CN111879339A - Temperature error compensation method for MEMS gyroscope - Google Patents
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Abstract
The invention discloses a temperature error compensation method for an MEMS gyroscope, which comprises the following steps: testing the gyroscope by using a full-temperature zero offset and a scale factor, and drawing a change relation curve of angular speed output deviation and angular speed output of the gyroscope and a change relation curve of angular speed output deviation and temperature output of the gyroscope; establishing a relation model of the angular speed output deviation and the angular speed output of the gyroscope; establishing a relation model of the angular speed output deviation and the temperature output of the gyroscope; establishing a fitting estimation curved surface of the angular speed output deviation of the gyroscope, the angular speed output and the temperature output, and calculating a fitting coefficient; and calculating compensation quantity according to the obtained fitting estimation curved surface. The gyroscope can be compensated with full-temperature zero offset and scale factors simultaneously, so that the compensation precision is improved, the test efficiency is obviously improved, and the condition that the compensation effect is not good due to the superposition influence of certain items such as temperature is avoided.
Description
Technical Field
The invention relates to the technical field of temperature compensation of an MEMS (micro-electromechanical system) gyroscope, in particular to a temperature error compensation method of an MEMS gyroscope, which can simultaneously compensate for the full-temperature zero offset and the scale factor of the gyroscope.
Background
A Micro-Electro-Mechanical System (MEMS) gyroscope is mainly composed of a sensitive structure and a signal processing circuit thereof, and is a sensor for measuring the angular velocity of an object by using coriolis force. The sensor has the characteristics of small volume, low cost, low power consumption, overload resistance, easy integration and the like, and has wide application prospect in the fields of consumer electronics, industrial robots, unmanned aerial vehicles and military affairs. However, a silicon-based MEMS gyroscope (hereinafter referred to as a gyroscope) is prone to temperature drift, and changes in the temperature of the sensitive structure due to changes in the external environment and heat generated during operation of the gyroscope result in changes in the device parameters, which ultimately leads to changes in the zero drift (hereinafter referred to as zero offset) and scale factor of the gyroscope. Therefore, gyroscope zero bias and scale factor temperature error compensation are essential to improve its accuracy.
In order to reduce the influence of temperature on the performance of the gyroscope, the following four methods are generally adopted at present: 1) developing a sensitive structure insensitive to temperature; 2) adding a negative temperature coefficient portion to the sensitive structure to compensate for the effect of temperature; 3) the temperature of the working environment of the gyroscope is kept stable through an additional device; 4) and establishing a temperature error compensation model, calculating error compensation amount, and performing real-time compensation. In consideration of comprehensive engineering application, the 4 th mode has strong practicability and is a widely applied method in the current engineering practice. The method comprises the following specific steps:
a MEMS gyroscope scale factor error compensation method [ J ] is provided in the literature [1] building, trumpet creeper and Lijian Li.Aero proposes a method for compensating the scale factor according to the size of the angular velocity of a gyroscope by segmented interpolation; the literature [2] Wangbin, Wumeng, Pioneer and Pioneer is used for studying a zero offset temperature compensation model of an MEMS gyroscope [ J ] navigation and control, and a method for realizing zero offset temperature compensation of the gyroscope by using a least square method and combining a multiple linear regression technology is provided.
CN2018112376095, which proposes a temperature compensation method for a novel optical fiber gyroscope, and constructs a temperature compensation model of the optical fiber gyroscope by using temperature and temperature gradient to implement zero offset temperature compensation of the optical fiber gyroscope.
CN2018101755647 proposes a comprehensive temperature compensation method for a MEMS gyroscope, which performs polynomial fitting and linear interpolation calculation by collecting original output values of the gyroscope at different temperatures, so as to realize zero offset temperature compensation of the MEMS gyroscope.
CN2016107090722 provides a method for temperature compensation based on a sample temperature calibration curve, which mainly solves the temperature compensation problem of abnormal bias temperature drift of a gyroscope, improves the yield of gyroscope products, and has little effect on improving the temperature performance of the gyroscope, aiming at the situation that the MEMS gyroscope has abnormal bias temperature drift in the actual use process.
In summary, most of the gyroscope temperature compensation methods conventionally adopted at present focus on compensating for zero offset temperature errors, and in practical engineering applications, the scale factor plays a great role in the accuracy of navigation solution, so the temperature compensation of the scale factor is also very important. The existing literature respectively compensates the zero offset and the scale factor of the gyroscope in sequence, and the sequence of compensation also influences the compensation effect; in the multiple compensation, the situation that the compensation effect is poor due to the superposition effect of certain terms such as temperature exists.
