CN112066898B - Robot measuring device and measuring method thereof - Google Patents
Robot measuring device and measuring method thereof Download PDFInfo
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- CN112066898B CN112066898B CN202010897538.2A CN202010897538A CN112066898B CN 112066898 B CN112066898 B CN 112066898B CN 202010897538 A CN202010897538 A CN 202010897538A CN 112066898 B CN112066898 B CN 112066898B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
- G01B11/12—Measuring arrangements characterised by the use of optical techniques for measuring diameters internal diameters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2408—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring roundness
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
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Abstract
The invention provides a robot measuring device and a measuring method thereof. The robot measuring device includes: a multi-axis robot; the positioning structure is used for positioning the position of a piece to be detected and feeding back the position information of the piece to be detected to the multi-axis robot; a measuring structure mounted on a robot arm of the multi-axis robot; the measuring structure comprises a measuring frame, a horizontal movement mechanism, a vertical movement mechanism and a connecting frame, wherein the horizontal movement mechanism can be horizontally movably arranged on the measuring frame, and the vertical movement mechanism is arranged on the horizontal movement mechanism; the sensor is arranged on the connecting frame of the measuring structure and used for measuring the size of a piece to be measured; the horizontal movement mechanism can drive the vertical movement mechanism to move along the horizontal direction, and the vertical movement mechanism can also drive the connecting frame to move along the vertical direction, so that the sensor moves to the two sides of the piece to be detected. The size of the piece to be measured is detected, and the accuracy of the measurement result is ensured.
Description
The application is a divisional application with the application date of 2018, month 01 and 22, the application number of 201810059634.2, and the patent name of a robot measuring device and a measuring method thereof.
Technical Field
The invention relates to the technical field of measuring devices, in particular to a robot measuring device and a measuring method thereof.
Background
At present, wheel-set wheels and axles are key components of rolling stock, and are directly related to the normal operation and safety of the rolling stock. The accuracy of the measurement of the diameters of the wheel inner hole and the axle journal directly determines the matching of the wheel, the axle and the bearing and the press-fitting quality of the wheel and the bearing. However, the existing measuring device has the problems of complex structure and low measuring precision caused by inconvenient measurement, and the accuracy of the measuring result is influenced.
Disclosure of Invention
Therefore, it is necessary to provide a robot measuring device with simple structure, convenient operation, installation and maintenance and high measuring accuracy for solving the problems of complicated structure and low measuring accuracy caused by inconvenient measurement of the existing measuring device, and also provide a robot measuring method using the robot measuring device.
The above purpose is realized by the following technical scheme:
a robotic measuring device, comprising:
a multi-axis robot;
the positioning structure is used for positioning the position of a piece to be detected and feeding back the position information of the piece to be detected to the multi-axis robot;
The measuring structure is arranged on a mechanical arm of the multi-axis robot, and the multi-axis robot drives the measuring structure to move to the part to be measured according to the position information of the part to be measured; the measuring structure comprises a measuring frame, a horizontal movement mechanism, a vertical movement mechanism and a connecting frame, wherein the horizontal movement mechanism can be horizontally movably arranged on the measuring frame, and the vertical movement mechanism is arranged on the horizontal movement mechanism;
the sensor is arranged on the connecting frame of the measuring structure and used for measuring the size of a piece to be measured; the horizontal movement mechanism can drive the vertical movement mechanism to move along the horizontal direction, and the vertical movement mechanism can also drive the connecting frame to move along the vertical direction, so that the sensor moves to the two sides of the piece to be detected.
In one embodiment, the horizontal movement mechanism comprises a horizontal motor, a horizontal linear guide rail arranged on the measuring frame, and a transition support sliding along the horizontal linear guide rail, the horizontal motor is arranged on the measuring frame, and the horizontal motor drives the transition support to move along the horizontal linear guide rail.
In one embodiment, the vertical movement mechanism comprises a vertical motor and a vertical linear guide rail arranged on the transition support, the vertical motor is arranged on the transition frame, the connecting frame is connected to the vertical linear guide rail, and the vertical motor drives the connecting frame to move along the vertical linear guide rail.
In one embodiment, the number of the connecting frames is two, the two connecting frames are symmetrically arranged on the vertical movement mechanism, the number of the sensors is at least two, and the at least two sensors are respectively arranged on the two connecting frames;
the vertical movement mechanism drives the two connecting frames to synchronously move downwards, so that the two connecting frames are positioned on two sides of the piece to be detected.
In one embodiment, the measuring structure further comprises proximity switches, and the proximity switches are symmetrically arranged on the measuring frame and used for limiting the horizontal movement of the horizontal motor.
In one embodiment, the robot measuring device further comprises an AGV transport vehicle, the multi-axis robot is arranged on the AGV transport vehicle, and the AGV transport vehicle drives the multi-axis robot and the measuring structure to move to the position of the piece to be measured;
the sensor is a laser sensor; the positioning structure comprises a camera or a camera head.
In one embodiment, the robotic measuring device further comprises a flange mounted to a robotic arm of the multi-axis robot for mounting the measuring structure.
In one embodiment, the positioning structure is mounted to the multi-axis robot or the positioning structure is mounted to the measurement structure with its centre line located in a central section of symmetry of the measurement structure; alternatively, the positioning structure is independent of the multi-axis robot.
A robot measuring method applied to the robot measuring device according to any one of the above features, the robot measuring method comprising the steps of:
collecting the position of a piece to be detected to obtain the position information of the piece to be detected;
feeding back the position information of the piece to be detected to the multi-axis robot;
controlling the multi-axis robot to drive the measuring structure to move to the position of the piece to be measured according to the position information;
controlling the sensor to measure at least once;
and collecting the measurement data of the sensor to obtain the size of the piece to be measured.
