CN111734609A - Economical He-3 gas filling system and method - Google Patents

Economical He-3 gas filling system and method Download PDF

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Publication number
CN111734609A
CN111734609A CN202010435073.9A CN202010435073A CN111734609A CN 111734609 A CN111734609 A CN 111734609A CN 202010435073 A CN202010435073 A CN 202010435073A CN 111734609 A CN111734609 A CN 111734609A
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gas
tank
detector
pressure
filling
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CN111734609B (en
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陈东风
余周香
刘晓龙
李眉娟
李玉庆
孙凯
马小柏
韩松柏
刘蕴韬
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China Institute of Atomic of Energy
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China Institute of Atomic of Energy
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/02—Pumping installations or systems specially adapted for elastic fluids having reservoirs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/08—Regulating by delivery pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)

Abstract

The invention relates to a saving He-3 gas filling system and a method, comprising a vacuum system, a gas supply system, a core system and a gas receiving system, wherein the gas supply system is connected with the input end of the core system, and the gas receiving system is connected with the output end of the core system and is respectively isolated by a valve; the air pumping equipment of the core system can pump the gas at the low-pressure input end into the high-pressure output end, and the recovery tank can recover the residual gas in the gas path after the gas filling operation is finished; the vacuum system is used for vacuumizing a system pipeline before gas filling operation. The invention has short inflation time, is not influenced by the volume of the gas tank, and can fill the gas in the gas tank into the cavity of the detector according to the volume and fill the gas in the low-pressure gas tank into the cavity of the high-pressure detector.

Description

Economical He-3 gas filling system and method
Technical Field
The invention relates to a gas filling technology, in particular to a saving type He-3 gas filling system and a saving type He-3 gas filling method.
Background
Due to the fact that3He has high reaction section with neutron nucleus, is insensitive to gamma,3he gas is widely used for neutron detection. It is used as sensitive medium as working gas of detector and can be made into3He is proportional to the number of counting tubes,3he one-dimensional position sensitive detector and3he multi-wire proportional chamber and other types of neutron detectors.3He gas is tritium (3H) By-product of (A), tritium, β decays to3He, purified to obtain the product meeting application requirements3He gas. Tritium is an important raw material for manufacturing hydrogen bombs, and in industry, the tritium can be produced in large quantities by using neutrons of a reactor and adopting lithium fluoride, lithium carbonate or lithium magnesium alloy as a target material. The United states and Russia are world productions3Two major countries for He gas. Due to the 911 event, the U.S. department of homeland security imposed a number of embarrassment to prevent smuggling and leakage of nuclear material for terrorist attacks3He gas is used for security inspection in customs, ports, airports, and the like. Russia shut down most tritium producing reactors because as much tritium is not needed to cut nuclear weapons. In addition, in recent years, foreign countries and domestic countries have come to restMany neutron science centers are newly built, and a large amount of neutrons are needed3He gas is used for manufacturing neutron detectors required by scientific research. These factors lead to3The inventory of He is depleted and the annual production is drastically reduced,3he gas short supply, continuous surge in price, one atmosphere3He gas prices have reached tens of thousands of dollars per liter. Before, at3He gas is cheaper than the cheap material, and has a large production amount,3when He gas is used for manufacturing a neutron detector, high gas pressure is used3The He gas tank charges the detector cavity as shown in fig. 1. Such an approach is highly problematic and not the most cost effective approach. First, low pressure probes can only be inflated with high pressure gas cylinders, and once the gas pressure in the probe cavity is greater than the gas pressure in the cylinder, inflation by this method is not possible. Secondly, the gas in the connecting gas circuit cannot be recycled after the inflation is finished, so that waste is caused. In the beginning of the eighties of the last century, the import from foreign countries is impossible3He gas, domestic3The low yield of He gas is rare, and golden fire et al have designed3He proportional counter tube inflation system (gold fire, linfiban, xiao weng, etc.).3Inflation system of He proportional counter tube [ J ]]Atomic energy science and technology, 1981, (04): 460-463). Although the system is ingenious in design, the disadvantages are obvious. Firstly, the gas in the gas storage cylinder can only be fully filled into the gas to be filled3He count tube can not accurately control the air charging quantity; secondly, when the volume of the gas storage cylinder is larger, the piston of the booster pump can reciprocate for a plurality of times for a long time, and the air leakage is easy to occur. In order to overcome the problems of design and use in the prior art, innovative design must be made.
Disclosure of Invention
The invention aims to provide a He-3 gas filling system and method which can realize more economical and unconstrained gas filling mode, aiming at the defects in the prior art.
