CN112157346A - Multi-wavelength laser processing device - Google Patents
Multi-wavelength laser processing device Download PDFInfo
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- CN112157346A CN112157346A CN202011032040.6A CN202011032040A CN112157346A CN 112157346 A CN112157346 A CN 112157346A CN 202011032040 A CN202011032040 A CN 202011032040A CN 112157346 A CN112157346 A CN 112157346A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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Abstract
The invention relates to a multi-wavelength laser processing device, which comprises a multi-wavelength laser for emitting lasers with different wavelengths, a laser processing system and a laser beam combining device, wherein the laser processing system comprises a laser beam splitter and a laser beam combiner; the laser processing system comprises a galvanometer component, and the galvanometer component comprises a scanning galvanometer and a focusing mirror; the laser beam combining device comprises a first prism pair component, a second prism pair component, a first reflecting mirror, a second reflecting mirror and a first multicolor beam combining mirror; the first prism pair assembly comprises a first prism and a second prism through which the first wavelength laser passes; the second prism pair assembly comprises a third prism and a fourth prism through which the second wavelength laser passes; the first reflector reflects the first wavelength laser after dispersion compensation, and the first wavelength laser and the second wavelength laser after dispersion compensation are combined in the first multi-color beam combining mirror, and the combined laser is reflected by the second reflector to enter the scanning vibrating mirror and is focused by the focusing mirror to process a workpiece. The device can obtain the combined laser beam after dispersion compensation, thereby realizing the best processing effect.
Description
Technical Field
The invention belongs to the technical field of laser processing, and particularly relates to a multi-wavelength laser processing device.
Background
Different materials respond differently to different laser wavelengths. For example, many non-metals, biological tissues, etc. have high infrared absorption, and the use of infrared lasers to remove or process materials is the ideal laser wavelength. However, the absorption of green and ultraviolet light by metal materials is high, and therefore the use of green and ultraviolet light will have a better effect on the processing and removal of metals.
Most of the existing laser processing technology is realized by using monochromatic laser, so the processing technology is only limited to processing and treatment aiming at one or more materials. With the development of science and technology, various microelectronic devices are produced, and corresponding laser processing technology will have huge demands, and in the devices, for example, a 5G chip, a flexible display screen, a flexible circuit board, a high-density PCB and an IC package use various different materials including semiconductors, metals and various non-metals (such as glass, photoresist, etc.), and the demands cannot be met by adopting the traditional laser processing technology.
At present, although lasers capable of outputting multiple wavelengths simultaneously are designed for different materials, the lasers capable of outputting multiple wavelengths simultaneously cannot be combined well, and the existing multi-wavelength laser processing device is poor in processing effect due to the fact that laser passes through various lens groups and frequency doubling crystals and then has large material dispersion and large broadening of light pulses.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the multi-wavelength laser processing device is provided for solving the problem of poor processing effect of the existing multi-wavelength laser processing device.
In order to solve the above technical problem, an embodiment of the present invention provides a multi-wavelength laser processing apparatus, including a multi-wavelength laser, a laser processing system, and a laser beam combining apparatus;
the multi-wavelength laser is used for emitting laser with different wavelengths;
the laser processing system comprises a galvanometer component, the galvanometer component comprises a scanning galvanometer and a focusing mirror arranged on the scanning galvanometer, and the scanning mirror of the scanning galvanometer can reflect laser with various wavelengths;
the laser beam combining device comprises a first prism pair component, a second prism pair component, a first reflecting mirror, a second reflecting mirror and a first multicolor beam combining mirror;
the first prism pair assembly comprises a first prism and a second prism, the first prism and the second prism are sequentially arranged along the transmission direction of laser, and the first prism and the second prism are used for allowing the laser with the first wavelength to pass through so as to carry out dispersion compensation on the laser with the first wavelength;
the second prism pair assembly comprises a third prism and a fourth prism, the third prism and the fourth prism are sequentially arranged along the transmission direction of the laser, and the third prism and the fourth prism are used for allowing the laser with the second wavelength to pass through so as to perform dispersion compensation on the laser with the second wavelength;
the first reflector is used for reflecting laser with a first wavelength after dispersion compensation, the first multi-color beam combiner is used for reflecting laser with a second wavelength after dispersion compensation, the laser with the first wavelength after being reflected by the first reflector and transmitted through the first multi-color beam combiner and the laser with the second wavelength after being reflected by the first multi-color beam combiner are combined at the first multi-color beam combiner, and the combined laser with the two wavelengths is reflected by the second reflector to enter the scanning vibrating mirror and is focused by the focusing mirror to process a workpiece.
