CN111863698A - Multifunctional intelligent transfer equipment and use method thereof - Google Patents
Multifunctional intelligent transfer equipment and use method thereof Download PDFInfo
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- CN111863698A CN111863698A CN202010886727.XA CN202010886727A CN111863698A CN 111863698 A CN111863698 A CN 111863698A CN 202010886727 A CN202010886727 A CN 202010886727A CN 111863698 A CN111863698 A CN 111863698A
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- 238000000429 assembly Methods 0.000 claims abstract description 6
- 238000003825 pressing Methods 0.000 claims description 17
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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Abstract
The invention relates to multifunctional intelligent transfer equipment and a using method thereof, and the multifunctional intelligent transfer equipment comprises a working platform, wherein at least one station is arranged on the working platform, a single station comprises a group of X-axis linear guide rails, and a feeding area and a discharging area are movably arranged on the single group of X-axis linear guide rails; the working platform is also provided with a Y-axis linear guide rail which crosses over the X-axis linear guide rail; welding head assemblies with the same number of stations are movably mounted on the Y-axis linear guide rail, two suction nozzles are arranged below the single-group welding head assembly, one suction nozzle is used for feeding, and the other suction nozzle is used for discharging; the working platform is also provided with a preset platform corresponding to the welding head assembly; the two suction nozzles are used for respectively completing the movement from the feeding area to the preset platform and from the preset platform to the discharging area, so that the transfer of products from the feeding area to the discharging area is realized, the automatic transfer of the products is particularly suitable for the transfer of the products with high viscosity between the products in the feeding area and the material boxes, the automation of the transfer of the products is realized, the double-station independent work is realized, the work efficiency is greatly improved, and the transfer precision is high.
Description
Technical Field
The invention relates to the technical field of chip production equipment, in particular to multifunctional intelligent transfer equipment and a use method thereof.
Background
In the field of semiconductor manufacturing, especially in the process of packaging and testing chips, different jigs often need to be replaced.
In the prior art, generally, the chip is moved and placed in different jigs by a manual clamping mode, the chip is easily damaged by the manual clamping mode, and the production efficiency is low.
On the other hand, factory-produced chips are usually arranged in an array on a gel material of a carrier, the gel material having different levels of adsorption force; when the chip is transferred, the chip needs to be separated from the gel material of the original carrier and then moved and placed into a new carrier; in the prior art, a chip is separated from a gel material by clamping of a clamp, and the clamp clamps and picks up the chip by friction force; along with the reduction of the size and the thickness of the chip, the chip is more and more fragile, the adsorption force between the chip and the gel material is synchronously considered, the control of the clamping force of the clamp is more and more difficult, the chip is easily failed to pick up or damaged, the production efficiency is greatly influenced, and the normal production of a factory is influenced.
Disclosure of Invention
The applicant aims at the defects in the prior art and provides the multifunctional intelligent transfer equipment with a reasonable structure and the use method thereof, so that the automation of product transfer is realized, the working efficiency is greatly improved, the transfer precision is ensured, and the multifunctional intelligent transfer equipment is particularly suitable for the condition of high viscosity between products and material boxes.
The technical scheme adopted by the invention is as follows:
a multifunctional intelligent transfer device comprises a working platform, wherein at least one station is arranged on the working platform, a single station comprises a group of X-axis linear guide rails arranged on the working platform, and a feeding area and a discharging area are movably arranged on the single group of X-axis linear guide rails; the working platform is also provided with a Y-axis linear guide rail, and the Y-axis linear guide rail crosses over the X-axis linear guide rail; welding head assemblies with the same number as the stations are movably mounted on the Y-axis linear guide rail, two suction nozzles are arranged below the single-group welding head assembly, one suction nozzle is used for feeding, and the other suction nozzle is used for discharging; and the working platform is also provided with a preset platform corresponding to the welding head assembly.
As a further improvement of the above technical solution:
the single group of X-axis linear guide rails comprise a first X-axis linear guide rail and a second X-axis linear guide rail, and a jig carrying platform is movably arranged on the first X-axis linear guide rail to form a blanking area; and a material box carrying platform is movably arranged on the X-axis linear guide rail II to form a feeding area.
The adjacent stations share one feeding area, or each station is independently provided with a feeding area and a discharging area.
A support is arranged above the X-axis linear guide rail in a crossing mode, the bottom surface of the support is fixedly mounted with the working platform, and a Y-axis linear guide rail is mounted on the top surface of the support along the length direction; the back of the bracket is provided with an opening and closing mechanism corresponding to the jig carrying platform;
the structure of the jig carrying platform is as follows: the fixture comprises a fixture seat arranged on a first X-axis linear guide rail, a fixture box is adsorbed above the fixture seat under negative pressure, a plurality of groups of accommodating groove groups are arranged on the fixture box in an array manner, a single group of accommodating groove groups comprises a plurality of accommodating grooves arranged in parallel, and a pin shaft is rotatably arranged at the end part of the single group of accommodating groove groups; a pressing block is correspondingly sleeved on the pin shaft positioned at the end part of the single accommodating groove;
the opening and closing mechanism presses the pressing block to enable the pressing block to rotate by taking the pin shaft as a circle center, and then products are placed in the accommodating groove.
