CN111887780A - Dish washer sprays arm structure and has dish washer of this spray arm structure - Google Patents

Dish washer sprays arm structure and has dish washer of this spray arm structure Download PDF

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Publication number
CN111887780A
CN111887780A CN201910368507.5A CN201910368507A CN111887780A CN 111887780 A CN111887780 A CN 111887780A CN 201910368507 A CN201910368507 A CN 201910368507A CN 111887780 A CN111887780 A CN 111887780A
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CN
China
Prior art keywords
nozzle
spray arm
spray
dishwasher
washing
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Pending
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CN201910368507.5A
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Chinese (zh)
Inventor
曹魁
解婷
杨林
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Qingdao Haier Co Ltd
Qingdao Haier Dishwasher Co Ltd
Original Assignee
Qingdao Haier Co Ltd
Qingdao Haier Dishwasher Co Ltd
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Application filed by Qingdao Haier Co Ltd, Qingdao Haier Dishwasher Co Ltd filed Critical Qingdao Haier Co Ltd
Priority to CN201910368507.5A priority Critical patent/CN111887780A/en
Publication of CN111887780A publication Critical patent/CN111887780A/en
Pending legal-status Critical Current

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    • AHUMAN NECESSITIES
    • A47FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47LDOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
    • A47L15/00Washing or rinsing machines for crockery or tableware
    • A47L15/42Details
    • A47L15/4278Nozzles
    • A47L15/4282Arrangements to change or modify spray pattern or direction

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  • Washing And Drying Of Tableware (AREA)

Abstract

The invention discloses a spraying arm structure of a dish washing machine and the dish washing machine with the spraying arm structure, wherein the spraying direction of a nozzle is adjusted by adopting a deformable material, and the washing spraying angle is adjusted according to the change of the running state of the dish washing machine in the washing process, so that the direct washing in the largest range is realized, the energy consumption can be reduced, and the better cleaning index can be realized. Specifically, the spray arm or the spray nozzle is provided with at least part of deformable materials or an adjusting part with the deformable materials, so that the spray direction of the spray nozzle of the spray arm is adjusted without stopping washing in the washing process, and the washing in a large range or even a full range is achieved. By enlarging the washing range, the higher washing performance can be achieved in a shorter time, and the required washing strength is greatly reduced and the washing time is greatly reduced due to the adoption of the spray arm with the variable structure.

