CN111715606A - Full-automatic graphite boat cleaning device and cleaning method thereof - Google Patents
Full-automatic graphite boat cleaning device and cleaning method thereof Download PDFInfo
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- CN111715606A CN111715606A CN202010239108.1A CN202010239108A CN111715606A CN 111715606 A CN111715606 A CN 111715606A CN 202010239108 A CN202010239108 A CN 202010239108A CN 111715606 A CN111715606 A CN 111715606A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/048—Overflow-type cleaning, e.g. tanks in which the liquid flows over the tank in which the articles are placed
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/007—Heating the liquid
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- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a full-automatic graphite boat cleaning device, which comprises N1 acid washing tank groups, N2 flushing tanks, N3 water washing tank groups, N4 slow pulling tanks and N5 drying tanks; each pickling tank group comprises M1 pickling tanks; each water washing tank group comprises M2 water washing tanks; each pickling tank and each slow lifting tank are provided with a conductivity monitor; the pickling tank group, the flushing tank, the washing tank group, the slow lifting tank and the drying tank are connected in parallel; all pickling tanks are connected in series; all the rinsing tanks are connected in series; wherein N1 is more than N2, N1 is more than or equal to N3, N1 is more than N4, and N1 xM 1 is equal to N5. The invention has the following beneficial effects: the invention has high capacity, can flexibly allocate the number of the groove bodies according to actual needs and adjust the number of the cleaning in each day; the invention has high automation degree and full automatic cleaning of the equipment in the whole process; conductivity monitors are arranged on each pickling tank and each slow lifting tank, so that the concentration of the liquid medicine is accurate, the graphite boat is cleaned cleanly, and the cleaning effect is good; meanwhile, the invention adopts a water-saving design, and can reduce the use amount of pure water.
Description
Technical Field
The invention relates to the technical field of photovoltaic cell industry, in particular to a full-automatic graphite boat cleaning device and a cleaning method thereof, wherein the full-automatic graphite boat cleaning device has high capacity and can adjust the number of grooves and the number of cleaned graphite boats per day according to actual needs.
Background
In the manufacturing link of the photovoltaic cell, the PE process is a core process, aiming at plating passivation film layers on the front and back surfaces of the cell, wherein the passivation film layers consist of a plurality of types: n-layer silicon nitride, N-layer aluminum oxide, N-layer silicon oxynitride, N-layer aluminum oxide, and the like. Wherein the passivation film is composed of one or more kinds of passivation film types.
In the PE step, a graphite boat is used as a carrier, and battery pieces are inserted into the graphite boat to plate passivation films on the front and back surfaces of the battery pieces in a high-temperature furnace tube. The graphite boat has a conductive function under high temperature and high voltage, and an electric field is formed between the battery pieces attached to adjacent graphite boat blades, so that gas is ionized into plasma under the condition of introducing special gas, and the plasma is deposited on the surface of the battery piece after colliding, thereby forming a passivation film. When the front and back surfaces of the battery piece are plated with passive films, the surfaces of the graphite boat are inevitably plated with passive films. As the graphite boat is used for a plurality of times, the conductivity of the graphite boat is affected, so that the effect of plating the passivation film on the surface of the battery piece is affected, and the passivation film on the surface of the graphite boat needs to be removed by acid.
The design method of the mainstream graphite boat cleaning equipment in the industry at present comprises the following steps:
● has two tanks with acid washing and water washing functions;
● the two tanks have the function of extracting the liquid medicine to the other tank and have the function of discharging the liquid medicine independently;
● the two tanks have the functions of initial preparation, replenishment, HF and pure water, and have the function of bubbling.
● Equipment is equipped with N water guns and N air guns (N is more than or equal to 1) for manually washing the graphite boat and manually drying the water drops on the surface of the graphite boat.
The current process for cleaning the graphite boat to saturation in the industry is as follows:
■ manually lifting the graphite boat into the tank;
■, primarily preparing an HF solution in the cell body, setting bubbling parameters and acid washing time;
■ after acid washing, pumping the acid liquor to another tank of the device manually;
■ washing with pure water, bubbling, and setting time;
■ washing with water for discharging liquid, adding pure water, and washing with water again by bubbling;
■ washing with water repeatedly;
■ the graphite boat is lifted out of the equipment manually, and the air gun is used to remove the water on the surface of the graphite boat preliminarily;
■ manually lifting the graphite boat into the drying oven, setting parameters of the drying oven, and starting drying;
■ and after the graphite boat is dried, carrying out the next graphite boat saturation process.
Chinese patent publication No. CN104923518A, No. 9/23 in 2015, discloses a graphite boat cleaning process, which comprises the following specific steps: (1) preparing a cleaning solution: hydrofluoric acid is added into the stock solution, the volume concentration of the hydrofluoric acid is 20-25%, and ammonia water with the volume concentration of 1% is added. (2) Soaking the graphite boat in the prepared cleaning solution for 4-8 hours, and bubbling through nitrogen. (3) Washing with clear water; (4) drying the cleaned graphite boat by using an air gun; (5) drying: and (4) putting the graphite boat into a drying box for drying, and introducing nitrogen into the drying box. The ammonia water is added into the cleaning liquid to reduce the corrosion of the cleaning liquid to the graphite boat, so that the purposes of prolonging the service life of the graphite boat and reducing the production cost of enterprises are achieved. Chinese patent publication No. is CN202881381U, in 2013 No. 4 month 17, disclose a saving type graphite boat cleaning machine, through setting up the high-order washing tank and the low level washing tank of intercommunication each other, used liquid medicine can flow in the cell body of low level washing tank naturally according to self gravity in the high-order washing tank inside, when the low level washing tank washs the end and need take out the work, the diaphragm circulating pump at usable equipment top is taken out the liquid medicine to the high-order washing tank and is carried out reuse work many times, manufacturing cost has been practiced thrift. However, the greatest disadvantage of the method is that the acid liquor on the graphite boat can not be cleaned, the cleaning purpose is to remove the acid liquor, impurities and the like on the surface of the graphite boat, and the method is a little inverted. Chinese patent publication No. CN104399699A discloses a new graphite boat cleaning process in 2015, No. 3/11, the cleaning steps are as follows: soaking in hydrofluoric acid, soaking and rinsing in pure water, soaking in alkali liquor, soaking and rinsing in pure water, and drying. The cleaning process can clean the graphite boat in a short time, and the whole process is carried out in soaking, so that the impact on the graphite boat blades is avoided, and the service life of the graphite boat is prolonged. Need not to disassemble the graphite boat in whole cleaning process, avoided disassembling the damage that the process caused the graphite boat. Chinese patent publication No. CN106952805A, No. 7/14 in 2017, discloses a graphite boat cleaning process, which comprises the following steps: 1) dismantling the boat; 2) acid washing: washing the graphite boat by using a pickling solution, wherein the pickling solution is a mixed solution of hydrofluoric acid and hydrogen peroxide, the concentration of the hydrofluoric acid in the pickling solution is 30-50 vt%, and the molar ratio of HF to H2O2 in the pickling solution is 7-9: 1; 3) washing with water to neutrality; 4) drying; 5) loading and 6) saturation. The process can effectively reduce the generation of color difference sheets in the film coating process of solar cell production, thereby reducing the rework rate of the film coating process and effectively reducing the rework cost.
The equipment has simple design, low function and waste of liquid medicine, and the cleaning process has the defects of low productivity of 1, and 6 graphite boats can be cleaned by one graphite boat per day. 2. The concentration of the liquid medicine is not monitored in the pickling process, so that unclean cleaning is easy to occur; 3. the whole cleaning process needs manual intervention and manual blow-drying, and the full-automatic cleaning and drying cannot be realized; 4. after the multiple times of water washing, the liquid medicine is directly discharged, so that a large amount of pure water is consumed; 5. the operations such as manual boat lifting, manual blow-drying and the like are easy to cause safety accidents and the like.