In one embodiment, the step of controlling the sensor to measure at least once comprises:
controlling a horizontal motor to drive a transition support to move to a position of a measuring section; controlling a vertical motor to drive a connecting bracket to run up and down for three times, and scanning by a sensor to obtain three curves which are fed back to an upper computer; the upper computer software calculates the maximum value of the diameter of the piece to be measured of the measured section for each curve, and the average value of the three maximum values is taken as the first measured diameter value of the section;
The multi-axis robot drives the measuring structure to rotate for 90 degrees by taking the central line of the piece to be measured as a center;
controlling the horizontal motor and the vertical motor to move and scan again to obtain three curves, feeding the three curves back to the upper computer, and calculating a diameter value of the section measured for the second time by the upper computer;
the upper computer takes the average value of the diameter values measured twice as the diameter value of the measured section, and takes half of the difference between the diameter values measured twice as the roundness of the measured section.
In one embodiment, the positioning structure is a camera; the robot measuring method further comprises the following steps:
controlling an AGV conveying vehicle to drive the robot measuring device to travel to the position of the piece to be measured, and enabling the multi-axis robot to drive the measuring structure and the positioning structure to travel to the position away from the specified distance of the piece to be measured;
controlling the positioning structure to photograph the piece to be measured, and calculating the positioning center position of the piece to be measured by computer system software;
controlling the multi-axis robot to drive the measuring structure to be accurately placed at a required measuring position to measure the piece to be measured;
after the AGV finishes measuring, the AGV transports to the next to measure the position of the piece to be measured.
After the technical scheme is adopted, the invention has the beneficial effects that:
the robot measuring device and the measuring method thereof adopt the positioning structure to automatically position the position of the piece to be measured and feed back the position information of the piece to be measured to the robot; the robot drives the measuring structure to move to a part to be measured, the sensors are driven to move through the numerical value moving mechanism, the horizontal moving mechanism and the connecting frame, the sensors are enabled to move to two sides of the part to be measured, and then the size of the part to be measured is detected through the sensors; the problem that the existing measuring device is complex in structure and low in measuring precision caused by inconvenience in measurement is effectively solved, so that the measuring precision is improved, the accuracy of a measuring result is ensured, and the subsequent assembling quality of a piece to be measured is further ensured.
Drawings
Fig. 1 is a schematic structural diagram of a robot measuring device according to an embodiment of the present invention for measuring an inner hole of a workpiece;
FIG. 2 is a schematic cross-sectional front view of a measurement structure in the robotic measuring device of FIG. 1;
FIG. 3 is a bottom schematic view of the measurement configuration of FIG. 2 with the cover removed;
FIG. 4 is a schematic front view of the measurement structure of FIG. 2 with the outer cover removed;
FIG. 5 is a perspective view of a robotic measuring device according to another embodiment of the present invention;
FIG. 6 is a perspective view of the robotic measuring device of FIG. 5 with a vision positioning structure and sensors mounted to the measurement structure;
wherein:
100-a robotic measuring device;
110-a multi-axis robot;
120-a visual positioning structure;
130-a measurement structure;
131-an inner bore measuring head; 1311-disc; 1312-a housing;
132-a self-centering mechanism; 1321-a driver; 1322-a drive assembly; 13221-rotating arm; 13222-a spindle; 13223-bearing; 1323-a centering assembly; 13231-rotating disc; 13232-ram; 13233-linear slide rail; 13234-a roller; 13235-stretch elastic;
133-a connecting seat;
134-a compensation mechanism; 1341-a connecting flange; 1342-a rotating member; 1343-compensating spring; 1344-an adjustable end cap;
131' -a measuring stand;
132' -a horizontal movement mechanism; 1321' -a horizontal motor; 1322' -horizontal linear guides;
133' -a transitional scaffold;
134' -a vertical movement mechanism; 1341' -a vertical motor; 1342' -vertical linear guides;
135' -connecting frame;
136' -proximity switches;
140-a laser sensor;
150-transition flange; 150' -a flange;
160-robot mount; 160' -AGV transport vehicle;
170-calibrating the structure;
200. 200' -the piece to be tested.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the robot measuring device and the measuring method thereof according to the present invention are further described in detail below by way of embodiments and with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1 and 5, the present invention provides a robot measuring device 100, and the robot measuring device 100 is used for measuring a dimension of a workpiece, such as the diameter of an inner hole or the diameter of an outer circle. The robot measuring device 100 of the invention is mainly used for detecting the diameters of inner holes of wheels and bearings of a locomotive and the diameter of an outer circle of a shaft neck of a wheel pair, so as to ensure the accuracy and reliability of a detection result and further ensure the press-fitting quality of parts to be detected, such as wheels, bearings and the like. Of course, the robotic measuring device 100 of the present invention is not limited to the detection of the diameters of the inner bore and the outer circle of the locomotive part, and can also be used to detect the sizes of other parts having inner bores and outer circles.
In the present invention, the robotic measuring device 100 includes a multi-axis robot 110, a vision positioning structure 120, a measuring structure 130, and a sensor. The measuring structure 130 is mounted on a mechanical arm of the multi-axis robot 110, and the multi-axis robot 110 can drive the measuring structure 130 to move to a position to be measured. The multi-axis robot 110 is used to realize the motion driving of the visual positioning structure 120 and the measurement structure 130. The measuring structure 130 is used for measuring the inner hole diameter or the outer circle diameter of the piece to be measured, and the measuring structure 130 is arranged at the output end of the multi-axis robot 110. The sensor is disposed on the measuring structure 130 for measuring the size of the object to be measured. The multi-axis robot 110 has a plurality of serially connected rotation axes, that is, the multi-axis robot 110 has a plurality of degrees of freedom, and the working space of the serially connected rotation axes is large, so that the mechanical arms of the multi-axis robot 110 can move to any position, and further the measuring structure 130 is driven to move to the position of the piece to be measured, so as to detect the inner hole diameter or the outer circle diameter of the piece to be measured. It is understood that the multi-axis robot 110 is generally a four-axis, five-axis, six-axis robot to meet the motion requirements of different occasions.
