CN111712471B - Glass substrate set and method for manufacturing same - Google Patents
Glass substrate set and method for manufacturing same Download PDFInfo
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- CN111712471B CN111712471B CN201980012992.0A CN201980012992A CN111712471B CN 111712471 B CN111712471 B CN 111712471B CN 201980012992 A CN201980012992 A CN 201980012992A CN 111712471 B CN111712471 B CN 111712471B
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- back surface
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- 239000011521 glass Substances 0.000 title claims abstract description 217
- 239000000758 substrate Substances 0.000 title claims abstract description 164
- 238000000034 method Methods 0.000 title claims description 31
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 238000011156 evaluation Methods 0.000 claims abstract description 57
- 238000000137 annealing Methods 0.000 description 23
- 238000001816 cooling Methods 0.000 description 16
- 239000010408 film Substances 0.000 description 12
- 239000010409 thin film Substances 0.000 description 12
- 238000003825 pressing Methods 0.000 description 11
- 238000005520 cutting process Methods 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000006060 molten glass Substances 0.000 description 4
- 238000007500 overflow downdraw method Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 238000003280 down draw process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000006124 Pilkington process Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002438 flame photometric detection Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B18/00—Shaping glass in contact with the surface of a liquid
- C03B18/02—Forming sheets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B25/00—Annealing glass products
- C03B25/04—Annealing glass products in a continuous way
- C03B25/10—Annealing glass products in a continuous way with vertical displacement of the glass products
- C03B25/12—Annealing glass products in a continuous way with vertical displacement of the glass products of glass sheets
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Liquid Crystal (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
A glass substrate group comprises a plurality of glass substrates (Gs), each of the plurality of glass substrates (Gs) has a rectangular shape having a first side (Ga) along a sheet drawing direction (X) and a second side (Gb) along a direction (Y) orthogonal to the sheet drawing direction (X), the first side (Ga) and the second side (Gb) have a length of 1000mm or more and a sheet thickness of 2.0mm or less, and when seven evaluation regions (A-G) are set at equal intervals and have the same size in the direction of the second side (Gb) for each of the plurality of glass substrates (Gs), the variation of the front-back surface deflection difference is 0.4mm or less in each of the seven evaluation regions (A-G).
Description
Technical Field
The present invention relates to a glass substrate set including a plurality of glass substrates and a method for manufacturing the same.
Background
The manufacturing process of a Flat Panel Display (FPD) such as a liquid crystal display includes a film forming process of forming a plurality of thin film patterns on a glass substrate (mother glass) by using a photolithography technique. These thin film patterns become more complex and dense with the high definition of FPDs. Therefore, high pattern formation accuracy is required when forming a thin film pattern on a glass substrate (see, for example, patent documents 1 and 2).
Prior art documents
Patent document
Patent document 1: japanese patent laid-open publication No. 2016-74582
Patent document 2: international publication No. 2017/150266
Disclosure of Invention
Problems to be solved by the invention
The accuracy of formation of the thin film pattern is sometimes evaluated by the total pitch of the thin film patterns (for example, the pattern of the gate electrode) formed on the glass substrate. The total pitch is an index for determining whether or not a thin film pattern is formed according to design, and is managed by a difference between a design distance and a measured distance between two points determined in advance, for example, by adding a management mark.
The measurement result of the total pitch is sometimes fed back to the exposure apparatus and the exposure error is corrected. In this case, if the total pitch of each glass substrate included in the glass substrate group greatly varies, it is difficult to correct the exposure error. If the exposure error cannot be corrected, the aperture ratio of the pixels may decrease, light leakage between pixels may occur, and the display quality of the FPD may significantly deteriorate.
The invention aims to reduce the variation of the total pitch in a glass substrate group comprising a plurality of glass substrates.
