CN112325146A

CN112325146A - Negative pressure gas supply steel cylinder

Info

Publication number: CN112325146A
Application number: CN201910718187.1A
Authority: CN
Inventors: 古丰愿; 张敏广
Original assignee: Individual
Current assignee: Individual
Priority date: 2019-08-05
Filing date: 2019-08-05
Publication date: 2021-02-05

Abstract

A negative pressure gas supply steel cylinder is used for supplying gas in a negative pressure or vacuum environment and comprises a steel cylinder body, a steel cylinder valve, a pipeline structure, a first check valve, a positive pressure type pressure regulating valve and a second check valve. The steel cylinder body is provided with an accommodating space for safely storing and transporting gas and an opening. The cylinder valve is used for closing the opening. The pipe structure includes first and second pipes connected to each other. The first check valve is a one-way valve disposed in the first pipeline and has an opening pressure corresponding to a flow direction of the output gas. The positive pressure type pressure regulating valve is arranged on the first pipeline and has outlet pressure in the same direction as the flowing direction of the output gas. The second check valve is arranged on the second pipeline and is a one-way valve which is in the same direction with the flowing direction of the input and stored gas.

Description

Negative pressure gas supply steel cylinder

Technical Field

The invention relates to a negative pressure gas supply steel cylinder, in particular to a negative pressure gas supply steel cylinder which can only release gas under a negative pressure or vacuum environment.

Background

In semiconductor doping, ion implantation and diffusion implantation are two common processes. Compared with the diffusion implantation process, the ion implantation process has the advantages of being capable of operating at low temperature and in vacuum, precisely controlling the concentration of impurity doping, having good impurity uniformity, being capable of penetrating through a thin film, having no solid solubility limit, and the like.

The ion implantation process is a plasma ion beam that is implanted into a semiconductor, and the ions in the ion beam are dissociated in a gas containing the ions, which is typically stored in a high pressure cylinder. Therefore, the ion implanter is usually connected to a plurality of high pressure steel cylinders, each of which is filled with gas, and the gas in the high pressure steel cylinders is sucked out by the vacuum equipment of the ion implanter, and then dissociated and ionized to form ion beams, and the whole process is operated under vacuum and negative pressure.

In order to match the vacuum environment of the ion implantation equipment and avoid gas leakage from the high-pressure steel cylinder, a precise valve is usually designed to close the high-pressure steel cylinder, however, the more precise valve also increases the setting cost of the high-pressure steel cylinder, or after the valve of the high-pressure steel cylinder is connected to the ion implanter, the gas must be led out of the high-pressure steel cylinder through multiple operations.

In the early days, high-pressure Gas cylinders are mostly adopted in cooperation with Gas cylinders of ion implantation equipment, and most of the Gas cylinders used in the ion implantation equipment are changed into negative pressure Gas cylinders (VSG) due to consideration of safety factors.

At present, there are two types of negative pressure steel cylinders, one is a gas cylinder using adsorbing material to adsorb gas, the other is a negative pressure regulating valve to regulate the gas pressure in the steel cylinder to below negative pressure for gas supply, and the negative pressure steel cylinder usually uses two valve ports, one is the valve port of input end, the other is the valve port of output end, so it has more complex valve design.

Disclosure of Invention

The invention provides a negative pressure gas supply steel cylinder, which uses a positive pressure type pressure regulating valve and a proper check valve to form a negative pressure gas supply effect, only uses one valve port for input and output, has a simple structure to reduce the cost, is convenient to operate, improves the safety degree, and reduces the operation complexity required by leading out gas.

The negative pressure gas supply steel cylinder is used for supplying gas in a negative pressure or vacuum environment and comprises a steel cylinder body, a steel cylinder valve, a pipeline structure, a first check valve, a positive pressure type pressure regulating valve and a second check valve. The steel cylinder body is provided with an accommodating space for safely storing and transporting gas and an opening. The steel cylinder valve is used for sealing the opening and is provided with an output/inlet and an opening of which two ends are respectively communicated with the output/inlet and the steel cylinder body. The pipeline structure comprises a first pipeline and a second pipeline, the first pipeline is provided with a first end connected with the channel and a second end extending into the accommodating space, and the second pipeline is connected with the first pipeline. When the gas is released from the accommodating space, the gas stored in the accommodating space flows to the first end through the second end of the first pipeline, and when the gas is stored and input into the negative pressure gas supply steel cylinder, the gas flows to the second pipeline through the first end of the first pipeline. The first check valve is a one-way valve arranged on the first pipeline and has certain opening pressure corresponding to the flowing direction of the output gas. The positive pressure type pressure regulating valve is arranged on the first pipeline, has the same direction with the flowing direction of the output gas, can regulate the high-pressure gas in the steel cylinder to low-pressure gas, and is set at a certain outlet pressure. The second check valve is arranged on the second pipeline and is a one-way valve which is in the same direction with the flowing direction of the input and stored gas.

