CN112038276A - Mechanism based on silicon chip inserted sheet cleaning machine inserted sheet stability reinforcing - Google Patents

Mechanism based on silicon chip inserted sheet cleaning machine inserted sheet stability reinforcing Download PDF

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Publication number
CN112038276A
CN112038276A CN202010956320.XA CN202010956320A CN112038276A CN 112038276 A CN112038276 A CN 112038276A CN 202010956320 A CN202010956320 A CN 202010956320A CN 112038276 A CN112038276 A CN 112038276A
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China
Prior art keywords
bearing
plate
cylinder
cleaning machine
stability
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CN202010956320.XA
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Chinese (zh)
Inventor
靳立辉
杜晨朋
赵晓光
杨骅
尹擎
王拓
耿名强
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Tianjin Huanbo Science and Technology Co Ltd
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Tianjin Huanbo Science and Technology Co Ltd
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Priority to CN202010956320.XA priority Critical patent/CN112038276A/en
Publication of CN112038276A publication Critical patent/CN112038276A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Electromagnetism (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention provides a mechanism for enhancing the stability of an insert based on a silicon wafer insert cleaning machine, which comprises an external frame, a vertical moving module arranged on the external frame and a piece basket clamping group arranged on the moving module; the sheet basket clamping group comprises a bearing device, a rebounding device arranged on the bearing device and a righting device positioned above the bearing device; bear device slidable mounting on vertical removal module, be equipped with the load floor on bearing the device, placed piece basket box on the load floor, resilient means installs on the lateral wall that bears the device, and resilient means and loading board are the vertical state, and the device of rightting is installed in the top that bears the floor, and resilient means and the cooperation of righting the device fix the piece on bearing the device. The reinforced mechanism provided by the invention is simple in structure and convenient to operate, and can realize stable operation of the tablet basket box through multiple positioning, so that the stability of the tablet is greatly improved.