Means for solving the problems
As a result of intensive studies, the inventors of the present application have found that, for each glass substrate included in a group of glass substrates, a local variation in the front-back surface deflection difference is one of the causes of variation in the total pitch. In detail, the glass substrate is generally formed by a down-draw method such as an overflow down-draw method or a float method, but the shape in a direction perpendicular to the sheet drawing direction is likely to change during the forming process for a long time. Therefore, when the glass substrate included in the glass substrate group is divided into a plurality of regions in the direction orthogonal to the plate pulling direction and the difference in front and back surface deflection of each region is compared for each glass substrate, the difference in front and back surface deflection tends to vary in the corresponding same region. In the film forming step, since exposure is performed in a state where the glass substrate is placed on a flat plate (flat surface), if the difference in front and back surface deflection varies in this way, the microscopic shape on the flat plate varies irregularly for each glass substrate, which becomes a cause of variation in the total pitch. Therefore, from the viewpoint of reducing the variation in the total pitch of the glass substrate group, it is desirable to reduce the variation (variation) in the front-back surface deflection difference of each glass substrate within the glass substrate group.
That is, the present invention, which has been made to solve the above-mentioned problems, is a glass substrate group including a plurality of glass substrates, wherein each of the plurality of glass substrates has a rectangular shape having a first side along a plate pulling direction and a second side along a direction orthogonal to the plate pulling direction, and wherein the first side and the second side have a length of 1000mm or more and a plate thickness of 2.0mm or less, and wherein, when seven evaluation regions having the same size and an equal interval are set in positions in the direction of the second side for the plurality of glass substrates, and surface-back surface deflection differences are measured in the seven evaluation regions, the amount of change in the surface-back surface deflection difference between the plurality of glass substrates in the seven evaluation regions is 0.4mm or less. According to this configuration, in seven evaluation regions at equal intervals in the direction of the second side, the variation amounts of the front-back surface deflection difference (the difference between the maximum value and the minimum value of the front-back surface deflection difference in the glass substrate group) are all 0.4mm or less, and therefore the variation in the front-back surface deflection difference per glass substrate is suppressed to be small. Thus, in a glass substrate group including a plurality of glass substrates, variation in the total pitch can be reduced. In addition, when the variation of the total pitch of the glass substrate group is reduced by reducing the deflection (difference in front and back surface deflection) of the glass substrate, the frequency of repairing the equipment is increased to improve the deterioration of the difference in deflection due to the consumption of the manufacturing equipment such as the molded body, thereby increasing the manufacturing cost. In the present invention, since the variation in the total pitch of the glass substrate group is reduced by setting the variation amount of the front-back surface deflection difference to 0.4mm or less, the deflection of the glass substrate (front-back surface deflection difference) can be allowed to some extent, and an increase in the manufacturing cost can be suppressed. Here, the "sheet drawing direction" refers to a direction in which sheet drawing is performed when the glass substrate is formed. The "first side along the board pulling direction" refers not only to a case of being geometrically parallel to the board pulling direction, but also includes a direction considered to be substantially parallel. The "second side in the direction orthogonal to the board pulling direction" includes not only a direction geometrically orthogonal to the board pulling direction but also a direction considered to be substantially orthogonal. The "glass substrate group" is a group of products manufactured under the same conditions in a narrow sense, but is not limited thereto, and is a group of products of the same kind whose quality is managed by the same manager in a broad sense.
In the above-described configuration, it is preferable that, in a case where the average value of the front-back surface deflection differences is calculated for each of the seven evaluation regions from the front-back surface deflection differences of the seven evaluation regions, a difference between a maximum value of the average values of the seven evaluation regions and a minimum value of the average values of the seven evaluation regions is 0.4mm or more. In this way, since each glass substrate included in the glass substrate group has appropriate deflection, the close contact state with the flat plate in the film forming process can be alleviated. Therefore, when the glass substrate is separated from the flat plate after the film formation step is completed, peeling electrification that may cause breakage of the thin film pattern is less likely to occur.
In the above configuration, the absolute value of each of the maximum value and the minimum value is preferably 0.4mm or less. That is, even if the value of the front-back surface deflection difference itself becomes excessively large, the glass substrate may be displaced from the plate during exposure in the film formation process, and it may be difficult to correct the exposure error. Thus, in the seven evaluation regions, the absolute values of the surface-back surface deflection difference are preferably all within the above numerical ranges.
