CN112067598B - Low-noise space heterodyne spectrometer for short wave ultraviolet Raman spectrum detection - Google Patents

Low-noise space heterodyne spectrometer for short wave ultraviolet Raman spectrum detection Download PDF

Info

Publication number
CN112067598B
CN112067598B CN202010965092.2A CN202010965092A CN112067598B CN 112067598 B CN112067598 B CN 112067598B CN 202010965092 A CN202010965092 A CN 202010965092A CN 112067598 B CN112067598 B CN 112067598B
Authority
CN
China
Prior art keywords
objective lens
collimating objective
collimating
beam splitter
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202010965092.2A
Other languages
Chinese (zh)
Other versions
CN112067598A (en
Inventor
孟鑫
毛桂林
王静静
王丽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Normal University
Original Assignee
Jiangsu Normal University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Normal University filed Critical Jiangsu Normal University
Priority to CN202010965092.2A priority Critical patent/CN112067598B/en
Publication of CN112067598A publication Critical patent/CN112067598A/en
Application granted granted Critical
Publication of CN112067598B publication Critical patent/CN112067598B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0262Constructional arrangements for removing stray light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/44Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering
    • G01N2021/653Coherent methods [CARS]
    • G01N2021/655Stimulated Raman
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A90/00Technologies having an indirect contribution to adaptation to climate change
    • Y02A90/10Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

A low-noise space heterodyne spectrometer for short wave ultraviolet Raman spectrum detection comprises a front objective lens, a Raman filter, a beam splitter with a diaphragm, a first collimating objective lens, a first reflection grating, a second collimating objective lens, a second reflection grating, a third collimating objective lens and an area array camera. The first collimating objective lens and the third collimating objective lens form a 4f system, and the second collimating objective lens and the third collimating objective lens form a 4f system; after the diffraction spectrum signals reflected by the first grating and the second grating pass through a beam splitter with a diaphragm, only spectrum signals with effective diffraction orders enter an area array camera; the low-noise space heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection can effectively inhibit useless-level stray light of a grating, and improves the signal-to-noise ratio and the sensitivity of short-wave ultraviolet Raman spectrum detection.

Description

Low-noise space heterodyne spectrometer for short wave ultraviolet Raman spectrum detection
Technical Field
The invention relates to the field of optical imaging, in particular to a low-noise space heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection.
Background
The Raman spectrum reflects the internal structure and state characteristics of the molecule, has a fingerprint effect, and is an important means for analyzing the structure of the organic compound. Has important application value in the fields of biomedicine, chemical analysis, pollutant monitoring and the like.
The space heterodyne Raman spectrometer has the advantages of high flux, wide field of view, compact structure and the like, and is an important Raman spectrum testing method developed in recent years. The short wave ultraviolet Raman spectrum has the advantages of high excitation efficiency, weak fluorescence signal, low background noise, resonance enhancement and the like, and is one of important development directions of Raman spectrum. However, when the short-wave ultraviolet spectrum (200 nm-300 nm) is detected, the wavelength is only 1/3-1/2 of that of visible near infrared light, so that the ineffective diffraction orders of the grating are multiplied, and the included angle between adjacent diffraction orders is reduced, thereby increasing stray light of the system, reducing the detection sensitivity of the system, and simultaneously, spectrum false peaks can appear to influence the accuracy of Raman spectrum detection.
Disclosure of Invention
The invention aims to provide a low-noise space heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection, which is used for overcoming the problems existing in the prior art. By arranging the 4f system in the existing Michelson space heterodyne interference structure, invalid diffraction order stray light of the grating is effectively restrained, and sensitivity and accuracy of short wave ultraviolet Raman spectrum detection are improved.
In order to achieve the above purpose, the technical scheme of the invention is as follows:
the low-noise space heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection comprises a front objective lens 1, a Raman filter 2, a beam splitter 3 with a diaphragm, a first collimating objective lens 4, a first reflection grating 5, a second collimating objective lens 6, a second reflection grating 7, a third collimating objective lens 8 and an area array camera 9 which are arranged along an optical path; wherein the geometric center of the beam splitter 3 with the diaphragm is positioned at the center of the image plane of the front objective lens and is also positioned at the front focus positions of the first collimating objective lens 4, the second collimating objective lens 6 and the third collimating objective lens 8; the geometric center of the first reflection grating 5 is positioned at the back focal position of the first collimating objective lens 4, the geometric center of the second reflection grating 7 is positioned at the back focal position of the second collimating objective lens 6, and the photosensitive surface of the area-array camera 9 is positioned at the back focal position of the third collimating objective lens 8.
As a preferred solution, the first collimator objective 4 and the second collimator objective 6 are the same lens.
As a preferred embodiment, the first reflection grating 5 and the second reflection grating 7 are the same grating.
As a preferable technical scheme, when the raman spectrum excitation light source is the same frequency laser incident system, the included angle between the incident light of the first reflection grating 5 and the normal line thereof is a Littrow angle, and the included angle between the incident light of the second reflection grating 7 and the normal line thereof is a Littrow angle.
As a preferable technical scheme, the beam splitter 3 with the diaphragm is composed of a beam splitter and front and rear surface diaphragms, and the adjustment of the light passing width of the beam splitter 3 with the diaphragm is realized by controlling the diaphragm size.
As a preferable technical scheme, the beam splitter consists of two pieces of ultraviolet quartz optical glass or two pieces of ultraviolet plastic glass.
As the preferable technical scheme, the joint of the two lenses is plated with a short wave ultraviolet semi-transparent semi-reflective film.
Compared with the prior art, the invention has the beneficial effects that:
the low-noise space heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection can effectively inhibit invalid diffraction order stray light generated by a grating, and can improve the signal-to-noise ratio of short-wave ultraviolet Raman spectrum detection, thereby improving the sensitivity; meanwhile, the occurrence of a false peak is avoided, and the accuracy of short wave ultraviolet Raman spectrum detection is improved.
Drawings
FIG. 1 is a schematic diagram of a low noise spatial heterodyne spectrometer for short wave ultraviolet Raman spectroscopy according to the present invention.
FIG. 2 is a schematic diagram of a beam splitter with diaphragm in a low noise spatial heterodyne spectrometer for short wave ultraviolet Raman spectrum detection.
Detailed Description
Examples
As shown in fig. 1, the low-noise space heterodyne spectrometer for short-wave ultraviolet raman spectrum detection comprises a front objective lens (1), a raman filter (2), a beam splitter (3) with a diaphragm, a first collimating objective lens (4), a first reflection grating (5), a second collimating objective lens (6), a second reflection grating (7), a third collimating objective lens (8) and an area array camera (9), wherein the front objective lens is arranged along an optical path; the geometrical center of the beam splitter (3) with the diaphragm is positioned at the center of the image plane of the front objective lens and is also positioned at the front focus positions of the first collimating objective lens (4), the second collimating objective lens (6) and the third collimating objective lens (8); the geometric center of the first reflection grating (5) is positioned at the back focus position of the first collimating objective lens (4), the geometric center of the second reflection grating (7) is positioned at the back focus position of the second collimating objective lens (6), and the photosensitive surface of the area array camera (9) is positioned at the back focus position of the third collimating objective lens (8). All optical elements are of coaxial contour with respect to the substrate, i.e. with respect to the optical platform or the instrument base.
Preferably, the first collimator objective (4) and the second collimator objective (6) have the same specifications.
The first collimating objective (4) and the third collimating objective (8) form a 4f system, and the diffraction light wave surface of the first reflecting grating (5) can be imaged on the photosensitive surface of the area-array camera (9); the second collimating objective (6) and the third collimating objective (8) form a 4f system, and the diffraction light wave surface of the second reflecting grating (7) can be imaged on the photosensitive surface of the area-array camera (9).
The first reflection grating (5) and the second reflection grating (7) have the same specification; when the Raman spectrum excitation light source is the same frequency as the laser incidence system, the included angle between the incident light of the first reflection grating (5) and the normal line is Littrow angle, and the included angle between the incident light of the second reflection grating (7) and the normal line is Littrow angle.
As shown in fig. 2, the beam splitter (3) with a diaphragm is composed of a beam splitter, a front surface diaphragm (311) and a rear surface diaphragm (312), and the beam passing width of the beam splitter (3) with a diaphragm can be adjusted by controlling the diaphragm size. The beam splitter (313) is composed of two pieces of ultraviolet quartz optical glass or two pieces of ultraviolet plastic glass, and a short wave ultraviolet semi-transparent semi-reflective film is coated at the joint of the two pieces of lenses.
In use, the first reflection grating (5) and the second reflection grating (7) produce a plurality of orders of diffracted light beams, only one effective diffraction order of the optical signal being detected. If other invalid diffraction order optical signals enter the area array camera (9), stray light and false peaks can be formed, and the sensitivity and the accuracy of short wave ultraviolet Raman spectrum detection are affected. The 4f imaging system formed by the first collimating objective lens (4) and the third collimating objective lens (8) is matched with the beam splitter (3) with the diaphragm, so that invalid diffraction order stray light formed by the first reflection grating (5) can be subjected to filtering treatment. The 4f imaging system formed by the second collimating objective (6) and the third collimating objective (8) is matched with the beam splitter (3) with the diaphragm, so that invalid diffraction order stray light formed by the second reflection grating (7) can be subjected to filtering treatment. The trend of the invalid diffraction order stray light path is shown by a dotted line in fig. 1, and is effectively blocked by the beam splitter (3) with the diaphragm, so that the invalid diffraction order stray light path cannot enter the area camera (9). The invention can effectively inhibit invalid diffraction order stray light generated by the grating, and can improve the signal to noise ratio of short wave ultraviolet Raman spectrum detection, thereby improving the sensitivity; meanwhile, the occurrence of a false peak is avoided, and the accuracy of short wave ultraviolet Raman spectrum detection is improved.
Referring to fig. 1, the low-noise space heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection comprises a front objective lens (1), a Raman filter (2), a beam splitter (3) with a diaphragm, a first collimating objective lens (4), a first reflection grating (5), a second collimating objective lens (6), a second reflection grating (7), a third collimating objective lens (8) and an area array camera (9), wherein the front objective lens is arranged along an optical path; the geometrical center of the beam splitter (3) with the diaphragm is positioned at the center of the image plane of the front objective lens and is also positioned at the front focus positions of the first collimating objective lens (4), the second collimating objective lens (6) and the third collimating objective lens (8); the geometric center of the first reflection grating (5) is positioned at the back focus position of the first collimating objective lens (4), the geometric center of the second reflection grating (7) is positioned at the back focus position of the second collimating objective lens (6), and the photosensitive surface of the area array camera (9) is positioned at the back focus position of the third collimating objective lens (8). All optical elements are of coaxial contour with respect to the substrate, i.e. with respect to the optical platform or the instrument base.

Claims (4)

1. The utility model provides a low noise space heterodyne spectrum appearance that is used for shortwave ultraviolet Raman spectrum to survey which characterized in that: the optical system comprises a front objective (1), a Raman filter (2), a beam splitter (3) with a diaphragm, a first collimating objective (4), a first reflection grating (5), a second collimating objective (6), a second reflection grating (7), a third collimating objective (8) and an area camera (9), wherein the front objective is arranged along an optical path; the geometrical center of the beam splitter (3) with the diaphragm is positioned at the center of the image plane of the front objective lens and is also positioned at the front focus positions of the first collimating objective lens (4), the second collimating objective lens (6) and the third collimating objective lens (8); the geometric center of the first reflection grating (5) is positioned at the back focal position of the first collimating objective lens (4), the geometric center of the second reflection grating (7) is positioned at the back focal position of the second collimating objective lens (6), and the photosensitive surface of the area array camera (9) is positioned at the back focal position of the third collimating objective lens (8); the beam splitter (3) with the diaphragm consists of a beam splitter and diaphragms on the front surface and the rear surface, and the light passing width of the beam splitter (3) with the diaphragm is adjusted by controlling the size of the diaphragm; the beam splitter in the beam splitter (3) with the diaphragm is composed of two pieces of ultraviolet quartz optical glass or two pieces of ultraviolet plastic glass, and a short wave ultraviolet semi-transparent semi-reflective film is coated at the joint of the two pieces of ultraviolet quartz optical glass or the two pieces of ultraviolet plastic glass.
2. A low noise spatial heterodyne spectrometer for short wave ultraviolet raman spectroscopy according to claim 1, wherein: the first collimating objective lens (4) and the second collimating objective lens (6) have the same specification.
3. A low noise spatial heterodyne spectrometer for short wave ultraviolet raman spectroscopy according to claim 1, wherein: the first collimating objective (4) and the third collimating objective (8) form a 4f system, and the diffraction light wave surface of the first reflecting grating (5) can be imaged on the photosensitive surface of the area-array camera (9); the second collimating objective (6) and the third collimating objective (8) form a 4f system, and the diffraction light wave surface of the second reflecting grating (7) can be imaged on the photosensitive surface of the area-array camera (9).
4. A low noise spatial heterodyne spectrometer for short wave ultraviolet raman spectroscopy according to claim 1, wherein: the first reflection grating (5) and the second reflection grating (7) have the same specification; when the Raman spectrum excitation light source is the same frequency as the laser incidence system, the included angle between the incident light of the first reflection grating (5) and the normal line is Littrow angle, and the included angle between the incident light of the second reflection grating (7) and the normal line is Littrow angle.
CN202010965092.2A 2020-09-15 2020-09-15 Low-noise space heterodyne spectrometer for short wave ultraviolet Raman spectrum detection Active CN112067598B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010965092.2A CN112067598B (en) 2020-09-15 2020-09-15 Low-noise space heterodyne spectrometer for short wave ultraviolet Raman spectrum detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010965092.2A CN112067598B (en) 2020-09-15 2020-09-15 Low-noise space heterodyne spectrometer for short wave ultraviolet Raman spectrum detection

Publications (2)

Publication Number Publication Date
CN112067598A CN112067598A (en) 2020-12-11
CN112067598B true CN112067598B (en) 2023-05-23

Family

ID=73696748

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010965092.2A Active CN112067598B (en) 2020-09-15 2020-09-15 Low-noise space heterodyne spectrometer for short wave ultraviolet Raman spectrum detection

Country Status (1)

Country Link
CN (1) CN112067598B (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103033265A (en) * 2012-12-21 2013-04-10 南京理工大学 Device and method of space heterodyning interference hyper spectrum imaging
CN108181237B (en) * 2018-02-05 2019-09-27 中国科学院长春光学精密机械与物理研究所 A kind of light channel structure of space heterodyne Raman spectroscopy instrument
CN108458787B (en) * 2018-02-05 2019-08-23 中国科学院长春光学精密机械与物理研究所 Echelle grating type space heterodyne Raman spectrometer light channel structure
CN108387317A (en) * 2018-03-06 2018-08-10 桂林电子科技大学 A kind of prism-type space heterodyne spectrograph
CN110987898A (en) * 2019-12-06 2020-04-10 中国科学院合肥物质科学研究院 Spatial heterodyne offset Raman spectrum detection device and detection method thereof

Also Published As

Publication number Publication date
CN112067598A (en) 2020-12-11

Similar Documents

Publication Publication Date Title
US7379192B2 (en) Optical metrology of single features
JP5087186B1 (en) Iso-optical path interferometer
US7495762B2 (en) High-density channels detecting device
CN106404713B (en) A kind of miniature near infrared spectrometer of double detector of full spectral coverage 800nm-2500nm
US20040000627A1 (en) Method for focus detection and an imaging system with a focus-detection system
CN113137931B (en) Spectrum confocal device and method capable of measuring surface shape or thickness
CN107561007B (en) Thin film measuring device and method
CN111007054A (en) Raman spectrum detection device with white light imaging function
CN111982884A (en) Compact 266nm shortwave ultraviolet Raman spectrometer
JPS61198012A (en) Surface inspecting device
CN108387317A (en) A kind of prism-type space heterodyne spectrograph
CN111208072A (en) Spectrum system for detecting trace gas concentration
CN112067598B (en) Low-noise space heterodyne spectrometer for short wave ultraviolet Raman spectrum detection
CN110553736A (en) raman spectrometer
CN113189102A (en) Dual-wavelength dual-confocal laser microscopic measurement device and measurement method
CN110849829A (en) Hyperspectral system for gas concentration detection
CN112834480B (en) Confocal Raman system for high-pressure normal-temperature and low-temperature experiments and measurement method thereof
CN211877754U (en) Hyperspectral system for gas concentration detection
CN213336488U (en) Short wave ultraviolet dispersion shearing interference high imaging spectrum device
CN211877753U (en) Spectrum system for detecting trace gas concentration
JP7283170B2 (en) METHOD FOR PREVENTING SPECIFIC NOISE IN SPECTRAL MEASUREMENT DEVICE USING FRANCON TYPE SAVART PLATE, SPECTROSCOPY MEASUREMENT DEVICE, AND SPECTROSCOPY MEASUREMENT METHOD
CN112067597B (en) Remote shortwave ultraviolet Mach-Zehnder space heterodyne Raman spectrometer
CN207976221U (en) A kind of prism-type space heterodyne spectrograph
CN112304920A (en) Low wave number Raman detection system easy for optical adjustment
US20230316679A1 (en) Optical spectroscopy apparatus

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant