CN112318063B - Method for processing surface patterns of sputtering ring accessory - Google Patents
Method for processing surface patterns of sputtering ring accessory Download PDFInfo
- Publication number
- CN112318063B CN112318063B CN202010935763.0A CN202010935763A CN112318063B CN 112318063 B CN112318063 B CN 112318063B CN 202010935763 A CN202010935763 A CN 202010935763A CN 112318063 B CN112318063 B CN 112318063B
- Authority
- CN
- China
- Prior art keywords
- knurling
- accessory
- tool
- bar
- cap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/0042—Devices for removing chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
- B23Q3/06—Work-clamping means
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a method for processing surface patterns of a sputtering ring accessory, which belongs to the field of semiconductor targets; firstly, putting a bar into a tool for clamping and fastening, and then finely turning an outer circle, knurling the diameter, drilling an inner hole and knurling the bottom of the outer circle; cutting off the bar stock, and taking out the mounting fitting cap blank; then fastening the mounting fitting cap blank outside the three support columns with the column jaw tooling in an inner support mode; then, finish turning is carried out to remove a small boss outside the end face of the fitting in the fitting cap blank to obtain a mounting fitting cap; knurling the arc area of the fitting for mounting the fitting cap; and finally, taking down the mounting fitting cap, and embossing the end face of the fitting of the mounting fitting cap. According to the invention, the tool internal support mode is adopted, the accessory is fastened on the tool boss, so that the interior of the accessory is fully attached to the tool boss, and the problems of untight clamping, shaking in the turning and pattern processing processes, inconsistent pattern depth and low product yield caused by the traditional clamping mode can be solved.
Description
Technical Field
The invention belongs to the technical field of semiconductor targets, and particularly relates to a method for processing surface patterns of a sputtering ring accessory.
Background
During the sputtering process of the semiconductor target, a plurality of ring products are usually used together with the target, the sputtering ring can generate a magnetic field during the sputtering process, the sputtering ring piece consists of a sputtering ring (Coil), a mounting fitting cap (Cup) of the sputtering ring and a mounting fitting nail (Pin) of the sputtering ring, wherein one of the three parts is not available, wherein the outer area of the mounting accessory cap (Cup) is composed of patterns so as to improve the effect of adsorbing particles, but the problems of irregular knurling, inconsistent grain connection and the like can be caused by the conventional clamping processing, the grain pattern is influenced, the quality of the parts is greatly influenced, the product yield in the sputtering process is influenced, and the risk of product scrapping is caused. In view of the above, there is a need for a new method for processing surface patterns of sputtering ring fittings to solve the problem that the pattern lines do not meet the requirements.
Disclosure of Invention
Aiming at the problems in the background art, the invention provides a method for processing patterns on the surface of a sputtering ring accessory, which is characterized by comprising the following steps:
step 4, knurling the circular arc area of the fitting for mounting the fitting cap;
step 5, taking down the mounting fitting cap, putting the center column of the T-shaped support gasket into the gaps in the middle of the three clamping jaw tools with the columns, and fastening the mounting fitting cap outside the support columns of the three clamping jaw tools with the columns in an inner support mode; at the moment, a support column of the tool with the column clamping claw is attached to the inner wall of the mounting accessory cap, and the outer end face of the T-shaped support gasket is attached to the inner side of the outer end of the mounting accessory cap;
and 6, embossing the end face of the fitting for mounting the fitting cap.
In the step 1, when the bar diameter is knurled, knurling is carried out on the side surface by adopting a double-wheel knurling tool, the center height of a knurling wheel is consistent with the rotation center of a machine tool, the rotation speed is 200 revolutions per minute, the feeding is 0.1mm, the two wheels are within the range of 2-3 degrees of the rotation center, and cutting fluid is required to be added in the knurling process.
In the step 1, when the inner hole is drawn out of the bar, the method adopts
The drill bit is fed at the rotation speed of 700 plus 800 mm for 0.04mm, and the inner hole is finely turned by a small boring cutter when the inner hole is drawn.
In the step 1, when the bottom of the excircle is knurled, a single-wheel knurling tool is adopted, the knurling tool is flush with the end face, and the two wheels are within the range of 2-3 degrees of the rotation center.
