CN112050954B

CN112050954B - Temperature measuring device

Info

Publication number: CN112050954B
Application number: CN201910485973.1A
Authority: CN
Inventors: 徐荣和; 张哲豪
Original assignee: C Sun Manufacturing Ltd
Current assignee: C Sun Manufacturing Ltd
Priority date: 2019-06-05
Filing date: 2019-06-05
Publication date: 2022-06-24
Anticipated expiration: 2039-06-05
Also published as: CN112050954A

Abstract

The invention discloses a temperature measuring device, comprising: at least one support member; the temperature sensing component comprises a balance rod, a sensing piece and an elastic piece, the balance rod is connected with the supporting component through a fulcrum and arranged below the supporting component, one end of the balance rod is connected with the elastic piece, the other end of the balance rod is connected with the sensing piece, the end part of the sensing piece is higher than the supporting component in a normal state, and when the sensing piece bears torque relative to the fulcrum, the elastic piece stores elastic potential energy; when the moment is released, the elastic part releases the elastic potential energy to restore the sensing part to the original position. The temperature measuring device can perform full-automatic and real-time temperature monitoring and reduce various factors of temperature measurement.

Description

Temperature measuring device

Technical Field

The present invention relates to a temperature measuring device, and more particularly, to a temperature measuring device with real-time monitoring.

Background

The temperature monitoring of the heat-treated object is often not real-time while the thermal process is being performed. Conventionally, a sample to be tested is taken, a temperature sensing member is manually adhered to the surface of the sample to be tested, the sample to be tested is sent into a thermal process device, and the measured temperature data is estimated as the data of an actual thermal process. This is time and labor consuming, and the temperature measurement point may lose accuracy due to possible offset of manual adhesion. Most importantly, none of the estimated data can replace the actual process temperature data, which indicates that the real production thermal process lacks real-time temperature monitoring.

Disclosure of Invention

The invention aims to solve various problems of a known temperature measuring device and provides a real-time monitoring temperature measuring device.

To achieve the above and other objects, the present invention provides a temperature measuring device, comprising: at least one support member; the temperature sensing component comprises a balance rod, a sensing piece and an elastic piece, wherein the balance rod is connected with the supporting component through a fulcrum and is arranged below the supporting component, one end of the balance rod is connected with the elastic piece, the other end of the balance rod is connected with the sensing piece, the end normality of the sensing piece is higher than that of the supporting component, and when the sensing piece bears torque relative to the fulcrum, the elastic piece stores elastic potential energy; when the moment is released, the elastic part releases the elastic potential energy to enable the sensing part to recover the original position.

Optionally, the support member includes a frame body and a support body, the support body is supported above the frame body, and the support point is connected below the frame body.

Optionally, the height adjustment device further comprises an adjustment member connected to the elastic member, wherein the adjustment member applies an adjustment torque to the fulcrum to adjust the height of the sensing member.

Optionally, there are two of the supporting members and four of the temperature sensing members, the supporting members are long and arranged parallel to each other, and two ends of each supporting member are respectively provided with the temperature sensing members.

Optionally, a temperature recording module is further included, connected to the temperature sensing member.

Therefore, the temperature measuring device can be used for carrying out full-automatic and real-time temperature monitoring and reducing various factors of temperature measurement.

For a better understanding of the features and technical content of the present invention, reference is made to the following detailed description of the invention and the accompanying drawings, which are provided for illustration purposes only and are not intended to limit the scope of the invention in any way.

Drawings

Fig. 1 is a schematic view of an unsupported state of a temperature measuring device according to an embodiment of the present invention.

Fig. 2 is a schematic supporting state diagram of a temperature measuring device according to an embodiment of the invention.

Fig. 3 is a schematic perspective view of a temperature measuring device according to an embodiment of the invention.

Reference numerals:

100 temperature measuring device

1 support member

11 frame body

12 support body

2 temperature sensing member

21 balance bar

211 fulcrum

22 sensing element

221 end portion

23 resilient member

3 adjusting member

4 temperature recording module

S analyte

Detailed Description

For a fuller understanding of the present invention, reference should be made to the following detailed description taken in conjunction with the accompanying drawings. The purpose, characteristics and function of the present invention will be understood by those skilled in the art from the disclosure of the present specification. It is to be understood that the invention may be practiced or applied to other embodiments, and that various changes, modifications, and alterations may be made in the details of this description without departing from the spirit thereof. The drawings attached to the present invention are for simplicity and illustrative purposes only, and are not drawn to scale. The following embodiments will further explain the related art of the present invention in detail, but the disclosure is not intended to limit the claims of the present invention. The description is as follows:

as shown in fig. 1 to 3, a temperature measuring apparatus 100 according to an embodiment of the present invention includes: at least one support member 1 and at least one temperature sensing member 2.