The present invention, which has been made to solve the above problems, is a method for manufacturing a glass substrate group including a plurality of glass substrates, wherein each of the plurality of glass substrates has a rectangular shape having a first side along a plate pulling direction and a second side along a direction orthogonal to the plate pulling direction, and wherein the first side and the second side have a length of 1000mm or more and a plate thickness of 2.0mm or less, the method comprising: setting a plurality of evaluation regions having different positions in the direction of the second side for the plurality of glass substrates, and measuring the front and back surface deflection differences of the plurality of evaluation regions, respectively; obtaining the variation of the front-back surface deflection difference between the plurality of glass substrates for each of the plurality of evaluation regions; and determining whether the plurality of glass substrates are qualified or not based on the variation of the surface-back surface deflection difference among the plurality of glass substrates. According to this configuration, since the quality of the plurality of glass substrates is determined based on the amount of change in the front-back surface deflection difference between the plurality of glass substrates, the variation in the front-back surface deflection difference for each of the plurality of glass substrates determined to be quality is suppressed to be small. Therefore, in the glass substrate group including the plurality of glass substrates determined as being acceptable, the variation in the total pitch can be reduced.
Effects of the invention
According to the present invention, in a glass substrate group including a plurality of glass substrates, variation in the total pitch can be reduced.
Drawings
Fig. 1 is a side view showing a glass substrate set according to a first embodiment.
Fig. 2 is a side view showing a glass substrate set according to a second embodiment.
Fig. 3 is a plan view showing glass substrates included in a glass substrate group in which seven evaluation regions are set.
Fig. 4 is a side view for explaining a method of measuring the front-back surface deflection difference.
Fig. 5 is a side view for explaining a method of manufacturing the glass substrate set.
Fig. 6 is a graph showing the measurement results of the front-back surface deflection difference in seven evaluation regions of the glass substrate group of the comparative example.
Fig. 7 is a graph showing the measurement results of the front-back surface deflection difference in seven evaluation regions of the glass substrate group of the example.
Detailed Description
Hereinafter, embodiments of the glass substrate set will be described based on the drawings.
As shown in fig. 1, the glass substrate group Gg of the first embodiment is composed of a plurality of glass substrates Gs stacked in a vertical posture (preferably, an inclined posture of 45 ° to 80 ° with respect to the horizontal direction, and more preferably, 60 ° to 75 °) on one vertical tray (pallet) 1.
The tray 1 includes a bottom surface support portion 1a that supports the bottom surface of a glass substrate group Gg composed of a laminate of glass substrates Gs in a vertical posture, and a back surface support portion 1b that supports the back surface of the glass substrate group Gg.
The surface (surface on the back surface side) on the back surface support portion 1b side of each glass substrate Gs included in the glass substrate group Gg serves as a guaranteed surface for forming a thin film pattern in the film forming step. This is to prevent the suction pad from directly contacting the securing surface when the glass substrate Gs is taken out from the tray 1.
Although not shown in the drawings, for example, the glass substrate group Gg is fixed to the tray 1 by disposing a pressing plate at the forefront of the glass substrate group Gg, disposing pressing rods that extend to both sides in the width direction (for example, the horizontal direction) of the glass substrate group Gg on the pressing plate, and fastening both ends of the pressing rods by fastening members so as to be drawn in toward the back surface supporting portion 1b side. In order to restrict the movement of the glass substrate group Gg in the width direction, a pressing member that presses the side surface of the glass substrate group Gg may be disposed. The method of fixing the glass substrate group Gg and the tray 1 is not particularly limited, and any fixing method such as tape fixing may be employed.
As shown in fig. 2, the glass substrate group Gg according to the second embodiment is composed of a plurality of glass substrates Gs stacked in a lateral direction (preferably 0 ° (horizontal orientation) to 30 °, more preferably 0 ° to 15 °) on one horizontal tray 2.
The tray 2 includes a bottom surface support portion 2a that supports the bottom surface of a glass substrate group Gg composed of a laminate of glass substrates Gs in a lateral posture.
The surface (lower surface) of each glass substrate Gs included in the glass substrate group Gg on the bottom surface support portion 2a side serves as a guaranteed surface for forming a thin film pattern in the film forming step. This is to prevent the suction pad from directly contacting the securing surface when the glass substrate Gs is taken out from the tray 1.
Although not shown in the drawings, for example, the glass substrate group Gg is fixed to the tray 2 by disposing a pressing plate at the foremost surface (uppermost surface) of the glass substrate group Gg, disposing pressing rods extending to both sides of the glass substrate group Gg on the pressing plate, and fastening both end portions of the pressing rods by fastening members so as to be drawn toward the bottom surface support portion 2a side. In order to restrict the lateral displacement of the glass substrate group Gg, a pressing member that presses the side surface of the glass substrate group Gg may be disposed. The plurality of pressing members are arranged in a scattered manner so as to surround the four sides of the glass substrate group Gg, for example. The method of fixing the glass substrate group Gg and the tray 2 is not particularly limited, and any fixing method such as tape fixing may be employed.
Here, in the case of the glass substrate group Gg of the first and second embodiments, since the plurality of glass substrates Gs are stacked, it is preferable to sandwich a protective sheet (not shown) such as paper (mount paper) or a foamed resin sheet between the glass substrates Gs.
The plurality of glass substrates Gs included in the glass substrate group Gg are produced by a known forming method such as an overflow down-draw method, a down-draw method such as a slit down-draw method, or a float method. In the present embodiment, the material is manufactured by an overflow down-draw method.
Each of the plurality of glass substrates Gs included in the glass substrate group Gg has a rectangular shape having a first side Ga along the plate drawing direction X and a second side Gb along the direction Y orthogonal to the plate drawing direction X, which are obtained by the above-described forming method, and is used as a glass substrate for an FPD, for example. The length of the first side Ga and the second side Gb is 1000mm or more, preferably 1500mm or more. The lengths of the first side Ga and the second side Gb are preferably 4000mm or less. The thickness is 2.0mm or less, preferably 0.7mm or less. The plate thickness is preferably 0.3mm or more.
As shown in fig. 3, when seven evaluation regions A, B, C, D, E, F, G are set at equal intervals in the position in the direction of the second side Gb for each of the plurality of glass substrates Gs, the amount of change in the front-back surface deflection difference of the plurality of glass substrates Gs (glass substrate group Gg) is 0.4mm or less in any of the seven evaluation regions a to G. If the seven evaluation regions a to G include a region in which the amount of change in the front-back surface deflection difference of the plurality of glass substrates Gs exceeds 0.4mm, the variation in the total pitch becomes large, and film formation failure due to exposure failure is likely to occur in the film formation process. On the other hand, in any of the seven evaluation regions a to G, if the amount of change in the front-back surface deflection difference of the plurality of glass substrates Gs is 0.4mm or less, the variation in the total pitch becomes small, and an appropriate thin film pattern can be formed with difficulty in causing an exposure failure in the film formation process. The amount of change in the front-back surface deflection difference is preferably 0.3mm or less, more preferably 0.2mm or less.
In addition, when the average value of the front-back surface deflection differences is calculated for each of the seven evaluation regions, the difference between the value in which the average value of the front-back surface deflection differences is the largest in the seven evaluation regions a to G and the value in which the average value of the front-back surface deflection differences is the smallest in the seven evaluation regions a to G is preferably 0.4mm or more. The difference between the maximum value and the minimum value is more preferably 0.5mm or more. The absolute value of the maximum value and the absolute value of the minimum value are preferably 0.3mm or less, respectively.
Here, the amount of change in the front-back surface deflection difference of the plurality of glass substrates Gs is measured by the following procedure.
(1) First, an arbitrary 5 glass substrates Gs are selected from the glass substrate group Gg.
(2) Seven evaluation areas a to G are set for each selected glass substrate Gs. The evaluation areas A to G are set in effective areas where thin film patterns are formed in the film forming process. Each of the evaluation regions A to G was a rectangle having a width direction length of 370mm and a plate pulling direction length of 470mm, which were perpendicular to the plate pulling direction. The evaluation regions a to G are provided at equal intervals (interval Δ I) in the width direction. Then, in each of the evaluation areas a to G, a glass sheet Gp having the same size as the evaluation area is selected, and 7 glass sheets Gp are prepared for each glass substrate Gs. In the case where the width of the effective region is small and the seven evaluation regions a to G are not provided in a row along the width direction, the seven evaluation regions a to G are provided in a staggered manner so as to form two rows along the width direction as shown in fig. 3.