Optionally, the laser beam combining device further includes a third prism pair assembly and a second multi-color beam combining mirror, the third prism pair assembly includes a fifth prism and a sixth prism, the fifth prism and the sixth prism are sequentially arranged along a transmission direction of laser light, and the fifth prism and the sixth prism are used for allowing the laser light with a third wavelength to pass through so as to perform dispersion compensation on the laser light with the third wavelength;
the second multi-color beam combiner is used for reflecting laser with a third wavelength after dispersion compensation, the laser with two wavelengths after being combined by the first multi-color beam combiner and penetrating through the second multi-color beam combiner and the laser with a third wavelength after being reflected by the second multi-color beam combiner are combined at the second multi-color beam combiner, and the laser with three wavelengths after being combined is reflected by the second reflecting mirror to enter the scanning vibrating mirror and is focused by the focusing mirror to process a workpiece.
Optionally, the laser beam combining device further includes a first right-angle mirror, a second right-angle mirror, and a third right-angle mirror;
the first reflector is arranged between the multi-wavelength laser and the first prism, the first right-angle mirror is arranged on one side of the second prism, which is far away from the first prism, and the first right-angle mirror is used for reflecting the laser with the first wavelength, which sequentially passes through the first prism and the second prism, so that the laser changes the height and then sequentially passes through the second prism and the first prism to reach the first reflector;
the first multi-color beam combiner is arranged between the multi-wavelength laser and the third prism, the second right-angle mirror is arranged on one side, away from the third prism, of the fourth prism, and the second right-angle mirror is used for reflecting laser with a second wavelength, which sequentially passes through the third prism and the fourth prism, so that the laser changes height and sequentially passes through the fourth prism and the third prism to reach the first multi-color beam combiner;
the second multi-color beam combiner is arranged between the multi-wavelength laser and the fifth prism, the third right-angle mirror is arranged on one side of the sixth prism, which is far away from the fifth prism, and the third right-angle mirror is used for reflecting laser with a third wavelength, which sequentially passes through the fifth prism and the sixth prism, so that the laser changes the height and then sequentially passes through the sixth prism and the fifth prism to reach the second multi-color beam combiner.
Optionally, the first prism and the second prism are set to the brewster angle for the laser light of the first wavelength; the third prism and the fourth prism are set to be at the Brewster angle of the laser light with the second wavelength; the fifth prism and the sixth prism are set to a brewster angle for laser light of a third wavelength.
Optionally, the laser with the first wavelength is red light, the laser with the second wavelength is green light, and the laser with the third wavelength is violet light, and the first reflector is a monochromatic red reflector; the first multicolor beam combining mirror is a multicolor beam combining mirror with high head red light and high reflection green light; the second multi-color beam combining mirror is a multi-color beam combining mirror with high red light and green light transmittance and high violet light reflection; the second reflector is a reflector capable of reflecting all wavelengths of laser light.
Optionally, the multi-wavelength laser processing apparatus further includes a mirror group capable of reflecting laser light of different wavelengths, and the mirror group is configured to reflect the laser light reflected by the second mirror into the scanning galvanometer.
Optionally, the first prism pair assembly further includes a first linear displacement platform, a second linear displacement platform, a first rotation platform disposed on the first linear displacement platform, and a second rotation platform disposed on the second linear displacement platform, the first prism is disposed on the first rotation platform, the second prism is disposed on the second rotation platform, a distance between the first prism and the second prism can be changed by changing a distance between the first linear displacement platform and the second linear displacement platform, an angle of the first prism can be changed by driving the first rotation platform to rotate, and an angle of the second prism can be changed by driving the second rotation platform to rotate;
the second prism pair assembly further includes a third linear displacement stage, a fourth linear displacement stage, a third rotation stage provided on the third linear displacement stage, and a fourth rotation stage provided on the fourth linear displacement stage, the third prism being provided on the third rotation stage, the fourth prism being provided on the fourth rotation stage, a distance between the third prism and the fourth prism being changeable by changing a distance between the third linear displacement stage and the fourth linear displacement stage, an angle of the third prism being changeable by driving the third rotation stage to rotate, and an angle of the fourth prism being changeable by driving the fourth rotation stage to rotate;
the third prism is in to subassembly still includes fifth linear displacement platform, sixth linear displacement platform, sets up fifth rotary platform on the fifth linear displacement platform is in with the setting sixth rotary platform on the sixth linear displacement platform, the fifth prism sets up on the fifth rotary platform, the sixth prism sets up on the sixth rotary platform, through changing fifth linear displacement platform with distance between the sixth linear displacement platform can change the fifth prism with distance between the sixth prism, through the drive fifth rotary platform can change the angle of fifth prism, through the drive sixth rotary platform can change the angle of sixth prism.