The technical scheme of the invention is as follows: a saving He-3 gas filling system comprises a vacuum system, a gas supply system, a core system and a gas receiving system, wherein the gas supply system comprises a gas tank connector, a corresponding valve, a corresponding pipeline and a corresponding pressure sensor; the gas receiving system comprises a detector joint, and a corresponding valve, a pipeline and a pressure sensor; the air supply system is connected with the input end of the core system, and the air receiving system is connected with the output end of the core system and is respectively isolated by a valve; the core system comprises a recovery tank, a filter cartridge, air pumping equipment, a corresponding valve, a corresponding pipeline and a corresponding pressure sensor, wherein the air pumping equipment can pump gas at a low-pressure input end into a high-pressure output end, and the recovery tank is used for recovering residual gas in a gas path after the gas filling operation is finished; the vacuum system comprises a vacuum pumping pump, a corresponding valve, a pipeline and a vacuum gauge, and is used for pumping vacuum to the system pipeline before gas filling operation.
Further, the saving He-3 gas filling system as described above, wherein the filter cartridge of the core system and the two ends of the gas pumping device are respectively provided with a control valve, and when the system is needed, the filter cartridge and the gas pumping device can be respectively short-circuited by the valves connected in parallel with the filter cartridge and the gas pumping device when the system is not needed.
Further, the saving He-3 gas filling system as described above, wherein the gas pumping device of the core system includes a diaphragm pump and a compressor, and the gas pressure at the input end can be pumped to different low pressure states.
Further, the He-3 gas filling system of the saving type as described above, wherein the filter cartridge of the core system contains an absorbent for absorbing impurities including oxygen and water vapor, etc. in the He-3 gas.
Further, the saving He-3 gas filling system as described above, wherein the vacuum pumping pump of the vacuum system includes a molecular pump and a mechanical pump for pumping the system pipeline to different vacuum degrees.
Further, as described above, the saving-type He-3 gas filling system may further include another detector connector connected in parallel to the gas tank connector in the gas supply system, and another gas tank connector connected in parallel to the detector connector in the gas receiving system, and the He-3 gas filling system may perform operations of pumping He-3 gas from the gas tank to the detector, from the detector to the gas tank, from the gas tank to another gas tank, and the like.
A method for filling He-3 gas by using the system comprises the following steps:
(1) connecting a gas tank into a gas tank connector of a gas supply system, connecting a detector into a detector joint of a gas receiving system, vacuumizing the whole system pipeline, and closing valves of the gas receiving system and a core system after vacuumizing;
(2) opening a valve of the gas tank and a control valve of the recovery tank, and closing the valve of the gas tank after the recovery tank is inflated to a target air pressure value;
(3) opening valves of a gas receiving system and a core system, filling He-3 gas into a detector by virtue of gas pressure difference between a recovery tank and the detector, starting pumping equipment to continue filling the gas into the detector after the gas pressure of a gas path is balanced, and closing the detector valve, the pumping equipment and a corresponding control valve after filling;
(4) and communicating the recovery tank with the gas receiving system, and recovering the gas in the gas path to the recovery tank by using the gas pressure difference.
Further, in the method, in the step (1), during the vacuum pumping operation, the mechanical pump is used to pump the vacuum degree of the system pipeline to about 1Pa, and then the molecular pump is used to pump the vacuum degree to below 1 mPa.
Further, according to the method, in the step (2), the target air pressure value of the recovery tank is determined according to the required aeration quantity of the detector in the gas receiving system.
Further, in the method as described above, in the step (3), in the stage of filling He-3 gas into the detector by virtue of the gas pressure difference between the recovery tank and the detector, the control valves at both ends of the gas exhaust apparatus are closed and are short-circuited by the valves connected in parallel therewith; after the air extraction equipment is started, air is extracted through the compressor and the diaphragm pump in sequence until the vacuum degree in the core system is not changed any more, and then air extraction is stopped.
