CN1119735C - Creeping type piezoelectric/electrostrictive microfeed positioner - Google Patents
Creeping type piezoelectric/electrostrictive microfeed positioner Download PDFInfo
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- CN1119735C CN1119735C CN 98102837 CN98102837A CN1119735C CN 1119735 C CN1119735 C CN 1119735C CN 98102837 CN98102837 CN 98102837 CN 98102837 A CN98102837 A CN 98102837A CN 1119735 C CN1119735 C CN 1119735C
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Abstract
The present invention relates to a crawl-type piezoelectric/electrostrictive microfeed positioning device. The positioning device is composed of a main shaft, a telescopic actuating piece, a clamping fastening mechanism, guide fixing pieces and a pretension spring, wherein both ends of the telescopic actuating piece are relatively fixed to the guide fixing pieces; the pretension spring is arranged between the guide fixing pieces; one side of the guide fixing piece is connected with the telescopic actuating piece, and the other side is relatively fixed to an electromagnetic magnetic circuit of the clamping fastening mechanism. The positioning device of the present invention can realize high-precision and smooth large-stroke feed positioning by keeping high-displacement resolution simultaneously. In addition, the positioning device has the advantages of compact structure and convenient control, and is suitable for processing, assembling and operating micro miniature machines.
Description
The present invention relates to the little feeding locating device of a kind of creeping motion type piezoelectricity/electrostriction, belong to precision optical machinery and precise motion control technology field.
In precision optical machinery and precise motion control technology field, even when the Motion Resolution rate reached the submicron order nanoscale, solid actuator particularly piezoelectric actuator revealed advantage at feeding detent mechanism or system's convexity.
The piezoelectric actuation device because its displacement resolution height, reduce intermediary movements transferring elements, efficient height, advantage such as rigidity is big, response is fast, be widely used in little feeding detent mechanism or system.
Little feeding detent mechanism of piezoelectric or system are used for the little feeding of cutter, microscopic carvings etching system, straight-line displacement driving, control jet nozzle, micropump etc. aspect the precision optical machinery engineering; Aspect optics and measuring technique, be used for lens position adjusting, Laser Modulation, fiber orientation aligning, automatic focusing, interferometry, holographic photography, scan-probe micrometering etc.; At biomedical sector, be used for microoperation, cell puncture, little dosage control device, auditory physiology stimulation of eye surgery etc. etc.; Aspect microelectronics and computer technology, be used for chip and mask location aligning, photoetching and semiconductor machining testing fixture, disk and optical disk manufacturing device and driver, dot-matrix printer etc.
More above-mentioned successful applications exploitings the advantage that activates of piezoelectric.But when being applied to feeding detent mechanism or system, directly utilize the piezoelectric distortion that its significant disadvantages is arranged, promptly stroke is little, to most 10 microns.
The invention of creeping mechanism is come out, and has overcome the little shortcoming of stroke dexterously.Creeping motion type step motor (inchworm motor) with U.S. Burleigh company is an example, and its structural principle as shown in Figure 1.Main member comprise main shaft 1, axial stretching actuated piece 3 and radially clamp clamp with piezoelectric ceramic tube 2 and 4.When main shaft 1 is moving component, the assembly relative fixed of actuated piece 3,2,4; If main shaft 1 is fixing, the assembly of actuated piece 3,2,4 is along main shaft 1 axially-movable.
With main shaft 1 is moving component, and clamping piece 2 is fixed on pedestal, and 3,4 structures that connect with 2 as shown are example, and original state is 2,4 clamping spindles, and its motion principle is as follows:
(1) at first make clamping piece 2 radially unclamp main shaft 1, and clamping piece radial shrinkage clamping spindle 4 this moment 1;
(2) drive actuated piece 3 and extend vertically, drive the main shaft 1 ahead one starboard step;
(3) make clamping piece 2 radial shrinkage clamping spindles 1, clamping piece 4 radially unclamps then;
(4) actuated piece 3 is shunk vertically;
(5) make clamping piece 4 radial shrinkage clamping spindles 1 again, be returned to original state.
The operation of circulation step (1) one step (5) can realize the straight line step motion of main shaft 1.Its counter motion can by change axial stretching actuated piece 3 and radially the operation control sequence that clamps with piezoelectric ceramic tube 2 and 4 of clamp realize.
The stroke of main shaft 1 only depends on the length of main shaft 1.Translational speed can be added on voltage magnitude on the axial stretching actuated piece 3 and control actuated piece 3 by change, radially clamp clamping element 2 and 4 operating frequency are regulated.