In the step 1, the bar stock is cut in a manner that: and after the knurling of the outer round bottom part is finished, cutting off the bar stock by using a cutting knife with the width of about 3 mm.
In the step 4, when the circular arc area of the accessory is knurled, knurling of the circular arc area is finished by the knurling cutter bar respectively forming three angles of 25 degrees, 45 degrees and 65 degrees, the appearance of the pattern connection part is good, the knurling of the circular arc area is carried out by the machine tool with the rotation speed of 150 revolutions per minute and the cutter feeding of 0.1mm, and the knurling processing time of each angle is 2-3 seconds.
In the step 6, when the end face of the fitting is embossed, the end face is embossed by using a knurling tool which is widened to 18mm to match with the protective gasket, so that the pattern is completely covered by the knurling tool, and the pattern at the end part is processed by 7-8 times of embossing.
The specific steps of finishing the treatment of the end patterns through embossing for 7-8 times are as follows: embossing 15Mpa, 20mm per minute, 0.03mm, 0.06mm, 0.09mm, 0.12mm, 0.15mm, 0.17mm under each pressing depth, and finally, two to three air passes, so that the uniform pressing of the patterns is ensured, and the pattern appearance with uniform texture is obtained.
Step A is carried out before the step 1, the bar stock is subjected to preliminary processing to be processed into a bar stock, and the method comprises the following steps:
step A1, the material of the bar stock is titanium ingot,
the blanking length is 36 mm; feeding the bar material into a furnace, preserving heat at 600 ℃ for 1h, then freely forging, and forging to obtain the final size
Cutting the forged bar into a section of 280 plus 320mm bar by a saw, so that the clamping of a machine tool is facilitated;
step A2, mounting the tool on a machine tool; rough turning and peeling the bar stock, turning, removing the forging and stacking to
The bar stock has smooth appearance, the concentricity of the bar stock is less than or equal to 0.1mm, and the two ends are leveled.
Step B is performed after said step 6, comprising:
b1, ultrasonically cleaning the mounting fittings by using cleaning powder to remove residual oil stains on the surface, wherein the ultrasonic time is 1-15min, and the ratio of the cleaning powder to water is 1-2: 10;
and step B2, carrying out vacuum heat treatment at the temperature of 750-.
The invention has the beneficial effects that:
1. the mode that adopts the frock internal stay fastens the accessory on the frock boss, makes the inside and the abundant laminating of frock boss of accessory, can avoid traditional dress card mode to cause the dress card tight, takes place to rock in turning, the decorative pattern course of working, influences the annular knurl effect on accessory surface, causes the decorative pattern depth inconsistent, problem that the product yield is low.
2. By special forging processing of the bar stock and the requirement of the bar stock size before pattern processing, adverse factors before pattern processing can be controlled.
3. The end face is embossed, and the end part of the accessory is supported by the gasket, so that the embossing of patterns on the end part is realized, and the adverse effects of sinking, cracking and the like in an arc area for processing the end face patterns caused by thin wall thickness and no support inside in the process of processing the end face patterns can be effectively avoided; effectively improve the knurling machining efficiency and the yields of sputtering ring accessory.
Drawings
FIG. 1 is a flow chart of an embodiment of a method of forming a pattern on a surface of a sputtering ring assembly according to the present invention;
FIG. 2 is a schematic structural diagram of an embodiment of the present invention;
FIG. 3 is a top view of an installation cap in an embodiment of the present invention;
FIG. 4 is a cross-sectional view taken along line A-A of FIG. 3;
FIG. 5 is a cross-sectional view of a "T" shaped support spacer in accordance with an embodiment of the present invention;
FIG. 6 is a top view of a tooling with column jaws in an embodiment of the present invention;
FIG. 7 is a schematic view of the cap side of the installation fitting after diameter knurling in an embodiment of the present invention.