The invention has the following beneficial effects:
1) the invention can adopt the recovery tank to recover most of gas in the gas circuit (mainly gas in high pressure in the gas circuit behind the isolation valve of the gas receiving system), the volume of the recovery tank is more than or equal to 5L, and the volume of the gas circuit behind the valve is less than 0.25L, so that more than 95% of the gas in the gas circuit is stored in the recovery tank after the gas pressure in the gas circuit is balanced;
2) the invention has short inflation time and is not influenced by the volume of the gas tank: filling from the gas tank to the recovery tank for more than 10 minutes, filling from the recovery tank to the gas receiving system for less than 10 minutes, and the total filling time is about 20 minutes, wherein the filling time is related to the gas filling quantity and is unrelated to the volume of the gas tank;
3) the gas in the gas tank can be filled into the cavity of the detector according to the amount: the pressure of the recovery tank is read by a pressure sensor, the recovery tank is filled to a target pressure value, and then all gas in the recovery tank is filled to a gas receiving system, so that the aim of accurately controlling the gas filling amount is fulfilled;
4) the invention can fill the gas of the low-pressure gas tank into the cavity of the high-pressure detector: compressor, diaphragm pump all can be with the gaseous suction of low atmospheric pressure input end high pressure output end, can take out input gaseous atmospheric pressure to be less than 10mbar, can take out to 1.5mbar at least.
Drawings
FIG. 1 shows a conventional3A schematic structural diagram of a He gas filling system;
FIG. 2 shows an economical embodiment of the present invention3A schematic diagram of the He gas filling system;
FIG. 3 shows an economical embodiment of the present invention3A filling flow chart of the He gas filling system;
FIG. 4 shows a saving mode according to an embodiment of the present invention3And the structural schematic diagram of the He gas filling system.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The invention provides3The He gas filling system is composed of a vacuum system, a gas supply system, a core system and a gas receiving system, which are shown in fig. 2. The gas supply system comprises a gas tank connector, and a corresponding valve, a pipeline and a pressure sensor. System of qi receiving systemThe device comprises a detector joint, and a corresponding valve, a pipeline and a pressure sensor; the air supply system is connected with the input end of the core system, and the air receiving system is connected with the output end of the core system and is respectively isolated through a valve. The core system comprises a recovery tank, a filter cartridge, a diaphragm pump, a compressor, corresponding valves, pipelines, a pressure sensor, a vacuum gauge and the like, wherein the diaphragm pump and the compressor can pump gas at a low-pressure input end into a high-pressure output end, and the recovery tank is used for recovering residual gas in a gas path after the gas filling operation is finished; the vacuum system comprises a vacuum pumping pump, a corresponding valve, a pipeline and a vacuum gauge, and is used for pumping vacuum to the system pipeline before gas filling operation.
In the present embodiment, the first and second electrodes are,3the specific structure of the He gas filling system is shown in fig. 4. The vacuum system comprises a valve 1, a valve 2, a KF16 flange, a vacuum gauge, a molecular pump and a mechanical pump. The vacuum system is responsible for pumping the air pressure of the air path to be below 1 mPa. When the vacuum pump works, the mechanical pump is started, the molecular pump is started again when the vacuum degree is about 1Pa, and the vacuum degree is continuously pumped to be below 1 mPa. The gas supply system comprises a valve 3, a valve 4, a pressure sensor PS1, a gas tank connector, a detector connecting hose compression joint, a gas tank and a detector (the gas tank and the detector are not shown in the figure). The pressure sensor PS1 monitors the change in gas path pressure for calculating and controlling the exact amount of charge. The gas receiving system comprises a valve 5, a valve 6, a pressure sensor PS4, a gas tank connector, a detector connecting hose compression joint, a gas tank and a detector (the gas tank and the detector are not shown in the figure). The core system comprises valves 7-17, a pressure sensor PS2, a pressure sensor PS3, a vacuum gauge, a recovery tank, a filter cartridge, a diaphragm pump, a compressor and an analog pressure gauge. The valve 9, the valve 10 and the valve 11 are respectively used for a short-circuit filter cartridge, a diaphragm pump and a compressor. The valve 7 and the valve 8 respectively isolate the core system from the gas supply system and the gas receiving system. The recovery tank is large in size and has the function of recovering most of gas in a gas path, particularly high-pressure gas in the gas path from the compressor to a gas tank/detector of the gas receiving system when the gas receiving system is filled. The filter cartridge contains an absorbent for absorbing3Oxygen and water vapor in He gas. Compressor with a compressor housing having a plurality of compressor bladesThe gas at the input end can be pumped to be lower than 0.8bar by pumping the gas at the low-pressure input end into the high-pressure output end. The diaphragm pump is also with the gaseous pumping in high atmospheric pressure output of low atmospheric pressure input, further reduces the gaseous atmospheric pressure of input, and the gaseous atmospheric pressure of input can be taken out to 1.5mbar at least. The input end and the output end of the diaphragm pump can withstand pressure of 1.1bar at most.
