CN112014968B - Transmission type wavefront adjusting device - Google Patents
Transmission type wavefront adjusting device Download PDFInfo
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- CN112014968B CN112014968B CN202010995319.8A CN202010995319A CN112014968B CN 112014968 B CN112014968 B CN 112014968B CN 202010995319 A CN202010995319 A CN 202010995319A CN 112014968 B CN112014968 B CN 112014968B
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- flexible
- parallelogram
- moment
- parallelogram mechanism
- linear driving
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70191—Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like
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- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
The invention discloses a transmission type wavefront adjusting device, which comprises: the mirror surface flexible moment applying mechanism comprises a parallelogram mechanism, a flexible hinge, a flexible moment applying mechanism, a linear driving mechanism and a support, wherein one side edge of the parallelogram mechanism is connected with one side of the mirror surface, the other side edge of the parallelogram mechanism is connected with the flexible moment applying mechanism, one side edge of the parallelogram mechanism, which is connected with the flexible moment applying mechanism, is hinged on the support through the flexible hinge, and the linear driving mechanism is used for controlling the flexible moment applying mechanism to deform up and down so as to apply edge moment to the mirror surface through the parallelogram mechanism. The flexible torque applying mechanism can change the linear motion of the linear driving mechanism into torque and has the characteristic of motion decoupling. In addition, the decoupling property of the applied moment can be ensured through the parallelogram mechanism, namely, the additional movement is not added, and the moment is only applied. And secondly, a flexible hinge is adopted, so that the phenomena of idle return, hysteresis and the like of the system are avoided, and the correction precision is improved.
Description
Technical Field
The invention relates to the field of wavefront correction devices, in particular to a transmission type wavefront adjusting device.
Background
In consideration of the influence of a processing technology, environmental adaptability and a debugging technology, the accuracy maintaining capability of the system is increasingly difficult to meet the requirement of future precision optical equipment on imaging quality.
In the case of a lithography machine, in order to achieve the diffraction limit, the optical error of the system itself needs to be close to or negligible, which is almost impossible to achieve by only depending on the system processing and adjustment, and therefore, the system needs to reach the diffraction limit by using the optical path compensation element.
The traditional active optics or adaptive optics mostly adopt a bottom push-pull structural form, and the optical path is adjusted by changing the rise of a mirror surface. Meanwhile, the system is complex, and when the low-order surface shape is corrected, the utilization rate of the inner ring actuator is low. In addition, the existing wavefront adjustment device has the problem of low correction precision.
Therefore, how to provide a transmissive wavefront modification device to improve the correction accuracy thereof is a technical problem that needs to be solved by those skilled in the art.
Disclosure of Invention
The invention aims to provide a transmission type wavefront adjusting device which can effectively solve the problem of low correction precision.
In order to solve the technical problems, the invention provides the following technical scheme:
a transmissive wavefront modification device, comprising: the device comprises a parallelogram mechanism, a flexible hinge, a flexible torque applying mechanism, a linear driving mechanism and a support, wherein one side edge of the parallelogram mechanism is connected with one side of the mirror surface, the other side edge of the parallelogram mechanism is connected with the flexible torque applying mechanism, one side edge of the parallelogram mechanism, which is connected with the flexible torque applying mechanism, is hinged on the support through the flexible hinge, and the linear driving mechanism is used for controlling the flexible torque applying mechanism to deform up and down so as to apply edge torque to the mirror surface through the parallelogram mechanism.
Preferably, flexible moment applying mechanism includes the flat board, dull and stereotyped one side with parallelogram mechanism connects, dull and stereotyped middle part is equipped with logical groove, be equipped with the deformation board on the lateral wall that leads to the groove, the deformation board with linear drive mechanism connects.
Preferably, one end of the deformation plate connected with the through groove is far away from one end of the flat plate connected with the parallelogram mechanism.
Preferably, the flat plate and the deformation plate are of an integrated structure, and the flat plate and the deformation plate are located in the same horizontal plane.
Preferably, the linear driving mechanism is a nut and screw mechanism, the nut and screw mechanism comprises a motor and a screw, and the deformation plate is provided with a threaded hole connected with the screw in a threaded manner.
Preferably, one side surface of the parallelogram mechanism is adhered to the mirror surface, and the other side surface of the parallelogram mechanism is connected with the flexible moment applying mechanism through a fastener.
Compared with the prior art, the technical scheme has the following advantages:
the invention provides a transmission type wavefront adjusting device, which comprises: the device comprises a parallelogram mechanism, a flexible hinge, a flexible torque applying mechanism, a linear driving mechanism and a support, wherein one side edge of the parallelogram mechanism is connected with one side of a mirror surface, the other side edge of the parallelogram mechanism is connected with the flexible torque applying mechanism, one side edge of the parallelogram mechanism, which is connected with the flexible torque applying mechanism, is hinged on the support through the flexible hinge, the linear driving mechanism is used for controlling the flexible torque applying mechanism to deform up and down, further the parallelogram mechanism is used for applying edge torque to the mirror surface, the aberration of a transmission element is controlled through edge driving, and the device can perform emergent wavefront correction on a single-layer transmission element and can also perform stacked correction on wavefront. The flexible torque applying mechanism can change the linear motion of the linear driving mechanism into torque and has the characteristic of motion decoupling. In addition, the decoupling property of the applied moment can be ensured through the parallelogram mechanism, namely, the additional movement is not added, and the moment is only applied. And secondly, a flexible hinge is adopted, so that the phenomena of idle return, hysteresis and the like of the system are avoided, and the correction precision is improved.
Drawings
In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a transmissive wavefront modifier according to an embodiment of the present invention;
fig. 2 is a schematic front view of the structure of fig. 1.