Wherein:
1-mounting a fitting cap, 2-installing a fixture with a column clamping claw, 3-a T-shaped supporting gasket, 4-a machine tool, 11-the bottom of an excircle, 12-a side surface, 13-an end surface of a fitting and 14-an arc area.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
The method for processing the patterns of the sputtering ring installation accessory cap shown in figures 1-6 comprises the following steps:
step 4, knurling the fitting arc area 14 for installing the fitting cap 1;
step 5, taking down the mounting accessory cap 1, placing a center column of the T-shaped support gasket 3 into gaps in the middle of the three clamping jaw tools 2 with the columns, and fastening the mounting accessory cap 1 outside the support columns of the three clamping jaw tools 2 with the columns in an inner supporting mode; at the moment, a support column of the tool with the column clamping claw 2 is attached to the inner wall of the mounting accessory cap 1, and the outer end face of the gasket main body in the T-shaped support gasket 3 is attached to the inner side of the outer end of the mounting accessory cap 1;
and 6, embossing the fitting end face 13 of the fitting cap 1.
In this embodiment, the diameter of the support column of the fixture with column and claw 2 is
The section of the support column of the fixture with column clamping claws 2 is fan-shaped;
in the embodiment, the outer diameter of the support column of the tool with column clamping jaws 2 is 0.05-0.1mm smaller than the inner diameter of the mounting fitting cap 1.
In this embodiment, the complete sputtering ring product consists of three types of parts, 1 sputtering ring (Coil), 5 sputtering ring mounting fittings cap 1(Cup), and 5 sputtering ring mounting fittings nail (Pin).
In step 1, when the outer circle of the bar is finely turned, finely turning the bar to
According to the calculation result of the pattern knurling modulus, the diameter before knurling needs to be smaller than that after knurling by 0.2mm, and the diameter after knurling grows;
in the step 1, when knurling the diameter of the bar, knurling the side surface 12 by adopting a 50TPI double-wheel knurling tool, wherein the center height of a knurling wheel is consistent with the rotation center of a machine tool, the rotation speed is 200 r/min, the feeding is 0.1mm, the two wheels are within the range of 2-3 degrees of the rotation center, and cutting fluid is required to be added in the knurling process;
in step 1, when an inner hole is drawn out of the bar, the method adopts
A drill bit with the depth of 23mm and the rotating speed of 700 plus 800 mm is fed for 0.04mm, and a small boring cutter is used for finish turning the inner hole to a finished product;
in the step 1, when knurling the bottom 11 of the excircle, adopting a single-wheel knurling tool, wherein the knurling tool is level with the end face, and the two wheels are within the range of 2-3 degrees of the rotation center;
in step 1, the bar stock is cut in the following manner: cutting off the bar stock by using a cutting knife with the width of about 3mm after finishing knurling the bottom 11 of the excircle;
in step 4, when knurling the accessory arc area 14, knurling the arc area by knurling cutter bars respectively forming three angles of 25 degrees, 45 degrees and 65 degrees, the appearance of the pattern connection part is good, a machine tool rotates for 150 revolutions per minute, the cutter feeds 0.1mm, knurling the arc area, a single-wheel knurling cutter and the cutter bars with three angles are used for clamping together without changing the cutter, the knurling processing time of each angle is 2-3 seconds, and the patterns with uniform texture can be obtained;
in step 6, when embossing the end face 13 of the accessory, embossing the end face by using a knurling tool which is widened to 18mm to match with the protective gasket, ensuring that the patterns are completely covered by the knurling tool, and finishing the processing of the patterns at the end part through 7-8 times of embossing; the method specifically comprises the following steps: embossing 15Mpa, feeding 20mm per minute, pressing depth of 0.03mm, 0.06mm, 0.09mm, 0.12mm, 0.15mm and 0.17mm each time, and finally, performing air walking for two to three times to ensure that the patterns are uniformly pressed to obtain the pattern appearance with uniform texture;
because the center of the end face 13 of the accessory is provided with the round hole, the inferior-quality product can be generated due to uneven stress when the end face 13 of the accessory is directly embossed, and because the T-shaped supporting gasket 3 with the diameter larger than that of the round hole is arranged in the mounting accessory cap 1, enough support is generated to emboss the end face 13 of the accessory for multiple times at different depths as required; meanwhile, the embossing processing efficiency and the yield can be ensured.
