CN111812200A - Capacitive electromagnetic ultrasonic transverse and longitudinal wave transducer - Google Patents

Capacitive electromagnetic ultrasonic transverse and longitudinal wave transducer Download PDF

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Publication number
CN111812200A
CN111812200A CN202010681870.5A CN202010681870A CN111812200A CN 111812200 A CN111812200 A CN 111812200A CN 202010681870 A CN202010681870 A CN 202010681870A CN 111812200 A CN111812200 A CN 111812200A
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electromagnetic ultrasonic
longitudinal
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insulating medium
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CN111812200B (en
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李展鹏
钱孜洋
李永虔
张帆
梁宝
李策
汪开灿
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Lingsheng Technology Suzhou Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • G01N29/043Analysing solids in the interior, e.g. by shear waves
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/04Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/25Measuring force or stress, in general using wave or particle radiation, e.g. X-rays, microwaves, neutrons
    • G01L1/255Measuring force or stress, in general using wave or particle radiation, e.g. X-rays, microwaves, neutrons using acoustic waves, or acoustic emission
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/12Measuring magnetic properties of articles or specimens of solids or fluids

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Abstract

A capacitive electromagnetic ultrasonic transverse and longitudinal wave transducer belongs to the technical field of ultrasonic transducers. The invention aims at the problem that the application of the existing electromagnetic ultrasonic transducer is limited due to the poor capability of exciting longitudinal wave in a ferromagnetic material. The permanent magnet, the insulating medium, the metal polar plate, the dielectric medium and the liquid film are sequentially and tightly laminated together from top to bottom, and the centers of the permanent magnet, the insulating medium, the metal polar plate, the dielectric medium and the liquid film are on a vertical line; the lower surface of the liquid film is connected with a metal test piece to be tested, and the center of the metal test piece to be tested is positioned on the vertical line; the metal polar plate is used for connecting the positive pole of the measuring equipment excitation circuit, and the measured metal test piece is connected with the negative pole of the measuring equipment excitation circuit. The invention can be applied to the ultrasonic nondestructive testing technology.

