CN111830646A - Optical fiber coupling packaging structure, coupling packaging method and coupling array - Google Patents

Optical fiber coupling packaging structure, coupling packaging method and coupling array Download PDF

Info

Publication number
CN111830646A
CN111830646A CN202010396201.3A CN202010396201A CN111830646A CN 111830646 A CN111830646 A CN 111830646A CN 202010396201 A CN202010396201 A CN 202010396201A CN 111830646 A CN111830646 A CN 111830646A
Authority
CN
China
Prior art keywords
optical fiber
coupling
optical
fiber
transparent adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010396201.3A
Other languages
Chinese (zh)
Inventor
杜江兵
李康林
何祖源
杨学成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Jiaotong University
Original Assignee
Shanghai Jiaotong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Jiaotong University filed Critical Shanghai Jiaotong University
Priority to CN202010396201.3A priority Critical patent/CN111830646A/en
Publication of CN111830646A publication Critical patent/CN111830646A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4212Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element being a coupling medium interposed therebetween, e.g. epoxy resin, refractive index matching material, index grease, matching liquid or gel
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/262Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4206Optical features
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4251Sealed packages

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

The invention discloses an optical fiber coupling packaging structure, which relates to the field of optical communication and solves the problems of high requirement, high difficulty, high cost and low efficiency of the existing optical fiber coupling packaging, and the technical scheme is characterized by comprising an optical fiber, an optical device for coupling and a transparent adhesive for connection coupling, wherein the optical fiber comprises an output end which is arranged on the end face of a fiber core in a concave curved surface manner, and the transparent adhesive is solidified and filled between the concave curved surface and the end face of the optical device; the refractive index of the transparent adhesive is higher than that of the optical fiber core, and the optical fiber coupling packaging structure is high in coupling efficiency, low in cost, high in coupling tolerance, capable of simplifying the steps of coupling packaging, low in packaging cost and high in packaging efficiency.

Description

Optical fiber coupling packaging structure, coupling packaging method and coupling array
Technical Field
The present invention relates to the field of optical communications, and in particular, to an optical fiber coupling and packaging structure, a coupling and packaging method, and a coupling array.
Background
Silicon photonics has emerged as a carrier for information communication technology, medical and sensing applications over the past decade. The implementation of photonic integrated circuits requires not only the development of single silicon optical components, but also the implementation of integrated silicon photonic platforms interfacing with the outside world via optical and electronic signals. "photonic packaging" encompasses the technologies required to support the optical and electronic interfaces of photonic integrated circuits, including fiber coupling, laser source integration, wire bonding, and flip chip integration for efficient high speed signaling.
The major challenge in coupling from a telecommunications fiber to a silicon-on-insulator waveguide is the large mismatch between the mode sizes of the two systems. The optical mode field diameter of a single mode fiber in the 1550nm band is about 10 μm, while the cross-sectional dimension of the corresponding silicon-on-insulator waveguide is typically only 220 × 450 nm. This large difference in optical mode field size necessarily results in large coupling losses, so special structures are required to achieve efficient matching from fiber to waveguide.
A fiber lens, also called a fiber microlens or a lensed fiber, is shaped into a lens at the end face of the fiber, which functions as a light path change or mode conversion in the fiber or optical system. The main forms of the fiber lens are wedge, taper, inclined plane and spherical lens, and the current methods for manufacturing the fiber lens mainly comprise an etching method, a fusion drawing method and a grinding and polishing method: the optical fiber lens processed by the melt-drawing method only has a conical lens, and is single; the grinding and polishing method requires a special high-precision grinder to precisely grind the end face of the optical fiber, however, since pressure is required to be applied to the optical fiber during grinding, the optical fiber is easily deformed, and the prepared optical fiber lens has uncertain deviation and asymmetry. Etching is a simple and inexpensive method of obtaining a concave or convex fiber-optic endface by chemical etching while still allowing high speed optical signal transmission.
The prior optical fiber coupling package generally uses low-refractive index resin for curing package after coupling, and for a more precise device, a conical optical fiber lens is basically metalized firstly to prevent light scattering side leakage and facilitate the fixation during packaging, and then is welded to the front end of an optical device to be coupled. The coupling packaging mode needs to accurately control the distance from the end face of the optical fiber to the optical device, the coupling tolerance is only 1-2 microns, and the coupling packaging mode has the defects of high packaging cost, high packaging difficulty, single packaging mode and the like. With the increasing growth of high-density optical interface technology, there is a higher and higher coupling precision requirement for high-density optical fiber arrays, and how to implement high-efficiency low-cost coupling packaging of high-density optical fiber arrays also becomes a problem to be solved.
Therefore, it is highly desirable to invent a new optical fiber coupling package method, which not only reduces the huge cost of the coupling package, but also reduces the difficulty of the coupling package, simplifies the steps of the coupling package, and improves the coupling tolerance, and is suitable for high-density optical fiber array package.
Disclosure of Invention
The invention aims to provide an optical fiber coupling packaging structure which is high in coupling efficiency, low in cost, improved in coupling tolerance, simplified in coupling packaging steps, reduced in packaging cost and improved in packaging efficiency.
The technical purpose of the invention is realized by the following technical scheme:
an optical fiber coupling packaging structure comprises an optical fiber, wherein the optical fiber comprises an output end, an optical device for coupling and a transparent adhesive for connection coupling, wherein the output end is arranged on the end face of a fiber core in a concave curved surface manner; the refractive index of the transparent adhesive is higher than that of the optical fiber core.
Preferably, the transparent adhesive is filled in the concave curved surface of the optical fiber core and covers the end surface of the optical device.
Preferably, the transparent adhesive is filled in the concave curved surface of the optical fiber core, and an arc convex lens which aligns with the end surface of the optical device for coupling is formed at the output end of the optical fiber through surface tension.
Preferably, the transparent adhesive is photosensitive glue, and the refractive index of the photosensitive glue is 1.55-1.65.
Preferably, the transparent adhesive is thermosetting epoxy resin.
An optical fiber coupling packaging method comprises the following steps:
carrying out corrosion treatment on the output end of the optical fiber to form a concave curved surface on the end surface of the fiber core;
placing an optical fiber with a fiber core provided with a concave curved surface and an optical device to be coupled on a substrate;
aligning the output end of the optical fiber with the end face of the optical device, and dipping the transparent adhesive on the output end of the optical fiber;
and adjusting and determining the coupling distance, and curing the transparent adhesive to complete the coupling packaging.
Preferably, the etching treatment of the fiber core specifically comprises the following steps:
peeling off the coating layer at one end of the output end of the optical fiber;
vertically immersing the fiber core wrapped by the cladding in hydrofluoric acid solution, and controlling the corrosion operation temperature and the corrosion duration to finish corrosion treatment;
and cleaning the fiber core of the optical fiber after the corrosion by ultrasonic and plasma water.
Preferably, the specific requirements of the corrosion treatment are: the concentration of hydrofluoric acid is 90-100%, the operation temperature is 25-28 ℃, and the corrosion time is 10-20 minutes.
An optical fiber coupling array comprises a plurality of optical fibers which are arranged, wherein the end faces of fiber cores of the optical fibers are all corroded to form concave curved surfaces and are dipped with transparent adhesives for being solidified and coupled to optical devices; a plurality of optical fibers are arranged to form any one of a circle, a strip or a polygon; the optical fiber fixing device further comprises a fixing piece for fixing the arranged optical fibers.
Preferably, the fixing piece is a V-shaped groove or a thermoplastic sleeve.
In conclusion, the invention has the following beneficial effects:
through the arrangement of forming the concave curved surface by the three-core corrosion, light rays can be converged by matching with the transparent adhesive with the refractive index higher than that of the fiber core, and high-efficiency optical coupling from the large-spot-size optical fiber to the small-spot-size optical device is realized;
the packaging method has the advantages of simple operation steps, low cost and higher tolerance to coupling offset (horizontal, vertical and angle offset), thereby reducing the packaging difficulty, meeting the coupling with different types of small-size devices and facilitating the assembly of optical elements;
the optical fiber array can be assembled to carry out coupling packaging by matching the corrosion of a plurality of optical fibers with the transparent adhesive, and can be widely applied to a high-density integrated optical interconnection system.
Drawings
FIG. 1 is a schematic view of the corrosion treatment of an optical fiber according to the present invention;
FIG. 2 is a schematic diagram of the structure of the fiber after the fiber core has been etched;
FIG. 3 is a diagram showing the simulation result of the light field when a single optical fiber is wrapped by a photosensitive adhesive with high refractive index;
FIG. 4 is a first schematic diagram of an example of a few-mode fiber end-face to single-mode optical waveguide;
FIG. 5 is a second exemplary schematic view of a few-mode fiber end-face to single-mode optical waveguide;
FIG. 6 is a third exemplary schematic of a multimode fiber endface to VCSEL device;
FIG. 7 is a schematic structural diagram of a long-stripe fiber array;
FIG. 8 is a schematic structural diagram of a circular optical fiber array;
FIG. 9 is a schematic structural diagram of a polygonal optical fiber array.
In the figure: 1. a fiber core; 2. a cladding layer; 3. a coating layer; 4. a hydrofluoric acid solution; 5. a concave curved surface; 6. transparent adhesive; 7. a single mode optical waveguide; 8. a substrate; 9. a VCSEL; 10. and a fixing member.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
According to one or more embodiments, an optical fiber coupling package structure is disclosed, as shown in fig. 1 and fig. 2, including an optical fiber and an optical device for coupling, and further including a transparent adhesive 6 disposed between an output end of the optical fiber and an end surface of the optical device for coupling.
As shown in fig. 3 and 4, the optical fiber includes a fiber core 1, a cladding 2 and a coating layer 3, the optical fiber has an input end and an output end, the input end is a normal optical fiber end face, and the output end is an etched optical fiber end face with a concave curved surface 5. The concave curved surface 5 formed by etching is controlled according to the concentration of the etching solution, the etching time and the temperature of the etching operation so as to obtain the concave curved surface 5 with the required specification. As shown in fig. 5, a light field simulation result diagram of a single optical fiber is obtained when a high refractive index photosensitive adhesive is coated outside the single optical fiber after corrosion treatment.
The optical fiber is a common commercial germanium-doped graded-index optical fiber, the fiber core 1 is a germanium material-doped total internal reflection silica optical fiber with an undoped cladding 2, and can be a single-mode optical fiber, a few-mode optical fiber and a multimode optical fiber. The few-mode graded optical fiber core 1 is doped with germanium, the diameters of the few-mode graded optical fiber core 1 are dozens of microns, the cladding 2 is pure silica, the refractive index of the cladding 2 with the diameter of 125 microns is gradually increased from the cladding 2 to the core 1, the refractive index of the cladding 2 in the 1550 waveband is 1.444, and the highest refractive index of the core 1 is 1.454. The core 1 of a standard multimode optical fiber has a diameter of 50 μm or 62.5 μm and the cladding 2 has a diameter of 125 μm.
Transparent gluing agent 6 is filled at the output of fibre core 1, and fills sunken curved surface 5 fully, and the refracting index of transparent gluing agent 6 is higher than the setting of fibre core 1 for sunken curved surface 5 of fibre core 1 terminal surface and transparent gluing agent 6 form the lens that the light that gets into in transparent gluing agent 6 through fibre core 1 carries out the refraction and assembles, have reduced the effective diameter of facula. The transparent adhesive 6 is photosensitive adhesive, the refractive index of the photosensitive adhesive is 1.55-1.65, and the photosensitive adhesive with higher refractive index can be customized according to the requirement. The thermosetting epoxy resin can be selected according to the use requirement for filling connection.
The photosensitive glue is commercially available and can be in a liquid state, a semi-liquid state, a partial liquid state, a colloid state, a semi-colloid state or a partial colloid state, and the photosensitive glue can be cured through ultraviolet irradiation.
The optical device is any one of an optical waveguide coupled to the optical fiber, a VCSEL 9(Vertical-Cavity Surface-Emitting Laser), a PD (Photo Detector), and the like.
The optical fiber coupling packaging structure comprises two types, one of which is:
as shown in fig. 3, the concave curved surface 5 of the fiber core 1 is filled with the transparent adhesive 6 on one side of the optical fiber, the end surface of the optical device is covered on one side of the optical device, the outgoing light is refracted by the transparent adhesive 6 and then directly coupled with the optical device, the coupling distance is 80-100 micrometers, and the coupling and packaging are completed after the transparent adhesive 6 is cured.
The other is as follows:
as shown in fig. 4, the concave curved surface 5 of the fiber core 1 is filled with the transparent adhesive 6 on one side of the optical fiber, a convex curved surface is formed on the end surface of one side of the optical device due to the surface tension of the transparent adhesive 6, a convex lens of the curved surface aligned with the end surface of the optical device is formed, the coupling distance is controlled to complete the coupling, and the coupling distance is 10-20 micrometers.
For clarity of illustration, the optical device is illustrated in fig. 3 and 4 using a single-mode optical waveguide 7.
According to one or more embodiments, an optical fiber coupling packaging method is disclosed, which comprises the following steps:
as shown in fig. 1 and 2, the output end of the optical fiber is etched to form a concave curved surface 5 on the end surface of the fiber core 1;
placing the optical fiber with the fiber core 1 provided with the concave curved surface 5 and an optical device to be coupled on a substrate 8;
aligning the output end of the optical fiber with the end face of the optical device, and dipping the transparent adhesive 6 at the output end of the optical fiber;
and adjusting and determining the coupling distance, and curing the transparent adhesive 6 to complete the coupling packaging.
The corrosion treatment of the optical fiber core 1 specifically comprises the following operations:
peeling off the coating layer 3 at one end of the output end of the optical fiber, and cutting the end face neatly and cleanly by using a cutting knife;
vertically immersing the fiber core 1 wrapped by the cladding 2 in a hydrofluoric acid solution 4, and controlling the corrosion operation temperature and the corrosion duration to finish corrosion treatment;
and cleaning the fiber core 1 after the corrosion is finished.
Wherein, the concentration of hydrofluoric acid in the corrosive liquid for corrosion treatment is 90-100%, the operating temperature is 25-28 ℃, the corrosion time is 10-20 minutes, and the water fiber core 1 is generally cleaned by ultrasound and plasma. The concentration of hydrofluoric acid is selected to be 90%, the etching time is 15 minutes, and the etching temperature is set to be 25 ℃.
When the transparent adhesive 6 wrapped between the optical fiber and the optical device is filled without a gap, the following steps are also performed:
and placing the corroded optical fiber and the optical device on a pure silicon substrate 8, adjusting and controlling the coupling distance, determining the end face position of the fiber core 1 and the position of the optical device, and then carrying out dispensing and curing of the transparent adhesive 6 to complete coupling packaging, wherein the coupling distance is controlled to be 80-100 micrometers.
The optical fiber cleaning treatment after the corrosion treatment specifically comprises the following steps: sequentially soaking in alkaline water, clear water and alcohol, and cleaning the fiber end face microcavity by using ultrasonic and plasma water to prevent residual liquid from continuing to react. The operation method is simple, the cost is low, the coupling tolerance is large, and different coupling modes can be selected according to different use conditions.
As shown in fig. 6, when the coupled optical device is a VCSEL9, a protruding curved surface is formed at the output end of the optical fiber, and a curved convex lens is formed after curing, so as to align with the VCSEL9 for coupling.
Chemical etching is a simple and inexpensive method to manufacture concave or convex fiber tips and still allows high speed light transmission. Chemical etching of the fiber tip is by immersing the fiber tip in hydrofluoric acid (HF). By controlling the time, temperature and agitation, a concave or sharpened fiber tip can be formed.
The presence and composition of the dopant affects the dissolution of fused silica in hydrogen fluoride. In the optical fiber of the germanium-doped core and the silicon cladding layer 2, the etching speed of the germanium core is faster than that of the silicon-based cladding layer 2. The bond energies of the germanium atom and the oxygen atom in a germanium-oxygen radical (Ge-O) and the bond energies of the oxygen atom (Si-O) in a silicon-oxygen radical are 662kJ/mol and 799kJ/mol, respectively. That is, when reacting with HF solution simultaneously, the energy required for germano-oxygen radical separation is smaller and easier to react with HF. By this principle, the graded index fiber is soaked in the HF solution for a period of time, and the reaction rates of different regions of the fiber core 1 are different due to the different germanium concentrations of the fiber core 1, so that a regular concave curved surface 5 is formed, as described in Tafulo et al, "fabrics-P characteristics based on chemical engineering for high temperature and strain measurement," Optics Communications 285.6(2012):1159 and 1162 "and Tuck et al," Low cost optical fiber based fabrics-Perstrain sensor production "measurement and Technology 17.8(2006):2206 and 2212.
According to one or more embodiments, an optical fiber coupling array is disclosed, as shown in fig. 7-9, which includes a plurality of arranged optical fibers, wherein the optical fibers are selected from the optical fibers with the above structure, the end surfaces of the fiber cores 1 at the output end are etched to form a concave curved surface 5, and a transparent adhesive 6 for curing and coupling to an optical device is dipped. The optical fiber array comprises a plurality of optical fibers, a fixing piece 10 and a plurality of optical fiber fixing pieces, wherein the plurality of optical fibers can be arranged to form any one of a circle, a strip or a polygon to be coupled with a corresponding optical device, the fixing piece 10 is used for fixing the optical fiber array, and the fixing piece 10 is a V-shaped groove or a thermoplastic sleeve. The number of the optical fibers can be 8, 10, 12, 16, 24 and the like, and the optical fibers are used for coupling and packaging optical devices or optical fiber arrays in a multichannel parallel optical interconnection system. The optical fiber array is coupled by fixing the optical fiber array by the fixing member 10, and then the optical fiber array and the optical device array can be coupled by the method of the above embodiment. The concave curved surface 5 arranged on the fiber core 1 realizes low-loss optical coupling from a large-size spot fiber to a small-size spot optical device/fiber, improves the efficiency and yield of optical fiber coupling, can simultaneously meet the coupling with different types of small-size devices, can also realize large-scale and high-density optical fiber array coupling packaging, and can be widely applied to on-chip high-density integrated optical interconnection systems.
The present embodiment is only for explaining the present invention, and it is not limited to the present invention, and those skilled in the art can make modifications of the present embodiment without inventive contribution as needed after reading the present specification, but all of them are protected by patent law within the scope of the claims of the present invention.

Claims (10)

1. An optical fiber coupling packaging structure comprises an optical fiber, and is characterized in that: the optical fiber comprises an output end, an optical device for coupling and a transparent adhesive for connection coupling, wherein the output end is arranged on the end face of the fiber core in a concave curved surface manner; the refractive index of the transparent adhesive is higher than that of the optical fiber core.
2. The fiber coupling package according to claim 1, wherein: the transparent adhesive is filled in the concave curved surface of the optical fiber core and covers the end face of the optical device.
3. The fiber coupling package according to claim 1, wherein: the transparent adhesive is filled in the concave curved surface of the fiber core of the optical fiber, and an arc convex lens which is aligned with the end surface of the optical device and is used for coupling is formed at the output end of the optical fiber through surface tension.
4. The fiber coupling package according to any one of claims 2 or 3, wherein: the transparent adhesive is photosensitive glue, and the refractive index of the photosensitive glue is 1.55-1.65.
5. The fiber coupling package according to any one of claims 2 or 3, wherein: the transparent adhesive is thermosetting epoxy resin.
6. An optical fiber coupling packaging method is characterized by comprising the following steps:
carrying out corrosion treatment on the output end of the optical fiber to form a concave curved surface on the end surface of the fiber core;
placing an optical fiber with a fiber core provided with a concave curved surface and an optical device to be coupled on a substrate;
aligning the output end of the optical fiber with the end face of the optical device, and dipping the transparent adhesive on the output end of the optical fiber;
and adjusting and determining the coupling distance, and curing the transparent adhesive to complete the coupling packaging.
7. The optical fiber coupling and packaging method according to claim 6, wherein the etching process of the optical fiber core specifically comprises the steps of:
peeling off the coating layer at one end of the output end of the optical fiber;
vertically immersing the fiber core wrapped by the cladding in hydrofluoric acid solution, and controlling the corrosion operation temperature and the corrosion duration to finish corrosion treatment;
and cleaning the fiber core of the optical fiber after the corrosion by ultrasonic and plasma water.
8. The fiber coupling package according to claim 7, wherein: the specific requirements of the corrosion treatment are as follows: the concentration of hydrofluoric acid is 90-100%, the operation temperature is 25-28 ℃, and the corrosion time is 10-20 minutes.
9. An optical fiber coupling array, characterized by: the optical fiber comprises a plurality of arrayed optical fibers, wherein the end faces of fiber cores of the optical fibers are all corroded to form concave curved surfaces and are dipped with transparent adhesives for being solidified and coupled to an optical device; a plurality of optical fibers are arranged to form any one of a circle, a strip or a polygon; the optical fiber fixing device further comprises a fixing piece for fixing the arranged optical fibers.
10. The fiber coupling array of claim 9, wherein: the fixing piece is a V-shaped groove or a thermoplastic sleeve.
CN202010396201.3A 2020-05-12 2020-05-12 Optical fiber coupling packaging structure, coupling packaging method and coupling array Pending CN111830646A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010396201.3A CN111830646A (en) 2020-05-12 2020-05-12 Optical fiber coupling packaging structure, coupling packaging method and coupling array

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010396201.3A CN111830646A (en) 2020-05-12 2020-05-12 Optical fiber coupling packaging structure, coupling packaging method and coupling array

Publications (1)

Publication Number Publication Date
CN111830646A true CN111830646A (en) 2020-10-27

Family

ID=72913452

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010396201.3A Pending CN111830646A (en) 2020-05-12 2020-05-12 Optical fiber coupling packaging structure, coupling packaging method and coupling array

Country Status (1)

Country Link
CN (1) CN111830646A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113835170A (en) * 2021-11-26 2021-12-24 长芯盛(武汉)科技有限公司 Injection molding packaging method of photoelectric module and photoelectric module thereof
CN114442228A (en) * 2022-01-21 2022-05-06 苏州安捷讯光电科技股份有限公司 Manufacturing process of connector end surface optical fiber recess

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1665083A (en) * 2004-03-05 2005-09-07 中国科学院半导体研究所 Mode-locking optical fibre grating outer cavity semiconductor laser structure
CN102944918A (en) * 2012-11-10 2013-02-27 华中科技大学 Faraday rotation mirror structure
CN104677283A (en) * 2015-03-05 2015-06-03 哈尔滨工业大学 Manufacturing method of four-core fiber Bragg grating micro-scale measuring probe based on self-assembly principle
CN106159672A (en) * 2016-08-30 2016-11-23 中国科学院半导体研究所 Based on the narrow line wide cavity laser structure that optical fiber lens and grating are integrated
CN106199835A (en) * 2016-07-20 2016-12-07 京东方科技集团股份有限公司 A kind of optical fiber lens manufacture method and optical fiber lens
CN107219591A (en) * 2017-06-17 2017-09-29 西安盛佳光电有限公司 Optical fiber lens coupler and preparation method thereof