Therefore, it is necessary to provide a method for simultaneously compensating for the zero offset and the scale factor of the gyroscope to solve the above problems.
Disclosure of Invention
In view of the above technical problems, the present invention aims to: the MEMS gyroscope temperature error compensation method can compensate the full-temperature zero offset and the scale factor of the gyroscope simultaneously, not only improves the compensation precision, but also obviously improves the test efficiency, and simultaneously avoids the condition of poor compensation effect caused by the superposition influence of certain items such as temperature.
The technical scheme of the invention is as follows:
a temperature error compensation method for a MEMS gyroscope comprises the following steps:
s01: testing the gyroscope by using a full-temperature zero offset and a scale factor, and drawing a change relation curve of angular speed output deviation and angular speed output of the gyroscope and a change relation curve of angular speed output deviation and temperature output of the gyroscope;
s02: establishing a relation model of the angular speed output deviation and the angular speed output of the gyroscope according to the drawn change relation curve of the angular speed output deviation and the angular speed output of the gyroscope; according to the drawn change relation curve of the angular speed output deviation and the temperature output of the gyroscope, a relation model of the angular speed output deviation and the temperature output of the gyroscope is established;
s03: establishing a fitting estimation curved surface of the angular speed output deviation of the gyroscope, the angular speed output and the temperature output, and calculating a fitting coefficient;
s04: and calculating compensation quantity according to the obtained fitting estimation curved surface.
In a preferred embodiment, before the step S01 of performing the full-temperature zero-bias and scale factor test on the gyroscope, the method further includes:
fixing a gyroscope on a temperature control single-axis rate turntable, wherein the sensitive axis of the gyroscope is parallel to the normal direction of the turntable; and setting a temperature point sequence to be detected and a rotating speed point sequence to be detected.
In the preferred technical scheme, each temperature point keeps warm for a certain time after reaching the temperature until the temperature is stable, each rotating speed point data is collected for a certain time, and the gyroscope outputs omega at the original angular speedOAnd original temperature output TOTake the mean value over a certain time.
In a preferred embodiment, the relationship model between the output deviation of the gyroscope angular velocity and the angular velocity output in step S02 is:
e(ΩO)＝a1ΩO+a0；
wherein e (Ω)o) For angular velocity deviation related to scale factor, a1、a0Are first order polynomial coefficients.
In a preferred embodiment, the relationship model between the angular velocity output deviation of the gyroscope and the temperature output in step S02 is:
wherein, e (T)o) For the purpose of temperature-dependent angular velocity deviation,b3、b2、b1、b0is a cubic polynomial coefficient.
In a preferred technical solution, the fitting estimation curved surface of the angular velocity output deviation of the gyroscope in the step S03, the angular velocity output and the temperature output is:
wherein, c00、c10、c01、c11、c02、c12、c03Are fitting coefficients.
In a preferred embodiment, the calculating the fitting coefficient in step S03 includes:
s31: three groups of data columns are obtained by calculation according to the test data, and the data columns are respectively: angular velocity output raw data omegaOTemperature output raw data TOAngular velocity output deviation e (Ω)O,TO)；
S32: and according to a least square criterion, minimizing the sum of squares of errors of the estimated value and the measured value to obtain a fitting coefficient.
Compared with the prior art, the invention has the advantages that:
the invention can simultaneously compensate the gyroscope with the full-temperature zero offset and the scale factor, and lays a good foundation for the high-precision calibration compensation of the subsequent inertia measurement component. Based on the application example, the compensation effect can be achieved through one-time full-temperature test process. Compared with the conventional compensation method, the method saves the process of parameter-by-parameter compensation. Not only improved the precision of compensation, test efficiency also obviously improves, also avoids appearing the not good condition of compensation effect that the stack influence of certain item such as temperature leads to simultaneously.
