CN111715976B - LED wire bonding machine - Google Patents
LED wire bonding machine Download PDFInfo
- Publication number
- CN111715976B CN111715976B CN201910201865.7A CN201910201865A CN111715976B CN 111715976 B CN111715976 B CN 111715976B CN 201910201865 A CN201910201865 A CN 201910201865A CN 111715976 B CN111715976 B CN 111715976B
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- Prior art keywords
- circuit
- efo
- sampling
- wire
- gold wire
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Links
- 238000005070 sampling Methods 0.000 claims abstract description 95
- 238000000034 method Methods 0.000 claims abstract description 23
- 238000010304 firing Methods 0.000 claims abstract description 18
- 230000008569 process Effects 0.000 claims abstract description 18
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 73
- 241000218202 Coptis Species 0.000 claims description 13
- 235000002991 Coptis groenlandica Nutrition 0.000 claims description 13
- 229910052573 porcelain Inorganic materials 0.000 claims description 6
- 230000002159 abnormal effect Effects 0.000 abstract description 17
- 230000002452 interceptive effect Effects 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000005856 abnormality Effects 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000011217 control strategy Methods 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 238000004590 computer program Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000009849 deactivation Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K9/00—Arc welding or cutting
- B23K9/10—Other electric circuits therefor; Protective circuits; Remote controls
- B23K9/1006—Power supply
- B23K9/1043—Power supply characterised by the electric circuit
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Wire Bonding (AREA)
Abstract
The patent discloses an LED bonding wire machine, including the EFO system, the EFO system includes: an EFO circuit for controlling a firing process of the LED wire bonding machine; the ignition rod is connected with the EFO circuit and generates ignition current according to a driving signal generated by the EFO circuit; a first sampling loop; and a second sampling loop. The EFO circuit controls the sparking operation of the LED wire bonding machine according to signals transmitted in the first sampling loop and the second sampling loop. The method of double loop is adopted in this patent, is normal current loop and abnormal current loop respectively, when detecting that the electric current is abnormal loop, the whole process of striking sparks immediately to avoid interfering the normal work of other equipment.
Description
Technical Field
This patent belongs to semiconductor production facility field, particularly relates to a LED bonding wire machine.
Background
Semiconductor technology has been widely used in various industries, promoting social progress. In the development of semiconductor technology, high-efficiency semiconductor production technology is particularly important. As the demand for semiconductor devices increases in various industries, there is a need to improve production efficiency and quality so as to satisfy a great deal of social demands.
In the semiconductor manufacturing industry, semiconductor wire bonding machines have become an important point device. Although it uses a general bonding principle, the bonding machine has become a core device in the field of semiconductor production because of the extremely complex work required for bonding due to the fine size machines of semiconductor devices such as chips.
The LED wire bonding machine mainly melts the tail end of the gold wire through an electronic ignition system to form a gold ball, the electronic ignition system is also called EFO (electronic flame off) system, and a current channel is formed by mainly utilizing negative high-voltage breakdown air, so that the tail end of the gold wire is balled. For this reason, the EFO is required to generate a high negative pressure to melt the gold wire ends into balls.
During the production process, due to the high voltage of the EFO system, an unexpected current channel often occurs, so that the phenomenon that the camera or the wire clamp of the LED wire bonding machine is burnt out is generated.
Disclosure of Invention
The present patent is directed to solving the above-mentioned problems of the prior art, and the technical problem to be solved by the present patent is to provide an LED wire bonding machine, so as to improve the working stability of the EFO system thereof, or reduce the damage of the EFO system to the equipment on the LED wire bonding machine.
In order to solve the above-mentioned problem, the technical scheme that this patent provided includes:
An LED wire bonding machine comprising an EFO system, the EFO system comprising: an EFO circuit for controlling a firing process of the LED wire bonding machine; the ignition rod is connected with the EFO circuit and generates ignition current according to a driving signal generated by the EFO circuit; the first sampling circuit comprises a gold wire tail end which is arranged opposite to the ignition rod; the gold wire, one end of the gold wire links with said gold wire end; the first sampling circuit is connected with the other end of the gold wire and comprises a first sampling resistor, the first sampling resistor is connected with the gold wire in series, the input end of the first amplifying circuit is connected with the first sampling resistor in parallel, and the output end of the first amplifying circuit is connected with the EFO circuit; the second sampling circuit comprises a second sampling circuit, the second sampling circuit comprises a second sampling resistor and a second amplifying circuit, the second sampling resistor is connected with the grounding end in series, the input end of the second amplifying circuit is connected with the second sampling resistor in parallel, and the output end of the second amplifying circuit is connected with the EFO circuit; and the EFO circuit controls the sparking operation of the LED wire bonding machine according to signals transmitted in the first sampling loop and the second sampling loop.
Preferably, the EFO circuit controlling the firing operation of the LED wire bonding machine according to signals transmitted in the first and second sampling loops includes: in the ignition process, when the first sampling loop fails to detect an electric signal, the EFO circuit judges that the ignition is abnormal; in the sparking process, when the second sampling loop fails to detect an electric signal, the second sampling loop judges that the sparking is abnormal; and judging that the ignition is abnormal when the first sampling loop and the second sampling loop detect the electric signals simultaneously in the ignition process.
Preferably, when the LED wire bonding machine is out of the sparking process, the first sampling loop or the second sampling loop is judged to be abnormal in sparking when any one of the first sampling loop and the second sampling loop detects an electric signal.
Preferably, the gold wire is wound on a spool, and the gold wire supplied from the spool is provided on a table by guiding a wire clamp and a porcelain nozzle, the wire clamp being for clamping and guiding the gold wire to be paid out from the spool; the porcelain nozzle is arranged between the wire clamp and the tail end of the gold wire to play an insulating role.
There is also provided in accordance with another aspect of the present invention an EFO system including: an EFO circuit for controlling a firing process of the LED wire bonding machine; the ignition rod is connected with the EFO circuit and generates ignition current according to a driving signal generated by the EFO circuit; the first sampling circuit comprises a gold wire tail end which is arranged opposite to the ignition rod; the gold wire, one end of the gold wire links with said gold wire end; the first sampling circuit is connected with the other end of the gold wire and comprises a first sampling resistor, the first sampling resistor is connected with the gold wire in series, the input end of the first amplifying circuit is connected with the first sampling resistor in parallel, and the output end of the first amplifying circuit is connected with the EFO circuit; the second sampling circuit comprises a second sampling circuit, the second sampling circuit comprises a second sampling resistor and a second amplifying circuit, the second sampling resistor is connected with the grounding end in series, the input end of the second amplifying circuit is connected with the second sampling resistor in parallel, and the output end of the second amplifying circuit is connected with the EFO circuit; and the EFO circuit controls the sparking operation of the LED wire bonding machine according to signals transmitted in the first sampling loop and the second sampling loop.
The design adopts a double-loop method, namely a normal current loop and an abnormal current loop, and when the current is detected to be an abnormal loop, the whole ignition process is immediately ended, so that the normal work of other equipment is prevented from being interfered.
Drawings
Fig. 1 is a block diagram of an EFO system of an LED wire bonding machine in accordance with one embodiment of the present patent.
Detailed Description
The following detailed description of the preferred embodiments of the present patent refers to the accompanying drawings, which are presented to illustrate the preferred embodiments of the present patent and not to limit the scope of the present patent.
As shown in fig. 1, in this embodiment an LED wire bonding machine is provided that includes a EFO (electronic flame off) system.
The negative high-voltage breakdown air of the EFO system forms a current channel, so that the tail end of the gold wire is balled. The voltage of the negative high voltage is regulated between 3500v and 4200v in an EFO system, the amount of the current for striking fire is between 2700mA and 3200mA, and the current is discharged to the head of the gold wire through the discharge between 670ms and 720ms, so that the head of the gold wire is balled.
In this embodiment, the EFO system of the LED wire bonding machine includes an EFO circuit, a flame rod, a gold wire, a first sampling circuit, and a second sampling circuit.
The EFO circuit is electrically connected with the ignition rod, and generates current or voltage for igniting the ignition rod to discharge. In this embodiment, the EFO circuit is configured as shown in fig. 1, and includes a lighting unit and a control unit.
The striking unit can be realized by adopting the structure in the prior art, namely, the striking electric energy is generated, and the striking rod is driven to strike the fire.
The control unit controls the operation of the EFO circuit, and in this embodiment, the control unit controls not only the activation of the firing unit but also the deactivation of the firing unit. The control unit controls the working condition of the ignition unit according to different specific conditions.
