CN111927777A - Screw vacuum pump and design method of rotor profile thereof - Google Patents
Screw vacuum pump and design method of rotor profile thereof Download PDFInfo
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- CN111927777A CN111927777A CN202010144380.1A CN202010144380A CN111927777A CN 111927777 A CN111927777 A CN 111927777A CN 202010144380 A CN202010144380 A CN 202010144380A CN 111927777 A CN111927777 A CN 111927777A
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- vacuum pump
- epicycloid
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- 238000000034 method Methods 0.000 title claims abstract description 20
- 239000000126 substance Substances 0.000 claims description 3
- 238000009826 distribution Methods 0.000 abstract description 4
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2250/00—Geometry
- F04C2250/20—Geometry of the rotor
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
The invention provides a screw vacuum pump and a design method of a rotor profile thereof, belonging to the technical field of a positive displacement double-screw rotary compressor, wherein the screw vacuum pump comprises: the end face molded lines of the two screws are formed by point meshing epicycloids, addendum circular arc lines, short-amplitude epicycloids, hypocycloids and tooth root circular arc lines which are sequentially connected; the radius of the tooth root arc is r1The radius of the tooth crest arc line is r2‑2Pitch radius r of two said screwspComprises the following steps:
the inventionThe screw vacuum pump is provided with a new rotor profile, on the basis of rotor meshing, through reasonable curve adjustment, the rotor profile can generate a screw rotor structure according to required gaps, reasonable gap design can be carried out from a profile design stage, the gap distribution between rotors is more uniform, the leakage between screw vacuum rotors is reduced, and the overall performance of the vacuum pump is improved.
Description
Technical Field
The invention relates to the technical field of a positive displacement double-screw rotary compressor, in particular to a screw vacuum pump and a design method of a rotor profile of the screw vacuum pump.
Background
With the development of the medical and semiconductor industries, more and more use scenes with low pollution and high vacuum requirements emerge in industrial production. The screw vacuum pump is a main pump type of large and medium dry pumps which obtain dry and low-pollution high-vacuum environment and compress clean gas. The screw vacuum pump is an air pumping device which utilizes a pair of screws to synchronously rotate in a high speed and reverse direction in a pump shell to generate air suction and exhaust functions, the core part in the screw vacuum pump is two rotors which are meshed with each other, the molded lines of the end faces of the rotors determine the structures of the rotors, and the selection of the molded lines of the rotors generally conforms to the meshing theorem, namely, the rotors can be meshed without gaps.
For example, chinese patent document CN106438357A discloses a screw vacuum pump, comprising: the two screws with the same end face molded lines and opposite rotation directions have the end face molded lines of an epicycloid, a hypocycloid, a tooth root circular arc, a long-amplitude epicycloid and a tooth crest circular arc in sequence around the screw axis. Two screw rods of above-mentioned scheme sealed mesh each other can satisfy the meshing when two screw rods rotate sealed, and sealed effect is better.
However, in the actual production process, machining errors and the influence of the thermal deformation effect of the rotors in the operation process are often designed to give a reasonable gap between the two rotors so as to prevent the thermal seizure phenomenon. But at the same time this gap exacerbates leakage between the rotor chambers, which can reduce the overall performance of the vacuum pump. Therefore, the design mode of the clearance has great influence on the performance of the screw vacuum pump. The traditional mode that adopts increase centre-to-centre spacing design clearance can lead to the interval between the rotor to distribute unevenly, will be located the interval adjustment between the tooth top circular arc line after suitable, lead to being located the interval between the short-width epicycloid great to the performance of vacuum has seriously been reduced.
Disclosure of Invention
Therefore, the technical problem to be solved by the present invention is to overcome the defect of uneven distribution of the distance between two screws of the screw vacuum pump in the prior art, so as to provide a screw vacuum pump and a design method of a rotor profile thereof.
In order to solve the above technical problem, the present invention provides a screw vacuum pump, comprising: the end face molded lines of the two screws are formed by point meshing epicycloids, addendum circular arc lines, short-amplitude epicycloids, hypocycloids and tooth root circular arc lines which are sequentially connected;
the radius of the tooth root arc is r1The radius of the tooth crest arc line is r2-2Pitch radius r of two said screwspComprises the following steps:
the equation for the short-amplitude epicycloid is:
wherein the variable χ satisfies the following relationship:
namely when
While, the short breadthThe distance between epicycloid and origin is r2-2。
Preferably, the hypocycloid has the following equation:
preferably, the points mesh with epicycloids a1A'2The parameter equation of (1) is as follows:
wherein
The following relationship is satisfied:
namely when
Is taken as
When obtaining the point
Distance r from origin2-2。
Preferably, the equation of the addendum circle arc is as follows:
wherein the parameter beta is a solvable quantity;
the tooth root circular arc line A'5A1The parameter equation of (1) is as follows:
wherein the content of the first and second substances,
the aforementioned parameter β is comprised of
Obtaining; the above-mentioned1Is a combined curve segment A 'of a short-amplitude epicycloid and a hypocycloid'3A'4A′5Curve segment A in original line3A4A5The difference in the angle of rotation of (c).
The invention also provides a design method of the rotor profile of the screw vacuum pump, which comprises the following steps:
on the basis of the existing rotor end surface molded line, the arc of the tooth root circular arc line and the point meshing epicycloid is kept unchanged, and the intersection point of the tooth root circular arc line and the point meshing epicycloid is determined as A1；
The radius of the existing tooth crest arc line is reduced to r2-2The intersection point of the new addendum circle arc line and the point-meshing epicycloid is determined as A ″2；
The middle curve composed of the existing short-amplitude epicycloid and hypocycloid is integrally rotated towards the direction of the tooth crest arc line1At the intersection point A of the short-amplitude epicycloid and hypocycloid during rotation4The pitch circle is the locus movement, and the new intersection point of the short-amplitude epicycloid and hypocycloid after the movement is determined as A ″4(ii) a Radius r of the pitch circlepComprises the following steps:
the intersection point of the middle curve formed by the short-amplitude epicycloid and hypocycloid after moving and the arc line of the tooth root is determined as A ″5；
The intersection point of the middle curve formed by the moved short epicycloid and hypocycloid and the new addendum circle arc line is determined as A ″3；
With A1、A`2、A`3、A`4And A5The connected curve is determined as the new rotor end profile.
Preferably, the above-mentioned1The corner clearance of the middle curve is determined according to the working condition.
Preferably, the above-mentioned2The tooth top arc clearance is determined according to the working condition.
The technical scheme of the invention has the following advantages:
1. the screw vacuum pump provided by the invention has a new rotor profile, on the basis of rotor meshing, the rotor profile can generate a screw rotor structure according to the required clearance through reasonable curve adjustment, the reasonable clearance design can be realized from the profile design stage, the clearance distribution among the rotors is more uniform, the leakage among the screw vacuum rotors is reduced, and the overall performance of the vacuum pump is improved.
2. The screw vacuum pump provided by the invention can realize meshing with a gap in the rotating meshing process, and avoids the influence of machining errors and the thermal deformation effect of a rotor in the operation process.
3. According to the design method of the rotor profile of the screw vacuum pump, the end face profile of the screw can be determined by the radius r of the addendum circle arc line2Radius r of root circle arc1Arc gap of tooth top2Intermediate curve corner clearance1Unique determination; by following the tooth crest arc clearance2And the corner clearance of the middle curve1The design of the rotor profile is carried out, so that the gap distribution of the screw rotor is more uniform, and the performance of the screw rotor is effectively improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic diagram of a design method of an end face profile of a screw vacuum pump according to the present invention.
Fig. 2 is a schematic end-face profile of a screw of a conventional screw vacuum pump.
Fig. 3 is a schematic end-face profile of two screws of the screw vacuum pump according to the present invention.
Fig. 4 is a schematic diagram of the second state of fig. 3.
Fig. 5 is a schematic diagram of the third state of fig. 3.
Fig. 6 is a diagram illustrating a fourth state of fig. 3.
Description of reference numerals:
1. a screw; 2. point-meshing epicycloid; 3. tooth top arc line; 4. a short-amplitude epicycloid; 5. hypocycloids; 6. the tooth root is a circular arc line.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Example 1
In the present embodiment, as shown in fig. 1 and 2, on the basis of the existing rotor end surface profile, the root circular arc 6 and the arc of the point-meshing epicycloid 2 are kept unchanged, and the intersection point of the root circular arc 6 and the point-meshing epicycloid 2 is determined as a1。
Then the method comprises the following steps:
first, the radius of the existing tooth crest arc line 3 is reduced to r2-2Said2The tooth top arc clearance is determined according to the working condition.