(3) The difference in front and back surface deflection of each glass sheet (35 glass sheets in total) Gp was measured. As shown in fig. 4, the front-back surface deflection difference is obtained by measuring a first deflection W1 when one main surface (for example, a guaranteed surface) of the glass sheet Gp is set to an upper side, and a second deflection W2 when the other main surface (for example, a non-guaranteed surface on the opposite side of the guaranteed surface) of the glass sheet Gp is set to an upper side, and is determined by the difference (W1-W2) between the first deflection W1 and the second deflection W2. When the deflection of the glass sheet Gp is measured, both ends of the glass sheet Gp in the short-side direction, which are formed to be 370mm, are supported at a support span L of 350 mm.
(4) In each of the evaluation regions a to G in the width direction, the minimum value and the maximum value of the front-back surface deflection difference were obtained, and the difference was defined as the amount of change in the front-back surface deflection difference.
The difference between the maximum value of the average values of the seven evaluation regions a to G and the minimum value of the average values of the seven evaluation regions a to G is calculated by calculating an average value for each of the seven evaluation regions a to G from the front-back surface deflection difference measured in the above-described steps (1) to (3), and calculating the maximum value and the minimum value of the average values from the difference.
Here, the glass substrate Gs is irradiated with light from a light source (for example, a xenon lamp) in a plate drawing direction in a darkroom, for example, while adjusting the angle of the glass substrate Gs, and the transmitted light is projected onto a screen, whereby a striped fringe pattern can be observed. Therefore, even in the state of the glass substrate Gs after molding, the plate drawing direction at the time of molding can be determined.
Next, a method for manufacturing the glass substrate group Gg having the above configuration will be described.
As shown in fig. 5, the manufacturing apparatus 10 for a glass substrate set is used in the present manufacturing method. The manufacturing apparatus 10 is an apparatus for continuously forming a glass ribbon Gr, and includes a forming furnace 11 for forming the glass ribbon Gr, an annealing furnace 12 for annealing (annealing) the glass ribbon Gr, a cooling zone 13 for cooling the glass ribbon Gr to a temperature near room temperature, and a pair of rollers 14 provided in the forming furnace 11, the annealing furnace 12, and the cooling zone 13 in a plurality of stages from top to bottom.
A forming body 15 for forming a glass ribbon Gr from the molten glass Gm by the overflow downdraw method is disposed in the internal space of the forming furnace 11. The molten glass Gm supplied to the forming body 15 overflows from the groove portion formed in the top portion 15a of the forming body 15, and the overflowing molten glass Gm merges at the lower end along both side surfaces 15b having a wedge-shaped cross section of the forming body 15, thereby continuously forming a sheet-like glass ribbon Gr. The glass ribbon Gr to be formed is in a vertical posture (preferably a vertical posture), and the X direction is a sheet drawing direction.
The internal space of the annealing furnace 12 has a predetermined temperature gradient in the downward direction. The glass ribbon Gr having the vertical posture is annealed so that the temperature thereof becomes lower as it moves downward in the internal space of the annealing furnace 12. The internal deformation of the glass ribbon Gr is reduced by annealing. The temperature gradient in the internal space of the annealing furnace 12 can be adjusted by a temperature adjusting device such as a heating device provided on the inner surface of the annealing furnace 12, for example.
The plurality of roller pairs 14 nip side end portions on both sides of the glass ribbon Gr in the vertical posture from both sides of the front and back surfaces. In the internal space of the lehr 12, the plurality of roller pairs 14 may include a roller pair 14 that does not pinch the side end portion of the glass ribbon Gr. In other words, the opposed gap between the roller pairs 14 may be made larger than the thickness of the side end portion of the glass ribbon Gr, and the glass ribbon Gr may be passed between the roller pairs 14. In the present embodiment, each of the rollers constituting the pair of rollers 14 opposed to each other with the glass ribbon Gr interposed therebetween is constituted by a double support roller having a rotation shaft extending outside the furnace.
