CN111897181A

CN111897181A - Intelligent device, micro-lens array projection device and array substrate thereof

Info

Publication number: CN111897181A
Application number: CN202010854982.6A
Authority: CN
Inventors: 李建德; 陈冠宏; 冯坤亮; 李宗政
Original assignee: OFilm Microelectronics Technology Co Ltd; OFilm Group Co Ltd
Current assignee: Jiangxi OMS Microelectronics Co Ltd
Priority date: 2020-08-21
Filing date: 2020-08-21
Publication date: 2020-11-06

Abstract

The invention provides intelligent equipment, a micro-lens array projection device and an array substrate thereof. The microlens array substrate includes: the optical system comprises a first micro-lens array element and a second micro-lens array element which are spaced along the direction of an optical axis and are arranged oppositely, the first micro-lens array element comprises a first base body and a first lens layer, the first base body comprises a first surface and a second surface arranged opposite to the first surface, the image layer is formed on the first surface, the first lens layer is formed on the second surface, the second micro-lens array element comprises a second base body, a second lens layer and a third lens layer, the second base body comprises a third surface and a fourth surface arranged opposite to the third surface, the third surface faces the second surface, the second lens layer is formed on the third surface, and the third lens layer is formed on the fourth surface; the outer surface of the first lens layer comprises a first cambered surface, and the outer surface of the second lens layer comprises a second cambered surface. The micro-lens array substrate has smaller volume.

Description

Intelligent device, micro-lens array projection device and array substrate thereof

Technical Field

The invention relates to the technical field of optical imaging, in particular to intelligent equipment, a micro-lens array projection device and an array substrate thereof.

Background

Nowadays, with the development of smart devices, more and more elements are provided inside the smart devices, and the space for accommodating the projection device is smaller and smaller. However, the existing projection device is large in size, and the existing projection device with large size cannot be installed in the intelligent device.

Disclosure of Invention

The invention aims to provide intelligent equipment, a micro-lens array projection device and an array substrate thereof, and aims to solve the technical problem that the projection device is large in size.

The invention provides a microlens array substrate, comprising: an optical system and an image layer, the optical system including a first microlens array element and a second microlens array element spaced apart in an optical axis direction and disposed opposite to each other, the first microlens array element including a first base including a first surface and a second surface disposed opposite to the first surface, the image layer being formed on the first surface, the first lens layer being formed on the second surface, the second microlens array element including a second base including a third surface and a fourth surface disposed opposite to the third surface, a third surface facing the second surface, a second lens layer being formed on the third surface, and a third lens layer being formed on the fourth surface; the outer surface of the first lens layer comprises a first cambered surface, the outer surface of the second lens layer comprises a second cambered surface, and the outer surface of the third lens layer comprises a third cambered surface, so that external light rays are refracted by the first cambered surface, the second cambered surface and the third cambered surface in sequence after passing through the image layer, and then are imaged on an imaging surface. This application is through the refraction of the first arc of first microlens array element to light to and the refraction of the second arc and the third arc through second microlens array element to light, make light slope more, can make external light can form images on the imaging surface towards the less distance of the direction propagation of imaging surface, make microlens array substrate along the size of optical axis direction less, microlens array substrate is slim, and the cost is lower.

Wherein, the distance of the summit of first cambered surface to the second surface is between 15um-1000um, the summit of second cambered surface to the distance between the third surface is between 15um-1000um, the summit of third cambered surface to the distance between the fourth surface is between 15um-1000 um. The above-mentioned distance of first cambered surface to the second surface of this application, the above-mentioned distance between second cambered surface to the third surface, the above-mentioned distance between third cambered surface to the fourth surface can make light slope more, can make external light towards the less distance of direction propagation of imaging surface can form an image on the imaging surface.

Wherein the effective focal length of the optical system is between 0.1mm and 10 mm. The effective focal length of the optical system is reasonably compressed on the basis of ensuring good imaging quality, and the total length of the micro-lens array substrate is favorably compressed.