Description

Capacitive electromagnetic ultrasonic transverse and longitudinal wave transducer
Technical Field
The invention relates to a capacitive electromagnetic ultrasonic transverse and longitudinal wave transducer, belonging to the technical field of ultrasonic transducers.
Background
The conventional electromagnetic ultrasonic transducer is generally an inductive transducer, which induces ultrasonic waves by relying on a narrow lorentz force, a magnetization force, and a magnetostrictive force in an electromagnetic action, and an electrostatic force (which constitutes a broad lorentz force together with the narrow lorentz force) as one of basic force sources in the electromagnetic action is not utilized and studied.
Electromagnetic ultrasound researchers have concluded from a theoretical and practical perspective: the characteristic that the inductive electromagnetic ultrasonic transducer excites longitudinal waves in a ferromagnetic material is greatly influenced by the magnetic property of a test piece material; in most cases of practical application, the magnetostrictive force can be neglected; in the ferromagnetic material, the lorentz force in the narrow sense and the component of the longitudinal wave generated by the magnetization force cancel each other out, so that the excitation intensity of the longitudinal wave is much lower than that of the transverse wave. For example, in the existing electromagnetic ultrasonic transducer, a cylindrical permanent magnet structure is sleeved with a circular permanent magnet, and transverse and longitudinal waves are simultaneously excited by combining a butterfly coil, but the excitation intensity of the longitudinal waves is far lower than that of the transverse waves. This makes the conventional electromagnetic ultrasound technology difficult to be applied in some test situations requiring longitudinal waves, such as: transverse and longitudinal wave combined stress measurement, liquid measurement and the like.
Disclosure of Invention
The invention provides a capacitive electromagnetic ultrasonic transverse-longitudinal wave transducer, aiming at the problem that the application of the existing electromagnetic ultrasonic transducer is limited due to the fact that the longitudinal wave exciting capability of the existing electromagnetic ultrasonic transducer in a ferromagnetic material is poor.
The invention relates to a capacitance type electromagnetic ultrasonic transverse-longitudinal wave transducer, which comprises a permanent magnet 1, an insulating medium 2, a metal polar plate 3, a dielectric 4 and a liquid film 5,
the permanent magnet 1, the insulating medium 2, the metal polar plate 3, the dielectric 4 and the liquid film 5 are sequentially and tightly laminated together from top to bottom, and the centers of the permanent magnet and the metal polar plate are on a vertical line;
the lower surface of the liquid film 5 is connected with a tested metal test piece 6, and the center of the tested metal test piece 6 is positioned on the vertical line;
the metal polar plate 3 is used for connecting the positive pole of the measuring equipment exciting circuit, and the measured metal test piece 6 is connected with the negative pole of the measuring equipment exciting circuit.
According to the capacitive electromagnetic ultrasonic transverse-longitudinal-axis transducer, the permanent magnet 1 is magnetized in the thickness direction.
According to the capacitive electromagnetic ultrasonic transverse-longitudinal-wave transducer, the insulating medium 2 comprises a medium which is resistant to high-frequency alternating-current excitation voltage.
According to the capacitive electromagnetic ultrasonic transverse-longitudinal-axis transducer, the metal polar plate 3 is attached to one side surface of the dielectric medium 4 by adopting a vacuum coating process.
According to the capacitive electromagnetic ultrasonic transverse-longitudinal-axis transducer, the vacuum coating process comprises magnetron sputtering or evaporation.
According to the capacitive electromagnetic ultrasonic transverse-longitudinal-wave transducer, the shape of the metal plate 3 comprises a regular plane shape.
According to the capacitive electromagnetic ultrasonic transverse longitudinal wave transducer, the properties of the dielectric 4 comprise: the relative dielectric constant of the dielectric 4 is 100 or more in a time-varying electromagnetic field environment of 1kHz at 25 ℃.
According to the capacitive electromagnetic ultrasonic transverse-longitudinal-axis transducer, the liquid film 5 comprises water or an aqueous solution with the water mass fraction of more than 50%.
The capacitive electromagnetic ultrasonic transverse-longitudinal-axis transducer further comprises a shell 7 and an insulating medium 8,
the shell 7 is a cylinder with an upper cover, an insulating medium 8 is arranged on the inner wall of the shell 7, the shell 7 is buckled on the outer surfaces of the permanent magnet 1, the insulating medium 2, the metal polar plate 3, the dielectric medium 4 and the liquid film 5 which are connected together, and a lead through hole is arranged on the upper cover of the shell 7;
the housing 7 comprises a stainless steel housing.
The capacitive electromagnetic ultrasonic transverse-longitudinal-axis transducer further comprises a shell 7, an insulating medium 8 and a conductor bar 9,
the shell 7 comprises an insulator shell which is a cylinder with an upper cover, an insulating medium 8 is arranged on the inner wall of the shell 7, and the shell 7 is buckled on the outer surfaces of the permanent magnet 1, the insulating medium 2, the metal polar plate 3, the dielectric medium 4 and the liquid film 5 which are connected together; the upper cover of the shell 7 is provided with a lead through hole;
a strip-shaped groove is formed in the shell 7, a conductor bar 9 is embedded in the strip-shaped groove, and the conductor bar 9 is connected between the metal test piece 6 to be tested and the negative electrode of the equipment excitation circuit.
The invention has the beneficial effects that: the invention can be applied to the ultrasonic nondestructive testing technology, and a capacitor is formed by the metal pole plate, the dielectric medium, the liquid film and the tested metal test piece and is connected into an excitation circuit of external measuring equipment; after receiving a power excitation signal, the electrostatic force between the two polar plates of the capacitor can be used as a force source to excite longitudinal waves, and then the Lorentz force applied to the surface diffusion current of the tested metal test piece in the magnetic field of the permanent magnet can be used as a force source to excite transverse waves.