The visual positioning structure 120 is used for positioning the position of the object to be measured and feeding back the position information of the object to be measured to the multi-axis robot 110. It is understood that the visual positioning structure 120 may be mounted on the robotic arm of the multi-axis robot 110 and may also be mounted on the measurement structure 130. Of course, in other embodiments of the present invention, the visual positioning structure 120 may also be independently disposed, when in use, the visual positioning structure 120 moves to the position of the object to be tested, and after the use, the visual positioning structure 120 is far away from the object to be tested. The visual positioning structure 120 is used for identifying the position information of the to-be-measured object, such as identifying the center of the to-be-measured object, so as to realize accurate center positioning of the to-be-measured object, and then the visual positioning structure 120 can feed back the position information of the to-be-measured object to the multi-axis robot 110; the multi-axis robot 110 drives the measurement structure 130 to move according to the position information fed back by the visual positioning structure 120. When measuring the diameter of the inner hole, the multi-axis robot 110 drives the measuring structure 130 to extend into the inner hole of the piece to be measured; when measuring the diameter of the outer circle, the multi-axis robot 110 drives the measuring structure 130 to be located outside the workpiece to be measured. The outer circle diameter or the inner bore diameter is then measured by a sensor on the measurement structure 130. Preferably, the sensor is laser sensor 140, realizes the measurement of hole diameter and excircle diameter through laser sensor 140, and laser sensor 140 is non-contact sensor, and measuring element among laser sensor 140 is not fragile, and moreover, data acquisition is rapid, has shortened operating time greatly. Illustratively, the visual positioning structure 120 includes a camera, and the camera photographs the to-be-detected piece to accurately position the center of the to-be-detected piece. Of course, in other embodiments of the present invention, the visual positioning structure 120 includes, but is not limited to, a camera or the like.
When robot measuring device 100 measures the hole diameter of the piece that awaits measuring, visual positioning structure 120 can set up on multiaxis robot 110's arm, when visual positioning structure 120 carries out accurate center location to the hole of the piece that awaits measuring, positioning accuracy height can reach 0.02mm to make multiaxis robot 110 drive measurement structure 130 can be accurate and stretch into the hole easily, need not to set up wheel centering device and wheel positioning device alone, and degree of automation is high, and easy operation, and convenient for maintenance and installation. When robot measuring device 100 is measured the excircle diameter of the piece that awaits measuring, visual positioning structure 120 can set up on measuring structure 130, when visual positioning structure 120 carries out accurate centering to the center of the piece that awaits measuring, positioning accuracy can reach 0.02mm high, make multiaxis robot 110 drive and measure the required measuring position of placing that structure 130 is accurate, need not to set up complicated mechanical structure etc. like this, in the time of saving space, make operation flow simplify, and high automation degree, and convenient for maintenance and installation.
The robot measuring device 100 of the invention adopts the multi-axis robot 110 to drive the measuring structure 130 to move so as to realize the measurement of the diameter of the outer circle or the diameter of the inner hole, thus increasing the intelligence of the robot measuring device 100, leading the robot measuring device 100 to have high automation degree and improving the measuring efficiency. Moreover, the multi-axis robot 110 can drive the vision positioning structure 120 and the measurement structure 130 to move, and different working requirements can be met. In addition, when the multi-axis robot 110 is matched with the visual positioning structure 120, the measuring structure 130 and the sensor to realize the measurement of the diameter of the inner hole or the diameter of the outer circle, the visual positioning structure 120 is adopted to automatically position the position of the piece to be measured, and the position information of the piece to be measured is fed back to the robot; the robot drives the measuring structure 130 to move to a part to be measured, and the size of the part to be measured is detected through a sensor on the measuring structure 130; the problem that the existing measuring device is complex in structure and low in measuring precision caused by inconvenience in measurement is effectively solved, so that the measuring precision is improved, the accuracy of a measuring result is ensured, and the subsequent assembling quality of a piece to be measured is further ensured. Moreover, the robot measuring device 100 of the present invention has a high degree of automation and is convenient to operate, install and maintain.
Since there is a certain difference between the measurement structure 130 when measuring the inner hole diameter and the outer circle diameter, the specific structure of the measurement structure 130 when measuring the inner hole diameter and the specific structure of the measurement structure 130 when measuring the outer circle diameter are described one by one.
Referring to fig. 1 to 4, in an embodiment of the present invention, the robotic measuring device 100 measures the inner bore diameter of the object 200, where the inner bore of the object 200 includes, but is not limited to, the inner bore of a wheel, the inner bore of a bearing, and the like.
As an implementation manner, the measuring structure 130 includes an inner bore measuring head 131 and an automatic centering mechanism 132 disposed on the inner bore measuring head 131, and the automatic centering mechanism 132 is used for centering the inner bore measuring head 131. The sensor is disposed on the bore measurement head 131. After the vision positioning structure 120 accurately positions the center of the inner hole of the piece to be measured 200, the multi-axis robot 110 drives the inner hole measuring head 131 to extend into the inner hole of the piece to be measured 200, the inner hole measuring head 131 is accurately positioned in the center through the automatic centering mechanism 132, the axis of the inner hole measuring head 131 is ensured to coincide with the axis of the inner hole of the piece to be measured 200, the inner hole measuring head 131 is prevented from inclining to a certain direction, then the diameter of the inner hole of the piece to be measured 200 is detected through a sensor, and the accuracy of the measuring result of the sensor is ensured. In this embodiment, the multi-axis robot 110 is a four-axis robot, and the sensor is a laser sensor 140.
Illustratively, the inner bore measuring head 131 includes a disk 1311 and a cover 1312, the self-centering mechanism 132 is mounted on the disk 1311, and the cover 1312 is disposed on the disk 1311 and surrounds the self-centering mechanism 132. The disk 1311 is used to mount the self-centering mechanism 132 and the laser sensor 140, and the cover 1312 can cover the laser sensor 140 and a part of the self-centering mechanism 132. An irradiation hole is formed in the outer cover 1312, and laser emitted by the laser sensor 140 can be irradiated and received through the irradiation hole to realize detection of the inner hole diameter. It will be appreciated that the number of laser sensors 140 is two, two laser sensors 140 are arranged in the same radial direction, and the housing 1312 is provided with corresponding irradiation holes. Thus, the two laser sensors 140 emit laser to detect the diameter of the inner hole, and after the inner hole measuring head 131 extends into the inner hole of the piece to be measured 200 and the automatic centering is completed, the data of the laser sensors 140 are directly collected to complete one-time measurement. Also, a second measurement of the same cross section is performed by rotating the robot arm of the multi-axis robot 110 by 90 °. The average value of the values obtained by two times of measurement and calculation is the diameter of the section, and half of the absolute value of the difference of the values obtained by two times of measurement is the roundness of the section.