Wherein the optical system satisfies the conditional expression: TTL/ImgH is more than or equal to 1 and less than or equal to 8, wherein TTL is the distance between the first surface and the imaging surface on the optical axis, and ImgH is half of the length of the diagonal line of the effective pixel area of the imaging surface. When the optical system satisfies the above conditional expressions, the total length of the optical system can be effectively compressed, which is beneficial to compressing the total length of the microlens array substrate.

The first cambered surface is a convex surface, the second cambered surface is a convex surface, and the third cambered surface is a convex surface; or, the first cambered surface is a concave surface, the second cambered surface is a convex surface, and the third cambered surface is a concave surface. The shapes of the first cambered surface, the second cambered surface and the third cambered surface can realize good imaging quality, and the total length of the micro-lens array substrate is reduced.

The first lens layer comprises a plurality of first micro lenses which are connected in sequence, and each first micro lens comprises a first cambered surface; the second lens layer comprises a plurality of second micro lenses which are connected in sequence, and each second micro lens comprises a second cambered surface; the third lens layer comprises a plurality of third microlenses which are sequentially connected, each third microlens comprises a third cambered surface, the first microlenses, the second microlenses and the third microlenses correspond to one another one by one, and the corresponding first microlenses, second microlenses and third microlenses form a lens unit; images formed by refraction of the plurality of lens units are overlapped on the imaging surface. The image of this application can be through a plurality of lens units to the image layer is imaged, can be with the multiple formation of image in image layer, and the overlapping projection is to the target area, and the illuminating effect of high contrast can be realized to the projecting image after the stack.

The second microlens array elements are arranged in sequence along the optical axis direction, and are positioned on the same side of the first microlens array element. The second microlens array elements are arranged in the imaging plane, the second microlens array elements are arranged on the second microlens array elements, the number of times of light refraction is larger, light is inclined, the light can be imaged on the imaging plane by a smaller distance of the light which is transmitted towards the direction of the imaging plane, the size of the microlens array substrate along the direction of the optical axis is smaller, and the microlens array substrate is thinned.

The material of the first lens layer comprises ultraviolet glue, the material of the second lens layer comprises ultraviolet glue, and the material of the third lens layer comprises ultraviolet glue; the first lens layer is formed through a nanoimprint or thermal reflow process, the second lens layer is formed through a nanoimprint or thermal reflow process, and the third lens layer is formed through a nanoimprint or thermal reflow process. The ultraviolet glue is a thermosetting glue material, has high temperature resistance and better reliability, and has more advantages when being applied to a vehicle-mounted environment. The nano-imprinting or thermal reflow process is simple, and the cost can be saved.

The invention provides a micro-lens array projection device which comprises a light source, a light uniformizing lens group and the micro-lens array substrate, wherein the light uniformizing lens group is arranged between the light source and the micro-lens array substrate. The micro-lens array substrate is small in size and thin, and the micro-lens array projection device is small in size and thin.

The invention provides intelligent equipment comprising the micro-lens array projection device. The micro-lens array projection device is thin and small in size, and can be installed in intelligent equipment with small internal size.

Wherein the intelligent device comprises an intelligent vehicle. The micro-lens array projection device is thin and small in size, and can be installed in an intelligent vehicle with small internal size.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a conventional projection apparatus.

Fig. 2 is a schematic structural diagram of a microlens array projection apparatus according to an embodiment of the present disclosure.

Fig. 3 is a schematic structural view of the microlens array substrate in fig. 2.

Fig. 4 is another schematic structural view of the microlens array substrate of fig. 2.

Fig. 5 is a first structural schematic diagram of the optical system in fig. 2.

Fig. 6 is a second configuration diagram of the optical system of fig. 2.

Fig. 7 is a third structural schematic diagram of the optical system in fig. 2.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Before describing embodiments of the present invention, a conventional projection apparatus is first described.

Referring to fig. 1, a conventional projection apparatus includes a light source 10, a light uniformizing mirror 20, a film 30 and a projection mirror 40, which are sequentially disposed at intervals. The light of the light source 10 is projected on the image plane through the dodging mirror group 20, the film sheet 30 and the projection mirror group 40 in sequence. Wherein the film 30 is projected as an illumination pattern required by the application. In the projection device, the volume of the projection lens group 40 is large, the film sheet 30 and the projection lens group 40 are arranged at intervals, the total design length of the projection device is larger than 1cm, even larger than 10cm, and the structural volume of the projection device is large.