The structure of the opening and closing mechanism is as follows: the device comprises a moving module fixedly arranged on the back of a support along the length direction, wherein a moving seat is movably arranged on the side surface of the moving module, an electric sliding table is arranged on the side surface of the moving seat, a vertical block is arranged on the side surface of the electric sliding table, and a connecting plate is fixedly arranged at the bottom of the vertical block; the even board front end extends forward and passes and remove the module, and the cylinder is equipped with to the front end rigid coupling of even board bottom surface, and the cylinder output is forward and install at the end and promote the piece, promotes a leading flank and installs the extension piece, and the pressure head is installed to the extension piece front end, and the pressure head bottom acts on the briquetting downwards.
The welding head assembly is structurally characterized in that: the camera comprises a supporting seat arranged on a Y-axis linear guide rail, wherein a side plate is arranged at the lower part of the front side surface of the supporting seat, a first camera with a downward lens is arranged in the middle of the front side surface of the side plate, and a first light source is arranged on the side plate below the first camera; the front side surfaces of the side plates positioned at two sides of the camera are symmetrically provided with vertical seats, the front side surface of each vertical seat is provided with a linear rotation actuator, the output end of each linear rotation actuator faces downwards, and the end part of each linear rotation actuator is provided with a suction nozzle.
The two suction nozzles are respectively a suction nozzle I and a suction nozzle II, the suction nozzle I is used for feeding, and the suction nozzle II is used for discharging;
the middle of one bottom surface of the suction nozzle is provided with a frame-shaped concave structure, and the bottom surface of the concave structure is provided with an air hole communicated with an external air source.
The structure of the preset platform is as follows: the camera module comprises a small linear module fixedly arranged on a working platform, wherein an upright post is movably arranged on the small linear module, a small platform is arranged at the top of the upright post, a through hole which is communicated up and down is formed in the small platform, and the through hole is positioned right above a camera II; an NG article placing area is arranged on the small platform positioned in front of the through hole, a transfer area is arranged on the small platform positioned on the side edge of the through hole, and a negative film placing area is arranged on the small platform positioned at the through hole; and a second camera is arranged on the working platform right below the through hole.
The working platform is provided with a support, the side surface of the support is vertically provided with a second camera, the side surface of the support above the second camera is provided with a second light source, and the lens of the second camera faces upwards and faces the through hole of the small platform after penetrating through the second light source;
or the second camera is horizontally arranged on the working platform, a steering lens barrel is arranged in front of the second camera lens, a second light source is arranged above the top surface of the steering lens barrel, and the second camera lens is steered by the steering lens barrel and is right opposite to the through hole of the small platform after penetrating through the second light source.
A use method of the multifunctional intelligent transfer equipment comprises the following steps: stations work independently;
the method comprises the following steps: a material box is placed in the material box carrying platform, and a jig box is placed on a jig seat of the jig carrying platform;
step two: the X-axis linear guide rail II works to move a product to be taken in the material box towards the direction of the Y-axis linear guide rail; synchronously, the Y-axis linear guide rail works, the welding head assembly is moved to the position above the corresponding material loading position, a camera in the welding head assembly faces a product to be taken in the material box with a lens facing downwards, and the camera photographs the product for comparison;
step three: the first camera is driven to move along the Y-axis direction through the work of the Y-axis linear guide rail, and the material box and the product inside the material box are driven to move along the X-axis direction through the work of the X-axis linear guide rail II until the center of the first camera coincides with the center of the product to be taken;
step four: the Y-axis linear guide rail continues to work, so that a first suction nozzle at the bottom of the welding head assembly is positioned right above a product to be taken;
step five: the linear rotation actuator works to drive the suction nozzle to move downwards and is matched with an external air source to suck the product through the air hole, and at the moment, the product is accommodated in the concave structure; the linear rotation actuator works to drive the suction nozzle to drive the product to shake up and down and rotate in a horizontal plane, and the side force of the product is applied by the wall surface of the concave structure, so that the adhesion degree between the product and the material box is reduced; the linear and rotary actuator drives the suction nozzle with the product to move upwards, and the product is separated from the material box;
step six: the Y-axis linear guide rail works, the welding head assembly is moved to the position above the preset platform, and the suction nozzle is positioned right above a transfer area of the preset platform; the linear rotation actuator drives the first suction nozzle to move downwards, the air hole is exhausted, and a product at the bottom of the first suction nozzle falls onto the transfer area;
step seven: the Y-axis linear guide rail works to enable the two suction nozzles to be located above the transfer area of the preset platform, the linear rotating actuator drives the two suction nozzles to move downwards, and the two suction nozzles suck products on the transfer area under the coordination of an external air source;