In one embodiment of the present invention, the cracking pressure of the first check valve is greater than the outlet pressure of the positive pressure regulator valve.

In an embodiment of the present invention, the outlet pressure of the pressure regulating valve is represented as P1, the opening pressure of the first check valve is represented as P2, when P1< P2, the gas is stored in the accommodating space, and when the gas is to be led out of the accommodating space, the output/input port may be connected to a negative pressure vacuum device to provide a vacuum degree, the negative pressure of the vacuum degree relative to the accommodating space is represented as P3, and when P1+ P3 > P2, the gas may be released from the accommodating space.

In one embodiment of the invention, 0psi < P1+ P3-P2 < 14.7 psi.

In an embodiment of the present invention, the cylinder may further include a first filter disposed at the second end of the first pipe.

In an embodiment of the present invention, the cylinder may further include a second filter disposed between the first check valve and a connection between the second pipe and the first pipe.

In an embodiment of the present invention, the gas includes special gases such as arsine (AsH3), phosphine (PH3), boron trifluoride (BF3), silicon tetrafluoride (SiF4), carbon monoxide (CO), germanium tetrafluoride (GeF4), or a mixture thereof.

In one embodiment of the invention, a second check valve is disposed at an end of the second conduit.

In one embodiment of the present invention, the cylinder valve includes a valve body and a plug portion connected to each other, the output/inlet port is provided in the valve body, and the plug portion closes an opening of the cylinder body, and the passage extends from the plug portion to the output/inlet port.

According to the negative-pressure gas supply steel cylinder provided by the embodiment of the invention, the first check valve, the second check valve, the pressure regulating valve and the like for regulating and controlling the storage and release of gas are arranged in the steel cylinder body together with the pipeline structure, so that only one output/inlet is required to be arranged on a steel cylinder valve, the structural complexity of the steel cylinder valve can be greatly reduced, the convenience and the safety of operation are provided, and the cost is further reduced. In addition, when the steel cylinder valve is opened under the general open atmospheric environment, no gas flows out, and the operation is quite safe. In addition, the negative pressure gas supply steel cylinder of the embodiment of the invention only needs to connect a gas storage source or a negative pressure vacuum device with an output/inlet, and when the preset pressure condition is reached, the gas can be immediately stored or the gas can be led out, so the operation is quite convenient.

The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly understood, the present invention may be implemented in accordance with the content of the description, and in order to make the above and other objects, features, and advantages of the present invention more clearly understood, the following preferred embodiments are described in detail with reference to the accompanying drawings.

Drawings

Fig. 1 is a perspective view schematically illustrating a negative pressure gas supply steel cylinder according to an embodiment of the present invention.

Fig. 2 is a perspective view schematically illustrating a negative pressure gas supply cylinder according to another embodiment of the present invention.

Detailed Description

Fig. 1 is a perspective view schematically illustrating a negative pressure gas supply steel cylinder according to an embodiment of the present invention. Referring to fig. 1, the negative pressure gas supply cylinder 100 of the present embodiment, which can supply gas under a negative pressure or vacuum environment, includes a cylinder body 110, a cylinder valve 120, a pipeline structure 130, a first check valve 140, a pressure regulating valve 150, and a second check valve 160.

The cylinder body 110 has a receiving space S for safely storing and transporting gas, and an opening 111 is formed at one end of the receiving space S. The cylinder valve 120 is used for closing the opening 111 of the cylinder body 110, and has an output/inlet 121 and a channel 122 with two ends respectively connected to the output/inlet 121 and the receiving space S of the cylinder body 110. The cylinder valve 120 may also have a restriction (not shown) to adjust the aperture of the output/input port 121 to adjust the flow rate of the gas output/input cylinder 100.

The pipeline structure 130 includes a first pipeline 131 and a second pipeline 132, the first pipeline 131 has a first end 1311 connected to the channel 122 and a second end 1312 extending into the accommodating space S, and the second pipeline 132 is connected to the first pipeline 131. When the gas is released from the accommodating space S, the gas stored in the accommodating space S flows through the second end 1312 of the first pipe 131 to the first end 1311, whereas when the gas cylinder 100 is filled with gas, the gas flows through the first end 1311 of the first pipe 131 to the second pipe 132.

The first check valve 140 and the second check valve 160 are one-way valves, that is, only one-way flow is allowed, and the gas can pass through when a preset opening pressure is sensed for the allowed gas flow direction.

