CN111829496A - Detection device and MEMS gyroscope - Google Patents
Detection device and MEMS gyroscope Download PDFInfo
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- CN111829496A CN111829496A CN202010643727.7A CN202010643727A CN111829496A CN 111829496 A CN111829496 A CN 111829496A CN 202010643727 A CN202010643727 A CN 202010643727A CN 111829496 A CN111829496 A CN 111829496A
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- 238000001514 detection method Methods 0.000 title claims abstract description 74
- 239000011521 glass Substances 0.000 claims abstract description 50
- 239000003990 capacitor Substances 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 230000002093 peripheral effect Effects 0.000 claims description 17
- 238000007789 sealing Methods 0.000 claims description 10
- 230000033001 locomotion Effects 0.000 description 18
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
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Abstract
The application discloses a detection device and an MEMS gyroscope, and relates to the technical field of micro-electro-mechanical systems. The detection device of the present application is fixed on a glass substrate, comprising: the first electrode block and the first mass block are connected through capacitors, the second electrode block and the second mass block are the same in structure, and the first mass block and the second mass block are symmetrical and symmetrically arranged between the fixed anchor points; the first mass block, the second mass block and the fixed anchor point are connected through a supporting beam, the first electrode block, the second electrode block and the fixed anchor point are all bonded with the glass substrate, and the first mass block and the second mass block are suspended above the glass substrate. The technical scheme of this application has improved the quality factor Q of gyroscope, has realized the mechanical decoupling of drive with the detection, has reduced noise signal, has improved the SNR of gyroscope.
Description
Technical Field
The application relates to the field of micro-electromechanical systems, in particular to a detection device and an MEMS gyroscope.
Background
With the development of complex methods for fabricating Micro-structures, devices based on Micro-Electro-Mechanical systems (MEMS) technology have been widely used. MEMS gyroscopes, as one of them, play an important role in navigation, localization and tracking.
Gyroscopes are rotation sensitive devices that can be used to detect rotation. The core measuring structure of the current micro-electromechanical gyroscope is a detection mass block. The proof mass is movable in drive and sense directions, the two directions being orthogonal in the plane of the proof mass. In operation, the proof mass vibrates at a resonant frequency along the drive direction. When there is angular velocity in the normal direction of the plane, the proof mass will move in the sense direction. The angular velocity can be calculated from the motion characteristics of the proof mass in the detection direction.
The measured angular velocity is characterized by the coriolis signal, causing motion of the proof mass. The motion of the mass block is influenced by the quality factor Q, the quality factor Q of the existing gyroscope is low, and the Coriolis signal of the measured angle is poor.
In addition, the signal output by the MEMS gyroscope includes a mechanical coupling signal, an electrical coupling signal, and a force coupling signal, in addition to the coriolis signal. The mechanical coupling signal, the electrical coupling signal and the force coupling signal are considered noise signals. When the mass block driving signal and the detection motion signal are coupled together, the signal-to-noise ratio of the gyroscope is low, a large number of decoupling algorithms are needed to process noise signals, and the time consumed for acquiring the Coriolis signals is long.
Disclosure of Invention
The application aims to provide a detection device and an MEMS gyroscope, and the detection device and the MEMS gyroscope are used for solving the technical problem that the Coriolis signal inside the gyroscope is poor in the prior art.
In order to achieve the purpose, the detection device adopts the following technical scheme: a detection device fixed on the glass substrate, the detection device comprising: the first electrode block and the first mass block are connected through capacitors, and the second electrode block and the second mass block are identical in structure; the first mass block and the second mass block are symmetrical in structure and are symmetrically arranged between the fixed anchor points; the first mass block, the second mass block and the fixed anchor point are connected through a supporting beam, the first electrode block, the second electrode block and the fixed anchor point are all bonded with the glass substrate, and the first mass block and the second mass block are suspended above the glass substrate.
Preferably, the fixed anchor points comprise peripheral anchor points, middle anchor points and inner anchor points, the first mass block and the second mass block are connected through the middle anchor points and a first elastic supporting beam in the supporting beam, and the first mass block and the second mass block are symmetrically arranged on two sides of the middle anchor points and the first elastic supporting beam; the first mass block and the second mass block are connected with the peripheral anchor point through a second elastic support beam in the support beams on the opposite sides connected with the middle anchor point and the first elastic support beam respectively; the internal anchor points are positioned inside the first mass block and the second mass block and connected with the first mass block and the second mass block through a first rigid supporting beam and a third elastic supporting beam in the supporting beams. .