For example, in this embodiment, after the gold wire is broken, the gold wire side cannot smoothly transfer the current, and at this time, the current generated by the striking rod may not flow in a predetermined manner along the gold wire, but may find a resistive path to break down to form a current path, for example, strike a wire clip or a platen toward an adjacent gold wire, so as to form a current path. Damage to the various equipment on the wire bonding machine may occur at this point, and thus, it is desirable to prevent the EFO circuit from sending power to the flame rod in a timely manner. Thus, in this embodiment, when the system detects that the gold wire is broken, the control unit controls the ignition unit to stop working. Thereby protecting the safety of the individual devices of the system. The control unit may be implemented using logic control circuitry.
The striking rod is generally made of metal platinum, which has higher chemical stability, such as a melting point, etc., than a gold wire, so that the gold wire balls during the discharge process, and the metal platinum striking rod can maintain the physical properties unchanged within a certain temperature range.
The gold thread twines on the spool, sets up on the workstation through the guide of fastener and porcelain mouth, the fastener is used for centre gripping and guide the gold thread is followed the spool is released. The porcelain nozzle is arranged between the wire clamp and the tail end of the gold wire, and mainly plays a role in insulating isolation, so that electric energy in the ignition rod is prevented from deviating from the tail end of the gold wire and being released to other places.
The spool pass through the first electric current sampling circuit with the connection of EFO circuit, the structure of first electric current sampling circuit includes gold thread end 2, the gold thread end with the pole of striking 1 sets up relatively, under the condition of normal striking, the electric energy that produces in the pole of striking is to the gold thread end 2 releases to form gold thread ball at the gold thread end. The gold wire ends are connected to the gold wire 10, and since both the gold wire ends 2 and the gold wire 10 are conductors, current can be transmitted to the gold wire 10 through the gold wire ends. The gold wire is typically wound around the gold wire shaft 5 to facilitate a high volume wire bonding operation. When the gold wire is wound on the gold wire spool, the same gold wire is electrically conductive. As the conductivity of the gold wire is not affected.
One end of the gold wire 10 is provided with the gold wire end, the other end of the gold wire 10 is connected with a first current sampling circuit 6, the first current sampling circuit comprises a first sampling resistor 14, two ends of the first sampling resistor 14 are connected in parallel with a first amplifying circuit 12, the first sampling resistor is responsible for detecting an electric signal transmitted from the gold wire, and preventing the electric current transmitted from the gold wire from amplifying and shaping the voltage signals at two ends of the first sampling resistor to other devices such as an EFO circuit 7, and the first amplifying circuit is responsible for collecting the voltage signals at two ends of the first sampling resistor, amplifying and shaping the voltage signals and transmitting the voltage signals to the EFO circuit 7.
The EFO circuit 7 is thus able to receive the first signal transmitted by the normal firing of the gold wire.
In order to detect abnormal sparking, a second sampling circuit is further provided in this embodiment, the second sampling circuit includes a second sampling circuit 8, the second sampling circuit includes a second sampling resistor 13 and a second amplifying circuit 11, and the second sampling resistor 13. The second sampling resistor 13 is grounded at one end, or is electrically connected to the ground end of the wire bonding machine, and when the firing rod fails to fire the gold wire end 2, it must fire in the direction of other equipment of the wire bonding machine, and at this time, the current on the other equipment of the wire bonding machine will be led to the ground end of the wire bonding machine. When the second sampling resistor is arranged at the grounding end of the wire welding machine, and when the grounding end detects an electric signal, the fact that the sparking rod fires towards other equipment except the gold wire is indicated. At this time, there is an abnormality of ignition. The second sampling resistor 13 in the second sampling circuit can acquire the electrical signal of the ignition abnormality. When the electrical signal is received in the second sampling circuit, the electrical signal can be sampled in the second sampling resistor, and the electrical signal in the second sampling resistor is amplified by the second amplifying circuit 11 and then is transmitted to the EFO circuit 7, so that the EFO circuit 7 can sense the signal of the ignition abnormality and accordingly control the signal. The corresponding controls include, but are not limited to, stopping the firing, stopping the machine, and the like.