The invention is provided based on electrostatic force and Lorentz force in narrow sense on the premise of keeping the advantage of the inductance type electromagnetic ultrasonic transducer without a coupling agent, has the capability of exciting transverse and longitudinal waves on a tested metal test piece, and makes up the defect that the traditional inductance type electromagnetic ultrasonic transducer is difficult to excite stronger longitudinal waves in ferromagnetic materials.
The capacitive electromagnetic ultrasonic transverse-longitudinal wave transducer can simultaneously excite transverse waves and longitudinal waves on a metal test piece to be tested on the basis of electrostatic force and Lorentz force in a narrow sense, and a sound source is the metal test piece to be tested, so that a coupling agent is not needed, and high-precision sound velocity measurement can be realized; theoretically, through reasonable design, the intensity ratio of transverse waves to longitudinal waves can be set to any required value, the defect that the inductive electromagnetic ultrasonic transducer is difficult to excite stronger longitudinal waves on a ferromagnetic material is overcome, and an optional device is provided for stress measurement of ferromagnetic metal components.
Drawings
FIG. 1 is a schematic structural diagram of a capacitive electromagnetic ultrasonic transverse-longitudinal-axis transducer according to the present invention;
FIG. 2 is a cross-sectional view of a capacitive electromagnetic ultrasonic transverse-longitudinal transducer with a housing in an embodiment of the invention;
FIG. 3 is a cross-sectional view of a capacitive electromagnetic ultrasonic transverse-longitudinal transducer with a housing in accordance with yet another embodiment of the present invention;
FIG. 4 is a front view of FIG. 3;
FIG. 5 is a side view of FIG. 3;
fig. 6 is a top view of fig. 3.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
The invention is further described with reference to the following drawings and specific examples, which are not intended to be limiting.
First embodiment, as shown in fig. 1 and fig. 2, the present invention provides a capacitive electromagnetic ultrasonic transverse-longitudinal-axis transducer, which includes a permanent magnet 1, an insulating medium 2, a metal plate 3, a dielectric 4 and a liquid film 5,
the permanent magnet 1, the insulating medium 2, the metal polar plate 3, the dielectric 4 and the liquid film 5 are sequentially and tightly laminated together from top to bottom, and the centers of the permanent magnet and the metal polar plate are on a vertical line;
the lower surface of the liquid film 5 is connected with a tested metal test piece 6, and the center of the tested metal test piece 6 is positioned on the vertical line;
the metal polar plate 3 is used for connecting the positive pole of the measuring equipment exciting circuit, and the measured metal test piece 6 is connected with the negative pole of the measuring equipment exciting circuit.
In the present embodiment, the metal plate 3, the dielectric 4, the liquid film 5 and the metal test piece 6 to be measured form a capacitor, which is connected to an external measuring device excitation circuit and can be connected to a signal receiving device for detecting the transverse wave and the longitudinal wave generated on the metal test piece 6.
The metal plate 3 may be made of good conductor such as gold, silver, copper, aluminum, etc.
The negative pole of the excitation circuit may be a zero potential point.
In this embodiment, the metal plate 3 may be connected to the positive electrode of the excitation circuit via a conductor. When the exciting circuit is switched on to enable the metal polar plate 3 to be electrified with high-frequency alternating-current exciting voltage, electric charges are periodically gathered and released on the surface of the tested metal test piece 6, high-frequency alternating electrostatic force in the thickness direction is obtained, and longitudinal waves are excited. When the transmitted longitudinal wave reaches the surface of the tested metal test piece, the distance between capacitor plates (between the metal plates and the tested metal test piece) is changed due to vibration, so that the capacitance value is changed; the signal receiving equipment can correspondingly obtain the electric signal representing the longitudinal wave as long as the change of the capacitance value is detected.
The metal test piece 6 to be tested can be connected with the negative pole of the excitation circuit through a conductor. When high-frequency alternating-current excitation voltage is applied to the metal polar plate 3, namely, when the capacitor is charged and discharged at high frequency, diffusion current is generated on the surface of the metal test piece 6 to be tested, and narrow-sense Lorentz force, magnetizing force and magnetostrictive force are obtained in the magnetic field of the permanent magnet, wherein the narrow-sense Lorentz force plays a leading role, so that transverse waves are excited. The shear wave may be characterized by a mode-converted wave (longitudinal wave) generated upon its transmission.
The metal test piece 6 to be tested may be a carbon steel test piece 10mm thick.
Further, as shown in fig. 1, the permanent magnet 1 is magnetized in the thickness direction. The magnetization along the thickness direction can generate a magnetic field perpendicular to the surface of the metal test piece 6 to be tested, under the action of the magnetic field, the diffusion current of the metal test piece 6 to be tested is mainly acted by the Lorentz force, the direction is the normal direction of the plane formed by the diffusion current and the magnetic field, the diffusion current and the magnetic field belong to a shearing force, and then transverse waves are generated.
As an example, the material of the permanent magnet 1 can be Ru Fe B, and the thickness is selected to be 20 mm.
Still further, the insulating medium 2 comprises a medium resistant to a high frequency alternating excitation voltage to avoid causing the permanent magnet 1 to have a high voltage.
As an example, the insulating medium 2 may be an alumina ceramic sheet, with a thickness chosen to be 2mm, ensuring that it is resistant to the high-frequency alternating voltages of external excitation equipment.