Further, the automatic centering mechanism 132 includes a driving member 1321, a transmission assembly 1322 and a centering assembly 1323, the driving member 1321 is mounted on the inner hole measuring head 131, the transmission assembly 1322 is in transmission connection with the driving member 1321 and the centering assembly 1323, the centering assembly 1323 is movably mounted on the inner hole measuring head 131, and the driving member 1321 drives the centering assembly 1323 through the transmission assembly 1322 to coincide the axis of the inner hole measuring head 131 with the axis of the inner hole of the to-be-measured member 200. The driving component 1321 is a power source of the self-centering mechanism 132, the transmission component 1322 can transmit the power of the driving component 1321, and the centering component 1323 can realize the centering of the inner hole measuring head 131. The multi-axis robot 110 drives the inner hole measuring head 131 to penetrate into the inner hole of the to-be-measured piece 200, the driving piece 1321 drives the transmission component 1322 to move, and then the transmission component 1322 drives the centering component 1323 to move, so that the centering component 1323 moves relative to the inner hole measuring head 131 to center the inner hole measuring head 131, and the axis of the inner hole measuring head 131 coincides with the axis of the inner hole of the to-be-measured piece 200. Then, the inner hole diameter of the piece to be measured 200 is detected through the laser sensor 140, and the accuracy of the inner hole diameter measurement result is guaranteed. Preferably, the driving member 1321 may be an air cylinder, a cylinder body of the air cylinder is disposed on the inner bore measuring head 131, and an extending end of the air cylinder is connected to the transmission assembly 1322 to drive the transmission assembly 1322 to move; of course, in other embodiments of the invention, the driver 1321 may also be a magnet, a motor, or the like. Illustratively, the driving member 1321 is disposed on a side of the disk 1311 away from the housing 1312, the driving assembly 1322 extends through the disk 1311 in an axial direction and into a chamber defined by the housing 1312, and the centering assembly 1323 is mounted on the driving assembly 1322 and is disposed in the housing 1312.
Still further, the transmission assembly 1322 comprises a rotating shaft 13222 and a rotating arm 13221, one end of the rotating arm 13221 is hinged to the driving element 1321, the other end of the rotating arm 13221 is fixedly connected to the rotating shaft 13222, the rotating shaft 13222 rotatably penetrates through the inner hole measuring head 131 in the axial direction to extend out, and the centering assembly 1323 is installed on the rotating shaft 13222. The rotatable arm 13221 cooperates with the rotatable shaft 13222 to transmit motion to drive the centering assembly 1323. Illustratively, the rotating shaft 13222 penetrates through the disk 1311 of the inner bore measuring head 131 in the axial direction and extends into the outer cover 1312, and the centering assembly 1323 is mounted on the rotating shaft 13222. Optionally, the rotating shaft 13222 is mounted on the inner bore measuring head 131 through a bearing 13223, so that interference between the rotating shaft 13222 and the disk 1311 of the inner bore measuring head 131 during rotation can be avoided, stable and reliable rotation of the rotating shaft 13222 is ensured, and accurate centering of the centering assembly 1323 is further ensured.
Furthermore, the centering assembly 1323 includes a turntable 13231 and a plurality of ejector rods 13232 slidably disposed on the inner bore measurement head 131, the turntable 13231 is mounted on the rotation shaft 13222, an outer contour of the turntable 13231 has a plurality of protrusions uniformly distributed, and the plurality of ejector rods 13232 correspond to the plurality of protrusions, respectively. The driving component 1321 drives the rotating shaft 13222 to rotate and the turntable 13231 to rotate through the rotating arm 13221, and the protrusion of the turntable 13231 contacts with the ejector pin 13232 and makes the ejector pin 13232 extend and abut against the inner wall of the inner hole of the to-be-tested piece 200. The protrusions on the rotary disk 13231 have identical round trip curves, and a concave part is arranged between two adjacent protrusions. When the centering component 1323 does not center the piece to be tested 200, the end part of the ejector pin 13232 is positioned in the concave part of the turntable 13231; when the centering assembly 1323 centers the to-be-measured piece 200, the driving member 1321 drives the rotating shaft 13222 to rotate through the rotating arm 13221, and then the rotating shaft 13222 drives the rotating disc 13231 to rotate, because the end part of the ejector rod 13232 is always abutted to the outer contour of the rotating disc 13231, the contact position of the ejector rod 13232 and the rotating disc 13231 is changed into a protrusion from the concave part of the rotating disc 13231, in the process, the rotating disc 13231 can gradually eject the ejector rod 13232 outwards until the other end of the ejector rod 13232 is abutted to the inner wall of the inner hole of the to-be-measured piece 200, the accurate centering of the inner hole measuring head 131 is ensured, the axis of the inner hole measuring head 131 is coincided with the axis of the inner hole of the to-be-measured piece 200, and the inner hole measuring head 131 is prevented from deviating to one side. It will be appreciated that the turntable 13231 and the shaft 13222 may be keyed or interference fit, etc.