step eight: the Y-axis linear guide rail works, so that the suction nozzle II carries the product to move to the position above the camera II at the through hole, the camera II shoots the product through the through hole, and the angle information of the product in the horizontal plane is obtained; according to the acquired angle information, the linear rotation actuator drives the second suction nozzle and the carried product to rotate;
step nine: the camera II synchronously judges the appearance quality of the product through photographing;
if the products are NG, the small linear module works, so that the NG product placing area on the small platform moves to the position below the second suction nozzle, and the second suction nozzle loses air to enable the products to fall to the NG product placing area;
if the product is OK, the Y-axis linear guide rail works, the welding head assembly is moved to the position above the blanking position jig carrying platform, and the suction nozzle II is positioned right above the accommodating groove in the jig box;
step ten: the electric sliding table works, the pressure head is pushed to move downwards through the vertical block, the connecting plate, the pushing block and the lengthening block, the pressure head applies force downwards to the pressure block, the pressure block rotates by taking the pin shaft as a circle center, and the pressure block is screwed up close to the end part of the accommodating groove; synchronously, the linear rotation actuator drives the second suction nozzle and the carried product to move downwards, the second suction nozzle loses air, and the product at the bottom of the second suction nozzle falls into the accommodating groove; the electric sliding table works reversely, the pressure head moves upwards to leave the pressure block, and the end head of the pressure block moves downwards to be reset to be above the product in the accommodating groove; and completing the transfer of the product for one time.
The invention has the following beneficial effects:
the automatic loading and unloading device is compact and reasonable in structure and convenient to operate, the movement from the loading area to the preset platform and from the preset platform to the unloading area is completed through the two suction nozzles by combining the work of the Y-axis linear guide rail and the X-axis linear guide rail, the automation of product loading from the loading area to the unloading area is realized, the double-station independent work is realized, the work efficiency is greatly improved, the loading and unloading precision is ensured, and the respective loading and unloading modes of the two suction nozzles are particularly suitable for the loading and unloading under the condition of high viscosity between products and material boxes.
The invention also comprises the following advantages:
the first camera on the welding head assembly is matched with the second X-axis linear guide rail and the Y-axis linear guide rail to move, so that the offset precision of the product in the X direction and the Y direction after the product is transferred is ensured; the second camera below the preset platform is used for detecting and selecting the appearance of the product and ensuring the deviation precision of the rotation angle of the product in the XY plane after the product is transferred; on the other hand, the first camera and the second camera can be calibrated through an external negative film, so that the chip transferring precision is further guaranteed;
the adjacent stations share the feeding area, and the alternating independent work of the two welding head assemblies is controlled by external software, so that the size of a working platform is effectively reduced and the occupied area is reduced while the working efficiency is guaranteed;
the bottom of the first suction nozzle is provided with a frame-shaped concave structure, when a chip is sucked, the chip is contained in the frame-shaped concave structure, the chip is matched with the linear rotary actuator to rotate back and forth in the horizontal plane, the first suction nozzle and the sucked chip are driven to rotate back and forth in the horizontal plane, the adhesion degree between the chip and the material box is reduced through smaller stress, the chip is effectively assisted to be successfully picked up and lifted, and the completeness of the chip when the chip is picked up is guaranteed.
Drawings
Fig. 1 is a schematic structural diagram (embodiment one) of the present invention.
Fig. 2 is a schematic structural diagram (according to the first embodiment, another view angle) of the present invention.
Fig. 3 is a schematic structural diagram of the present invention (embodiment two).
Fig. 4 is a schematic structural diagram of a jig carrier and an opening and closing mechanism according to the present invention.
Fig. 5 is a partial enlarged view of a portion a in fig. 4.
Fig. 6 is a schematic view of the construction of the weld head assembly and the pre-stage of the present invention.
FIG. 7 is a schematic structural diagram of a first suction nozzle of the present invention.
Fig. 8 is a schematic diagram of another configuration of the preset platform of the present invention.
Wherein: 1. a working platform; 2. an X-axis linear guide rail I; 3. a jig carrying platform; 4. presetting a platform; 5. a second X-axis linear guide rail; 6. a material box carrying platform; 7. an opening and closing mechanism; 8. a welding head assembly; 9. a Y-axis linear guide; 10. a support; 11. an ion blower; 31. a jig base; 32. a jig box; 33. a housing groove group; 331. accommodating grooves; 332. briquetting; 333. a pin shaft; 41. a small straight line module; 42. a support; 43. a second camera; 44. a column; 45. a second light source; 46. a small platform; 461. a negative placement area; 462. an NG article placement area; 463. a transfer zone; 464. a through hole; 47. a steering lens barrel; 71. a moving module; 72. connecting plates; 73. an electric sliding table; 74. erecting a block; 75. a cylinder; 76. a pushing block; 77. lengthening blocks; 78. a pressure head; 731. a movable seat; 81. a supporting seat; 82. a first camera; 83. a side plate; 84. a vertical seat; 85. a linear plus rotary actuator; 86. a first light source; 87. a first suction nozzle; 88. a second suction nozzle; 871. a concave structure; 872. and (4) air holes.
