CN111900609B - Pulse delay controllable double-beam laser system and control method thereof - Google Patents
Pulse delay controllable double-beam laser system and control method thereof Download PDFInfo
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- CN111900609B CN111900609B CN202010760756.1A CN202010760756A CN111900609B CN 111900609 B CN111900609 B CN 111900609B CN 202010760756 A CN202010760756 A CN 202010760756A CN 111900609 B CN111900609 B CN 111900609B
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Abstract
The invention discloses a pulse delay controllable double-beam laser system, and relates to the technical field of laser systems. The system comprises a laser, a frequency doubling crystal, a frequency tripling crystal, a wavelength separating mirror, a frequency quintupling crystal, a pulse delay parameter subsystem, a resonant cavity and a beam combining sheet; the laser emits 1064nm laser to form a first light path, and a frequency doubling crystal, a frequency tripling crystal, a wavelength separating mirror, a frequency quintupling crystal and a pulse delay parameter subsystem are sequentially arranged on the first light path; the wavelength separation mirror separates a path of 355nm laser to form a second light path, and the resonant cavity is arranged on the second light path; the pulse delay parameter subsystem and the light path emitted by the resonant cavity are intersected at one point, and the beam combining sheet is arranged on the light path emitted by the pulse delay parameter subsystem or the light path emitted by the resonant cavity and can translate along the light path. The invention indirectly controls the pulse delay time of the two beams of light by controlling the rotation angle of the triple prism.
Description
Technical Field
The invention relates to the technical field of laser systems, in particular to a pulse delay controllable double-beam laser system and a control method thereof.
Background
At present, the detection of trace organic pollution such as dioxin in gas is mainly based on an off-line detection method (HJ 77.2), and the purpose of on-line detection cannot be realized. The laser ionization and time-of-flight mass spectrometry technology has great advantages in the aspect of online detection of trace organic pollutants, and is a main development direction of the online detection technology of the trace organic pollutants. The main technical principle is that selective soft ionization and quantitative detection of a sample to be detected are finally realized by combining the absorption ionization characteristic of molecules to be detected on multiphoton and flight time mass spectrum detection. Compared with other traditional ionization source detection technologies such as EI, CI, ultraviolet lamps and the like, the ionization source detection method has the advantages of being strong in selectivity, small in interference, few in ion fragments, strong in anti-pollution capacity and the like. Because trace substances such as dioxin and the like have the characteristics of complex components, large molecular weight, extremely low content and the like, two beams of deep ultraviolet laser with certain wavelength are needed. The pulse delay time represents the time difference between the arrival of two beams of light at the ionization detection point, and has a great influence on the detection signal intensity of the dioxin on-line monitoring system, so that how to adjust the pulse delay time of the laser system is one of the problems to be solved urgently.
Disclosure of Invention
The invention aims to provide a pulse delay controllable double-beam laser system and a control method thereof, which indirectly control the pulse delay time of two beams of light by controlling the rotating angle of a triple prism.
In order to achieve the purpose, the invention provides the following technical scheme:
a pulse delay controllable double-beam laser system is characterized by comprising a laser, a frequency doubling crystal, a frequency tripling crystal, a wavelength separating mirror, a frequency quintupling crystal, a pulse delay parameter subsystem, a resonant cavity and a beam combining sheet; the laser emits 1064nm laser to form a first light path, and a frequency doubling crystal, a frequency tripling crystal, a wavelength separating mirror, a frequency quintupling crystal and a pulse delay parameter subsystem are sequentially arranged on the first light path; the wavelength separation mirror separates a path of 355nm laser to form a second light path, and the resonant cavity is arranged on the second light path; the pulse delay parameter subsystem and the light path emitted by the resonant cavity are intersected at one point, and the beam combining sheet is arranged on the light path emitted by the pulse delay parameter subsystem or the light path emitted by the resonant cavity and can translate along the light path.
Furthermore, the pulse delay parametric subsystem comprises a triangular prism, two flat-plate total reflection mirrors which are arranged in parallel relatively and a reflector; the triple prism is arranged on the light incident side of the two flat plate type total reflection mirrors, the laser emitted by the quintuplet frequency crystal is guided into the space between the two flat plate type total reflection mirrors, the reflecting mirror is arranged on the light emitting side of the two flat plate type total reflection mirrors, and the emitted light path is adjusted to a specified angle.