In the present embodiment, the outside of the wall portion X1 divided into the shape furnace 11, the annealing furnace 12, and the cooling zone 13 is surrounded by an outer enclosure (for example, a house disclosed in patent document 2) X2. In the space between the outer enclosure X2 and the wall portion X1, partitions (for example, floor surfaces of floors of a house) X3 and X4 are provided at a position corresponding to the upper end portion of the cooling area 13 and a position corresponding to the lower end portion of the cooling area 13, respectively. The space between the outer enclosure X2 and the wall X1 is divided into a room R1 surrounding the annealing furnace 12 and a room R2 surrounding the cooling zone 13 by the partitions X3 and X4.
As shown in fig. 5, the manufacturing apparatus 10 includes a cutting device 16 at a position below the cooling zone 13. The cutting device 16 is configured to cut the glass ribbon Gr in a vertical posture at every predetermined length in the width direction, and sequentially cut the glass substrates Gs from the glass ribbon Gr. Here, the width direction is a direction orthogonal to the longitudinal direction (sheet drawing direction) of the glass ribbon Gr, and substantially coincides with the horizontal direction in the present embodiment.
The cutting device 16 includes: a circular cutter (not shown) that travels on one main surface of the glass ribbon Gr in a vertical posture lowered from the cooling zone 13 to form a scribe line S along the width direction of the glass ribbon Gr; a contact portion 17 supported from the other main surface side in a region where the scribing line S is formed; and a holding unit 18 that performs an operation (an operation in the a direction) for applying a bending stress to the scribe line S and its vicinity while holding the glass ribbon Gr at a portion corresponding to the glass substrate Gs to be cut.
The circular cutter is configured to form a scribe line S over the entire width or a part of the glass ribbon Gr while following the descending glass ribbon Gr and descending. In the present embodiment, the scribe line S is also formed at the side end portion including the ear portion having a relatively large thickness, but the scribe line S may not be formed at the side end portion. The scribe line S may be formed by laser irradiation or the like. In addition, since the side end portion including the ear portion is cut and removed in the subsequent process, the ear portion is not present in the state of the glass substrate Gs.
The contact portion 17 is formed of a plate-like body (flat plate) having a flat surface that contacts the entire region or a part of the width direction of the glass ribbon Gr while following the descending glass ribbon Gr and descending. The contact surface of the contact portion 17 may be a curved surface curved in the width direction.
The holding portion 18 is constituted by a clip that sandwiches the side end portions of the glass ribbon Gr on both sides in the width direction from both the front and back surfaces. The plurality of holding portions 18 are provided at intervals in the longitudinal direction of the glass ribbon Gr at the side end portions on both sides in the width direction of the glass ribbon Gr. All of the plurality of holding portions 18 provided at one side end portion are held by the same arm portion (not shown). Similarly, all of the plurality of holding portions 18 provided at the other side end portion are held by the same arm portion (not shown). By the movement of each arm, the plurality of holding portions 18 descend following the descending glass ribbon Gr, and perform an operation (an operation in the a direction) for bending the glass ribbon Gr at the fulcrum of the contact portion 17. Thereby, bending stress is applied to the scribing line S and the vicinity thereof, and the glass ribbon Gr is cut in the width direction along the scribing line S. As a result of this cutting, a portion corresponding to the glass substrate Gs is cut out from the glass ribbon Gr. By repeating such a cutting (severing) operation, a plurality of glass substrates Gs included in the glass substrate group Gg are produced. The holding portion 18 is not limited to the holding method of the clamping, and may be configured to hold one of the main surfaces of the glass ribbon Gr by suction, for example.
The manufactured glass substrate Gs1 is a glass original plate (mother glass) from which one or more product glass substrates are picked, and a plurality of FPDs are manufactured from one glass original plate by collectively forming a thin film pattern at a position corresponding to each product glass substrate in a film forming process including an exposure process.
Here, by appropriately annealing the glass ribbon Gr in the annealing step performed by the annealing furnace 12 described above, predetermined shape quality can be obtained in the glass ribbon Gr and the glass substrate Gs extracted from the glass ribbon Gr. At this time, if the ambient temperature of the glass ribbon Gr changes with time within the temperature range of the annealing process, the shape quality of the glass ribbon Gr (the glass substrate Gs) is affected. Therefore, the temperature in the annealing furnace 12 is kept constant by suppressing the variation in the pressure difference between the room R1 surrounding the annealing furnace 12 and the cooling zone 13 (the internal space of the cooling zone 13 partitioned by the wall portion X1). As a result, the amount of change in the front-back surface deflection difference of the glass substrate group Gg can be significantly reduced.
