CN112332795A - Lamb wave resonator with grooved surface - Google Patents
Lamb wave resonator with grooved surface Download PDFInfo
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- CN112332795A CN112332795A CN202011285218.8A CN202011285218A CN112332795A CN 112332795 A CN112332795 A CN 112332795A CN 202011285218 A CN202011285218 A CN 202011285218A CN 112332795 A CN112332795 A CN 112332795A
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- electrodes
- groove
- lamb wave
- piezoelectric module
- wave resonator
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- 235000019687 Lamb Nutrition 0.000 title claims abstract description 26
- 239000000463 material Substances 0.000 claims description 17
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims 1
- 230000002401 inhibitory effect Effects 0.000 claims 1
- 238000013461 design Methods 0.000 abstract description 2
- 238000010897 surface acoustic wave method Methods 0.000 abstract description 2
- 230000008878 coupling Effects 0.000 description 8
- 238000010168 coupling process Methods 0.000 description 8
- 238000005859 coupling reaction Methods 0.000 description 8
- 229910012463 LiTaO3 Inorganic materials 0.000 description 6
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
The invention discloses a lamb wave resonator with a grooved surface, which belongs to the field of surface acoustic wave resonators and specifically comprises a piezoelectric module, a bus bar, electrodes and grooves; the electrodes are positioned on the upper surface of the piezoelectric module and are periodically arranged; bus bars are arranged at two ends of the electrode along the aperture direction; every n electrodes, grooves are formed in the upper surface of the piezoelectric module; the bus bar is used for applying voltage to the electrodes; the grooves are used to suppress stray waves by breaking the continuity of the surface of the piezoelectric module. The lamb wave resonator also comprises a fake finger; the dummy fingers are located between the end of each electrode and the bus bar for suppressing lateral leakage of energy and increasing the Q value of the resonator. The lamb wave resonator provided by the invention adopts a groove design, so that stray waves in the resonator are greatly inhibited.
Description
Technical Field
The invention belongs to the field of surface acoustic wave resonators, and particularly relates to a lamb wave resonator with a grooved surface.
Background
The development of the 5G communication neighborhood has higher and higher requirements on performance indexes of a high-frequency filter, particularly in the neighborhood of a radio frequency terminal of a mobile phone, the use amount of the filter is greatly increased, the resonator is used as one of the most basic structural units in the filter, and the frequency, the electromechanical coupling coefficient, the Q value and other parameters of the resonator play a very key role in the performance of the filter.
Nowadays, filters based on bulk acoustic wave resonators occupy a large part of the market, but bulk acoustic wave resonators have the disadvantage of small electromechanical coupling coefficient, and the resonant frequency of the bulk acoustic wave resonators is related to the thickness of piezoelectric materials, and as the frequency gradually rises, the requirements on the thickness of the piezoelectric materials in the bulk acoustic wave resonators become more and more strict. In recent 10 years, research on lamb wave resonators has enabled resonators to have high frequency, high electromechanical coupling coefficient and high Q value, and lamb wave resonators with silicon-based substrates are more easily integrated with other devices into front-end modules of smart phones. However, shear wave strays are always a problem in lamb wave resonators, and the presence of shear wave strays seriously affects the design of lamb wave resonator-based filters, so it is necessary to suppress shear wave strays in lamb wave resonators.
The prior art method for well suppressing the transverse wave stray needs to cause great damage to the whole structure, which makes the physical structure of the lamb wave resonator with the defect of unstable physical structure easier to damage.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a surface-slotted lamb wave resonator, aiming at solving the problem that the traditional resonator is often accompanied by stray waves except for a required working mode due to the existence of a device boundary.
In order to achieve the above object, the present invention provides a surface-grooved lamb wave resonator, including a piezoelectric module, a bus bar, an electrode, and a groove;
the electrodes are positioned on the upper surface of the piezoelectric module and are periodically arranged; bus bars are arranged at two ends of the electrode along the aperture direction; every n electrodes, grooves are formed in the upper surface of the piezoelectric module; wherein n is more than or equal to 1;
the bus bar is used for applying voltage to the electrodes; the grooves are used to suppress stray waves by breaking the continuity of the surface of the piezoelectric module.