The fire anomaly for the EFO circuit can be determined in a number of ways: for example, one preferred method includes determining based on the electrical signal in the first loop, and determining that the EFO system is in fire abnormality when no electrical signal is collected in the first loop. Since the firing rod discharges to the end of the gold wire during normal firing, when the electrical signal is not received in the first circuit, the condition that the firing rod fails to achieve firing or does not fire to the end of the gold wire is generally included. At this point, the EFO circuit 7 thus performs corresponding control strategies including, for example, but not limited to, stopping the fire, shutting down, etc. For another example, another preferred mode includes determining based on the electrical signal in the second loop, and determining that the EFO system is in fire when the electrical signal is detected in the second loop. Since no electrical signal is detected in the second loop in the case of a normal firing, the firing rod will typically fire to other mechanisms than the end of the gold wire in the case of an electrical signal detected in the second loop, at which point a fire anomaly may be determined, and the EFO circuit 7 may then implement a corresponding control strategy, including, but not limited to, stopping the firing, shutting down, etc. Alternatively, it may be determined by combining the two, that is, when the first circuit detects an electrical signal and the second circuit also detects an electrical signal, the electronic ignition system may also determine that the ignition is abnormal, where the possible situations include that the ignition rod fires toward the end of the gold wire and fires toward other components other than the end of the gold wire, so that the EFO circuit 7 may determine that the ignition is abnormal, and at this moment, perform corresponding control strategies, for example, but not limited to stopping the ignition, stopping the machine, and so on.
In addition, when the LED wire bonding machine is out of the sparking process, the first sampling loop or the second sampling loop can judge that the sparking is abnormal when any one of the first sampling loop and the second sampling loop detects an electric signal.
In the process of working the EFO system or the wire bonding machine of this embodiment, the gold wire may be broken, and the current generated by the ignition rod after the wire breaking may find a low-resistance channel to discharge. The existing scheme has only a single current loop, and does not distinguish between an abnormal loop and a normal loop, so the current is still considered normal after being ignited towards the pressing plate, and the current continues to be output, and the current in the process flows to a channel possibly to have a plurality of paths, so that the normal operation of other equipment such as a dead camera, a dead clamp and the like is interfered. Aiming at the problem, the design adopts a double-loop method, namely a normal current loop and an abnormal current loop, and when the abnormal current loop is detected, the whole ignition process is immediately ended, so that the interference to the normal work of other equipment is avoided. In the specific embodiment, the loop for detecting the abnormal current is arranged, and the whole ignition process is finished in time, so that the abnormal loop is prevented from interfering the normal operation of other equipment. The dual-sampling current loop structure is realized, whether the sparking rod fires towards the tail end of the gold wire can be normally distinguished, if the sparking rod fires towards the workbench, the EFO can rapidly detect, the whole sparking process is finished, and the current is prevented from flowing into an unknown channel to interfere with the normal work of other equipment.
Various component embodiments of the invention may be implemented in hardware, or in software modules running on one or more processors, or in a combination thereof. Those skilled in the art will appreciate that some or all of the functions of some or all of the components in an electronic device according to embodiments of the present invention may be implemented in practice using a microprocessor or Digital Signal Processor (DSP). The present invention can also be implemented as an apparatus or device program (e.g., a computer program and a computer program product) for performing a portion or all of the methods described herein. Such a program embodying the present invention may be stored on a computer readable medium, or may have the form of one or more signals. Such signals may be downloaded from an internet website, provided on a carrier signal, or provided in any other form.
It should be noted that the above-mentioned embodiments illustrate rather than limit the invention, and that those skilled in the art will be able to design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The invention may be implemented by means of hardware comprising several distinct elements, and by means of a suitably programmed computer. In the unit claims enumerating several means, several of these means may be embodied by one and the same item of hardware. The use of the words first, second, third, etc. do not denote any order. These words may be interpreted as names.
Claims (2)
1. An LED wire bonding machine comprising an EFO system, the EFO system comprising:
an EFO circuit for controlling a firing process of the LED wire bonding machine;
the ignition rod is connected with the EFO circuit and generates ignition current according to a driving signal generated by the EFO circuit;
The first sampling circuit comprises a gold wire tail end which is arranged opposite to the ignition rod; the gold wire, one end of the gold wire links with said gold wire end; the first sampling circuit is connected with the other end of the gold wire and comprises a first sampling resistor, the first sampling resistor is connected with the gold wire in series, the input end of the first amplifying circuit is connected with the first sampling resistor in parallel, and the output end of the first amplifying circuit is connected with the EFO circuit;
The second sampling circuit comprises a second sampling circuit, the second sampling circuit comprises a second sampling resistor and a second amplifying circuit, the second sampling resistor is connected with the grounding end in series, the input end of the second amplifying circuit is connected with the second sampling resistor in parallel, and the output end of the second amplifying circuit is connected with the EFO circuit;
Wherein, the EFO circuit controls the sparking operation of the LED wire bonding machine according to the signals transmitted in the first sampling loop and the second sampling loop;
The gold thread is wound on a gold thread spool, the gold thread supplied from the gold thread spool is arranged on a workbench through the guidance of a wire clamp and a porcelain nozzle, and the wire clamp is used for clamping and guiding the gold thread to be released from the gold thread spool; the porcelain nozzle is arranged between the wire clamp and the tail end of the gold wire to play an insulating role.
