CN112228322A - Microminiature piezoelectric pump - Google Patents
Microminiature piezoelectric pump Download PDFInfo
- Publication number
- CN112228322A CN112228322A CN202010982239.9A CN202010982239A CN112228322A CN 112228322 A CN112228322 A CN 112228322A CN 202010982239 A CN202010982239 A CN 202010982239A CN 112228322 A CN112228322 A CN 112228322A
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- sheet
- piezoelectric
- pump
- amplification
- piezoelectric stack
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 37
- 230000007246 mechanism Effects 0.000 claims abstract description 31
- 230000003321 amplification Effects 0.000 claims description 62
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 62
- 230000005540 biological transmission Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 239000007788 liquid Substances 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000008602 contraction Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
The invention provides a microminiature piezoelectric pump, which comprises a piezoelectric stack, an amplifying mechanism, a sheet and a pump cavity, wherein the piezoelectric stack is arranged on the piezoelectric stack; the piezoelectric stack and the amplifying mechanism are arranged in a piezoelectric stack shell, the pump cavity is arranged in the pump cavity shell, the sheet is arranged at the bottom of the pump cavity, and the piezoelectric stack is connected with the sheet through the amplifying mechanism; the piezoelectric stack shell is fixedly connected with one end of the pump cavity shell, the other end of the pump cavity shell is connected with a valve cover, a water inlet valve and a water outlet valve are arranged on the valve cover, and the water inlet valve and the water outlet valve are both one-way valves; when the piezoelectric pump works, the vibration amplitude of the piezoelectric stack is amplified and transmitted to the sheet through the amplifying mechanism, and the pump cavity absorbs water from the water inlet valve through the vibration of the sheet and is discharged outwards from the water outlet valve. According to the invention, the amplitude of the thin sheet is increased by arranging the amplifying mechanism, so that the working efficiency of the piezoelectric pump is improved.
Description
Technical Field
The invention belongs to the field of fluid machinery, and particularly relates to a microminiature piezoelectric pump.
Background
The piezoelectric pump is a device which utilizes piezoelectric ceramic materials to manufacture a piezoelectric stack or a piezoelectric sheet, and utilizes the deformation generated by electrifying the piezoelectric stack or the piezoelectric sheet to change the volume of a pump cavity so as to drive and convey liquid. Compared with the traditional pump, the piezoelectric pump has the characteristics of small volume, small vibration, low noise and the like, so the piezoelectric pump is widely applied to the fields of high-precision micro-fluid conveying, aerospace, walking robots and the like.
However, the conventional piezoelectric pump mainly depends on the piezoelectric sheet to directly act on the film elastic sheet of the pump cavity, and is limited by the deformation of the piezoelectric sheet, so that the amplitude of the film elastic sheet is small, and the efficiency of the piezoelectric pump is low, so that a novel piezoelectric pump needs to be developed, and the working efficiency is increased.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a microminiature piezoelectric pump.
The present invention achieves the above-described object by the following technical means.
A microminiature piezoelectric pump comprises a piezoelectric stack, an amplifying mechanism, a sheet and a pump cavity; the piezoelectric stack and the amplifying mechanism are arranged in a piezoelectric stack shell, the pump cavity is arranged in a pump cavity shell, the sheet is arranged at the bottom of the pump cavity, and the piezoelectric stack is connected with the sheet through the peripheral amplifying mechanism; the piezoelectric stack shell is fixedly connected with one end of the pump cavity shell, the other end of the pump cavity shell is connected with a valve cover, and a water inlet valve and a water outlet valve are arranged on the valve cover;
the amplifying mechanism comprises a first longitudinal amplifying piece, a second longitudinal amplifying piece and a transverse amplifying piece; the transverse amplification piece is fixed on the side face of the piezoelectric stack, a plurality of rows of first lugs and second lugs are arranged on the outer side of the transverse amplification piece, the first lugs and the second lugs are triangular bulges, and the bulges of the first lugs and the bulges of the second lugs are opposite in direction; the first longitudinal amplification piece and the second longitudinal amplification piece are respectively arranged at the upper end and the lower end of the piezoelectric stack, a plurality of vertical plates extend from the side edges of the piezoelectric stack, each vertical plate is provided with a triangular bump, the triangular bumps on the vertical plates of the first longitudinal amplification piece are in sliding fit with the first bumps of the transverse amplification piece, and the triangular bumps on the vertical plates of the second longitudinal amplification piece are in sliding fit with the second bumps of the transverse amplification piece; the first longitudinal amplification piece is connected with the thin sheet through a transmission rod, and the second longitudinal amplification piece is fixedly connected with the piezoelectric stack shell through a support rod.
