CN111762775A - Multi-tube type full-automatic continuous carbon nanotube preparation equipment - Google Patents
Multi-tube type full-automatic continuous carbon nanotube preparation equipment Download PDFInfo
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- CN111762775A CN111762775A CN202010609277.XA CN202010609277A CN111762775A CN 111762775 A CN111762775 A CN 111762775A CN 202010609277 A CN202010609277 A CN 202010609277A CN 111762775 A CN111762775 A CN 111762775A
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 51
- 239000002041 carbon nanotube Substances 0.000 title claims abstract description 49
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims abstract description 49
- 238000002360 preparation method Methods 0.000 title claims abstract description 17
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 31
- 239000010935 stainless steel Substances 0.000 claims abstract description 31
- 239000000463 material Substances 0.000 claims abstract description 25
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 23
- 238000004804 winding Methods 0.000 claims abstract description 17
- 239000007788 liquid Substances 0.000 claims description 34
- 239000007789 gas Substances 0.000 claims description 32
- 238000002347 injection Methods 0.000 claims description 26
- 239000007924 injection Substances 0.000 claims description 26
- 238000010438 heat treatment Methods 0.000 claims description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- 238000001816 cooling Methods 0.000 claims description 9
- 230000001105 regulatory effect Effects 0.000 claims description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 6
- HMDDXIMCDZRSNE-UHFFFAOYSA-N [C].[Si] Chemical compound [C].[Si] HMDDXIMCDZRSNE-UHFFFAOYSA-N 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 238000009529 body temperature measurement Methods 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 3
- KTWOOEGAPBSYNW-UHFFFAOYSA-N ferrocene Chemical compound [Fe+2].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 KTWOOEGAPBSYNW-UHFFFAOYSA-N 0.000 claims description 3
- 239000011259 mixed solution Substances 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 1
- 239000012466 permeate Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 18
- 230000001681 protective effect Effects 0.000 abstract description 7
- 238000013461 design Methods 0.000 abstract description 4
- 238000002474 experimental method Methods 0.000 description 9
- 229910052593 corundum Inorganic materials 0.000 description 3
- 239000010431 corundum Substances 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/164—Preparation involving continuous processes
Abstract
The invention discloses a multi-tube type full-automatic continuous preparation device for carbon nanotubes, which can independently grow a single tube or simultaneously grow carbon nanotubes in multiple tubes in the growth process by the design of multi-tube type; the stainless steel vacuum cavity is used for leading the whole hearth to be in a sealed space and is used for introducing protective gas to protect the furnace tube from being broken and cracked due to the action of thermal vibration; the two material receiving winding drums are used for collecting the carbon nanotubes grown by the two rows of furnace tubes, and the lower end of the furnace body is provided with an inverted-opening collecting tank which is correspondingly sealed with the water tank and used for assisting in collection and observation; the exhaust port on the collecting vat is equipped with tail gas and prevents stifled device, and the carbon nanotube that mainly used mixes in collecting the tail gas prevents to block up the gas outlet.
Description
Technical Field
The invention relates to the technical field of carbon nanotube growth equipment, in particular to multi-tube type full-automatic carbon nanotube continuous preparation equipment.
Background
The carbon nanotube is prepared mainly by graphite arc process, chemical vapor deposition process, laser process, etc. the CVD process has simple technological process, easy-to-control parameters, pure and controllable product and high carbon nanotube yield, and thus has wide application.
The existing carbon nanotube preparation equipment and technology are usually prepared by a vapor deposition method, the method leads a carbon-containing original compound to be cracked into carbon atoms at higher temperature, and the carbon atoms are attached to the surface of catalyst particles to form the carbon nanotube under the action of a transition metal catalyst; although this method is effective, the growth of carbon nanotubes is also limited due to the size limitation of the matrix, and carbon nanotubes cannot be grown continuously.