Drawings
The invention is further described with reference to the following figures and examples:
FIG. 1 is a graph of angular velocity output deviation versus angular velocity output at different temperature points;
FIG. 2 is a graph of angular velocity output deviation versus gyroscope temperature output at various rotational speed points (i.e., angular velocity input);
FIG. 3 is a flowchart of the calculation of the temperature error compensation coefficient of the gyroscope according to the present invention;
FIG. 4 shows a compensation surface obtained by fitting according to the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings in conjunction with the following detailed description. It should be understood that the description is intended to be exemplary only, and is not intended to limit the scope of the present invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
The invention discloses a temperature error compensation method of a silicon-based MEMS gyroscope, which comprises the following steps of:
firstly, establishing a gyroscope temperature error compensation test scheme based on a temperature control single-axis rate position rotary table, testing data related to zero offset and scale factors of a gyroscope at a series of temperature points, and drawing a change relation curve of angular speed output offset and temperature of the gyroscope at different rotating speed points (namely angular speed input) based on the test data; and secondly, under different temperature points, the change relation curve of the angular speed output deviation of the gyroscope and the rotating speed (namely the angular speed input). And establishing a model of the angular speed output deviation of the gyroscope, the temperature and the angular speed output.
And then, establishing a gyroscope temperature error compensation coefficient calculation program based on the error compensation model, outputting a compensation coefficient, calculating a compensation amount, finally completing the temperature compensation of the gyroscope zero offset and the scale factor and evaluating the actual compensation effect.
Specifically, a test scheme for temperature error compensation of a gyroscope based on a temperature-controlled single-axis rate turntable is established as follows:
in the embodiment, a silicon-based MEMS gyroscope is adopted, LCC (micro-electromechanical systems) is integrally packaged, and a customized clamp is used for manufacturing the test board special for temperature compensation of the gyroscope, so that the test and the replacement of the gyroscope are facilitated. The signals are transmitted by adopting an RS422 interface so as to ensure that the signals are not attenuated under the condition of long-distance transmission. The test board special for the MEMS gyroscope is fixed on a single-shaft rate turntable with a temperature box through a special tool, a full-automatic flow is adopted for testing, and the output file format is a text file.
Firstly, according to the working temperature interval required by the gyroscope and according to a certain temperature interval, a temperature point sequence (T) to be measured is set1，T2……，Tm) And m is the number of the temperature points to be measured. In the embodiment, the range of the working temperature required by the gyroscope is-45-85 ℃, and a temperature point sequence (T) to be measured is set under the criterion of accuracy and convenience in operation1，T2……，Tm) Is-45 deg.C, -30 deg.C, -15 deg.C, 0 deg.C, 25 deg.C, 40 deg.C, 50 deg.C, 70 deg.C, 85 deg.C, wherein m is the number of temperature points to be measured, i.e. 9.
Then, according to the range to be calibrated of the gyroscope and according to a certain rotating speed point interval, a rotating speed point sequence omega to be measured is seti(-Ωn……，-Ω2，-Ω1，Ω0，Ω1，Ω2，……，Ωn) Wherein n is the number of unilateral rotating speed points, the number of each temperature test point is 2n +1, and omega0The rotational speed was 0 °/s. In this embodiment, the range to be calibrated of the gyroscope is ± 500 °/s, and a sequence Ω of rotation speed points to be measured is set according to the set rotation speed point intervali(-Ωn……，-Ω2，-Ω1，Ω0，Ω1，Ω2，……，Ωn) 0 °/s, ± 0.1 °/s, ± 0.2 °/s, ± 0.5 °/s, ± 1 °/s, ± 2 °/s, ± 5 °/s, ± 10 °/s, ± 20 °/s, ± 50 °/s, ± 100 °/s, ± 200 °/s, ± 500 °/s, where n is the number of unilateral rotational speed points, 12 is taken, and the number of each temperature test point is 2n +1, i.e., 25.
And fixing the special test board for the MEMS gyroscope on the temperature control single-axis rate turntable through a special tool, wherein the sensitive axis of the gyroscope is parallel to the normal direction of the turntable. And testing the zero offset and the scale factor of the gyroscope according to the temperature point and the rotating speed point. In order to ensure that the internal working temperature of the gyroscope is stable, heat preservation is carried out for a certain time after each temperature point reaches the temperature until the temperature is stable, data of each rotating speed point is collected for a certain time, and the stored data comprises the gyroscopeOriginal output angular velocity omegaOAnd the output T of the internal temperature sensor of the gyroscopeOThe units are LSBs. At the time of data processing, ΩOAnd TOThe data is averaged over 30s to eliminate the interference of random noise.
Calculating the degree factor at normal temperature to be KFSIs a reaction of KFSAs a standard value for the scale factor, the angular velocity output deviation caused by the scale factor variation is:
eΩ＝ΩO-KFS·Ωi(1)
wherein omegaiIs the point of the rotational speed to be measured (i.e., angular speed input).