Step A is carried out before step 1, the bar stock is subjected to preliminary processing to be processed into a bar stock, and the method specifically comprises the following steps:
step A1, the material of the bar stock is titanium ingot,
dischargingThe length is 36 mm; feeding the bar material into a furnace, preserving heat at 600 ℃ for 1h, then freely forging, and forging to obtain the final size
Cutting the forged bar into a section of 280 plus 320mm bar by a saw, so that the clamping of a machine tool is facilitated;
step A2, mounting a common tool on a machine tool 4, roughly turning and peeling the bar stock, turning and removing the forging and overlapping until
The bar stock has smooth appearance, the concentricity of the bar stock is less than or equal to 0.1mm, and the two ends are leveled; it should be additionally noted that the tooling used herein may be arbitrarily selected according to the needs.
Step B is performed after step 6, comprising:
b1, ultrasonically cleaning the installation fitting cap 1 by using cleaning powder to remove residual oil stains on the surface, wherein the ultrasonic time is 1-15min, and the ratio of the cleaning powder to water is 1-2: 10;
and step B2, carrying out vacuum heat treatment at the temperature of 750-.
The foregoing illustrates and describes the principles, general features, and advantages of the present invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. A method for processing surface patterns of a sputtering ring accessory is characterized by comprising the following steps:
step 1, putting a bar into a tool for clamping and fastening, and then finely turning an outer circle, knurling the diameter, drilling an inner hole and knurling the bottom (11) of the outer circle of the bar; cutting off the bar stock, and taking out the mounting fitting cap blank;
step 2, fastening the mounting fitting cap blank outside the support columns of the three column-provided clamping jaw tools (2) in an inner support mode; at the moment, a support column of the fixture (2) with the column clamping claw is attached to the inner wall of the mounting accessory cap blank;
step 3, finely turning and removing a small boss outside the end face (13) of the fitting in the fitting cap blank to obtain a fitting cap (1);
step 4, knurling the accessory arc area (14) for installing the accessory cap (1),
step 5, taking down the mounting fitting cap (1), putting a center column of the T-shaped support gasket (3) into gaps in the middle of the three clamping jaw tools (2) with the columns, and fastening the mounting fitting cap (1) outside the support columns of the three clamping jaw tools (2) with the columns in an inner support mode; at the moment, a support column of the tool (2) with the column clamping claw is attached to the inner wall of the installation accessory cap (1), a T-shaped support gasket (3) with the diameter larger than that of the round hole is arranged in the installation accessory cap (1), and the outer end face of the T-shaped support gasket (3) is attached to the inner side of the outer end of the installation accessory cap (1);
and 6, embossing the accessory end face (13) of the mounting accessory cap (1).
2. The method for processing the surface patterns of the sputtering ring fittings as claimed in claim 1, wherein in the step 1, when the diameter of the bar stock is knurled, a double-wheel knurling tool is adopted to knurl the side surface (12), the center height of the knurling wheel is consistent with the rotation center of a machine tool, the rotation speed is 200 revolutions per minute, the feeding is 0.1mm, the two wheels are within the range of 2-3 degrees of the rotation center, and the knurling process needs to add cutting fluid.
3. The method as claimed in claim 1, wherein in step 1, a drill with a diameter of 7mm is used to drill the inner hole of the bar material, the rotation speed is 700-.
4. The method for machining the surface patterns of the sputtering ring fittings according to the claim 1, wherein in the step 1, when knurling the bottom (11) of the excircle, a single-wheel knurling tool is adopted, the knurling tool is flush with the end face, and the two wheels are within the range of 2-3 degrees of the rotation center.
5. The method as claimed in claim 1, wherein in step 1, the bar stock is cut by: and cutting off the bar stock by using a cutting knife with the width of 3mm after the knurling is finished on the bottom (11) of the excircle.
6. The method for processing the surface patterns of the accessory of the sputtering ring according to the claim 1, wherein in the step 4, when the arc area (14) of the accessory is knurled, the knurling cutter rod finishes the knurling of the arc area at three angles of 25 degrees, 45 degrees and 65 degrees respectively, the appearance of the pattern connection position is good, the machine tool rotates at 150 revolutions per minute, the cutter feed is 0.1mm, the knurling of the arc area is carried out, and the knurling processing time of each angle is 2-3 seconds.
7. The method for processing the surface patterns of the fittings of the sputtering ring according to the claim 1, wherein in the step 6, when the end face (13) of the fittings is embossed, the end face embossing is carried out by using a knurling tool which is widened to 18mm + and is matched with a protective gasket, the patterns are completely covered by the knurling tool, and the end pattern processing is completed by 7-8 times of embossing.
