CN112289667B - Two-dimensional switch door device for interaction of atmosphere end and vacuum end of ion implanter - Google Patents
Two-dimensional switch door device for interaction of atmosphere end and vacuum end of ion implanter Download PDFInfo
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- CN112289667B CN112289667B CN202011106153.6A CN202011106153A CN112289667B CN 112289667 B CN112289667 B CN 112289667B CN 202011106153 A CN202011106153 A CN 202011106153A CN 112289667 B CN112289667 B CN 112289667B
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- 230000003993 interaction Effects 0.000 title claims abstract description 17
- 230000007246 mechanism Effects 0.000 claims description 29
- 238000005468 ion implantation Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 239000002699 waste material Substances 0.000 description 6
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
- H01J37/185—Means for transferring objects between different enclosures of different pressure or atmosphere
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to a two-dimensional switch door device for interaction between an atmosphere end and a vacuum end of an ion implanter, which comprises a film warehouse chamber, a film warehouse door assembly and a two-dimensional cylinder assembly, wherein the film warehouse chamber is connected with a high-vacuum target chamber of a machine, the two-dimensional cylinder assembly is arranged on the film warehouse chamber, and the film warehouse door assembly is arranged on the two-dimensional cylinder assembly.
Description
Technical Field
The invention relates to core equipment in a semiconductor manufacturing process, namely an ion implanter, in particular to a two-dimensional switch door device for interaction between an atmosphere end and a vacuum end of the ion implanter.
Background
The ion implantation process is carried out in a target chamber at the vacuum end, the silicon wafer to be implanted is firstly positioned in a wafer box at the large end, and a wafer library is positioned between the target chamber and the wafer box.
Referring to fig. 1, which is a schematic diagram of a door opening and closing device of the prior art in which an atmosphere end and a vacuum end of an ion implanter are interacted, a movable door assembly 2 is arranged on a door opening and closing assembly 3; the door opening and closing assembly 3 is arranged on the film warehouse chamber 1, wherein the upper end of the connecting rod 31 is rotationally connected with the side surface of the film warehouse chamber 1, forms a parallelogram hinge mechanism with the cross rod 12, and the locking cylinder 33 is fixedly connected with the bottom surface of the film warehouse chamber 1. Automatic closing process of the film warehouse: the locking cylinder 33 is kept in a retracted state (the state shown in fig. 1), the lifting cylinder 34 (fixed on the cross bar 32) is extended, the movable door 21 is pulled to slide upwards (the relative sliding of the guide rail 22 and the sliding block 23) by the steel wire rope 36 bypassing the two fixed pulleys 35 until the lifting cylinder 34 reaches the extending limit, at this time, the locking cylinder 33 is extended, and the parallelogram hinge mechanism is driven to enable the movable door 21 to be closely attached to the sheet stock chamber 1. Automatic door opening process of the film warehouse: the locking cylinder 33 is first extended to disengage the movable door 21 from the magazine chamber 1, then the lifting cylinder 34 is retracted, and the movable door 21 is pulled to slide down by the wire rope 36 that bypasses the two fixed pulleys 35 until the lifting cylinder 34 reaches the retraction limit.
From the practical use effect, the door opening and closing device has a complex structure, is difficult to disassemble and maintain, has high requirements on the installation precision of each part, and has the problems of easy abrasion, breakage, detachment of the fixed pulley 15 and the like of the steel wire rope 16, and the door opening and closing efficiency, success rate and service life of the door opening and closing device cannot meet the requirements of the current ion implanter development.
Disclosure of Invention
Accordingly, the present invention is directed to a two-dimensional switch door device with high reliability for the interaction between the atmosphere end and the vacuum end of an ion implanter, so as to solve the above-mentioned problems.
The technical scheme of the invention is to provide a two-dimensional door opening and closing device for interaction between an atmosphere end and a vacuum end of an ion implanter, which at least comprises a film warehouse chamber, a film warehouse door assembly and at least one two-dimensional cylinder assembly, wherein the motion output direction of the two-dimensional cylinder assembly comprises a first direction and a second direction, and the first direction is not parallel to the second direction.
The wafer library chamber is positioned between the atmosphere end of the ion implanter and the vacuum end of the ion implanter, the wafer library chamber is switched to be in an atmosphere state and connected with the atmosphere end of the ion implanter, and the wafer library chamber is switched to be in a vacuum state and connected with the vacuum end of the ion implanter.
The two-dimensional cylinder assembly is arranged on the film warehouse cavity and at least comprises a first direction cylinder, an air dividing block and at least one second direction cylinder, the first direction cylinder at least comprises a first direction cylinder body, a first direction output mechanism and an air duct, the first direction cylinder body comprises a first direction cylinder barrel, the first direction cylinder body is at least provided with a first vent hole and a second vent hole, a first direction rod side cavity and a first direction rodless side cavity which are communicated with each other, the first vent hole is connected with the first direction rodless side cavity, the second vent hole is connected with the first direction rod side cavity, the first direction output mechanism at least comprises a first direction piston and a first direction output shaft, the first direction piston is at least provided with a first throttling hole, the first direction output shaft is connected with the first direction rodless side cavity, the first direction output shaft is arranged on the first direction piston and is parallel to the first direction, the first direction output shaft is at least provided with a third vent hole and a fourth vent hole, the first direction output shaft is connected with the first vent hole and the first vent hole, and the fifth vent hole is connected with the first vent hole; the air dividing block is arranged on the first direction output shaft, and is provided with at least a sixth vent hole, a seventh vent hole, a second throttle hole and a third throttle hole, wherein the diameter of the sixth vent hole is larger than that of the seventh vent hole, the sixth vent hole is connected with the fourth vent hole and the second throttle hole, and the seventh vent hole is connected with the fifth vent hole and the third throttle hole; the second direction cylinder at least comprises a second direction cylinder body, a second direction output mechanism and an elastic mechanism, wherein the second direction cylinder body is at least provided with a second direction rod side cavity and a second direction rodless side cavity, the second direction rod side cavity and the second direction rodless side cavity are provided with an eighth vent hole and a ninth vent hole, the eighth vent hole is connected with the second orifice hole and the second direction rod side cavity, the ninth vent hole is connected with the third orifice hole and the second direction rodless side cavity, the second direction output mechanism at least comprises a second direction piston and a second direction output shaft, the second direction output shaft is arranged on the second direction piston, the second direction output shaft is parallel to the second direction, and the elastic mechanism is positioned in the second direction rodless side cavity.
The sheet warehouse door assembly is arranged on the second direction output shaft, when the first direction output shaft and the second direction output shaft are completely retracted, the sheet warehouse door assembly is attached to the sheet warehouse chamber, and when the first direction output shaft and the second direction output shaft are completely retracted, the sheet warehouse door assembly is separated from the sheet warehouse chamber.
Compared with the prior art, the invention has the following advantages:
A. according to the invention, the first-direction air cylinder is directly arranged on the film warehouse cavity, the second-direction air cylinder is directly arranged on the first-direction output shaft, and the film warehouse door component is directly arranged on the second-direction output shaft, so that a plurality of intermediate actuating mechanisms are omitted, and the film warehouse door device is simple in structure and high in integration level.
B. The invention discloses a door opening and closing device for an ion implanter, which is characterized in that the door opening and closing device for the ion implanter is realized only by directly matching a first direction cylinder and a second direction cylinder, no other mechanical structure is provided, and a buffer and lubrication device is arranged in the cylinder, so that the impact and abrasion in the door opening and closing process are obviously weakened, and the service life and reliability of the device are improved.
C. The two-dimensional cylinder assembly comprises the two-dimensional cylinder assembly, wherein the air channel of the second-direction cylinder is arranged in the first-direction output shaft, and the two non-parallel directions of extension or retraction actions can be sequentially realized under the control of the same compressed air through the flow control of the first throttling hole, the second throttling hole and the third throttling hole, so that the power air channel wiring is simplified, and the efficiency and the success rate of automatically opening and closing the door of the sheet warehouse are obviously improved.
Drawings
Fig. 1 is a schematic diagram of a prior art switch door apparatus with alternating atmospheric and vacuum sides of an ion implanter.
Fig. 2 is a perspective view showing a door closing state of a two-dimensional door opening and closing device for interaction between an atmosphere end and a vacuum end of an ion implanter according to the present invention.
Fig. 3 is a plan side view of fig. 2.
Fig. 4 is a perspective view of a two-dimensional door opening and closing device for interaction between an atmosphere end and a vacuum end of an ion implanter in a door open state.
Fig. 5 is a plan side view of fig. 4.
Fig. 6 is a perspective view of a two-dimensional cylinder assembly encompassed by the present invention.