In order to solve the above problems, the present invention provides a microlens array projection apparatus.

Referring to fig. 2, the microlens array projection apparatus includes a light source 10, a light uniformizing mirror 20 and a microlens array substrate 100, wherein the light uniformizing mirror 20 is disposed between the light source 10 and the microlens array substrate 100. The light source 10 is an LED light source 10 for emitting light. The dodging mirror group 20 is used for collecting and shaping the light of the LED light source 10 to improve the optical efficiency. The light from the light source 10 is shaped by the dodging mirror 20 and then reaches the microlens array substrate 100. The microlens array substrate 100 of the present application is small in size and thin, and the microlens array projection apparatus is also small in size and thin.

The microlens array substrate 100 will be described in detail as follows.

Referring to fig. 3 to 4, the microlens array substrate 100 includes: an optical system 50 and an image layer 60, the optical system 50 includes a first microlens array element 501 and a second microlens array element 502 spaced apart and disposed opposite to each other along an optical axis direction, the first microlens array element 501 includes a first substrate 70 and a first lens layer 130, the first substrate 70 includes a first surface 701 and a second surface 702 disposed opposite to the first surface 701, the image layer 60 is formed on the first surface 701, the first lens layer 130 is formed on the second surface 702, the second microlens array element 502 includes a second substrate 80, a second lens layer 90 and a third lens layer 110, the second substrate 80 includes a third surface 801 and a fourth surface 802 disposed opposite to the third surface 801, the third surface 801 faces the second surface 702, the second lens layer 90 is formed on the third surface 801, and the third lens layer 110 is formed on the fourth surface 802; the outer surface of the first lens layer 130 includes a first arc surface 1301, the outer surface of the second lens layer 90 includes a second arc surface 901, and the outer surface of the third lens layer 110 includes a third arc surface 1101, so that after external light passes through the image layer 60, the external light is refracted through the first arc surface 1301, the second arc surface 901 and the third arc surface 1101 in sequence and forms an image on an imaging surface. It is understood that the optical axis direction is a direction in which light passes, and is a direction from the image layer 60 to the imaging surface. If the first microlens array element 501 is an axisymmetric element and the second microlens array element 502 is an axisymmetric element, the central axis of the first microlens array element 501 coincides with the central axis of the second microlens array element 502, and the optical axis direction is the direction in which the central axis of the first microlens array element 501 is located or the direction in which the central axis of the second microlens array element 502 is located.

In this application, the refraction of light is through first cambered surface 1301 of first microlens array component 501, and the refraction of light is through second cambered surface 901 and third cambered surface 1101 of second microlens array component 502, make light more slope, can make the less distance of external light orientation imaging surface's direction propagation can image on the imaging surface, make microlens array substrate 100 along the size of optical axis direction less, microlens array substrate 100 thins, and the cost is lower.

In a specific embodiment, the first lens layer 130 includes a plurality of sequentially connected first microlenses 210, each first microlens 210 including a first curved surface 1301; the second lens layer 90 includes a plurality of second microlenses 220 connected in sequence, each second microlens 220 includes a second cambered surface 901; the third lens layer 110 includes a plurality of third microlenses 230 connected in sequence, each third microlens 230 includes a third arc 1101, the plurality of first microlenses 210, the plurality of second microlenses 220, and the plurality of third microlenses 230 are in one-to-one correspondence, and the corresponding one of the first microlenses 210, the second microlenses 220, and the third microlenses 230 form a lens unit 240; the images formed by refraction by the plurality of lens units 240 are overlapped on an imaging plane. It is understood that the optical system 50 includes a middle portion and edge portions, the edge portions are located at both sides of the middle portion, the lens unit 240 located at the middle portion of the optical system is a main lens unit 2401, the lens unit located at the edge portion of the optical system 50 is an auxiliary lens unit 2402, an image formed after refraction by the main lens unit 2401 is a reference image, an image formed by refraction by the auxiliary lens unit 2402 is an auxiliary image, a refractive index of the main lens unit 2401 is different from a refractive index of the auxiliary lens unit 2402, and the auxiliary lens unit 2402 is configured to refract the auxiliary image toward the reference image so that the auxiliary image coincides with the reference image.