Description

Mechanism based on silicon chip inserted sheet cleaning machine inserted sheet stability reinforcing
Technical Field
The invention belongs to the technical field of photovoltaic silicon wafer manufacturing, and particularly relates to a mechanism for enhancing the stability of an insert of a cleaning machine based on silicon wafer inserts.
Background
With the exhaustion of traditional fossil energy, renewable energy research has received attention, and the advantages of large solar energy reserve, safety, cleanness and the like become one of the main energy sources in the future. Under the joint assistance of factors such as high-speed industrial development, good policy and technical progress, the growth of the domestic photovoltaic power generation industry is vigorous, and the industry maintains high-speed growth.
In the manufacturing process of the photovoltaic silicon wafer, the cleaning of the silicon wafer is a key link of the whole manufacturing process of the silicon wafer, and plays an important role. The silicon chip inserting sheet is also an important process for improving the cleaning efficiency of the silicon chip. During the cleaning process of the silicon wafer, the silicon wafer is inserted into the wafer basket by the inserting technology, so that no waste products are generated from the previous process to the next process, and the working hour utilization rate is improved.
The conventional inserting mechanism is simple in structure, single positioning is adopted, so that the movement of a sheet basket is unstable in the inserting process, fragments appear, and the condition of hidden cracking is caused. The insertion sheet mechanism has a complex structure, occupies a large area, and is heavy and maintenance-free.
Disclosure of Invention
In view of the above, the invention aims to provide a silicon wafer insert cleaning machine-based insert mechanism, so as to solve the problems that a wafer basket is unstable in movement, fragments and hidden cracks occur in the insert process due to the fact that the structure of the silicon wafer insert cleaning machine insert mechanism adopts single positioning, and the insert mechanism is complex in structure, large in occupied area, heavy in structure and not easy to maintain.
In order to achieve the purpose, the technical scheme of the invention is realized as follows:
a mechanism for enhancing the stability of an insert based on a silicon wafer insert cleaning machine comprises an external frame, a vertical moving module arranged on the external frame, and a piece basket clamping group arranged on the moving module;
the sheet basket clamping group comprises a bearing device, a rebounding device arranged on the bearing device and a righting device positioned above the bearing device;
the bearing device is slidably mounted on the vertical moving module, a bearing bottom plate is arranged on the bearing device, a piece basket box is placed on the bearing bottom plate, the rebounding device is mounted on the side wall of the bearing device and is in a vertical state with the bearing plate, the righting device is mounted above the bearing bottom plate, and the rebounding device and the righting device are matched to fix a piece on the bearing device.
Further, bear the device and include stabilising arrangement, loading board, vertical removal module includes tow chain, sharp module, be equipped with a plurality of sliding blocks on the sharp module, the loading board passes through the bolt fastening on the sliding block, stabilising arrangement includes gyro wheel, gyro wheel mount pad, the gyro wheel mount pad sets up at the loading board top, the gyro wheel is installed on the gyro wheel mount pad, the gyro wheel diameter is greater than the loading board thickness, the gyro wheel terminal surface is laminated in the lateral wall of sharp module, be equipped with the crossbeam on the frame, tow chain one end is installed on the crossbeam, the other end of tow chain is installed on the lateral wall of one of them sliding block, installs the installed part on one of them sliding block lateral wall, the other end of tow chain passes through the bolt fastening at the installed part.
Further, resilient mounting includes main push pedal, the optical axis of being connected with main push pedal and cup joints the spring at the optical axis outer wall, the optical axis is equipped with four, and four optical axis one end are fixed respectively on the four corners of main push pedal, be equipped with the unthreaded hole on the loading board four corners, the unthreaded hole of loading board is run through to the optical axis other end, the spring cup joints the one end of keeping away from main push pedal at the optical axis, the optical axis other end is equipped with the chimb, spring one end is fixed on the chimb, the terminal surface at the loading board is fixed to the spring other end.
