CN112083563A - Optical device for a microscope - Google Patents

Optical device for a microscope Download PDF

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Publication number
CN112083563A
CN112083563A CN202010516932.7A CN202010516932A CN112083563A CN 112083563 A CN112083563 A CN 112083563A CN 202010516932 A CN202010516932 A CN 202010516932A CN 112083563 A CN112083563 A CN 112083563A
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CN
China
Prior art keywords
optical
mirror
micro
optical device
microscope
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Pending
Application number
CN202010516932.7A
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Chinese (zh)
Inventor
阿图尔·德根
约翰尼斯·温特罗
迈克尔·格莱斯
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Carl Zeiss Microscopy GmbH
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Carl Zeiss Microscopy GmbH
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Publication of CN112083563A publication Critical patent/CN112083563A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08Catadioptric systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/02Objectives
    • G02B21/04Objectives involving mirrors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/02Objectives
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/241Devices for focusing
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/36Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361Optical details, e.g. image relay to the camera or image sensor
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08Catadioptric systems
    • G02B17/0856Catadioptric systems comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

The invention relates to an optical device for a microscope, by means of which micrographs with an extended depth of field can be realized. The optical device includes a first optical interface for coupling to an objective lens of a microscope and a second optical interface for coupling to an image converter of the microscope. The optical device is designed to configure an optical path from the first optical interface to the second optical interface. The optical device comprises an at least partially concavely configured mirror and a microsystem with mechanically movable micromirrors. A mirror is disposed in the optical path between the first optical interface and the microsystem. A mirror is also disposed in the optical path between the microsystem and the second optical interface. According to the invention, the optical device further comprises at least one optical lens arranged between the mirror and the microsystem.