Fig. 7 is a rear plan view of fig. 6.
Fig. 8 is a cross-sectional view taken along section A-A of fig. 7.
Fig. 9 is a partial view of fig. 8.
Fig. 10 is a plan view of fig. 6.
Fig. 11 is a cross-sectional view taken along section B-B of fig. 10.
Fig. 12 is a partial view of fig. 11.
Fig. 13 is a cross-sectional view of fig. 10 taken along section C-C.
Fig. 14 is a cross-sectional view of fig. 10 taken along the line D-D.
Description of the figures:
Name number
Film magazine chamber 1
Movable door assembly 2
Movable door 21
Guide rail 22
Slider 23
Door opening and closing assembly 3
Connecting rod 31
Cross bar 32
Locking cylinder 33
Lifting cylinder 34
Fixed pulley 35
Wire rope 36
The magazine chamber 4
Through cavity 401
Doorway 402
Film magazine door assembly 5
Film stock door 501
Name number
Connecting plate 502
Two-dimensional cylinder assembly 6
First direction cylinder 61
First direction cylinder 611
First direction cylinder 6111
First end cap 6112
Second end cap 6113
First vent 6114
Second vent 6115
First buffer 6116
Second buffer 6117
First-direction rodless side cavity 6118
First steering column side cavity 6119
First direction output mechanism 612
First direction piston 6121
First orifice 6122
First buffer cover 6123
Second buffer cover 6124
First direction output shaft 6125
Third vent 6126
Fourth air vent 6127
Air duct 613
Fifth vent 6131
Air dividing block 62
Sixth vent 6201
Seventh vent 6202
Second orifice 6203
Third orifice 6204
Second direction cylinder 63
Second direction cylinder 631
Second direction cylinder 6311
Third end cap 6312
Second-direction rodless side cavity 6313
Second steering rod side cavity 6314
Eighth vent 6315
Ninth vent 6316
Second direction output mechanism 632
Second direction piston 6321
Second direction output shaft 6322
Elastic mechanism 633
First direction A
Second direction B
First direction cylinder stroke E
Second direction cylinder stroke F
Film warehouse door closed state CLO
Open state OPN of film warehouse door
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, based on the embodiments in part of the invention, which are within the scope of the invention as defined by the claims, will be within the skill of one of ordinary skill in the art without undue burden. For convenience of description, the words "upper", "lower", "left" and "right" are used hereinafter to denote only the directions corresponding to the upper, lower, left, and right directions of the drawings, and do not limit the structure.
It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may be present. When an element is referred to as being "disposed on" another element, it can be directly disposed on the other element or intervening elements may be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
Here, two-dimensional cylinder assemblies and two-dimensional cylinder assemblies each include a first direction cylinder and two second direction cylinders, and the first direction and the second direction are perpendicular to each other.
Referring to fig. 2 to 5, the present invention provides a two-dimensional door opening and closing device for interaction between an atmosphere end and a vacuum end of an ion implanter, which comprises a wafer library chamber 4, a wafer library door assembly 5 and a two-dimensional cylinder assembly 6: the film stock chamber 4 is provided with a through cavity 401 and a gate 402, the gate 402 is communicated with the through cavity 401, and the film stock chamber 4 is connected with a high-vacuum target chamber (not shown in the figure) of the machine; two-dimensional cylinder assemblies 6 are respectively arranged at two sides of the film stock chamber 4; the film stock door assembly 5 comprises a film stock door 501 and a connecting plate 502, wherein the film stock door 501 is arranged on the connecting plate 502, and the connecting plate 502 is connected with the two-dimensional cylinder assembly 6.
Referring to fig. 6 and 7, the two-dimensional cylinder assembly 6 includes a first direction cylinder 61, a gas dividing block 62, and two second direction cylinders 63.