Fig. 4 is a schematic front view of the measuring structure with the outer cover 1312 removed, showing the position where the top bar 13232 abuts against the inner hole of the dut 200. Optionally, the number of the ejector pins 13232 is 2n, where n is greater than or equal to 2, the 2n ejector pins 13232 are uniformly distributed, a preset distance exists between the projections of the end portions of the two adjacent ejector pins 13232 far away from the turntable 13231 in the axial direction of the rotating shaft 13222, and the projections of the end portions of the two opposite ejector pins 13232 far away from the turntable 13231 in the axial direction of the rotating shaft 13222 coincide. That is, the distance from the end of the two adjacent top rods 13232 far away from the turntable 13231 to the disc 1311 is different, and the distance from the end of the two opposite top rods 13232 far away from the turntable 13231 to the disc 1311 is the same. That is, the projections of the outer ends of the adjacent jack bars 13232 in the vertical direction shown in fig. 4 are located on the cross sections of different heights, and the projections of the outer ends of the opposite jack bars 13232 in the vertical direction shown in fig. 4 are located on the cross sections of the same height. Therefore, the inner hole measuring head 131 can be accurately positioned in the center, and the axis of the inner hole measuring head 131 is superposed with the axis of the inner hole of the piece to be measured 200, so that the inner hole measuring head 131 is prevented from inclining to a certain side. Illustratively, the number of protrusions on the turntable 13231 is four, four protrusions are evenly distributed, and the corresponding ejector pins 13232 are also four and are arranged in a one-to-one correspondence with the four protrusions. The two sets of ends of the ejector pin 13232 are respectively at the positions a and b shown in fig. 4, and the positions a and b are not on the same cross section, so as to ensure that the axis of the inner hole measuring head 131 coincides with the axis of the inner hole of the piece to be measured 200, and prevent the inner hole measuring head 131 from deflecting to a certain side. When the turntable 13231 protrudes to jack up the ejector pin 13232, the other end of the ejector pin 13232 can be extended out and is abutted with the inner hole of the piece to be tested 200, and the end parts of the four ejector pins 13232 are respectively tightly jacked through the positions a and b. Optionally, the outer cover 1312 is provided with a plurality of through holes, the through holes correspond to the plurality of ejector rods 13232, and the turntable 13231 rotates to make the ejector rods 13232 extend out of the through holes and abut against the inner wall of the inner hole of the device under test 200.
Referring to fig. 1 to 4, optionally, a linear slide 13233 is disposed on the disc 1311 of the inner bore measuring head 131, and the top bar 13232 is slidably disposed on the linear slide 13233. The top rod 13232 can move linearly along the linear slide rail 13233, so that the movement track of the top rod 13232 is accurate, and the centering is accurate and reliable. Still optionally, the centering assembly 1323 further comprises a roller 13234, and the roller 13234 is disposed on an end of the top bar 13232 contacting the protrusion. The rollers 13234 can reduce excessive wear between the ejector 13232 and the turntable 13231, and ensure service performance. Still optionally, the centering assembly 1323 further includes a tensile elastic member 13235, one end of the tensile elastic member 13235 is connected to the ejector 13232, and the other end of the tensile elastic member 13235 is connected to the disk 1311 of the inner bore measuring head 131. The tension elastic member 13235 always generates a tension force, so that the carrier bar 13232 always abuts on the outer contour of the turntable 13231 through the roller 13234. Illustratively, the tension spring 13235 is a tension spring.
As an implementation manner, the measuring structure 130 further includes a connecting seat 133 and a compensating mechanism 134, the connecting seat 133 is mounted on the disc 1311 of the inner bore measuring head 131, the compensating device is mounted on the connecting seat 133, and the compensating mechanism 134 is connected with the mechanical arm of the multi-axis robot 110. The compensation mechanism 134 can swing freely, so that the axis of the inner hole measuring head 131 is highly overlapped with the axis of the inner hole of the to-be-measured part 200, the phenomenon that the mechanical arm of the multi-axis robot 110 is not overlapped with the axis of the inner hole measuring head 131 to form reverse acting force in the center positioning process is avoided, the axle center overlapping degree is high, and the failure rate is low.
Further, compensation mechanism 134 includes flange 1341, rotary part 1342 and a plurality of compensation elastic component 1343, flange 1341 connects on multiaxis robot 110's the arm, and rotary part 1342's one end is connected in flange 1341, and rotary part 1342's the other end is connected with connecting seat 133, and a plurality of compensation elastic components 1343 are along axial direction evenly distributed between flange 1341 and connecting seat 133. The rotating component 1342 enables the connecting seat 133 and the inner bore measuring head 131 thereon to swing freely, and simultaneously limits the swing amplitude of the connecting seat 133 through a plurality of compensation elastic components 1343, so that the inner bore measuring head 131 is in a floating state, and fine adjustment according to the centering state of the automatic centering mechanism 132 ensures that the axis of the inner bore measuring head 131 coincides with the axis of the inner bore of the to-be-measured part 200. Illustratively, the number of the compensating elastic pieces 1343 is six, and the compensating elastic pieces 1343 are compression springs or rubber springs. Also, rotating member 1342 may be a universal joint, a swivel bearing, or other structure capable of achieving a rotational connection.
Still further, the compensation mechanism 134 further includes a plurality of adjustable end caps 1344, and the plurality of adjustable end caps 1344 are respectively disposed at two ends of the compensation elastic member 1343. The adjustable end cap 1344 can adjust the pre-pressure of the corresponding compensation elastic member 1343 to ensure that the inner bore measuring head 131 is in a vertical state.
As an implementation, the robot measuring device 100 further includes a transition flange 150, and the measuring structure 130 is indirectly mounted on the mechanical arm of the multi-axis robot 110 through the transition flange 150; that is, the transition flange 150 is connected to the connecting flange 1341 of the compensation mechanism 134, so that the inner bore measuring head 131 and the automatic centering mechanism 132 are mounted on the arm of the multi-axis robot 110. Also, a visual alignment structure 120 is mounted on the transition flange 150.
The robot measuring device 100 of the present invention may be used for measuring the inner hole diameter of the to-be-measured object 200 in the production line, and further, the robot measuring device 100 further includes a robot mounting base 160, and the multi-axis robot 110 is disposed on the robot mounting base 160. Moreover, the robot mounting seat 160 is disposed at one side of the production line to detect the inner hole diameter of the to-be-detected piece 200 on the production line, and of course, the robot mounting seat 160 of the present invention may also be an AGV (Automated Guided Vehicle) that drives the multi-axis robot 110 to move to any detection position by the AGV, so as to facilitate the detection of the to-be-detected piece 200. Furthermore, the robot measuring device 100 further includes a calibration structure 170, the calibration structure 170 is disposed beside the robot mounting seat 160, and a calibrated inner hole diameter of the calibration structure 170 is used as a calibration size of the inner hole diameter of the object 200.
In this embodiment, the multi-axis robot 110 of the robot measuring device 100 carries the visual positioning structure 120 to move above the conveying line of the to-be-measured object 200, the visual positioning structure 120 photographs the inner hole of the to-be-measured object 200, and the precise position of the inner hole of the to-be-measured object 200 is calculated through computer system software. Then the multi-axis robot 110 carries the inner hole measuring head 131 to accurately extend into the inner hole of the piece to be measured 200, and an independent wheel centering and positioning device is not needed, so that the operation is simple, the automation degree is high, and the installation and maintenance are convenient.