Description

Optical device for a microscope
Technical Field
The invention relates to an optical device for a microscope, by means of which micrographs with an extended depth of field can be realized.
Background
Microscope applications typically require imaging with extended depth of field (EDoF-extended depth of field). The EDoF function can also typically implement 3D model reconstruction. The known EDoF method is based on so-called zoom and contrast evaluation by software. Zooming is usually achieved by means of an actuator so that the sample can be scanned in the direction of the optical axis. The components required for EDoF function to date are mostly structural and indivisible components of the microscope.
DE 19733193 a1 shows a microscope with adaptive optics. In this microscope, an emitting wavefront modulator is arranged between the objective lens and the tubular lens. The microscope may be used in a confocal microscope, a laser-assisted microscope, a conventional microscope or an analytical microscope.
From US 7,345,816B 2 an optical microscope is known, which comprises a mirror with a controllably variable reflecting surface. Images from different focus positions, i.e. from different focal planes, are taken by changing the surface of the mirror.
US 7,269,344B 2 shows an optical device comprising: an optical system having a reflective variable optical element, a drive circuit for driving the optical element, and an image sensor. The computing unit is connected with the driving and controlling circuit. The image processor is connected to the computing unit. The image processor is equipped with an electronic zoom function. The calculation unit calculates a control signal for controlling a beam deflection function of the optical element based on data from the image sensor and the electronic zoom data. The optical element is preferably embodied as a deformable continuous mirror.
The product "3D WiseScope microscope" by manufacturer SD Optics inc. aims to be able to quickly generate both macro and micro images with extended depth of field. The product comprises LED annular illumination, coaxial illumination, transmission light illumination, an objective table, lenses with the magnification of 5, 10, 20 and 50 and a manual focusing part. The focusing portion may be changed with a frequency of 1 to 10kHz or more. A mirror array lens system, called MALS module, is used to implement the EDoF function, where a micro system with mechanically movable micromirrors is involved. MALS stands for mirror array lens system. Details of this system are described, for example, in WO 2005/119331 a1 and WO 2007/134264 a 2.
For rapid modulation of the refractive index of the liquid container, the manufacturer "TAG Optics lens module" is known from TAG Optics by which the microscope can be equipped with EDoF functionality. The product uses acoustic waves to control the lens.
The company Mejiro Genossen inc provides an optical microscope based on a tilted optical Offner (Offner) mirror system and operating in the manner of a Scheimpflug (Scheimpflug) device. The microscope should be able to achieve improved depth of field over a large field of view. However, the focusing power of such microscopes is difficult to control. In addition, some aberrations must be corrected.
DE 102017100904 a1 shows an image conversion module for a microscope. The image conversion module is designed for image conversion with additional functions and comprises at least one functional element for carrying out additional functions, which functional element is designed for imaging an extended depth of field, for carrying out an optical zoom, for measuring spectral characteristics, for measuring color, for measuring polarization, for measuring wave front and/or for correcting aberrations. The image conversion module preferably comprises a mirror system having a concave mirror and a convex mirror arranged opposite the concave mirror and designed as an optically active element, which is preferably formed by a microsystem having mechanically movable micromirrors.
A disadvantage of the solution shown in DE 102017100904 a1 is that the radius of curvature of a typical microsystem with mechanically movable micromirrors is too small to achieve a fully corrected olvudine system. The object of the present invention is to overcome this drawback.
Disclosure of Invention
The above object is achieved by an optical device comprising: a first optical interface for coupling to an objective lens of a microscope; a second optical interface for coupling to an image converter of a microscope, wherein the optical arrangement is designed to configure an optical path from the first optical interface to the second optical interface; a mirror configured to be at least partially recessed; a micro-system having a mechanically movable micro-mirror, wherein the mirror is arranged in the optical path between the first optical interface and the micro-system having a mechanically movable micro-mirror, and wherein the mirror is further arranged in the optical path between the micro-system having a mechanically movable micro-mirror and the second optical interface; at least one optical lens arranged between the mirror and the micro-system with mechanically movable micro-mirrors.
The optical device according to the invention is provided for an electron microscope, wherein the image conversion is realized with an electronic image converter. The electron microscope is preferably a digital microscope. The optical device according to the invention can be designed as an integral component of the microscope or as a module, for example an image conversion module. The optical device according to the invention is designed to achieve an extended depth of field for a photomicrograph of a microscope.
The optical device according to the invention comprises a first optical interface for coupling the optical device to an objective of a microscope. The first optical interface is thus used to configure the optical path from the objective lens to the optical device. The beam path extends in particular from the sample to be microscopic via the objective to the first optical interface of the optical arrangement according to the invention. The microscope may have further components in the beam path, for example a zoom lens group.
The optical device according to the invention further comprises a second optical interface for coupling to an image converter of the microscope. The optical device is configured to configure an optical path from the first optical interface to the second optical interface such that the optical path ultimately extends to the image converter. The optical device may comprise an image converter as a component, then the image converter is preferably arranged at the second optical interface such that the image converter forms the second optical interface.
The optical device further comprises a mirror which is at least partially concavely configured in order to form an improved Oldham system according to the invention. The mirror is preferably constructed completely recessed.
The optical device also includes a micro-system having mechanically movable micro-mirrors. The microsystem forms a convex mirror in a monolithic manner, which is opposite to the at least partially concavely formed mirror, so that the basic principle of the olferon system is realized. The microsystem may also be referred to as a MALS module. The implementation of such microsystems is described in WO 2005/119331A 1 and WO 2007/134264A 2.
The mirror is arranged in the beam path between the first optical interface and the microsystem with the mechanically movable micromirror. As in the case of the olfner system, the beam path extends a second time via an at least partially concavely configured mirror. Correspondingly, a mirror is also arranged in the beam path between the micro system with the mechanically movable micro mirror and the second optical interface. In particular embodiments, the mirrors may also be segmented.
According to the invention, the optical device further comprises at least one optical lens. At least one optical lens is arranged between the mirror and the micro-system with mechanically movable micro-mirrors. At least one optical lens is arranged in an optical path extending between the first optical interface and a microsystem having mechanically movable micromirrors. At least one optical lens is also arranged in the optical path extending between the micro-system with mechanically movable micro-mirrors and the second optical interface. At least one optical lens is used to match the optical path to the dimensions of the microsystem using mechanically movable micromirrors.
A particular advantage of the optical device according to the invention is that it allows to construct an improved offner system with a micro-system with mechanically movable micro-mirrors, which can be used in commonly available sizes.
The at least partially concavely configured mirror and the microsystem with the mechanically movable micromirror are arranged opposite one another. The at least partially concavely configured mirror and the micro-system with the mechanically movable micro-mirror are preferably arranged perpendicular to a common axis. The common axis preferably represents the central axis of the at least partially concavely configured mirror and of the micro-system with the mechanically movable micro-mirror. The at least one optical lens is also preferably arranged perpendicular to the axis. Preferably, the axis also forms the central axis of the at least one optical lens.
The micro-system with the mechanically movable micro-mirrors preferably has a flat base surface on which the micro-mirrors are arranged. The base surface is preferably flat and free of camber.
The optical device according to the invention preferably comprises at least two optical lenses. At least two optical lenses are arranged between the at least partially concavely configured mirror and the microsystem with the mechanically movable micromirrors. The at least two optical lenses are preferably arranged perpendicular to the described common axis. Preferably, the axis also forms the central axis of at least two optical lenses.
The at least two optical lenses preferably comprise two convex-concave lenses. Alternatively, the at least two optical lenses preferably comprise at least one convex-concave lens and one lenticular lens.
In a preferred embodiment of the optical device according to the invention, the at least one optical lens is formed by a converging lens. The at least two optical lenses are preferably each formed by a converging lens.
In a first preferred embodiment of the optical device according to the invention, the at least partially concavely configured mirror is formed by a concave mirror, which is thus of completely concavely configured. The concave mirror is arranged in the beam path between the first optical interface and the microsystem with mechanically movable micromirrors and is also arranged in the beam path between the second optical interface and the microsystem with mechanically movable micromirrors.
In the described first preferred embodiment of the optical device according to the present invention, the two optical lenses are preferably formed of convex-concave lenses, respectively. In the described first preferred embodiment of the optical device according to the invention, the second optical interface is preferably arranged obliquely with respect to an axis of the optical path extending through the second optical interface.
In a second preferred embodiment of the optical device according to the invention, the at least partially concavely configured mirror is formed by a mangin mirror, which is thus of completely concavely configured. The Mangin mirror includes a biconvex lens whose back surface is mirrored.
In the described second preferred embodiment of the optical device according to the present invention, the two optical lenses are preferably formed of convex-concave lenses, respectively. In a second preferred embodiment of the described optical device according to the invention, the second optical interface is preferably arranged obliquely with respect to an axis of the optical path extending through the second optical interface.
In a third preferred embodiment of the optical device according to the invention, the at least partially concavely configured mirror is formed by a concave mirror, which is therefore completely concavely configured.
The third preferred embodiment of the optical device according to the invention described preferably comprises three of the optical lenses, wherein one of the lenses is preferably formed by a biconvex lens and two of the lenses are respectively formed by a convex-concave lens. In the third described preferred embodiment of the optical device according to the invention, the second optical interface is preferably arranged perpendicular to an axis of the optical path extending through the second optical interface.
The optical device according to the invention preferably comprises a first deflection mirror which is arranged in the beam path between the first optical interface and the at least partially concavely configured mirror. As are the three preferred embodiments described. Due to the deflection of the first deflection mirror, the first optical interface can be arranged outside the central axis of the micro system with the mechanically movable micro mirror, so that the optical device can be constructed compactly. The first deflection mirror is preferably located in the same axial position with respect to the central axis of the micro-system with the mechanically movable micro-mirror as the micro-system with the mechanically movable micro-mirror.
The optical device according to the invention preferably comprises a second deflection mirror which is arranged in the beam path between the at least partially concavely configured mirror and the second optical interface. As are the three preferred embodiments described. Due to the deflection of the second deflection mirror, the second optical interface can be arranged outside the central axis of the micro system with the mechanically movable micro mirror, so that the optical device can be constructed compactly. The second deflection mirror is preferably located in the same axial position with respect to the central axis of the micro-system with the mechanically movable micro-mirror as the micro-system with the mechanically movable micro-mirror.
The first deflection mirror and the second deflection mirror are preferably arranged on both sides of a micro-system with mechanically movable micro mirrors. The line connecting the first deflection mirror and the second deflection mirror is preferably perpendicular to the central axis of the micro-system with the mechanically movable micro-mirror. The line also preferably intersects a microsystem having mechanically movable micromirrors. Preferably, the distance between the first deflection mirror and the microsystem with mechanically movable micromirrors is the same as the distance between the second deflection mirror and the microsystem with mechanically movable micromirrors.
The optical device according to the invention preferably comprises an image converter arranged in the second optical interface. The image converter converts a microscopic image to be taken by the microscope. For this purpose, the image converter forms a second optical interface.
The optical device according to the invention is preferably designed as an image conversion module for detachable attachment to a microscope. Thus, the image conversion module forms an assembly that is interchangeable on the microscope. The image conversion module preferably comprises a mechanical interface by means of which a detachable attachment of the image conversion module to the microscope can be achieved. The image conversion module allows to take microscopic images with extended depth of field.
Drawings
Further details and refinements of the invention emerge from the following description of a preferred embodiment of the invention with reference to the drawings. Wherein:
fig. 1 shows a schematic view of a first preferred embodiment of an optical device according to the present invention;
figure 2 shows a schematic view of a second preferred embodiment of an optical device according to the present invention; and is
Fig. 3 shows a schematic view of a third preferred embodiment of the optical device according to the invention.
Detailed Description
Fig. 1 shows a schematic view of a first preferred embodiment of an optical device for a microscope according to the invention. The purpose of the optical arrangement is that a microscope (not shown) can be used to take micrographs with extended depth of field. For this purpose, the optical arrangement comprises a micro-system 01, which micro-system 01 has a mechanically movable micro-mirror (not shown in detail) in a modified osvend arrangement with a concavely shaped mirror 02.
The optical arrangement comprises a first optical interface 06 for coupling an objective lens (not shown) of the microscope. An image of a sample (not shown) to be imaged by the microscope is projected onto the first optical interface 06 by an objective lens (not shown).
The optical device also includes a second optical interface formed by the image converter 07 and inclined with respect to the axis of the optical path.
A first optical lens 08 and a second optical lens 09 are arranged between the mirror 02 and the micro system 01. The optical lenses 08, 09 serve to match the dimensions of the mirror 02 and the optical interfaces 06, 07 to the dimensions of the microsystem 01. The optical lenses 08, 09 are formed of convex-concave lenses.
The optical system comprises a first deflection mirror 11 for deflecting light incident through the first optical interface to the mirror 02. The optical system comprises a second deflection mirror 12 for deflecting the light reflected by the mirror 02 to the image converter 07.
The optical path 13 through the optical device passes through the components of the optical device in the following order: a first optical interface 06, a first deflection mirror 11, a mirror 02, a first optical lens 08, a second optical lens 09, a micro system 01, a second optical lens 09, a first optical lens 08, a mirror 02, a second deflection mirror 12, and finally an image converter 07.
Fig. 2 shows a schematic view of a second preferred embodiment of an optical device according to the present invention. This second preferred embodiment is initially the same as the first preferred embodiment shown in fig. 1. Unlike the first preferred embodiment, the mirror 02 is formed of a mangin mirror. The mirror 02 formed by a mangin mirror comprises a lenticular lens 14, the back of the lenticular lens 14 being specular and therefore representing a concave mirror.
The optical path 13 through the optical device passes through the components of the optical device in the following order: a first optical interface 06, a first deflection mirror 11, a mirror 02, a first optical lens 08, a second optical lens 09, a micro system 01, a second optical lens 09, a first optical lens 08, a mirror 02, a second deflection mirror 12, and finally an image converter 07.
Fig. 3 shows a schematic view of a third preferred embodiment of the optical device according to the invention. This third preferred embodiment is initially the same as the first preferred embodiment shown in fig. 1. Unlike the first preferred embodiment, in this third embodiment, the second optical interface formed by the image converter 07 is not tilted. The optical device includes a third optical lens 16 formed of a biconvex lens in addition to the first optical lens 08 and the second optical lens 09.
The optical path 13 through the optical device passes through the components of the optical device in the following order: a first optical interface 06, a first deflection mirror 11, a third optical lens 16, a mirror 02, a third optical lens 16, a first optical lens 08, a second optical lens 09, a micro-system 01, a second optical lens 09, a first optical lens 08, a third optical lens 16, a mirror 02, a third optical lens 16, a second deflection mirror 12, and finally an image converter 07.
List of reference numerals
01 microsystem with mechanically movable micromirrors
02 mirror
03 -
04 -
05 –
06 first optical interface
07 second optical interface/image converter
08 first optical lens
09 second optical lens
10 -
11 first deflection mirror
12 second deflection mirror
13 optical path
14 biconvex lens
15 -
16 third optical lens

Claims (10)

1. An optical device for a microscope; the optical device includes:
-a first optical interface (06) for coupling to an objective lens of a microscope;
-a second optical interface (07) for coupling to an image converter of a microscope, wherein the optical arrangement is designed for configuring an optical path (13) from the first optical interface (06) to the second optical interface (07);
-an at least partially concavely configured mirror (02);
-a micro system (01) with mechanically movable micro mirrors, wherein the mirror (02) is arranged in the optical path (13) between the first optical interface (06) and the micro system (01) with mechanically movable micro mirrors, and wherein the mirror (02) is further arranged in the optical path (13) between the micro system (01) with mechanically movable micro mirrors and the second optical interface (07),
-at least one optical lens (08, 09, 16) arranged between the mirror (02) and the micro-system (01) with mechanically movable micro-mirrors.
2. Optical device according to claim 1, characterized in that it comprises at least two optical lenses (08, 09, 16) arranged between the mirror (02) and the micro-system (01) with mechanically movable micro-mirrors.
3. Optical device according to claim 2, characterized in that said at least two optical lenses (08, 09, 16) comprise two convex-concave lenses (08, 09) or at least one convex-concave lens (08; 09) and a biconvex lens (16).
4. An optical device according to claim 3, characterized in that the at least one optical lens (08, 09, 16) is formed by a converging lens.
5. Optical device according to claim 1 or 2, characterized in that the mirror (02) is formed by a Mangin mirror (02, 14).
6. An optical device according to claim 1 or 2, characterized in that the mirror (02) is formed by a concave mirror.
7. The optical arrangement according to claim 1 or 2, characterized in that it comprises a first deflection mirror (11) which is arranged in the optical path (13) between the first optical interface (06) and the at least partially concavely configured mirror (02); and the optical device comprises a second deflection mirror (12), wherein the second deflection mirror (12) is arranged in the optical path (13) between the at least partially concavely configured mirror (02) and the second optical interface (07).
8. The optical arrangement according to claim 7, characterized in that the first deflection mirror (11) and the second deflection mirror (12) are arranged on both sides of the micro system (01) with mechanically movable micro mirrors, wherein a straight line connecting (12) of the first deflection mirror (11) and the second deflection mirror perpendicularly intersects the central axis of the micro system (01) with mechanically movable micro mirrors.
9. Optical device according to claim 1 or 2, characterized in that it comprises an image converter (07) arranged in the second optical interface (07).
10. The optical device of claim 9, wherein the optical device is configured as an image conversion module for removable attachment to a microscope.
CN202010516932.7A 2019-06-12 2020-06-09 Optical device for a microscope Pending CN112083563A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102019115931.8 2019-06-12
DE102019115931.8A DE102019115931A1 (en) 2019-06-12 2019-06-12 Optical arrangement for a microscope

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DE (1) DE102019115931A1 (en)

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