Further, the amplification mechanism amplifies and longitudinally transmits the transverse vibration amplitude of the piezoelectric stack to the sheet, wherein the amplification factor is 2cot beta, and beta is the inclination angle of the triangular bump.
Further, the side edge of the sheet is fixedly connected and sealed with the side edge of the pump cavity.
Furthermore, the rows of the first bumps and the rows of the second bumps are arranged at intervals.
Furthermore, the transverse amplification piece is provided with two pieces which are respectively fixed on two opposite side surfaces of the piezoelectric stack.
Furthermore, the outermost side of the amplification mechanism is wrapped by a fixing plate.
Furthermore, the water inlet valve and the water outlet valve are both one-way valves, the one-way valves are of a multi-stage series structure, and all stages of the one-way valves are of a conical structure.
Further, the check valve is made of elastic film materials.
The invention has the beneficial effects that:
(1) according to the invention, the amplification mechanism is added, so that the vibration amplitude of the sheet output by the piezoelectric stack is increased, and the variation of the volume of the pump cavity of the piezoelectric pump during single reduction or expansion is improved, namely the single water pumping amount of the piezoelectric pump is improved, and the efficiency of the piezoelectric pump is improved; the amplifying mechanism adopts a structure of triangular convex blocks which are matched with each other and slide, the structure is simple and reliable, and the amplification factor can be changed only by setting the inclination angle beta of the triangular convex blocks.
(2) According to the amplifying mechanism, the two longitudinal amplifying pieces in opposite directions are arranged, compared with a single longitudinal amplifying piece, the amplification factor is increased by 1 time, namely the total amplification factor is 2cot beta, and the operation efficiency of the piezoelectric pump is improved.
(3) The first lugs and the second lugs on the transverse amplification pieces are arranged in multiple rows and are arranged at intervals, so that the stress stability of the two longitudinal amplification pieces and the transverse amplification pieces in matching is ensured, and the working stability of the piezoelectric pump is improved.
(4) According to the piezoelectric pump, the two transverse amplification pieces are oppositely arranged, and compared with the mode that one transverse amplification piece is fixed on one side, the stress balance between the transverse directions is achieved, the stability of the amplification mechanism during transmission is improved, and the stability of the piezoelectric pump is further improved.
(5) The outer side of the amplifying mechanism is wrapped with the fixing plate, so that the stability is ensured, the protection performance is improved, and particularly, the safety of a micro structure of the triangular lug is protected, so that the amplifying mechanism is prevented from being interfered and abraded by dust particles or other impurities possibly existing outside.
(6) The check valve is of a multi-stage series structure, has better reverse stopping performance compared with a single-stage check valve, adopts an elastic film material, and has high response speed under the action of pressure difference; the invention adopts the one-way valve with a multistage series structure, and can effectively prevent liquid from reversely flowing in or out from the one-way valve due to the increase of the pressure difference.
Drawings
FIG. 1 is a block diagram of a piezoelectric pump according to the present invention;
FIG. 2 is a block diagram of an enlarged mechanism of the present invention;
FIG. 3(a) is a view showing a fitting relationship between the laterally enlarged piece and the first longitudinally enlarged piece according to the present invention;
FIG. 3(b) is a view showing a state where the first longitudinally enlarged piece moves in cooperation with the longitudinal movement when the laterally enlarged piece of the present invention moves laterally;
FIG. 4 is a block diagram of the check valve of the present invention;
reference numerals: 1. the piezoelectric pump comprises a piezoelectric stack shell, 11 piezoelectric stacks, 12 amplifying mechanisms, 121 first longitudinal amplifying sheets, 122 second longitudinal amplifying sheets, 123 transverse amplifying sheets, 124 fixing plates, 13 supporting rods, 14 transmission rods, 2 pump cavity shells, 21 pump cavities, 22 sheets, 3 valve covers, 31 water inlet valves and 32 water outlet valves.
Detailed Description
Reference will now be made in detail to the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
The piezoelectric pump shown in fig. 1 comprises a valve cover 3, a pump cavity shell 2 and a piezoelectric stack shell 1; as shown in the figure, the piezoelectric stack shell 1 is fixedly connected with the lower end of the pump cavity shell 2, and the valve cover 3 is fixedly connected with the upper end of the pump cavity shell 2.