Therefore, the image of the image layer 60 can be imaged by the plurality of lens units 240, the image layer 60 can be imaged in multiple ways and projected to the target area in an overlapping manner, and the superimposed projected image can realize a high-contrast illumination effect. That is, in the present application, the images of the image layer 60 are imaged through the plurality of first arc surfaces 1301, the plurality of second arc surfaces 901, and the plurality of third arc surfaces 1101 of the plurality of lens units 240, so that the image layer 60 can be imaged in multiple ways and projected to the target area in an overlapping manner, and the superimposed projected images can achieve a high-contrast lighting effect. It can be understood that the refractive index of the first arc surfaces 1301 is different, the refractive index of the second arc surfaces 901 is different, and the refractive index of the third arc surfaces 1101 is different.

Therefore, the present disclosure can not only achieve good projection imaging quality, but also make the microlens array substrate 100 thin.

The microlens array substrate 100 of the present application can replace the conventional projection lens group 40, and the image layer 60 can be stacked on the first surface 701, which solves the technical problem of the large size of the projection apparatus caused by the large size of the conventional projection lens group 40 and the interval arrangement between the film sheet 30 and the projection lens group 40.

In a specific embodiment, the distance H1 from the apex of the first arc 1301 to the second surface 702 is between 15um-1000um, the distance H2 from the apex of the second arc 901 to the third surface 801 is between 15um-1000um, and the distance H3 from the apex of the third arc 1101 to the fourth surface 802 is between 15um-1000 um. It will be appreciated that the farthest distance from first arc 1301 to second surface 702 is between 15um-1000um, the farthest distance from second arc 901 to third surface 801 is between 15um-1000um, and the farthest distance from third arc 1101 to fourth surface 802 is between 15um-1000 um. The distance from the first arc surface 1301 to the second surface 702, the distance from the second arc surface 901 to the third surface 801, and the distance from the third arc surface 1101 to the fourth surface 802 can enable light to be inclined more, and the external light can be enabled to propagate a smaller distance towards the direction of the imaging surface, so that imaging can be performed on the imaging surface.

In one particular embodiment, the effective focal length of the optical system 50 is between 0.1mm and 10 mm. The focal length reasonably compresses the effective focal length of the optical system 50 on the basis of ensuring good imaging quality, and is beneficial to compressing the total length of the microlens array substrate 100.

In a specific embodiment, the optical system 50 satisfies the conditional expression: TTL/ImgH is more than or equal to 1 and less than or equal to 8, wherein TTL is the distance between the first surface 701 and the imaging surface on the optical axis, and ImgH is half of the length of the diagonal line of the effective pixel area of the imaging surface. When the optical system 50 satisfies the above conditional expressions, the total length of the optical system 50 can be effectively reduced, which is advantageous for reducing the total length of the microlens array substrate 100.

In a specific embodiment, the microlens array substrate 100 has a dimension in the optical axis direction of <10 mm. That is, when the microlens array substrate 100 satisfies the conditional expressions described above, the microlens array substrate 100 of the present application has a dimension in the optical axis direction of <10 mm. The microlens array substrate 100 can satisfy not only the requirement of miniaturization but also the requirement of imaging.

In a specific embodiment, the second microlens array element 502 is plural, the plural second microlens array elements 502 are sequentially arranged along the optical axis direction, and the plural second microlens array elements 502 are located on the same side of the first microlens array element 501. The plurality of second microlens array elements 502 can make the number of times of light refraction more, the light is more inclined, the light can be imaged on the imaging surface by transmitting a smaller distance in the direction of the imaging surface, so that the size of the microlens array substrate 100 along the optical axis direction is smaller, and the microlens array substrate 100 is thinned.

In a specific embodiment, the material of the first lens layer 130 includes uv glue, the material of the second lens layer 90 includes uv glue, and the material of the third lens layer 110 includes uv glue; the first lens layer 130 is formed through a nano-imprinting or thermal reflow process, the second lens layer 90 is formed through a nano-imprinting or thermal reflow process, and the third lens layer 110 is formed through a nano-imprinting or thermal reflow process. The ultraviolet glue is a thermosetting glue material, has high temperature resistance and better reliability, and has more advantages when being applied to a vehicle-mounted environment. The nano-imprinting or thermal reflow process is simple, and the cost can be saved. It is understood that the material of the first substrate 70 includes optically transparent glass, and the material of the second substrate 80 includes optically transparent glass.