8. The method for processing the surface pattern of the sputtering ring fitting according to claim 7, wherein the specific steps of finishing the end pattern by embossing 7-8 times are as follows: embossing 15Mpa, 20mm per minute, 0.03mm, 0.06mm, 0.09mm, 0.12mm, 0.15mm, 0.17mm under each pressing depth, and finally, two to three air passes, so that the uniform pressing of the patterns is ensured, and the pattern appearance with uniform texture is obtained.
9. The method as claimed in claim 1, wherein step a is performed before step 1, and the step a of performing preliminary machining on a bar stock to form the bar stock into a bar stock comprises:
step A1, the material of the bar stock blank is a titanium ingot, phi =155mm, and the blanking length is 36 mm; feeding the bar material into a furnace, keeping the temperature at 600 ℃ for 1h, then freely forging the bar material, wherein the forged bar material has the size phi of 24mm, and cutting the forged bar material into a section of 280-320mm bar material by a saw, so that the bar material is convenient to mount and clamp by a machine tool;
step A2, mounting the tool on a machine tool (4); rough turning and peeling of the bar stock, turning and removing the forged overlapped skin to phi 22mm, enabling the bar stock to have smooth appearance, enabling the concentricity of the bar stock to be less than or equal to 0.1mm, and enabling two ends to be flush.
10. The method of claim 1, wherein step B is performed after step 6, and comprises:
b1, ultrasonically cleaning the installation fitting cap (1) by using cleaning powder to remove residual oil stains on the surface, wherein the ultrasonic time is 1-15min, and the ratio of the cleaning powder to water is 1-2: 10;
and step B2, carrying out vacuum heat treatment at the temperature of 750-.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010935763.0A CN112318063B (en) | 2020-09-08 | 2020-09-08 | Method for processing surface patterns of sputtering ring accessory |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010935763.0A CN112318063B (en) | 2020-09-08 | 2020-09-08 | Method for processing surface patterns of sputtering ring accessory |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112318063A CN112318063A (en) | 2021-02-05 |
| CN112318063B true CN112318063B (en) | 2022-01-18 |
Family
ID=74303063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010935763.0A Active CN112318063B (en) | 2020-09-08 | 2020-09-08 | Method for processing surface patterns of sputtering ring accessory |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112318063B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113560825B (en) * | 2021-07-30 | 2022-07-15 | 宁波江丰电子材料股份有限公司 | Semiconductor sputtering ring protection piece and processing method thereof |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200429352Y1 (en) * | 2006-06-13 | 2006-10-20 | 오영복 | CNC pipe coaster's roller with knurling |
| CN101920439A (en) * | 2010-08-20 | 2010-12-22 | 宁夏东方钽业股份有限公司 | Reeling, welding and knurling process for inner and outer surfaces of sputtered tantalum ring |
| CN102145445A (en) * | 2011-04-08 | 2011-08-10 | 常州合泰微特电机有限公司 | Ultraprecise drum-shaped roller and processing method thereof |
| CN103273278A (en) * | 2013-06-17 | 2013-09-04 | 沈阳飞机工业（集团）有限公司 | Method for machining perpendicularity gauge |
| CN103737265A (en) * | 2013-12-27 | 2014-04-23 | 滨州盟威斯林格缸套有限公司 | Machining process for piston anti-abrasion inlaid ring |
| CN205888632U (en) * | 2016-08-15 | 2017-01-18 | 强龙科技（苏州）有限公司 | CNC processing thin wall cavity spare special fixture |
| CN108994525A (en) * | 2018-07-20 | 2018-12-14 | 宁波江丰电子材料股份有限公司 | Semiconductor ultra-pure titanium sputtering target end face annular knurl technique |
| CN110948263A (en) * | 2019-12-25 | 2020-04-03 | 盐城哈力动力传动及智能装备产业研究院有限公司 | Clamping device for drilling of speed reducer shell |
| CN111015301A (en) * | 2019-12-31 | 2020-04-17 | 有研亿金新材料有限公司 | Machining method for mounting hole position and opening area of sputtering ring piece |
| CN211135562U (en) * | 2019-11-26 | 2020-07-31 | 重庆市綦齿高新铸造有限责任公司 | Be used for automotive transmission casing cutting jig |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6440237B1 (en) * | 2000-05-23 | 2002-08-27 | Delphi Technologies, Inc. | Process for forming cold formed high-load bearing steel parts |
| CN106521433A (en) * | 2015-09-09 | 2017-03-22 | 宁波江丰电子材料股份有限公司 | Ring part structure and machining method thereof |
-
2020
- 2020-09-08 CN CN202010935763.0A patent/CN112318063B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200429352Y1 (en) * | 2006-06-13 | 2006-10-20 | 오영복 | CNC pipe coaster's roller with knurling |
| CN101920439A (en) * | 2010-08-20 | 2010-12-22 | 宁夏东方钽业股份有限公司 | Reeling, welding and knurling process for inner and outer surfaces of sputtered tantalum ring |
| CN102145445A (en) * | 2011-04-08 | 2011-08-10 | 常州合泰微特电机有限公司 | Ultraprecise drum-shaped roller and processing method thereof |
| CN103273278A (en) * | 2013-06-17 | 2013-09-04 | 沈阳飞机工业（集团）有限公司 | Method for machining perpendicularity gauge |
| CN103737265A (en) * | 2013-12-27 | 2014-04-23 | 滨州盟威斯林格缸套有限公司 | Machining process for piston anti-abrasion inlaid ring |
| CN205888632U (en) * | 2016-08-15 | 2017-01-18 | 强龙科技（苏州）有限公司 | CNC processing thin wall cavity spare special fixture |
| CN108994525A (en) * | 2018-07-20 | 2018-12-14 | 宁波江丰电子材料股份有限公司 | Semiconductor ultra-pure titanium sputtering target end face annular knurl technique |
| CN211135562U (en) * | 2019-11-26 | 2020-07-31 | 重庆市綦齿高新铸造有限责任公司 | Be used for automotive transmission casing cutting jig |
| CN110948263A (en) * | 2019-12-25 | 2020-04-03 | 盐城哈力动力传动及智能装备产业研究院有限公司 | Clamping device for drilling of speed reducer shell |
| CN111015301A (en) * | 2019-12-31 | 2020-04-17 | 有研亿金新材料有限公司 | Machining method for mounting hole position and opening area of sputtering ring piece |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112318063A (en) | 2021-02-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112318063B (en) | Method for processing surface patterns of sputtering ring accessory | |
| CN111531333B (en) | Method for processing special-shaped thin-wall shell part | |
| CN105563055A (en) | Thin-walled workpiece machining method | |
| CN101590589B (en) | Method for producing transmission part | |
| CN108213868B (en) | Process for machining metal thin-wall part by machining center | |
| CN101289187A (en) | Method for preparing multi-lobe combined graphite crucible | |
| EP0509610B1 (en) | Procedure for production of vehicle wheels | |
| CN108673074B (en) | Method for manufacturing stone cutting tool | |
| CN102494042B (en) | Method for manufacturing constant velocity universal joint maintaining rack | |
| CN105382100A (en) | Aluminum alloy rim cavity spinning die and method | |
| CN110369963A (en) | The preparation method of integrated wheel | |
| CN107262647A (en) | A kind of method for upsetting of large-scale round steel bar | |
| EP1092496A3 (en) | Method for repairing steel spray-formed tooling with TIG welding process | |
| CN201309005Y (en) | Lathe cutter | |
| CN110695374A (en) | Groove cutting machining method | |
| CN105690026A (en) | Manufacturing method for motorcycle starting lever | |
| CN103752907A (en) | Drill bit of hollow drill and manufacturing method thereof | |
| CN101306497B (en) | Trident shaft processing method and clamping device | |
| CN204799966U (en) | Skin combination sword is taken off to brute force | |
| CN109434381B (en) | Machining method of silencer hole | |
| CN112338462A (en) | Processing technology of steel-aluminum composite material for mobile phone cover plate | |
| CN109807219A (en) | A kind of aluminium alloy wheel hub rotary pressing processing technique | |
| CN108380943B (en) | Drilling and milling integrated milling cutter | |
| CN206047188U (en) | Reflectal wheel hub High Speed Milling Operation cutter | |
| CN108425949B (en) | Welded combined solid comb-shaped bearing retainer and manufacturing method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |