CN112082462A - Quick flatness/offset detection device - Google Patents
Quick flatness/offset detection device Download PDFInfo
- Publication number
- CN112082462A CN112082462A CN201910510395.2A CN201910510395A CN112082462A CN 112082462 A CN112082462 A CN 112082462A CN 201910510395 A CN201910510395 A CN 201910510395A CN 112082462 A CN112082462 A CN 112082462A
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- product
- flatness
- offset
- measured
- displacement
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention relates to the technical field of product detection, and particularly discloses a rapid flatness/offset detection device. The rapid flatness/offset detection device comprises a rack, a detection assembly, a driving device and a processing module; wherein, a product jig for placing a product to be tested is arranged on the rack; the detection assembly comprises a bearing frame arranged above the product jig and a plurality of displacement sensors connected to the bearing frame; the driving device drives the bearing frame to move towards the product jig so as to enable each displacement sensor to be in contact with a product to be measured and measure a corresponding displacement value; the processing module is in signal connection with each displacement sensor and calculates the planeness/offset of the product to be measured according to the displacement value measured by each displacement sensor. The rapid flatness/offset detection device can realize rapid detection of flatness/offset of products, and is high in detection efficiency and reliable in detection result.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of product detection, in particular to a rapid flatness/offset detection device.
[ background of the invention ]
Since the flatness and the offset of the product directly affect the assembly of the whole machine and the gap of the whole machine, and even cause other performance abnormalities, the flatness and the offset of the product are usually required to be detected before the product leaves the factory.
The existing product flatness and offset detection methods generally have two types, the first type is as follows: manually detecting the flatness of the product; when detecting the flatness of a product, detecting a plurality of points on the surface of the product to be detected by using the flatness detecting tool and a plug gauge; when the offset detection is carried out, the judgment is carried out by adopting a measuring block. The second is detection using a cubic element. However, the former adopts manual detection, so that the detection process is long, the influence of human factors is large, the data is easy to lose, and the data cannot be recorded; the latter needs to measure one point by one point, the detection process is long, and the product cannot be detected in time during batch detection.
Therefore, it is necessary to design a fast flatness/break detection device to solve the above problems.
[ summary of the invention ]
The invention aims to provide a rapid flatness/offset detection device, which can realize rapid detection of flatness/offset of a product, and has high detection efficiency and reliable detection result.
In order to achieve the purpose, the invention adopts the following technical scheme:
a fast flatness/break detection apparatus comprising:
the device comprises a rack, a positioning device and a positioning device, wherein a product jig for placing a product to be detected is arranged on the rack;
the detection assembly comprises a bearing frame arranged above the product jig and a plurality of displacement sensors connected to the bearing frame;
the driving device drives the bearing frame to move towards the product jig so as to enable each displacement sensor to be in contact with a product to be measured and measure a corresponding displacement value;
and the processing module is in signal connection with each displacement sensor and calculates the planeness/offset of the product to be measured according to the displacement value measured by each displacement sensor.
Further, the device also comprises an analysis module; the analysis module receives the planeness/offset of the product to be detected calculated by the processing module and judges whether the planeness/offset exceeds a preset value range or not; if not, the product to be tested is qualified.
And the display module is used for displaying the displacement value measured by each displacement sensor, the planeness/offset of the product to be detected calculated by the processing module and the analysis result of the analysis module.
Furthermore, the top surface of the product jig is provided with a plurality of limiting columns, and a product to be tested is placed in a limiting area surrounded by the limiting columns.
Further, the top of the spacing column has an inclined guide surface that guides the product into the spacing area.
Furthermore, the displacement sensors are uniformly distributed relative to the surface to be measured of the product to be measured.
Furthermore, the driving device comprises a screw rod, a screw rod nut matched with the screw rod and a servo motor; two ends of the screw rod are rotatably connected with the rack; the screw rod nut is connected with the bearing frame.
Further, the device also comprises a verification block used for verifying each displacement sensor; and the check block is copied with a product to be detected.
The invention has the beneficial effects that: contacting a product to be measured by using a plurality of displacement sensors, and measuring a displacement value; the processing module calculates the planeness/offset of the product to be detected according to the displacement values, the analysis module judges whether the calculation result exceeds a preset value range, and if not, the product to be detected is qualified; therefore, the flatness/offset detection of the product to be detected is completed, the detection efficiency is high, and the detection result is reliable.
[ description of the drawings ]
FIG. 1 is a schematic perspective view of a fast flatness/offset detection apparatus according to the present invention;
FIG. 2 is a front view of the fast flatness/break detection apparatus provided by the present invention;
FIG. 3 is a side view of a fast flatness/discontinuity detection apparatus provided by the present invention;
FIG. 4 is a schematic structural diagram of the fast flatness/discontinuity detection apparatus provided in the present invention in a first state;
FIG. 5 is a schematic structural diagram of the fast flatness/discontinuity detection apparatus provided in the present invention in a second state;
FIG. 6 is a front view of the rapid planarity/offset detection device provided in accordance with the present invention in a second state;
fig. 7 is a schematic diagram of a fast flatness/discontinuity detection apparatus provided by the present invention.
[ detailed description ] embodiments
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
As shown in fig. 1 to 7, a rapid flatness/offset detection apparatus includes a frame 10, a product fixture 20 disposed on the frame 10 and used for placing a product 100 to be detected, a detection assembly 30, a driving device 40, a processing module 50, an analysis module 60, a display module 70, and a calibration block.
Specifically, in order to realize accurate positioning of the product 100 to be tested, a plurality of limiting columns 21 may be disposed on the top surface of the product fixture 20, and the product 100 to be tested is placed in a limiting area surrounded by the limiting columns 21. Further, the top of the limiting column 21 has an inclined guiding surface for guiding the product into the limiting area, so that the product 100 to be tested can be placed smoothly.
The detecting assembly 30 includes a carrier 31 disposed above the product fixture 20 and a plurality of displacement sensors 32 connected to the carrier 31. Further, the displacement sensors 32 are uniformly distributed with respect to the surface to be measured of the product 100 to be measured.
The driving device 40 is used for driving the loading frame 31 to move towards the product jig 20, so that each displacement sensor 32 is in contact with the product 100 to be measured, and measuring a corresponding displacement value. As a preferred scheme of the present invention, the driving device 40 includes a screw rod 41, a screw nut matched with the screw rod 41, and a servo motor 42; two ends of the screw rod 41 are rotatably connected with the frame 10; the spindle nut is connected to the carrier 31.
In order to ensure the detection precision of the rapid flatness/offset detection device, a checking block copying with the product 100 to be detected can be additionally arranged for checking each displacement sensor 32 before the product 100 to be detected is detected. And the planeness/offset of the check surface of the check block is not lower than that of the product 100 to be detected.
The processing module 50 is in signal connection with each displacement sensor 32, and calculates the flatness/offset of the product 100 to be measured according to the displacement value measured by each displacement sensor 32. The analysis module 60 is in signal connection with the processing module 50, and can receive the flatness/offset of the product 100 to be measured calculated by the processing module 50 and judge whether the flatness/offset exceeds a preset value range; if the preset value range is not exceeded, the product 100 to be tested is qualified; if the preset value range is exceeded, the product 100 to be tested is unqualified.
The display module 70 is used for displaying the displacement value measured by each displacement sensor 32, the flatness/offset of the product 100 to be tested calculated by the processing module 50, and the analysis result of the analysis module 60.
In the rapid flatness/offset detection device of the present invention, during detection, a product 100 to be detected is placed on the product fixture 20, as shown in fig. 4; the servo motor 42 drives the screw rod 41 to rotate, so as to drive the carrier 31 and the displacement sensors 32 on the carrier 31 to move downwards, so that the displacement sensors 32 are in contact with the product 100 to be detected, as shown in fig. 5 and 6. Each displacement sensor 32 transmits the measured displacement value to the processing module 50, the processing module 50 calculates the flatness/offset of the product 100 to be measured according to each received displacement value, and transmits the calculation result to the analysis module 60; the analysis module 60 determines whether the calculation result exceeds a preset value range; if the preset value range is not exceeded, the product 100 to be tested is qualified; if the preset value range is exceeded, the product 100 to be tested is unqualified. Therefore, the rapid flatness/offset detection device is simple in structure, greatly improves detection efficiency, and is reliable in detection result.
The technical principles of the present invention have been described above in connection with specific embodiments, which are intended to explain the principles of the present invention and should not be construed as limiting the scope of the present invention in any way. Based on the explanations herein, those skilled in the art will be able to conceive of other embodiments of the present invention without inventive effort, which would fall within the scope of the present invention.
Claims (8)
1. A fast flatness/discontinuity detection device, comprising:
the device comprises a rack, a positioning device and a positioning device, wherein a product jig for placing a product to be detected is arranged on the rack;
the detection assembly comprises a bearing frame arranged above the product jig and a plurality of displacement sensors connected to the bearing frame;
the driving device drives the bearing frame to move towards the product jig so as to enable each displacement sensor to be in contact with a product to be measured and measure a corresponding displacement value;
and the processing module is in signal connection with each displacement sensor and calculates the planeness/offset of the product to be measured according to the displacement value measured by each displacement sensor.
2. The fast flatness/break detection device of claim 1 further including an analysis module; the analysis module receives the planeness/offset of the product to be detected calculated by the processing module and judges whether the planeness/offset exceeds a preset value range or not; if not, the product to be tested is qualified.
3. The apparatus according to claim 2, further comprising a display module for displaying the displacement value measured by each of the displacement sensors, the flatness/offset of the product to be measured calculated by the processing module, and the analysis result of the analysis module.
4. The apparatus according to claim 1, wherein the top surface of the product fixture is provided with a plurality of position-limiting posts, and a product to be tested is placed in a position-limiting area defined by the position-limiting posts.
5. The rapid planarity/offset detection device of claim 4, wherein the top of the restraint posts have inclined guide surfaces that guide product into the restraint area.
6. The fast flatness/break detection device of claim 1, wherein each of the displacement sensors is evenly distributed with respect to a surface to be measured of a product to be measured.
7. The fast flatness/break detection device of claim 1, wherein the driving device includes a lead screw, a lead screw nut and a servo motor matched with the lead screw; two ends of the screw rod are rotatably connected with the rack; the screw rod nut is connected with the bearing frame.
8. The fast flatness/break detection apparatus according to any one of claims 1-7, further comprising a proof mass for checking each of the displacement sensors; and the check block is copied with a product to be detected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910510395.2A CN112082462A (en) | 2019-06-13 | 2019-06-13 | Quick flatness/offset detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910510395.2A CN112082462A (en) | 2019-06-13 | 2019-06-13 | Quick flatness/offset detection device |
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| Publication Number | Publication Date |
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| CN112082462A true CN112082462A (en) | 2020-12-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910510395.2A Pending CN112082462A (en) | 2019-06-13 | 2019-06-13 | Quick flatness/offset detection device |
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| CN (1) | CN112082462A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116989732A (en) * | 2023-09-26 | 2023-11-03 | 山东省建设建工集团装饰装璜有限公司 | Curtain wall flatness measuring equipment |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101126626A (en) * | 2006-08-18 | 2008-02-20 | 鸿富锦精密工业（深圳）有限公司 | Planeness detecting instrument |
| CN103411577A (en) * | 2013-07-16 | 2013-11-27 | 宁波北仑宁润机械有限公司 | Flatness and parallelism measurement device and flatness and parallelism measurement method |
| KR101535516B1 (en) * | 2015-02-09 | 2015-07-09 | 한국철도기술연구원 | Apparatus for Measuring Surface Roughness of Rail Using Acceleration Sensor and Displacement Sensor |
| CN205014947U (en) * | 2015-08-31 | 2016-02-03 | 鸿准精密模具（昆山）有限公司 | Detection apparatus |
| CN106643446A (en) * | 2017-01-04 | 2017-05-10 | 合肥京东方光电科技有限公司 | Flatness detection tool and flatness detection method |
| CN206430712U (en) * | 2017-02-15 | 2017-08-22 | 华东交通大学理工学院 | A kind of flatness automatic detection device |
| CN108827223A (en) * | 2018-07-05 | 2018-11-16 | 天津市勇娜精密机械有限公司 | A kind of end difference machine measuring flatness |
-
2019
- 2019-06-13 CN CN201910510395.2A patent/CN112082462A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101126626A (en) * | 2006-08-18 | 2008-02-20 | 鸿富锦精密工业（深圳）有限公司 | Planeness detecting instrument |
| CN103411577A (en) * | 2013-07-16 | 2013-11-27 | 宁波北仑宁润机械有限公司 | Flatness and parallelism measurement device and flatness and parallelism measurement method |
| KR101535516B1 (en) * | 2015-02-09 | 2015-07-09 | 한국철도기술연구원 | Apparatus for Measuring Surface Roughness of Rail Using Acceleration Sensor and Displacement Sensor |
| CN205014947U (en) * | 2015-08-31 | 2016-02-03 | 鸿准精密模具（昆山）有限公司 | Detection apparatus |
| CN106643446A (en) * | 2017-01-04 | 2017-05-10 | 合肥京东方光电科技有限公司 | Flatness detection tool and flatness detection method |
| CN206430712U (en) * | 2017-02-15 | 2017-08-22 | 华东交通大学理工学院 | A kind of flatness automatic detection device |
| CN108827223A (en) * | 2018-07-05 | 2018-11-16 | 天津市勇娜精密机械有限公司 | A kind of end difference machine measuring flatness |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116989732A (en) * | 2023-09-26 | 2023-11-03 | 山东省建设建工集团装饰装璜有限公司 | Curtain wall flatness measuring equipment |
| CN116989732B (en) * | 2023-09-26 | 2023-12-22 | 山东省建设建工集团装饰装璜有限公司 | Curtain wall flatness measuring equipment |
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Application publication date: 20201215 |