Disclosure of Invention
The invention provides a full-automatic graphite boat cleaning device and a cleaning method thereof, which have high productivity and can adjust the number of groove bodies and the cleaning number per day according to actual needs, and aims to overcome the defects of low productivity, limited graphite boat cleaning quantity and manual intervention requirement in the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme:
a full-automatic graphite boat cleaning device comprises N1 acid washing tank groups, N2 flushing tanks, N3 water washing tank groups, N4 slow pulling tanks and N5 drying tanks; each pickling tank group comprises M1 pickling tanks; each water washing tank group comprises M2 water washing tanks; each pickling tank and each slow lifting tank are provided with a conductivity monitor; the pickling tank group, the flushing tank, the washing tank group, the slow lifting tank and the drying tank are connected in parallel; all pickling tanks are connected in series; all the rinsing tanks are connected in series; wherein N1 is more than N2, N1 is more than or equal to N3, N1 is more than N4, and N1 xM 1 is equal to N5.
Preferably, the device also comprises a manipulator for grabbing the graphite boat; the automation degree is high, the whole-course full-automatic cleaning of the equipment is realized, the manual intervention is not needed midway, and the boat is not needed to be manually lifted.
Preferably, a plurality of flushing nozzles are arranged in each flushing tank.
Preferably, each pickling tank group further comprises at least 2 pickling tank chemical liquid inlet ports, at least 1 pickling tank liquid level meter, and pickling tank overflow and liquid medicine discharge ports.
Preferably, each rinsing tank group further comprises at least 1 path of rinsing tank chemical liquid inlet port, at least 1 group of rinsing tank liquid level meter, and rinsing tank overflow and liquid medicine discharge ports.
A cleaning method of a full-automatic graphite boat cleaning device comprises the following steps:
(6-1) grabbing the graphite boat by using a manipulator, placing the graphite boat into an acid washing tank for acid washing, wherein each graphite boat needs to pass through each acid washing tank group in the acid washing process;
(6-2) grabbing the acid-washed graphite boat to a washing tank, and then washing;
(6-3) washing the graphite boat with water through each water washing tank group;
(6-4) removing metal ions on the surface of the graphite boat through a slow pulling groove;
(6-5) drying through a drying groove;
wherein the time interval for grabbing the graphite boat and placing the graphite boat into the pickling tank by using the manipulator is equal to the washing time of each graphite boat.
Preferably, the slow lifting groove adopts an industrial online water heater to realize real-time hot water feeding; the slow pulling tank body can increase the activity of metal ions by using hot water, effectively remove the metal ions, and effectively reduce the drying time of the graphite boat when the graphite boat is cleaned in a hot state.
Preferably, the drying tanks use dryers, and the temperature of each drying tank is not less than 150 ℃, and the gas is N2 or compressed air.
Preferably, 2 graphite boats are placed in each tank body, and an up-and-down stacking mode is adopted.
Therefore, the invention has the following beneficial effects: the invention has high capacity, can flexibly allocate the number of the groove bodies according to actual needs and adjust the number of the cleaning in each day; the automatic cleaning device has high automation degree, the equipment is fully automatically cleaned in the whole process, parameters are not required to be manually set in the midway, and the boat is not required to be manually lifted and the equipment is not required to be manually dried; conductivity monitors are arranged on each pickling tank and each slow lifting tank, so that the concentration of the liquid medicine is accurate, the graphite boat is cleaned cleanly, and the cleaning effect is good; the slow pulling tank body can increase the activity of metal ions by using hot water, effectively remove the metal ions, and effectively reduce the drying time of the graphite boat when the graphite boat is cleaned and is hot; meanwhile, the water-saving design is adopted, the slow lifting groove overflows to the water washing groove, the water washing groove overflows to the flushing groove, and water in the water washing groove group overflows to the water washing groove group in front from the water washing groove group at the rear part, so that the use amount of pure water can be reduced.
