CN112041651A

CN112041651A - Detection platform, system and method for laser beam focus

Info

Publication number: CN112041651A
Application number: CN201880090442.6A
Authority: CN
Inventors: 张瑶; 胡康军
Original assignee: Shenzhen Royole Technologies Co Ltd
Current assignee: Shenzhen Royole Technologies Co Ltd
Priority date: 2018-03-27
Filing date: 2018-03-27
Publication date: 2020-12-04
Also published as: WO2019183797A1

Abstract

An inspection platform (100) for a laser beam focus, an inspection system and an inspection method based on the inspection platform (100), wherein the inspection platform (100) comprises: the laser detection device comprises a base (310), wherein a plurality of detection layers (130) at different heights are arranged on the base (310), and the detection layers (130) are used for being irradiated by laser beams to form irradiation traces. The detection platform (100) can conveniently detect the focus of the laser beam and has low cost.

Description

Detection platform, system and method for laser beam focus

Technical Field

The invention relates to the technical field of laser processing, in particular to a detection platform, a system and a method for a laser beam focus.

Background

In the laser processing field, if the relative position of the laser beam focus and the workpiece can be rapidly and accurately detected, the production of processing equipment and the efficiency of material processing are improved. There are two main methods for detecting focus in the industry at present: and (4) detecting according to an empirical visual inspection and an instrument.

Generally speaking, the spot brightness of a laser beam reflected by a metal plate is observed through empirical visual inspection, and the method for detecting the focus has the defects that the focusing accuracy depends on operators, the operation errors are easy to generate, the time consumption is long, and the like, and the eyes are easy to be injured. The defects of continuous adjustment of the height of the instrument, complex operation steps, high equipment cost and the like exist in the detection of the instrument equipment.

Disclosure of Invention

The technical problem to be solved by the embodiments of the present invention is to provide a platform and a system for detecting a laser beam focus. The focus of the laser beam can be conveniently detected, and the cost is low.

In order to solve the above technical problem, an embodiment of a first aspect of the present invention provides a detection platform for a laser beam focus, including:

the laser beam irradiation device comprises a base, wherein a plurality of detection layers at different heights are arranged on the base, and the detection layers are used for laser beam irradiation to form irradiation traces.

In a second aspect, an embodiment of the present invention provides a system for detecting a focal point of a laser beam, including:

the above-mentioned detection platform;

a laser generator for generating a laser beam.

According to a third aspect of the present invention, there is provided a method for detecting a focal point of a laser beam, including:

providing an inspection platform, wherein the inspection platform comprises a plurality of inspection layers located at different heights;

and moving the laser generator to enable the laser beam of the laser generator to irradiate on each detection layer to form an irradiation trace.

The embodiment of the invention has the following beneficial effects:

since a plurality of detection layers at different heights are formed on the base, the detection layers are used for being irradiated by laser beams to form irradiation traces. Therefore, the laser emitted by the laser beam is irradiated on the detection layers with different heights, and the focal position of the laser beam can be detected according to the irradiation marks on the detection layers. Compared with the existing visual inspection method, the visual inspection method has the advantages that the dependence on field operators is reduced, errors caused by human factors are effectively avoided, meanwhile, the tedious steps that the height of the detection platform needs to be adjusted ceaselessly during operation are reduced, the operation time is saved, and the working efficiency is improved; compared with the existing instrument and equipment detection method, the detection platform can be obtained in a production workshop without purchasing other equipment, so that the cost is greatly reduced, and the detection is very simple and convenient.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic view of a detection platform for detecting the focus of a laser beam according to a first embodiment of the present invention;

FIG. 2 is a top view of a detection platform for detecting the focus of a laser beam according to a first embodiment of the present invention;

FIGS. 3 a-3 c are schematic views of a first embodiment of the present invention after a laser beam is irradiated on a detection layer at different heights;

FIG. 4 is a schematic view of a system for detecting the focal point of a laser beam according to a first embodiment of the present invention;

FIG. 5 is a flowchart of a method for detecting a focal point of a laser beam according to a first embodiment of the present invention;

FIG. 6 is a schematic view of a detection platform for detecting the focus of a laser beam according to a second embodiment of the present invention;

reference numbers of the drawings:

100. 300-a detection platform; 110-a substrate; 120-a tie layer; 130-a detection layer; 140-step; 200-a laser generator; 310-base.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The terms "comprising" and "having," and any variations thereof, as appearing in the specification, claims and drawings of this application, are intended to cover non-exclusive inclusions. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those steps or elements listed, but may alternatively include other steps or elements not listed, or inherent to such process, method, article, or apparatus. Furthermore, the terms "first," "second," and "third," etc. are used to distinguish between different objects and are not used to describe a particular order.