Furthermore, the middle anchor point is a T-shaped middle anchor point, the transverse ends of the first mass block and the second mass block and the T-shaped middle anchor point are connected through a second rigid supporting beam in the supporting beam, and the vertical ends of the first mass block and the second mass block and the T-shaped middle anchor point are connected through a fourth elastic supporting beam in the supporting beam.
Preferably, the first electrode block and the second electrode block respectively comprise two first driving electrodes, two first driving feedback electrodes and two first detection electrodes, the first mass block and the second mass block are connected with two adjacent sides of the peripheral anchor point, one first driving electrode and one first driving feedback electrode are respectively placed on each side, the first driving electrodes and the first driving feedback electrodes of the two electrode blocks are symmetrically arranged on two sides of the middle anchor point and the first elastic supporting beam, and the first driving electrodes, the first driving feedback electrodes and the first detection electrodes are connected with the first mass block and the second mass block through capacitors.
Furthermore, the first mass block and the second mass block respectively comprise a first outer vibration frame, a first middle vibration frame and a first inner vibration frame, the first outer vibration frame is respectively connected with the first driving electrode and the first driving feedback electrode through capacitors, the connecting side of the first outer vibration frame and the capacitors is connected with the first middle vibration frame through fifth elastic supporting beams in the supporting beams, the connecting side and the opposite side of the first outer vibration frame and the peripheral anchor points are respectively connected with the first middle vibration frame through third rigid supporting beams in the supporting beams, the connecting side of the first middle vibration frame and the fifth elastic supporting beams in the supporting beams is connected with the first inner vibration frame through fourth rigid supporting beams in the supporting beams, the connecting side of the first middle vibration frame and the third rigid supporting beams is connected with the first inner vibration frame through sixth elastic supporting beams in the supporting beams, the connecting side of the first inner vibration frame and the fourth rigid supporting beam is connected with an inner anchor point through a third elastic supporting beam, and the two adjacent sides of the connecting side of the inner anchor point and the third elastic supporting beam are respectively connected with the first inner vibration frame through the first rigid supporting beam; two first detection electrodes are symmetrically arranged inside the first inner vibration frame, and the first detection electrodes are connected with the first inner vibration frame through capacitors.
Furthermore, the first outer vibration frame, the first middle vibration frame and the first inner vibration frame are all rectangular, central axes of the first outer vibration frame, the first middle vibration frame and the first inner vibration frame are overlapped, and the frames are symmetrical along the central axis.
Preferably, the first mass block and the second mass block are in a same-frequency and opposite-phase working mode in a driving state and a detection state, and the first detection electrode realizes differential detection.
Wherein, the capacitor is an interdigital capacitor.
The detection device adopts a double-mass-block symmetrical structure, realizes mechanical decoupling of driving and detection, reduces noise signals, and improves the linearity and signal-to-noise ratio of output signals of the gyroscope.
The present application further provides a MEMS gyroscope, comprising: the detection device comprises a glass substrate, a detection device and a glass cover plate, wherein the detection device is the detection device; a through hole is formed in the glass substrate from bottom to top, a first lead passes through the through hole and then is sealed, and the first lead is electrically connected with a first electrode block and a second electrode block of the detection device; the glass cover plate is hollow, the glass cover plate and the glass substrate are bonded to form a first sealing cavity, and the first sealing cavity covers the detection device.
Preferably, the length and width of the bonding surface of the glass substrate and the glass cover plate are the same.
According to the MEMS gyroscope, on one hand, the detection device is coated in the first sealing cavity, the working environment tightness of the detection device is guaranteed, and the quality factor Q of the gyroscope is improved; on the other hand, the double-mass-block symmetrical structure is adopted, so that mechanical decoupling of driving and detection is realized, noise signals are reduced, and the signal-to-noise ratio of the gyroscope is improved.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a detection device of the present application;
FIG. 2 is a schematic structural diagram of a capacitor according to the present application;
FIG. 3 is a schematic structural diagram of a MEMS gyroscope of the present application;
fig. 4 is a left side cross-sectional view of a MEMS gyroscope of the present application.