Preferably, the surface-slotted lamb wave resonator further comprises a dummy finger; the dummy fingers are located between the end of each electrode and the bus bar for suppressing lateral leakage of energy and increasing the Q value of the resonator.
Preferably, the piezoelectric module is lithium tantalate.
Preferably, every third electrode, a groove is provided on the piezoelectric module.
Preferably, the width of the groove is the distance between the electrodes on two sides of the groove, and the length of the groove along the aperture direction is the distance between the bus bars at two ends in the same radial direction.
Preferably, the material of the artificial finger is aluminum.
Through the technical scheme, compared with the prior art, the invention has the following beneficial effects:
the groove structure provided by the invention can destroy the continuity of the surface of the piezoelectric material, can simultaneously influence a resonance mode and stray waves, and can greatly inhibit most of the stray waves in the resonator due to the introduction of the groove structure.
The artificial finger structure provided by the invention can inhibit the transverse leakage of energy in the resonator, and more energy is restrained in the resonator, namely more energy is stored in the resonator, so that the Q value of the resonator is improved.
Drawings
FIG. 1 is a schematic diagram of a surface-grooved lamb wave resonator with artificial fingers according to the present invention;
FIG. 2 shows that the piezoelectric material provided by the invention is 42 degrees YX-LiTaO3Existing admittance graph of (a);
FIG. 3 shows a 42 degree YX-LiTaO piezoelectric material according to an embodiment of the present invention3The admittance curve graph of the finger and the groove;
FIG. 4 shows a piezoelectric material of 36 degree YX-LiTaO3Existing admittance graph of (a);
FIG. 5 shows a piezoelectric material of 36 YX-LiTaO according to the second embodiment of the present invention3The admittance curve graph of the finger and the groove;
throughout the drawings, the same reference numerals are used to designate the same elements or structures, wherein 101: a piezoelectric module; 102: a bus bar; 103: an electrode; 104: a fake finger; 105: a groove; k2: an electromechanical coupling coefficient; q: -3dB-Q value.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
As shown in fig. 1, the present invention provides a surface-grooved lamb wave resonator including a piezoelectric module 101, a bus bar 102, an electrode 103, and a groove 105;
the electrodes 103 are located on the upper surface of the piezoelectric module 101 and are periodically arranged; bus bars 102 are provided at both ends of the electrode 103 in the aperture direction; every n electrodes, grooves are arranged on the upper surface of the piezoelectric module 101; wherein n is more than or equal to 1;
the bus bar 102 is used to apply a voltage to the electrode 103; the groove 105 serves to suppress stray waves by breaking the continuity of the surface of the piezoelectric module 101.
The groove 105 structure provided by the invention can destroy the continuity of the surface of the piezoelectric module 101, so that the resonance mode and the stray waves are simultaneously influenced, and although the frequency and the electromechanical coupling coefficient of the resonance mode are reduced in a small range due to the introduction of the groove 105 structure, most of the stray waves can be inhibited.
Preferably, the surface-grooved lamb wave resonator further includes a dummy finger 104, the dummy finger 104 being disposed between an end of each electrode 103 and the bus bar 102; the energy leakage is suppressed, more energy is confined in the resonator, and the Q value of the resonator is improved.
Preferably, the piezoelectric module 101 is lithium tantalate.
Preferably, every third electrode 103, a groove is provided on the piezoelectric module 101.
Preferably, the width of the groove 105 is the distance between the electrodes on both sides of the groove 105, and the length of the groove 105 in the aperture direction is the distance between the bus bars 102 on both ends in the same radial direction.
Preferably, the material of the artificial finger 104 is aluminum.
Example one
The lamb wave resonator disclosed in the present embodiment includes a piezoelectric module 101, a bus bar 102, an electrode 103, a dummy finger 104, and a groove 105; wherein the piezoelectric module 101 uses 42 ° YX-LiTaO3(ii) a The material of the artificial finger 104 is metal Al; the electrodes 103 are arranged on the upper surface of the piezoelectric module 101, the electrodes 103 are periodically arranged, the bus bars 102 are arranged at two ends of the electrodes 103 along the aperture direction, voltage is applied to the electrodes 103 through the bus bars 102, and a dummy finger 104 is arranged between the tail end of each electrode 103 and the bus bar 102; every two electrodes 103, a groove 105 is arranged on the upper surface of the piezoelectric module 101, the width of the groove 105 is the distance between the electrodes 103 on both sides of the groove 105, and the length of the groove 105 in the aperture direction is the distance between the two bus bars 102.