First embodiment

Referring to fig. 1 and 2, an embodiment of the present invention provides a detection platform 100 for a focus of a laser beam, where the detection platform 100 includes a base.

In this embodiment, a plurality of detection layers 130 at different heights are disposed on the base, each detection layer 130 has a different height from the laser generator, the detection layer 130 is used for irradiating the laser beam to form an irradiation trace, and fig. 3(a), 3(b), and 3(c) illustrate the irradiation trace formed after the detection layer 130 at different heights is irradiated by the laser beam, so that the position of the focus of the laser beam can be determined according to the difference of the irradiation trace.

Specifically, when a laser beam is irradiated onto the detection layer 130, a linear pattern or a pattern having another shape is formed on the detection layer 130, and the focal position of the laser beam can be determined by observing the formed irradiation trace with a microscope. Because the energy of the focal position of the laser beam is high and the energy of other positions is low, when different positions of the laser beam are irradiated on the detection layer 130 with different heights, the closer to the focal position of the laser beam, the more neat and clear the irradiation traces on the detection layer 130, and the farther from the focal position of the laser beam, the more uneven and fuzzy the irradiation traces on the detection layer 130. Therefore, the focal position of the laser beam can be determined by observing the irradiation trace of the detection layer 130 at different positions after the laser beam is irradiated by a microscope, fig. 3a, 3b and 3c are pictures of the irradiation trace observed by the microscope, and in the irradiation trace of fig. 3a, 3b and 3c, the irradiation trace of fig. 3c is relatively clear, so that the detection layer 130 at the position of fig. 3c can be determined to be irradiated by the focal point of the laser beam, and the focal point of the laser beam can be determined, for example, the distance from the light emitting point of the laser generator to the detection layer 130 of fig. 3c can be obtained by calculation.

In the present embodiment, since the base is provided with a plurality of detection layers 130 at different heights, the detection layers 130 are used for forming the irradiation traces by the laser beam irradiation. Thus, the laser beam emitted from the laser beam is irradiated onto the detection layer 130 having different heights, and the focal position of the laser beam can be detected based on the irradiation mark on the detection layer 130. Compared with the existing visual inspection method, the visual inspection method has the advantages that the dependence on field operators is reduced, errors caused by human factors are effectively avoided, meanwhile, the tedious steps that the height of the detection platform needs to be adjusted ceaselessly during operation are reduced, the operation time is saved, and the working efficiency is improved; compared with the existing instrument and equipment detection method, the detection platform can be obtained in a production workshop without purchasing other equipment, so that the cost is greatly reduced, and the detection is very simple and convenient.

In this embodiment, the plurality of detection layers 130 are discontinuously distributed, and adjacent detection layers 130 are spaced apart from each other. Specifically, the base is formed with a plurality of steps 140 of different heights, specifically 6 steps 140 in fig. 1, although in other embodiments of the invention, more steps or fewer steps may be formed. In this embodiment, the detection layers 130 are located on the corresponding steps 140, specifically on the tread of the steps 140, and the detection layers 130 are parallel to each other, where the orientation of the detection layers 130 is transverse. Of course, in other embodiments of the present invention, the orientation of the detection layer may be in other directions. Because the detection layer 130 is discontinuous distribution, in this embodiment, the adjacent detection layer 130 is separated by a connection surface, and the orientation of the connection surface is different from the orientation of the adjacent detection layer 130, where the connection surface is the kick surface of the step 140, and the orientation of the connection surface is longitudinal.

