may be set according to practical applications, including but not limited to those shown in fig. 1, 3 and 6.

In addition to any of the above embodiments, in one embodiment, one of the first outlet holes 322 corresponds to the center of gravity of the substrate 400. This is advantageous in more reliably and stably supporting the substrate 400.

Or in an embodiment, there are at least two first air outlet holes 322, and the first air outlet holes are uniformly spaced along the outer circumference of the center of gravity of the substrate 400. When the number of the first air outlet holes 322 is two, the first air outlet holes are disposed at two end points of the diameter of the periphery, when the number of the second air outlet holes 322 is three, an included angle between two adjacent second air outlet holes is 120 °, and when the number of the second air outlet holes 322 is four, as shown in fig. 4, an included angle between two adjacent second air outlet holes is 90 °. Of course, the number of the first outlet holes 322 may be 5, 6, 7, etc.

In addition to any of the above embodiments, as shown in fig. 5, in one embodiment, at least two first gas supply pipes 320 are provided, and the first gas outlet holes 322 of all the first gas supply pipes 320 are matched for gas suspension of the support substrate 400. This allows a larger area of the air bearing surface to be formed, which allows the substrate 400 to be supported more reliably.

In addition to any of the above embodiments, as shown in fig. 6, in one embodiment, the first air supply pipe 320 is rotatably connected to the air outlet end of the air supply source 310, so that the air outlet direction of the first air outlet hole 322 is adjustable. In this way, the first gas outlet hole 322 can be switched in a direction toward the heating member 200 or in a direction away from the heating member 200, and when the first gas outlet hole 322 is away from the heating member 200, the first gas outlet hole 322 is used to air-float the support substrate 400; and when first venthole 322 set up towards heating member 200, can provide the cooling air current for heating member 200, make heating member 200 can rapid cooling, be favorable to improving production efficiency. Meanwhile, the air inlet end 312 can be arranged below the heating element 200, so that condensed gas is provided by the air supply source to cool the heating element 200, and the condensed gas after being recycled at the air inlet end is utilized, thereby being beneficial to improving the utilization rate of the condensed gas.

Specifically, the first air supply pipe 320 is rotatably connected to the air outlet end of the air supply source 310 and has a locking structure, the first air supply pipe 320 can only rotate after the locking structure is released, and the first air supply pipe 320 is locked after the locking structure is locked. The locking structure can be realized by any one of the prior arts which can meet the use requirements, such as a ratchet locking mechanism, a spiral locking mechanism and the like, and the specific structure is not described herein again.

In another embodiment, as shown in fig. 7, the air suspension apparatus 300 further comprises a second air supply pipe 340 communicated with the air outlet end of the air supply source 310, a second on-off valve 360 is disposed between the air outlet end of the air supply source 310 and the air inlet end of the second air supply pipe 340, the second air supply pipe 340 is provided with a second air outlet hole disposed toward the heating member 200, and the second air outlet hole is disposed below the first air outlet hole 322. Therefore, the second air outlet on the second air supply pipe 340 can also provide cooling air flow for the heating element, so that the heating element 200 can be rapidly cooled. The on-off of the second air supply pipe 340 is controlled by the opening and closing of the second on-off valve 360, and when the first air outlet hole 322 of the first air supply pipe 320 is used for air-suspending the support substrate 400, the second on-off valve 360 is closed; when the heating element 200 is required to be cooled down, the first air supply pipe 320 is closed, and the second on-off valve 360 is opened. Thus, the cooling air flow can be provided for the heating element 200, so that the heating element 200 can be rapidly cooled, and the production efficiency can be improved.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims

1. The utility model provides a gas suspension device, its characterized in that, including the air feed source and with the first air supply pipe of the end intercommunication of giving vent to anger of air feed source, first air supply pipe is equipped with at least one first venthole, first venthole is used for gas suspension support substrate.

2. The air suspension device of claim 1, further comprising at least three stoppers spaced apart from each other for restricting the horizontal movement of the substrate.

3. The air suspension device as claimed in claim 1, wherein a first on-off valve is provided between the air outlet end of the air supply source and the air inlet end of the first air supply pipe.

4. The gas suspension device according to claim 1, wherein the first gas supply pipe comprises a gas supply pipe body and a gas outlet pipe body protruding from the gas supply pipe body, one end of the gas outlet pipe body is provided with a first gas outlet hole, and the gas outlet pipe body is provided with a flow control valve.

5. The air suspension device of claim 1 wherein the air supply is further provided with an air inlet end for insertion into an oven.

6. The air suspension device of claim 1, wherein one of the first air outlet holes corresponds to a center of gravity of the base plate; or the first air outlet holes are at least two and are arranged along the periphery of the substrate at even intervals.

7. The gas levitation device as recited in claim 1, wherein the number of the first gas supply pipes is at least two, and the first gas outlet holes of all the first gas supply pipes are matched for supporting the substrate in gas levitation.

8. The aerosol generating apparatus of any of claims 1 to 7, wherein the first air supply pipe is rotatably connected to the air outlet end of the air supply source, such that the direction of the air outlet of the first air outlet hole is adjustable.

9. The air suspension device as claimed in any one of claims 1-7, further comprising a second air supply pipe communicating with the air outlet end of the air supply source, wherein a second on-off valve is provided between the air outlet end of the air supply source and the air inlet end of the second air supply pipe, and wherein the second air supply pipe is provided with a second air outlet hole having an opposite direction to the air outlet direction of the first air outlet hole.

10. An oven comprising the air suspension device as claimed in any one of claims 1 to 9, further comprising a cabinet and a heating element disposed at a bottom of the cabinet, wherein the first air supply duct is inserted into the cabinet with the first air outlet hole disposed above the heating element.