CN111929993A - Exposure device - Google Patents
Exposure device Download PDFInfo
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- CN111929993A CN111929993A CN202010843007.5A CN202010843007A CN111929993A CN 111929993 A CN111929993 A CN 111929993A CN 202010843007 A CN202010843007 A CN 202010843007A CN 111929993 A CN111929993 A CN 111929993A
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- liquid crystal
- crystal display
- light
- display mask
- exposure apparatus
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70283—Mask effects on the imaging process
- G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/13306—Circuit arrangements or driving methods for the control of single liquid crystal cells
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Liquid Crystal (AREA)
Abstract
The application relates to an exposure apparatus, including: the liquid crystal display mask comprises a first substrate, a second substrate and a liquid crystal layer, wherein a plurality of liquid crystals are distributed in the liquid crystal layer; the controller is used for controlling the liquid crystal display mask to display a preset pattern and controlling the area of the surface of the liquid crystal display mask except the area covered by the preset pattern to be an opaque area; the first emergent light emitted by the light source irradiates and penetrates through the surface of the liquid crystal display mask, the second emergent light is emitted when the area is covered by the preset pattern, the exposed object is irradiated, the exposed surface of the exposed object irradiated by the second emergent light is exposed to display the preset shape pattern, and the controller controls the rotation direction and/or the distortion degree of the liquid crystal in different areas and controls the intensity value of the second emergent light by controlling the driving voltage value of the liquid crystal in different areas in the liquid crystal layer. The imaging method and the imaging device are simple in imaging, low in cost and high in imaging accuracy.
Description
Technical Field
The present disclosure relates to semiconductor manufacturing technologies, and particularly to an exposure apparatus.
Background
With the rapid development of semiconductor technology and the increasing demand of the market for various semiconductor devices, the market has made higher demands on the supply capacity and product quality of semiconductor manufacturers. The exposure and development is one of the important steps in the etching process of semiconductor devices, and the accuracy of pattern formation by exposure and development is one of the determining factors influencing the etching accuracy and determining the yield, the service life and the working stability of the finally prepared semiconductor devices.
In the conventional exposure and development process, a Light Emitting Diode (LED) parallel exposure machine or a Laser Direct Imaging (LDI) Laser exposure machine is generally used for exposure. However, the LED parallel exposure machine needs to use a film as a carrier of image information, and the production, use and storage of the film require professional equipment and special environments, which may cause a large amount of work and increase unnecessary use cost for the user due to improper handling or special situations. Although the LDI laser exposure machine does not need to use a film for direct imaging, the cost of laser imaging is high, the service life of a laser generator of a core component is short, and the average cost of single successful exposure is high. The cost of exposure is high and the accuracy of exposure imaging is difficult to meet the target requirement, which becomes one of the important influencing factors restricting the development of the semiconductor preparation process.
Disclosure of Invention
In view of the above, it is desirable to provide an exposure apparatus capable of effectively reducing the exposure cost, improving the exposure accuracy, and controlling the exposure degree.
To achieve the above and other objects, the present application provides an exposure apparatus comprising:
the liquid crystal display mask comprises a first base body, a second base body arranged opposite to the first base body and a liquid crystal layer arranged between the first base body and the second base body, wherein a plurality of liquid crystals are distributed in the liquid crystal layer;
the controller is connected with the liquid crystal display mask and is used for controlling the liquid crystal display mask to display a preset pattern and controlling the area of the surface of the liquid crystal display mask except the area covered by the preset pattern to be an opaque area;
the light source is arranged on one side of the liquid crystal display mask, first emergent light emitted by the light source irradiates and penetrates through a region, covered by the preset pattern, of the surface of the liquid crystal display mask, and second emergent light is emitted and irradiates an exposed object, so that the exposed object is exposed by the surface irradiated by the second emergent light to display the preset shape pattern;
the controller controls the rotation direction and/or the distortion degree of the liquid crystal in each different area by controlling the driving voltage values of the liquid crystal in different areas in the liquid crystal layer, so that the liquid crystal display mask displays a preset pattern and controls the intensity value of the second emergent light.
In the exposure apparatus in the above embodiment, the liquid crystal display mask is controlled to display a predetermined pattern, and a region of the surface of the liquid crystal display mask except for a region covered by the predetermined pattern is controlled to be an opaque region, so that a first emergent light emitted by the light source irradiates and passes through the region of the surface of the liquid crystal display mask covered by the predetermined pattern, a second emergent light is emitted, and an exposed object is irradiated, so that the surface of the exposed object irradiated by the second emergent light is exposed to display a predetermined shape pattern. Because the liquid crystal display mask displays the preset pattern without using extra consumables, the imaging is simple, the cost is low and the imaging accuracy is high, thereby effectively reducing the exposure cost and improving the accuracy of the exposure imaging. The driving voltage values of the liquid crystals in different areas in the liquid crystal layer are controlled through the controller, so that the rotation direction and/or the distortion degree of the liquid crystals in different areas are controlled, the liquid crystal display mask displays preset patterns, the strength value of the second emergent light is controlled, the exposure degree or the etching depth of the second emergent light is controlled, and the overall performance of the exposure device is effectively improved.
In one embodiment, the first substrate is a glass substrate; and/or
The second base body is a glass substrate.
In one embodiment, the liquid crystals are arranged in an array.
In one embodiment, the liquid crystal display mask is transparent so as to improve the appearance delicacy of the product.
In one embodiment, the predetermined pattern includes at least one of a circle, an ellipse, a ring, a rectangle, a polygon, or an irregular shape.
In one embodiment, the first outgoing light includes at least one of ultraviolet light, LED light, and laser light, so that a user can select the type of outgoing light of the light source according to different requirements of a specific application scenario.
In one embodiment, the first emergent light is parallel light, and irradiates the liquid crystal display mask along a direction perpendicular to the surface of the display pattern of the liquid crystal display mask, so as to improve the efficiency of exposure imaging.
In one embodiment, when the liquid crystal display mask displays a preset pattern, the first emergent light irradiates and penetrates through the preset pattern on the surface of the liquid crystal display mask and emits a second emergent light, so that the surface of the exposed object irradiated by the second emergent light is exposed to display a preset shape pattern.
In one embodiment, the second emergent light is parallel light, and irradiates the object to be exposed in a direction perpendicular to the upper surface of the object to be exposed right below the liquid crystal display mask, so as to improve the efficiency of exposure imaging.
In one embodiment, the light transmittance of the opaque region is less than or equal to 5% to improve the accuracy of exposure imaging.
In one embodiment, the controller comprises at least one of a desktop, a kiosk, a tablet, a cell phone, a micro control unit, an industrial personal computer, a smart watch, or a smart wearable device.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments or the conventional technologies of the present application, the drawings used in the descriptions of the embodiments or the conventional technologies will be briefly introduced below, it is obvious that the drawings in the following descriptions are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of an exposure apparatus according to an embodiment of the present application;
FIG. 2 is a schematic cross-sectional view illustrating an LCD mask of an exposure apparatus according to an embodiment of the present disclosure;
fig. 3 is a schematic top view of a liquid crystal layer in a liquid crystal display mask of an exposure apparatus according to an embodiment of the present disclosure.
Description of reference numerals:
10-liquid crystal display mask, 20-controller, 30-light source, 40-exposed object, 11-first substrate, 12-second substrate, 13-liquid crystal layer, 131-liquid crystal, 31-first emergent light, 32-second emergent light and 41-preset shape pattern.
Detailed Description
To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
Spatially relative terms such as "upper" and "lower" are defined herein with reference to the drawings. Thus, it will be understood that "upper" and "lower" may be used interchangeably. It will be understood that when a layer is referred to as being "on" another layer, it can be formed directly on the other layer, or intervening layers may also be present. Thus, it will be understood that when a layer is referred to as being "directly on" another layer, there are no intervening layers interposed therebetween.
In the drawings, the size of layers and regions may be exaggerated for clarity. It will be understood that when a layer or element is referred to as being "on" another layer or substrate, it can be directly on the other layer or substrate, or intervening layers may also be present. In addition, it will also be understood that when a layer is referred to as being "between" two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present. Like reference numerals refer to like elements throughout.
Hereinafter, although terms such as "first", "second", and the like may be used to describe various components, the components are not necessarily limited to the above terms. The above terms are only used to distinguish one component from another. It will also be understood that expressions used in the singular include expressions of the plural unless the singular has a distinctly different meaning in the context. Furthermore, in the following embodiments, it will be further understood that the terms "comprises" and/or "comprising," when used herein, specify the presence of stated features or components, but do not preclude the presence or addition of one or more other features or components.
In the following embodiments, when layers, regions or elements are "connected", it may be interpreted that the layers, regions or elements are not only directly connected but also connected through other constituent elements interposed therebetween. For example, when layers, regions, elements, etc. are described as being connected or electrically connected, the layers, regions, elements, etc. may be connected or electrically connected not only directly or directly but also through another layer, region, element, etc. interposed therebetween.
As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items. When a statement such as "at least one (or" an) of … … is placed after a list of elements (elements), the entire list of elements (elements) is modified rather than modifying individual elements (elements) in the list.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
It will be further understood that the terms "comprises/comprising," "includes" or "including," etc., specify the presence of stated features, integers, steps, operations, components, parts, or combinations thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.
Electronic or electrical devices and/or any other related devices or components (e.g., display devices including exposure devices and exposure device drivers, wherein the exposure device drivers also include a driver controller, a gate driver, a gamma reference voltage generator, a data driver, and a transmit driver) according to embodiments of the inventive concepts described herein may be implemented using any suitable hardware, firmware (e.g., application specific integrated circuits), software, or a combination of software, firmware, and hardware. For example, various components of these devices may be formed on one Integrated Circuit (IC) chip or on separate IC chips. In addition, various components of these devices may be implemented on a flexible printed circuit film, a Tape Carrier Package (TCP), a Printed Circuit Board (PCB), or formed on one substrate. In addition, various components of these devices may be processes or threads that execute on one or more processors in one or more computing devices, thereby executing computer program instructions and interacting with other system components to perform the various functions described herein. Moreover, those skilled in the art will recognize that the functions of the various computing devices may be combined or integrated into a single computing device, or that the functions of a particular computing device may be distributed across one or more other computing devices, without departing from the spirit and scope of the exemplary embodiments of the present inventive concept.
The liquid crystal display generally includes two glass substrates and a liquid crystal layer located between the two glass substrates, the liquid crystal layer includes a liquid crystal cell and polarizers located at two sides of the liquid crystal cell, and the liquid crystal cell includes a color filter substrate, a TFT array substrate and a liquid crystal filled between the color filter substrate and the TFT array substrate. The TFT array is arranged on the TFT array substrate and comprises a TFT unit corresponding to each pixel point, and the rotation direction/distortion degree of liquid crystal molecules is controlled by controlling the change of signals and voltage of the TFT units, so that whether polarized light of each pixel point is emitted or not and the intensity of the emitted light are controlled, and the display purpose is achieved.
This application provides a liquid crystal display mask based on liquid crystal display's formation of image principle, sets up the liquid crystal display mask and is connected with the controller, shows predetermined pattern through controller control liquid crystal display mask for the first emergent light that the light source sent shines and passes the second emergent light is jetted out on the surface of liquid crystal display mask, second emergent light shines by the exposure thing, makes by the exposure thing quilt the surface exposure of second emergent light shines shows predetermined shape pattern.