In this embodiment, the base comprises a plurality of substrates 110, each substrate 110 is in a strip shape, and a plurality of substrates 110 are stacked together and form a plurality of steps 140 on the same side, in this case, a plurality of steps 140 are formed on the right side. In the present embodiment, each of the base materials 110 is aligned on the left side after being stacked, and the length of the base material 110 gradually increases from the top to the bottom on the right side to form the step 140, that is, the kick portion of the upper step 140 in any two adjacent steps 140 is located inside the kick portion of the lower step 140, that is, the kick portion of the upper step 140 in any two adjacent steps 140 is located on the left side of the kick portion of the lower step 140 in fig. 1. In addition, in other embodiments of the present invention, the substrates are stacked and aligned on the left side, and the length of the substrates is gradually increased from the bottom to the top of the right side to form steps, that is, the kick portion of the upper step in any two adjacent steps is located outside the kick portion of the lower step, that is, the kick portion of the upper step in any two adjacent steps is located on the right side of the kick portion of the lower step. In addition, in other embodiments of the invention, the substrates may not be flush on the left side after stacking. In addition, in other embodiments of the present invention, a plurality of the steps may be formed on the left side or the other side after a plurality of the substrates are stacked together.

In order to fix the plurality of substrates 110 together, in this embodiment, the inspection platform 100 further includes a bonding layer 120, the bonding layer 120 is, for example, a bonding glue, and the bonding layer 120 is located between two adjacent substrates 110 for bonding the two adjacent substrates 110 together, so that the inspection platform 100 composed of the plurality of substrates 110, the bonding layer 120, and the inspection layer 130 forms a whole, and is not easily scattered and damaged, and the inspection platform 100 is very easy to manufacture and has a low cost. In addition, in other embodiments of the present invention, the substrates may be bonded together without an adhesive layer therebetween, and the inspection platform further includes a clamping device, which may be a clip, a strap, or the like, for clamping the substrates together.

In order to reduce the volume of the testing platform 100 and also to reduce the cost, in this embodiment, the tread surface of the step 140 except the uppermost step 140 is covered with the testing layer 130, that is, the testing layer 130 is disposed adjacent to the kick surface of the previous step 140, and specifically, in fig. 1, the tread surfaces of the second step 140 to the sixth step 140 are covered with the testing layer 130. In this embodiment, the detection layer 130 on the uppermost step 140 is located at the edge of the tread surface, close to one side of the adjacent step, and far away from the opposite side, and in fig. 1, the detection layer 130 on the uppermost step 140 is located at the right edge of the tread surface, at the right side of the uppermost step 140, and far away from the left side of the uppermost step 140, that is, there is a blank region on the left side of the uppermost step 140, so as to facilitate the preparation before the detection of the focus of the laser beam, for example, when the laser beam is irradiated on the blank region, the irradiation of the laser beam is adjusted to stabilize the laser beam. In addition, in other embodiments of the present invention, the detection layer may not be fully laid on the tread surface of the step other than the uppermost step.

In this embodiment, please refer to fig. 1, because the length of the substrate 110 on the previous layer is shorter than the length of the substrate 110 on the next layer, after the two adjacent substrates 110 are bonded by the adhesive layer 120, the right side (tread surface of the step) of the substrate 110 on the next layer is exposed, and there is no adhesive layer on this part, but there is an adhesive layer 120 on the left side, and the detection layer 130 is disposed on the exposed upper side of the substrate 110 on the next layer, so that the adhesive layer 120 and the detection layer 130 on the adjacent right side are both located on the same plane and on the upper surface of the substrate 110 on the next layer.

In order to make the focus of the detected laser beam relatively accurate, in the present embodiment, the height difference between two adjacent detection layers 130 ranges from 40 μm to 200 μm, for example, 40 μm, 60 μm, 80 μm, 100 μm, 120 μm, 140 μm, 160 μm, 180 μm, 200 μm, and the like. In this embodiment, when the height difference between two adjacent detection layers 130 is smaller than 40 μm, more detection layers 130 need to be disposed when detecting the focus of the laser beam, so that more steps 140 need to be disposed on the detection platform 100, which results in higher cost of the detection platform 100 and more complex manufacturing process; when the height difference between two adjacent detection layers 130 is greater than 200 μm, an error may be increased when detecting the focal point of the laser beam, and the maximum error may reach 100 μm or more, thereby causing a decrease in the accuracy of detecting the focal point of the laser beam. Therefore, the range of the height difference between two adjacent detection layers 130 is preferably 40 μm to 200 μm, and at this time, the cost of the detection platform 100 is low, the manufacturing process is simple, and the focus of the detected laser beam is accurate.