The step motion of creeping motion type piezoelectricity line motor is that the thrust realization is transmitted in the friction when leaning on clamping institution and main shaft to clamp, and the size of the clamping force that clamping institution produces directly influences its axial carrying capacity and kinetic stability.
So far, the creeping motion type piezoelectricity line motor of being realized has that clamp clamps that driving voltage is too high more, axial rigidity and the less weak point of thrust output.The improvement design of clamp clamp system is an effective way that improves creeping motion type piezoelectricity line motor performance.
The objective of the invention is to design a kind of little feeding locating device of creeping motion type piezoelectricity/electrostriction that improves axial thrust.When realizing big stroke, high displacement resolution, reduce clamp by the circumferential distributed lever clamping institution that adopts Electromagnetically actuated flexible hinge to constitute and clamp voltage and mechanical quality of fit requirement, improve the clamp clamping force, thereby make the little feeding detent mechanism of creeping motion type piezoelectricity/electrostriction obtain big axial thrust output.Make it not only can be used to measure the little occasion of even load, also can be used for the bigger occasion of system of processing feeding location even load.
The little feeding locating device of creeping motion type piezoelectricity/electrostriction of the present invention's design comprises major-minor, flexible actuated piece, clamp clamp system, guide shaft fixing unit and preloading spring.The both ends and the guide shaft fixing unit relative fixed of flexible actuated piece, the aperture surface of guide shaft fixing unit becomes to be slidingly matched with main shaft.Preloading spring places between the guide shaft fixing unit.The clamp clamp system is made up of the electromagnetic circuit of static part and power amplification bar, arcuation bar, flexible hinge and the clamp feet of moving part.One side of guide shaft fixing unit links to each other with flexible actuated piece, the electromagnetic circuit relative fixed of opposite side and clamp clamp system, the outer diametric plane of the flexible cantilever cover of guide shaft fixing unit and the clamp feet interference fit of clamp clamp system moving part.
The little feeding locating device of creeping motion type piezoelectricity/electrostriction of the present invention, with the main actuator of cylindric piezoelectric actuated piece 3 as axially-movable, being central shaft with main shaft 1 is connected the two ends of actuated piece 3 with guide shaft fixing unit 6,8, and with spring 9 pretensions.Clamp clamp system 5,7 is connected on the guide shaft fixing unit 6,8, the Electromagnetic Drive magnetic circuit and the guide shaft fixing unit lateral surface of its static part connect firmly, the overhanging cantilever of radially movable clamp clamping part and guide shaft fixing unit overlaps 16 interference fit, realizes clamp and pine position to main shaft 1 under electromagnetic force drives.This structure can improve the rigidity and the axial thrust output of creeping mechanism effectively, when keeping high displacement resolution, realize high precision and big stably stroke feeding location, and compact conformation, control are conveniently, both made full use of piezoelectric spare displacement resolution height, rigidity is big, response is fast advantage, and effectively combined Electromagnetic Drive again and clamp the advantage that controlling party is convenient to realize.
This creeping mechanism particularly has the guide shaft fixing unit 6,8 of flexible cantilever cover 16 and by the invention of the interconnected lever clamp clamp system 5,7 of flexible hinge, has improved the particularly axially raising of thrust output of performance of creeping mechanism effectively.This effect is greatly widened the range of application of the little feeding detent mechanism of creeping motion type piezoelectricity/electrostriction, make it not only may be applied to precision measurement, also can be used for processing, the one or more dimensions precision feeding positioning system of the certain load-bearing capacity of needs such as assembling, particularly be applicable to processing, the assembling of microminiature machinery and operate etc.
Description of drawings:
Fig. 1 is the prior art structural representation.
Fig. 2 is the positioning device structure synoptic diagram that the present invention designs.
Fig. 3 is a clamp clamp system principle schematic.
Fig. 4 is the guide shaft fixing unit structural representation.
Fig. 5 is the side view of Fig. 4.
Fig. 6 is a clamp clamp system assembling synoptic diagram.
Fig. 7, Fig. 8, Fig. 9 are three application examples of the locating device that designs of the present invention.
Below in conjunction with accompanying drawing, introduce content of the present invention in detail.