Description

Dish washer sprays arm structure and has dish washer of this spray arm structure
Technical Field
The invention belongs to the field of dish washing machines, and particularly relates to a spraying arm structure of a dish washing machine and the dish washing machine with the spraying arm structure.
Background
The spray arm and the nozzle structure commonly used in the current dish washer are usually fixed, and the holes are generally formed in the spray arm to realize water flows in different directions, and the spray arm rotates to realize circumferential spray washing. Because domestic water pressure is relatively fixed, and needs sufficient water pressure when wasing, the trompil on the spray arm can not be unlimited, this just causes the region between nozzle and the nozzle and must not have the washing that rivers directly sprayed, this just must make behind the rivers impact tableware through supercharging device with reinforcing rivers intensity, the spraying reaches other regions and realizes the tableware washing.
The spray arm with the fixed structure can not realize that water flow can directly spray and wash tableware in all directions, so that the energy consumption is increased, and the washing time is long. By increasing the water flow strength, a stronger secondary spray is achieved, which is a form of tableware cleaning that is more energy consuming and has limited cleaning capacity. The invention realizes the adjustment of the direction of the nozzle by adopting the deformable material, adjusts the washing spray angle in the washing process, realizes the direct washing in the largest range, reduces the energy consumption and can realize better cleaning index.
Chinese patent with application number CN201610562444.3 discloses a dish washer sprays structure and dish washer, through setting up main spray thrower, includes two spray arms at least at main spray thrower, is equipped with the planet axle at the spray arm tip, and the epaxial rotation of planet is connected with the planet spray thrower, and the planet spray thrower has a spray bar at least, all is equipped with the hole for water spraying on the spray bar. The structure is extremely complex, the production cost is higher, and the problem of washing dead angles caused by the arrangement angle of the cleaned objects cannot be solved although the spraying area is increased.
Chinese patent application No. CN201820004569.9 discloses a multi-fork spray arm structure of a dishwasher, which changes the spray angle of some spray holes by providing a spray arm inclined plane. Because the spray holes are fixedly arranged on the surface of the spray arm, the spray angle is relatively fixed and can not be changed, and cleaning dead angles are inevitably generated.
Chinese patent application No. CN201710635880.3 discloses a dish washer, which comprises at least two spray arms and a spray pipe arranged on each spray arm, wherein the spray device is arranged in a claw shape as a whole. The scheme only changes the outlet height of the spray holes, the angle of the spray holes cannot be changed, and the cleaning dead angle can be generated.
Chinese patent application No. CN201811230801.1 discloses a spraying structure of a dishwasher, which drives a high-pressure nozzle to rotate through a driving device to adjust the spraying angle. Although the jet angle can be adjusted, the energy consumption is inevitably increased by adopting a special driving device, and the structure is complex and the cost is higher.
The present invention has been made in view of this situation.
Disclosure of Invention
The technical problem to be solved by the invention is to overcome the defects of the prior art and provide a spraying arm structure of a dish washing machine and the dish washing machine with the spraying arm structure, wherein the spraying arm can change the direction of a spraying arm nozzle according to different external factors, so that the positions of water flow for directly washing tableware are increased, the washing efficiency is improved, the washing time is saved, and the energy consumption is reduced.
In order to solve the technical problems, the invention adopts the technical scheme that:
a spray arm structure of dish washer is composed of a spray arm, and nozzles arranged on said spray arm for changing the spray direction of said nozzles according to the variation of running state of dish washer.
The nozzle has at least a portion of deformable material that deforms in response to changes in the operating conditions of the dishwasher to change the spray direction of the nozzle.
The nozzle has at least two deformable materials in two parts split along and parallel to an axial plane.
The nozzle protrudes out of the surface of the spray arm and is communicated with the water outlet of the spray arm, and the deformation of the deformable material of the nozzle enables the side wall of the nozzle to deviate relative to the central line of the water outlet of the spray arm.
The spray arm is provided with two deformable materials which are deformed according to the change of the running state of the dishwasher, so that the spraying direction of the spray nozzle is changed.
The two deformable materials of the spray arm are an upper part and a lower part.
The two deformable materials are materials with different coefficients of thermal expansion.
Preferably, the two deformable materials are one that expands upon heating and the other that contracts upon heating.
The spraying arm structure of the dishwasher further comprises an adjusting component, the spraying direction of the spray nozzle is directly or indirectly adjusted through the adjusting component, and the adjusting component at least comprises a deformable material which deforms according to the change of the operating state of the dishwasher.
The change of the operation state of the dishwasher is a change of a temperature of washing water.
The invention also provides a dishwasher with the spraying arm structure of the dishwasher.
After the technical scheme is adopted, compared with the prior art, the invention has the following beneficial effects.