In this embodiment, the detection layer 130 includes an ink layer, and the material of the ink layer is common ink, such as silver paste.

In this embodiment, the material of the substrate 110 is ITO (Indium tin oxide), PET (Polyethylene terephthalate), PMMA (polymethyl methacrylate), and the like, which is relatively low in cost and easily available. Of course, the material of the substrate may be other materials known to those of ordinary skill in the art.

In addition, an embodiment of the present invention further provides a detection system for a laser beam focus, please refer to fig. 4, where the detection system includes a detection platform 100 and a laser generator 200, and the detection platform 100 is the detection platform 100; laser generator 200 is used for producing the laser beam, in this embodiment laser generator 200 is located detection platform 100's top and can move relatively detection platform 100 in order to shine different detection layer 130 on, in this embodiment, detection platform 100 is motionless, laser generator 200 from the left side translation to the right side in order to shine different detection layer 130 on, or laser generator from the right side translation to the left side in order to shine different detection layer 130 on, laser generator 200's moving direction is perpendicular with the direction of height of detection layer 130, and the design can detect the focus position of laser beam as early as possible like this. However, the present invention is not limited thereto, and in other embodiments of the present invention, the laser generator is not moved, and the inspection stage is translated from the right side to the left side to sequentially irradiate the inspection layers of different steps, or the inspection stage is translated from the left side to the right side to sequentially irradiate the inspection layers of different steps.

In addition, the present invention also provides a method for detecting the focal point of a laser beam, please refer to fig. 5, which includes the following steps:

s110: providing an inspection platform, wherein the inspection platform comprises a plurality of inspection layers located at different heights;

in this embodiment, the detection platform includes a plurality of steps at different heights, and each detection layer is located on a corresponding step; adjacent detection layers are separated by a junction plane, which is perpendicular to the detection layers.

In this embodiment, the detection platform includes a plurality of substrates, adjacent substrates are bonded by an adhesive layer, and after bonding, the plurality of substrates are stacked together and form a plurality of steps on the same side, and the detection layer is formed on the steps. In this embodiment, the detection layer is in the same plane as the adjacent adhesive layer.

S120: and moving the laser generator to enable the laser beam of the laser generator to irradiate on each detection layer to form an irradiation trace.

In this embodiment, the laser generator is located above the detection platform, and the laser generator emits laser beams to irradiate on the detection layer to form an irradiation trace, and the laser beams of the laser generator irradiate on different detection layers by moving the laser generator. In this embodiment, the moving direction of the laser generator is perpendicular to the height direction of the detection layer;

second embodiment

Fig. 6 is a schematic view of a stage for detecting a focus of a laser beam according to a second embodiment of the present invention, and the structure of fig. 6 is similar to that of fig. 1, so that the same reference numerals denote the same elements.

Referring to fig. 5, in the present embodiment, the detection platform 300 for detecting the focus of the laser beam includes a base 310, a plurality of detection layers 130 at different heights are disposed on the base, the base 310 is an integrally formed whole, and a material forming the base 310 is, for example, ITO, PET, or PMMA, in the present embodiment, the base 310 is integrally formed, so that the detection platform 300 does not need to be provided with a bonding layer 120, thereby further saving the cost.

In the present embodiment, a plurality of steps 140 with different heights are formed on the right side of the base 310, and specifically, 6 steps 140 are formed in fig. 5. In this embodiment, each step 140 includes a tread surface that is located in a transverse direction of step 140 and a riser surface that is located in a longitudinal direction of step 140. In this embodiment, the upper step 140 is located to the left of the adjacent lower step 140.

In this embodiment, the plurality of detection layers 130 are formed on the treads of the plurality of steps 140, respectively, where the detection layer 130 is provided on the tread of each step 140. The detection layer 130 is used for irradiating a laser beam to form an irradiation trace.