Referring to fig. 1 and 2, in an embodiment of the present application, an exposure apparatus is provided, which includes a liquid crystal display mask 10, a controller 20 and a light source 30, where the liquid crystal display mask 10 includes a first substrate 11, a second substrate 12 disposed opposite to the first substrate 11, and a liquid crystal layer 13 disposed between the first substrate 11 and the second substrate 12, and a plurality of liquid crystals 131 are distributed in the liquid crystal layer 13; the controller 20 is connected to the liquid crystal display mask 10, and is configured to control the liquid crystal display mask 10 to display a preset pattern, and control a region of the surface of the liquid crystal display mask 10, except a region covered by the preset pattern, to be an opaque region; the light source 30 is arranged at one side of the liquid crystal display mask 10, and first emergent light 31 emitted by the light source 30 irradiates and penetrates through the surface of the liquid crystal display mask 10 to emit second emergent light 32; the second outgoing light 32 is used for irradiating the object to be exposed 40, so that the surface of the object to be exposed 40 irradiated by the second outgoing light 32 is exposed to display a preset shape pattern;
specifically, in the exposure apparatus in the above embodiment, the liquid crystal display mask 10 is controlled to display a predetermined pattern, and a region of the surface of the liquid crystal display mask 10 except for a region covered by the predetermined pattern is controlled to be an opaque region, so that the first outgoing light 31 emitted by the light source 30 irradiates and passes through the surface of the liquid crystal display mask 10 to emit the second outgoing light 32 to irradiate the object to be exposed 40, and the surface of the object to be exposed 40 irradiated by the second outgoing light 32 is exposed to display a predetermined shape pattern. Since the liquid crystal display mask 10 displays the preset pattern without using additional consumables, the imaging is simple, the cost is low, and the imaging accuracy is high, thereby effectively reducing the exposure cost and improving the exposure accuracy.
Specifically, referring to fig. 2, in an embodiment of the present application, the liquid crystal display mask 10 includes a first substrate 11, a second substrate 12 and a liquid crystal layer 13, wherein the second substrate 12 is disposed opposite to the first substrate 11; the liquid crystal layer 13 is arranged between the first substrate 11 and the second substrate 12, and a plurality of liquid crystals 131 are distributed in the liquid crystal layer 13; the controller 20 controls the driving voltage values of the liquid crystals 131 in different regions in the liquid crystal layer 13 to control the rotation direction and/or the distortion degree of the liquid crystals 131 in different regions, so that the liquid crystal display mask 10 displays a preset pattern, and controls the intensity value of the second emergent light to control the exposure degree or the etching depth of the second emergent light, thereby effectively improving the overall performance of the exposure device.
Preferably, in one embodiment of the present application, the first base is a glass substrate; and/or the second substrate is a glass substrate, so that the manufacturing cost of the liquid crystal display mask is reduced, and the refraction loss of the first substrate and/or the second substrate to the passing light is reduced.
Preferably, in an embodiment of the present application, referring to fig. 3, the liquid 131 is arranged in an array to reduce the complexity of controlling the imaging of the liquid crystal display mask by the controller through controlling the driving voltage of each liquid crystal.
Preferably, in an embodiment of the present application, the liquid crystal display mask is transparent to improve the appearance delicacy of the product.
Preferably, in an embodiment of the present application, the predetermined pattern includes at least one of a circle, an ellipse, a ring, a rectangle, a polygon or an irregular shape, so as to meet different requirements of different application scenarios on the shape of the exposure image or the etching shape.
Preferably, in an embodiment of the present application, the first outgoing light emitted by the light source includes at least one of ultraviolet light, LED light and laser light, so that a user can select the type of the outgoing light of the light source according to the requirements of a specific application scenario.