Optionally, the laser processing system further includes a processing platform, a fixed base, a first driving assembly and a second driving assembly;
the scanning galvanometer is arranged at the output end of the first driving component, and the first driving component is used for driving the galvanometer component to move up and down;
an aluminum film is plated on a scanning mirror of the scanning galvanometer, and a multilayer reflecting film capable of reflecting lasers with various wavelengths is plated on the aluminum film;
the processing platform is arranged on the fixed base in a sliding mode, and the second driving assembly is used for driving the processing platform to move up and down.
Optionally, the focusing mirror adopts CaF2Or MgF2Or LiF2And (4) preparing.
Optionally, the multi-wavelength laser is a multi-wavelength femtosecond laser.
Compared with the prior art, the multi-wavelength laser processing device provided by the embodiment of the invention has the advantages that when laser light with a first wavelength passes through the first prism and the second prism by sequentially arranging the first prism and the second prism along the transmission direction of the laser light, the first prism and the second prism can carry out dispersion compensation on the laser light with the first wavelength (wherein the name of the first wavelength is used for distinguishing the laser light with different wavelengths, the arrangement distance between the first prism and the second prism is different for the dispersion compensation of the laser light with different wavelengths, the arrangement distance is specifically set according to the laser light with specific wavelength and the thickness of the material through which the laser light with the specific wavelength passes, the following name of the second wavelength and the arrangement of the third prism and the fourth prism are also the same), when the laser light with the second wavelength passes through the third prism and the fourth prism by sequentially arranging the third prism and the fourth prism along the transmission direction of the laser light, the third prism and the fourth prism can carry out dispersion compensation on the laser with the second wavelength; the laser with the first wavelength after dispersion compensation can be reflected to the first multicolor beam combiner through the arrangement of the first reflecting mirror to be combined with the second wavelength after dispersion compensation, so that a combined laser beam after dispersion compensation is obtained, the laser with the two wavelengths after combination is reflected by the second reflecting mirror to enter the scanning vibrating mirror capable of reflecting the laser with the multiple wavelengths, the laser beam after combination can be focused by the focusing mirror to process workpieces made of different materials, and dispersion compensation is performed on the laser with the two wavelengths after combination by the laser beam combiner, so that the processing effect is better.
Drawings
Fig. 1 is a reference diagram illustrating a usage state of a multi-wavelength laser processing apparatus according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a first prism pair assembly, a second prism pair assembly, a third prism pair assembly, a first right-angle mirror, a second right-angle mirror, a third right-angle mirror, a first reflector, a first multicolor beam combiner, and a second multicolor beam combiner in fig. 1.
The reference numerals in the specification are as follows:
1. a first prism pair assembly; 11. a first prism; 12. a second prism;
2. a second prism pair assembly; 21. a third prism; 22. a fourth prism;
3. a third prism pair assembly; 31. a fifth prism; 32. a sixth prism;
4. a first reflector; 5. a second reflector; 6. a first multi-color beam combiner; 7. a second multi-color beam combiner; 8. a first right-angle mirror; 9. a second right-angle mirror; 10. a third right-angle mirror;
20. a laser processing system; 201. a processing platform; 202. a galvanometer component; 203. a fixed base; 204. a first drive assembly; 205. a second drive assembly; 206. a reflector group;
100. a multi-wavelength laser;
a. a laser of a first wavelength; b. a laser of a second wavelength; c. laser light of a third wavelength.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
As shown in fig. 1-2, the multi-wavelength laser processing apparatus provided by the embodiment of the present invention includes a multi-wavelength laser 100, a laser processing system 20, and a laser beam combining apparatus;
the multi-wavelength laser 100 is used for emitting laser with different wavelengths;
the laser processing system 20 comprises a galvanometer assembly 202, wherein the galvanometer assembly 202 comprises a scanning galvanometer and a focusing mirror arranged on the scanning galvanometer, and the scanning mirror of the scanning galvanometer can reflect laser with various wavelengths;
the laser beam combining device comprises a first prism pair component 1, a second prism pair component 2, a first reflecting mirror 4, a second reflecting mirror 5 and a first multicolor beam combining mirror 6;
the first prism pair assembly 1 comprises a first prism 11 and a second prism 12, the first prism 11 and the second prism 12 are sequentially arranged along the transmission direction of the laser, and the first prism 11 and the second prism 12 are used for the laser a with the first wavelength to pass through so as to carry out dispersion compensation on the laser a with the first wavelength;
the second prism pair assembly 2 comprises a third prism 21 and a fourth prism 22, the third prism 21 and the fourth prism 22 are sequentially arranged along the transmission direction of the laser, and the third prism 21 and the fourth prism 22 are used for the laser b with the second wavelength to pass through so as to carry out dispersion compensation on the laser b with the second wavelength;
the first reflector 4 is used for reflecting the laser a with the first wavelength after dispersion compensation, the first multi-color beam combiner 6 is used for reflecting the laser b with the second wavelength after dispersion compensation, the laser a with the first wavelength after being reflected by the first reflector 4 and transmitting through the first multi-color beam combiner 6 and the laser b with the second wavelength after being reflected by the first multi-color beam combiner 6 are combined at the first multi-color beam combiner 6, and the laser with the two wavelengths after combination is reflected by the second reflector 5 to enter the scanning galvanometer and is focused by the focusing mirror to process a workpiece.