Further, install the mobile device on the loading board, the mobile device includes two main sliders, installs the movable plate between two main sliders, installs the first three hornblocks on the movable plate, equidistant four installation pieces that are equipped with on the lateral wall of loading board are equipped with the erection column between per two installation pieces, main slider slidable mounting is on the erection column, the movable plate both ends respectively with two main slider fixed connection, first three hornblocks are located the movable plate directly over, main push pedal closes on and is equipped with the three hornblocks of second on the lateral wall of loading board, first three hornblocks, the three hornblocks of second are right angled triangle, the long limit terminal surface of the three hornblocks of second laminates with the long limit terminal surface of first three hornblocks.
Further, still install thrust unit on the loading board, thrust unit includes first cylinder, is used for installing the cylinder mount pad of first cylinder, the cylinder mount pad passes through the bolt fastening on the loading board, the cylinder mount pad is located the below of movable plate, first cylinder is installed on the cylinder mount pad, the lever connection movable plate of first cylinder.
Furthermore, one side of the bearing bottom plate is perpendicular to the bearing plate, the bearing bottom plate is located at the bottom end of the bearing plate, a clamping device is arranged on the other side of the bearing bottom plate and comprises a hydraulic cylinder and a clamping jaw, the hydraulic cylinder is installed at the bottom of the bearing bottom plate, and one end of the clamping jaw, which is installed on a lever of the hydraulic cylinder, extends to the upper portion of the bearing bottom plate.
Further, the vertical moving group is fixed on an external framework, the righting device is arranged in parallel with the external framework, the righting device comprises a supporting plate, a second cylinder for controlling the supporting plate and a cross beam for supporting the second cylinder, the cross beam is located above the bearing bottom plate and fixed on the external framework through bolts, the second cylinder is slidably mounted on the cross beam, the supporting plate is mounted on a lever of the cylinder and located above the clamping device, rollers are arranged on the supporting plate, and end faces of the rollers are attached to the side wall of the slice basket box.
Furthermore, a waterproof proximity sensor is arranged on the bearing bottom plate.
Compared with the prior art, the mechanism for enhancing the stability of the silicon wafer insert sheet-based cleaning machine insert sheet has the following advantages:
(1) the mechanism for enhancing the stability of the silicon wafer insert cleaning machine insert is simple in structure and convenient to operate, stable operation of the wafer basket insert is realized through multiple positioning modes, the stability of the insert is greatly improved, the insert accuracy in the operation process of the wafer basket insert is ensured through the left and right side pushing devices, the number of fragments and hidden cracks is reduced, and the product quality is improved.
(2) The main positioning device has a compact structure, changes the transmission direction by combining the triangle and the optical axis of the sliding block, and realizes the positioning action in a limited space.
(3) The bottom supporting plate clamping device provided by the invention is used for carrying out bidirectional positioning on the sheet basket in a hand-grasping manner, has a simple structure and a good effect, and can be used for multi-specification sheet baskets.
(4) Waterproof proximity sensor installation position is equipped with water drainage tank, prevents that water is too much to influence the sensor precision.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with the description, serve to explain the invention without limitation. In the drawings:
FIG. 1 is a structural diagram of a mechanism with a wafer basket for enhancing the stability of a silicon wafer insert based cleaning machine according to an embodiment of the invention;
FIG. 2 is a structural diagram of a mechanism basket-free structure for enhancing the stability of silicon wafer inserts of a silicon wafer insert cleaning machine according to an embodiment of the invention;
FIG. 3 is a structural diagram of a mechanism part for enhancing the stability of an insert of a cleaning machine based on a silicon wafer insert according to an embodiment of the invention;
fig. 4 is a front view of a mechanism part structure for enhancing the stability of an insert based on a silicon wafer insert cleaning machine according to an embodiment of the invention.
Description of reference numerals:
1. an outer frame; 2. a vertical moving module; 3. a stabilizing device; 4. a rebounding device; 5. a pushing device; 6. a mobile device; 7. a chip basket box; 8. a righting device; 9. a clamping device; 21. a linear module; 22. a drag chain; 23. a slider; 24. a mounting member; 31. a roller; 32. a roller mounting seat; 41. an optical axis; 42. a spring; 33. a carrier plate; 34. a load floor; 341. a waterproof proximity sensor; 35. a limiting device; 51. a first cylinder; 52. a cylinder mounting seat; 61. a rectangular mounting block; 62. a first triangular block; 63. a main slider; 64. a second triangular block; 65. a main push plate; 66. moving the plate; 81. a support plate; 82. a second cylinder; 83. a cross member.
Detailed Description