Furthermore, the triple prism is arranged in a rotating mechanism, and the angle of the laser entering between the two flat-plate type total reflection mirrors is adjusted; the rotating mechanism comprises a constant temperature cover, a hinged rod, a cam, an adjusting rod and a resetting mechanism; the constant temperature cover is covered outside the triple prism and provides a constant temperature environment for the triple prism; the hinge rod is arranged on the constant temperature cover; the first end of the adjusting rod is fixedly connected to the constant-temperature cover, the second end of the adjusting rod is abutted against the cam, and the rotation of the cam drives the constant-temperature cover to rotate around the hinge rod; the resetting mechanism is arranged below the constant-temperature cover and provides pressure for the constant-temperature cover to press the cam.
Furthermore, slewing mechanism still includes the mount, the hinge bar is fixed in on the mount, canceling release mechanical system sets up between mount and constant temperature hood.
Further, the constant temperature hood comprises a bottom plate, a heating layer, a temperature sensor, a hood body, a lens fixing plate and a plane mirror; the heating layer surrounds the periphery of the bottom plate to form an accommodating cavity for placing the triangular prism; the lens fixing plate is arranged on the bottom plate and used for fixing the triple prism; the temperature sensor is arranged on the lens fixing plate and used for detecting the real-time temperature of the triple prism; the cover body covers the outer side of the heating layer; the heating layer is characterized in that first through holes are formed in the opposite positions of two sides of the heating layer, second through holes are formed in the opposite positions of two sides of the cover body, the first through holes and the second through holes are located on the same straight line, and the plane mirror is installed in the second through holes in a sealing mode.
Further, still include the fin, the fin evenly sets up on the inboard position except that first through-hole of zone of heating.
Furthermore, the reflector is arranged on a base, a rotating shaft driven by a motor to rotate is arranged on the base, and the reflector rotates around the rotating shaft along with the operation of the motor.
Furthermore, the beam combining sheet is arranged on the linear guide rail.
A control method of a pulse delay controllable double-beam laser system is characterized by comprising the following steps,
s1, the laser is started, and the pulse delay parameter subsystem emits 213nm laser; emitting UV light from the OPO resonant cavity;
s2, adjusting the position of the beam combining sheet to realize beam combining or beam splitting output of 213nm laser and UV light;
at S3, the delay time of the 213nm laser beam is adjusted by adjusting the angle of the triangular prism.
Further, in S3, the angle of the triangular prism is adjusted and the angle of the reflective mirror is adjusted correspondingly, so that the light path angle emitted from the light-emitting side of the two flat total reflection mirrors is always a predetermined angle.
Compared with the prior art, the invention has the beneficial effects that: the invention adjusts the optical path of 213nm laser between two flat-plate total reflection mirrors through the rotating angle of the triple prism, thereby indirectly controlling the pulse delay time of two beams of light; meanwhile, the beam combination or beam splitting output of the two beams of laser is realized through the movement of the beam combination sheet.
Drawings
Fig. 1 is a schematic view of an overall structure of a beam splitting state according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of an overall structure of a beam combination state according to an embodiment of the invention.
Fig. 3 is a schematic diagram of a pulse delay parametric subsystem according to an embodiment of the invention.
Fig. 4 is a view illustrating the installation of the reflector according to an embodiment of the present invention.
Fig. 5 is a perspective view of a rotating mechanism according to an embodiment of the present invention.
Fig. 6 is a cross-sectional view of a rotating mechanism according to an embodiment of the present invention.
Fig. 7 is another angular cross-sectional view of a rotating mechanism according to an embodiment of the present invention.
Fig. 8 is a schematic structural view of a constant temperature cover according to an embodiment of the present invention.