The spray arm nozzle adopts the deformable material, so that the spray angle of the nozzle is changed along with the change of the running state of the dishwasher in the running process of the dishwasher. In the operation process of the dishwasher, the change of the spray angle of the spray arm is realized under the condition of not stopping washing, and the automatic adjustment of the spray angle of the spray arm can be realized. Changes in dishwasher operating conditions include, but are not limited to, temperature. After the spray arm nozzle direction changes, the spray jet water flow direction changes, so that the dish washing machine is increased by the area of water flow direct cleaning in the operation process, namely, the area of tableware washed by water flow is increased when the spray arm rotates for one week, the washing effect of the dish washing machine is greatly enhanced, the washing efficiency is effectively improved, and the washing time can be saved.
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention, are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention without limiting the invention to the right. It is obvious that the drawings in the following description are only some embodiments, and that for a person skilled in the art, other drawings can be derived from them without inventive effort. In the drawings:
FIG. 1 is a schematic view of the overall initial state of the spray arm of the present invention;
FIG. 2 is a schematic view of the overall deformation of the spray arm of the present invention;
FIG. 3 is a schematic view of a first variant of the first embodiment of the invention;
FIG. 4 is an isometric view of a second embodiment of the present invention in a first, initial state;
figure 5 is an isometric view of a first variant of the second embodiment of the present invention.
FIG. 6 is a sectional view of a second embodiment of the present invention in a first initial state;
FIG. 7 is a sectional view of a second embodiment of the present invention in a first modified state;
FIG. 8 is an isometric view of a second initial state of a second embodiment of the present invention;
FIG. 9 is an isometric view of a second variant of the second embodiment of the present invention;
FIG. 10 is a second initial state cutaway schematic view of the second embodiment of the present invention;
fig. 11 is a sectional view schematically showing a second modification of the second embodiment of the present invention.
In the figure: 1. a spray arm; 2. a flexible base; 3. a support mechanism; 4. an adjustment member; 5. a nozzle; 6. a deformable material I; 7. and a second deformable material.
It should be noted that the drawings and the description are not intended to limit the scope of the inventive concept in any way, but to illustrate it by a person skilled in the art with reference to specific embodiments.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and the following embodiments are used for illustrating the present invention and are not intended to limit the scope of the present invention.
In the description of the present invention, it should be noted that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Fig. 1 is a schematic view showing an overall initial state of a spray arm according to the present invention.
It can be seen that the spray angle of the spray arm in the initial state of the invention is vertical to the surface of the spray arm.
As shown in fig. 2, it is a schematic view of the overall deformation state of the spray arm according to the present invention.
It can be seen that the spray angle of the spray arm under the variable state of the invention is changed to generate different spray angle changes according to the specific conditions (position, size and the like) of the set deformable material.
The spray arm structure comprises a spray arm and a nozzle arranged on the spray arm, wherein the nozzle changes the spraying direction of the nozzle according to the change of the operating state of the dishwasher, and the operating state is not limited to temperature, and can also be other operating state parameters of the dishwasher such as rotating speed, water pressure and the like.
Example one
The spray arm structure of the invention changes the spray direction of the spray nozzle according to different factors of the operating state of the dishwasher, such as temperature, water pressure, rotating speed and the like. The spray arm surface may be arranged vertically or inclined, and is not limited herein. The spray nozzle comprises a deformable material, or the spray arm is made of the deformable material, the spray nozzle changes along with factors such as temperature in the operation process of the dish-washing machine, the deformable material deforms according to the temperature, and the deformation of the spray nozzle makes the spray angle change, so that the area of the tableware washed by the single-rotation water flow is increased, and the washing efficiency of the dish-washing machine is improved.
In this embodiment, the nozzle has at least partially deformable material, for example, at least partially deformable material on the sidewall of the tubular nozzle, which deforms in response to changes in the operating conditions of the dishwasher, the deformation of the nozzle being such that a portion of the deformable material on the sidewall of the nozzle deforms, causing the tubular nozzle to shift relative to the centerline of the outlet of the spray arm, thereby changing the spray direction of the nozzle.
As shown in fig. 3, in another mode of this embodiment, the nozzle 5 protrudes from the surface of the spray arm 1, and a through hole is formed in the middle of the spray arm, i.e., a nozzle outlet. The nozzle 5 is made of deformable materials, and comprises a first deformable material 6 and a second deformable material 7, wherein the first deformable material 6 and the second deformable material 7 are two materials with different thermal expansion coefficients, and after the two materials are compounded, due to the different thermal expansion coefficients, when the temperature in the dishwasher changes, the deformation of one deformable material is larger than that of the other deformable material, so that the deformation of the nozzle is that the side wall of the nozzle is deviated relative to the central line of the water outlet of the spray arm, and the spraying direction of the nozzle is changed.