It should be noted that the embodiments and features of the embodiments of the present invention may be combined with each other without conflict.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings, which are merely for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be construed as limiting the invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention, the meaning of "a plurality" is two or more unless otherwise specified.
In the description of the invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "connected" and "connected" are to be construed broadly, e.g. as being fixed or detachable or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the creation of the present invention can be understood by those of ordinary skill in the art through specific situations.
The invention will be described in detail with reference to the following embodiments with reference to the attached drawings.
As shown in fig. 1 to 4, a mechanism for enhancing the stability of an insert based on a silicon wafer insert cleaning machine comprises an external frame 1, a vertical moving module 2 installed on the external frame 1, and a sheet basket clamping group installed on the moving module;
the sheet basket clamping group comprises a bearing device, a rebounding device 4 installed on the bearing device and a righting device 8 positioned above the bearing device;
bearing device slidable mounting is on vertical removal module 2, be equipped with bearing bottom plate 34 on the bearing device, piece basket box 7 has been placed on bearing bottom plate 34, be equipped with stop device 35 on bearing bottom plate 34, piece basket box 7 lateral wall top is on stop device 35's lateral wall, resilient means 4 installs on bearing device's lateral wall, resilient means 4 is the vertical state with loading board 33, righting device 8 installs in bearing bottom plate 34's top, resilient means 4 fixes the piece on bearing device with righting device 8 cooperation.
The bearing device comprises a stabilizing device 3 and a bearing plate 33, the vertical moving module 2 comprises a drag chain 22 and a linear module 21, the linear module 21 is provided with a plurality of sliding blocks 23, the bearing plate 33 is fixed on the sliding blocks 23 through bolts, the stabilizing device 3 comprises a roller 31 and a roller mounting seat 32, the roller mounting seat 32 is arranged on the top of a bearing plate 33, the roller 31 is arranged on the roller mounting seat 32, the diameter of the roller 31 is larger than the thickness of the bearing plate 33, the end face of the roller 31 is attached to the side wall of the linear module 21, the frame is provided with a beam 83, one end of the drag chain 22 is arranged on the cross beam 83, the other end of the drag chain 22 is arranged on the side wall of one of the sliding blocks 23, and a mounting piece 24 is mounted on the side wall of one sliding block 23, and the other end of the drag chain 22 is mounted on the mounting piece 24 through a bolt.
The sliding block 23 slides on the linear module 21 to drive the drag chain 22 to move, and the line and the oil circuit are exposed when the linear module 21 moves, so that the drag chain 22 is adopted to protect the line and the oil circuit, the linear module 21 is the conventional linear module 21, the bearing plate 33 slides along with the sliding block 23, the roller 31 slides on the linear module 21, and the roller 31 plays a role in positioning.
The rebounding device 4 comprises a main push plate 65, an optical axis 41 connected with a main positioning device and springs 42 sleeved on the outer wall of the optical axis 41, the number of the optical axes 41 is four, one ends of the four optical axes 41 are respectively fixed on four corners of the main push plate 65, unthreaded holes are formed in four corners of the bearing plate 33, the other ends of the optical axes 41 penetrate through the unthreaded holes of the bearing plate 33, the springs 42 are sleeved on one ends, away from the main push plate 65, of the optical axes 41, knurled edges are arranged at the other ends of the optical axes 41, one ends of the springs 42 are fixed on the knurled edges, and the other ends of the springs;
the loading plate 33 is provided with a moving device 6, the moving device 6 comprises two main sliding blocks 63, a moving plate 66 arranged between the two main sliding blocks 63, and a first triangular block 62 arranged on the moving plate 66, the side wall of the loading plate 33 is equidistantly provided with four mounting blocks, a mounting column is arranged between every two mounting blocks, the main sliding blocks 63 are slidably arranged on the mounting columns, two ends of the moving plate 66 are fixedly connected with the two main sliding blocks 63 respectively, the first triangular block 62 is positioned right above the moving plate 66, the side wall of the main push plate 65 close to the loading plate 33 is provided with a second triangular block 64, the first triangular block 62 and the second triangular block 64 are both in a right-angled triangle shape, and the long-side end face of the second triangular block 64 is attached to the long-side end face of the first triangular block 62;
the bearing plate 33 is further provided with a pushing device 5, the pushing device 5 comprises a first air cylinder 51 and an air cylinder mounting seat 52 used for mounting the first air cylinder 51, the air cylinder mounting seat 52 is fixed on the bearing plate 33 through a bolt, the air cylinder mounting seat 52 is located below the moving plate 66, the first air cylinder 51 is mounted on the air cylinder mounting seat 52, and a lever of the first air cylinder 51 is connected with the moving plate 66;