Among Fig. 1 one Fig. 5, the 1st, main shaft, 2 and 4 is that radially piezoelectric ceramic tube is used in the clamp clamping, the 3rd, the axial stretching actuated piece, 5 and 7 is clamp clamp systems, 6 and 8 is guide shaft fixing units, the 9th, preloading spring.Among Fig. 3, the 10th, power is amplified bar, and the 11st, the arcuation bar, the 12nd, flexible hinge, the 13rd, clamp feet, the 14th, electromagnetic circuit, among Fig. 4 and Fig. 5, the 15th, mounting flange, the 16th, left side projection, the 17th, flexible cantilever cover.
As shown in the figure, the little feeding locating device of creeping motion type piezoelectricity/electrostriction of the present invention design comprises main shaft 1, flexible actuated piece 3, clamp clamp system 5 and 7, guide shaft fixing unit 6 and 8 and preloading spring 9.The both ends and the guide shaft fixing unit relative fixed of flexible actuated piece 3, the aperture surface of guide shaft fixing unit is slidingly matched for 1 one-tenth with main shaft.Preloading spring 9 places between guide shaft fixing unit 6 and 8.Clamp clamp system 5 and 7 is made up of the electromagnetic circuit 14 of static part and power amplification bar 10, arcuation bar 11, flexible hinge 12 and the clamp feet 13 of moving part respectively.One side of guide shaft fixing unit links to each other with flexible actuated piece, electromagnetic circuit 14 relative fixed of opposite side and clamp clamp system, the outer diametric plane of the flexible cantilever cover 17 of guide shaft fixing unit and clamp feet 13 interference fit of clamp clamp system moving part.
The both ends and the guide shaft fixing unit 6,8 that are used for producing the piezoelectric actuated piece 3 of axial displacement as main actuated piece connect firmly.Three preloading springs 9 that are connected between 6,8 provide preload pressure for piezoelectric actuated piece 3, are subjected to axle pressure to guarantee 3, prevent its tensile failure.
Link to each other with actuated piece 3 projection of a side of guide shaft fixing unit 6,8 is used to guarantee that the mounting center of cylindric piezoelectric actuated piece 3 and main shaft are coaxial.The another side of guide shaft fixing unit 6,8 is connected with the static part of clamp clamp system 5,7, the outer diametric plane of the flexible cantilever cover of protrusion and the moving part interference fit of clamp clamp system 5,7.The aperture surface of guide shaft fixing unit 6,8 cooperates with main shaft 1 as guide pass, and main shaft is relative motion vertically therein.
Clamp clamp system 5,7 is made of motionless and movable two parts.Static part is the electromagnetic circuit 14 that drives the action of clamp clamp system, is connected with guide shaft fixing unit 6,8 lateral surfaces respectively.Moving part is the circumferential distributed lever clamping institution that is made of flexible hinge, with the outer diametric plane interference fit of the outer flexible cantilever cover that protrudes of guide shaft fixing unit.The Electromagnetic Drive clamping institution produces radially clamp and pine position, thereby the elastic deformation by the cantilever cover clamps or unclamps main shaft.
The motion principle of the little feeding locating device of this creeping motion type piezoelectricity/electrostriction is identical with creeping motion type step motor (inchworm motor).When main shaft 1 is moving component, any of guide shaft fixing unit 6,8 can be fixed in pedestal.If main shaft 1 is fixed in pedestal, by actuated piece 3, guide shaft fixing unit 6 and 8 and the assembly that constitutes of clamp clamp system 5 and 7 can do axially-movable along main shaft.
The structural principle of clamp clamp system 5 or 7 moving part as shown in Figure 3, by three groups along circumferentially distributing and constituting with 12 flexible hinges, 12 interconnected levers.When Electromagnetically actuated power F edge tangentially acts on three groups of six roots of sensation power amplification bars 10 as shown in the figure simultaneously, every pair of power is amplified bar 10 and is along the circumferential direction drawn back, it is big that the circumference that is made of three arcuation bars 11 becomes, and makes that three clamp feets 13 are radially outer to be moved, and realizes the pine position to main shaft.When actuation force F does not do the time spent, mechanism's elastic recovery realizes the clamp of main shaft is clamped.