Disclosure of Invention
In order to overcome the technical problems, the invention aims to provide multi-tube type full-automatic continuous preparation equipment for carbon nano tubes, a heating hearth is arranged in a stainless steel vacuum cavity, a corundum furnace tube is likely to break or crack the tube due to thermal vibration in the experiment temperature rising process, but in the vacuum cavity, inert protective atmosphere is introduced during the experiment, and the thermal field, the experiment progress and the growth of the carbon nano tubes cannot be damaged even if the tube is broken in the temperature rising process; the independent liquid injection device and the growth device can grow the carbon nano tube independently at one time or simultaneously in a plurality of experimental modes;
according to the invention, through the design of a multi-tube type, the carbon nano tube can independently grow in a single tube or simultaneously grow in multiple tubes in the growth process; the stainless steel vacuum cavity is used for leading the whole hearth to be in a sealed space and is used for introducing protective gas to protect the furnace tube from being broken and cracked due to the action of thermal vibration; the two material receiving winding drums are used for collecting the carbon nanotubes grown by the two rows of furnace tubes, and the lower end of the furnace body is provided with an inverted-opening collecting tank which is correspondingly sealed with the water tank and used for assisting in collection and observation; the exhaust port on the collecting vat is equipped with tail gas and prevents stifled device, and the carbon nanotube that mainly used mixes in collecting the tail gas prevents to block up the gas outlet.
The purpose of the invention can be realized by the following technical scheme:
a multi-tube full-automatic continuous preparation device for carbon nanotubes comprises a stainless steel vacuum chamber, a heating hearth and a support, wherein the stainless steel vacuum chamber is fixedly installed at the top of the support, the heating hearth is arranged inside the stainless steel vacuum chamber, two rows of furnace tubes are arranged inside the heating hearth, the upper ends of the furnace tubes extend out of the stainless steel vacuum chamber, a water-cooling flange is fixedly installed at the top of the furnace tubes, a liquid injection port and an inner tube temperature measurement port are formed in the water-cooling flange, and the liquid injection port is connected with a liquid injection pump through a pipeline; the bottom of the furnace tube is provided with a discharge hole, the lower end of the furnace tube extends into an inverted collecting tank, and the inverted collecting tank is arranged at the bottom of the stainless steel vacuum chamber; a material collecting drum is arranged below the discharge port of the furnace tube and in the inverted collecting tank;
the lifting platform is arranged in the support, the cylinder is embedded in the lifting platform, the top of a piston rod of the cylinder is connected with the water tank, the top of the lifting platform is connected with the water tank through the guide column, and the top of the water tank is in contact with a notch of the inverted collecting tank.
As a further scheme of the invention: and one side of the stainless steel vacuum chamber is provided with an air inlet, and the other side of the stainless steel vacuum chamber is provided with a second air outlet.
As a further scheme of the invention: three furnace tubes are arranged in each row of furnace tubes at equal intervals.
As a further scheme of the invention: the two material receiving winding drums are arranged in parallel, and each material receiving winding drum is used for collecting the carbon nano tubes grown by the three furnace tubes.
As a further scheme of the invention: one side of handstand formula collecting vat is provided with tail gas and prevents stifled device, tail gas prevents stifled device includes the box, the inside one end fixed mounting of box has the rotating electrical machines, the other end of box rotates installs the filter screen reel, the winding has the filter screen on the filter screen reel, the inside of box and the one end that is close to the rotating electrical machines are provided with and compress tightly the cylinder, the box has seted up gas inlet port with handstand formula collecting vat contact department, gas vent one has been seted up to the opposite side of box.
As a further scheme of the invention: and a speed regulating motor is installed on one side of the inverted collecting tank, and an output shaft of the speed regulating motor is connected with the material collecting winding drum.
As a further scheme of the invention: the multi-tube type full-automatic continuous carbon nanotube preparation equipment comprises the following working steps: 200ml of ethanol and ferrocene mixed solution is filled into a liquid injection pump and is fed into a liquid injection pump through an air inletIntroducing 150sccm nitrogen into the stainless steel vacuum chamber, exhausting from the exhaust port II, adding water into the water tank, overflowing the notch of the inverted collecting tank, vacuumizing by using a vacuum pump until the vacuum reaches 5 x 10-1When pa, the carbon silicon rod in the heating hearth is started to heat up to 1200 ℃, when the temperature of the inner pipe temperature measuring port reaches 200 ℃, the liquid injection pump is started to inject the mixed liquid, the speed regulating motor is started to drive the material collecting winding drum to rotate to collect the material, the mixed liquid of the liquid injection pump is cooled after the reaction is finished, the liquid starts to be emptied when the temperature is reduced to the room temperature, the water tank is lowered, and the carbon nano tubes are collected.