Moreover, the outer diameter of the outer cover 1312 contained in the inner hole measuring head 131 is about 5mm smaller than the inner diameter of the inner hole of the to-be-measured piece 200, so that the inner hole measuring head 131 can easily extend into the inner hole of the to-be-measured piece 200, and then the driving piece 1321 of the automatic centering mechanism 132 acts and the turntable 13231 rotates through the transmission of the rotating arm 13221 and the rotating shaft 13222, so that the protrusion of the turntable 13231 simultaneously pushes the ejector pin 13232 tightly pressed on the outer circle surface of the turntable 13231 to tightly push against the inner wall of the inner hole of the to-be-measured piece 200, and because the end part of the ejector pin 13232 is tightly pressed on the two sections a and b, the axis of the inner hole measuring head 131 can be accurately positioned in the center, and the axis of the inner hole of the to-be-measured piece 200 can be coincided, and the inner hole 131 is prevented from inclining to one direction. The advantage that the compensation mechanism 134 can swing freely is utilized in the center positioning process, the height coincidence of the axis of the inner hole measuring head 131 and the axis of the inner hole of the to-be-measured part 200 is realized, the radial reaction force formed by the misalignment of the axes of the mechanical arm of the multi-axis robot 110 and the inner hole measuring head 131 in the center positioning process is avoided, the coincidence degree of the axes is high, and the failure rate is low.
Then, the robot measuring device 100 can complete one-time measurement by directly collecting data of the laser sensors after the inner hole measuring head 131 extends into the inner hole of the piece to be measured 200 and the automatic centering is completed through the two laser sensors along the same diameter direction. Also, a second measurement of the same cross section is performed by rotating the robot arm of the multi-axis robot 110 by 90 °. The average value of the values obtained by two times of measurement and calculation is the diameter of the section, and half of the absolute value of the difference of the values obtained by two times of measurement is the roundness of the section.
Referring to fig. 5 and 6, in another embodiment of the present invention, the robotic measuring device 100 measures the diameter of the outer circle of the object 200', where the outer circle of the object 200' includes, but is not limited to, a journal, a dust guard seat, and the like.
As an implementation manner, the measuring structure 130 includes a measuring frame 131', a horizontal movement mechanism 132', a vertical movement mechanism 134', and a connecting frame 135', the horizontal movement mechanism 132' is horizontally movably disposed on the measuring frame 131', the vertical movement mechanism 134' is disposed on the horizontal movement mechanism 132', the connecting frame 135' is disposed on the vertical movement mechanism 134', and the sensor is disposed on the connecting frame 135 '. The horizontal moving mechanism 132' can drive the vertical moving mechanism 134' to move along the horizontal direction, and the vertical moving mechanism 134' can also drive the connecting frame 135' to move along the vertical direction, so that the sensor can move to two sides of the to-be-measured piece 200', such as a shaft neck. The measuring rack 131 'serves as a load-bearing connection, and other components of the measuring structure 130 are disposed in the measuring rack 131'. The horizontal movement mechanism 132' is disposed in the measuring rack 131' and can make horizontal movement in the measuring rack 131 '; the vertical movement mechanism 134 'is arranged on the horizontal movement mechanism 132', the horizontal movement mechanism 132 'drives the vertical movement mechanism 134' to move horizontally in the measuring frame 131', and the vertical movement mechanism 134' can drive the connecting frame 135 'for installing the sensor to move up and down, so that the sensor is placed at a position to be measured of the piece to be measured 200', and the diameter of the excircle of the piece to be measured 200 'is detected through the sensor on the connecting frame 135'. Furthermore, the measuring rack 131 'is connected to the output end of the multi-axis robot 110, and the multi-axis robot 110 drives the measuring structure 130 to move to two sides of the to-be-measured object 200', such as a shaft neck, and the outer circle diameter is detected by the sensor on the measuring structure 130. Illustratively, the multi-axis robot 110 is a six-axis robot and the sensor is a laser sensor 140.
Illustratively, the number of the connection frames 135 'is two, two connection frames 135' are symmetrically disposed on the vertical movement mechanism 134', the number of the laser sensors 140 is at least two, and at least two laser sensors 140 are respectively disposed on the two connection frames 135'. The vertical movement mechanism 134 'drives the two connecting frames 135' to descend synchronously, so that the two connecting frames 135 'can be located at two sides of the shaft neck of the to-be-tested object 200'.
Further, the horizontal moving mechanism 132' includes a horizontal motor 1321', a horizontal linear rail 1322' disposed on the measuring rack 131', and a transition support 133' sliding along the horizontal linear rail 1322', a horizontal motor 1321' disposed on the measuring rack 131', and the horizontal motor 1321' drives the transition support 133' to move along the horizontal linear rail 1322 '. The vertical movement mechanism 134' includes a vertical motor 1341' and a vertical linear rail 1342' disposed on the transition bracket 133', the vertical motor 1341' is disposed on the transition bracket 133', the connecting frame 135' is connected to the vertical linear rail 1342', and the vertical motor 1341' drives the connecting frame 135' to move along the vertical linear rail 1342 '. The horizontal motor 1321 'drives the transition support 133' to slide along the horizontal linear guide 1322', and further drives the vertical motor 1341' and the vertical linear guide 1342 'to move horizontally, so as to realize the detection of different section diameters of the to-be-detected part 200', such as a shaft neck; the vertical motor 1341' drives the connecting frame 135' to move along the vertical linear guide 1342', and the diameter of the outer circle of the to-be-detected piece 200' is detected by the laser sensors 140 on the two connecting frames 135 '.
In this embodiment, when the device under test 200 'is a shaft neck and a dust guard base, two laser sensors 140 are disposed on each connecting frame 135' to simultaneously detect the diameters of the outer circles of the shaft neck and the dust guard base. When the diameter of the outer circle of the journal is measured, the four laser sensors 140 can meet the measurement requirements of the journal and the dust guard seat. During measurement, the laser sensor 140 scans the outer surfaces of the journal and the dust guard radially and downwards, and the maximum value of the calculated data is the diameter size. The laser sensor 140 can realize rapid data acquisition, and greatly shortens the working time. Of course, in other embodiments of the present invention, the robot measuring device 100 may be symmetrically disposed on both sides of the workpiece 200', and the diameter of the outer circle of the shaft journals on both sides of the workpiece 200' may be measured.