The mechanical pump and the molecular pump of the vacuum system are relatively independent devices and can be assembled before the system is used; the gas tank and the detector of the gas supply and receiving system can be selected and combined according to specific requirements. The3The He gas filling system can realize the functions of pumping gas from the gas tank to the detector, pumping gas from the detector to the gas tank, pumping gas from the gas tank to other gas tanks and the like. The present embodiment is a practice of operation in which gas is pumped from a gas tank to a detector using the system. The probe pressure was 3.4bar before inflation and was scheduled to be increased by 2bar to 5.4 bar.3The He gas filling process is divided into four parts, namely vacuumizing, filling and recovering tank, filling and receiving system and gas recovery of gas path, as shown in fig. 3, and the specific operation is as follows:
firstly, vacuumizing: the gas tank is connected with a gas tank connector of a gas supply system, and the detector is connected with a detector of a gas receiving system and connected with a hose compression joint. The system is connected to a power supply, and the air pressure at each position of the air passage is read out to be 1bar through a pressure sensor PS1-PS 4. With the exception of valves 4, 5 and 17 (default recovery tank stores a small amount of the last operation recovered3He gas), open all other valves (ensure that the pressure sensors PS2, PS3 are less than 1.1bar to open valves 14, 15, which would otherwise damage the diaphragm pump). The mechanical pump is started, the vacuum degree is read through the vacuum system vacuum gauge and the core system vacuum gauge, the vacuum degree is pumped to 3Pa (PS1-PS4 shows zero) in about less than 10 minutes, the molecular pump is started to continue pumping, and the vacuum degree is pumped to 0.5mPa after about 4 hours. Valves 1, 2, 3, 6, 8, 9, 10, 11, 12, 13, 14, 15, 16 are closed, the molecular pump is turned off, and the vacuum pump is turned off.
(II) filling and recovering the tank: the valve 17 is opened, the pressure of the recovery tank is read by a pressure sensor PS1 to be 0.092bar, and a target pressure value of the recovery tank (7bar L +0.092bar × 5L)/5L is calculated according to the gas filling amount of 7bar L to be 1.492 bar. And opening the valve 3, placing the valve of the air tank in a half-open state, and closing the valve of the air tank when the air in the recovery tank is slowly inflated to 1.49 bar.
(III) filling and air receiving system: when the valves 12, 13, 10, 11, 8 and 6 and the detector valve are opened, and the readings of the pressure sensors PS1-PS4 are consistent (about 2.15 bar), the air pressure of the air path reaches balance. Valve 11 is closed and valve 16 is opened. The compressor is started, and when the pressure sensors PS2 and PS3 read less than 1bar (0.9bar), the valves 14 and 15 are opened, the valve 10 is closed, and the diaphragm pump is opened. When the core system vacuum gauge reads 5mbar and does not change any more (at this time the pressure sensor PS3 should read less than 0.8bar, 0.55bar), the detector valves and valves 8, 16, 15, 14 are closed, the compressor and diaphragm pump are turned off, and the valves 3, 7, 12, 13 are closed. The pressure sensor PS4 reading 5.429bar was recorded. A total of (5.429-3.383) bar x 3.4L-6.96 bar · L gas was filled, corresponding to the target value of 7L, and the probe pressure increased by 2.046 bar.
(IV) gas recovery of the gas path: when the valves 9, 10 and 11 are opened and the readings of the pressure sensors PS2 and PS3 are consistent (about 0.01 bar), the air pressure of the air path is balanced. When the valve 8 is opened and the readings of the pressure sensors PS2-PS4 are consistent (about 0.1 bar), the gas pressure of the gas path reaches balance, and most of gas in the gas path (mainly high-pressure gas in the gas path after the valve 8) is recycled to the recycling tank. The valves 6, 8, 9, 10, 11, 17 are closed and the PS2 reading of 0.102bar is recorded and marked on the recovery tank together with the date of this operation and the operator.
The invention provides3He gas filling systems can perform the function of pumping gas from a gas tank to a detector, from a detector to a gas tank, from one gas tank to another, and the like. The air pressure of the air supply system can be higher than that of the air receiving system or lower than that of the air receiving system, and the air charging quantity can be accurately controlled. If the gas in the gas supply system is to be pumped into the gas receiving system, the second step of the process can be skipped.
Other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the invention and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. Thus, if such modifications and application-adaptive changes to the present invention are within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and application-adaptive changes.
The above-described embodiments are merely illustrative of the present invention, and the present invention may be embodied in other specific forms or other specific forms without departing from the spirit or essential characteristics thereof. The described embodiments are, therefore, to be considered in all respects as illustrative and not restrictive. The scope of the invention should be indicated by the appended claims, and any changes that are equivalent to the intent and scope of the claims should be construed to be included therein.