The invention has the beneficial effects that: the heating hearth is arranged in a stainless steel vacuum cavity, during the experiment temperature rise process, the corundum furnace tube is likely to break or crack due to thermal vibration, but in the vacuum cavity, inert protective atmosphere is introduced during the experiment, so that the thermal field, the experiment progress and the growth of the carbon nano tube cannot be damaged even if the tube is broken during the temperature rise process; the independent liquid injection device and the growth device can grow the carbon nano tube independently at one time or simultaneously in a plurality of experimental modes;
through the design of a plurality of tubes, the carbon nano tube can independently grow in a single tube or simultaneously grow in a plurality of tubes in the growth process; the stainless steel vacuum cavity is used for leading the whole hearth to be in a sealed space and is used for introducing protective gas to protect the furnace tube from being broken and cracked due to the action of thermal vibration; the two material receiving winding drums are used for collecting the carbon nanotubes grown by the two rows of furnace tubes, and the lower end of the furnace body is provided with an inverted-opening collecting tank which is correspondingly sealed with the water tank and used for assisting in collection and observation; the exhaust port on the collecting vat is equipped with tail gas and prevents stifled device, and the carbon nanotube that mainly used mixes in collecting the tail gas prevents to block up the gas outlet.
Drawings
The invention will be further described with reference to the accompanying drawings.
FIG. 1 is a schematic front view of the present invention;
FIG. 2 is a schematic side view of the structure of FIG. 1;
fig. 3 is a schematic view of the overall structure of the tail gas anti-blocking device of the present invention.
In the figure: 1. a liquid injection port; 2. a temperature measuring port of the inner tube; 3. water-cooling the flange; 4. a stainless steel vacuum chamber; 5. heating the hearth; 6. a discharge port; 7. a first exhaust port; 8. a tail gas anti-blocking device; 9. a water tank; 10. a material receiving reel; 11. a lifting platform; 12. a speed-regulating motor; 13. a liquid injection pump; 14. an air inlet; 15. a second exhaust port; 16. a furnace tube; 17. an inverted collecting tank; 18. a support; 19. a cylinder; 20. a box body; 21. a rotating electric machine; 22. filtering with a screen; 23. a screen drum; 24. and pressing the roller.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, a multi-tube full-automatic continuous carbon nanotube manufacturing apparatus includes a liquid injection port 1, an inner tube temperature measurement port 2, a water-cooled flange 3, a stainless steel vacuum chamber 4, a heating furnace 5, a material discharge port 6, a first exhaust port 7, a tail gas anti-blocking device 8, a water tank 9, a material collecting reel 10, a lifting platform 11, a speed-regulating motor 12, a liquid injection pump 13, an air inlet 14, a second exhaust port 15, a furnace tube 16, an inverted collecting tank 17, and a support 18, wherein the stainless steel vacuum chamber 4 is fixedly installed on the top of the support 18, the whole furnace is located in a sealed space, so as to prevent gas leakage, the heating furnace 5 is arranged inside the stainless steel vacuum chamber 4, a silicon carbon rod is installed inside the heating furnace 5, the silicon carbon rod is heated, the heating temperature can reach 1400 ℃, two rows of furnace tubes 16 are arranged inside the heating furnace 5, the upper end of, the top of the furnace tube 16 is fixedly provided with a water-cooling flange 3, the water-cooling flange 3 plays a role in sealing, the water-cooling flange 3 is provided with a liquid injection port 1 and an inner tube temperature measuring port 2, and the liquid injection port 1 is connected with a liquid injection pump 13 through a pipeline; the bottom of the furnace tube 16 is provided with a discharge hole 6, the lower end of the furnace tube 16 extends into an inverted collecting tank 17, and the inverted collecting tank 17 is arranged at the bottom of the stainless steel vacuum chamber 4; a material collecting drum 10 is arranged below the discharge port 6 of the furnace tube 16 and in the inverted collecting tank 17;
the lifting platform 11 is arranged inside the support 18, the cylinder 19 is embedded in the lifting platform 11, the top of a piston rod of the cylinder 19 is connected with the water tank 9, the top of the lifting platform 11 is connected with the water tank 9 through a guide column, and the top of the water tank 9 is in contact with a notch of the inverted collecting tank 17.