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1665083A (en) * 2004-03-05 2005-09-07 中国科学院半导体研究所 Mode-locking optical fibre grating outer cavity semiconductor laser structure
CN102944918A (en) * 2012-11-10 2013-02-27 华中科技大学 Faraday rotation mirror structure
CN104677283A (en) * 2015-03-05 2015-06-03 哈尔滨工业大学 Manufacturing method of four-core fiber Bragg grating micro-scale measuring probe based on self-assembly principle
CN106199835A (en) * 2016-07-20 2016-12-07 京东方科技集团股份有限公司 A kind of optical fiber lens manufacture method and optical fiber lens
CN106159672A (en) * 2016-08-30 2016-11-23 中国科学院半导体研究所 Based on the narrow line wide cavity laser structure that optical fiber lens and grating are integrated
CN107219591A (en) * 2017-06-17 2017-09-29 西安盛佳光电有限公司 Optical fiber lens coupler and preparation method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113835170A (en) * 2021-11-26 2021-12-24 长芯盛(武汉)科技有限公司 Injection molding packaging method of photoelectric module and photoelectric module thereof
CN113835170B (en) * 2021-11-26 2022-03-29 长芯盛(武汉)科技有限公司 Injection molding packaging method of photoelectric module and photoelectric module thereof
CN114442228A (en) * 2022-01-21 2022-05-06 苏州安捷讯光电科技股份有限公司 Manufacturing process of connector end surface optical fiber recess
CN114442228B (en) * 2022-01-21 2024-05-17 苏州安捷讯光电科技股份有限公司 Connector end face optical fiber dent manufacturing process

Similar Documents

Publication Publication Date Title
CN210072134U (en) Semiconductor device and electronic system
US4269648A (en) Method for mounting microsphere coupling lenses on optical fibers
US7269317B2 (en) Optical assemblies for free-space optical propagation between waveguide(s) and/or fiber(s)
US5566262A (en) Optical fiber array and a method of producing the same
USRE40416E1 (en) Multilayer optical fiber coupler
JP3984009B2 (en) Manufacturing method of optical waveguide device
WO2010108399A1 (en) Laterally coupled optical fiber component and processing method thereof
JPWO2012121318A1 (en) Optical connector, alignment method of multi-core fiber and bundle structure, fiber array conversion member
JP3863144B2 (en) Manufacturing method of optical coupling element, optical coupling element, optical coupling element assembly, and lens coupling type optical fiber using optical coupling element
JPH1172649A (en) Manual optical fiber aligning device and method therefor
CN111830646A (en) Optical fiber coupling packaging structure, coupling packaging method and coupling array
CN111158090A (en) 45-degree optical fiber array with small optical fiber diameter and operation method thereof
CN210666088U (en) Silicon optical mode spot mode converter
CN103676017A (en) Method for producing optical connector and optical connector
CN113341502A (en) Multi-core fiber coupler based on three-dimensional waveguide and preparation method
US7645076B2 (en) Coupling structure for optical fibres and process for making it
WO2018139214A1 (en) Optical coupling device and method for producing same
CN111650700A (en) Optical chip interface packaging structure and method
CN215297760U (en) Plane multichannel single-fiber bidirectional device based on COB technology
JP5190400B2 (en) Optical fiber with lens and manufacturing method thereof
US6775436B1 (en) Optical fiber U-turn apparatus and method
CN217112794U (en) Optical probe of photoelectronic integrated circuit
US11953737B2 (en) Systems and methods for coupling light
CN210954419U (en) Capillary and chip coupling device
CN210222292U (en) Optical waveguide mode spot converter

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20201027