As a further optimization of the mode, the nozzle 5 adopts deformable materials comprising a first deformable material 6 and a second deformable material 7, wherein one deformable material expands when heated and the other deformable material contracts when heated, after the two deformable materials are compounded, because one material expands when heated and one material contracts when heated, when the temperature in the dishwasher changes, half of the nozzle expands when heated and half contracts when heated, the compound position of the two deformable materials deforms substantially within the elastic strain range, so that the deformation of the nozzle is caused, the offset of the side wall of the nozzle relative to the central line of the water outlet of the spray arm is larger than the angle of the former condition, and the spraying direction of the nozzle is changed.
As the further optimization of the mode, the nozzle adopts deformable materials, the nozzle comprises more than two deformable materials, the stress of the composite section is minimum according to the thermal expansion coefficient or the thermal shrinkage coefficient, and the angle which can be changed by changing the spraying direction of the nozzle is maximum.
In this embodiment, the two deformable materials of the nozzle are divided equally or unequally along the axial plane and parallel to the axial plane, or the joint surfaces of the two deformable materials and the nozzle axis form a certain included angle, and the included angle can be adjusted according to the characteristics of the deformable materials, so that the changeable angle of the spraying direction of the nozzle is the largest on the premise that the strength of the joint surfaces is large enough.
Or, as another form of this embodiment, the spray arm 1 includes an upper and a lower two-part structure, the upper and the lower two-part structure are made of deformable materials with different thermal expansion coefficients, and due to the different thermal expansion coefficients, when the temperature in the dishwasher changes, the deformation of one deformable material is greater than that of the other deformable material, so that the whole spray arm is bent and deformed, and is arched upwards or downwards, the axis of the nozzle outlet is perpendicular to the surface of the spray arm, and due to the bending of the upper and the lower surfaces of the spray arm, the side wall of the nozzle is offset relative to the original center line of the nozzle outlet, so as to change.
As a further optimization of the mode, the material of the upper and lower two-part structure of the spray arm 1 is a deformable material which expands when heated and contracts when heated, and the two deformable materials are compounded. Because one material is heated to expand and the other material is heated to contract, when the temperature in the dish-washing machine changes, one deformable material is heated to expand and the other deformable material is heated to contract, the composite position of the two deformable materials deforms within the elastic strain range, so that the whole spray arm is bent and deformed, the upper arch or the lower arch is concave, the axis of the water outlet of the nozzle 5 is vertical to the surface of the spray arm, and the side wall of the nozzle deviates relative to the original central line of the water outlet of the nozzle due to the bending of the upper surface and the lower surface of the spray arm, so that the spraying direction of the.
As the further optimization of the mode, the spray arm 1 adopts deformable materials, the deformable materials are more than two deformable materials, the stress of the composite section is minimum according to the thermal expansion coefficient or the thermal shrinkage coefficient, and the angle of the spraying direction of the spray nozzle can be changed to be maximum.
As shown in fig. 4 to 11, the second embodiment of the present invention is in an initial and deformed state.
Example two
The spray arm structure comprises a spray arm and a nozzle arranged on the spray arm. The initial state of the water jet direction of the nozzle can be set to be vertical to the surface of the spray arm, and can also be set to be inclined to the surface of the spray arm, which is not limited herein. The spray arm structure further comprises an adjusting part, the spraying direction of the spray nozzle is directly or indirectly adjusted through the adjusting part, and the adjusting part at least comprises a deformable material which deforms according to the change of the operating state of the dishwasher. The nozzle is installed on flexible base, and the dish washer during operation sprays the arm rotation to realize the circumference formula spray rinsing. Along with dish washer water is heated, temperature in the dish washer risees gradually, and deformable material produces deformation in the regulating part, and one end is blockked by supporting mechanism, and the nozzle slope can be oppressed to deformable material deformation back to the injection angle has been adjusted.
Furthermore, all the adjusting parts can be provided with deformable materials with different structures, and due to different structures, although the deformation coefficients are consistent, the deformation generated under the same temperature change is different; materials with the same size and different heat capacities can be adopted, and because the materials are different, the sizes of the generated thermal deformation are different, and the structural sizes and the materials can also be different; thus, the spray angle of each nozzle varies differently, in this way, more preferably, in a direction away from the axis of rotation of the spray arm, a deformable material is provided with a greater variation of the spray angle, while a position close to the centre of the axis of the spray arm, a deformable material with a smaller variation of the spray angle, which allows a greater and more concentrated coverage of the space inside the cleaning chamber of the dishwasher.
Furthermore, the nozzle is arranged on the flexible base, the deformable material in the adjusting component is arranged on one side of the outer side of the radial side wall of the nozzle and provides a stress supporting position through the supporting mechanism, and when the internal temperature changes, the deformable material deforms, so that the nozzle is inclined along the deformation changing direction by taking the flexible base as the support, and the spraying angle is changed. More preferably, the deformable material in the adjustment member is disposed outside the radial sidewall of the nozzle adjacent the nozzle outlet. Because the deformable material setting position is far away from the flexible base support position, the relative arm of force is longer, so, under the condition of the same deformation displacement, the limit angle of the water flow sprayed by the nozzle is larger.