Compared with the prior art, the multi-wavelength laser processing device provided by the embodiment of the invention has the advantages that the first prism 11 and the second prism 12 are sequentially arranged along the transmission direction of the laser, so that when the laser a with the first wavelength passes through the first prism 11 and the second prism 12, the first prism 11 and the second prism 12 can perform dispersion compensation on the laser a with the first wavelength (wherein, the first wavelength is named as the laser with different wavelengths, the arrangement distance between the first prism 11 and the second prism 12 is different for the dispersion compensation of the laser with different wavelengths, specifically, the arrangement distance is different according to the laser with specific wavelength and the thickness of the material through which the laser with the specific wavelength passes, and the following naming of the second wavelength and the arrangement of the third prism 21 and the fourth prism 22 are also the same), the third prism 21 and the fourth prism 22 are sequentially arranged along the transmission direction of the laser, when the laser light b with the second wavelength passes through the third prism 21 and the fourth prism 22, the third prism 21 and the fourth prism 22 can perform dispersion compensation on the laser light b with the second wavelength; the first reflector 4 is arranged to reflect the laser a with the first wavelength after dispersion compensation to the first multi-color beam combiner 6 to combine with the second wavelength after dispersion compensation, so as to obtain a combined laser beam after dispersion compensation, the laser with the two wavelengths after combination is reflected by the second reflector 5 to enter the scanning vibrating mirror capable of reflecting the laser with multiple wavelengths, and the laser beam after combination can be focused by the focusing mirror to process workpieces made of different materials, and the laser with the two wavelengths after combination is subjected to dispersion compensation by the laser beam combiner, so that the processing effect is better.
In an embodiment, as shown in fig. 1-2, the laser beam combining apparatus further includes a third prism pair assembly 3 and a second multi-color beam combining mirror 7, the third prism pair assembly 3 includes a fifth prism 31 and a sixth prism 32, the fifth prism 31 and the sixth prism 32 are sequentially arranged along the conducting direction of the laser light, and the fifth prism 31 and the sixth prism 32 are used for allowing the laser light c of the third wavelength to pass through so as to perform dispersion compensation on the laser light c of the third wavelength;
the second multi-color beam combiner 7 is used for reflecting the laser c with the third wavelength after dispersion compensation, the laser c with the two wavelengths after being combined by the first multi-color beam combiner 6 and penetrating through the second multi-color beam combiner 7 and the laser c with the third wavelength after being reflected by the second multi-color beam combiner 7 are combined at the second multi-color beam combiner 7, and the laser with the three wavelengths after being combined is reflected by the second reflecting mirror 5 to enter the scanning galvanometer and is focused by the focusing mirror to process a workpiece. The arrangement mode realizes dispersion compensation of the laser with three wavelengths and beam combination of the laser with three wavelengths, so that the laser can be suitable for processing workpieces made of various materials.
Any transparent material (such as a glass window or a lens and a prism) can generate dispersion on ultrafast laser pulses, the dispersion generated by the material on the ultrafast laser pulses is greatly different for the laser pulses with different wavelengths (different colors), and in addition, in the process of generating the laser with various wavelengths (colors), the laser with various wavelengths (colors) can pass through materials with different thicknesses and materials, usually in visible light and ultraviolet bands, the dispersion of the material is positive dispersion, so that the reverse dispersion compensation on the dispersion of the material is realized by generating negative dispersion by using the prism pair. Varying the distance of the prism pair can produce different degrees of negative dispersion, with longer distances generally producing more negative dispersion. Dispersion caused by any different thickness of material can be compensated for by varying the distance of the prism pairs. Therefore, in order to perform dispersion compensation on laser lights with different wavelengths, the setting distance between the prism pairs (i.e., the distance between the first prism 11 and the second prism 12, the distance between the third prism 21 and the fourth prism 22, and the distance between the fifth prism 31 and the sixth prism 32) according to the present invention needs to be adaptively adjusted according to the laser light with a specific wavelength and the thickness of the material through which the laser light with the wavelength passes.