The first check valve 140 is disposed in the first pipeline 131, and the flow direction of the gas allowed by the first check valve is from the second end 1312 to the first end 1311, i.e., the flow direction of the output gas. The junction 133 of the second conduit 132 and the first conduit 131 is located between the first end 1311 and the first check valve 140. The first check valve 140 has a cracking pressure corresponding to the flowing direction of the output gas, that is, when the first check valve 140 senses that the gas pressure of the gas flowing from the second end 1312 to the first end 1311 is greater than the cracking pressure, the first check valve 140 is opened to allow the gas to pass through, so as to be released from the receiving space S.

The positive pressure regulating valve 150 is disposed in the first pipeline 131 and is closer to the second end 1312 of the first pipeline 131 than the first check valve 140, and the positive pressure regulating valve 150 has an outlet pressure in the same direction as the flow direction of the output gas from the second end 1312 to the first end 1311, so as to reduce the gas pressure of the gas stored in the accommodating space S.

Let the outlet pressure of the positive pressure regulator valve 150 be denoted as P1, the opening pressure of the first check valve 140 be denoted as P2, and the relationship of the outlet pressure P1 to the opening pressure P2 of the first check valve 140 be: p1< P2. Since P1< P2, when the cylinder valve 120 is opened in the atmosphere, the gas still cannot flow out of the cylinder 100, and the gas can be safely retained in the cylinder 100, which is highly safe. To start the gas supply, the output/input port of the cylinder valve 120 may be connected to a negative pressure vacuum device (not shown) to make the passage 122 have a vacuum degree, which is represented as P3 with respect to the negative pressure of the receiving space S, and if the gas stored in the cylinder body 110 is to be discharged, the outlet pressure P1, the opening pressure P2 of the first check valve 140 and the negative pressure P3 generated by the vacuum degree of the passage 122 should satisfy the following relation: p1+ P3 > P2. In order to efficiently extract the gas stored in the cylinder body 110, the difference between the negative pressure P3 generated by the outlet pressure P1 plus the vacuum level of the passage 122 and the opening pressure P2 of the first check valve 140 may be expressed as follows: 0psi < P1+ P3-P2 < 14.7 psi. Without limitation, as long as P1+ P3-P2 is greater than 0psi, gas can be drawn from the cylinder 100.

The second check valve 160 is disposed on the second pipeline 132, and is a one-way valve having the same direction as the flowing direction of the input and stored gas, i.e. the flowing directions of the gas allowed by the first check valve 140 and the second check valve 160 are opposite to each other, and the second check valve 160 only allows the gas to be stored and input into the cylinder 100 from the outside. The second check valve 160 may be disposed at an end of the second conduit 132 and may have a cracking pressure substantially the same as the cracking pressure P2 of the first check valve 140. Since the second pipeline 132 is not provided with the pressure regulating valve 150, even if the output/input port 121 of the cylinder valve 120 is connected to a negative pressure vacuum device and starts to draw gas from the accommodating space S, the gas can only flow out from the second end 1312 of the first pipeline 131, but not from the second pipeline 132. In addition, since the second pipe 132 only needs to be provided with the second check valve 160, the length of the second pipe 132 can be shorter than that of the first pipe 131.

In this embodiment, the gas may include a special gas such as arsine (AsH3), phosphine (PH3), boron trifluoride (BF3), silicon tetrafluoride (SiF4), carbon monoxide (CO), or germanium tetrafluoride (GeF4), or a mixture thereof. But is not limited thereto.

In this embodiment, the cylinder valve 120 includes a valve main body 123 and a stopper portion 124 connected to each other, the output/inlet port 121 is disposed on the valve main body 123, the stopper portion 124 closes the opening 111 of the cylinder body 110, and the passage 122 extends from the stopper portion 124 to the output/inlet port 121. The stopper portion 124 and the opening 111 of the cylinder body 110 may be coupled by a screw thread structure that are fitted to each other. However, the present invention is not limited thereto, and the stopper portion 124 and the opening 111 of the cylinder body 110 may have other coupling structures.

The cylinder valve 120 of the negative pressure gas supply cylinder 100 of the present embodiment may further include a valve handwheel 125 including an operation portion 126 and a blocking portion (not shown) connected to the operation portion 126 and extending into the cylinder valve 120. For example, the operating portion 126 can be screwed on the top of the valve member body 123, and the blocking portion can be lifted or lowered along with the rotation of the operating portion 126 to close or open the passage 122. As can be seen from the above description, the pipeline structure 130 of the present embodiment, in combination with the first check valve 140, the pressure regulating valve 150 and the second check valve 160, can prevent the gas from leaking from the accommodating space S of the cylinder body 110 before the sufficient negative pressure is applied to the passage 122, and thus the gas can be safely stored in the accommodating space S. The cylinder valve 120 may be configured to have specifications similar to current conventional valves without having to be overly complex and expensive.