Description of reference numerals:
1-a detection device; 2-a glass substrate; 3-a glass cover plate;
4-a first sealed cavity; 11-a first electrode block; 12-a second electrode block;
13 — a first mass; 14-a second mass; 15-anchor point;
16-a support beam; 21-a through hole; 22 — first lead;
111 — a first drive electrode; 112 — a first drive feedback electrode; 113 — a first detection electrode;
131-a first outer vibrating frame; 132 — a first intermediate vibrating frame; 133-a first inner vibrating frame;
151-peripheral anchor point; 152-intermediate anchor point; 153-internal anchor point;
161-a first resilient support beam; 162-a second resilient support beam; 163-a third resilient support beam;
164-a fourth resilient support beam; 165-fifth flexible support beam; 166 — sixth resilient support beam;
171-a first rigid support beam; 172-a second rigid support beam; 173-a third rigid support beam;
174-fourth rigid support beam.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some, but not all, embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Example one
The embodiment of the present application provides a detection device, fixes on the glass substrate, and fig. 1 is the structure schematic diagram of the detection device of the present application, as shown in fig. 1, detection device 1 includes: the structure of the electrode structure comprises a first electrode block 11, a second electrode block 12, a first mass block 13, a second mass block 14 and a fixed anchor point 15, wherein the first electrode block 11 is connected with the first mass block 13 through a capacitor, and the second electrode block 12 is connected with the second mass block 14 through a capacitor, and the first electrode block 11 and the second electrode block 12 are identical in structure; the first mass block 13 and the second mass block 14 are symmetrical in structure and are symmetrically arranged between the fixed anchor points 15; the first mass block 13, the second mass block 14 and the fixing anchor point 15 are connected through a support beam 16, the first electrode block 11, the second electrode block 12 and the fixing anchor point 15 are all bonded with the glass substrate, and the first mass block 13 and the second mass block 14 are suspended above the glass substrate.
The detection device adopts a double-mass-block symmetrical structure, realizes mechanical decoupling of driving and detection, reduces noise signals, and improves the linearity and signal-to-noise ratio of output signals of the gyroscope.
As shown in fig. 1, the fixed anchor point 15 includes a peripheral anchor point 151, a middle anchor point 152 and an inner anchor point 153, the first mass 13 and the second mass 14 are connected through the middle anchor point 152 and a first elastic support beam 161 of the support beam 16, and the first mass 13 and the second mass 14 are symmetrically arranged on two sides of the middle anchor point 152 and the first elastic support beam 161; the first mass 13 and the second mass 14 are connected, on opposite sides of the connection with the intermediate anchor point 152 and the first elastic support beam 161, respectively with the peripheral anchor point 151 by means of a second elastic support beam 162 in the support beam 16; the internal anchor point 153 is located inside the first mass 13 and the second mass 14, and is connected to the first mass 13 and the second mass 14 through the first rigid support beam 171 and the third elastic support beam 163 in the support beam 16.
Illustratively, the number of peripheral anchor points 151 is 4, each placed on the opposite side of the two masses (two for each mass (first mass 13 or second mass 14)) to which the intermediate anchor point 152 is connected; the number of the middle anchor points 152 is 2, and the middle anchor points are located between two mass blocks, the number of the inner anchor points 153 is 4, and two inner anchor points are located in each mass block. It should be noted that the number of the peripheral anchor points 151, the intermediate anchor points 152, and the inner anchor points 153 may also be 2N, where N is greater than or equal to 1, and may also be increased or decreased correspondingly by changing the number according to the use requirement. The number of support beams in each mass block that need to be connected to the fixed anchor points 15 corresponds to the number of anchor points one to one.
Correspondingly, the number of the first elastic support beams 161 is 2, and the first mass block 13 and the second mass block 14 are directly connected; the second flexible support beams 162 are 4 in number and are connected to four peripheral anchor points 151 on opposite sides of each mass to the intermediate anchor point 152.
Preferably, the intermediate anchor point 152 is a T-shaped intermediate anchor point, the transverse ends of the first and second masses 13 and 14 and the T-shaped intermediate anchor point are connected by the second rigid support beam 172 in the support beam 16, and the vertical ends of the first and second masses 13 and 14 and the T-shaped intermediate anchor point are connected by the fourth elastic support beam 164 in the support beam 16.
The first electrode block 11 and the second electrode block 12 each include two first driving electrodes 111, two first driving feedback electrodes 112 and two first detecting electrodes 113, the adjacent two sides of the first mass block 13 and the second mass block 14 connected to the peripheral anchor point 151 are respectively provided with one first driving electrode 111 and one first driving feedback electrode 112 on each side, the first driving electrodes 111 and the first driving feedback electrodes 112 of the two electrode blocks are symmetrically arranged on the two sides of the middle anchor point 152 and the first elastic support beam 161, and the first driving electrodes 111, the first driving feedback electrodes 112 and the first detecting electrodes 113 are connected to the first mass block 13 and the second mass block 14 through capacitors.
Specifically, the first mass 13 and the second mass 14 have the same structure, the first mass 13 and the second mass 14 each include a first outer vibration frame 131, a first middle vibration frame 132, and a first inner vibration frame 133, the first outer vibration frame 131 is connected to the first drive electrode 111 and the first drive feedback electrode 112 through a capacitor, the connection side of the first outer vibration frame 131 to the capacitor is connected to the first middle vibration frame 132 through a fifth elastic support beam 165 in the support beam 16, the connection side and the opposite side of the first outer vibration frame 131 to the peripheral anchor point 151 are connected to the first middle vibration frame 132 through a third rigid support beam 173 in the support beam 16, the connection side of the first middle vibration frame 132 to the fifth elastic support beam 165 in the support beam 16 is connected to the first inner vibration frame 133 through a fourth rigid support beam 174 in the support beam 16, the connection side of the first intermediate vibration frame 132 and the third rigid support beam 173 is connected to the first inner vibration frame 133 through the sixth elastic support beam 166 in the support beam 16, the connection side of the first inner vibration frame 133 and the fourth rigid support beam 174 is connected to the inner anchor point 153 through the third elastic support beam 163, and the adjacent two sides of the connection side of the inner anchor point 153 and the third elastic support beam 163 are respectively connected to the first inner vibration frame 133 through the first rigid support beam 171; the two first detection electrodes 113 are symmetrically disposed inside the first inner vibration frame 133, and the first detection electrodes 113 are connected to the first inner vibration frame 133 through capacitors.
Preferably, the capacitor in the present application is an interdigital capacitor. Fig. 2 is a schematic structural diagram of a capacitor of the present application. As shown in fig. 2, it is a schematic structural diagram of the capacitors connected between the first outer vibration frame 131 and the first inner vibration frame 133 and corresponding to the first driving electrode 111, the first driving feedback electrode 112 and the first detecting electrode 113, respectively, an a end of each capacitor is connected to the first driving electrode 111, the first driving feedback electrode 112 and the first detecting electrode 113, respectively, and a B end of each capacitor is connected to the first outer vibration frame 131 and the first inner vibration frame 133, respectively.
It is to be explained that in the present application (in fig. 1), the in-plane symmetry axis direction of the structure of the first mass 13 and the second mass 14 is defined as the Y (detection) direction, i.e. is symmetrical about an axis in the plane of the structure of the first mass 13 and the second mass 14, the symmetry axis direction being the Y (detection) direction; the other direction perpendicular to the axis of symmetry (Y direction) in the plane of the structure of the first mass 13 and the second mass 14 is the X (drive) direction; the out-of-plane normal direction of the first mass 13 and the second mass 14 on the same plane is the Z direction, that is, the out-of-plane normal direction of fig. 1 is the Z direction, that is, the direction perpendicular to X, Y is the Z direction at the same time, and the direction X, Y, Z conforms to the right-hand rule of space vectors.
Wherein, the side edge of the first outer vibration frame 131 of each mass block along the X direction is connected with the transverse end of the T-shaped middle anchor point through the second rigid support beam 172 in the support beam 16, and the side edge of the first outer vibration frame 131 of each mass block along the Y direction is connected with the vertical end of the T-shaped middle anchor point through the fourth elastic support beam 164 in the support beam 16. The number of the second rigid support beams 172 is 4, each mass block is connected with the transverse end of the T-shaped middle anchor point through 2 second rigid support beams 172, one on one side of the side edge of the first outer vibration frame 131 in the X direction; the number of the fourth elastic support beams 164 is 4, each mass block is connected to the vertical end of the T-shaped intermediate anchor point through 2 fourth elastic support beams 164, and 2 mass blocks are provided on one side of the shaft side of the first outer vibration frame 131 connected to the T-shaped intermediate anchor point along the Y direction.
By connecting the first outer vibrating frame 131 of the mass with the T-shaped intermediate anchor point, the movement of the first outer vibrating frame 131 in the Y (detection) direction is suppressed, ensuring that the first outer vibrating frame 131 only moves in the X (horizontal/driving) direction.
Exemplarily, in each mass (the first mass 13 or the second mass 14), the number of the fifth elastic support beams 165 is 2, and the first outer vibration frame 131 and the first intermediate vibration frame 132 are connected at both sides of the first outer vibration frame 131 and the first intermediate vibration frame 132, one on each side; the number of the third rigid support beams 173 is 4, and two on each side are connected to the first intermediate vibration frame 132 at the side where the first outer vibration frame 131 is connected to the peripheral anchor 151 and the opposite side, respectively; the number of the fourth rigid support beams 174 is 4, and two on each side are connected to the first inner vibration frame 133 at the side where the first intermediate vibration frame 132 is connected to the fifth elastic support beam 165 among the support beams 16; the number of the sixth elastic support beams 166 is 2, and 1 on each side is connected to the first inner vibration frame 133 at the side where the first intermediate vibration frame 132 is connected to the third rigid support beam 173; the number of the third elastic support beams 163 is 2, and 1 on each side is connected to the inner anchor point 153 on the side where the first inner vibration frame 133 is connected to the fourth rigid support beam 174; the number of the first rigid support beams 171 is 4, and 2 on each side are connected to the first inner vibration frame 133 at both sides adjacent to the side where the inner anchor point 153 is connected to the third elastic support beam 163.
It should be noted that the first outer vibration frame 131, the first middle vibration frame 132, and the first inner vibration frame 133 are all rectangular (including square), central axes of the first outer vibration frame 131, the first middle vibration frame 132, and the first inner vibration frame 133 are overlapped, and each frame is symmetrical along the central axis.
In one embodiment, the respective electrodes of the first electrode block 11 and the second electrode block 12 are symmetrical in the direction of the symmetry axis of the mass block except for the first outer vibration frame 131, the first intermediate vibration frame 132, and the first inner vibration frame 133.
It should be noted that the two first outer vibration frames 131 are directly connected by the first elastic support beam 161, the first outer vibration frame 131 is connected to the peripheral anchor point 151 by the second elastic support beam 162, and the first outer vibration frame 131 is connected to the intermediate anchor point 152 by the second rigid support beam 172 and the fourth elastic support beam 164, so that the movement of the first outer vibration frame 131 in the Y direction is limited, and the first outer vibration frame 131 can move only in the X direction. The first inner vibrating frame 133 is connected to the inner anchor 153 by the first rigid support beam 171 and the third elastic support beam 163 so that the first inner vibrating frame 133 can move only in the Y direction. Since the first intermediate vibration frame 132 has the third rigid support beam 173 with the first outer vibration frame 131 and the fourth rigid support beam 174 with the first inner vibration frame 133, the first intermediate vibration frame 132 maintains the same movement in the X direction as the first outer vibration frame 131 and also maintains the same movement in the Y direction as the first inner vibration frame 133.
In the working state, an alternating current signal is input to the first driving electrode 111, and the frequency is the driving mode frequency of the MEMS gyroscope. The input signal forms the synovium electrostatic force of the same frequency through the capacitor. Taking the first mass block 13 as an example, since the side edge of the first outer vibration frame 131 in the X direction and the T-shaped middle anchor point are connected to the middle anchor point 152 through the second rigid beam, the squeeze film component of the driving signal is suppressed, so that the first outer vibration frame 131 makes a resonant motion in the X direction. Due to the rigid constrained connection of the third rigid support beam 173, the first intermediate vibration frame 132 and the first outer vibration frame 131 make the same simple harmonic motion in the X-direction.
When there is no angular velocity input in the Z direction, since the first inner vibrating frame 133 does not vibrate, the capacitance between the first detecting electrode 113 and the first inner vibrating frame 133 does not change, i.e., the output is 0. When an angular velocity is input in the Z direction, i.e., in the detection state, the first outer vibration frame 131 and the first intermediate vibration frame 132 moving in the X direction generate coriolis force in the Y direction, which causes the first intermediate vibration frame 132 and the first inner vibration frame 133 to vibrate in a simple harmonic manner in the Y direction. At this time, the capacitance between the first sensing electrode 113 and the first inner vibrating frame 133 generates a synovial output. The magnitude and phase of the coriolis force are detected by the synovial output signal of the capacitance detected by the first detection electrode 113, and the magnitude and direction of the angular velocity are derived.
The synovial output signals of the capacitors reflect only the unidirectional movement of the corresponding vibrating frame, thus greatly reducing the kinematic coupling between the driving and detecting frames.
It should be noted that the first elastic support beam 161 directly connects the first mass 13 and the second mass 14, so that the first mass 13 and the second mass 14 can be coupled with each other in the driving direction to form a vibration system, which is beneficial to reduce common mode interference and noise, and is more beneficial to the design of the subsequent circuit.
The sixth elastic support beam 166 between the first inner vibration frame 133 and the first middle vibration frame 132 realizes the motion decoupling in the horizontal direction between the first inner vibration frame 133 and the first middle vibration frame 132 when the first middle vibration frame 132 moves in the horizontal direction along with the first outer vibration frame 131, and ensures that the first inner vibration frame 133 does not move in the horizontal direction, thereby ensuring the accuracy of the detected coriolis force magnitude and phase, and improving the accuracy of the angular rate magnitude and direction.
Preferably, the first mass block 13 and the second mass block 14 are in a same-frequency and opposite-phase working mode in the driving state and the detection state, and the detection device 1 realizes differential detection.
Further, in terms of driving mode, the first mass 13 inputs a driving signal from the first driving electrode 111, so that the first outer vibration frame 131 and the first intermediate vibration frame 132 perform a resonant motion in a driving direction (horizontal X direction in fig. 1). The driving electrodes of the second mass 14 input driving signals, which are the same as the driving signals of the first driving electrodes 111 except for being in anti-phase with the driving signals. Thus, the first mass 13 and the second mass 14 generate electrostatic forces of equal opposite phase and identical frequency under respective driving signals. The first mass block 13 and the second mass block 14 are symmetrical, and the resonant frequencies of the first mass block 13 and the second mass block 14 in the horizontal direction are equal in the working state. In the driving mode, the first mass 13 and the second mass 14 generate motion forms with equal amplitude and opposite phase.
In the detection mode, in the case of an angular velocity input, a constant amplitude anti-phase motion form is also generated in the detection direction, i.e., the Y direction, due to the coriolis effect. Therefore, common-mode interference and noise are well inhibited, and the linearity and the signal-to-noise ratio of the output signal of the gyroscope are improved. Meanwhile, the two first detection electrodes 113 of the first mass block 13 and the second mass block 14 adopt a differential output mode, so that the output signal amplitude is larger, and the signal-to-noise ratio is higher.
Example two
The embodiment of the present application further provides a MEMS gyroscope, fig. 3 is a schematic structural diagram of the MEMS gyroscope of the present application, and as shown in fig. 3, the MEMS gyroscope of the present application includes a glass substrate 2 and a glass cover plate 3. Fig. 4 is a left side cross-sectional view of the MEMS gyroscope of the present application, and as shown in fig. 4, the MEMS gyroscope of the present application further includes a detection device 1 according to the first embodiment, a through hole 21 is formed in the glass substrate 2 from bottom to top, after a first lead 22 passes through the through hole 21, the through hole 21 is sealed, and the first lead 22 is electrically connected to the detection device 1; the glass cover plate 3 is hollow, the glass cover plate 3 and the glass substrate 2 are bonded to form a first sealed cavity 4, and the detection device 1 is covered in the first sealed cavity 4.
The lead of each electrode in each electrode block in the detection device 1 is electrically connected to the first lead 22.
It should be noted that the getter may be adhered to the inner side of the glass cover plate 3, and the getter may also be sputtered inside the glass cover plate 3 by sputtering, so that the motion environments of the two mass blocks of the detection device 1 in the MEMS gyroscope are maintained in a high vacuum environment, the quality factor of the gyroscope is further improved, and the signal-to-noise ratio is further improved.
Specifically, after the first lead 22 passes through the through-hole 21, the through-hole 21 is sealed. The sealing process for the through-hole 21 is well known in the art, such as sealing with a sealant or sealing with an auxiliary device, and will not be described in detail herein.
It should be noted that the first sealed cavity 4 formed by bonding the glass cover plate 3 and the glass substrate 2 can accommodate the detection device 1; in a preferred mode, the length and the width of the bonding surface of the glass substrate 2 and the glass cover plate 3 are the same, and in another preferred mode, the length and the width of the bonding surface of the glass cover plate 3 are smaller than those of the glass substrate 2 and are the same; in another preferred mode, the width dimension of the bonding surface of the glass cover plate 3 is smaller than that of the glass substrate 2, and the length dimension is the same; in a further preferred mode, the glass cover plate 3 has a bonding surface with a length dimension and a width dimension smaller than those of the glass substrate 2.
The bonding between the glass cover plate 3 and the glass substrate 2 adopts a Wafer Level Packaging (WLP) Packaging process, and has high reliability and good sealing performance.
According to the MEMS gyroscope, on one hand, the detection device 1 is wrapped in the first sealing cavity 4, so that the working environment of the detection device 1 is ensured to be airtight, and the quality factor Q of the gyroscope is improved; on the other hand, the double-mass-block symmetrical structure of the driving and detecting motion decoupling structure is adopted, mechanical decoupling of driving and detecting is achieved, noise signals are reduced, the signal-to-noise ratio of the gyroscope is improved, time consumed for obtaining the Coriolis signal is short, and the angular speed can be calculated more quickly according to the motion characteristics of the detection direction.
The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present application, and shall be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. A sensing device affixed to a glass substrate, comprising: the first electrode block and the first mass block are connected through capacitors, and the second electrode block and the second mass block are identical in structure; the first mass block and the second mass block are symmetrical in structure and are symmetrically arranged between the fixed anchor points; the first mass block, the second mass block and the fixed anchor point are connected through a supporting beam, the first electrode block, the second electrode block and the fixed anchor point are all bonded with the glass substrate, and the first mass block and the second mass block are suspended above the glass substrate.
2. The sensing device of claim 1, wherein the anchor points comprise peripheral anchor points, intermediate anchor points, and inner anchor points, the first mass and the second mass are connected by the intermediate anchor points and a first flexible support beam of the support beams, the first mass and the second mass are symmetrically disposed on opposite sides of the intermediate anchor points and the first flexible support beam; the first mass block and the second mass block are connected with the peripheral anchor point through a second elastic support beam in the support beams on the opposite sides connected with the middle anchor point and the first elastic support beam respectively; the internal anchor points are positioned inside the first mass block and the second mass block and are connected with the first mass block and the second mass block respectively through a first rigid supporting beam and a third elastic supporting beam in the supporting beams.
3. The sensing device of claim 2, wherein the intermediate anchor point is a T-shaped intermediate anchor point, the lateral ends of the first mass, the second mass and the T-shaped intermediate anchor point are connected by a second rigid support beam in the support beam, and the vertical ends of the first mass, the second mass and the T-shaped intermediate anchor point are connected by a fourth flexible support beam in the support beam.
4. The sensing device of claim 2, wherein the first electrode block and the second electrode block each comprise two first driving electrodes, two first driving feedback electrodes and two first sensing electrodes, the first mass block and the second mass block are connected to adjacent two sides of the peripheral anchor point, one first driving electrode and one first driving feedback electrode are disposed on each side, the first driving electrodes and the first driving feedback electrodes of the two electrode blocks are symmetrically disposed on two sides of the central anchor point and the first elastic support beam, and the first driving electrodes, the first driving feedback electrodes and the first sensing electrodes are connected to the first mass block and the second mass block through capacitors.
5. The detection device according to claim 4, wherein the first mass block and the second mass block each include a first outer vibration frame, a first intermediate vibration frame, and a first inner vibration frame, the first outer vibration frame being connected to the first drive electrode and the first drive feedback electrode, respectively, through a capacitor, a connection side of the first outer vibration frame to the capacitor being connected to the first intermediate vibration frame through a fifth elastic support beam among the support beams, a connection side and an opposite side of the first outer vibration frame to the peripheral anchor point being connected to the first intermediate vibration frame through a third rigid support beam among the support beams, respectively, a connection side of the first intermediate vibration frame to the fifth elastic support beam among the support beams being connected to the first inner vibration frame through a fourth rigid support beam among the support beams, a connection side of the first intermediate vibration frame to the third rigid support beam being connected to the first inner vibration frame through a sixth elastic support beam among the support beams, the connecting side of the first inner vibration frame and the fourth rigid supporting beam is connected with an inner anchor point through a third elastic supporting beam, and the two adjacent sides of the connecting side of the inner anchor point and the third elastic supporting beam are respectively connected with the first inner vibration frame through the first rigid supporting beam; two first detection electrodes are symmetrically arranged inside the first inner vibration frame, and the first detection electrodes are connected with the first inner vibration frame through capacitors.