Referring to fig. 8 and 9, the first direction cylinder 61 includes a first direction cylinder body 611, a first direction output mechanism 612, and an air duct 613: the first direction cylinder body 611 comprises a first direction cylinder barrel 6111, a first end cover 6112 and a second end cover 6113 which are respectively covered at two ends of the first direction cylinder barrel 6111, the first end cover 6112 is provided with a first vent hole 6114 and a first buffer zone 6116, the second end cover 6113 is provided with a second vent hole 6115 and a second buffer zone 6117, a first direction rodless side cavity 6118 and a first direction rod side cavity 6119 which are communicated are arranged in the first direction cylinder barrel 6111, the first vent hole 6114 is connected with the first buffer zone 6116 and the first direction rodless side cavity 6118, and the second vent hole 6115 is connected with the second buffer zone 6117 and the first direction rod side cavity 6119; the first direction output mechanism 612 comprises a first direction piston 6121 and a first direction output shaft 6125, the first direction output shaft 6125 is connected to the piston 6121 through threads, a first throttling hole 6122, a first buffer sleeve 6123 and a second buffer sleeve 6124 are formed in the first direction piston 6121, the first throttling hole 6122 is connected with a first direction rodless side cavity 6118, the first buffer sleeve 6123 is positioned in the first direction rodless side cavity 6118, the second buffer sleeve 6124 is positioned in the first direction rod side cavity 6119, a third air hole 6126 and a fourth air hole 6127 are formed in the first direction output shaft 6125, and the third air hole 6126 is connected with the first direction rod side cavity 6119 and the fourth air hole 6127; the air duct 613 is provided with a fifth air vent 6131, and the fifth air vent 6131 is connected to the first orifice 6122.
Referring to fig. 10, 11 and 12, the air dividing block 62 is disposed on the first direction output shaft 6125, the air dividing block 62 is provided with a sixth air vent 6201, a seventh air vent 6202, a second orifice 6203 and a third orifice 6204, the sixth air vent 6201 is larger in diameter than the seventh air vent 6202, the sixth air vent 6201 connects the fourth air vent 6127 and the second orifice 6203, and the seventh air vent 6202 connects the fifth air vent 6131 and the third orifice 6204.
Referring to fig. 8, 10, 13 and 14, the second direction cylinder 63 is disposed on the air dividing block 62, and includes a second direction cylinder 631, two sets of second direction output mechanisms 632 and elastic mechanisms 633, the second direction cylinder 631 includes a second direction cylinder 6311 and two third end caps 6312 covering the bottom of the second direction cylinder 6311, two sets of second direction rodless side chambers 6313 and second direction rod side chambers 6314 that are communicated are penetratingly formed in the second direction cylinder 6311, an eighth vent hole 6315 and a ninth vent hole 6316 are formed in the second direction cylinder 6311, the eighth vent hole 6315 is connected to the second orifice 6203 and the second direction rod side chambers 6314, the ninth vent hole 6316 is connected to the third orifice 6204 and the second direction rodless side chambers 6313, the second direction output mechanism includes a second direction piston 6321, a second direction output shaft 6322 and elastic mechanisms 633, and the elastic mechanisms 633 are located in the second direction rodless side chambers 6313.
Referring to fig. 8, for convenience of the following description, a first direction, i.e., a movement output direction of the first direction cylinder 61 is defined as a, and a second direction, i.e., a movement output direction of the second direction cylinder 63 is defined as B, and a is perpendicular to B; the stroke of the first direction cylinder 61, that is, the maximum distance to the first direction output shaft 6125 that can extend out of the first direction cylinder 611 is defined as E, and the stroke of the second direction cylinder 63, that is, the maximum distance to the second direction output shaft 6322 that can extend out of the second direction cylinder 631 is defined as F.
Referring to fig. 2 and 3, the second vent hole 6115 is connected to the air source line, the first vent hole 6114 is connected to the waste discharge line, and the elastic mechanism 633 is compressed, so that the first direction output shaft 6125 and the second direction output shaft 6322 are kept in the retracted state, and the magazine door 501 is kept in the closed state, which is defined as CLO for convenience of the following description.
Referring to fig. 4 and 5, the first vent hole 6114 is connected to the air source line, the second vent hole 6115 is connected to the waste discharge line, and the elastic mechanism 633 is released, so that the first direction output shaft 6125 and the second direction output shaft 6322 are kept in the extended state, and the magazine door 501 is kept in the open state, which is defined as OPN for convenience of the following description.
And (3) a sheet warehouse door opening process: namely, the state of the film warehouse door 501 is switched from CLO to OPN, the film warehouse chamber 4 is switched to the atmospheric state, the first vent hole 6114 is kept connected with the air source pipeline through the air path switching, the second vent hole 6115 is kept connected with the waste discharge pipeline, at the moment, the second direction rod side cavity 6314 sequentially passes through the eighth vent hole 6315, the second orifice 6203, the fourth vent hole 6127, the third vent hole 6126, the first direction rod side cavity 6119 and the second vent hole 6115 to be connected with the waste discharge pipeline, firstly, the elastic mechanism 633 rapidly pushes the second direction piston 6321 to move forwards, the second direction output shaft 6322 stretches out to the stroke F, the film warehouse door 501 and the film warehouse chamber 4 are separated by the distance F, then the air introduced by the first vent hole 6114 enters the first buffer zone 6116 to push the first direction piston 6121 to stretch out slowly, after the first buffer sleeve 6123 completely leaves the first buffer zone 6116, the first direction piston 6121 begins to stretch out in an accelerating way until the second buffer sleeve 6124 enters the second buffer zone 6117, the first direction piston 6121 slowly stretches out, and the first direction piston 6121 begins to stretch out from the first direction piston 6125 until the first direction output shaft is in contact with the first direction piston 6125 and keeps the first direction output shaft to stretch out from the first direction piston 6125; simultaneously, the gas introduced from the first vent hole 6114 sequentially passes through the first orifice 6122, the fifth vent hole 6131, the seventh vent hole, the third orifice 6204 and the ninth vent hole 6316 to enter the second-direction rodless side cavity 6313, so as to keep the second-direction output shaft 6322 in an extended state; finally, the state of the wafer library door 501 is kept at OPN, that is, the interaction between the ion implanter and the atmosphere is realized.
A film warehouse door closing process; that is, the state of the film stock door 501 is switched from OPN to CLO, the second vent hole 6115 is kept connected with the air source pipeline through air passage switching, the first vent hole 6114 is kept connected with the waste pipeline, and the second direction rodless side cavity 6313 is connected with the waste pipeline through the ninth vent hole 6316, the third orifice 6204, the seventh vent hole, the fifth vent hole 6131, the first orifice 6122, the first direction rodless side cavity 6118 and the first vent hole 6114 in sequence. The gas introduced by the second ventilation hole 6115 enters the second buffer zone 6117 to push the first direction piston 6121 to retract slowly, after the second buffer sleeve 6124 completely leaves the second buffer zone 6117, the first direction piston 6121 starts to retract in an accelerating way until the first buffer sleeve 6123 enters the first buffer zone 6116, the first direction piston 6121 starts to retract slowly again until the first direction piston 6121 contacts the first end cover 6112, so that the first direction output shaft 6125 is completely retracted, namely the film warehouse door 501 rises by a distance E and is kept in the state; meanwhile, the gas introduced by the second vent hole 6115 sequentially passes through the first direction rod side cavity 6119, the third vent hole 6126, the fourth vent hole 6127, the second orifice 6203 and the eighth vent hole 6315 to enter the second direction rod side cavity 6314, but only a small amount of gas enters the second direction rod side cavity 6314 due to the throttling effect of the second orifice 6203 and the continuous increase of the volume of the first direction rod side cavity 6119, the second direction output shaft 6322 cannot retract against the elastic force of the elastic mechanism 633, the volume of the first direction rod side cavity 6119 is not increased after the first direction output shaft 6125 is completely retracted, the gas introduced by the second vent hole 6115 begins to intensively enter the second direction rod side cavity 6314, the second direction output shaft 6322 is retracted to the film stock door 501 to be closely attached to the film stock cavity 4, the film stock door 501 is finally kept in the CLO state, and finally the film stock cavity 4 is switched to the vacuum state, so that interaction between the ion implanter and the vacuum end is realized.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (7)
1. A two-dimensional switch door gear that is used for ion implantation machine atmosphere end and vacuum end to alternate its characterized in that: at least comprises a film warehouse chamber, a film warehouse door component and at least one two-dimensional cylinder component;
The wafer library chamber is positioned between the atmospheric end of the ion implanter and the vacuum end of the ion implanter, the wafer library chamber is switched to be in an atmospheric state and connected with the atmospheric end of the ion implanter, and the wafer library chamber is switched to be in a vacuum state and connected with the vacuum end of the ion implanter;
The two-dimensional cylinder assembly is arranged on the sheet warehouse cavity and at least comprises a first direction cylinder, a gas dividing block and at least one second direction cylinder, wherein the motion output direction of the two-dimensional cylinder assembly comprises a first direction and a second direction, and the first direction is not parallel to the second direction;
The first direction cylinder at least comprises a first direction cylinder body, a first direction output mechanism and at least one air duct, wherein the first direction cylinder body is provided with at least a first vent hole, a second vent hole, a first direction rod side cavity and a first direction rodless side cavity which are communicated, the first vent hole is connected with the first direction rodless side cavity, and the second vent hole is connected with the first direction rod side cavity.
