CN112197854A - High-performance piezoelectric vibration sensor - Google Patents
High-performance piezoelectric vibration sensor Download PDFInfo
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- CN112197854A CN112197854A CN202011065924.1A CN202011065924A CN112197854A CN 112197854 A CN112197854 A CN 112197854A CN 202011065924 A CN202011065924 A CN 202011065924A CN 112197854 A CN112197854 A CN 112197854A
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- 230000003321 amplification Effects 0.000 claims description 6
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- 238000003199 nucleic acid amplification method Methods 0.000 claims description 6
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
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- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention relates to a high-performance piezoelectric vibration sensor, and belongs to the technical field of sensors. The vibration sensor can provide two output signals of an original acceleration signal and a vibration speed signal without mutual interference, and a user can select the signals according to the requirement to support the graded fault diagnosis of the collector. The vibration sensor provided by the invention can effectively improve the withstand voltage value and the insulation resistance of the sensor, reduce the interference of the environment such as external humidity, temperature and the like, improve the measurement precision and improve the overall performance of the sensor.
Description
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to a high-performance piezoelectric vibration sensor.
Background
The piezoelectric vibration sensor is a sensor for measuring vibration signals through a positive piezoelectric effect, charges are accumulated on the surfaces of two electrodes when the sensor is subjected to external force, so that charge leakage inevitably exists, and certain measures must be taken during measurement to reduce the leakage of the charges from a piezoelectric element through a measuring circuit to be small enough. The insulation resistance of the sensor is improved, and the effective measure for reducing the charge leakage is provided. When the sensor is used in some occasions, especially military severe environment occasions, the insulation of the sensor is reduced due to humidity change, electromagnetic environment interference and the like, and the measurement precision is reduced.
In addition, in military applications, especially when measuring engine vibration signals, vibration intensity, i.e. speed signal output is generally required, and when abnormality occurs in the signals and fault diagnosis is required, analysis of the original signals, i.e. acceleration signals, is also desired. Therefore, it is necessary for the vibration sensor to provide two signal outputs.
Disclosure of Invention
Technical problem to be solved
The technical problem to be solved by the invention is as follows: the problem of the insulating nature of vibration sensor when using under the military adverse circumstances to and original vibration sensor output signal singleness is solved.
(II) technical scheme
In order to solve the technical problem, the invention provides a high-performance piezoelectric vibration sensor, which comprises a base 1, a sensor seat 2, a piezoelectric sensitive element 3, an inner shell 4, a first circuit 1-1, a second circuit 1-2, a socket 5, an upper cover 6 and packaging glue 7;
the sensor seat 2 is positioned in the inner cavity of the base 1; the piezoelectric type sensor 3 is arranged in the inner shell 4, and the piezoelectric type sensor and the inner shell are positioned on the sensor base 2;
the internal circuit part of the sensor is composed of a first circuit 1-1 for realizing charge amplification and a second circuit 1-2 for realizing integral conversion, and two groups of signals, namely an acceleration voltage signal and a speed voltage signal, are finally obtained and are output through the socket 5; the first circuit 1-1 is located on the piezoelectric type sensitive element 3; the second circuit 1-2 is positioned above the first circuit 1-1, the side surface of the packaging adhesive 7 covers between the base 1 and the inner shell 4, the top of the packaging adhesive 7 covers the second circuit 1-2, and the upper cover 6 is positioned above the packaging adhesive 7 and is used as a top cover plate of the sensor;
the first circuit 1-1 is used for realizing charge amplification, converting an input charge signal into a voltage signal, processing the voltage signal and outputting an acceleration voltage signal on the socket 5; meanwhile, the acceleration voltage signal is also connected to a second circuit 1-2, and the second circuit 1-2 is used for realizing integral conversion, converting the input acceleration voltage signal into a speed voltage signal and outputting the speed voltage signal through a socket 5.
Preferably, the piezoelectric sensor 3 is made of a piezoelectric ceramic material.
Preferably, the piezoelectric sensor 3 is a piezoelectric crystal.
Preferably, the base 1 is a housing of a sensor.
Preferably, a spacer of insulating material is placed between the base 1 and the sensor receptacle 2;
preferably, the insulating material pad is an epoxy board.