Drawings
FIG. 1 is a block diagram of an architecture of the present invention;
fig. 2 is a flow chart of the present invention.
In the figure: the pickling bath group 1, the rinsing bath 2, the rinsing bath group 3, the slow-pulling bath 5, the drying bath 6, the pickling bath 11 and the rinsing bath 31.
Detailed Description
The invention is further described in the following detailed description with reference to the drawings in which:
example 1
Embodiment 1 shown in fig. 1 is a full-automatic graphite boat cleaning device, which comprises 4 acid washing tank groups 1, 2 flushing tanks 2,2 washing tank groups 3, 2 slow lifting tanks 5, 12 drying tanks 6 and a manipulator for grabbing the graphite boat, wherein each washing tank group comprises 3 washing tanks 11; each washing tank group comprises 5 washing tanks 31; each pickling tank and each slow lifting tank are provided with a conductivity monitor; each flushing groove is internally provided with 30 flushing nozzles; each pickling tank group also comprises at least 3 pickling tank chemical liquid inlet ports, at least 1 pickling tank liquid level meter, and a pickling tank overflow and liquid medicine discharge port; each washing tank group also comprises at least 1 path of washing tank chemical liquid inlet port, at least 1 group of washing tank liquid level meter, and washing tank overflow and liquid medicine discharge ports; the chemicals added into the chemical liquid inlet of the 3-way pickling tank are HF, HCL and H2O; pure water is added into a chemical liquid inlet port of the 1-path rinsing bath; each pickling tank and each rinsing tank have a bubbling function; the bottom of each pickling tank has a heating function; the pickling tank group, the flushing tank, the washing tank group, the slow lifting tank and the drying tank are connected in parallel; all the pickling tanks are connected in series to form a large pickling tank group; all the rinsing tanks are connected in series to form a large rinsing tank group.
A cleaning method of a full-automatic graphite boat cleaning device is shown in figure 2 and comprises the following steps:
step 100, grabbing graphite boats by using a manipulator, and placing the graphite boats into a pickling tank for pickling, wherein each graphite boat needs to pass through each pickling tank group in the pickling process;
step 200, grabbing the acid-washed graphite boat to a washing tank, and then washing;
step 300, washing the graphite boat through each washing tank group;
step 400, removing metal ions on the surface of the graphite boat through a slow pulling groove; the slow pulling groove adopts an industrial online water heater to realize real-time hot water feeding, the hot water temperature is more than or equal to 70 ℃, and the hot water feeding amount is more than or equal to 500L/h;
step 500, drying through a drying groove; the drying tanks use a dryer, the temperature of each drying tank is more than or equal to 150 ℃, and the gas adopts N2;
wherein the time interval for grabbing the graphite boats and placing the graphite boats in the pickling tank by using the manipulator is equal to the washing time of each graphite boat; 2 graphite boats are placed in each tank body, and an up-and-down stacking mode is adopted.
The graphite boat is cleaned in a whole week, and 72 graphite boats can be cleaned every day.
Example 2
Embodiment 2 discloses a full-automatic graphite boat cleaning device, which comprises 3 pickling tank groups 1, 2 flushing tanks 2, 2 washing tank groups 3, 1 slow-pulling tank 5, 9 drying tanks 6 and a manipulator for grabbing graphite boats, wherein each pickling tank group comprises 3 pickling tanks 11; each washing tank group comprises 3 washing tanks 31; each pickling tank and each slow lifting tank are provided with a conductivity monitor; each flushing groove is internally provided with 35 flushing nozzles; each pickling tank group also comprises at least 2 pickling tank chemical liquid inlet ports, at least 1 pickling tank liquid level meter, and a pickling tank overflow and liquid medicine discharge port; each washing tank group also comprises at least 1 path of washing tank chemical liquid inlet port, at least 1 group of washing tank liquid level meter, and washing tank overflow and liquid medicine discharge ports; the chemicals added into the chemical liquid inlet port of the 2-way pickling tank are HF and H2O; pure water is added into a chemical liquid inlet port of the 1-path rinsing bath; each pickling tank and each rinsing tank have a bubbling function; the bottom of each pickling tank has a heating function; the pickling tank group, the flushing tank, the washing tank group, the slow lifting tank and the drying tank are connected in parallel; all the pickling tanks are connected in series to form a large pickling tank group; all the rinsing tanks are connected in series to form a large rinsing tank group.