Secondly, determining the intersection point of the new addendum circular arc line 3 and the point meshing epicycloid 2 as A ″2。
Thirdly, the whole middle curve formed by the existing short-amplitude epicycloid 4 and hypocycloid 5 is rotated towards the direction of the addendum circular arc 31Angle of (a) of1The corner clearance of the middle curve is determined according to the working condition. The intersection point A of the short-amplitude epicycloid 4 and the hypocycloid 5 is formed during the rotation process4The pitch circle is the locus movement, and the new intersection point of the short-amplitude epicycloid 4 and the hypocycloid 5 after the movement is determined as A ″4(ii) a Radius r of the pitch circlepComprises the following steps:
fourthly, the intersection point of the middle curve formed by the short-amplitude epicycloid 4 and the hypocycloid 5 after moving and the tooth root circular arc 6 is determined as A ″5；
Fifthly, determining the intersection point of a middle curve formed by the shifted short-amplitude epicycloid 4 and hypocycloid 5 and the new addendum circular arc 3 as A ″3；
The sixth step, with A1、A`2、A`3、A`4And A5The connected curve is determined as the new rotor end profile.
Example 2
The embodiment provides a screw vacuum pump, and in the rotating and meshing process of the screws shown in fig. 3-6, the two screws can be meshed with each other with a gap, so that the influence of machining errors and the thermal deformation effect of a rotor in the operation process is avoided.
The screw vacuum pump that this embodiment provided includes: the method comprises the following steps that two screws 1 with the same end face molded lines and opposite rotation directions are adopted, the end face molded lines of the screws 1 are designed by the method in the embodiment 1, and the end face molded lines are composed of point meshing epicycloids 2, addendum circular arc lines 3, short-amplitude epicycloids 4, hypocycloids 5 and dedendum circular arc lines 6 which are sequentially connected;
the radius of the tooth root arc is r1The radius of the tooth crest arc line is r2-2The pitch circle radius r of the two screw rods 1pComprises the following steps:
the equation for the short-amplitude epicycloid 4 is:
wherein the variable χ satisfies the following relationship:
namely when
While, the short breadthThe epicycloid 4 is at a distance r from the origin2-2。
The equation for hypocycloid 5 is:
said point-meshing epicycloid A1A'2The parameter equation of (1) is as follows:
wherein
The following relationship is satisfied:
namely when
Is taken as
When obtaining the point
Distance r from origin2-2。
The equation of the addendum circular arc 3 is as follows:
wherein the parameter beta is a solvable quantity;
the tooth root arc line A5'A1The parameter equation of (1) is as follows:
wherein the content of the first and second substances,
the aforementioned parameter β is comprised of
Obtaining; the above-mentioned1Is a combined curve segment A 'of a short-amplitude epicycloid 4 and a hypocycloid 5'3A'4A′5Curve segment A in original line3A4A5The difference in the angle of rotation of (c).
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are intended to be within the scope of the invention.
Claims (7)
1. A screw vacuum pump, comprising: the screw rod comprises two screw rods (1) with the same end face profile and opposite rotation directions, wherein the end face profile of each screw rod (1) consists of a point meshing epicycloid (2), an addendum circular arc (3), a short-amplitude epicycloid (4), a hypocycloid (5) and a dedendum circular arc (6) which are sequentially connected;
the radius of the tooth root arc is r1The radius of the tooth crest arc line is r2-2The pitch circle radius r of the two screw rods (1)pComprises the following steps:
the equation of the short-amplitude epicycloid (4) is as follows:
wherein the variable χ satisfies the following relationship:
namely when
When the distance between the short-amplitude epicycloid (4) and the origin is r2-2。
2. Screw vacuum pump according to claim 1, characterized in that the equation of the hypocycloid (5) is:
3. a screw vacuum pump according to claim 1, wherein the point-meshing epicycloid a1A'2The parameter equation of (1) is as follows:
wherein
The following relationship is satisfied:
namely when
Is taken as
When obtaining the point
Distance r from origin2-2。
4. Screw vacuum pump according to claim 1, characterized in that the equation of the addendum arc line (3) is:
wherein the parameter beta is a solvable quantity;
the tooth root circular arc line A'5A1The parameter equation of (1) is as follows:
wherein the content of the first and second substances,
the aforementioned parameter β is comprised of
Obtaining; the above-mentioned1Is a combined curve segment A 'of a short-amplitude epicycloid (4) and a hypocycloid (5)'3A′4A′5Curve segment A in original line3A4A5The difference in the angle of rotation of (c).