In one embodiment, the laser a with the first wavelength is red light, the laser b with the second wavelength is green light, and the laser c with the third wavelength is violet light, the first reflecting mirror 4 is a monochromatic red light reflecting mirror, the first multicolor beam combining mirror 6 is a multicolor beam combining mirror with high head red light and high reflection green light, the second multicolor beam combining mirror 7 is a multicolor beam combining mirror with high transmission red light and green light and high reflection violet light, and the second reflecting mirror 5 is a reflecting mirror capable of reflecting the laser with all wavelengths.
It should be noted that, in the embodiments of the present application, only dispersion compensation and beam combination can be performed on lasers with three different wavelengths, and it is not intended to limit the present application to perform dispersion compensation and beam combination only on lasers with three different wavelengths, and dispersion compensation and beam combination of lasers with four or more different wavelengths can also be implemented according to the concept of the present application.
In one embodiment, as shown in fig. 1, the multi-wavelength laser processing apparatus further includes a mirror group 206 capable of reflecting the laser light with different wavelengths, and the mirror group 206 is used for reflecting the laser light reflected by the second mirror 5 into the scanning galvanometer. The number and arrangement of the mirrors in the mirror group 206 are not limited, so as to facilitate the laser to be reflected into the scanning galvanometer.
In one embodiment, as shown in fig. 1-2, the laser beam combining device further includes a first right-angle mirror 8, a second right-angle mirror 9, and a third right-angle mirror 10;
the first reflector 4 is arranged between the multi-wavelength laser 100 and the first prism 11, the first right-angle mirror 8 is arranged on one side of the second prism 12, which is far away from the first prism 11, and the first right-angle mirror 8 is used for reflecting the laser a with the first wavelength, which sequentially passes through the first prism 11 and the second prism 12, so that the laser a changes the height and sequentially passes through the second prism 12 and the first prism 11 to reach the first reflector 4; the transmission height of the laser is changed by arranging the first right-angle mirror 8, so that the emitted laser beam can be kept away from the incident laser beam, and the laser with the first wavelength can conveniently reach the first reflecting mirror 4.
The first multicolor beam combiner 6 is arranged between the multi-wavelength laser 100 and the third prism 21, the second right-angle mirror 9 is arranged on one side of the fourth prism 22, which is far away from the third prism 21, and the second right-angle mirror 9 is used for reflecting the laser b with the second wavelength, which sequentially passes through the third prism 21 and the fourth prism 22, so that the laser b changes the height and sequentially passes through the fourth prism 22 and the third prism 21 to reach the first multicolor beam combiner 6; the transmission height of the laser is changed by arranging the second right-angle mirror 9, so that the emitted laser beam can be avoided from the incident laser beam, and the laser with the second wavelength can reach the first multi-color beam combining mirror 6 conveniently.
The second multi-color beam combiner 7 is arranged between the multi-wavelength laser 100 and the fifth prism 31, the third right-angle mirror 10 is arranged on one side of the sixth prism 32, which is far away from the fifth prism 31, and the third right-angle mirror 10 is used for reflecting the laser c with the third wavelength, which sequentially passes through the fifth prism 31 and the sixth prism 32, so that the laser c changes the height and sequentially passes through the sixth prism 32 and the fifth prism 31 to reach the second multi-color beam combiner 7. The third right-angle mirror 10 is arranged to change the transmission height of the laser, so that the emitted laser beam can be kept away from the incident laser beam, and the laser with the third wavelength can reach the second multi-color beam combining mirror 7 conveniently.
In this case, as shown in fig. 2, in order to change the laser transmission height, the first right-angle mirror 8, the second right-angle mirror 9 and the third right-angle mirror 10 are arranged longitudinally, i.e. the two reflecting surfaces of the right-angle mirrors used to change the laser transmission height are in the longitudinal direction.
In one embodiment, first prism 11 and second prism 12 are set to the brewster angle for laser light of a first wavelength; the third prism 21 and the fourth prism 22 are set to the brewster angle for the laser light of the second wavelength; the fifth prism 31 and the sixth prism 32 are set to the brewster angle for the laser light of the third wavelength, and the reflection loss caused by the laser light passing through the prism pairs (the first prism 11 and the second prism 12, the third prism 21 and the fourth prism 22, and the fifth prism 31 and the sixth prism 32) can be effectively reduced.
