CN112290904A - 基于嵌入型电极的超高频谐振器 - Google Patents
基于嵌入型电极的超高频谐振器 Download PDFInfo
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- CN112290904A CN112290904A CN202011178454.XA CN202011178454A CN112290904A CN 112290904 A CN112290904 A CN 112290904A CN 202011178454 A CN202011178454 A CN 202011178454A CN 112290904 A CN112290904 A CN 112290904A
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- Prior art keywords
- resonator
- piezoelectric layer
- electrodes
- embedded
- uhf
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- 238000010168 coupling process Methods 0.000 claims abstract description 18
- 238000005859 coupling reaction Methods 0.000 claims abstract description 18
- 230000008878 coupling Effects 0.000 claims abstract description 17
- 230000001788 irregular Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 230000005684 electric field Effects 0.000 abstract description 11
- 230000001808 coupling effect Effects 0.000 abstract description 4
- 235000019687 Lamb Nutrition 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000010897 surface acoustic wave method Methods 0.000 description 5
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202011178454.XA CN112290904A (zh) | 2020-10-29 | 2020-10-29 | 基于嵌入型电极的超高频谐振器 |
Applications Claiming Priority (1)
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CN202011178454.XA CN112290904A (zh) | 2020-10-29 | 2020-10-29 | 基于嵌入型电极的超高频谐振器 |
Publications (1)
Publication Number | Publication Date |
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CN112290904A true CN112290904A (zh) | 2021-01-29 |
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Family Applications (1)
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CN202011178454.XA Pending CN112290904A (zh) | 2020-10-29 | 2020-10-29 | 基于嵌入型电极的超高频谐振器 |
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CN (1) | CN112290904A (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112968685A (zh) * | 2021-02-05 | 2021-06-15 | 武汉大学 | 带有沟槽结构的体声波谐振器 |
CN112994647A (zh) * | 2021-02-05 | 2021-06-18 | 武汉大学 | 环电极结构的超高频谐振器 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20170179923A1 (en) * | 2015-12-18 | 2017-06-22 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator and method of manufacturing the same |
CN107567682A (zh) * | 2014-12-17 | 2018-01-09 | Qorvo美国公司 | 具有波限制结构的板波装置和制造方法 |
US20180219525A1 (en) * | 2017-01-30 | 2018-08-02 | Zhuohui Chen | Surface acoustic wave device |
WO2019154345A1 (zh) * | 2018-02-11 | 2019-08-15 | 诺思(天津)微***有限责任公司 | 体声波谐振器及其制造方法 |
CN110166012A (zh) * | 2019-05-15 | 2019-08-23 | 上海科技大学 | 二维耦合的射频压电谐振器及其制备方法 |
CN110880922A (zh) * | 2019-11-18 | 2020-03-13 | 武汉大学 | 一种二维超高频谐振器 |
-
2020
- 2020-10-29 CN CN202011178454.XA patent/CN112290904A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107567682A (zh) * | 2014-12-17 | 2018-01-09 | Qorvo美国公司 | 具有波限制结构的板波装置和制造方法 |
US20170179923A1 (en) * | 2015-12-18 | 2017-06-22 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator and method of manufacturing the same |
US20180219525A1 (en) * | 2017-01-30 | 2018-08-02 | Zhuohui Chen | Surface acoustic wave device |
WO2019154345A1 (zh) * | 2018-02-11 | 2019-08-15 | 诺思(天津)微***有限责任公司 | 体声波谐振器及其制造方法 |
CN110166012A (zh) * | 2019-05-15 | 2019-08-23 | 上海科技大学 | 二维耦合的射频压电谐振器及其制备方法 |
CN110880922A (zh) * | 2019-11-18 | 2020-03-13 | 武汉大学 | 一种二维超高频谐振器 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112968685A (zh) * | 2021-02-05 | 2021-06-15 | 武汉大学 | 带有沟槽结构的体声波谐振器 |
CN112994647A (zh) * | 2021-02-05 | 2021-06-18 | 武汉大学 | 环电极结构的超高频谐振器 |
CN112968685B (zh) * | 2021-02-05 | 2023-04-25 | 武汉敏声新技术有限公司 | 带有沟槽结构的体声波谐振器 |
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Effective date of registration: 20220407 Address after: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Applicant after: Ningbo Huazhang enterprise management partnership (L.P.) Address before: 430072 Hubei Province, Wuhan city Wuchang District of Wuhan University Luojiashan Applicant before: WUHAN University |
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Effective date of registration: 20220830 Address after: No.01, 4th floor, building D7, phase 3, Wuhan Software New Town, No.9 Huacheng Avenue, Donghu New Technology Development Zone, Wuhan City, Hubei Province, 430000 Applicant after: Wuhan Minsheng New Technology Co.,Ltd. Address before: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Applicant before: Ningbo Huazhang enterprise management partnership (L.P.) |