As shown in fig. 1 and fig. 2, a piezo stack 11 and an amplifying mechanism 12 are arranged in the piezo stack housing 1, and the amplifying mechanism 12 is covered outside the piezo stack 11; as shown in fig. 1, the lower end of the amplifying mechanism 12 is fixedly connected to the inner bottom surface of the piezoelectric stack casing 1 through a support rod 13, and the top end of the amplifying mechanism 12 is connected to a transmission rod 14.
A pump cavity 21 is arranged in the pump cavity shell 2, a sheet 22 is arranged at the bottom of the pump cavity 21, the sheet 22 is made of an elastic material, the side edge of the sheet 22 is fixedly connected with the side edge of the pump cavity 21, and the side edge are sealed; the bottom of the flap 22 is connected to the transfer bar 14 as oriented in fig. 1.
The valve cover 3 is provided with a water inlet valve 31 and a water outlet valve 32, the water inlet valve 31 and the water outlet valve 32 are both arranged on one side facing the pump cavity, the water inlet valve 31 and the water outlet valve 32 are both one-way valves, the installation directions of the water inlet valve 31 and the water outlet valve 32 are opposite, the water flowing direction of the water inlet valve 31 is from the outside of the pump to the inside of the pump cavity, and the water flowing direction of the water outlet valve 32 is from the inside of the pump cavity to the outside of the.
The magnifying mechanism 12 shown in fig. 2 includes a first longitudinally magnifying piece 121, a second longitudinally magnifying piece 122, a transversely magnifying piece 123, and a fixing plate 124; the transverse amplification sheet 123 is provided with two pieces which are respectively fixed on two opposite side surfaces of the piezoelectric stack 11, one outward side of the transverse amplification sheet 123 is provided with a plurality of rows of triangular lugs, the triangular lugs are divided into a first lug and a second lug according to the projection direction, as shown in the figure, the first lug is a lower projection, the second lug is an upper projection, the projection directions of the triangular lugs in the same row are the same, and the rows formed by the first lugs and the rows formed by the second lugs are arranged at intervals; the middle of the first longitudinal amplification piece 121 is a first flat plate, as shown in the figure, the first flat plate is arranged at the upper end of the piezoelectric stack 11, the upper end of the first flat plate is connected with the transmission rod 14, a plurality of vertical plates extend downwards from two sides of the first flat plate as shown in the figure, triangular convex blocks A are arranged on the inner sides of the vertical plates, and the triangular convex blocks A are matched with the first convex blocks of the transverse amplification piece 123; the middle of the second longitudinal amplification piece 122 is a second flat plate, as shown in the figure, the flat plate is arranged at the lower end of the piezoelectric stack 11, the lower end of the second flat plate is connected with the support rod 13, a plurality of vertical plates extend upwards from two sides of the second flat plate as shown in the figure, triangular convex blocks B are arranged on the inner sides of the vertical plates, and the triangular convex blocks B are matched with the second convex blocks of the transverse amplification piece 123; the retaining plate 124 wraps around the outermost side of the amplification mechanism 12.
As shown in fig. 3, in the matching relationship between the first longitudinal amplification piece 121 and the transverse amplification piece 123, the first protrusion on the transverse amplification piece 123 is matched with the triangular protrusion a on the first longitudinal amplification piece 121, two triangular inclined surfaces which are matched with each other are in sliding contact, and the inclination angles of the two inclined surfaces are both β;
the laterally enlarged piece 123 shown in fig. 3(a) is laterally spaced from the riser of the first longitudinally enlarged piece 121 by a distance L1, at which time the first longitudinally enlarged piece 121 has a height H1 relative to the laterally enlarged piece 123;
when the transverse amplification piece 123 transversely presses the first longitudinal amplification piece 121, the first longitudinal amplification piece 121 longitudinally displaces;
the laterally enlarged piece 123 shown in fig. 3(b) is laterally spaced from the riser of the first longitudinally enlarged piece 121 by a distance L2, at which time the first longitudinally enlarged piece 121 has a height H2 relative to the laterally enlarged piece 123;
in summary, the variation x of the lateral pitch is L1-L2, the variation H of the height is H2-H1, and H is x cot β.
The fitting relationship between the second longitudinally enlarged piece 122 and the laterally enlarged piece 123 is the same as the fitting relationship between the first longitudinally enlarged piece 121 and the laterally enlarged piece 123, but since the second projection and the first projection are protruded in opposite directions, when the laterally enlarged piece 123 is laterally moved by a distance x, the second longitudinally enlarged piece 122 is moved by a distance h in an opposite direction with respect to the first longitudinally enlarged piece 121. When the lateral enlarging piece 123 moves laterally by x distance, the variation of the longitudinal distance between the first longitudinal enlarging piece 121 and the second longitudinal enlarging piece 122 is 2 h.