Detailed Description
The following describes embodiments of the present invention with reference to the drawings.
As shown in fig. 1, the multifunctional intelligent transfer equipment of the embodiment includes a working platform 1, at least one station is arranged on the working platform 1, a single station includes a group of X-axis linear guide rails installed on the working platform 1, and a feeding area and a discharging area are movably arranged on the single group of X-axis linear guide rails; the working platform 1 is also provided with a Y-axis linear guide rail 9, and the Y-axis linear guide rail 9 crosses over the X-axis linear guide rail; welding head assemblies 8 with the number consistent with the number of the stations are movably mounted on the Y-axis linear guide rail 9, two suction nozzles are arranged below the single-group welding head assembly 8, one suction nozzle is used for feeding, and the other suction nozzle is used for discharging; the working platform 1 is also provided with a preset platform 4 corresponding to the welding head assembly 8.
The work of Y axis linear guide rail 9 and X axis linear guide rail is combined, the movement from the feeding area to the preset platform 4 and the movement from the preset platform 4 to the discharging area are respectively completed through the two suction nozzles, the automation of product transfer from the feeding area to the discharging area is realized, the double-station independent work is realized, the work efficiency is greatly improved, the transfer precision is ensured, and the respective feeding and discharging modes of the two suction nozzles are particularly suitable for the transfer under the condition of high viscosity between products and material boxes.
The single group of X-axis linear guide rails comprises a first X-axis linear guide rail 2 and a second X-axis linear guide rail 5, and a jig carrier 3 is movably mounted on the first X-axis linear guide rail 2 to form a blanking area; a material box carrying platform 6 is movably arranged on the X-axis linear guide rail II 5 to form a feeding area; the material box carrying platform 6 which faces the feeding area and the jig carrying platform 3 of the discharging area are also provided with an ion fan 11.
The first embodiment is as follows:
each station is independently provided with a feeding area and a blanking area, which are arranged in double stations as shown in fig. 1 and 2, and the double stations are completely independent and are respectively provided with the feeding area and the blanking area; the independent stations can be synchronously used for transferring different types of products.
Example two:
the adjacent stations share one feeding area, as shown in fig. 3, the two stations are arranged in a double-station mode, the same feeding area is shared between the two stations, and the two welding head assemblies 8 are controlled to alternately and independently work through external software, so that the working efficiency is guaranteed, the size of the working platform 1 is effectively reduced, and the occupied area is reduced.
A support 10 is arranged above the X-axis linear guide rail in a crossing mode, the bottom surface of the support 10 is fixedly installed with the working platform 1, and a Y-axis linear guide rail 9 is installed on the top surface of the support 10 along the length direction; the back of the bracket 10 is provided with an opening and closing mechanism 7 corresponding to the jig carrying platform 3;
as shown in fig. 4, the jig stage 3 has a structure including: the jig box structure comprises a jig seat 31 arranged on an X-axis linear guide rail I2, a jig box 32 is absorbed on the jig seat 31 under negative pressure, a plurality of accommodating groove groups 33 are arranged on the jig box 32 in an array manner, as shown in FIG. 5, a single group of accommodating groove group 33 comprises a plurality of accommodating grooves 331 which are arranged in parallel, and a pin shaft 333 is rotatably arranged at the end part of the single group of accommodating groove group 33; a pressing block 332 is correspondingly sleeved on the pin shaft 333 positioned at the end part of the single accommodating groove 331;
the opening and closing mechanism 7 presses the pressing block 332 to rotate around the pin 333 as a center of a circle, and then places the product in the accommodating groove 331.
The structure of the opening and closing mechanism 7 is as follows: the device comprises a moving module 71 fixedly mounted on the back of a support 10 along the length direction, wherein a moving seat 731 is movably mounted on the side surface of the moving module 71, an electric sliding table 73 is mounted on the side surface of the moving seat 731, a vertical block 74 is mounted on the side surface of the electric sliding table 73, and a connecting plate 72 is fixedly mounted at the bottom of the vertical block 74; the front end of the connecting plate 72 extends forwards and penetrates through the moving module 71, the front end of the bottom surface of the connecting plate 72 is fixedly provided with an air cylinder 75, the output end of the air cylinder 75 faces forwards and is provided with a pushing block 76 at the end, the front side surface of the pushing block 76 is provided with an extension block 77, the front end of the extension block 77 is provided with a pressure head 78, and the bottom end of the pressure head 78 acts on the pressing block 332 downwards.
The opening and closing mechanism 7 is matched with the jig box 32 for use, and the product can be conveniently placed in the accommodating groove 331 by pushing the pressing block 332 to swing through the opening and closing mechanism 7; the moving module 71 is used for moving the pressure head 78 in the Y-axis direction, the electric sliding table 73 is used for moving the pressure head 78 up and down, the electric sliding table 73 is driven by an external motor to work, and the air cylinder 75 is used for moving the pressure head 78 in the X-axis direction, so that the pressure head 78 can move in six directions, and the pressure head 78 is guaranteed to correspond to the accommodating groove 331.
As shown in fig. 6, the horn assembly 8 is structured as follows: the camera comprises a supporting seat 81 arranged on a Y-axis linear guide rail 9, a side plate 83 is arranged at the lower part of the front side surface of the supporting seat 81, a camera I82 with a downward lens is arranged in the middle of the front side surface of the side plate 83, and a light source I86 is arranged on the side plate 83 below the camera I82; the front side surfaces of the side plates 83 positioned at two sides of the first camera 82 are symmetrically provided with vertical seats 84, the front side surfaces of the single vertical seats 84 are respectively provided with a linear rotation actuator 85, the output ends of the linear rotation actuators 85 are all downward, and the end parts of the linear rotation actuators are provided with suction nozzles.
The two suction nozzles are respectively a suction nozzle I87 and a suction nozzle II 88, the suction nozzle I87 is used for feeding, and the suction nozzle II 88 is used for blanking;
as shown in fig. 7, a frame-shaped concave structure 871 is arranged in the middle of the bottom surface of the first suction nozzle 87, and an air hole 872 communicated with an external air source is formed in the bottom surface of the concave structure 871; the concave structure 871 of frame type is provided with to suction nozzle 87 bottom, and when absorbing the chip product, the chip holds inside the frame type, and the work of linear rotatory actuator 85 that adds drives suction nozzle 87 and the chip of absorption is at the horizontal plane small-angle back and forth rotation, makes the degree of adhesion between chip and the magazine reduce through less atress, and effective helping hand picks up and promotes in the smoothness of chip to the completeness when having guaranteed the chip and having picked up.
The structure of the preset platform 4 is as follows: the device comprises a small linear module 41 fixedly arranged on a working platform 1, wherein an upright post 44 is movably arranged on the small linear module 41, a small platform 46 is arranged at the top of the upright post 44, a through hole 464 which is communicated up and down is formed in the small platform 46, and the through hole 464 is positioned right above a second camera 43; an NG article placing area 462 is arranged on the small platform 46 positioned in front of the through hole 464, a transit area 463 is arranged on the small platform 46 positioned at the side edge of the through hole 464, and a negative film placing area 461 is arranged on the small platform 46 positioned at the through hole 464; and a second camera 43 is arranged on the working platform 1 right below the through hole 464.
As shown in fig. 6, a support 42 is installed on the working platform 1, a second camera 43 is vertically installed on the side surface of the support 42, a second light source 45 is installed on the side surface of the support 42 above the second camera 43, and a lens of the second camera 43 faces upward and is right opposite to the through hole 464 of the small platform 46 after penetrating through the second light source 45; namely, the second camera 43 is vertically placed;
or, as shown in fig. 8, the second camera 43 is horizontally installed on the working platform 1, the steering lens barrel 47 is installed in front of the lens of the second camera 43, the second light source 45 is installed above the top surface of the steering lens barrel 47, and the lens of the second camera 43 is steered by the steering lens barrel 47 and faces the through hole 464 of the small platform 46 after passing through the second light source 45; i.e. camera two 43 is placed horizontally.
The first camera 82 on the welding head assembly 8 is matched with the second X-axis linear guide rail 5 and the Y-axis linear guide rail 9 to move, so that the offset precision of the product in the X direction and the Y direction after the product is transferred is ensured; the second camera 43 below the preset platform 4 is used for detecting and selecting the appearance of the product and ensuring the deviation precision of the rotation angle of the product in the XY plane after the product is transferred; on the other hand, the first camera 82 and the second camera 43 can also be calibrated through an external negative film, that is, the first camera 82 and the second camera 43 can simultaneously align to the center of the cross cursor of the negative film on the negative film placing area 461 through self adjustment, so that the center alignment between the first camera 82 and the second camera 43 is realized, and the precision of chip transferring is further ensured.
In this embodiment, the linear plus rotary actuator 85 is a standard product available on the market, and the model of the linear plus rotary actuator is LCR20-025-7X-2FVSA3MOD 2188; the downward output end outputs the movement in the up-down direction and the rotation taking the up-down direction as the circle center.
The use method of the multifunctional intelligent transfer equipment comprises the following steps: stations work independently;
the method comprises the following steps: a material box is placed in the material box carrying platform 6, and a jig box 32 is placed on a jig base 31 of the jig carrying platform 3;
step two: the X-axis linear guide rail II 5 works to move a product to be taken in the material box towards the Y-axis linear guide rail 9; synchronously, the Y-axis linear guide rail 9 works, the welding head assembly 8 is moved to the position above the corresponding feeding position, so that a first camera 82 in the welding head assembly 8 faces downwards a lens to a product to be taken in the material box, and the first camera 82 takes pictures of the product for comparison;
step three: the first camera 82 is driven to move along the Y-axis direction by the work of the Y-axis linear guide rail 9, and the material box and the product inside the material box are driven to move along the X-axis direction by the work of the X-axis linear guide rail II 5 until the center of the first camera 82 coincides with the center of the product to be taken;
step four: the Y-axis linear guide rail 9 continues to work, so that the first suction nozzle 87 at the bottom of the welding head assembly 8 is positioned right above the product to be taken;
step five: the linear and rotary actuator 85 works to drive the first suction nozzle 87 to descend and cooperate with an external air source to suck the product through the air hole 872, and at the moment, the product is contained in the concave structure 871; the linear rotation actuator 85 works to drive the first suction nozzle 87 to drive the product to rotate in the horizontal plane, and the wall surface of the concave structure 871 applies force to the lateral force of the product, so that the adhesion degree between the product and the material box is reduced; the linear and rotary actuator 85 drives the suction nozzle I87 which sucks the product to move upwards, and the product is separated from the material box;
step six: the Y-axis linear guide rail 9 works, the welding head assembly 8 is moved to the position above the preset platform 4, and the first suction nozzle 87 is positioned right above the transfer area 463 of the preset platform 4; the linear rotation actuator 85 drives the first suction nozzle 87 to move downwards, and after the air hole 872 loses air and breaks negative pressure, a product at the bottom of the first suction nozzle 87 falls onto the transfer area 463;
step seven: the Y-axis linear guide rail 9 works, so that the second suction nozzle 88 is positioned above the transition area 463 of the preset platform 4, the linear rotating actuator 85 drives the second suction nozzle 88 to move downwards, and the second suction nozzle 88 sucks a product on the transition area 463 under the coordination of an external air source;
step eight: the Y-axis linear guide rail 9 works, so that the suction nozzle II 88 carries the product to move to the position of the through hole 464 above the camera II 43, the camera II 43 shoots the product through the through hole 464, and the angle information of the product in the horizontal plane is acquired; according to the acquired angle information, the linear rotation actuator 85 drives the second suction nozzle 88 and the carried product to rotate;
step nine: the second camera 43 synchronously judges the appearance of the product by photographing;
if the product is NG, the small linear module 41 works to enable the NG product placement area 462 on the small platform 46 to move to the position below the second suction nozzle 88, and after the second suction nozzle 88 loses air and breaks negative pressure, the product falls to the NG product placement area 462;
if the product is OK, the Y-axis linear guide rail 9 works, the welding head assembly 8 is moved to the position above the blanking position jig carrying platform 3, and the second suction nozzle 88 is positioned right above the accommodating groove 331 in the jig box 32;
step ten: the electric sliding table 73 works, the pressure head 78 is pushed to move downwards through the vertical block 74, the connecting plate 72, the pushing block 76 and the lengthening block 77, the pressure head 78 applies force downwards to the pressing block 332, the pressing block 332 rotates around the pin shaft 333, and the end part, close to the accommodating groove 331, of the pressing block 332 is screwed up; synchronously, the linear rotation actuator 85 drives the second suction nozzle 88 and the carried product to move downwards, the second suction nozzle 88 loses air, and the product at the bottom of the second suction nozzle 88 falls into the accommodating groove 331; the electric sliding table 73 works reversely, the pressure head 78 moves upwards to leave the pressing block 332, and the end head of the pressing block 332 moves downwards to be reset above the product in the accommodating groove 331; and completing the transfer of the product for one time.
The invention has compact structure and reasonable layout, greatly improves the working efficiency and ensures the transferring precision while realizing the transferring of the product, and has good practicability.
The above description is intended to be illustrative and not restrictive, and the scope of the invention is defined by the appended claims, which may be modified in any manner within the scope of the invention.
Claims (10)
1. The utility model provides a multi-functional intelligence moves equipment of carrying, includes work platform (1), its characterized in that: the working platform (1) is provided with at least one station, each station comprises a group of X-axis linear guide rails arranged on the working platform (1), and a feeding area and a discharging area are movably arranged on the single group of X-axis linear guide rails; the working platform (1) is also provided with a Y-axis linear guide rail (9), and the Y-axis linear guide rail (9) stretches across the upper part of the X-axis linear guide rail; welding head assemblies (8) with the number consistent with the number of stations are movably mounted on the Y-axis linear guide rail (9), two suction nozzles are arranged below the single-group welding head assembly (8), one suction nozzle is used for feeding, and the other suction nozzle is used for discharging; the working platform (1) is also provided with a preset platform (4) corresponding to the welding head assembly (8).
2. The multifunctional intelligent transfer equipment as claimed in claim 1, wherein: the single group of X-axis linear guide rails comprises a first X-axis linear guide rail (2) and a second X-axis linear guide rail (5), and a jig carrying platform (3) is movably mounted on the first X-axis linear guide rail (2) to form a blanking area; and a material box carrying platform (6) is movably arranged on the X-axis linear guide rail II (5) to form a feeding area.
3. The multifunctional intelligent transfer equipment as claimed in claim 2, wherein: the adjacent stations share one feeding area, or each station is independently provided with a feeding area and a discharging area.
4. The multifunctional intelligent transfer equipment as claimed in claim 2, wherein: a support (10) is arranged above the X-axis linear guide rail in a crossing mode, the bottom surface of the support (10) is fixedly installed with the working platform (1), and a Y-axis linear guide rail (9) is installed on the top surface of the support (10) along the length direction; the back of the support (10) is provided with an opening and closing mechanism (7) corresponding to the jig carrying platform (3);
the structure of the jig carrying platform (3) is as follows: the fixture comprises a fixture seat (31) arranged on a first X-axis linear guide rail (2), a fixture box (32) is adsorbed above the fixture seat (31) in a negative pressure mode, a plurality of groups of containing groove sets (33) are arranged on the fixture box (32) in an array mode, a single group of containing groove sets (33) comprises a plurality of containing grooves (331) which are arranged in parallel, and a pin shaft (333) is rotatably arranged at the end part of the single group of containing groove sets (33); a pressing block (332) is correspondingly sleeved on the pin shaft (333) positioned at the end part of the single accommodating groove (331);
the opening and closing mechanism (7) presses the pressing block (332) to enable the pressing block to rotate by taking the pin shaft (333) as a circle center, and then products are placed in the accommodating groove (331).
5. The multifunctional intelligent transfer equipment as claimed in claim 4, wherein: the structure of the opening and closing mechanism (7) is as follows: the device comprises a moving module (71) fixedly arranged on the back surface of a support (10) along the length direction, wherein a moving seat (731) is movably arranged on the side surface of the moving module (71), an electric sliding table (73) is arranged on the side surface of the moving seat (731), a vertical block (74) is arranged on the side surface of the electric sliding table (73), and a connecting plate (72) is fixedly arranged at the bottom of the vertical block (74); the front end of the connecting plate (72) extends forwards and penetrates through the moving module (71), the front end of the bottom surface of the connecting plate (72) is fixedly provided with an air cylinder (75), the output end of the air cylinder (75) faces forwards and is provided with a pushing block (76) at the end, the front side surface of the pushing block (76) is provided with an extension block (77), the front end of the extension block (77) is provided with a pressure head (78), and the bottom end of the pressure head (78) acts on the pressure block (332) downwards.
6. The multifunctional intelligent transfer equipment as claimed in claim 1, wherein: the welding head assembly (8) is structurally characterized in that: the camera comprises a supporting seat (81) arranged on a Y-axis linear guide rail (9), a side plate (83) is arranged at the lower part of the front side of the supporting seat (81), a camera I (82) with a downward lens is arranged in the middle of the front side of the side plate (83), and a light source I (86) is arranged on the side plate (83) below the camera I (82); the front side surfaces of the side plates (83) positioned at two sides of the first camera (82) are symmetrically provided with vertical seats (84), the front side surfaces of the single vertical seats (84) are respectively provided with a linear rotation actuator (85), the output end of the linear rotation actuator (85) faces downwards, and the end parts of the linear rotation actuators are respectively provided with a suction nozzle.
7. The multifunctional intelligent transfer equipment as claimed in claim 1 or 6, wherein: the two suction nozzles are respectively a suction nozzle I (87) and a suction nozzle II (88), the suction nozzle I (87) is used for feeding, and the suction nozzle II (88) is used for discharging;
the middle of the bottom surface of the first suction nozzle (87) is provided with a frame-shaped concave structure (871), and the bottom surface of the concave structure (871) is provided with an air hole (872) communicated with an external air source.
8. The multifunctional intelligent transfer equipment as claimed in claim 1, wherein: the structure of the preset platform (4) is as follows: the device comprises a small linear module (41) fixedly arranged on a working platform (1), wherein an upright post (44) is movably arranged on the small linear module (41), a small platform (46) is arranged at the top of the upright post (44), a through hole (464) which is through up and down is formed in the small platform (46), and the through hole (464) is positioned right above a second camera (43); an NG article placing area (462) is arranged on the small platform (46) positioned in front of the through hole (464), a transfer area (463) is arranged on the small platform (46) positioned at the side edge of the through hole (464), and a negative film placing area (461) is arranged on the small platform (46) positioned at the through hole (464); and a second camera (43) is arranged on the working platform (1) right below the through hole (464).
9. The multifunctional intelligent transfer equipment as claimed in claim 8, wherein: a support (42) is installed on the working platform (1), a second camera (43) is vertically installed on the side surface of the support (42), a second light source (45) is installed on the side surface of the support (42) above the second camera (43), and a lens of the second camera (43) faces upwards and is right opposite to a through hole (464) of the small platform (46) after penetrating through the second light source (45); or the second camera (43) is horizontally arranged on the working platform (1), the steering lens barrel (47) is arranged in front of the lens of the second camera (43), the second light source (45) is arranged above the top surface of the steering lens barrel (47), and the lens of the second camera (43) is steered through the steering lens barrel (47), penetrates through the second light source (45) and then faces the through hole (464) of the small platform (46).
10. The use method of the multifunctional intelligent transfer equipment of claim 1 is characterized in that: the method comprises the following steps: stations work independently;
the method comprises the following steps: a material box is placed in the material box carrying platform (6), and a jig box (32) is placed on a jig base (31) of the jig carrying platform (3);
step two: the X-axis linear guide rail II (5) works to move a product to be taken in the material box towards the direction of the Y-axis linear guide rail (9); synchronously, the Y-axis linear guide rail (9) works, the welding head assembly (8) is moved to the position above the corresponding loading position, so that a first camera (82) in the welding head assembly (8) faces downwards to a product to be taken in the material box, and the first camera (82) photographs the product for comparison;
step three: the camera I (82) is driven to move along the Y-axis direction by the work of the Y-axis linear guide rail (9), and the material box and the product inside the material box are driven to move along the X-axis direction by the work of the X-axis linear guide rail II (5) until the center of the camera I (82) is overlapped with the center of the product to be taken;
step four: the Y-axis linear guide rail (9) continues to work, so that a first suction nozzle (87) at the bottom of the welding head assembly (8) is positioned right above a product to be taken;
step five: the linear rotation actuator (85) works to drive the first suction nozzle (87) to move downwards and is matched with an external air source to suck the product through the air hole (872), and at the moment, the product is contained in the concave structure (871); the linear rotation actuator (85) works to drive the suction nozzle I (87) to drive the product to shake up and down and rotate in a horizontal plane, and the lateral force of the product is applied by the wall surface of the concave structure (871), so that the adhesion degree between the product and the material box is reduced; a linear and rotary actuator (85) drives a suction nozzle I (87) which sucks the product to move upwards, and the product is separated from the material box;
step six: the Y-axis linear guide rail (9) works, the welding head assembly (8) is moved to the position above the preset platform (4), and the first suction nozzle (87) is located right above a transfer area (463) of the preset platform (4); the linear rotation actuator (85) drives the first suction nozzle (87) to move downwards, the air holes (872) lose air, and products at the bottom of the first suction nozzle (87) fall onto the transfer area (463);
step seven: the Y-axis linear guide rail (9) works to enable the second suction nozzle (88) to be located above the transfer area (463) of the preset platform (4), the linear rotating actuator (85) drives the second suction nozzle (88) to move downwards, and the second suction nozzle (88) sucks a product on the transfer area (463) under the coordination of an external air source;
step eight: the Y-axis linear guide rail (9) works, so that the suction nozzle II (88) carries the product to move to the position above the camera II (43) at the through hole (464), the camera II (43) shoots the product through the through hole (464), and the angle information of the product in the horizontal plane is acquired; according to the acquired angle information, a linear rotation actuator (85) drives a second suction nozzle (88) and a carried product to rotate;
step nine: the second camera (43) synchronously judges the appearance quality of the product by photographing;
if the product is NG, the small linear module (41) works, so that an NG product placing area (462) on the small platform (46) moves to the position below a second suction nozzle (88), and the second suction nozzle (88) loses air so that the product falls to the NG product placing area (462);
if the product is OK, the Y-axis linear guide rail (9) works, the welding head assembly (8) is moved to the position above the blanking position jig carrying platform (3), and the second suction nozzle (88) is positioned right above the accommodating groove (331) in the jig box (32);
step ten: the electric sliding table (73) works, the pressure head (78) is pushed to move downwards through the vertical block (74), the connecting plate (72), the pushing block (76) and the lengthening block (77), the pressure head (78) applies force downwards to the pressure block (332), so that the pressure block (332) rotates by taking the pin shaft (333) as a circle center, and the end part of the pressure block (332), which is close to the accommodating groove (331), is screwed up; synchronously, the linear rotating actuator (85) drives the second suction nozzle (88) and the carried product to move downwards, the second suction nozzle (88) loses air, and the product at the bottom of the second suction nozzle (88) falls into the accommodating groove (331); the electric sliding table (73) works reversely, the pressure head (78) moves upwards to leave the pressing block (332), and the end head of the pressing block (332) moves downwards to be reset to the position above the product in the accommodating groove (331); and completing the transfer of the product for one time.
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CN114082663A (en) * | 2022-01-18 | 2022-02-25 | 四川明泰电子科技有限公司 | Integrated chip tube body and pin detection system |
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Cited By (1)
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CN114082663A (en) * | 2022-01-18 | 2022-02-25 | 四川明泰电子科技有限公司 | Integrated chip tube body and pin detection system |
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