Optionally, the measuring structure 130 further includes a proximity switch 136', and the proximity switch 136' is disposed on the measuring rack 131 'and used for limiting the horizontal movement of the horizontal motor 1321'. The proximity switch 136' is disposed at a corresponding position of the measuring rack 131' as a front and rear limit for the horizontal movement of the horizontal motor 1321 '. Illustratively, the proximity switches 136 'are disposed on the left and right sides of the transition bracket 133', and when the horizontal motor 1321 'drives the transition bracket 133' to move horizontally and the horizontal motor 1321 'drives the transition bracket 133' to move to the left limit position, the proximity switches 136 'act to stop the rotation of the horizontal motor 1321'; when the horizontal motor 1321 'drives the transition bracket 133' to move to the right limit position, the proximity switch 136 'acts to stop the horizontal motor 1321', so that the horizontal overtravel operation is avoided, and the movement reliability is ensured.
As an implementation manner, the robot measuring device 100 further includes an AGV transport vehicle 160', the multi-axis robot 110 is disposed on the AGV transport vehicle 160', and the AGV transport vehicle 160 'drives the multi-axis robot 110 and the measuring structure 130 to move to the position of the to-be-measured object 200'. The AGV transport vehicle 160' drives the multi-axis robot 110 and the measuring structure 130 to move to any required piece to be measured, so that the measuring requirements of different occasions are met.
Optionally, in order to facilitate the connection of the measuring structure 130 to the robot arm of the multi-axis robot 110, the robot measuring device 100 further includes a flange 150', and the measuring structure 130 is mounted on the robot arm of the multi-axis robot 110 through the flange 150'. Furthermore, the visual positioning structure 120 is mounted on the measuring structure 130, and the central axis of the visual positioning structure 120 is located on the symmetrical center section of the measuring structure 130, so as to ensure that the symmetrical center section coincides with the positioning central axis.
The robot measuring device 100 of the embodiment walks to the position of the object 200 'to be measured by the AGV transport vehicle 160', the multi-axis robot 110 carries the measuring structure 130 and the visual positioning structure 120 to travel to a position away from the shaft end of the object 200 'by a specified distance, the camera included in the visual positioning structure 120 photographs the object 200' to be measured stored on the track, such as the shaft end of a wheel, the positioning center position of the object 200 'to be measured is calculated by computer system software, and then the multi-axis robot 110 carries the measuring structure 130 to be accurately placed at the required measuring position to measure the object 200', such as the shaft neck and the dust guard seat. After one measurement of the test object 200' is completed, the AGV transport vehicle 160' travels to the position of the next test object 200' stored on the track to measure it. The robot measuring device 100 of the present invention has the advantages of simple structure, small occupied space, simplified operation process, high automation degree and convenient installation and maintenance.
After the measuring structure 130 is placed at the measuring position, the horizontal motor 1321 'drives the transition bracket 133' to operate to the first cross section measuring position, then the vertical motor 1341 'drives the connecting bracket 135' to operate up and down three times, the laser sensor 140 scans to obtain three curves, the maximum value of the diameter of the journal of the cross section is calculated for each curve through upper computer software, and the average value of the maximum values of the three times is taken as the first diameter measuring value of the cross section; then, the multi-axis robot 110 drives the measuring structure 130 to rotate 90 ° around the central line of the workpiece 200' such as a journal (i.e. the center of the visual positioning structure 120), and scans again to obtain three curves and calculate a second measured diameter value of the cross section, where the average of the two measured diameter values is used as the diameter value of the cross section, and a half of the difference between the two measured diameter values is used as the roundness of the cross section. The above steps are repeated to measure the second section diameter of the part 200' to be measured, such as a shaft journal, and the diameter of the dust guard seat.
The present invention further provides a robot measuring method applied to the robot measuring device 100 in any of the above embodiments, the robot measuring method including the steps of:
collecting the position of a piece to be detected to obtain the position information of the piece to be detected;
Feeding back the position information of the to-be-measured part to the multi-axis robot 110;
controlling the multi-axis robot 110 to drive the measuring structure 130 to move to the position of the workpiece to be measured according to the position information;
controlling the sensor to measure at least once;
and collecting the measurement data of the sensor to acquire the size of the piece to be measured.
The robot measuring device 100 of the present invention photographs the position of the object to be measured through the visual positioning structure 120 to obtain the position information of the object to be measured, such as identifying the center of the object to be measured, so as to realize the accurate center positioning of the object to be measured; then, the visual positioning structure 120 can feed back the position information of the to-be-measured object to the multi-axis robot 110; the multi-axis robot 110 drives the measuring structure 130 to move according to the position information fed back by the visual positioning structure 120, and moves to the position of the object to be measured; the measurement is completed by scanning the laser sensor 140 on the measuring structure 130, and the size of the workpiece can be determined according to the data collected by the laser sensor 140. It is understood that when the laser sensor 140 scans for a plurality of times, the average value of the plurality of measurements is the diameter of the workpiece.
It can be understood that the robot measuring device 100 of the present invention is also externally connected with an operating device such as a computer for automatic control and data collection and processing.
The technical features of the embodiments described above can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. A robotic measuring device, comprising:
a multi-axis robot;
the positioning structure is used for positioning the position of a piece to be detected and feeding back the position information of the piece to be detected to the multi-axis robot;
the measuring structure is arranged on a mechanical arm of the multi-axis robot, and the multi-axis robot drives the measuring structure to move to the part to be measured according to the position information of the part to be measured; the measuring structure comprises a measuring frame, a horizontal movement mechanism, a vertical movement mechanism and a connecting frame, wherein the horizontal movement mechanism can be horizontally movably arranged on the measuring frame, and the vertical movement mechanism is arranged on the horizontal movement mechanism;
The sensor is arranged on the connecting frame of the measuring structure and used for measuring the size of a piece to be measured; the horizontal motion mechanism can drive the vertical motion mechanism moves along the horizontal direction, and the vertical motion mechanism can also drive the connecting frame moves along the vertical direction, so that the sensor moves to the two sides of the piece to be detected, and the diameter of the excircle of the piece to be detected is detected.