2. A two-dimensional switch door assembly for interaction between an atmospheric end and a vacuum end of an ion implanter as defined in claim 1, wherein: the first direction output mechanism at least comprises a first direction piston and a first direction output shaft, the first direction piston is at least provided with a first throttling hole, the first throttling hole is connected with the first direction rodless side cavity, the first direction output shaft is arranged on the first direction piston, the first direction output shaft is at least provided with a third air hole and a fourth air hole, the third air hole is connected with the first direction rod side cavity and the fourth air hole, and the first direction output shaft is parallel to the first direction.
3. A two-dimensional switch door assembly for interaction between an atmospheric end and a vacuum end of an ion implanter as defined in claim 2, wherein: the air duct is provided with at least a fifth vent hole, and the fifth vent hole is connected with the first throttling hole.
4. A two-dimensional switch door assembly for interaction between an atmospheric end and a vacuum end of an ion implanter as defined in claim 3, wherein: the air dividing block is arranged on the first direction output shaft, at least a sixth vent hole, a seventh vent hole, a second throttle hole and a third throttle hole are formed in the air dividing block, the diameter of the sixth vent hole is larger than that of the seventh vent hole, the sixth vent hole is connected with the fourth vent hole and the second throttle hole, and the seventh vent hole is connected with the fifth vent hole and the third throttle hole.
5. A two-dimensional switch door assembly for interaction between an atmospheric end and a vacuum end of an ion implanter as defined in claim 4, wherein: the second direction cylinder is arranged on the air dividing block and at least comprises a second direction cylinder body, a second direction output mechanism and an elastic mechanism, wherein the second direction cylinder body is at least provided with an eighth vent hole, a ninth vent hole, a second direction rod side cavity and a second direction rodless side cavity, the second direction rod side cavity and the second direction rodless side cavity are communicated with each other, the eighth vent hole is connected with the second orifice hole and the second direction rod side cavity, and the ninth vent hole is connected with the third orifice hole and the second direction rodless side cavity.
6. A two-dimensional switch door assembly for interaction between an atmospheric end and a vacuum end of an ion implanter as defined in claim 5, wherein: the second direction output mechanism at least comprises a second direction piston and a second direction output shaft, the second direction output shaft is arranged on the second direction piston, the second direction output shaft is parallel to the second direction, and the elastic mechanism is arranged in the second direction rodless side cavity.
7. A two-dimensional switch door assembly for interaction between an atmospheric end and a vacuum end of an ion implanter as defined in claim 6, wherein: the sheet warehouse door assembly is arranged on the second direction output shaft, when the first direction output shaft and the second direction output shaft are completely retracted, the sheet warehouse door assembly is attached to the sheet warehouse chamber, and when the first direction output shaft and the second direction output shaft are completely retracted, the sheet warehouse door assembly is separated from the sheet warehouse chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011106153.6A CN112289667B (en) | 2020-10-14 | 2020-10-14 | Two-dimensional switch door device for interaction of atmosphere end and vacuum end of ion implanter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011106153.6A CN112289667B (en) | 2020-10-14 | 2020-10-14 | Two-dimensional switch door device for interaction of atmosphere end and vacuum end of ion implanter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112289667A CN112289667A (en) | 2021-01-29 |
| CN112289667B true CN112289667B (en) | 2024-06-04 |
Family
ID=74497190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011106153.6A Active CN112289667B (en) | 2020-10-14 | 2020-10-14 | Two-dimensional switch door device for interaction of atmosphere end and vacuum end of ion implanter |
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| CN111042691A (en) * | 2018-10-12 | 2020-04-21 | 中国电子科技集团公司第四十八研究所 | Sealing door structure of vacuum cavity |
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| JPH0687778U (en) * | 1993-05-31 | 1994-12-22 | 日新電機株式会社 | Vacuum device |
| JP2000279792A (en) * | 1999-03-29 | 2000-10-10 | Toshiba Corp | Vacuum load locking mechanism |
| CN1795533A (en) * | 2003-05-22 | 2006-06-28 | 艾克塞利斯技术公司 | Wafer treatment system having load lock and buffer |
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| CN112289667A (en) | 2021-01-29 |
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