Preferably, heat-resistant moisture-proof paint is coated on the inner and outer surfaces of the inner casing 4.
Preferably, the upper cover plate 6 is provided with a vacuum hole for vacuumizing the interior of the sensor, so as to remove air and moisture in the cavity.
Preferably, the sensor is one that is applied to military harsh environments.
The invention also provides application of the sensor in military severe environment.
(III) advantageous effects
The vibration sensor can provide two output signals of an original acceleration signal and a vibration speed signal without mutual interference, and a user can select the signals according to the requirement to support the graded fault diagnosis of the collector. The vibration sensor provided by the invention can effectively improve the withstand voltage value and the insulation resistance of the sensor, reduce the interference of the environment such as external humidity, temperature and the like, improve the measurement precision and improve the overall performance of the sensor.
Drawings
FIG. 1 is a schematic structural diagram of a vibration sensor according to an embodiment of the present invention;
FIG. 2 is a detailed schematic view of a vibration sensor according to an embodiment of the present invention;
fig. 3 is a schematic diagram of a four-core structure of an interposer in a vibration sensor according to an embodiment of the present invention.
Detailed Description
In order to make the objects, contents, and advantages of the present invention clearer, the following detailed description of the embodiments of the present invention will be made in conjunction with the accompanying drawings and examples.
As shown in fig. 1, a high-performance piezoelectric vibration sensor applied to a military severe environment according to an embodiment of the present invention includes a base 1 (an outer casing), a sensor base 2, a piezoelectric sensitive element 3, an inner casing 4, a first circuit 1-1, a second circuit 1-2, a socket 5, an encapsulation adhesive 7, and an upper cover 6;
as shown in fig. 2, the sensor seat 2 is located in the inner cavity of the base 1, and an insulating material gasket is placed between the base 1 and the sensor seat 2, specifically, the insulating material may be an epoxy resin plate or the like, which is beneficial to improving the insulation resistance of the sensor, reducing charge leakage, and improving measurement accuracy; on the other hand, mechanical filtering is realized, the frequency response of the vibration sensor is favorably improved, and the overall performance of the sensor is improved. As shown in fig. 1 and 2, the piezoelectric sensor 3 is disposed in the inner casing 4, and both are located on the sensor base 2, and the heat-resistant and moisture-proof coating is coated on the inner and outer surfaces of the inner casing 4, which is beneficial to reducing the influence of temperature, humidity and the like on the sensor under severe environment.
As shown in fig. 2, the upper cover plate 6 is provided with a vacuum hole for evacuating the interior of the sensor to remove air and moisture in the cavity, which is beneficial to improving the withstand voltage value and the insulation resistance of the sensor, reducing charge leakage, and improving measurement accuracy.
As shown in fig. 1 and 2, the internal circuit of the sensor is composed of a first circuit 1-1 for realizing charge amplification and a second circuit 1-2 for realizing integral conversion, and two groups of signals, namely an acceleration voltage signal and a speed voltage signal, are finally obtained and output through a socket 5. The piezoelectric type sensing element 3 is arranged in the inner shell 4, the piezoelectric type sensing element 3 and the inner shell 4 are positioned on the sensor base 2, and the first circuit 1-1 is positioned on the piezoelectric type sensing element 3; the second circuit 1-2 is arranged above the first circuit 1-1, the side face of the packaging adhesive 7 covers between the base 1 and the inner shell 4, the top of the packaging adhesive 7 covers the second circuit 1-2, and the upper cover 6 is arranged above the packaging adhesive 7 and serves as a top cover plate of the sensor.
On one hand, the first circuit 1-1 is used for realizing charge amplification, converting an input charge signal into a voltage signal and outputting an acceleration voltage signal on the socket 5 after processing; meanwhile, the acceleration voltage signal is also connected to a second circuit 1-2, and the second circuit 1-2 is used for realizing integral conversion, converting the input acceleration voltage signal into a speed voltage signal and outputting the speed voltage signal through a socket 5. In some measurement occasions, a vibration speed signal needs to be obtained, but when fault diagnosis occurs, a raw acceleration signal is needed to be analyzed, so that two output signals are provided, and the vibration speed signal is easy to use by a user according to the requirement of the user. As shown in fig. 3, the socket 5 is a 4-core output, and provides an acceleration output signal and a velocity output signal at the same time, which can be selected by the user as required.