The check valve shown in fig. 4 is of a multistage series structure, each stage is of a conical structure and is made of an elastic film material, wherein a conical large opening is a water inlet, a conical small opening is a water outlet, and the small opening is in a closed state when the check valve is not subjected to external pressure; when water flows from the large opening to the small opening, the internal pressure of the small opening is greater than the external pressure, the outer wall is elastically deformed, the small opening is opened, and the water flows through the small opening; otherwise, the small opening is closed, and water flow cannot pass through the small opening.
The working principle of the invention is as follows:
after the alternating current is introduced into the piezoelectric stack 11, the piezoelectric stack 11 undergoes periodic transverse expansion and contraction, so as to drive the transverse amplification piece 123 fixed on the side surface of the piezoelectric stack 11 to perform transverse reciprocating motion, and along with the transverse reciprocating motion of the transverse amplification piece 123, the first longitudinal amplification piece 121 and the second longitudinal amplification piece 122 perform longitudinal relative reciprocating motion, and drive the sheet 22 to vibrate through the support rod 13 and the transmission rod 14;
as the sheet 22 vibrates back and forth, the volume of the pump chamber 21 is periodically reduced and enlarged; when the volume is reduced, the liquid in the pump chamber 21 is discharged to the outside through the outlet valve 32, and when the volume is expanded, the pump chamber 21 sucks in the liquid from the outside through the inlet valve 31.
If the amplitude of the transverse expansion or contraction of the piezoelectric stack 11 is x, the distance of the transverse amplification piece 123 moving transversely is also x, and further, according to the matching relationship between the transverse amplification piece 123 and the first and second longitudinal amplification pieces 121 and 122, the longitudinal displacement between the first and second longitudinal amplification pieces 121 and 122 is 2h, where h is x cot β; since the second longitudinal amplification piece 122 is connected to the support rod 13, the first longitudinal amplification piece 121 is connected to the transmission rod 14, and the support rod 13 and the transmission rod 14 are connected to the piezo-stack case 1 and the wafer 22, respectively, the amplitude of the wafer 22 is 2 h.
According to the invention, through the structural design, the sheet 22 is driven to vibrate by the vibration of the piezoelectric stack 11, and when the amplitude of the piezoelectric stack 11 is x, the amplitude of the sheet 22 is 2 h; therefore, the amplitude of the sheet 22 is amplified by 2cot beta times relative to the amplitude of the piezoelectric stack 11, and the single water absorption or water discharge amount of the piezoelectric pump is increased, thereby improving the efficiency of the piezoelectric pump.
The present invention is not limited to the above-described embodiments, and any obvious improvement, replacement or modification by those skilled in the art can be made without departing from the spirit of the present invention.
Claims (8)
1. A microminiature piezoelectric pump characterized by: comprises a piezoelectric stack (11), an amplifying mechanism (12), a sheet (22) and a pump chamber (21); the piezoelectric stack (11) and the amplifying mechanism (12) are arranged in a piezoelectric stack shell (1), the pump cavity (21) is arranged in a pump cavity shell (2), the sheet (22) is arranged at the bottom of the pump cavity (21), and the piezoelectric stack (11) is connected with the sheet (22) through the peripheral amplifying mechanism (12); the piezoelectric stack shell (1) is fixedly connected with one end of the pump cavity shell (2), the other end of the pump cavity shell (2) is connected with a valve cover (3), and a water inlet valve (31) and a water outlet valve (32) are arranged on the valve cover (3);
the amplifying mechanism (12) comprises a first longitudinal amplifying sheet (121), a second longitudinal amplifying sheet (122) and a transverse amplifying sheet (123); the transverse amplification sheet (123) is fixed on the side face of the piezoelectric stack (11), multiple rows of first bumps and second bumps are arranged on the outer side of the transverse amplification sheet (123), the first bumps and the second bumps are triangular protrusions, and the first bumps and the second bumps are opposite in protruding direction; the first longitudinal amplification piece (121) and the second longitudinal amplification piece (122) are respectively arranged at the upper end and the lower end of the piezoelectric stack (11), a plurality of vertical plates extend from the side edges of the piezoelectric stack (11), each vertical plate is provided with a triangular bump, the triangular bump on the vertical plate of the first longitudinal amplification piece (121) is in sliding fit with the first bump of the transverse amplification piece (123), and the triangular bump on the vertical plate of the second longitudinal amplification piece (122) is in sliding fit with the second bump of the transverse amplification piece (123); the first longitudinal amplification piece (121) is connected with the thin sheet (22) through a transmission rod (14), and the second longitudinal amplification piece (122) is fixedly connected with the piezoelectric stack shell (1) through a support rod (13).