On the other hand, the nozzle is arranged on the flexible base, the deformable material in the adjusting component is arranged on any side of the axial water inlet of the nozzle, and a stress supporting position is provided by the supporting mechanism, when the internal temperature changes, the deformable material deforms, the nozzle is enabled to incline by taking the flexible base as the support through the supporting mechanism, and therefore the spraying angle is changed, which is equivalent to the principle of utilizing a lever structure. More preferably, the variable material in the adjustment member is disposed on either side of the nozzle axial water inlet, and away from the nozzle axis. Because the deformable material is far away from the flexible base supporting position, the moment arm of the deformable material is relatively long, and therefore the limit angle of the water flow sprayed by the nozzle is larger under the condition of the same deformation displacement.
The flexible base that further nozzle bottom set up can be one section bellows, and the bellows produces one side compression along with nozzle angle change back, and one side is tensile, and rivers then are normal pass through the bellows and reach the nozzle and spray. More preferably, the bellows is sleeved with a spring, and when the deformation of the deformable material in the adjusting part brings about a corresponding deformation of the bellows, the bellows cannot be restored to the initial state by the elasticity of the bellows, and the bellows is restored to the initial spraying angle of the nozzle by the elasticity of the spring.
As shown in fig. 4 and 6, the spray arm of the present invention includes a spray arm 1 and a nozzle 5 disposed on the spray arm. The initial state of the water jet direction of the nozzle 5 is vertical to the surface of the spray arm 1. The adjusting part 4 comprises a deformable material, the spray nozzles 5 are mounted on the flexible base 2, and the spray arm 1 rotates to realize circumferential spray-washing when the dishwasher is in operation. As shown in fig. 4 and 6, the spray arm of the present invention is in a deformed state. Along with the dish washer water is heated, the temperature in the dish washer produces the change, and nozzle 5 is heated deformation because of the deformation material in adjustable part 4, and the one end locking of deformable material is in supporting mechanism 3, and deformable material deformation produces to the deformation displacement of other end, oppresses nozzle 5 slope to the injection angle has been adjusted.
As shown in fig. 8 and 10, the spray arm of the present invention includes a spray arm 1 and a nozzle 5 provided on the spray arm in an initial state. The initial state of the water jet direction of the nozzle 5 is vertical to the surface of the spray arm 1. The adjusting part 4 comprises a deformable material, the spray nozzles 5 are mounted on the flexible base 2, and the spray arm 1 rotates to realize circumferential spray-washing when the dishwasher is in operation. As shown in fig. 8 and 10, the spray arm of the present invention is in a deformed state. Along with dish washer water is heated, temperature in the dish washer rises gradually, and nozzle 5 is heated deformation because of the deformable material in adjusting part 4, and deformable material stops in spray arm 1 surface, and the deformable material setting in adjusting part 4 is in one orientation connection supporting mechanism 3 in the radial outside of nozzle 5, rises when inside temperature, deformable material is heated deformation and is promoted supporting mechanism 3, makes nozzle 5 use flexible base 2 to support through supporting mechanism 3 and makes nozzle 5 produce the slope to change injection angle.
Furthermore, all the nozzles 5 can be provided with variable materials in the adjusting parts 4 with different sizes, and due to different material sizes, although the thermal deformation coefficients are consistent, the deformation sizes are different; materials with the same size and different deformation quantities can be adopted, and because the materials are different, the generated thermal deformation is different in size; thus, the spray angle of each nozzle 5 varies differently, in this way, more preferably, a deformable material with a greater variation of the spray angle is provided in a direction away from the axis of rotation of the spray arm 1, while a deformable material with a smaller variation of the spray angle is provided close to the central position of the axis of the spray arm, which allows a greater and more concentrated coverage of the space inside the cleaning chamber of the dishwasher.
Or as shown in fig. 4 to 11, further: the flexible base may be a length of corrugated tubing. The flexible base 2 arranged at the bottom of the nozzle 5 can be a section of corrugated pipe, after the corrugated pipe changes along with the angle of the nozzle, one side of the corrugated pipe is compressed, one side of the corrugated pipe is stretched, and water flow is normally transmitted to the nozzle 5 through the corrugated pipe to be sprayed. More preferably, the bellows is sleeved with a spring, and when the deformation of the deformable material in the adjusting part 4 brings the displacement deformation of the bellows and cannot be restored to the initial state by the elasticity of the bellows, the bellows is restored to the initial spraying angle of the nozzle 5 by the elasticity of the spring.
It is worth pointing out that, in this embodiment, that is, the nozzle is installed on the flexible base, the operation state may be a rotation speed and a water pressure (in an actual product, the rotation speed is controlled by the water pressure, that is, the water pressure is high, the rotation speed is high, and the nozzle is inclined away from the rotation axis by taking the flexible base as a pivot under the centrifugal force generated by the rotation of the spray arm, that is, the spray angle of the nozzle is changed, and when the rotation speed is higher, the generated centrifugal force is higher, and the corresponding spray angle change is also higher.
Although the present invention has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (10)