In the negative pressure gas cylinder 100 of the present embodiment, the first check valve 140, the second check valve 160, the pressure regulating valve 150, and the like for regulating and controlling the storage and release of gas are disposed in the cylinder body 110 together with the pipeline structure 130, so that the structural complexity of the cylinder valve 120 can be greatly reduced, and the cost can be further reduced. In addition, the negative pressure gas supply cylinder 100 of the present embodiment does not allow gas to flow out when the cylinder valve 120 is opened in a generally open atmosphere, and is very safe to operate. In addition, as long as the output/inlet is connected with a gas storage source or a negative pressure vacuum device, when the preset pressure condition is reached, gas can be immediately stored or can be led out, and the operation is quite convenient.

Fig. 2 is a perspective view of a negative pressure gas supply steel cylinder according to an embodiment of the present invention. Referring to fig. 2, the negative pressure gas supply cylinder 100a of the present embodiment is substantially the same as the negative pressure gas supply cylinder 100 of fig. 1, except that the negative pressure gas supply cylinder 100a may further include a first filter 170 disposed at the second end 1312 of the first pipeline 131. In addition, the negative pressure gas cylinder 100a may further include a second filter 180 disposed between the first check valve 140 and the connection 133 between the second pipe 132 and the first pipe 131.

Since the cylinder 100a stores the gas to be dissociated, the gas in the cylinder 100a inevitably reacts with the wall surface of the cylinder to form deposits or impurities, and the first and

second filters

170 and 180 may be disposed in the first pipeline 131 to prevent the deposits or impurities from entering the ion source (not shown) of the ion implanter (not shown) through the pipeline 130 and damaging the equipment of the ion implantation system.

Although the present invention has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims

1. A negative pressure gas supply steel cylinder is used for releasing gas in a negative pressure environment, and is characterized by comprising:

the steel cylinder body is provided with an accommodating space for storing the gas and an opening positioned at one end of the accommodating space;

a steel cylinder valve for closing the opening of the steel cylinder body and having an output/inlet and a channel, both ends of which are respectively communicated with the output/inlet and the accommodating space of the steel cylinder body;

a pipeline structure, including a first pipeline and a second pipeline, the first pipeline has a first end connected to the channel and a second end extending into the containing space, the second pipeline is connected to the first pipeline, when releasing the gas from the containing space, the gas stored in the containing space flows to the first end through the second end of the first pipeline, when storing and inputting the gas to the negative pressure gas supply steel cylinder, the gas flows to the second pipeline through the first end of the first pipeline;

the first check valve is arranged on the one-way valve of the first pipeline, the joint of the second pipeline and the first pipeline is positioned between the first end and the first check valve, and the first check valve has opening pressure aiming at the gas flowing direction from the second end to the first end;

a positive pressure regulating valve disposed in the first pipeline and closer to the second end of the first pipeline than the first check valve, the regulating valve having a direction same as a gas flowing direction from the second end to the first end, capable of regulating the gas in the accommodating space from a high pressure to a low pressure, and setting a predetermined outlet pressure; and

and the second check valve is arranged on the second pipeline and is a one-way valve which is in the same direction with the gas flowing direction of the gas input and stored in the second pipeline.

2. The cylinder of claim 1, wherein the opening pressure of the first check valve is greater than the outlet pressure of the positive pressure regulator.

3. The cylinder as claimed in claim 1, wherein the outlet pressure of the pressure regulating valve is represented as P1, the opening pressure of the first check valve is represented as P2, the gas is stored in the receiving space when P1< P2, and the outlet/inlet is connected to a negative pressure vacuum device to provide a vacuum degree, a negative pressure of the vacuum degree relative to the receiving space is represented as P3, and the gas is released from the receiving space when P1+ P3 > P2.

4. The cylinder of claim 3, wherein 0psi < P1+ P3-P2 < 14.7 psi.

5. The cylinder of claim 1, further comprising a first filter disposed at the second end of the first tube.

6. The cylinder of claim 5, further comprising a second filter disposed between the first check valve and the connection between the second conduit and the first conduit.

7. The cylinder of claim 1, wherein the gas comprises a specific gas such as arsine (AsH3), phosphine (PH3), boron trifluoride (BF3), silicon tetrafluoride (SiF4), carbon monoxide (CO) or germanium tetrafluoride (GeF4), or a mixture thereof.

8. The cylinder of claim 1, wherein the second valve is disposed at an end of the second conduit.

9. The negative-pressure gas-supplying steel cylinder of claim 1, wherein the cylinder valve includes a valve main body and a plug portion connected to each other, the output/inlet port is provided to the valve main body, and the plug portion closes the opening of the cylinder main body, and the passage extends from the plug portion to the output/inlet port.