2. A microminiature piezoelectric pump as claimed in claim 1, wherein: the amplification mechanism (12) amplifies the transverse vibration amplitude of the piezoelectric stack (11) and transmits the transverse vibration amplitude to the sheet (22) longitudinally, wherein the amplification factor is 2cot beta, and beta is the inclination angle of the triangular bump.
3. A microminiature piezoelectric pump as claimed in claim 2, wherein: the side edge of the sheet (22) is fixedly connected and sealed with the side edge of the pump cavity (21).
4. A microminiature piezoelectric pump as claimed in claim 1, wherein: the rows of the first bumps and the rows of the second bumps are arranged at intervals.
5. A microminiature piezoelectric pump as claimed in claim 1, wherein: the transverse amplification piece (123) is provided with two pieces which are respectively fixed on two opposite side surfaces of the piezoelectric stack (11).
6. A microminiature piezoelectric pump as claimed in claim 1, wherein: the outermost side of the amplification mechanism (12) is also wrapped with a fixing plate (124).
7. A microminiature piezoelectric pump as claimed in claim 1, wherein: the water inlet valve (31) and the water outlet valve (32) are both one-way valves, the one-way valves are of multi-stage series structures, and all stages are of conical structures.
8. A microminiature piezoelectric pump as claimed in claim 7, wherein: the one-way valve is made of elastic film materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010982239.9A CN112228322B (en) | 2020-09-17 | 2020-09-17 | Microminiature piezoelectric pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010982239.9A CN112228322B (en) | 2020-09-17 | 2020-09-17 | Microminiature piezoelectric pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112228322A true CN112228322A (en) | 2021-01-15 |
| CN112228322B CN112228322B (en) | 2022-03-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010982239.9A Active CN112228322B (en) | 2020-09-17 | 2020-09-17 | Microminiature piezoelectric pump |
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| CN (1) | CN112228322B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02203577A (en) * | 1989-02-02 | 1990-08-13 | Nippondenso Co Ltd | Actuator |
| CN103023374A (en) * | 2012-12-28 | 2013-04-03 | 东南大学 | Inertia type piezoelectric linear motor |
| CN106121976A (en) * | 2016-08-24 | 2016-11-16 | 青岛农业大学 | Lever triangle amplifies piezoelectric stack pump |
| CN206071840U (en) * | 2016-10-12 | 2017-04-05 | 吉林大学 | A kind of hydraulic pressure amplifying type ultra-magnetic telescopic transfer tube |
| CN107756357A (en) * | 2017-09-19 | 2018-03-06 | 苏州迈客荣自动化技术有限公司 | A kind of micromotion platform based on enlarger |
| CN110752772A (en) * | 2019-10-22 | 2020-02-04 | 南京航空航天大学 | Multi-degree-of-freedom piezoelectric actuator based on piezoelectric stack and working method |
-
2020
- 2020-09-17 CN CN202010982239.9A patent/CN112228322B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02203577A (en) * | 1989-02-02 | 1990-08-13 | Nippondenso Co Ltd | Actuator |
| CN103023374A (en) * | 2012-12-28 | 2013-04-03 | 东南大学 | Inertia type piezoelectric linear motor |
| CN106121976A (en) * | 2016-08-24 | 2016-11-16 | 青岛农业大学 | Lever triangle amplifies piezoelectric stack pump |
| CN206071840U (en) * | 2016-10-12 | 2017-04-05 | 吉林大学 | A kind of hydraulic pressure amplifying type ultra-magnetic telescopic transfer tube |
| CN107756357A (en) * | 2017-09-19 | 2018-03-06 | 苏州迈客荣自动化技术有限公司 | A kind of micromotion platform based on enlarger |
| CN110752772A (en) * | 2019-10-22 | 2020-02-04 | 南京航空航天大学 | Multi-degree-of-freedom piezoelectric actuator based on piezoelectric stack and working method |
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| Publication number | Publication date |
|---|---|
| CN112228322B (en) | 2022-03-22 |
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