It will be appreciated that the detection layer may be replaced by other materials that can be marked by laser irradiation, such as an alumina layer or other metallic materials.

It can also be understood that the detection layers are not limited to be located on the treads of the steps with different heights, and may have different distribution forms, for example, a plurality of detection layers may be located at different height positions of an inclined plane or different height positions of an arc surface, and it is only necessary to ensure that there is a height difference between the detection layers.

It is also understood that the detection layers are not limited to being individually distributed, but may be distributed continuously, i.e., all detection layers are connected to each other, in which case the plurality of detection layers may be considered to be substantially only one detection layer.

It should be noted that, in the present specification, the embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments may be referred to each other. For the device embodiment, since it is basically similar to the method embodiment, the description is simple, and for the relevant points, refer to the partial description of the method embodiment.

The above disclosure is only for the purpose of illustrating the preferred embodiments of the present invention, and it is therefore to be understood that the invention is not limited by the scope of the appended claims.

Claims

A detection platform for detecting a focus of a laser beam, comprising:

the laser beam irradiation device comprises a base, wherein a plurality of detection layers at different heights are arranged on the base, and the detection layers are used for laser beam irradiation to form irradiation traces.
The detection platform for detecting the focal point of a laser beam as claimed in claim 1, wherein the plurality of detection layers are discontinuously arranged, and adjacent detection layers are spaced apart from each other.
The detection platform for detecting the focal point of a laser beam as claimed in claim 1, wherein the plurality of detection layers are continuously distributed, and adjacent detection layers are connected with each other.
The inspection platform of claim 2, wherein adjacent inspection layers are separated by a joint plane, the orientation of the joint plane being different from the orientation of the adjacent inspection layers.
The inspection platform of claim 4, wherein the joint plane is perpendicular to the adjacent inspection layers.
The detection platform for the focal point of a laser beam according to claim 2, wherein the detection layers are parallel to each other.
The detection platform for the focus of a laser beam according to any one of claims 1 to 6, wherein the base has a plurality of steps formed thereon at different heights, and each detection layer is disposed on a corresponding step.
The laser beam focus detection platform of claim 7, wherein the base comprises a plurality of substrates stacked together and forming a plurality of the steps on the same side.
The detection platform for the focus of a laser beam of claim 8, wherein the base further comprises an adhesive layer between two adjacent substrates for adhering the two adjacent substrates together.
The detection platform for detecting the focus of a laser beam as claimed in claim 9, wherein the adhesive layer is located on the same plane as the adjacent detection layer.
The detection platform for the focus of a laser beam according to claim 8, wherein the material of the substrate is indium tin oxide, polyethylene terephthalate, or polymethyl methacrylate.
The detection platform for detecting the focus of a laser beam according to claim 7, wherein the detection layer on the uppermost step is located on one side close to the adjacent step and away from the opposite side.
The inspection stage of the focus of a laser beam of any of claims 1 to 6, wherein the inspection layer comprises an ink layer, and a height difference between two adjacent inspection layers ranges from 40 μm to 200 μm.
A system for detecting a focal point of a laser beam, comprising:

the assay platform of any one of claims 1-13; and

a laser generator for generating a laser beam.
A method of detecting a focal point of a laser beam, comprising:

providing an inspection platform, wherein the inspection platform comprises a plurality of inspection layers located at different heights;

and moving the laser generator to enable the laser beam of the laser generator to irradiate on each detection layer to form an irradiation trace.
The inspection method of claim 15, wherein the movement direction of the laser generator is perpendicular to the height direction of the inspection layer.
The inspection method of claim 15, wherein the inspection layer includes ink layers, and a height difference between adjacent ink layers is 40 μm to 200 μm.
The inspection method of claim 15, wherein the inspection platform includes a plurality of steps at different heights, each inspection layer being located on a respective step.
The detection method of claim 18, wherein adjacent detection layers are separated by a junction plane, the junction plane being perpendicular to the detection layers.
The assay method of claim 18 wherein the assay platform comprises a plurality of substrates, adjacent substrates being bonded by an adhesive layer, the detection layer being coplanar with adjacent adhesive layers.