Still further, as shown in fig. 1, the metal plate 3 is attached to one side surface of the dielectric 4 by a vacuum coating process.
By way of example, the vacuum coating process includes magnetron sputtering or evaporation.
Further, the shape of the metal plate 3 includes a regular planar shape. The regular planar shape includes, for example, a circle, a square, or a regular polygon.
As an example, the metal plate 3 may be a copper plate, with a thickness of 1mm being chosen.
Further, the relative permittivity of the dielectric 4 is 100 or more in a time-varying electromagnetic field environment of 1kHz at 25 ℃.
As an example, the dielectric 4 can be a 0.15mm thick ceramic sheet of barium titanate with a relative dielectric constant of about 25000 in a 1kHz time varying electromagnetic field environment at 25 ℃.
As an example, the liquid film 5 comprises water or an aqueous solution having a water mass fraction of more than 50%; in a specific implementation, a certain pressure can be applied between the dielectric 4 and the metal specimen 6 to be tested, so that the liquid film 5 is as thin as possible. The thickness of the liquid film directly influences the excitation intensity of transverse and longitudinal waves, and the larger the thickness, the lower the intensity of the waves.
Still further, as a specific example, with reference to fig. 2, this embodiment further includes a housing 7 and an insulating medium 8,
the shell 7 is a cylinder with an upper cover, an insulating medium 8 is arranged on the inner wall of the shell 7, the shell 7 is buckled on the outer surfaces of the permanent magnet 1, the insulating medium 2, the metal polar plate 3, the dielectric medium 4 and the liquid film 5 which are connected together, and a lead through hole is arranged on the upper cover of the shell 7;
the housing 7 comprises a stainless steel housing.
In this embodiment, the permanent magnet 1, the insulating medium 2, the metal plate 3, the dielectric 4, the liquid film 5 and the metal test piece 6 to be tested may be all selected to be cylindrical, have similar radiuses and smooth surfaces as much as possible, and are coaxially and closely stacked in sequence.
The housing 7 is a conductor whose inner wall is separated from the contents of the transducer by a filling insulating medium 8. The wire through hole is provided to pass a wire therethrough.
The case 7 may be regarded as an equal potential, and the insulating medium 8 is not provided at a position corresponding to the metal specimen 6, so that the case 7 can connect the metal specimen 6 to be measured to the negative zero potential of the excitation circuit.
Still further, as another specific example, as shown in fig. 3 to 6, this embodiment further includes a housing 7, an insulating medium 8 and a conductor bar 9,
the shell 7 comprises an insulator shell which is a cylinder with an upper cover, an insulating medium 8 is arranged on the inner wall of the shell 7, and the shell 7 is buckled on the outer surfaces of the permanent magnet 1, the insulating medium 2, the metal polar plate 3, the dielectric medium 4 and the liquid film 5 which are connected together; the upper cover of the shell 7 is provided with a lead through hole;
a strip-shaped groove is formed in the shell 7, a conductor bar 9 is embedded in the strip-shaped groove, and the conductor bar 9 is connected between the metal test piece 6 to be tested and the negative electrode of the equipment excitation circuit.
In order to reduce the area of the ground conductor in the housing 7 and to limit the diffusion current to a narrow band, the present embodiment provides a conductor bar 9 on the insulator housing to connect the metallic test piece 6 to be tested to the excitation circuit of the device, as compared to the previous embodiment. The method can effectively improve the Lorentz force of the tested metal test piece 6 in unit area, and further improve the excitation intensity of the transverse waves. The transverse wave excited in this embodiment is a polarized wave.
The conductor bar 9 can be bar-shaped stainless steel, and can connect the tested metal test piece 6 with the zero potential of the excitation circuit.
In this embodiment, the housing 7 is an insulator on which the conductor bars 9 are fixed; the wire through hole is used for passing a wire.
The invention can independently excite stronger transverse waves and longitudinal waves without the advantages of a coupling agent.
In specific implementation, the magnitude of the source electrostatic force and the Lorentz force can be calculated according to the required intensity of the transverse waves and the longitudinal waves; design of dielectric 4 thickness d with reference to equation (1-1)1Relative dielectric constantrAnd an external supply voltage U; calculating the diffusion current distribution on the surface of the test piece under the action of the voltage U by using finite element analysis software, and calculating the required magnetic induction intensity B by referring to the formula (1-2); selecting a proper permanent magnet to generate a corresponding static magnetic field; the above parameters need to be properly adjusted during actual debugging, for example: the strength of longitudinal waves and transverse waves can be increased simultaneously by increasing the external power voltage U; the strength of longitudinal waves can be enhanced independently by reducing the thickness of the water film; the intensity of the transverse wave can be independently changed by adjusting the lifting distance of the permanent magnet, and the like.
Figure BDA0002586148750000061
f(t)=qv(t)B,(1-2)
Wherein F (t) represents an electrostatic force,0for vacuum dielectric constant, S represents the area of the capacitor plate, d2Represents the liquid film thickness;
f (t) represents the lorentz force, q represents the particle charge amount, and v (t) represents the particle vibration velocity.
Although the invention herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the present invention. It is therefore to be understood that numerous modifications may be made to the illustrative embodiments and that other arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims. It should be understood that features described in different dependent claims and herein may be combined in ways different from those described in the original claims. It is also to be understood that features described in connection with individual embodiments may be used in other described embodiments.

Claims (10)

1. A capacitance type electromagnetic ultrasonic transverse-longitudinal wave transducer is characterized by comprising a permanent magnet (1), an insulating medium (2), a metal polar plate (3), a dielectric medium (4) and a liquid film (5),
the permanent magnet (1), the insulating medium (2), the metal polar plate (3), the dielectric medium (4) and the liquid film (5) are sequentially and tightly laminated together from top to bottom, and the centers of the permanent magnet and the dielectric medium are on a vertical line;
the lower surface of the liquid film (5) is connected with a tested metal test piece (6), and the center of the tested metal test piece (6) is positioned on the vertical line;
the metal polar plate (3) is used for being connected with the positive pole of the measuring equipment exciting circuit, and the measured metal test piece (6) is connected with the negative pole of the measuring equipment exciting circuit.
2. The capacitive electromagnetic ultrasonic transverse-longitudinal transducer according to claim 1, characterized in that the permanent magnet (1) is magnetized in the thickness direction.
3. The capacitive electromagnetic ultrasonic transverse-longitudinal transducer according to claim 1, characterized in that the insulating medium (2) comprises a medium resistant to high frequency alternating excitation voltages.
4. The capacitive electromagnetic ultrasonic transverse-longitudinal-wave transducer according to claim 1,
the metal polar plate (3) is attached to one side surface of the dielectric medium (4) by adopting a vacuum coating process.
5. The capacitive electromagnetic ultrasonic transverse-longitudinal-wave transducer according to claim 4,
the vacuum coating process comprises magnetron sputtering or evaporation.
6. The capacitive electromagnetic ultrasonic transverse-longitudinal-wave transducer according to claim 1,
the shape of the metal plate (3) comprises a regular planar shape.
7. The capacitive electromagnetic ultrasonic transverse-longitudinal transducer according to claim 1, characterized in that the properties of the dielectric (4) comprise: the relative dielectric constant of the dielectric (4) is 100 or more in a time-varying electromagnetic field environment of 1kHz and 25 ℃.
8. The capacitive electromagnetic ultrasonic transverse-longitudinal wave transducer according to claim 1, characterized in that the liquid film (5) comprises water or an aqueous solution with a water mass fraction of more than 50%.
9. The capacitive electromagnetic ultrasonic transverse-longitudinal transducer according to claim 1, further comprising a housing (7) and an insulating medium (8),
the shell (7) is a cylinder with an upper cover, an insulating medium (8) is arranged on the inner wall of the shell (7), the shell (7) is buckled on the outer surfaces of the permanent magnet (1), the insulating medium (2), the metal polar plate (3), the dielectric medium (4) and the liquid film (5) which are connected together, and a lead through hole is formed in the upper cover of the shell (7);
the housing (7) comprises a stainless steel housing.
10. The capacitive electromagnetic ultrasonic transverse-longitudinal transducer according to claim 1, further comprising a housing (7), an insulating medium (8) and a conductor bar (9),
the shell (7) comprises an insulator shell which is a cylinder with an upper cover, an insulating medium (8) is arranged on the inner wall of the shell (7), and the shell (7) is buckled on the outer surfaces of the permanent magnet (1), the insulating medium (2), the metal polar plate (3), the dielectric medium (4) and the liquid film (5) which are connected together; the upper cover of the shell (7) is provided with a lead through hole;
the device is characterized in that a strip-shaped groove is formed in the shell (7), a conductor bar (9) is embedded in the strip-shaped groove, and the conductor bar (9) is connected between the metal test piece (6) to be tested and the negative electrode of the equipment excitation circuit.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220276363A1 (en) * 2021-02-26 2022-09-01 Ay Dee Kay Llc Dba Indie Semiconductor Integrated electromagnetic-acoustic sensor and sensing