And one side of the stainless steel vacuum chamber 4 is provided with an air inlet 14 for introducing the vacuum chamber inert gas, and the other side of the stainless steel vacuum chamber 4 is provided with an air outlet two 15 for discharging the vacuum chamber inert gas.
Three furnace tubes 16 are respectively arranged in each row, and the three furnace tubes 16 are arranged at equal intervals.
Two material receiving winding drums 10 are arranged in parallel, and each material receiving winding drum 10 collects the carbon nanotubes grown by three furnace tubes 16.
One side of handstand formula collecting vat 17 is provided with tail gas and prevents stifled device 8, tail gas prevents stifled device 8 and includes box 20, the inside one end fixed mounting of box 20 has rotating electrical machines 21, installs the wind-up roll on rotating electrical machines 21's the output shaft, the other end of box 20 rotates installs filter screen reel 23, the winding has filter screen 22 on the filter screen reel 23, the inside of box 20 and the one end that is close to rotating electrical machines 21 are provided with and compress tightly cylinder 24, the gas inlet has been seted up with handstand formula collecting vat 17 contact department to box 20, gas vent 7 has been seted up to box 20's opposite side. The gas inlet gets into gas, and filter screen 22 filters, and drive rotating electrical machines 21 rotates, through filter screen 22 after the wind-up roll rolling was used, guarantees that filter screen 22's filter effect is better, avoids the carbon nanotube of tail gas doping to plug up gas vent 7.
An adjustable speed motor 12 is installed on one side of the inverted collecting tank 17, and an output shaft of the adjustable speed motor 12 is connected with the material collecting winding drum 10.
The multi-tube type full-automatic continuous carbon nanotube preparation equipment comprises the following working steps: 200ml of ethanol and ferrocene mixed solution is filled into a liquid injection pump, 150sccm nitrogen is introduced into the stainless steel vacuum chamber 4 through the air inlet 14, the nitrogen is discharged from the air outlet II 15, the water tank 9 is added with water to overflow the notch of the inverted collecting tank 17, and the vacuum pumpVacuumizing to 5 × 10-1When pa, the carbon silicon rod in the heating hearth 5 is started to heat up to 1200 ℃, when the temperature of the inner tube temperature measuring port 2 reaches 200 ℃, the liquid injection pump is started to inject the mixed liquid, the speed regulating motor 12 is started to drive the material receiving winding drum 10 to rotate to receive the material, the mixed liquid of the liquid injection pump is cooled after the reaction is finished, the liquid starts to be emptied when the temperature is reduced to the room temperature, and the lifting platform 11 lowers the water tank to collect the carbon nano tubes.
The working principle of the invention is as follows: the heating hearth is arranged in a stainless steel vacuum cavity, during the experiment temperature rise process, the corundum furnace tube is likely to break or crack due to thermal vibration, but in the vacuum cavity, inert protective atmosphere is introduced during the experiment, so that the thermal field, the experiment progress and the growth of the carbon nano tube cannot be damaged even if the tube is broken during the temperature rise process; the independent liquid injection device and the growth device can grow the carbon nano tube independently at one time or simultaneously in a plurality of experimental modes;
through the design of a plurality of tubes, the carbon nano tube can independently grow in a single tube or simultaneously grow in a plurality of tubes in the growth process; the stainless steel vacuum cavity is used for leading the whole hearth to be in a sealed space and is used for introducing protective gas to protect the furnace tube from being broken and cracked due to the action of thermal vibration; the two material receiving winding drums are used for collecting the carbon nanotubes grown by the two rows of furnace tubes, and the lower end of the furnace body is provided with an inverted-opening collecting tank which is correspondingly sealed with the water tank and used for assisting in collection and observation; the exhaust port on the collecting vat is equipped with tail gas and prevents stifled device, and the carbon nanotube that mainly used mixes in collecting the tail gas prevents to block up the gas outlet.
In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is illustrative and explanatory only and is not intended to be exhaustive or to limit the invention to the precise embodiments described, and various modifications, additions, and substitutions may be made by those skilled in the art without departing from the scope of the invention or exceeding the scope of the claims.