As an example, continuing to refer to fig. 1, when the user needs ultraviolet rays to irradiate the object to be exposed 40 to realize exposure imaging, the light source 30 may be set to emit ultraviolet rays. The controller 20 controls the liquid crystal display mask 10 to display a preset pattern, and the ultraviolet rays emitted by the light source 30 irradiate and emit second emergent light through the surface of the liquid crystal display mask 10, and the second emergent light irradiates the object to be exposed 40, so that the surface of the object to be exposed 40 irradiated by the second emergent light is exposed to display a preset shape pattern.
As an example, continuing to refer to fig. 1, when the user needs the LED parallel light to illuminate the object 40 to be exposed to realize exposure imaging, the light source 30 may be set to emit the LED parallel light. The controller 20 controls the liquid crystal display mask 10 to display a preset pattern, and the LED parallel light emitted by the light source 30 irradiates and penetrates through the surface of the liquid crystal display mask 10 to emit a second emergent light, and the second emergent light irradiates the object to be exposed 40, so that the surface of the object to be exposed 40 irradiated by the second emergent light is exposed to display a preset shape pattern.
Preferably, in an embodiment of the present application, the second outgoing light is parallel light, and irradiates the object to be exposed in a direction perpendicular to an upper surface of the object to be exposed directly below the liquid crystal display mask, so as to improve the efficiency of exposure imaging.
Preferably, in an embodiment of the present application, the first outgoing light is parallel light, and irradiates the liquid crystal display mask along a direction perpendicular to a surface of a display pattern of the liquid crystal display mask, so as to improve efficiency of exposure imaging.
Preferably, in an embodiment of the present application, the first outgoing light irradiates and passes through, intensity of outgoing light when an area (opaque area) on the surface of the liquid crystal display mask except for the area covered by the preset pattern is smaller than or equal to a preset light intensity threshold, for example, light transmittance of the opaque area on the surface of the liquid crystal display mask is smaller than or equal to 5%, so that the first outgoing light irradiates and passes through the preset pattern on the surface of the liquid crystal display mask and emits a second outgoing light, and the second outgoing light irradiates the surface of the exposed object, so that the surface of the exposed object is exposed to display the preset shape pattern, and the process difficulty and cost of exposure imaging are reduced while the accuracy of exposure imaging is improved.
As an example, in an embodiment of the present application, the controller may control the liquid crystal display mask to display a preset pattern, and control an area of the surface of the liquid crystal display mask except for an area covered by the preset pattern to be black, that is, control an area of the surface of the liquid crystal display mask except for the area covered by the preset pattern to be opaque or substantially opaque, so that the first outgoing light emitted by the light source 30 can only emit the second outgoing light through the area covered by the preset pattern on the surface of the liquid crystal display mask, and the second outgoing light irradiates the exposed object 40, so that the surface of the exposed object 40 irradiated by the second outgoing light is exposed to display a preset shape pattern.
Preferably, in one embodiment of the present application, the controller includes at least one of a desktop, a kiosk, a tablet, a cell phone, a micro control unit, an industrial personal computer, a smart watch, or a smart wearable device.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. An exposure apparatus, comprising:
the liquid crystal display mask comprises a first base body, a second base body arranged opposite to the first base body and a liquid crystal layer arranged between the first base body and the second base body, wherein a plurality of liquid crystals are distributed in the liquid crystal layer;
the controller is connected with the liquid crystal display mask and is used for controlling the liquid crystal display mask to display a preset pattern and controlling the area of the surface of the liquid crystal display mask except the area covered by the preset pattern to be an opaque area;
the light source is arranged on one side of the liquid crystal display mask, first emergent light emitted by the light source irradiates and penetrates through a region, covered by the preset pattern, of the surface of the liquid crystal display mask, and second emergent light is emitted and irradiates an exposed object, so that the exposed object is exposed by the surface irradiated by the second emergent light to display the preset shape pattern;
the controller controls the rotation direction and/or the distortion degree of the liquid crystal in each different area by controlling the driving voltage values of the liquid crystal in different areas in the liquid crystal layer, so that the liquid crystal display mask displays a preset pattern and controls the intensity value of the second emergent light.