A cleaning method of a full-automatic graphite boat cleaning device comprises the following steps:
step 100, detaching a graphite boat;
step 200, grabbing graphite boats by using a manipulator, and placing the graphite boats into a pickling tank for pickling, wherein each graphite boat needs to pass through each pickling tank group in the pickling process;
step 300, grabbing the acid-washed graphite boat to a washing tank, and then washing;
step 400, washing the graphite boat through each washing tank group;
step 500, removing metal ions on the surface of the graphite boat through a slow pulling groove; the slow pulling groove adopts an industrial online water heater to realize real-time hot water feeding, the temperature is more than or equal to 65 ℃, and the hot water feeding quantity is more than or equal to 400L/h;
step 600, drying through a drying groove; the drying tanks use a dryer, the temperature of each drying tank is more than or equal to 150 ℃, and the gas adopts compressed air;
wherein the time interval for grabbing the graphite boats and placing the graphite boats in the pickling tank by using the manipulator is equal to the washing time of each graphite boat; 2 graphite boats are placed in each tank body, and an up-and-down stacking mode is adopted.
The graphite boat cleaning method is characterized in that the graphite boat is disassembled for cleaning, and 54 graphite boats can be cleaned every day.
Example 3
Embodiment 3 discloses a full-automatic graphite boat cleaning device, which comprises 3 pickling tank groups 1, 2 flushing tanks 2, 3 washing tank groups 3, 1 slow-pulling tank 5, 6 drying tanks 6 and a manipulator for grabbing graphite boats, wherein each pickling tank group comprises 2 pickling tanks 11; each washing tank group comprises 2 washing tanks 31; each pickling tank and each slow lifting tank are provided with a conductivity monitor; each flushing groove is internally provided with 30 flushing nozzles; each pickling tank group also comprises at least 3 pickling tank chemical liquid inlet ports, at least 1 pickling tank liquid level meter, and a pickling tank overflow and liquid medicine discharge port; each washing tank group also comprises at least 1 path of washing tank chemical liquid inlet port, at least 1 group of washing tank liquid level meter, and washing tank overflow and liquid medicine discharge ports; the chemicals added into the chemical liquid inlet of the 3-way pickling tank are HF, HCL and H2O; pure water is added into a chemical liquid inlet port of the 1-path rinsing bath; each pickling tank and each rinsing tank have a bubbling function; the bottom of each pickling tank has a heating function; the pickling tank group, the flushing tank, the washing tank group, the slow lifting tank and the drying tank are connected in parallel; all the pickling tanks are connected in series to form a large pickling tank group; all the rinsing tanks are connected in series to form a large rinsing tank group.
A cleaning method of a full-automatic graphite boat cleaning device comprises the following steps:
step 100, detaching a graphite boat;
step 200, grabbing graphite boats by using a manipulator, and placing the graphite boats into a pickling tank for pickling, wherein each graphite boat needs to pass through each pickling tank group in the pickling process;
step 300, grabbing the acid-washed graphite boat to a washing tank, and then washing;
step 400, washing the graphite boat through each washing tank group;
step 500, removing metal ions on the surface of the graphite boat through a slow pulling groove; the slow pulling groove adopts an industrial online water heater to realize real-time hot water feeding, the temperature is more than or equal to 70 ℃, and the hot water feeding quantity is more than or equal to 250L/h;
step 600, drying through a drying groove; the drying tanks use a dryer, the temperature of each drying tank is more than or equal to 150 ℃, and the gas adopts compressed air;
wherein the time interval for grabbing the graphite boats and placing the graphite boats in the pickling tank by using the manipulator is equal to the washing time of each graphite boat; 2 graphite boats are placed in each tank body, and an up-and-down stacking mode is adopted.