The reference numbers are as follows:
the device comprises a parallelogram mechanism 1, a flexible hinge 2, a nut screw mechanism 3, a flexible torque applying mechanism 4 and a mirror surface 5.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
In the following description, specific details are set forth in order to provide a thorough understanding of the present invention. The invention can be implemented in a number of ways different from those described herein and similar generalizations can be made by those skilled in the art without departing from the spirit of the invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.
Referring to fig. 1 and fig. 2, fig. 1 is a schematic structural diagram of a transmissive wavefront modification apparatus according to an embodiment of the present invention; fig. 2 is a schematic front view of the structure of fig. 1.
One embodiment of the present invention provides a transmissive wavefront modification apparatus, comprising: a parallelogram mechanism 1, a flexible hinge 2, a flexible moment applying mechanism 4, a linear driving mechanism and a support, wherein one side of the parallelogram mechanism 1 is connected with one side of a mirror surface 5, preferably by bonding, the other side of the parallelogram mechanism 1 is connected with the flexible moment applying mechanism 4, the two can be fixed by a fastener, for example, a screw or a pin, the side of the parallelogram mechanism 1 connected with the flexible moment applying mechanism 4 is hinged on the support through a flexible hinge 2, wherein the flexible hinge 2 is preferably a flexible bearing, the linear driving mechanism is used for controlling the flexible moment applying mechanism 4 to deform up and down, further, by applying a fringe moment to the mirror surface 5 by the parallelogram mechanism 1 and controlling the aberration of the transmission element by edge drive, it is possible to perform not only the outgoing wavefront correction but also the stack correction of the wavefront. The flexible torque application mechanism 4 can convert the linear motion of the linear driving mechanism into torque, and has the characteristic of motion decoupling. In addition, the decoupling performance of the applied moment can be ensured through the parallelogram mechanism 1, namely, the moment is only applied without additional movement. And secondly, the flexible hinge 2 is adopted, so that the system is ensured to have no phenomena of backlash, hysteresis and the like, and the correction precision is further improved.
Specifically, flexible moment applying mechanism 4 includes the flat board, and one side and the parallelogram mechanism 1 of flat board are connected, and dull and stereotyped middle part is equipped with logical groove, is equipped with the deformation board on the lateral wall that leads to the groove, and the deformation board is connected with linear drive mechanism. When the device works specifically, the linear driving mechanism drives the deformation plate to deform upwards or downwards, so that the flat plate is driven to swing up and down by taking the flexible bearing as a rotating shaft, the moment is transmitted to the parallelogram mechanism 1, and finally the mirror face 5 is driven through the parallelogram mechanism 1, so that the aim of correction is fulfilled.
Wherein, the one end that the deformation board is connected with logical groove is kept away from the one end that the flat board is connected with parallelogram mechanism 1, through this structural style, can shorten the length that flexible moment applied mechanism 4 to reduce the occupation in space.
In particular, the flat plate and the deformable plate are preferably of one-piece construction, the flat plate and the deformable plate being in the same horizontal plane, i.e. the deformable plate can be machined into the flat plate.
Specifically, the linear driving mechanism is preferably a nut and screw mechanism 3, the nut and screw mechanism 3 comprises a motor and a screw, and a threaded hole in threaded connection with the screw is formed in the deformation plate. The motor can be fixed on the base plate and drives the screw rod to rotate, so that the deformation plate can be controlled to move up and down, and the flat plate can swing up and down due to the limitation of the parallelogram mechanism 1.
It should be noted that, in this document, terms such as "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (4)
1. A transmissive wavefront modification device, comprising: parallelogram mechanism, flexible hinge, flexible moment apply mechanism and linear driving mechanism and support, one side of parallelogram mechanism is connected with one side of mirror surface, another side of parallelogram mechanism with flexible moment apply the mechanism and connect, parallelogram mechanism go up with flexible moment applies a side of mechanism connection and passes through flexible hinge articulates on the support, linear driving mechanism is used for control flexible moment applies the mechanism and warp from top to bottom, and then passes through parallelogram mechanism applies marginal moment for the mirror surface, flexible moment applies the mechanism and includes the flat board, dull and stereotyped one side with parallelogram mechanism connects, dull and stereotyped middle part is equipped with logical groove, be equipped with the deformation board on the lateral wall that leads to the groove, the deformation board with linear driving mechanism connects, the deformation board with the one end of leading to the groove connection is kept away from the flat board with one that parallelogram mechanism connects And (4) an end.
2. The transmissive wavefront modification device of claim 1, wherein the flat plate and the deformable plate are of unitary construction, the flat plate and the deformable plate being in a common horizontal plane.
3. The transmissive wavefront modification apparatus of claim 1, wherein the linear driving mechanism is a nut-screw mechanism, the nut-screw mechanism includes a motor and a screw, and the deformation plate is provided with a threaded hole in threaded connection with the screw.
4. A transmissive wavefront modifier according to any one of claims 1 to 3, wherein one side of the parallelogram mechanism is bonded to the mirror surface and the other side is connected to the compliant torque applicator by a fastener.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010995319.8A CN112014968B (en) | 2020-09-21 | 2020-09-21 | Transmission type wavefront adjusting device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010995319.8A CN112014968B (en) | 2020-09-21 | 2020-09-21 | Transmission type wavefront adjusting device |
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| CN112014968A CN112014968A (en) | 2020-12-01 |
| CN112014968B true CN112014968B (en) | 2021-12-31 |
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| US8276866B2 (en) * | 2010-03-08 | 2012-10-02 | Media Lario, S.R.L. | Adjustable clips for grazing-incidence collectors |
| CN111983799B (en) * | 2020-08-25 | 2021-09-03 | 中国科学院长春光学精密机械与物理研究所 | Surface shape correction device and method for grazing optical element |
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