CN111766403B - 一种抗高g值冲击的梳齿微加速度计及其制备方法 - Google Patents
一种抗高g值冲击的梳齿微加速度计及其制备方法 Download PDFInfo
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- CN111766403B CN111766403B CN202010699169.6A CN202010699169A CN111766403B CN 111766403 B CN111766403 B CN 111766403B CN 202010699169 A CN202010699169 A CN 202010699169A CN 111766403 B CN111766403 B CN 111766403B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
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Abstract
Description
折叠梁长度l | 折叠梁宽度b | 折叠梁间距h |
550μm | 10μm | 20μm |
质量块大小 | 通孔 | 通孔数目 | 通孔间距 |
1200μm×4000μm | 100μm×100μm | 175 | 50μm |
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CN202010699169.6A CN111766403B (zh) | 2020-07-20 | 2020-07-20 | 一种抗高g值冲击的梳齿微加速度计及其制备方法 |
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CN111766403A CN111766403A (zh) | 2020-10-13 |
CN111766403B true CN111766403B (zh) | 2022-10-04 |
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CN112551474B (zh) * | 2020-12-09 | 2022-05-24 | 北京航天控制仪器研究所 | 一种具有面内止挡的mems可动结构 |
CN112881755B (zh) * | 2021-01-19 | 2022-06-14 | 西北工业大学 | 一种高振型稳定性的宽频响硅微机械加速度计 |
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DE19808549B4 (de) * | 1998-02-28 | 2008-07-10 | Robert Bosch Gmbh | Mikromechanische Kammstruktur sowie Beschleunigungssensor und Antrieb mit dieser Kammstruktur |
CN2424450Y (zh) * | 2000-06-02 | 2001-03-21 | 中国科学院上海冶金研究所 | 微机械梳状电容式加速度传感器 |
JP2004286624A (ja) * | 2003-03-24 | 2004-10-14 | Denso Corp | 半導体力学量センサ |
CN100483137C (zh) * | 2006-05-23 | 2009-04-29 | 北京航空航天大学 | 一种电容式微机械加速度计 |
CN101239697B (zh) * | 2007-02-06 | 2013-02-13 | 万长风 | 垂直集成微电子机械结构、实现方法及其*** |
CN101858931A (zh) * | 2010-05-28 | 2010-10-13 | 南京理工大学 | 框架式电容硅微机械加速度计 |
CN102798734B (zh) * | 2011-05-24 | 2016-01-06 | 中国科学院上海微***与信息技术研究所 | Mems三轴加速度计及其制造方法 |
CN104714050B (zh) * | 2015-03-07 | 2017-12-29 | 南京中诺斯特传感器科技有限公司 | 一种三轴电容式mems加速度传感器及制备方法 |
CN105399047B (zh) * | 2015-11-10 | 2017-07-28 | 中国工程物理研究院电子工程研究所 | 一种多电容梳齿式微加速度计的加工方法 |
CN109490576A (zh) * | 2018-12-19 | 2019-03-19 | 成都力创云科技有限公司 | 一种基于soi的全差分电容式mems加速度计 |
CN110526205A (zh) * | 2019-08-27 | 2019-12-03 | 西安交通大学 | 一种等离子体刻蚀辅助激光加工碳化硅的方法 |
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