FIG. 2 shows a 42 degree YX-LiTaO piezoelectric material3Existing admittance graph of (a); FIG. 3 shows that the piezoelectric material provided by the present embodiment is 42 degrees YX-LiTaO3The admittance curve graph of the finger and the groove; comparing fig. 2 and fig. 3, the noise level is significantly reduced after adding the dummy finger 104 and the groove 105, and the Q value is increased from 6735 to 23375 after adding the dummy finger 104 and the groove 105, and the electromechanical coupling coefficient reaches 9.48%.
Example two
The lamb wave resonator disclosed in the present embodiment includes a piezoelectric module 101, a bus bar 102, an electrode 103, and a groove 105; wherein the piezoelectric module 101 uses 36 ° YX-LiTaO3(ii) a The material of the artificial finger 104 is metal Al; the electrodes 103 are arranged on the upper surface of the piezoelectric module 101, the electrodes 103 are periodically arranged, the bus bars 102 are arranged at two ends of the electrodes 103 along the aperture direction, voltage is applied to the electrodes 103 through the bus bars 102, and a dummy finger 104 is arranged between the tail end of each electrode 103 and the bus bar 102; every two electrodes 103, a groove 105 is arranged on the upper surface of the piezoelectric module 101, the width of the groove 105 is the distance between the electrodes 103 on two sides of the groove 105, and the groove 105 is concaveThe length of the groove 105 in the aperture direction is the distance between the two bus bars 102.
FIG. 4 shows a piezoelectric material of 36 degree YX-LiTaO3Existing admittance graph of (a); FIG. 5 shows a piezoelectric material of 36 degree YX-LiTaO in this example3The admittance curve graph of the finger and the groove; compared with fig. 2 and 3, after the dummy finger 104 and the groove 105 are added, the noise number is obviously reduced, and after the dummy finger 104 and the groove 105 are added, the Q value is increased from 7467 to 21127, and the electromechanical coupling coefficient reaches 10.42%.
K in FIGS. 2 to 52Is the electromechanical coupling coefficient; q is-3 dB-Q value.
Compared with the prior art, the invention can obtain the following beneficial effects:
the groove structure provided by the invention can destroy the continuity of the surface of the piezoelectric material, can simultaneously influence a resonance mode and stray waves, and can greatly inhibit most of the stray waves in the resonator due to the introduction of the groove structure.
The artificial finger structure provided by the invention can inhibit the transverse leakage of energy in the resonator, and more energy is restrained in the resonator, namely more energy is stored in the resonator, so that the Q value of the resonator is improved.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (6)
1. A surface-grooved lamb wave resonator is characterized by comprising a piezoelectric module (101), a bus bar (102), an electrode (103) and a groove (105);
the electrodes (103) are positioned on the upper surface of the piezoelectric module (101) and are periodically arranged; bus bars (102) are arranged at two ends of the electrode (103) along the aperture direction; every n electrodes, the grooves (105) are arranged on the upper surface of the piezoelectric module (101); wherein n is more than or equal to 1;
the groove (105) is used for inhibiting stray waves by breaking the continuity of the surface of the piezoelectric module (101).
2. The lamb wave resonator according to claim 1, further comprising a dummy finger (104), wherein the dummy finger (104) is located between the end of each electrode (103) and the bus bar (102) for suppressing lateral leakage of energy and increasing the Q value of the resonator.
3. Lamb wave resonator according to claim 1, characterised in that the piezoelectric module (101) is lithium tantalate.
4. Lamb wave resonator according to any of claims 1 to 3, characterized in that every third of the electrodes (103) is provided with a recess (105) in the piezoelectric module (101).
5. The lamb wave resonator according to claim 4, wherein the width of the groove (105) is the distance between the electrodes (103) on both sides of the groove, and the length of the groove (105) in the aperture direction is the distance between the bus bars (102) on both ends in the same radial direction.