In the embodiment of the invention, the piezoelectric sensing element 3 is made of piezoelectric ceramic material, and the ceramic has the advantages of low dielectric constant, high Curie temperature, obvious anisotropy, low sintering temperature and the like. It should be noted that the piezoelectric sensor 3 may also be a piezoelectric crystal, depending on the application.
When measuring the vibration signal of the engine, the vibration intensity, namely the speed signal is generally required to be output, and when the signal is abnormal, the original signal, namely the acceleration signal is expected to be analyzed. Therefore, it is necessary for the vibration sensor to provide two signal outputs. For example, the vibration sensitive core generates an acceleration signal after being sensitive to a vibration signal, and generates a speed signal after passing through an acceleration-speed conversion circuit. The speed signal is determined by two values of acceleration and frequency, when the speed signal is suspected to be inaccurate, whether the acceleration exceeds the standard or the frequency exceeds the standard cannot be accurately positioned, or a circuit works abnormally. The vibration sensor can provide two output signals of an original acceleration signal and a vibration speed signal, which are not interfered with each other, and a user can select the signals according to the requirement to support the graded fault diagnosis of the collector. The vibration sensor provided by the invention can effectively improve the withstand voltage value and the insulation resistance of the sensor, reduce the interference of the environment such as external humidity, temperature and the like, improve the measurement precision and improve the overall performance of the sensor.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (10)
1. A high-performance piezoelectric vibration sensor is characterized by comprising a base (1), a sensor seat (2), a piezoelectric sensing element (3), an inner shell (4), a first circuit (1-1), a second circuit (1-2), a socket (5), an upper cover (6) and packaging glue (7);
the sensor seat (2) is positioned in the inner cavity of the base (1); the piezoelectric type sensitive element (3) is arranged in the inner shell (4), and the piezoelectric type sensitive element and the inner shell are positioned on the sensor base (2);
the internal circuit part of the sensor is formed by realizing charge amplification by the first circuit (1-1) and realizing integral conversion by the second circuit (1-2), and two groups of signals, namely an acceleration voltage signal and a speed voltage signal, are finally obtained and are output by the socket (5); the first circuit (1-1) is positioned on the piezoelectric sensitive element (3); the second circuit (1-2) is positioned above the first circuit (1-1), the side face of the packaging adhesive (7) covers between the base (1) and the inner shell (4), the top of the packaging adhesive covers the second circuit (1-2), and the upper cover (6) is positioned above the packaging adhesive (7) and is used as a top cover plate of the sensor;
the first circuit (1-1) is used for realizing charge amplification, converting an input charge signal into a voltage signal and outputting an acceleration voltage signal on the socket (5) after processing; meanwhile, the acceleration voltage signal is also connected to a second circuit (1-2), the second circuit (1-2) is used for realizing integral conversion, the input acceleration voltage signal is converted into a speed voltage signal, and the speed voltage signal is also output through a socket (5).
2. A sensor according to claim 1, characterized in that the piezo-electric sensitive element (3) is made of a piezo-electric ceramic material.
3. A sensor according to claim 1, characterized in that the piezoelectric sensor (3) is a piezoelectric crystal.
4. A sensor according to claim 1, characterized in that the base (1) is a housing of the sensor.
5. A sensor according to claim 1, characterized in that a spacer of insulating material is placed between the base (1) and the sensor receptacle (2).
6. The sensor of claim 5, wherein the pad of insulating material is an epoxy board.
7. A sensor according to claim 1, characterized in that a heat-resistant and moisture-proof coating is applied to the inner and outer surfaces of the inner casing (4).
8. A sensor according to claim 1, characterized in that the upper cover plate (6) is provided with vacuum holes for evacuating the interior of the sensor for removing air and moisture from the cavity.
9. A sensor as claimed in any one of claims 1 to 8, wherein the sensor is of the type used in military harsh environments.