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Publication number Priority date Publication date Assignee Title
JPH11248688A (en) * 1998-02-27 1999-09-17 Kansai Electric Power Co Inc:The Electromagnetic ultrasonic flaw detector
CN107941902A (en) * 2017-11-15 2018-04-20 北京科技大学 A kind of high-efficiency electromagnetic ultrasonic transducer for using stacking silicon steel sheet as backboard
CN109946379A (en) * 2019-04-01 2019-06-28 大连理工大学 A kind of electromagnetic acoustic detection method of pure stress
CN110632177A (en) * 2019-10-24 2019-12-31 大连理工大学 Electromagnetic ultrasonic detection method for plane residual stress

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11248688A (en) * 1998-02-27 1999-09-17 Kansai Electric Power Co Inc:The Electromagnetic ultrasonic flaw detector
CN107941902A (en) * 2017-11-15 2018-04-20 北京科技大学 A kind of high-efficiency electromagnetic ultrasonic transducer for using stacking silicon steel sheet as backboard
CN109946379A (en) * 2019-04-01 2019-06-28 大连理工大学 A kind of electromagnetic acoustic detection method of pure stress
CN110632177A (en) * 2019-10-24 2019-12-31 大连理工大学 Electromagnetic ultrasonic detection method for plane residual stress

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220276363A1 (en) * 2021-02-26 2022-09-01 Ay Dee Kay Llc Dba Indie Semiconductor Integrated electromagnetic-acoustic sensor and sensing
US11914081B2 (en) * 2021-02-26 2024-02-27 Ay Dee Kay Llc Integrated electromagnetic-acoustic sensor and sensing

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