In the figure: 1. a laser; 2. a frequency doubling crystal; 3. a frequency tripling crystal; 4. a wavelength separating mirror; 5. a quintupling frequency crystal; 6. a pulse delay parametric subsystem; 7. a collimating focusing lens; 8. a resonant cavity; 9. combining the binding sheets; 10. a linear guide rail; 11. a first reflector; 71. a second reflector; 81. a third reflector; 91. a fourth mirror; 61. a prism; 62. a planar total reflection mirror; 63. a mirror; 64. a base; 65. a rotating shaft; 21. a constant temperature cover; 211. a hinge hole; 22. a hinged lever; 23. a cam; 24. adjusting a rod; 25. a reset mechanism; 26. a fixed mount; 27. a mechanical motor; 41. a base plate; 411. folding edges; 42. a heating layer; 421. a first through hole; 43. a temperature sensor; 44. a cover body; 441. a second through hole; 45. a plane mirror; 46. a fin; 47. lens fixed plate.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The first embodiment is as follows:
referring to fig. 1 and fig. 2, the present invention provides a dual-beam laser system with controllable pulse delay, which includes a laser 1, a frequency-doubling crystal 2, a frequency-tripling crystal 3, a wavelength splitter 4, a frequency-quintupling crystal 5, a pulse delay parametric subsystem 6, a resonant cavity 8, and a beam combiner 9.
The laser 1 is a YAG laser, emits 1064nm laser to form a first light path, and the first light path is sequentially provided with a frequency doubling crystal 2, a frequency tripling crystal 3, a wavelength separating mirror 4, a frequency quintupling crystal 5 and a pulse delay parameter subsystem 6. The frequency doubling crystal 2 is an LBO crystal, and generates composite light consisting of 532nm laser and part of 1064nm laser by the nonlinear effect; similarly, the frequency tripling crystal 3 is also an LBO crystal, and composite light consisting of 355nm laser, 532nm laser and a small amount of 1064nm laser is generated by the nonlinear effect of the frequency tripling crystal. The wavelength separating mirror 4 separates a part of 355nm laser to form a second light path, an optical filter is arranged in front of the quintupling crystal 5 to filter 1064nm laser in the first light path, the remaining composite light composed of 355nm laser and 532nm laser enters the quintupling crystal 5, the quintupling crystal 7 is a BBO crystal, and a beam of 213nm laser meeting dioxin detection requirements is generated by the sum frequency effect of the crystal. The pulse delay parameter subsystem 6 is arranged behind the quintuple frequency crystal 7 and is used for carrying out optical path control on 213nm laser, thereby realizing time delay control.
The resonant cavity 8 is arranged on a second light path formed by separating part of 355nm laser light by the wavelength separating mirror 4. The resonant cavity 8 is an OPO resonant cavity, oscillation and conversion of light of 355nm are realized, and further UV light with required wavelength is output. It should be noted that, in order to improve the collimation of the 355nm laser beam entering the resonant cavity 8, a collimating and focusing mirror 7 is disposed in front of the resonant cavity 8 to collimate and focus the 355nm laser beam.
In order to realize the beam splitting or beam combining output of 213nm laser and UV light, the light path emitted by the pulse delay parametric subsystem 6 and the resonant cavity 8 are converged at one point, which is recorded as a convergence point, and the beam combining plate 9 is arranged on the light path emitted by the pulse delay parametric subsystem 6 or the light path emitted by the resonant cavity 8 and can translate along the light path. In this embodiment, the beam combining plate 9 is a beam combining plate that reflects 213nm laser and transmits UV light, and is disposed on the light path emitted from the pulse delay parameter subsystem 6. As shown in fig. 1, when the beam combining sheet 9 is located at a position before the intersection point, 213nm laser light is reflected, and at this time, 213nm laser light and UV light are output in a beam splitting manner; as shown in fig. 2, when the beam combining sheet 9 moves to the intersection point, the 213nm laser is reflected, and the UV light is transmitted, so that combined beam output of the 213nm laser and the UV light is realized. In order to realize the translation of the beam combining sheet 9, the beam combining sheet 9 is arranged on a linear guide rail 10.
As shown in fig. 3, the pulse delay parametric subsystem 6 includes a triangular prism 61, two flat total reflection mirrors 62 and a reflection mirror 63, which are arranged in parallel. The triangular prism 61 is arranged on the light incidence side of the two flat-plate type total reflectors 62, 213nm laser emitted by the quintuple-frequency crystal 5 is guided between the two flat-plate type total reflectors 62, and the 213nm laser is repeatedly reflected between the two flat-plate type total reflectors 62; the reflector 63 is disposed on the light-emitting side of the two flat-plate total reflectors 62, and adjusts the emitted light path to a predetermined angle, so as to control the angle of the output laser, keep the junction substantially unchanged, and enable the beam combining sheet 9 to move horizontally to the junction.