5. A design method of a rotor profile of a screw vacuum pump is characterized by comprising the following steps:
on the basis of the existing rotor end surface molded line, the arc of the tooth root circular arc line (6) and the point meshing epicycloid (2) is kept unchanged, and the intersection point of the tooth root circular arc line (6) and the point meshing epicycloid (2) is determined as A1；
Make the existing addendum circleRadius of arc is reduced to r2-2The intersection point of the new addendum circular arc line (3) and the point meshing epicycloid (2) is determined as A ″2；
The whole middle curve formed by the prior short-amplitude epicycloid (4) and hypocycloid (5) rotates towards the direction of the tooth crest circular arc line (3)1With a short-amplitude epicycloid (4) and hypocycloid (5) intersection point A during rotation4The pitch circle is the locus movement, and the new intersection point of the short-amplitude epicycloid (4) and the hypocycloid (5) after the movement is determined as A ″4(ii) a Radius r of the pitch circlepComprises the following steps:
the intersection point of the middle curve formed by the short-amplitude epicycloid (4) and the hypocycloid (5) after moving and the root circular arc (6) is determined as A ″5；
The intersection point of the middle curve formed by the shifted short-amplitude epicycloid (4) and hypocycloid (5) and the new addendum circular arc (3) is determined as A ″3；
With A1、A`2、A`3、A`4And A5The connected curve is determined as the new rotor end profile.
6. Method for designing a rotor profile of a screw vacuum pump according to claim 5, wherein the rotor profile is a profile of a screw vacuum pump1The corner clearance of the middle curve is determined according to the working condition.
7. Method for designing a rotor profile of a screw vacuum pump according to claim 5, wherein the rotor profile is a profile of a screw vacuum pump2The tooth top arc clearance is determined according to the working condition.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2019114148435 | 2019-12-31 | ||
| CN201911414843 | 2019-12-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111927777A true CN111927777A (en) | 2020-11-13 |
Family
ID=73316133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010144380.1A Withdrawn CN111927777A (en) | 2019-12-31 | 2020-03-04 | Screw vacuum pump and design method of rotor profile thereof |
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| Country | Link |
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| CN (1) | CN111927777A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113638880A (en) * | 2021-09-06 | 2021-11-12 | 台州学院 | Screw vacuum pump and screw rotor thereof |
| CN113833655A (en) * | 2021-11-02 | 2021-12-24 | 杭州久益机械股份有限公司 | Screw vacuum pump rotor and screw vacuum pump |
| CN115076106A (en) * | 2022-06-24 | 2022-09-20 | 宁波爱发科机械制造有限公司 | Rotor profile of screw vacuum pump |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN203906294U (en) * | 2014-06-20 | 2014-10-29 | 巫修海 | Screw assembly of screw vacuum pump |
| CN105240277A (en) * | 2015-11-09 | 2016-01-13 | 中国石油大学(华东) | Fully-smooth screw rotor of twin-screw vacuum pump |
| CN106401958A (en) * | 2016-12-08 | 2017-02-15 | 合肥工业大学 | Screw vacuum pump rotor profile |
| CN107829931A (en) * | 2017-11-02 | 2018-03-23 | 西安交通大学 | A kind of Twin-screw vacuum pump molded lines of rotor |
| CN212003590U (en) * | 2019-12-31 | 2020-11-24 | 中科九微科技有限公司 | Screw vacuum pump |
-
2020
- 2020-03-04 CN CN202010144380.1A patent/CN111927777A/en not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203906294U (en) * | 2014-06-20 | 2014-10-29 | 巫修海 | Screw assembly of screw vacuum pump |
| CN105240277A (en) * | 2015-11-09 | 2016-01-13 | 中国石油大学(华东) | Fully-smooth screw rotor of twin-screw vacuum pump |
| CN106401958A (en) * | 2016-12-08 | 2017-02-15 | 合肥工业大学 | Screw vacuum pump rotor profile |
| CN107829931A (en) * | 2017-11-02 | 2018-03-23 | 西安交通大学 | A kind of Twin-screw vacuum pump molded lines of rotor |
| CN212003590U (en) * | 2019-12-31 | 2020-11-24 | 中科九微科技有限公司 | Screw vacuum pump |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113638880A (en) * | 2021-09-06 | 2021-11-12 | 台州学院 | Screw vacuum pump and screw rotor thereof |
| CN113833655A (en) * | 2021-11-02 | 2021-12-24 | 杭州久益机械股份有限公司 | Screw vacuum pump rotor and screw vacuum pump |
| CN115076106A (en) * | 2022-06-24 | 2022-09-20 | 宁波爱发科机械制造有限公司 | Rotor profile of screw vacuum pump |
| CN115076106B (en) * | 2022-06-24 | 2023-12-08 | 宁波爱发科机械制造有限公司 | Screw vacuum pump rotor |
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Application publication date: 20201113 |