In an embodiment, the first prism pair assembly 1 further includes a first linear displacement stage (not shown), a second linear displacement stage (not shown), a first rotation stage (not shown) disposed on the first linear displacement stage, and a second rotation stage (not shown) disposed on the second linear displacement stage, the first prism 11 being disposed on the first rotation stage, the second prism 12 being disposed on the second rotation stage, a distance between the first prism 11 and the second prism 12 being changeable by changing a distance between the first linear displacement stage and the second linear displacement stage, an angle of the first prism 11 being changeable by driving the first rotation stage to rotate, an angle of the second prism 12 being changeable by driving the second rotation stage to rotate; through setting up first linear displacement platform, second linear displacement platform, first rotary platform and second rotary platform, can conveniently carry out the adaptability according to specific application environment to the position between first prism 11 and the second prism 12 and adjust, in order to reach the best dispersion compensation effect, wherein first linear displacement platform, second linear displacement platform, first rotary platform and second rotary platform can be through manual regulation, it also can be through driving motor etc. have drive function's components and parts, carry out accurate control by the control system who has typed computer algorithm in advance.
The second prism pair assembly 2 further includes a third linear displacement stage (not shown), a fourth linear displacement stage (not shown), a third rotation stage (not shown) provided on the third linear displacement stage, and a fourth rotation stage (not shown) provided on the fourth linear displacement stage, the third prism 21 being provided on the third rotation stage, the fourth prism 22 being provided on the fourth rotation stage, the distance between the third prism 21 and the fourth prism 22 being changeable by changing the distance between the third linear displacement stage and the fourth linear displacement stage, the angle of the third prism 21 being changeable by driving the third rotation stage to rotate, and the angle of the fourth prism 22 being changeable by driving the fourth rotation stage to rotate; through setting up third linear displacement platform, fourth linear displacement platform, third rotary platform and fourth rotary platform, can conveniently carry out the adaptability adjustment according to specific application environment to the position between third prism 21 and the fourth prism 22, in order to reach the best dispersion compensation effect, wherein third linear displacement platform, fourth linear displacement platform, third rotary platform and fourth rotary platform can be through manual regulation, it also can be through driving motor etc. components and parts that have drive function, carry out accurate control by the control system who has typed computer algorithm in advance.
The third prism pair assembly 3 further includes a fifth linear displacement stage (not shown), a sixth linear displacement stage (not shown), a fifth rotation stage (not shown) provided on the fifth linear displacement stage, and a sixth rotation stage (not shown) provided on the sixth linear displacement stage, the fifth prism 31 being provided on the fifth rotation stage, the sixth prism 32 being provided on the sixth rotation stage, the distance between the fifth prism 31 and the sixth prism 32 being changeable by changing the distance between the fifth linear displacement stage and the sixth linear displacement stage, the angle of the fifth prism 31 being changeable by driving the fifth rotation stage to rotate, the angle of the sixth prism 32 being changeable by driving the sixth rotation stage to rotate; through setting up the fifth linear displacement platform, the sixth linear displacement platform, fifth rotary platform and sixth rotary platform, can conveniently carry out the adaptability adjustment according to specific application environment to the position between fifth prism 31 and the sixth prism 32, in order to reach the best dispersion compensation effect, wherein the fifth linear displacement platform, the sixth linear displacement platform, fifth rotary platform and sixth rotary platform can be through manual regulation, it also can be through components and parts that driving motor etc. have drive function, carry out accurate control by the control system who has typed computer algorithm in advance.
In one embodiment, as shown in fig. 1, the laser processing system 20 further includes a processing platform 201, a stationary base 203, a first drive assembly 204, and a second drive assembly 205;
the scanning galvanometer is arranged at the output end of the first driving component 204, and the first driving component 204 is used for driving the galvanometer component 202 to move up and down; the processing platform 201 is slidably disposed on the fixed base 203, and the second driving assembly 205 is used for driving the processing platform 201 to move up and down. The galvanometer component 202 is driven to move up and down by the first driving component 204, and the processing platform 201 is driven to move up and down by the second driving component 205, so that workpieces with different thicknesses can be processed conveniently. The first driving assembly 204 and the second driving assembly 205 may both adopt an existing driving structure, for example, a motor is adopted to drive the ball screw to rotate so as to achieve the purpose of driving, which is not described herein again. The processing platform 201 can be slidably disposed on the fixed base through a guide rail assembly.