the first cylinder 51 lever stretches out, the pushing moving plate 66 drives the two main sliding blocks 63 to slide on the mounting column, when sliding, the first triangular block 62 is arranged, the surface of the long edge of the second triangular block 64 is an inclined surface, the long edge of the first triangular block 62 is attached to the surface of the second triangular block 64, because the second triangular block 64 is gradually jacked up when the inclined surface of the first triangular block 62 moves upwards, the main push plate 65 moves outwards along with the inclined surface, the spring 42 is locked, the optical axis 41 moves transversely in the unthreaded hole of the bearing plate 33, the plate basket box 7 placed on the bearing bottom plate 34 is compressed, and the compression degree of the main push plate 65 can be adjusted according to the width of the plate basket box 7.
One side surface of the bearing bottom plate 34 is perpendicular to the bearing plate 33, the bearing bottom plate 34 is positioned at the bottom end of the bearing plate 33, the other side of the bearing bottom plate 34 is provided with a clamping device 9, the clamping device 9 comprises a hydraulic cylinder and a clamping jaw, the hydraulic cylinder is installed at the bottom of the bearing bottom plate 34, and one end of the clamping jaw, which is installed on a lever of the hydraulic cylinder, extends to the position above the bearing bottom plate 34;
the sheet basket box 7 is clamped through the clamping assembly and the main push plate 65, the sheet basket box 7 is fixed, and the jaw is controlled by the hydraulic cylinder, so that the position of the jaw can be moved, and the control can be performed according to the width of the sheet basket box 7.
The vertical moving group is fixed on the external frame 1, the righting device 8 is arranged in parallel with the external frame 1, the righting device 8 comprises a supporting plate 81, a second cylinder 82 for controlling the supporting plate 81 and a cross beam 83 for supporting the second cylinder 82, the cross beam 83 is positioned above the bearing bottom plate 34, the cross beam 83 is fixed on the external frame 1 through bolts, the second cylinder 82 is slidably mounted on the cross beam 83, the supporting plate 81 is mounted on a lever of the cylinder, the supporting plate 81 is positioned above the clamping device 9, a roller 31 is arranged on the supporting plate 81, and the end face of the roller 31 is attached to the side wall of the wafer basket box 7; a waterproof proximity sensor 341 is arranged on the bearing bottom plate 34
Because the jack catch is located the below of piece basket box 7, the bottom of piece basket box is fixed in the jack catch and the cooperation of stop device 35, main push plate 65 top tight piece basket box 7's lateral wall, piece basket box 7 can take place the slope, consequently need right device 8 and right piece basket box 7, right device 8 sets up in clamping device 9's top, second cylinder 82 slidable mounting is on crossbeam 83, it can to fix second cylinder 82 through the bolt to adjust specific position, layer board 81 passes through second cylinder 82 control, can be according to the size adjustment layer board 81 of piece basket box 7 and the distance of piece basket box 7, make gyro wheel 31 laminate in the outer wall of piece basket box 7, because piece basket box 7 reciprocates by sharp module 21 control when getting the piece basket, consequently layer board 81 one end sets up gyro wheel 31, and the piece basket box 7 of being convenient for reciprocates.
The specific working principle is as follows:
the pannier box 7 is placed onto the load floor 34 by other means. Rebounding device 4, thrust unit 5 and clamping device 9 work, carry out the bidirectional fastening to piece basket box 7, stop device and jack catch cooperation can control fixed position about the piece basket. The first air cylinder 51 works to drive the main sliding block 63 to move, the main sliding block 63 drives the first triangular block 62 to move, and the first triangular block 62 is matched with the second triangular block 64 to push the main push plate 65 out of the locating piece basket box 7. When the second cylinder 82 works, the supporting plate 81 is pushed out, the roller 31 is pressed against the side wall of the slice basket box 7, and the slice basket box 7 is righted; the linear module 21 works to insert the sheet layer by layer. And (5) after the insertion is finished. The second cylinder 82 retracts. The second cylinder 82 retracts and the main push plate 65 retracts through the optical axis 41 linear bearing under the force of the spring 42. Finally, the clamping device 9 is loosened, and the sheet basket can be taken away to carry out the next working procedure.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and should not be taken as limiting the invention, so that any modifications, equivalents, improvements and the like, which are within the spirit and principle of the present invention, should be included in the scope of the present invention.