The graphite boat cleaning method is characterized in that the graphite boat is disassembled for cleaning, and 30 graphite boats can be cleaned every day.
It should be understood that this example is for illustrative purposes only and is not intended to limit the scope of the present invention. Further, it should be understood that various changes or modifications of the present invention may be made by those skilled in the art after reading the teaching of the present invention, and such equivalents may fall within the scope of the present invention as defined in the appended claims.
Claims (9)
1. A full-automatic graphite boat cleaning device is characterized by comprising N1 pickling tank groups (1), N2 flushing tanks (2), N3 washing tank groups (3), N4 slow pulling tanks (5) and N5 drying tanks (6), wherein each pickling tank group comprises M1 pickling tanks (11); each water washing tank group comprises M2 water washing tanks (31); each pickling tank and each slow lifting tank are provided with a conductivity monitor; the pickling tank group, the flushing tank, the washing tank group, the slow lifting tank and the drying tank are connected in parallel; all pickling tanks are connected in series; all the rinsing tanks are connected in series; wherein N1 is more than N2, N1 is more than or equal to N3, N1 is more than N4, and N1 xM 1 is equal to N5.
2. The apparatus of claim 1, further comprising a robot for grasping the graphite boat.
3. The apparatus of claim 1, wherein each of the rinsing tanks has a plurality of rinsing nozzles.
4. The apparatus of claim 1, wherein each pickling tank set further comprises at least 2 pickling tank chemical inlet ports, at least 1 pickling tank level meter, and a pickling tank overflow and liquor discharge port.
5. The apparatus of claim 1, wherein each washing tank set further comprises at least 1 washing tank chemical inlet port, at least 1 washing tank liquid level meter, and at least 1 washing tank overflow and liquid medicine discharge port.
6. The cleaning method for the fully automatic graphite boat cleaning device according to claim 2, characterized by comprising the following steps:
(6-1) grabbing the graphite boat by using a manipulator, placing the graphite boat into an acid washing tank for acid washing, wherein each graphite boat needs to pass through each acid washing tank group in the acid washing process;
(6-2) grabbing the acid-washed graphite boat to a washing tank, and then washing;
(6-3) washing the graphite boat with water through each water washing tank group;
(6-4) removing metal ions on the surface of the graphite boat through a slow pulling groove;
(6-5) drying through a drying groove;
wherein the time interval for grabbing the graphite boat and placing the graphite boat into the pickling tank by using the manipulator is equal to the washing time of each graphite boat.
7. The cleaning method of the fully automatic graphite boat cleaning device according to claim 6, wherein the slow-pulling tank adopts an industrial on-line water heater to realize real-time hot water feeding.
8. The method for cleaning the graphite boat in accordance with claim 6, wherein the drying tank is a dryer, each drying tank has a temperature of 150 ℃ or higher, and the gas is N2 or compressed air.
9. The method as claimed in claim 6, wherein 2 graphite boats are placed in each tank, and stacked in an up-down manner.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112723361A (en) * | 2020-12-08 | 2021-04-30 | 福建南平三元循环技术有限公司 | Gradient washing system and method for silica gel production |
| CN113020084A (en) * | 2021-04-22 | 2021-06-25 | 通威太阳能(金堂)有限公司 | Graphite boat cleaning device and using method |
| CN114433541A (en) * | 2021-12-27 | 2022-05-06 | 张家港博佑光电科技有限公司 | Graphite boat cleaning process |
| CN115971145A (en) * | 2022-12-28 | 2023-04-18 | 无锡亚电智能装备有限公司 | Graphite boat cleaning equipment and cleaning method |
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| CN115971145B (en) * | 2022-12-28 | 2023-10-03 | 无锡亚电智能装备有限公司 | Graphite boat cleaning equipment and cleaning method |
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Application publication date: 20200929 |