10. Use of a sensor according to any one of claims 1 to 8 in a military harsh environment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011065924.1A CN112197854A (en) | 2020-09-30 | 2020-09-30 | High-performance piezoelectric vibration sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011065924.1A CN112197854A (en) | 2020-09-30 | 2020-09-30 | High-performance piezoelectric vibration sensor |
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| Publication Number | Publication Date |
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| CN112197854A true CN112197854A (en) | 2021-01-08 |
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| CN202011065924.1A Pending CN112197854A (en) | 2020-09-30 | 2020-09-30 | High-performance piezoelectric vibration sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113884129A (en) * | 2021-09-09 | 2022-01-04 | 国家石油天然气管网集团有限公司华南分公司 | Integrated acceleration speed vibration sensor |
| CN114088190A (en) * | 2021-11-18 | 2022-02-25 | 贵州电网有限责任公司 | Portable vibration signal acquisition device |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6513383B1 (en) * | 1999-01-26 | 2003-02-04 | Bosch Electronics Corporation | Acceleration sensor and acceleration detection system |
| CN103344320A (en) * | 2013-07-15 | 2013-10-09 | 中国矿业大学(北京) | Vibration acceleration sensor signal conditioning device for mine |
| CN103468094A (en) * | 2013-09-26 | 2013-12-25 | 陈理敬 | Sealing and heat-insulating coating material for outer surface of shell and preparation method thereof |
| EP3312615A1 (en) * | 2016-10-20 | 2018-04-25 | Brüel & Kjaer Vibro GmbH | Electronic measuring device for vibration measuring with a piezoelectric acceleration sensor |
| CN208076020U (en) * | 2018-04-10 | 2018-11-09 | 扬州熙源电子科技有限公司 | A kind of piezoelectric type vibration velocity sensor with integrating function |
| CN109443522A (en) * | 2018-12-10 | 2019-03-08 | 江苏华创光电科技有限公司 | A kind of conditioning of vibration signal and data converter |
| CN210294317U (en) * | 2019-07-08 | 2020-04-10 | 西人马（厦门）科技有限公司 | Lightning protection piezoelectric acceleration sensor |
| CN210833848U (en) * | 2019-12-04 | 2020-06-23 | 郑州易度传感技术有限公司 | Piezoelectric vibration displacement sensor |
-
2020
- 2020-09-30 CN CN202011065924.1A patent/CN112197854A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6513383B1 (en) * | 1999-01-26 | 2003-02-04 | Bosch Electronics Corporation | Acceleration sensor and acceleration detection system |
| CN103344320A (en) * | 2013-07-15 | 2013-10-09 | 中国矿业大学(北京) | Vibration acceleration sensor signal conditioning device for mine |
| CN103468094A (en) * | 2013-09-26 | 2013-12-25 | 陈理敬 | Sealing and heat-insulating coating material for outer surface of shell and preparation method thereof |
| EP3312615A1 (en) * | 2016-10-20 | 2018-04-25 | Brüel & Kjaer Vibro GmbH | Electronic measuring device for vibration measuring with a piezoelectric acceleration sensor |
| CN208076020U (en) * | 2018-04-10 | 2018-11-09 | 扬州熙源电子科技有限公司 | A kind of piezoelectric type vibration velocity sensor with integrating function |
| CN109443522A (en) * | 2018-12-10 | 2019-03-08 | 江苏华创光电科技有限公司 | A kind of conditioning of vibration signal and data converter |
| CN210294317U (en) * | 2019-07-08 | 2020-04-10 | 西人马（厦门）科技有限公司 | Lightning protection piezoelectric acceleration sensor |
| CN210833848U (en) * | 2019-12-04 | 2020-06-23 | 郑州易度传感技术有限公司 | Piezoelectric vibration displacement sensor |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113884129A (en) * | 2021-09-09 | 2022-01-04 | 国家石油天然气管网集团有限公司华南分公司 | Integrated acceleration speed vibration sensor |
| US11796554B2 (en) | 2021-09-09 | 2023-10-24 | China Oil & Gas Pipeline Network Corporation | Integrated acceleration, speed and vibration sensor |
| CN114088190A (en) * | 2021-11-18 | 2022-02-25 | 贵州电网有限责任公司 | Portable vibration signal acquisition device |
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Application publication date: 20210108 |
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