2. An EFO system, said EFO system comprising:
an EFO circuit for controlling a firing process of the LED wire bonding machine;
the ignition rod is connected with the EFO circuit and generates ignition current according to a driving signal generated by the EFO circuit;
The first sampling circuit comprises a gold wire tail end which is arranged opposite to the ignition rod; the gold wire, one end of the gold wire links with said gold wire end; the first sampling circuit is connected with the other end of the gold wire and comprises a first sampling resistor, the first sampling resistor is connected with the gold wire in series, the input end of the first amplifying circuit is connected with the first sampling resistor in parallel, and the output end of the first amplifying circuit is connected with the EFO circuit;
The second sampling circuit comprises a second sampling circuit, the second sampling circuit comprises a second sampling resistor and a second amplifying circuit, the second sampling resistor is connected with the grounding end in series, the input end of the second amplifying circuit is connected with the second sampling resistor in parallel, and the output end of the second amplifying circuit is connected with the EFO circuit;
and the EFO circuit controls the sparking operation of the LED wire bonding machine according to signals transmitted in the first sampling loop and the second sampling loop.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910201865.7A CN111715976B (en) | 2019-03-18 | 2019-03-18 | LED wire bonding machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910201865.7A CN111715976B (en) | 2019-03-18 | 2019-03-18 | LED wire bonding machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111715976A CN111715976A (en) | 2020-09-29 |
| CN111715976B true CN111715976B (en) | 2024-04-26 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910201865.7A Active CN111715976B (en) | 2019-03-18 | 2019-03-18 | LED wire bonding machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111715976B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1125310A (en) * | 1994-12-23 | 1996-06-26 | 何建平 | Flame ion detection ignition control system |
| JP2004324516A (en) * | 2003-04-24 | 2004-11-18 | Kokusan Denki Co Ltd | Ignition device for internal combustion engine |
| CN1773786A (en) * | 2005-10-24 | 2006-05-17 | 中国电子科技集团公司第四十五研究所 | Negative high-voltage electronic striking sparks balling apparatus |
| CN203091933U (en) * | 2012-12-28 | 2013-07-31 | 唐山松下产业机器有限公司 | Carrier wire short-circuit protection circuit and welding equipment |
| WO2015156371A1 (en) * | 2014-04-10 | 2015-10-15 | 株式会社デンソー | Control device and ignition device |
| CN206727958U (en) * | 2017-05-27 | 2017-12-08 | 何永平 | A kind of resonator and arc light lighter |
| CN108990214A (en) * | 2018-08-21 | 2018-12-11 | 北京模电半导体有限公司 | Drive the device of current source loads |
| CN210548748U (en) * | 2019-03-18 | 2020-05-19 | 深圳市德沃先进自动化有限公司 | LED wire bonding machine |
-
2019
- 2019-03-18 CN CN201910201865.7A patent/CN111715976B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1125310A (en) * | 1994-12-23 | 1996-06-26 | 何建平 | Flame ion detection ignition control system |
| JP2004324516A (en) * | 2003-04-24 | 2004-11-18 | Kokusan Denki Co Ltd | Ignition device for internal combustion engine |
| CN1773786A (en) * | 2005-10-24 | 2006-05-17 | 中国电子科技集团公司第四十五研究所 | Negative high-voltage electronic striking sparks balling apparatus |
| CN203091933U (en) * | 2012-12-28 | 2013-07-31 | 唐山松下产业机器有限公司 | Carrier wire short-circuit protection circuit and welding equipment |
| WO2015156371A1 (en) * | 2014-04-10 | 2015-10-15 | 株式会社デンソー | Control device and ignition device |
| CN206727958U (en) * | 2017-05-27 | 2017-12-08 | 何永平 | A kind of resonator and arc light lighter |
| CN108990214A (en) * | 2018-08-21 | 2018-12-11 | 北京模电半导体有限公司 | Drive the device of current source loads |
| CN210548748U (en) * | 2019-03-18 | 2020-05-19 | 深圳市德沃先进自动化有限公司 | LED wire bonding machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111715976A (en) | 2020-09-29 |
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