6. The sensing device of claim 5, wherein the first outer vibrating frame, the first intermediate vibrating frame, and the first inner vibrating frame are all rectangular, and wherein the central axes of the first outer vibrating frame, the first intermediate vibrating frame, and the first inner vibrating frame coincide, and wherein each frame is symmetrical about the central axis.
7. The detection device of claim 5, wherein the first mass block and the second mass block are in a same-frequency and opposite-phase working mode in the driving state and the detection state, and the first detection electrode realizes differential detection.
8. The sensing device of claim 1, wherein the capacitor is an interdigital capacitor.
9. A MEMS gyroscope, comprising: a glass substrate, a detection device and a glass cover plate, wherein the detection device is the detection device as claimed in any one of claims 1 to 8; a through hole is formed in the glass substrate from bottom to top, a first lead passes through the through hole and then is sealed, and the first lead is electrically connected with a first electrode block and a second electrode block of the detection device; the glass cover plate is hollow, the glass cover plate and the glass substrate are bonded to form a first sealing cavity, and the first sealing cavity covers the detection device.
10. The MEMS gyroscope of claim 9, wherein the glass substrate has the same length and width dimensions as the bonding surface of the glass cover.
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| CN202010643727.7A CN111829496A (en) | 2020-07-07 | 2020-07-07 | Detection device and MEMS gyroscope |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102435185A (en) * | 2011-09-01 | 2012-05-02 | 中国航空工业第六一八研究所 | Internal and external truss type three-frame micro-mechanical gyro structure |
| CN102759636A (en) * | 2012-05-31 | 2012-10-31 | 北京时代民芯科技有限公司 | Capacitive micro-electromechanical system (MEMS) accelerometer and manufacturing method thereof |
| CN102778586A (en) * | 2012-08-13 | 2012-11-14 | 中国科学院上海微***与信息技术研究所 | Differential capacitive micro-acceleration transducer and manufacturing method thereof |
| CN107063222A (en) * | 2017-04-17 | 2017-08-18 | 东南大学 | The double quality silicon micromechanical gyroscopes of three frame-types of direct rate-adaptive pacemaker |
| CN107063223A (en) * | 2017-04-17 | 2017-08-18 | 东南大学 | One chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement |
| CN109668550A (en) * | 2019-02-28 | 2019-04-23 | 东北大学 | A kind of Three Degree Of Freedom micromechanical gyro of full decoupling |
| CN109737943A (en) * | 2019-03-12 | 2019-05-10 | 苏州感测通信息科技有限公司 | High-precision MEMS gyroscope |
| CN212843622U (en) * | 2020-07-07 | 2021-03-30 | 北京坦达联轩控制技术有限公司 | Detection device and MEMS gyroscope |
-
2020
- 2020-07-07 CN CN202010643727.7A patent/CN111829496A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102435185A (en) * | 2011-09-01 | 2012-05-02 | 中国航空工业第六一八研究所 | Internal and external truss type three-frame micro-mechanical gyro structure |
| CN102759636A (en) * | 2012-05-31 | 2012-10-31 | 北京时代民芯科技有限公司 | Capacitive micro-electromechanical system (MEMS) accelerometer and manufacturing method thereof |
| CN102778586A (en) * | 2012-08-13 | 2012-11-14 | 中国科学院上海微***与信息技术研究所 | Differential capacitive micro-acceleration transducer and manufacturing method thereof |
| CN107063222A (en) * | 2017-04-17 | 2017-08-18 | 东南大学 | The double quality silicon micromechanical gyroscopes of three frame-types of direct rate-adaptive pacemaker |
| CN107063223A (en) * | 2017-04-17 | 2017-08-18 | 东南大学 | One chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement |
| CN109668550A (en) * | 2019-02-28 | 2019-04-23 | 东北大学 | A kind of Three Degree Of Freedom micromechanical gyro of full decoupling |
| CN109737943A (en) * | 2019-03-12 | 2019-05-10 | 苏州感测通信息科技有限公司 | High-precision MEMS gyroscope |
| CN212843622U (en) * | 2020-07-07 | 2021-03-30 | 北京坦达联轩控制技术有限公司 | Detection device and MEMS gyroscope |
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