Specifically, in the comparative example in which the temperature control in the annealing furnace 12 is insufficient, as shown in fig. 6, seven regions a to G include regions in which the amount of change in the front-back surface deflection difference of the glass substrate group Gg exceeds 0.4 mm. At this time, the fluctuation range of the differential pressure between the room R1 surrounding the annealing furnace 12 and the cooling zone 13 changes from 3Pa to 5 Pa. In contrast, in the example in which the temperature control in the annealing furnace 12 is sufficiently performed by suppressing the variation in the differential pressure between the room R1 surrounding the annealing furnace 12 and the cooling zone 13 as described above, the amount of change in the front-back surface deflection difference of the glass substrate group Gg is reduced to 0.4mm or less in any of the seven evaluation zones a to G, as shown in fig. 7. At this time, the fluctuation range of the differential pressure between the room R1 surrounding the annealing furnace 12 and the cooling zone 13 is changed from 0.5Pa to 2 Pa. The fluctuation range of the differential pressure is a difference between the maximum value and the minimum value of the differential pressure between the room R1 surrounding the lehr 12 and the cooling zone 13 during the production of the glass substrate group Gg.
In the example of fig. 7, the amount of change in the front-back surface deflection difference of the glass substrate group Gg was 0.1mm or less in any of the seven evaluation regions a to G (region a: 0.1mm, region B: 0.1mm, region C: 0.1mm, region D: 0.1mm, region E: 0.0mm, region F: 0.0mm, region G: 0.1 mm). The maximum value among the average values of the front and back surface deflection differences of the seven evaluation regions A to G was 0.23mm, the minimum value among the average values of the front and back surface deflection differences of the seven evaluation regions A to G was-0.2 mm, and the difference between the maximum value and the minimum value was 0.43 mm. Of course, the results of fig. 7 are merely examples, and are not limited to these results.
The manufacturing method of the present embodiment preferably includes the steps of: setting a plurality of evaluation regions having different positions in the direction of the second side for the plurality of glass substrates, and measuring the front and back surface deflection differences of the plurality of evaluation regions, respectively; obtaining the variation of the front-back surface deflection difference between the plurality of glass substrates for each of the plurality of evaluation regions; and determining whether the plurality of glass substrates (glass substrate group) are qualified or not based on the variation of the front-back surface deflection difference among the plurality of glass substrates. By the steps (1) to (5), the front-back surface deflection differences of the plurality of evaluation regions can be measured, and the amount of change in the front-back surface deflection differences between the plurality of glass substrates can be determined. In this case, in the above (1), the number of the arbitrary glass substrates Gs selected from the glass substrate group Gg may be, for example, 3 to 10. In this case, the glass substrate Gs cut by cleaving may be picked up at regular time intervals (for example, every 0.5 to 12 hours). The evaluation areas a to G are not limited to seven, and may be, for example, 3 to 10. The length of each evaluation region in the width direction is not limited to 370mm, and may be, for example, 300 to 600mm, and the length in the plate pulling direction is not limited to 470mm, and may be, for example, 300 to 700 mm. The support span L is not limited to 350mm, and may be, for example, 200 to 500 mm.
The determination of pass or fail is preferably determined to be pass when the amount of change in the front-back surface deflection difference is 0.4mm or less, more preferably 0.3mm or less, and most preferably 0.2mm or less. Wherein the first deflection W1 and the second deflection W2 increase as the support span L becomes longer. Therefore, when the support span L is not 350mm, it is sufficient to determine the pass or fail based on the difference ((W1-W2). times.350/L) in front-back surface deflection at the support span L of 350 mm. Alternatively, when the support span L is not 350mm, it is determined as being acceptable when the variation of the front-back surface deflection difference is not more than (0.4 × L/350) mm, more preferably not more than (0.3 × L/350) mm, and most preferably not more than (0.2 × L/350) mm.
The present invention is not limited to the above-described embodiments, and is not limited to the above-described operational effects. The present invention can be variously modified within a scope not departing from the gist of the present invention.