Guide shaft fixing unit 6 or 8 structural design are as shown in Figure 4, the aperture surface of its mounting flange 15 is slidingly matched as guide rail and main shaft, the outer diametric plane and the coaxial installation of the aperture surface of cylindric piezoelectric actuated piece 3 of left side projection 16, be divided into three lobes with the flexible cantilever cover 17 of the moving part interference fit of clamp clamp system 5 or 7 along circumference, the big radial rigidity of every lobe axial rigidity is little, is equivalent to a semi-girder.In the middle of clamp clamp system 5 or 7 is held tightly by flexible cantilever cover 17 during main shaft 1, the effect of cantilever cover 17 is main shafts 1 in the middle of axially-movable that actuated piece 3 is produced and thrust pass to.Cantilever cover 17 here is an element that serves a dual purpose, and has both guaranteed the feeding bearing accuracy and the rigidity of entire mechanism, reduces the radial impact to main shaft again in clamp/loose bit motion process, improves the stationarity of motion of main shaft.
Clamp clamp system 5 or 7 and guide shaft fixing unit 6 or 8 and the radial fit of main shaft 1 as shown in Figure 5.Pass through the clamping clamp of the outer diametric plane interference fit realization of clamp feet 13 and flexible cantilever cover 17 to main shaft 1 by the interconnected lever clamping institution 5 or 7 of flexible hinge, the size of clamping force is regulated by the magnitude of interference.When Electromagnetically actuated power F edge tangentially acts on three groups of six roots of sensation power amplification bars 10 as shown in the figure simultaneously, every pair of power is amplified bar and is along the circumferential direction drawn back, the circumference that is made of three arcuation bars 11 becomes big, three clamp feets 13 are radially moved outward, three lobe flexible cantilevers overlap 17 elastic recoverys, thereby realize the pine position to main shaft.In clamp/pine position control procedure, lever amplifies actuation force F and pass to clamp feet 13 after the direction conversion by being amplified by the power of rotating around flexible hinge, acts on main shaft 1 through cantilever cover 17 again.Therefore actuation force F that can be less removes and acts on radial pressure bigger on the main shaft 1, and the increase of radial pressure directly improves the axial thrust output of main shaft on the main shaft 1.Adopt the structural design of flexible hinge to have the advantage of the frequency response that reduces clamp impact, raising mechanism.Actuation force F adopts electromagnetic circuit to produce, and is easy to realize and control.Electromagnetic circuit can place three arcuation bar 11 outsides of clamp clamp system, three groups of power to amplify the space between the bar 10, and be fixed on mounting flange 15 lateral surfaces of guide shaft fixing unit 6 or 8.
As above-mentioned, the little feeding locating device of creeping motion type piezoelectricity/electrostriction of the present invention amplifies the clamp clamping force by clamp clamp system 5 and 7, thereby realizes improving the axial thrust output of mechanism; Guide shaft fixing unit 6 and 8 dispose and be beneficial to feeding bearing accuracy and the rigidity that improves mechanism.The compact overall structure of mechanism helps miniaturization, axially bringing into play the high strong point of piezoelectric actuated piece displacement resolution, radially adopting electromagnetic force and mechanism's elastic force, reduced the unnecessary use of piezoelectric actuated piece in clamp system in conjunction with control clamp/loose bit motion.
With main shaft 1 is moving component, and it is example that clamp clamping subassembly 5 and 6 is fixed on pedestal.The little feeding detent mechanism of creeping motion type piezoelectricity/electrostriction is when work, and order applies piezoelectricity and Electromagnetic Drive voltage, at first unclamps clamp system 5, makes main actuated piece 3 elongations, drives main shaft and moves to right a step; Clamp system 5 clampings then, clamp system 7 unclamp, and shed the voltage that is added on main actuated piece 3 and make 3 to return back to original length, and clamp system 7 is clamped.At this moment the little feeding detent mechanism of creeping motion type piezoelectricity/electrostriction is replied original state, finishes a stepping campaign of main shaft.The circulation said process can be realized the creep feed of mechanism.Change two control sequences that clamp clamping institution and main actuated piece, can realize the counter motion of main shaft.Control is added on the voltage waveform of main actuated piece 3, can realize the small step pitch continuous motion in the advance and retreat motion of big step pitch and the cyclic process of changing step.
The little feeding locating device of creeping motion type piezoelectricity/electrostriction of the present invention can three kinds of pattern work: little stroke reciprocating pattern, big stroke step motion pattern and hybrid motion pattern.Wherein, little stroke reciprocating mode class is similar to the motion of single piezo-activator, and the displacement resolution height, response is fast but displacement stroke is little; Big stroke step motion pattern is promptly done vermicular movement, and displacement stroke is big, helps long distance or fast feed location; The hybrid motion pattern is small step pitch motion compound in the vermicular movement and the cyclic process of changing step, and is suitable for high-precision big stroke feeding setting movement control.Three kinds of motor patterns all can be realized by computer control.