Claims (7)
1. The multi-tube type full-automatic carbon nanotube continuous preparation equipment is characterized by comprising a stainless steel vacuum chamber (4), a heating hearth (5) and a support (18), wherein the stainless steel vacuum chamber (4) is fixedly installed at the top of the support (18), the heating hearth (5) is arranged inside the stainless steel vacuum chamber (4), two rows of furnace tubes (16) are arranged inside the heating hearth (5), the upper ends of the furnace tubes (16) extend out of the stainless steel vacuum chamber (4), a water cooling flange (3) is fixedly installed at the top of the furnace tubes (16), a liquid injection port (1) and an inner tube temperature measurement port (2) are formed in the water cooling flange (3), and the liquid injection port (1) is connected with a liquid injection pump (13) through a pipeline; the bottom of the furnace tube (16) is provided with a discharge hole (6), the lower end of the furnace tube (16) extends into an inverted collecting tank (17), and the inverted collecting tank (17) is arranged at the bottom of the stainless steel vacuum chamber (4); a material collecting drum (10) is arranged below the discharge hole (6) of the furnace tube (16) and in the inverted collecting tank (17);
the inside of support (18) is provided with lift platform (11), the inside embedding of lift platform (11) is installed cylinder (19), the piston rod top of cylinder (19) is connected with basin (9), the top of lift platform (11) is passed through the guide post and is connected with basin (9), the top of basin (9) and the notch contact of handstand formula collecting vat (17).
2. The multi-tube type full-automatic carbon nanotube continuous preparation equipment according to claim 1, wherein one side of the stainless steel vacuum chamber (4) is provided with an air inlet (14), and the other side of the stainless steel vacuum chamber (4) is provided with an air outlet II (15).
3. The multi-tube full-automatic carbon nanotube continuous preparation equipment according to claim 1, wherein three furnace tubes (16) are respectively arranged in each row of furnace tubes (16), and the three furnace tubes (16) are arranged at equal intervals.
4. The multi-tube full-automatic carbon nanotube continuous preparation equipment according to claim 1, wherein two receiving rollers (10) are arranged in parallel, and each receiving roller (10) collects carbon nanotubes grown by three tubes (16).
5. The multi-tube type full-automatic carbon nanotube continuous preparation equipment according to claim 1, wherein a tail gas anti-blocking device (8) is arranged on one side of the inverted collecting tank (17), the tail gas anti-blocking device (8) comprises a tank body (20), a rotating motor (21) is fixedly mounted at one end of the interior of the tank body (20), a filter screen winding drum (23) is rotatably mounted at the other end of the tank body (20), a filter screen (22) is wound on the filter screen winding drum (23), a pressing roller (24) is arranged at one end of the interior of the tank body (20) and close to the rotating motor (21), a gas inlet is formed in the contact position of the tank body (20) and the inverted collecting tank (17), and a gas outlet (7) is formed in the other side of the tank body (20).
6. The multi-tube type full-automatic carbon nanotube continuous preparation equipment according to claim 1, wherein a speed regulating motor (12) is installed at one side of the inverted collecting tank (17), and an output shaft of the speed regulating motor (12) is connected with the material collecting reel (10).
7. The multi-tube type full-automatic carbon nanotube continuous preparation equipment according to claim 1, wherein the multi-tube type full-automatic carbon nanotube continuous preparation equipment comprises the following working steps: 200ml of ethanol and ferrocene mixed solution is filled into a liquid injection pump, 150sccm nitrogen is introduced into a stainless steel vacuum chamber (4) through an air inlet (14), the nitrogen is discharged from an air outlet II (15), water is added into a water tank (9) to permeate through the notch of an inverted collecting tank (17), the vacuum pump is used for vacuumizing until the vacuum reaches 5 x 10-1When pa is needed, the carbon silicon rod in the heating hearth (5) is started to heat up to 1200 ℃, when the temperature of the inner pipe temperature measuring port (2) reaches 200 ℃, the liquid injection pump is started to inject the mixed liquid, and meanwhile, the speed regulating motor (12) is started to drive the material collecting winding drum (10)Rotating to receive materials, cooling the liquid mixture after the reaction of the liquid injection pump is finished, beginning to break empty when the temperature is reduced to room temperature, lowering the water tank, and collecting the carbon nano tubes.
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2020
- 2020-06-29 CN CN202010609277.XA patent/CN111762775A/en active Pending
Patent Citations (6)
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KR20100034354A (en) * | 2008-09-23 | 2010-04-01 | 남도금형(주) | Apparatus for manufacturing carbon nano tubes and method for manufacturing carbon nano tubes employing the same |
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