2. The robot measuring device of claim 1, wherein the horizontal moving mechanism comprises a horizontal motor, a horizontal linear guide rail disposed on the measuring rack, and a transition bracket sliding along the horizontal linear guide rail, the horizontal motor is disposed on the measuring rack, and the horizontal motor drives the transition bracket to move along the horizontal linear guide rail.
3. The robotic measuring device of claim 2, wherein the vertical movement mechanism comprises a vertical motor and a vertical linear guide rail disposed on the transition support, the vertical motor is disposed on the transition frame, the connecting frame is connected to the vertical linear guide rail, and the vertical motor drives the connecting frame to move along the vertical linear guide rail.
4. The robot measuring device according to any one of claims 1 to 3, wherein the number of the connecting frames is two, two connecting frames are symmetrically arranged on the vertical movement mechanism, the number of the sensors is at least two, and at least two sensors are respectively arranged on the two connecting frames;
the vertical movement mechanism drives the two connecting frames to synchronously move downwards, so that the two connecting frames are positioned on two sides of the piece to be measured.
5. A robot measuring device according to claim 2 or 3, characterized in that the measuring structure further comprises proximity switches symmetrically arranged on the measuring frame for limiting the horizontal movement of the horizontal motor.
6. The robot measuring device according to any one of claims 1 to 3, further comprising an AGV transport vehicle, wherein the multi-axis robot is disposed on the AGV transport vehicle, and the AGV transport vehicle drives the multi-axis robot and the measuring structure to move to the position of the piece to be measured;
the sensor is a laser sensor; the positioning structure comprises a camera or a camera.
7. A robotic measuring device as claimed in any of claims 1 to 3, wherein the locating structure is mounted to the multi-axis robot or wherein the locating structure is mounted to the measuring structure with its centre line located in a section of the measuring structure at the centre of symmetry; alternatively, the positioning structure is independent of the multi-axis robot.
8. A robot measuring method applied to the robot measuring apparatus according to any one of claims 1 to 7, the robot measuring method comprising the steps of:
collecting the position of a piece to be detected to obtain the position information of the piece to be detected;
feeding back the position information of the piece to be detected to the multi-axis robot;
controlling the multi-axis robot to drive the measuring structure to move to the position of the piece to be measured according to the position information;
controlling the sensor to measure at least once;
and collecting the measurement data of the sensor to obtain the size of the piece to be measured.
9. The robotic measuring method of claim 8, wherein the step of controlling the sensor to measure at least once comprises:
controlling a horizontal motor to drive a transition support to move to a position of a measuring section; controlling a vertical motor to drive a connecting bracket to run up and down for three times, and scanning by a sensor to obtain three curves which are fed back to an upper computer; the upper computer software calculates the maximum value of the diameter of the piece to be measured of the measured section for each curve, and the average value of the three maximum values is taken as the first measured diameter value of the section;
The multi-axis robot drives the measuring structure to rotate for 90 degrees by taking the central line of the piece to be measured as a center;
controlling the horizontal motor and the vertical motor to move and scan again to obtain three curves, feeding the three curves back to the upper computer, and calculating a diameter value of the section measured for the second time by the upper computer;
the upper computer takes the average value of the diameter values measured twice as the diameter value of the measured section, and takes half of the difference between the diameter values measured twice as the roundness of the measured section.
10. A robotic measurement method as claimed in claim 8, wherein the positioning structure is a camera; the robot measuring method further comprises the following steps:
controlling an AGV conveying vehicle to drive the robot measuring device to travel to the position of the piece to be measured, and enabling the multi-axis robot to drive the measuring structure and the positioning structure to travel to the position away from the piece to be measured by the specified distance;
controlling the positioning structure to photograph the piece to be measured, and calculating the positioning center position of the piece to be measured by computer system software;
controlling the multi-axis robot to drive the measuring structure to be accurately placed at a required measuring position to measure the piece to be measured;
after the AGV finishes measuring, the AGV transports to the next to measure the position of the piece to be measured.
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| CN202010897538.2A CN112066898B (en) | 2018-01-22 | 2018-01-22 | Robot measuring device and measuring method thereof |
| CN201810059634.2A CN108458663B (en) | 2018-01-22 | 2018-01-22 | Robot measuring device and measuring method thereof |
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| CN108917657A (en) * | 2018-09-26 | 2018-11-30 | 常州利腾机械有限公司 | A kind of laser multi-diameter shaft testing apparatus for verticality |
| CN110081821A (en) * | 2019-05-09 | 2019-08-02 | 西南交通大学 | Intelligent high-speed rail white body assembling quality detection device and its method |
| CN111879207B (en) * | 2020-07-24 | 2022-01-07 | 惠州建安工程项目管理有限公司 | High-precision pile hole aperture detection device for supervision |
| CN112276926A (en) * | 2020-11-03 | 2021-01-29 | 张梅 | Mechanical arm driving mechanism |
| CN112461128A (en) * | 2020-11-09 | 2021-03-09 | 哈尔滨工业大学芜湖机器人产业技术研究院 | Impeller welding mold detection device and method |
| CN113376647B (en) * | 2021-06-08 | 2024-04-26 | 东北大学 | Blast hole measurement auxiliary equipment and application method thereof |
| CN113654776A (en) * | 2021-07-22 | 2021-11-16 | 重庆锦鹏得祥机电设备有限公司 | Valve body hole data automatic acquisition device |
| CN114034479B (en) * | 2021-11-10 | 2023-11-24 | 西安航天动力试验技术研究所 | Low Wen Xingmian in-situ measurement system and method for key components of low-temperature equipment |
| CN114216401B (en) * | 2021-12-13 | 2024-01-05 | 苏州肯美特设备集成股份有限公司 | Diameter measuring device for semiconductor material device |
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| US6289600B1 (en) * | 1999-11-02 | 2001-09-18 | United States Pipe & Foundry Company | Non-contact measuring device |
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| CN108458663A (en) | 2018-08-28 |
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