The little feeding locating device of creeping motion type piezoelectricity/electrostriction of the present invention uses when open loop is controlled, and system constitutes as shown in Figure 6.Speed of feed can be by changing driving voltage, and the displacement in control per step of piezoelectric spare and the operating frequency of mechanism's integral body are regulated.Open cycle system can be used for not needing strict bearing accuracy but the displacement feeding that requires high displacement resolution is regulated.Because creeping mechanism of the present invention improves rigidity and axial thrust output, can be applicable to the little occasion of precision measurement even load, also be applicable to that microminiature machining assembling etc. needs the occasion of certain load-bearing capacity.
Increase the displacement detecting link, can realize little feeding location closed-loop control system as shown in Figure 7.The little feeding locating device of creeping motion type piezoelectricity/electrostriction of the present invention both can use the peripheral hardware displacement transducer, easy again and displacement transducer integral production.The little feeding detent mechanism of the creeping motion type piezoelectricity/electrostriction of closed loop had both had the characteristics of high displacement resolution, big displacement stroke, had the mechanism of raising rigidity and axial thrust output again, and the function that is easy to control.Widened the range of application of creeping motion type piezoelectricity/electrostriction mechanism aspect little feeding location.
The member of the little feeding locating device of creeping motion type piezoelectricity/electrostriction of the present invention is easy to standardization and modularization.Adopt configuration as shown in Figure 8 can further improve motion of mechanism precision, rigidity and axial thrust output.By two groups piezoelectric actuated alternating movement control, can realize the continuous feed of main shaft easily with the clamp clamp system.
Claims (1)
1, the little feeding locating device of a kind of creeping motion type piezoelectricity/electrostriction comprises main shaft, flexible actuated piece, it is characterized in that also comprising clamp clamp system, guide shaft fixing unit and preloading spring; The both ends of described flexible actuated piece and guide shaft fixing unit relative fixed, the aperture surface of guide shaft fixing unit becomes to be slidingly matched with main shaft; Preloading spring places between the guide shaft fixing unit; Described clamp clamp system is made up of the electromagnetic circuit of static part and power amplification bar, arcuation bar, the flexible hinge of moving part; One side of guide shaft fixing unit links to each other with flexible actuated piece, the electromagnetic circuit relative fixed of opposite side and clamp clamp system, the outer diametric plane of the flexible cantilever cover of guide shaft fixing unit and the clamp feet interference fit of clamp clamp system moving part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98102837 CN1119735C (en) | 1998-07-10 | 1998-07-10 | Creeping type piezoelectric/electrostrictive microfeed positioner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98102837 CN1119735C (en) | 1998-07-10 | 1998-07-10 | Creeping type piezoelectric/electrostrictive microfeed positioner |
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| Publication Number | Publication Date |
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| CN1206865A CN1206865A (en) | 1999-02-03 |
| CN1119735C true CN1119735C (en) | 2003-08-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 98102837 Expired - Fee Related CN1119735C (en) | 1998-07-10 | 1998-07-10 | Creeping type piezoelectric/electrostrictive microfeed positioner |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1845443B (en) * | 2006-03-16 | 2010-05-12 | 中国科学技术大学 | High-precision linear driver with arbitrary distance of run |
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|---|---|---|---|---|
| CN100369283C (en) * | 2003-07-15 | 2008-02-13 | 西北工业大学 | Telescopic deformation claming/locating method |
| CN101207344B (en) * | 2007-11-13 | 2013-07-03 | 哈尔滨工业大学深圳研究生院 | Creeping motion type piezoelectricity straight line driver |
| CN101877550A (en) * | 2010-05-18 | 2010-11-03 | 浙江大学 | Creeping type telescopic microfeeding device and method based on magnetorheology and supermagnetostriction |
| CN101976932B (en) * | 2010-11-12 | 2012-07-04 | 上海交通大学 | Inchworm motion linear electric motor based on electromagnetic clamping mechanism |
| CN108582774B (en) * | 2018-04-26 | 2023-07-25 | 杨斌堂 | Space positioning and pointing actuating system, 3D printer and printing method |
| CN108747585B (en) * | 2018-07-05 | 2024-04-16 | 浙江机电职业技术学院 | Machine tool spindle clamping force on-line monitoring system |
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1998
- 1998-07-10 CN CN 98102837 patent/CN1119735C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1845443B (en) * | 2006-03-16 | 2010-05-12 | 中国科学技术大学 | High-precision linear driver with arbitrary distance of run |
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