1. The utility model provides a dish washer spray arm structure, includes the spray arm, and sets up the nozzle on the spray arm, its characterized in that: the spray nozzles change the spray direction of the spray nozzles according to the change of the operating state of the dishwasher.
2. The dishwasher spray arm structure of claim 1, wherein: the nozzle has at least a portion of deformable material that deforms in response to changes in the operating conditions of the dishwasher to change the spray direction of the nozzle.
3. A dishwasher spray arm construction according to claim 2 wherein: the nozzle has at least two deformable materials in two parts split along and parallel to an axial plane.
4. The dishwasher spray arm structure of claim 3, wherein: the nozzle protrudes out of the surface of the spray arm and is communicated with the water outlet of the spray arm, and the deformable material of the nozzle deforms to enable the side wall of the nozzle to deviate relative to the central line of the water outlet of the spray arm.
5. The dishwasher spray arm structure of claim 1, wherein: the spray arm is provided with two deformable materials which are deformed according to the change of the running state of the dishwasher, so that the spraying direction of the spray nozzle is changed.
6. A dishwasher spray arm construction according to claim 5 wherein: the two deformable materials of the spray arm are an upper part and a lower part.
7. The spray arm structure of a dishwasher of any one of claims 3 to 6, wherein: the two deformable materials are materials with different thermal expansion coefficients, and preferably, one deformable material expands when heated and the other deformable material contracts when heated.
8. The dishwasher spray arm structure of claim 1, wherein: the dishwasher further comprises an adjusting component, the spraying direction of the spray nozzle is directly or indirectly adjusted through the adjusting component, and the adjusting component at least comprises a deformable material which deforms according to the change of the operating state of the dishwasher.
9. The dishwasher spray arm structure of claim 1, wherein: the change of the operation state is a temperature change of the washing water.
10. A dishwasher, characterized by: having a dishwasher spray arm arrangement as claimed in any one of claims 1 to 9.
CN201910368507.5A 2019-05-05 2019-05-05 Dish washer sprays arm structure and has dish washer of this spray arm structure Pending CN111887780A (en)

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* Cited by examiner, † Cited by third party
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CN112845305A (en) * 2021-01-04 2021-05-28 长江存储科技有限责任公司 Wafer cleaning device

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