Claims (10)

1. A saving He-3 gas filling system is characterized by comprising a vacuum system, a gas supply system, a core system and a gas receiving system, wherein the gas supply system comprises a gas tank connector, a corresponding valve, a corresponding pipeline and a corresponding pressure sensor; the gas receiving system comprises a detector joint, and a corresponding valve, a pipeline and a pressure sensor; the air supply system is connected with the input end of the core system, and the air receiving system is connected with the output end of the core system and is respectively isolated by a valve; the core system comprises a recovery tank, a filter cartridge, air pumping equipment, a corresponding valve, a corresponding pipeline and a corresponding pressure sensor, wherein the air pumping equipment can pump gas at a low-pressure input end into a high-pressure output end, and the recovery tank is used for recovering residual gas in a gas path after the gas filling operation is finished; the vacuum system comprises a vacuum pumping pump, a corresponding valve, a pipeline and a vacuum gauge, and is used for pumping vacuum to the system pipeline before gas filling operation.
2. The economized He-3 gas fill system as claimed in claim 1, wherein said core system has control valves provided at both ends of said filter cartridge and said pumping apparatus, respectively, and said filter cartridge and said pumping apparatus are connected to said system when needed, and said filter cartridge and said pumping apparatus are short-circuited by said valves connected in parallel when not needed.
3. A economized He-3 gas fill system as claimed in claim 1 or 2, wherein said core system pumping means comprises a diaphragm pump and a compressor to pump input gas pressure to different low pressure states.
4. The economized He-3 gas fill system of claim 1 or 2, wherein said core system filter cartridge contains an adsorbent therein for adsorbing impurities in He-3 gas, including oxygen and water vapor.
5. The economized He-3 gas filling system of claim 1, wherein the evacuation pump of said vacuum system comprises a molecular pump and a mechanical pump for evacuating the system piping to different vacuum degrees.
6. The economized He-3 gas fill system of claim 1, wherein an additional detector connection can be provided in parallel with the gas tank connector in the gas supply system, an additional gas tank connector can be provided in parallel with the detector connection in the gas receiving system, and the He-3 gas fill system can perform operations of pumping He-3 gas from the gas tank to the detector, from the detector to the gas tank, and from the gas tank to the additional gas tank.
7. A method of He-3 gas filling using the system of any one of claims 1-6, comprising:
(1) connecting a gas tank into a gas tank connector of a gas supply system, connecting a detector into a detector joint of a gas receiving system, vacuumizing the whole system pipeline, and closing valves of the gas receiving system and a core system after vacuumizing;
(2) opening a valve of the gas tank and a control valve of the recovery tank, and closing the valve of the gas tank after the recovery tank is inflated to a target air pressure value;
(3) opening valves of a gas receiving system and a core system, filling He-3 gas into a detector by virtue of gas pressure difference between a recovery tank and the detector, starting pumping equipment to continue filling the gas into the detector after the gas pressure of a gas path is balanced, and closing the detector valve, the pumping equipment and a corresponding control valve after filling;
(4) and communicating the recovery tank with the gas receiving system, and recovering the gas in the gas path to the recovery tank by using the gas pressure difference.
8. The He-3 gas filling method according to claim 7, wherein in the step (1) of evacuating, a mechanical pump is used to evacuate the system line to about 1Pa, and then a molecular pump is used to evacuate the system line to below 1 mPa.
9. A He-3 gas filling method according to claim 7, wherein the target pressure value of the recovery tank is determined according to a gas filling amount required by a detector in the gas receiving system in step (2).
10. A He-3 gas filling method according to claim 7, wherein in the step (3), in a stage of filling the He-3 gas into the probe by means of a gas pressure difference between the recovery tank and the probe, the control valves at both ends of the gas evacuation apparatus are closed and are short-circuited by a valve connected in parallel therewith; after the air extraction equipment is started, air is extracted through the compressor and the diaphragm pump in sequence until the vacuum degree in the core system is not changed any more, and then air extraction is stopped.
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CN107575731A (en) * 2017-09-26 2018-01-12 黎明化工研究设计院有限责任公司 A kind of automatic filling system and its application method for high-purity tungsten hexafluoride production
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1140838A (en) * 1995-07-17 1997-01-22 成都东方仪器厂 Helium leak detector
CN204213621U (en) * 2014-10-27 2015-03-18 中汽迈赫（天津）工程设计研究院有限公司 High-purity gas supercharging bulking system
CN204494085U (en) * 2015-02-05 2015-07-22 伟世通汽车空调（北京）有限公司 The high pressure resistant test of automobile condenser core body-helium inflation and recovery integrated system
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