The obtained relationship curve of the angular velocity deviation and the gyroscope output is shown in fig. 1, and the relationship is in accordance with a polynomial relationship of a degree, and the following relationship is established:
e(ΩO)＝a1ΩO+a0(2)
in the formula, e (Ω)o) Is a scale factor dependent angular velocity deviation; a is1、a0Are first order polynomial coefficients.
The obtained relationship curve of the angular velocity deviation and the temperature output of the gyroscope is shown in fig. 2, the precision of error compensation and the overall system computation are considered comprehensively, and the relationship between the angular velocity deviation and the temperature is a cubic polynomial:
in the formula, e (T)o) Is a temperature-dependent angular velocity deviation; b3、b2、b1、b0Is a cubic polynomial coefficient.
As can be seen from the above analysis in conjunction with FIGS. 1 and 2, a1、a0The values at different temperatures are different and are dependent on the temperature TOA variable of (d); and b3、b2、b1、b0The values are different under different angular velocity inputs and are dependent on the angular velocity input omegaiThe variable of (2). Establishing a deviation e (Ω)O,TO) And original angular velocity of gyroscopeOutput omegaOAnd original temperature output T of gyroscopeOThe surface is estimated by fitting (i.e., a binary function relationship) as follows:
namely, it is
Wherein, c00、c10、c01、c11、c02、c12、c03Are fitting coefficients.
Establishing a gyroscope temperature error compensation coefficient calculation program based on the temperature error compensation model, which comprises the following specific steps:
the block diagram is shown in fig. 3. MATLAB software is adopted to write a data processing program, and related characteristic curves and compensation coefficients can be directly output. And calculating error compensation amount through the coefficient obtained by fitting and verifying the compensation effect.
Firstly, reading the test data of the test process, averaging the angular speed output original data of different rotating speed points at each temperature point and the temperature output original data to eliminate the interference of random noise, and calculating the angular speed output deviation e (omega) according to the formula (1)O,TO) Three data columns are obtained in total, which are respectively: angular velocity output raw data omegaOTemperature output raw data TOAngular velocity output deviation e (Ω)O,TO). Reference expression
According to the least square rule, the error square sum of the estimated value and the measured value is minimized, a compensation surface is established, and a compensation coefficient (fitting coefficient) c is obtainedmn. The final output compensation fit curve is shown in fig. 4. The three-axis information is respectively: the gyroscope angular speed original output, the gyroscope internal temperature output and the deviation between the actual output and the theoretical output, wherein the data represents the gyroscope angular speed original output and has the unit of LSB; temper represents the internal temperature output of the gyroscope in LSB; DELTA denotes the deviation of the actual output from the theoretical output in deg./s. The output surface fitting coefficients are shown in the table below.
And performing full-temperature compensation on a certain type of silicon-based MEMS gyroscope by using the temperature compensation model in the embodiment. Using the above-mentioned compensation coefficient cmnAccording to the expression:
the angular velocity output of the compensated gyroscope is:
the zero-bias temperature coefficient and the scale factor temperature coefficient of the gyroscope are calculated by adopting the angular speed output of the compensated gyroscope, and the comparison with the full-temperature characteristic is improved as shown below.
Therefore, the compensation method can effectively improve the zero offset and scale factor temperature characteristics of the gyroscope, and the compensation precision meets the practical application scene.
It is to be understood that the above-described embodiments of the present invention are merely illustrative of or explaining the principles of the invention and are not to be construed as limiting the invention. Therefore, any modification, equivalent replacement, improvement and the like made without departing from the spirit and scope of the present invention should be included in the protection scope of the present invention. Further, it is intended that the appended claims cover all such variations and modifications as fall within the scope and boundaries of the appended claims or the equivalents of such scope and boundaries.
Claims (7)
1. A temperature error compensation method for a MEMS gyroscope is characterized by comprising the following steps:
s01: testing the gyroscope by using a full-temperature zero offset and a scale factor, and drawing a change relation curve of angular speed output deviation and angular speed output of the gyroscope and a change relation curve of angular speed output deviation and temperature output of the gyroscope;
s02: establishing a relation model of the angular speed output deviation and the angular speed output of the gyroscope according to the drawn change relation curve of the angular speed output deviation and the angular speed output of the gyroscope; according to the drawn change relation curve of the angular speed output deviation and the temperature output of the gyroscope, a relation model of the angular speed output deviation and the temperature output of the gyroscope is established;
s03: establishing a fitting estimation curved surface of the angular speed output deviation of the gyroscope, the angular speed output and the temperature output, and calculating a fitting coefficient;
s04: and calculating compensation quantity according to the obtained fitting estimation curved surface.
