CN111816532A - Replaceable filament assembly for hot cathode arc discharge ion source - Google Patents
Replaceable filament assembly for hot cathode arc discharge ion source Download PDFInfo
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- CN111816532A CN111816532A CN202010693465.5A CN202010693465A CN111816532A CN 111816532 A CN111816532 A CN 111816532A CN 202010693465 A CN202010693465 A CN 202010693465A CN 111816532 A CN111816532 A CN 111816532A
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- China
- Prior art keywords
- filament
- ceramic tube
- ion source
- replaceable
- copper rod
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
- H01J1/22—Heaters
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/04—Ion guns
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- Electron Sources, Ion Sources (AREA)
Abstract
The invention relates to the technical field of hot cathode arc discharge ion sources, in particular to a replaceable filament assembly for a hot cathode arc discharge ion source. The invention comprises a feed connection copper rod, a ceramic tube, a mounting flange, a metal protection tube, a shielding ceramic tube, a filament mounting terminal and a filament; the mounting flange is provided with two feed through holes, the two sides of each feed through hole are fixedly connected with a ceramic tube and a metal protection tube respectively, the front end of a feed connecting copper rod penetrates through the centers of the ceramic tube and the metal protection tube to enter a vacuum environment, the part of the feed connecting copper rod, which penetrates out of the feed through holes, is sleeved with a shielding ceramic tube, the front end of the feed connecting copper rod is connected with a filament mounting terminal, and a filament is connected to the two filament mounting terminals. The invention can ensure that the filament of the ion source can be quickly replaced, and is convenient to maintain and repair.
Description
Technical Field
The invention relates to the technical field of hot cathode arc discharge ion sources, in particular to a replaceable filament assembly for a hot cathode arc discharge ion source.
Background
On hot cathode arc discharge ion sources, the plasma is generated by impact ionization of space electrons. In order to make the space have enough free electrons, the cathode needs to be heated to about 3000K to realize the thermal emission of electrons, so the cathode of the hot cathode arc discharge ion source usually uses a filament made of tungsten material. The tungsten filament needs to be fed with a large current to maintain heating, the current is usually 100-120A, but at the same time, the tungsten filament is used as a cathode for arc discharge, and both the positive and negative ends of the filament need to be insulated from the discharge chamber. The ion source is internally vacuum in a working state, and the filament meets the requirement of vacuum sealing while feeding a large current.
In a traditional technical scheme, a filament is installed on an ion source, a ceramic insulating tube of the filament needs to be brazed to the ion source body through kovar alloy, and a feed terminal is brazed to the ceramic insulating tube through kovar alloy, so that the insulating requirement and the vacuum sealing requirement are met. However, such a solution causes problems of difficult maintenance and difficult repair in use.
During ion source operation, if filament damage occurs, for example: a filament is required to be replaced with a new one due to a filament burning-out phenomenon caused by an excessive filament current or a filament meltdown phenomenon caused by a partial arc discharge. Because the feed terminals are soldered to the ion source, they cannot be removed and the ion source can only be turned on to facilitate replacement of the filament with a new one. During the replacement process, the associated crane and sling need to be prepared to disassemble the ion source, and the ion source needs to be exposed to the atmosphere for a long time, resulting in a long installation process time, and a long time is needed for vacuum pumping to an operating state after installation.
In the operation process of the ion source, accidental collision is inevitable, so that the Kovar brazing part is damaged or the ceramic is damaged, the damage of any position causes the damage of the vacuum environment, and the ion source cannot operate. The ion source is required to be disassembled when the damaged part is repaired or the ceramic is replaced, and the ion source is integrally placed into the brazing furnace for re-welding. The process takes longer time, has higher technical difficulty and can not ensure the success of one-time repair. After the repair is finished, vacuum leak detection work is needed, and the ion source needs to be vacuumized for a long time when being restored to the working state again.
The invention provides a replaceable filament assembly for a hot cathode arc discharge ion source, which solves the problems.
Disclosure of Invention
The purpose of the invention is: aiming at the problems of installation of a filament and a kovar part, maintenance of the filament and maintenance of the kovar part in the prior art, the invention provides the replaceable filament assembly for the hot cathode arc discharge ion source, which ensures that the filament can be quickly replaced for the ion source and is convenient to maintain and repair.
The technical scheme adopted by the invention is as follows:
a replaceable filament assembly for a hot cathode arc discharge ion source comprises a feed connection copper rod, a ceramic tube, a mounting flange, a metal protection tube, a shielding ceramic tube, a filament mounting terminal and a filament; the mounting flange is provided with two feed through holes, the two sides of each feed through hole are fixedly connected with a ceramic tube and a metal protection tube respectively, the front end of a feed connecting copper rod penetrates through the centers of the ceramic tube and the metal protection tube to enter a vacuum environment, the part of the feed connecting copper rod, which penetrates out of the feed through holes, is sleeved with a shielding ceramic tube, the front end of the feed connecting copper rod is connected with a filament mounting terminal, and a filament is connected to the two filament mounting terminals.
The feed connection copper rod is a smooth rod, and the rear end of the feed connection copper rod is connected with an external power supply cable.
The feed connection copper rod is connected with the ceramic tube through kovar alloy welding, and vacuum sealing after the feed connection copper rod enters the ceramic tube is guaranteed.
The ceramic rod and the mounting flange are welded and fixed through kovar alloy, and vacuum sealing is achieved.
The shielding ceramic tube forms a dielectric layer between the feed connection copper rod and the mounting flange, so that instantaneous short circuit caused by low-pressure gas breakdown in a vacuum environment is avoided.
The metal protection tube protects the shielding ceramic tube and realizes the positioning of the shielding ceramic tube.
And a filament mounting hole is reserved on the filament mounting terminal, and the filament is mounted in the filament mounting hole.
A flange sealing groove is reserved on the mounting flange, an O-shaped ring is installed on the flange sealing groove, and flange screw holes are formed in four corners of the mounting flange and are installed on the ion source through screws.
The invention has the beneficial effects that:
(1) according to the replaceable filament assembly for the hot cathode arc discharge ion source, the filament is mounted on the ion source without being mounted from the inside of the ion source, and only the filament assembly with the filament mounted is mounted from the outside of the ion source, so that the filament can be rapidly replaced for the ion source, and the maintenance and the repair are convenient;
(2) according to the replaceable filament assembly for the hot cathode arc discharge ion source, when the filament of the ion source is damaged, or the kovar alloy welding part or ceramic is damaged, the ion source does not need to be disassembled when the filament of the ion source is replaced, and only after the filament assembly is disassembled from the outside of the ion source, the damaged filament is replaced and then is installed again, or the damaged filament assembly is replaced, so that the working efficiency is improved, and the working flow is reduced.
Drawings
FIG. 1 is an isometric view of a replaceable filament assembly for a hot cathode arc discharge ion source;
in the figure, 1-feed is connected with a copper rod; 2-a ceramic tube; 3-installing a flange; 4-flange screw holes; 5-a metal protection tube; 6-shielding a ceramic tube; 7-filament mounting terminals; 8-a filament; 9-flange seal groove; 10-kovar alloy.
Detailed Description
The replaceable filament assembly for hot cathode arc discharge ion source according to the present invention is further described with reference to the accompanying drawings and examples.
The present invention provides, as shown in fig. 1, a replaceable filament assembly for a hot cathode arc discharge ion source, comprising: the device comprises a feed connection copper rod 1, a ceramic tube 2, an installation flange 3, a flange screw hole 4, a metal protection tube 5, a shielding ceramic tube 6, a filament installation terminal 7, a filament 8, a flange sealing groove 9 and kovar alloy 10;
the feed connecting copper rod 1 is used for connecting an external power supply cable, the feed connecting copper rod 1 can use an optical sliding rod, a connector is welded on the optical sliding rod to connect the cable, threads can be machined on the copper rod, and a nut is used for connecting the power supply cable; the feed connection copper rod 1 needs to be directly connected to a vacuum environment, vacuum sealing and electrical insulation between the feed connection copper rod 1 and other components are kept, the electrical insulation is achieved through the ceramic tube 2, the feed connection copper rod 1 penetrates through the center of the ceramic tube 2 to enter the vacuum environment, connection between the feed connection copper rod 1 and the ceramic tube 2 is achieved through welding of the kovar alloy 10, and meanwhile vacuum sealing can be achieved through welding.
Two feed through holes are reserved on the mounting flange 3 to enable the feed connection copper rod 1 to penetrate through, and the ceramic rod 2 and the mounting flange 3 are welded and fixed through the kovar alloy 10 to realize vacuum sealing. After the feed connection copper rod 1 penetrates through the mounting flange 3, the feed connection copper rod passes through the shielding ceramic tube 6, and the shielding ceramic tube 6 has the function of forming a dielectric layer between the feed connection copper rod 1 and the mounting flange 3, so that instantaneous short circuit caused by low-pressure gas breakdown in a vacuum environment is avoided.
The metal protection tube 5 is welded to the vacuum side of the mounting flange 3 and is coaxial with a feed-through hole in the mounting flange 3, and is used for protecting the shielding ceramic tube 6 and positioning the shielding ceramic tube 6.
The filament mounting terminal 7 made of a high-temperature-resistant metal material is mounted on the feed connection copper rod 1 by threaded connection, a filament mounting hole is reserved on the filament mounting terminal 7, and the filament 8 is mounted in the filament mounting hole.
A flange sealing groove 9 is reserved on the mounting flange 3 for mounting an O-shaped ring, and after the O-shaped ring is placed, the O-shaped ring is mounted on the ion source body by using screws, so that the mounting and the vacuum sealing of the filament assembly can be completed.
In the using process, a proper amount of spare parts can be prepared, and when the filament or the filament assembly is damaged, the replacement can be quickly completed.
On the ion source body, a window with a proper size is reserved at a preset design position, and the shape and the size of the window enable the filament assembly flange to be smoothly installed and removed. The connection between filament subassembly and the ion source body is realized through the fix with screw, reserves the screw thread blind hole at predetermined design position on the ion source body, and the through-hole is used to the design position on the filament subassembly flange, uses the screw to install filament subassembly to the ion source on one's body, when demolising, takes off the screw and can take out filament subassembly.
The sealing groove is processed on the flange of the filament assembly, correspondingly, the sealing surface is processed on the filament assembly mounting window of the ion source body, the O-shaped ring is placed in the sealing groove of the filament assembly flange, the filament assembly is mounted on the ion source body by using the screw, and the vacuum sealing of the filament assembly can be realized by means of the O-shaped ring.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the technical scope of the present invention.
Claims (8)
1. A replaceable filament assembly for a hot cathode arc discharge ion source, characterized by: the device comprises a feed connection copper rod (1), a ceramic tube (2), an installation flange (3), a metal protection tube (5), a shielding ceramic tube (6), a filament installation terminal (7) and a filament (8); be equipped with two on mounting flange (3) and present the perforation, every is presented perforated both sides and is fixedly connected with ceramic tube (2) and metal protection tube (5) respectively, the front end of feed connection copper pole (1) passes ceramic tube (2) and metal protection tube (5) center and gets into vacuum environment, the cover has shielding ceramic tube (6) on feed connection copper pole (1) wears out to present perforated part, feed connection copper pole (1) front end is connected with filament mounting terminal (7), filament (8) are connected on two filament mounting terminal (7).
2. The replaceable filament assembly of claim 1, wherein: the feed connection copper rod (1) is a smooth rod, and the rear end of the feed connection copper rod is connected with an external power supply cable.
3. The replaceable filament assembly of claim 2, wherein: the feed connection copper rod (1) is connected with the ceramic tube (2) through the kovar alloy (10) in a welding mode, and the feed connection copper rod (1) is guaranteed to enter the ceramic tube (2) and then is sealed in a vacuum mode.
4. The replaceable filament assembly of claim 1, wherein: the ceramic rod (2) and the mounting flange (3) are welded and fixed through the kovar alloy (10) and vacuum sealing is achieved.
5. The replaceable filament assembly of claim 1, wherein: the shielding ceramic tube (6) forms a dielectric layer between the feed connection copper rod (1) and the mounting flange (3), so that instantaneous short circuit caused by low-pressure gas breakdown in a vacuum environment is avoided.
6. The replaceable filament assembly of claim 1, wherein: the metal protection tube (5) protects the shielding ceramic tube (6) and realizes the positioning of the shielding ceramic tube (6).
7. The replaceable filament assembly of claim 1, wherein: and a filament mounting hole is reserved on the filament mounting terminal (7), and the filament (8) is mounted in the filament mounting hole.
8. The replaceable filament assembly of claim 1, wherein: a flange sealing groove (9) is reserved on the mounting flange (3), an O-shaped ring is installed on the flange sealing groove (9), and four corners of the mounting flange (3) are respectively provided with a flange screw hole (4) and are installed on an ion source through screws.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010693465.5A CN111816532A (en) | 2020-07-17 | 2020-07-17 | Replaceable filament assembly for hot cathode arc discharge ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010693465.5A CN111816532A (en) | 2020-07-17 | 2020-07-17 | Replaceable filament assembly for hot cathode arc discharge ion source |
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| Publication Number | Publication Date |
|---|---|
| CN111816532A true CN111816532A (en) | 2020-10-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010693465.5A Pending CN111816532A (en) | 2020-07-17 | 2020-07-17 | Replaceable filament assembly for hot cathode arc discharge ion source |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113051857A (en) * | 2021-03-17 | 2021-06-29 | 核工业西南物理研究院 | Neutral beam ion source time sequence control system and control method |
| CN113660759A (en) * | 2021-08-12 | 2021-11-16 | 合肥综合性国家科学中心能源研究院(安徽省能源实验室) | Large-size high-emission-current-density plasma source |
| CN113838728A (en) * | 2021-09-03 | 2021-12-24 | 奕瑞影像科技成都有限公司 | Ion source filament assembly and welding method thereof |
-
2020
- 2020-07-17 CN CN202010693465.5A patent/CN111816532A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113051857A (en) * | 2021-03-17 | 2021-06-29 | 核工业西南物理研究院 | Neutral beam ion source time sequence control system and control method |
| CN113660759A (en) * | 2021-08-12 | 2021-11-16 | 合肥综合性国家科学中心能源研究院(安徽省能源实验室) | Large-size high-emission-current-density plasma source |
| CN113660759B (en) * | 2021-08-12 | 2023-12-22 | 合肥综合性国家科学中心能源研究院(安徽省能源实验室) | Large-size high-emission current density plasma source |
| CN113838728A (en) * | 2021-09-03 | 2021-12-24 | 奕瑞影像科技成都有限公司 | Ion source filament assembly and welding method thereof |
| CN113838728B (en) * | 2021-09-03 | 2024-03-26 | 奕瑞影像科技成都有限公司 | Ion source filament assembly and welding method thereof |
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