6. Lamb wave resonator according to claim 2, characterised in that the material of the artificial finger (104) is aluminium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202011285218.8A CN112332795A (en) | 2020-11-17 | 2020-11-17 | Lamb wave resonator with grooved surface |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011285218.8A CN112332795A (en) | 2020-11-17 | 2020-11-17 | Lamb wave resonator with grooved surface |
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| CN112332795A true CN112332795A (en) | 2021-02-05 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113630101A (en) * | 2021-08-17 | 2021-11-09 | 中国科学院上海微***与信息技术研究所 | Solid assembled transverse oscillation acoustic wave resonator |
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|---|---|---|---|---|
| US20090102316A1 (en) * | 2007-10-22 | 2009-04-23 | Stmicroelectronics Sa | Lamb wave resonator |
| JP2012009947A (en) * | 2010-06-22 | 2012-01-12 | Seiko Epson Corp | Manufacturing method of surface acoustic wave resonator |
| CN106053595A (en) * | 2016-05-13 | 2016-10-26 | 中国科学院苏州生物医学工程技术研究所 | Lamb wave sensor with high quality factor |
| CN108121889A (en) * | 2018-02-11 | 2018-06-05 | 海宁市瑞宏科技有限公司 | A kind of SAW filter resonator structure with horizontal mould inhibition |
| CN108540105A (en) * | 2018-04-11 | 2018-09-14 | 武汉大学 | Rf-resonator structure |
| CN111200417A (en) * | 2020-02-17 | 2020-05-26 | 无锡市好达电子有限公司 | Surface acoustic wave transducer with transverse mode suppression function and preparation method thereof |
| CN111416590A (en) * | 2020-03-31 | 2020-07-14 | 中国科学院上海微***与信息技术研究所 | High-frequency acoustic wave resonator and preparation method thereof |
| CN111555733A (en) * | 2020-05-26 | 2020-08-18 | 北京航天微电科技有限公司 | Lamb wave resonator structure and preparation method thereof |
| CN112260658A (en) * | 2020-10-16 | 2021-01-22 | 广东广纳芯科技有限公司 | Lamb wave resonator and manufacturing method thereof |
-
2020
- 2020-11-17 CN CN202011285218.8A patent/CN112332795A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090102316A1 (en) * | 2007-10-22 | 2009-04-23 | Stmicroelectronics Sa | Lamb wave resonator |
| CN101953072A (en) * | 2007-10-22 | 2011-01-19 | 国立科学研究中心 | Lamb wave resonator |
| JP2012009947A (en) * | 2010-06-22 | 2012-01-12 | Seiko Epson Corp | Manufacturing method of surface acoustic wave resonator |
| CN106053595A (en) * | 2016-05-13 | 2016-10-26 | 中国科学院苏州生物医学工程技术研究所 | Lamb wave sensor with high quality factor |
| CN108121889A (en) * | 2018-02-11 | 2018-06-05 | 海宁市瑞宏科技有限公司 | A kind of SAW filter resonator structure with horizontal mould inhibition |
| CN108540105A (en) * | 2018-04-11 | 2018-09-14 | 武汉大学 | Rf-resonator structure |
| CN111200417A (en) * | 2020-02-17 | 2020-05-26 | 无锡市好达电子有限公司 | Surface acoustic wave transducer with transverse mode suppression function and preparation method thereof |
| CN111416590A (en) * | 2020-03-31 | 2020-07-14 | 中国科学院上海微***与信息技术研究所 | High-frequency acoustic wave resonator and preparation method thereof |
| CN111555733A (en) * | 2020-05-26 | 2020-08-18 | 北京航天微电科技有限公司 | Lamb wave resonator structure and preparation method thereof |
| CN112260658A (en) * | 2020-10-16 | 2021-01-22 | 广东广纳芯科技有限公司 | Lamb wave resonator and manufacturing method thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113630101A (en) * | 2021-08-17 | 2021-11-09 | 中国科学院上海微***与信息技术研究所 | Solid assembled transverse oscillation acoustic wave resonator |
| CN113630101B (en) * | 2021-08-17 | 2024-05-24 | 中国科学院上海微***与信息技术研究所 | Solid-state assembly type transverse oscillation acoustic wave resonator |
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