The supporting member 1 is used to support the object S, and the supporting member 1 may be in point contact or line contact with the object S. Preferably, the object S is a sheet-shaped glass plate or a silicon substrate, but the invention is not limited thereto.

The temperature sensing member 2 includes a balance bar 21, a sensing member 22, and an elastic member 23. The stabilizer bar 21 is connected to the support member 1 at a fulcrum 211 and provided below the support member 1. One end of the balance bar 21 is connected with an elastic member 23, and the other end of the balance bar 21 is connected with a sensing member 22. As shown in fig. 1, the end 221 of the sensing member 22 is normally (i.e. in the case that the supporting member 1 does not support any object S) a little higher than the supporting member 1.

As shown in fig. 2, when the supporting member 1 supports the object S, the end portion 221 is pressed down to contact the object S to sense the temperature of the object S, and at this time, the sensing element 22 is subjected to a moment relative to the supporting point 211, so that the elastic element 23 stores elastic potential energy. When the torque is released (the object S is removed), the elastic member 23 releases the elastic potential energy to restore the sensing member 22. At this time, the end 221 is restored to be slightly higher than the support member 1 again for the next temperature sensing.

With the temperature measuring device 100 of the present invention, when the object S is fed onto the supporting member 1 of the thermal processing apparatus in a fully automatic manner (using a robot arm, etc.), the temperature sensing member 2 can directly record the real-time temperature monitoring in the whole process. In the process, full-automatic and real-time temperature monitoring can be performed without manual work, and various factors of temperature measurement are reduced.

Further, in one embodiment, the supporting member 1 includes a frame body 11 and a supporting body 12, the supporting body 12 is carried on the upper side of the frame body 11, and a supporting point 211 is connected to the lower side of the frame body 11. As shown in fig. 2, the support 12 is shaped to achieve a minimum area contact with the test object S.

Further, in one embodiment, as shown in fig. 1 and 2, the temperature measuring apparatus 100 further includes an adjusting member 3. The adjusting member 3 is connected with the elastic part 23 and applies an adjusting moment relative to the fulcrum 211 to adjust the height of the sensing part 22. For example, the adjusting member 3 may comprise a bolt, and the adjusting torque is changed by the depth of the bolt screwing down, and the height of the sensing member 22 is correspondingly changed.

Further, in one embodiment, as shown in fig. 1 and fig. 2, the temperature measuring apparatus 100 further includes a temperature recording module 4 connected to the temperature sensing member 2 for analyzing and recording the temperature data measured by the temperature sensing member 2.

A supporting member 1 and a temperature sensing member 2 may constitute a temperature measuring apparatus 100, but the present invention is not limited thereto. As shown in fig. 3, in a preferred embodiment, the temperature measuring apparatus 100 has two supporting members 1 and four temperature sensing members 2, the supporting members 1 are elongated and parallel to each other, and the temperature sensing members 2 are respectively disposed at two ends of each supporting member 1. When the object S is placed on the supporting member 1, the temperature sensing member 2 can respectively sense four points to be measured of the object S. However, the present invention is not limited thereto, and the temperature measuring apparatus 100 may include more sets of the supporting member 1 and the temperature sensing member 2, and the position of the temperature sensing member 2 may also be changed at will.

While the invention has been disclosed in terms of preferred embodiments, it will be understood by those skilled in the art that the examples are illustrative only and should not be taken as limiting the scope of the invention. It should be noted that all changes and substitutions equivalent to the described embodiments are intended to be included within the scope of the present invention. Therefore, the protection scope of the present invention is defined by the following claims.

Claims

1. A temperature measuring device, comprising:

at least one support member; and

at least one temperature sensing component, including a balance bar, a sensing piece and an elastic piece, wherein the balance bar is connected with the supporting component by a fulcrum and is arranged below the supporting component, one end of the balance bar is connected with the elastic piece, the other end of the balance bar is connected with the sensing piece, the end of the sensing piece is higher than the supporting component in a normal state, and when the sensing piece is subjected to a moment relative to the fulcrum, the elastic piece stores elastic potential energy; when the moment is relieved, the elastic part releases the elastic potential energy to enable the sensing part to restore to the original position.

2. The temperature measuring device of claim 1, wherein the supporting member comprises a frame and a supporting body, the supporting body is supported on the frame, and the supporting point is connected to the frame.

3. The temperature measuring device of claim 1, further comprising an adjusting member coupled to the elastic member, the adjusting member applying an adjusting torque to the fulcrum to adjust a height of the sensing member.

4. The temperature measuring device according to claim 1, wherein there are two of the supporting members and four of the temperature sensing members, the supporting members are elongated and arranged in parallel with each other, and the temperature sensing members are respectively provided at both ends of each of the supporting members.

5. The temperature measuring device of claim 1, further comprising a temperature recording module coupled to the temperature sensing member.