2. The method for compensating for temperature error of a MEMS gyroscope of claim 1, wherein before the testing the gyroscope for full temperature zero offset and scale factor in step S01, further comprising:
fixing a gyroscope on a temperature control single-axis rate turntable, wherein the sensitive axis of the gyroscope is parallel to the normal direction of the turntable; and setting a temperature point sequence to be detected and a rotating speed point sequence to be detected.
3. The temperature error compensation method for the MEMS gyroscope according to claim 2, wherein each temperature point is kept warm for a certain time after reaching the temperature until the temperature is stable, each rotating speed point data is collected for a certain time, and the original angular speed output Ω of the gyroscope is obtainedOAnd original temperature output TOTake the mean value over a certain time.
4. The method for compensating for the temperature error of the MEMS gyroscope according to claim 1, wherein the relationship model between the gyroscope angular velocity output deviation and the angular velocity output in step S02 is:
e(ΩO)＝a1ΩO+a0；
wherein e (Ω)o) For angular velocity deviation related to scale factor, a1、a0Are coefficients.
5. The method for compensating for the temperature error of the MEMS gyroscope according to claim 4, wherein the relationship model between the angular velocity output deviation of the gyroscope and the temperature output in the step S02 is:
wherein, e (T)o) For temperature-dependent angular velocity deviations, b3、b2、b1、b0Are coefficients.
6. The method for compensating for temperature error of a MEMS gyroscope according to claim 5, wherein the fitting estimation surface of the gyro angular velocity output deviation and the angular velocity output and the temperature output in the step S03 is:
wherein, c00、c10、c01、c11、c02、c12、c03Are fitting coefficients.
7. The method for compensating for the temperature error of the MEMS gyroscope of claim 6, wherein the calculating the fitting coefficient in step S03 includes:
s31: three groups of data columns are obtained by calculation according to the test data, and the data columns are respectively: angular velocity output raw data omegaOTemperature output raw data TOAngular velocity output deviation e (Ω)O,TO)；
S32: and according to a least square criterion, minimizing the sum of squares of errors of the estimated value and the measured value to obtain a fitting coefficient.
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| CN113720357A (en) * | 2021-09-16 | 2021-11-30 | 北京控制工程研究所 | Gyro scale factor calibration and compensation method under vacuum full-temperature condition of 3S optical fiber IMU |
| CN113720357B (en) * | 2021-09-16 | 2024-05-31 | 北京控制工程研究所 | Gyro scale factor calibration and compensation method under 3S optical fiber IMU vacuum full-temperature condition |
| CN114018235A (en) * | 2021-09-27 | 2022-02-08 | 北京控制工程研究所 | Full-temperature full-dynamic pulse compensation method for wide-range fiber-optic gyroscope |
| CN114018235B (en) * | 2021-09-27 | 2022-08-12 | 北京控制工程研究所 | Full-temperature full-dynamic pulse compensation method for wide-range fiber-optic gyroscope |
| CN114199280A (en) * | 2021-12-10 | 2022-03-18 | 中国兵器工业集团第二一四研究所苏州研发中心 | Batch calibration and error compensation system and method for micro-inertia measurement assembly |
| CN114184212B (en) * | 2021-12-27 | 2023-09-26 | 北京计算机技术及应用研究所 | Zero temperature compensation method for inertial instrument |
| CN114184212A (en) * | 2021-12-27 | 2022-03-15 | 北京计算机技术及应用研究所 | Zero-position temperature compensation method for inertial instrument |
| CN114674343A (en) * | 2022-01-22 | 2022-06-28 | 中国船舶重工集团公司第七0七研究所 | Full-temperature error compensation method for scale factor of optical fiber gyroscope |
| CN115371659B (en) * | 2022-10-14 | 2023-02-24 | 武汉优米捷光电子制造有限责任公司 | Full-temperature zero-offset compensation method for fiber-optic gyroscope with forward correction |
| CN115371659A (en) * | 2022-10-14 | 2022-11-22 | 武汉优米捷光电子制造有限责任公司 | Full-temperature zero-offset compensation method for fiber-optic gyroscope with forward correction |
| CN116399374A (en) * | 2023-06-07 | 2023-07-07 | 河北美泰电子科技有限公司 | MEMS gyroscope sensor compensation method, device, terminal and storage medium |
| CN116399374B (en) * | 2023-06-07 | 2023-08-15 | 河北美泰电子科技有限公司 | MEMS gyroscope sensor compensation method, device, terminal and storage medium |
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