Claims (8)

1. The utility model provides a mechanism based on silicon chip inserted sheet cleaning machine inserted sheet stability reinforcing which characterized in that: the device comprises an external frame (1), a vertical moving module (2) arranged on the external frame (1), and a sheet basket clamping group arranged on the moving module;
the sheet basket clamping group comprises a bearing device, a rebounding device (4) installed on the bearing device and a righting device (8) located above the bearing device;
bearing device slidable mounting is on vertical removal module (2), be equipped with bearing bottom plate (34) on the bearing device, the piece basket box has been placed on bearing bottom plate (34), resilient means (4) are installed on bearing device's lateral wall, resilient means (4) are the vertical state with loading board (33), install the top at bearing bottom plate (34) righting device (8), resilient means (4) are fixed the piece on bearing device with righting device (8) cooperation.
2. The mechanism of claim 1 for enhancing the stability of the silicon wafer insert sheet-based cleaning machine insert sheet, which is characterized in that: the bearing device comprises a stabilizing device (3) and a bearing plate (33), the vertical moving module (2) comprises a drag chain (22) and a linear module (21), a plurality of sliding blocks (23) are arranged on the linear module (21), the bearing plate (33) is fixed on the sliding blocks (23) through bolts, the stabilizing device (3) comprises a roller (31) and a roller mounting seat (32), the roller mounting seat (32) is arranged at the top of the bearing plate (33), the roller (31) is arranged on the roller mounting seat (32), the diameter of the roller (31) is larger than the thickness of the bearing plate (33), the end face of the roller (31) is attached to the side wall of the linear module (21), a cross beam (83) is arranged on the frame, one end of the drag chain (22) is arranged on the cross beam (83), and the other end of the drag chain (22) is arranged on the side wall of one of the sliding blocks (23, and a mounting piece (24) is mounted on the side wall of one sliding block (23), and the other end of the drag chain (22) is mounted on the mounting piece (24) through a bolt.
3. The mechanism of claim 2 for enhancing the stability of the silicon wafer insert sheet-based cleaning machine insert sheet, which is characterized in that: rebound device (4) including main push pedal (65), optical axis (41) be connected with main push pedal (65) and cup joint spring (42) at optical axis (41) outer wall, optical axis (41) are equipped with four, and four optical axis (41) one ends are fixed respectively on the four corners of main push pedal (65), be equipped with the unthreaded hole on loading board (33) four corners, the unthreaded hole of loading board (33) is run through to the optical axis (41) other end, spring (42) cup joint the one end of keeping away from main push pedal (65) in optical axis (41), the optical axis (41) other end is equipped with the chimb, spring (42) one end is fixed on the chimb, the terminal surface at loading board (33) is fixed to the spring (42) other end.
4. The mechanism of claim 3 for enhancing the stability of the silicon wafer insert-based cleaning machine insert, which is characterized in that: the bearing plate (33) is provided with a moving device (6), the moving device (6) comprises two main sliding blocks (63), a moving plate (66) arranged between the two main sliding blocks (63), and a first triangular block (62) arranged on the moving plate (66), four mounting blocks are equidistantly arranged on the side wall of the bearing plate (33), a mounting column is arranged between every two mounting blocks, the main sliding blocks (63) are slidably arranged on the mounting column, two ends of the moving plate (66) are respectively fixedly connected with the two main sliding blocks (63), the first triangular block (62) is positioned right above the moving plate (66), the side wall of the main push plate (65) close to the bearing plate (33) is provided with a second triangular block (64), the first triangular block (62) and the second triangular block (64) are both right-angled triangles, the long side end face of the second triangular block (64) is attached to the long side end face of the first triangular block (62).
5. The mechanism of claim 2 for enhancing the stability of the silicon wafer insert sheet-based cleaning machine insert sheet, which is characterized in that: still install thrust unit (5) on loading board (33), thrust unit (5) include first cylinder (51), cylinder mount pad (52) that are used for installing first cylinder (51), cylinder mount pad (52) pass through the bolt fastening on loading board (33), cylinder mount pad (52) are located the below of movable plate (66), install on cylinder mount pad (52) first cylinder (51), movable plate (66) is connected to the lever of first cylinder (51).
6. The mechanism of claim 2 for enhancing the stability of the silicon wafer insert sheet-based cleaning machine insert sheet, which is characterized in that: bear bottom plate (34) a side perpendicular and loading board (33), bear bottom plate (34) and be located the bottom of loading board (33), the opposite side that bears bottom plate (34) is equipped with clamping device (9), clamping device (9) include pneumatic cylinder, jack catch, the pneumatic cylinder is installed in bearing bottom plate (34) bottom, and the jack catch is installed one end and is extended to the top that bears bottom plate (34) on the lever of pneumatic cylinder.
7. The mechanism of claim 1 for enhancing the stability of the silicon wafer insert sheet-based cleaning machine insert sheet, which is characterized in that: the vertical moving group is fixed on an external framework (1), the righting device (8) is arranged in parallel with the external framework (1), the righting device (8) comprises a supporting plate (81), a second cylinder (82) for controlling the supporting plate (81) and a cross beam (83) used for supporting the second cylinder (82), the cross beam (83) is located above the bearing bottom plate (34), the cross beam (83) is fixed on the external framework (1) through bolts, the second cylinder (82) is slidably mounted on the cross beam (83), the supporting plate (81) is mounted on a lever of the cylinder, the supporting plate (81) is located above the clamping device (9), rollers (31) are arranged on the supporting plate (81), and the end faces of the rollers (31) are attached to the side wall of the wafer box (7).
8. The mechanism of claim 1 for enhancing the stability of the silicon wafer insert sheet-based cleaning machine insert sheet, which is characterized in that: and a waterproof proximity sensor (341) is arranged on the bearing bottom plate (34).
CN202010956320.XA 2020-09-11 2020-09-11 Mechanism based on silicon chip inserted sheet cleaning machine inserted sheet stability reinforcing Pending CN112038276A (en)

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CN202010956320.XA CN112038276A (en) 2020-09-11 2020-09-11 Mechanism based on silicon chip inserted sheet cleaning machine inserted sheet stability reinforcing

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Application Number Priority Date Filing Date Title
CN202010956320.XA CN112038276A (en) 2020-09-11 2020-09-11 Mechanism based on silicon chip inserted sheet cleaning machine inserted sheet stability reinforcing

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115831836A (en) * 2022-12-07 2023-03-21 友上智能科技(苏州)有限公司 Silicon wafer wet process carrying robot capable of automatically adjusting angle of wafer basket

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115831836A (en) * 2022-12-07 2023-03-21 友上智能科技(苏州)有限公司 Silicon wafer wet process carrying robot capable of automatically adjusting angle of wafer basket
CN115831836B (en) * 2022-12-07 2024-04-19 友上智能科技(苏州)有限公司 Silicon wafer wet process transfer robot capable of automatically adjusting angle of wafer basket

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