In one embodiment, the scanning mirror of the scanning galvanometer is plated with an aluminum film, and the aluminum film is plated with a multilayer reflecting film capable of reflecting laser with various wavelengths; by plating the aluminum film on the scanning mirror, the aluminum film has the optimal reflectivity relative to ultraviolet light, and the aluminum film plating is favorable for plating the multilayer reflecting film on the scanning mirror, and laser with different wavelengths can be reflected by plating the multilayer reflecting film.
In one embodiment, the surface reflection of the low-refractive-index material is much smaller than the reflectivity of the traditional optical lens material, and in addition, the dispersion and nonlinear effect of the low-refractive-index material are very low, so that the focusing mirror is made of the low-refractive-index material without coating; CaF can be used as the focusing mirror2Or MgF2Or LiF2And (4) preparing.
In one embodiment, the multi-wavelength laser 100 employs a multi-wavelength femtosecond laser. The laser emitted by the multi-wavelength femtosecond laser has extremely short pulse width, can realize non-thermal effect processing, has higher processing precision, and can realize high-precision thin layer removal on materials.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (10)
1. A multi-wavelength laser processing device is characterized by comprising a multi-wavelength laser, a laser processing system and a laser beam combining device;
the multi-wavelength laser is used for emitting laser with different wavelengths;
the laser processing system comprises a galvanometer component, the galvanometer component comprises a scanning galvanometer and a focusing mirror arranged on the scanning galvanometer, and the scanning mirror of the scanning galvanometer can reflect laser with various wavelengths;
the laser beam combining device comprises a first prism pair component, a second prism pair component, a first reflecting mirror, a second reflecting mirror and a first multicolor beam combining mirror;
the first prism pair assembly comprises a first prism and a second prism, the first prism and the second prism are sequentially arranged along the transmission direction of laser, and the first prism and the second prism are used for allowing the laser with the first wavelength to pass through so as to carry out dispersion compensation on the laser with the first wavelength;
the second prism pair assembly comprises a third prism and a fourth prism, the third prism and the fourth prism are sequentially arranged along the transmission direction of the laser, and the third prism and the fourth prism are used for allowing the laser with the second wavelength to pass through so as to perform dispersion compensation on the laser with the second wavelength;
the first reflector is used for reflecting laser with a first wavelength after dispersion compensation, the first multi-color beam combiner is used for reflecting laser with a second wavelength after dispersion compensation, the laser with the first wavelength after being reflected by the first reflector and transmitted through the first multi-color beam combiner and the laser with the second wavelength after being reflected by the first multi-color beam combiner are combined at the first multi-color beam combiner, and the combined laser with the two wavelengths is reflected by the second reflector to enter the scanning vibrating mirror and is focused by the focusing mirror to process a workpiece.
2. The multiwavelength laser processing apparatus according to claim 1, wherein the laser beam combining apparatus further comprises a third prism pair assembly and a second polychromatic beam combining mirror, the third prism pair assembly comprises a fifth prism and a sixth prism, the fifth prism and the sixth prism are arranged in sequence along a transmission direction of the laser light, and the fifth prism and the sixth prism are used for passing the laser light of the third wavelength to perform dispersion compensation on the laser light of the third wavelength;
the second multi-color beam combiner is used for reflecting laser with a third wavelength after dispersion compensation, the laser with two wavelengths after being combined by the first multi-color beam combiner and penetrating through the second multi-color beam combiner and the laser with a third wavelength after being reflected by the second multi-color beam combiner are combined at the second multi-color beam combiner, and the laser with three wavelengths after being combined is reflected by the second reflecting mirror to enter the scanning vibrating mirror and is focused by the focusing mirror to process a workpiece.
3. The multiwavelength laser processing device of claim 2, wherein the laser combining means further comprises a first right-angle mirror, a second right-angle mirror, and a third right-angle mirror;
the first reflector is arranged between the multi-wavelength laser and the first prism, the first right-angle mirror is arranged on one side of the second prism, which is far away from the first prism, and the first right-angle mirror is used for reflecting the laser with the first wavelength, which sequentially passes through the first prism and the second prism, so that the laser changes the height and then sequentially passes through the second prism and the first prism to reach the first reflector;
the first multi-color beam combiner is arranged between the multi-wavelength laser and the third prism, the second right-angle mirror is arranged on one side, away from the third prism, of the fourth prism, and the second right-angle mirror is used for reflecting laser with a second wavelength, which sequentially passes through the third prism and the fourth prism, so that the laser changes height and sequentially passes through the fourth prism and the third prism to reach the first multi-color beam combiner;
the second multi-color beam combiner is arranged between the multi-wavelength laser and the fifth prism, the third right-angle mirror is arranged on one side of the sixth prism, which is far away from the fifth prism, and the third right-angle mirror is used for reflecting laser with a third wavelength, which sequentially passes through the fifth prism and the sixth prism, so that the laser changes the height and then sequentially passes through the sixth prism and the fifth prism to reach the second multi-color beam combiner.