In order to realize the delay control of the 213nm laser, the present embodiment controls the optical path traveled by the 213nm laser by rotating the angle of the triangular prism 61 to change the angle of reflection of the 213nm laser between two flat-plate total reflection mirrors 62 arranged in parallel relatively. Specifically, the prism 61 is arranged in a rotating mechanism to adjust the angle of the laser entering between the two flat-plate type total reflection mirrors. After the angle adjustment of the laser, in order to keep the angle of the output laser constant, the mirror 63 needs to be rotated correspondingly, specifically, referring to fig. 4, the mirror 63 is mounted on a base 64, a rotating shaft 65 driven by a motor to rotate is arranged on the base 64, and the mirror 63 rotates around the rotating shaft as the motor operates. It should be noted that the optical path of the laser beam between the two flat total reflection mirrors 62 can be controlled by other methods, such as controlling the distance between the two flat total reflection mirrors 62 and controlling the distance between the reflection mirror 63 and the light-emitting side of the two flat total reflection mirrors 62.
As shown in fig. 5 to 7, the rotating mechanism includes a thermostatic cover 21, a hinge lever 22, a cam 23, an adjusting lever 24, and a return mechanism 25. The constant temperature cover 21 covers the triangular prism 61 and provides a constant temperature environment for the triangular prism 61. The hinge rod 22 is arranged on the thermostatic cover 21, and the thermostatic cover 21 can rotate around the straight line where the hinge rod 22 is located. The first end of the adjusting rod 24 is fixedly connected to the constant temperature hood 21, the second end of the adjusting rod is abutted against the cam 23, and the rotation of the cam 23 drives the constant temperature hood 21 to rotate around the hinge rod 22, so that the phase angle of the triangular prism 61 is adjusted, the angle of the 213nm laser reflected between the two flat-plate type total reflectors 62 which are arranged in parallel relatively is changed, and the optical path of the laser is controlled. The reset mechanism 25 is arranged below the constant temperature cover 21 and provides pressure for the constant temperature cover 21 to press the cam 23, so that the angle of the constant temperature cover 21 can be reset and adjusted. It is worth mentioning that the cam 23 is driven in rotation by a mechanical motor 27.
In order to realize the installation of each part on the rotating mechanism, the device further comprises a fixed frame 26, the hinge rod 22 is fixed on the vertical part of the fixed frame 26, a hinge hole 211 for the hinge rod 22 to penetrate is formed in the position, corresponding to the hinge rod 22, on the constant temperature cover 21, and the function that the constant temperature cover 21 rotates around the hinge rod 22 is realized. The reset mechanism 25 is a spring, is arranged between the bottom of the fixed frame 26 and the bottom of the constant temperature cover 21, and provides upward pressure for the constant temperature cover 21, so that the adjusting rod 24 is in close contact with the cam 23 at any time.
Referring to fig. 7 and 8, the thermostatic hood includes a base plate 41, a heating layer 42, a temperature sensor 43, a hood 44, a lens fixing plate 47, and a plane mirror 45.
The heating layer 42 forms a housing chamber for placing the triangular prism 61 around the periphery side of the base plate 41. The heating layer 42 is a temperature-controlled electric heating plate that can be used to heat the triangular prism 61 in the receiving chamber. In order to fix the triangular prism 61 better, the lens fixing plate 47 is disposed in the base plate 41, and the triangular prism 61 is fixed to the lens fixing plate 47 by bolts.
The temperature sensor 43 is arranged on the lens fixing plate 47 and detects the real-time temperature of the prism 61; when the temperature sensor 43 detects that the temperature of the triangular prism 61 is reduced, the power of the heating layer 42 is increased, otherwise, the power of the heating layer 42 is reduced or the heating layer 42 is stopped, so that the effect of keeping the temperature of the triangular prism 61 constant is achieved, and the performance parameters of the laser are ensured.
The cover body 44 covers the outer side of the heating layer 42 to isolate the heating layer 42 and the triple prism 61 from the outside, so that the triple prism 61 is in a relatively stable constant-temperature and constant-humidity internal environment. In this embodiment, in order to enhance the sealing performance, the bottom plate 41 extends horizontally outward to form a folded edge 411, and the lower edge of the cover 44 is attached to the folded edge 411. It is worth mentioning that the bottom plate 41 and the cover 44 are made of heat insulating material to avoid heat exchange with the external connection as much as possible.
In order to facilitate the passing of laser, a first through hole 421 is disposed at a position opposite to two sides of the heating layer 42, a second through hole 441 is disposed at a position opposite to two sides of the cover 44, the first through hole 421 and the second through hole 441 are on the same straight line to form a passage for the passing of laser, and it is worth mentioning that the triangular prism 61 is on the straight line. Meanwhile, the plane mirror 45 is installed in the second through hole 441, so that a sealing effect is achieved.
The heating plate further comprises fins 46, and the fins 46 are uniformly arranged on the inner side of the heating layer 42 except for the first through holes 421. In this embodiment, the thickness of heating layer 42 is less, and coefficient of thermal conductivity is great, guarantees no heat loss between heating layer and the fin, and the even and temperature that just is the same of distribution of fin 46 to the realization is to prism 61 even heating.
Similarly, in order to better ensure the stable performance of the frequency doubling crystal 2, the frequency tripling crystal 3 and the frequency quintupling crystal 5, a constant temperature cover is also arranged outside the frequency doubling crystal 2, the frequency tripling crystal 3 and the frequency quintupling crystal 5, the structure of the constant temperature cover is the same as that of the above structure, only the internal triangular prism 61 needs to be replaced by the corresponding crystal, and the description is omitted.
It should be noted that, in order to control the optical path control of the whole system and install each component at a proper position, a reflector is disposed at each position of the optical path, please refer to fig. 1 and fig. 2, which specifically includes a first reflector 11 between the laser 1 and the frequency doubling crystal 2, a second reflector 71 between the wavelength separating mirror 4 and the resonant cavity 8, a third reflector 81 at the outlet of the resonant cavity 8, and a fourth reflector 91 between the pulse delay parametric subsystem 6 and the beam combining sheet 9.
Example two:
the embodiment provides a control method of a pulse delay controllable dual-beam laser system, which comprises the following steps,
s1, the laser is started, and the pulse delay parameter subsystem emits 213nm laser; emitting UV light from the OPO resonant cavity;
s2, adjusting the translation position of the beam combining sheet to realize beam combining or beam splitting output of 213nm laser and UV light;
s3, adjusting the delay time of the 213nm laser by adjusting the angle of the triangular prism; meanwhile, the angles of the reflectors are correspondingly adjusted, so that the light path angles emitted from the light emitting sides of the two flat-plate type total reflectors are always set to be a specified angle, 213nm laser output by the pulse delay parameter subsystem is always parallel to the linear guide rail 10, the beam combining piece 9 can be enabled to translate to a junction point along the 213nm laser output by the pulse delay parameter subsystem, and beam combining or beam splitting output of the 213nm laser and UV light can be achieved. It is worth mentioning that there is a one-to-one correspondence between the turning angle of the triangular prism and the turning angle of the mirror, and the correspondence is measured by experiments before the system works.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Claims (8)
1. A pulse delay controllable double-beam laser system is characterized by comprising a laser, a frequency doubling crystal, a frequency tripling crystal, a wavelength separating mirror, a frequency quintupling crystal, a pulse delay parameter subsystem, a resonant cavity and a beam combining sheet; the laser emits 1064nm laser to form a first light path, and a frequency doubling crystal, a frequency tripling crystal, a wavelength separating mirror, a frequency quintupling crystal and a pulse delay parameter subsystem are sequentially arranged on the first light path; the wavelength separation mirror separates a path of 355nm laser to form a second light path, and the resonant cavity is arranged on the second light path; the pulse delay parameter subsystem and the light path emitted by the resonant cavity are intersected at one point, and the beam combining sheet is arranged on the light path emitted by the pulse delay parameter subsystem or the light path emitted by the resonant cavity and can translate along the light path;
the pulse delay parametric subsystem comprises a triangular prism, two flat-plate total reflection mirrors and a reflecting mirror which are arranged in parallel relatively; the triple prism is arranged on the light incident sides of the two flat plate type total reflection mirrors, the laser emitted by the quintuplet frequency crystal is guided into the space between the two flat plate type total reflection mirrors, the reflecting mirror is arranged on the light emitting sides of the two flat plate type total reflection mirrors, and the emitted light path is adjusted to a specified angle;
the prism is arranged in a rotating mechanism and used for adjusting the angle of the laser entering between the two flat-plate type total reflection mirrors; the rotating mechanism comprises a constant temperature cover, a hinged rod, a cam, an adjusting rod and a resetting mechanism; the constant temperature cover is covered outside the triple prism and provides a constant temperature environment for the triple prism; the hinge rod is arranged on the constant temperature cover; the first end of the adjusting rod is fixedly connected to the constant-temperature cover, the second end of the adjusting rod is abutted against the cam, and the rotation of the cam drives the constant-temperature cover to rotate around the hinge rod; the resetting mechanism is arranged below the constant-temperature cover and provides pressure for the constant-temperature cover to press the cam.
2. The pulse delay controllable dual-beam laser system according to claim 1, wherein the rotating mechanism further comprises a fixing frame, the hinge rod is fixed on the fixing frame, and the resetting mechanism is disposed between the fixing frame and the constant temperature hood.
3. The pulse delay controllable dual-beam laser system according to claim 1, wherein the thermostatic housing includes a base plate, a heating layer, a temperature sensor, a housing, a lens fixing plate, and a plane mirror; the heating layer surrounds the periphery of the bottom plate to form an accommodating cavity for placing the triangular prism; the lens fixing plate is arranged on the bottom plate and used for fixing the triple prism; the temperature sensor is arranged on the lens fixing plate and used for detecting the real-time temperature of the triple prism; the cover body covers the outer side of the heating layer; the heating layer is characterized in that first through holes are formed in the opposite positions of two sides of the heating layer, second through holes are formed in the opposite positions of two sides of the cover body, the first through holes and the second through holes are located on the same straight line, and the plane mirror is installed in the second through holes in a sealing mode.
4. The pulse delay controllable dual-beam laser system according to claim 3, further comprising fins uniformly arranged inside the heating layer at positions other than the first through holes.
5. The pulse delay controlled dual beam laser system as claimed in claim 1, wherein the reflecting mirror is mounted on a base, the base having a rotating shaft rotated by a motor, the reflecting mirror being rotated about the rotating shaft as the motor is operated.
6. The pulse delay controllable dual-beam laser system of claim 1, wherein the beam combining plate is disposed on a linear guide.
7. A control method of a pulse delay controllable two-beam laser system according to any one of claims 1 to 5, comprising the steps of,
s1, the laser is started, and the pulse delay parameter subsystem emits 213nm laser; emitting UV light from the OPO resonant cavity;
s2, adjusting the position of the beam combining sheet to realize beam combining or beam splitting output of 213nm laser and UV light;
at S3, the delay time of the 213nm laser beam is adjusted by adjusting the angle of the triangular prism.
8. The method as claimed in claim 7, wherein in step S3, the angle of the triangular prism is adjusted and the angle of the reflective mirror is correspondingly adjusted, so that the light path angle from the light-emitting side of the two flat total reflection mirrors is always a predetermined angle.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010760756.1A CN111900609B (en) | 2020-07-31 | 2020-07-31 | Pulse delay controllable double-beam laser system and control method thereof |
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| CN202010760756.1A CN111900609B (en) | 2020-07-31 | 2020-07-31 | Pulse delay controllable double-beam laser system and control method thereof |
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| CN111900609A CN111900609A (en) | 2020-11-06 |
| CN111900609B true CN111900609B (en) | 2021-07-20 |
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| CN115376881B (en) * | 2022-10-10 | 2023-01-31 | 山东省科学院激光研究所 | Double-optical-path time delay adjustable device for double-beam laser mass spectrum ionization source |
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Denomination of invention: A controllable pulse delay dual beam laser system and its control method Effective date of registration: 20230307 Granted publication date: 20210720 Pledgee: Hangzhou Fuyang sub branch of China Everbright Bank Co.,Ltd. Pledgor: ZHEJIANG FUCHUNJIANG ENVIRONMENTAL TECHNOLOGY RESEARCH Co.,Ltd. Registration number: Y2023980033953 |