2. The exposure apparatus according to claim 1, wherein:
the first base body is a glass substrate; and/or
The second base body is a glass substrate.
3. The exposure apparatus according to claim 1, wherein the liquid crystals are arranged in an array.
4. The exposure apparatus according to claim 1, wherein the liquid crystal display mask is transparent.
5. The exposure apparatus according to claim 1, wherein the predetermined pattern includes at least one of a circular shape, an elliptical shape, a circular shape, a rectangular shape, a polygonal shape, or an irregular shape.
6. The exposure apparatus according to any one of claims 1 to 5, wherein the first emitted light includes at least one of ultraviolet light, LED light, and laser light.
7. The exposure apparatus according to any one of claims 1 to 5, wherein the first exit light is parallel light, and irradiates the liquid crystal display mask in a direction perpendicular to a surface of the display pattern of the liquid crystal display mask.
8. The exposure apparatus according to any one of claims 1 to 5, wherein the second outgoing light is parallel light, and the object to be exposed is irradiated in a direction perpendicular to an upper surface of the object to be exposed directly below the liquid crystal display mask.
9. The exposure apparatus according to any one of claims 1 to 5, wherein the light-impermeable region has a light transmittance of 5% or less.
10. The exposure apparatus of any one of claims 1-5, wherein the controller comprises at least one of a desktop, a kiosk, a tablet, a cell phone, a micro control unit, an industrial personal computer, a smart watch, or a smart wearable device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010843007.5A CN111929993A (en) | 2020-08-20 | 2020-08-20 | Exposure device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010843007.5A CN111929993A (en) | 2020-08-20 | 2020-08-20 | Exposure device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111929993A true CN111929993A (en) | 2020-11-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010843007.5A Pending CN111929993A (en) | 2020-08-20 | 2020-08-20 | Exposure device |
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| Country | Link |
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| CN (1) | CN111929993A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023016154A1 (en) * | 2021-08-09 | 2023-02-16 | Oppo广东移动通信有限公司 | Film and preparation method therefor, housing, and electronic device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1152541A (en) * | 1997-08-08 | 1999-02-26 | Yokogawa Electric Corp | Exposure mask device |
| CN101169550A (en) * | 2007-12-04 | 2008-04-30 | 友达光电股份有限公司 | Colorful filter substrate and pattern mask |
| CN202548530U (en) * | 2012-01-09 | 2012-11-21 | 京东方科技集团股份有限公司 | Mask plate and mask plate system |
| CN105182628A (en) * | 2015-10-26 | 2015-12-23 | 京东方科技集团股份有限公司 | Mask plate and composition process system and method |
| CN209356784U (en) * | 2019-03-14 | 2019-09-06 | 苏州苏大维格科技集团股份有限公司 | A kind of LCD electric-controlled mask |
-
2020
- 2020-08-20 CN CN202010843007.5A patent/CN111929993A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1152541A (en) * | 1997-08-08 | 1999-02-26 | Yokogawa Electric Corp | Exposure mask device |
| CN101169550A (en) * | 2007-12-04 | 2008-04-30 | 友达光电股份有限公司 | Colorful filter substrate and pattern mask |
| CN202548530U (en) * | 2012-01-09 | 2012-11-21 | 京东方科技集团股份有限公司 | Mask plate and mask plate system |
| CN105182628A (en) * | 2015-10-26 | 2015-12-23 | 京东方科技集团股份有限公司 | Mask plate and composition process system and method |
| CN209356784U (en) * | 2019-03-14 | 2019-09-06 | 苏州苏大维格科技集团股份有限公司 | A kind of LCD electric-controlled mask |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023016154A1 (en) * | 2021-08-09 | 2023-02-16 | Oppo广东移动通信有限公司 | Film and preparation method therefor, housing, and electronic device |
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