4. The multiwavelength laser processing apparatus of claim 2, wherein the first prism and the second prism are set to the brewster angle for the laser light of the first wavelength; the third prism and the fourth prism are set to be at the Brewster angle of the laser light with the second wavelength; the fifth prism and the sixth prism are set to a brewster angle for laser light of a third wavelength.
5. The multiwavelength laser processing apparatus of claim 2, wherein the laser light of the first wavelength is red light, the laser light of the second wavelength is green light, and the laser light of the third wavelength is violet light, and the first mirror is a monochromatic red light mirror; the first multicolor beam combining mirror is a multicolor beam combining mirror with high head red light and high reflection green light; the second multi-color beam combining mirror is a multi-color beam combining mirror with high red light and green light transmittance and high violet light reflection; the second reflector is a reflector capable of reflecting all wavelengths of laser light.
6. The apparatus according to claim 2, further comprising a mirror group capable of reflecting the laser light of different wavelengths, wherein the mirror group is configured to reflect the laser light reflected by the second mirror into the scanning galvanometer.
7. The multiwavelength laser processing apparatus of claim 2, wherein the first prism pair assembly further comprises a first linear displacement stage, a second linear displacement stage, a first rotary stage provided on the first linear displacement stage, and a second rotary stage provided on the second linear displacement stage, the first prism being provided on the first rotary stage, the second prism being provided on the second rotary stage, a distance between the first prism and the second prism being changeable by changing a distance between the first linear displacement stage and the second linear displacement stage, an angle of the first prism being changeable by driving the first rotary stage to rotate, an angle of the second prism being changeable by driving the second rotary stage to rotate;
the second prism pair assembly further includes a third linear displacement stage, a fourth linear displacement stage, a third rotation stage provided on the third linear displacement stage, and a fourth rotation stage provided on the fourth linear displacement stage, the third prism being provided on the third rotation stage, the fourth prism being provided on the fourth rotation stage, a distance between the third prism and the fourth prism being changeable by changing a distance between the third linear displacement stage and the fourth linear displacement stage, an angle of the third prism being changeable by driving the third rotation stage to rotate, and an angle of the fourth prism being changeable by driving the fourth rotation stage to rotate;
the third prism is in to subassembly still includes fifth linear displacement platform, sixth linear displacement platform, sets up fifth rotary platform on the fifth linear displacement platform is in with the setting sixth rotary platform on the sixth linear displacement platform, the fifth prism sets up on the fifth rotary platform, the sixth prism sets up on the sixth rotary platform, through changing fifth linear displacement platform with distance between the sixth linear displacement platform can change the fifth prism with distance between the sixth prism, through the drive fifth rotary platform can change the angle of fifth prism, through the drive sixth rotary platform can change the angle of sixth prism.
8. The multiwavelength laser processing apparatus of claim 2, wherein the laser processing system further comprises a processing platform, a fixed base, a first drive assembly and a second drive assembly;
the scanning galvanometer is arranged at the output end of the first driving component, and the first driving component is used for driving the galvanometer component to move up and down;
an aluminum film is plated on a scanning mirror of the scanning galvanometer, and a multilayer reflecting film capable of reflecting lasers with various wavelengths is plated on the aluminum film;
the processing platform is arranged on the fixed base in a sliding mode, and the second driving assembly is used for driving the processing platform to move up and down.
9. The multiwavelength laser processing apparatus of claim 1, wherein the focusing mirror employs CaF2Or MgF2Or LiF2And (4) preparing.
10. The multiwavelength laser processing apparatus according to claim 1, wherein the multiwavelength laser is a multiwavelength femtosecond laser.
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| CN107427958A (en) * | 2015-03-12 | 2017-12-01 | 西尔特克特拉有限责任公司 | The apparatus and method of solid are continuously handled by means of laser beam |
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| CN213646309U (en) * | 2020-09-27 | 2021-07-09 | 华夏鲲鹏科技股份有限公司 | Multi-wavelength laser processing device |
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| US20100187208A1 (en) * | 2009-01-23 | 2010-07-29 | Board Of Trustees Of Michigan State University | Laser pulse synthesis system |
| CN107427958A (en) * | 2015-03-12 | 2017-12-01 | 西尔特克特拉有限责任公司 | The apparatus and method of solid are continuously handled by means of laser beam |
| CN110446580A (en) * | 2017-01-18 | 2019-11-12 | Ipg光子公司 | Method and system for coherent imaging and the feedback control for material modification |
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