Three embodiments will be described below.

In a first embodiment of the present invention, the first,

referring to fig. 5, the first arc surface 1301 of the first lens layer 130 is a convex surface, the second arc surface 901 of the second lens layer 90 is a convex surface, and the third arc surface 1101 of the third lens layer 110 is a convex surface.

In this embodiment, the effective focal length f of the optical system 50 is 2.00mm, the f-number FNO of the optical system 50 is 2.80, and TTL/ImgH of the optical system 50 is 2.059.

Table 1a shows a table of characteristics of the optical system 50 of the present embodiment, and the units of the Y radius, the thickness, and the focal length are all millimeters (mm).

TABLE 1a

In this embodiment, any one of the first arc surface 1301, the second arc surface 901 and the third arc surface 1101 is an aspheric surface, and the surface type x of each aspheric surface can be defined by, but is not limited to, the following aspheric surface formula:

wherein x is the rise of the distance from the aspheric surface vertex to the aspheric surface vertex when the aspheric surface is at the position with the height of h along the optical axis direction; c is the paraxial curvature of the aspheric surface, c being 1/R (i.e., paraxial curvature c is the inverse of radius R of Y in table 1a above); k is a conic coefficient; ai is the correction coefficient of the i-th order of the aspherical surface. Table 1b shows the high-order coefficient A4, A6, A8, A10, A12, A14, A16, A18 and A20 that can be used for each of the aspherical mirrors S1-S16 in the first embodiment.

TABLE 1b

In a second embodiment of the present invention, the first embodiment,

referring to fig. 6, the first arc surface 1301 of the first lens layer 130 is a convex surface, the second arc surface 901 of the second lens layer 90 is a convex surface, and the third arc surface 1101 of the third lens layer 110 is a convex surface.

In this embodiment, the effective focal length f of the optical system 50 is 2.00mm, the f-number FNO of the optical system 50 is 2.80, and the TTL/ImgH of the optical system 50 is 2.068.

Table 2a shows a table of characteristics of the optical system 50 of the present embodiment, and the units of the Y radius, the thickness, and the focal length are all millimeters (mm).

TABLE 2a

Wherein the values of the parameters in Table 2a are the same as those of the first embodiment.

Table 2b gives the coefficients of high order terms that can be used for each aspherical mirror in the second embodiment, wherein each aspherical mirror type can be defined by the formula given in the first embodiment.

TABLE 2b

In a third embodiment of the present invention, the first,

referring to fig. 7, the first arc surface 1301 of the first lens layer 130 is a concave surface, the second arc surface 901 of the second lens layer 90 is a convex surface, and the third arc surface 1101 of the third lens layer 110 is a concave surface. In this embodiment, at least one inflection point may be disposed on the first arc surface 1301.

In this embodiment, the effective focal length f of the optical system 50 is 2.00mm, the f-number FNO of the optical system 50 is 2.80, and the TTL/ImgH of the optical system 50 is 2.327.

Table 3a shows a table of characteristics of the optical system 50 of the present embodiment, and the units of the Y radius, the thickness, and the focal length are all millimeters (mm).

TABLE 3a

Wherein the values of the parameters in Table 3a are the same as those of the first embodiment.

Table 3b gives the coefficients of high-order terms that can be used for each aspherical mirror surface in the third embodiment, wherein each aspherical mirror surface type can be defined by the formula given in the first embodiment.

TABLE 3b

In all of the three embodiments, good projection imaging quality can be achieved, and the microlens array substrate 100 is thinned.

The invention also provides intelligent equipment which comprises the micro-lens array projection device. The micro-lens array projection device is thin and small in size, and can be installed in the intelligent equipment even if the space inside the intelligent equipment is small.

In a particular embodiment, the smart device comprises a smart vehicle. The intelligent vehicle comprises the micro-lens array projection device. The micro-lens array projection device can be arranged on the side edge of the door of a vehicle or on a pedal of a driver seat, improves the safety and the convenience when the vehicle gets on or off the vehicle on the basis of the lighting function, and has the functions of decoration, reminding, intelligent interaction and the like. The micro-lens array projection device is small in size, even if the functions of the vehicle are more and more, the electronic elements of the main control console are more and more complex, the space for installing the projection device is smaller and smaller, and the micro-lens array projection device with the small size can still be installed in the vehicle.

Of course, it can be understood that the smart device of this application can include devices such as unmanned aerial vehicle, intelligent household electrical appliances besides smart vehicle, and this application is no longer listed one by one here.

The technical features of the above embodiments may be arbitrarily combined, and for the sake of brief description, all possible combinations of the technical features in the above embodiments are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above examples only show some embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims

1. A microlens array substrate, comprising: an optical system and an image layer, the optical system including a first microlens array element and a second microlens array element spaced apart in an optical axis direction and disposed opposite to each other, the first microlens array element including a first base including a first surface and a second surface disposed opposite to the first surface, the image layer being formed on the first surface, the first lens layer being formed on the second surface, the second microlens array element including a second base including a third surface and a fourth surface disposed opposite to the third surface, a third surface facing the second surface, a second lens layer being formed on the third surface, and a third lens layer being formed on the fourth surface; the outer surface of the first lens layer comprises a first cambered surface, the outer surface of the second lens layer comprises a second cambered surface, and the outer surface of the third lens layer comprises a third cambered surface, so that external light rays are refracted by the first cambered surface, the second cambered surface and the third cambered surface in sequence after passing through the image layer, and then are imaged on an imaging surface.

2. The microlens array substrate of claim 1, wherein the distance from the vertex of the first arc surface to the second surface is between 15um-1000um, the distance from the vertex of the second arc surface to the third surface is between 15um-1000um, and the distance from the vertex of the third arc surface to the fourth surface is between 15um-1000 um.

3. The microlens array substrate of claim 1, wherein the optical system has an effective focal length between 0.1mm and 10 mm.

4. The microlens array substrate of claim 1, wherein the optical system satisfies the conditional expression: TTL/ImgH is more than or equal to 1 and less than or equal to 8, wherein TTL is the distance between the first surface and the imaging surface on the optical axis, and ImgH is half of the length of the diagonal line of the effective pixel area of the imaging surface.

5. The microlens array substrate of claim 1, wherein the first curved surface is a convex surface, the second curved surface is a convex surface, and the third curved surface is a convex surface; or, the first cambered surface is a concave surface, the second cambered surface is a convex surface, and the third cambered surface is a concave surface.

6. A microlens array projection apparatus as in claim 1, wherein the first lens layer comprises a plurality of first microlenses connected in series, each of the first microlenses including one of the first curved surfaces; the second lens layer comprises a plurality of second micro lenses which are connected in sequence, and each second micro lens comprises a second cambered surface; the third lens layer comprises a plurality of third microlenses which are sequentially connected, each third microlens comprises a third cambered surface, the first microlenses, the second microlenses and the third microlenses correspond to one another one by one, and the corresponding first microlenses, second microlenses and third microlenses form a lens unit; images formed by refraction of the plurality of lens units are overlapped on the imaging surface.

7. A microlens array projection apparatus according to claim 1, wherein the second microlens array elements are plural, the plural second microlens array elements are arranged in series along the optical axis direction, and the plural second microlens array elements are located on the same side as the first microlens array element.

8. The microlens array substrate of claim 1, wherein the first lens layer comprises an ultraviolet glue, the second lens layer comprises an ultraviolet glue, and the third lens layer comprises an ultraviolet glue; the first lens layer is formed through a nanoimprint or thermal reflow process, the second lens layer is formed through a nanoimprint or thermal reflow process, and the third lens layer is formed through a nanoimprint or thermal reflow process.

9. A projection device with a micro-lens array, comprising a light source, a light uniformizing lens assembly and the micro-lens array substrate as claimed in any one of claims 1 to 8, wherein the light uniformizing lens assembly is disposed between the light source and the micro-lens array substrate.

10. A smart device comprising the microlens array projection apparatus of claim 9.