In the above embodiment, the case of scribing and cutting the glass ribbon Gr has been described, but other cutting methods such as laser cutting and laser fusing may be used for cutting the glass ribbon Gr and/or the glass substrate Gs.
Description of reference numerals:
1. 2 tray
10 manufacturing device for glass substrate set
11 forming furnace
12 annealing furnace
13 cooling zone
14 roller pair
15 shaped body
16 cutting device
17 contact part
18 holding part
Evaluation region of A to G
Gg glass substrate group
Gs glass substrate
Ga first edge (edge along plate pulling direction)
Gb second side (side along a direction orthogonal to the sheet pulling direction)
Gp glass sheet
Gm molten glass
A Gr glass ribbon.
Claims (4)
1. A glass substrate set includes a plurality of glass substrates,
the set of glass substrates is characterized in that,
each of the plurality of glass substrates has a rectangular shape having a first side along a sheet drawing direction and a second side along a direction orthogonal to the sheet drawing direction, and the first side and the second side each have a length of 1000mm or more and a sheet thickness of 2.0mm or less,
when seven evaluation regions having the same size and being equally spaced in the direction of the second side are set for the plurality of glass substrates, and the front and back surface deflection differences of the seven evaluation regions are measured, the amounts of change in the front and back surface deflection differences among the plurality of glass substrates are all 0.4mm or less in the seven evaluation regions.
2. The glass substrate set according to claim 1,
in the case where an average value of the surface-back surface deflection differences is calculated for each of the seven evaluation regions from the surface-back surface deflection differences of the seven evaluation regions, a difference between a maximum value of the average values of the seven evaluation regions and a minimum value of the average values of the seven evaluation regions is 0.4mm or more.
3. The glass substrate set according to claim 2,
the absolute value of each of the maximum value and the minimum value is 0.3mm or less.
4. A method for manufacturing a glass substrate group including a plurality of glass substrates,
the method for manufacturing a glass substrate set is characterized in that,
each of the plurality of glass substrates has a rectangular shape having a first side along a sheet drawing direction and a second side along a direction orthogonal to the sheet drawing direction, and the first side and the second side each have a length of 1000mm or more and a sheet thickness of 2.0mm or less,
the method for manufacturing the glass substrate group comprises the following steps:
setting a plurality of evaluation regions having different positions in the direction of the second side for the plurality of glass substrates, and measuring differences in front and back surface deflection in each of the plurality of evaluation regions;
obtaining a variation of a front-back surface deflection difference between the plurality of glass substrates for each of the plurality of evaluation regions; and
and judging whether the plurality of glass substrates are qualified or not based on the variation of the surface-back surface deflection difference among the plurality of glass substrates.
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| Application Number | Priority Date | Filing Date | Title |
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| JP2018022919A JP6902210B2 (en) | 2018-02-13 | 2018-02-13 | Glass substrate group and its manufacturing method |
| JP2018-022919 | 2018-02-13 | ||
| PCT/JP2019/002118 WO2019159623A1 (en) | 2018-02-13 | 2019-01-23 | Group of glass substrates, and method for producing same |
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| CN111712471A CN111712471A (en) | 2020-09-25 |
| CN111712471B true CN111712471B (en) | 2022-05-17 |
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| JP (1) | JP6902210B2 (en) |
| KR (1) | KR102638514B1 (en) |
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| JP2022053027A (en) | 2020-09-24 | 2022-04-05 | 日本電気硝子株式会社 | Glass substrate, and production method of glass substrate |
| CN116368104A (en) * | 2020-11-04 | 2023-06-30 | 日本电气硝子株式会社 | Glass substrate and method for manufacturing electronic device |
| CN116529217A (en) * | 2020-11-20 | 2023-08-01 | 日本电气硝子株式会社 | Method for manufacturing electronic device and glass plate set |
| WO2024117002A1 (en) * | 2022-12-01 | 2024-06-06 | 日本電気硝子株式会社 | Glass sheet, production method for glass sheet, and production device for glass sheet |
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| Publication number | Publication date |
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| JP6902210B2 (en) | 2021-07-14 |
| WO2019159623A1 (en) | 2019-08-22 |
| KR20200119780A (en) | 2020-10-20 |
| KR102638514B1 (en) | 2024-02-20 |
| CN111712471A (en) | 2020-09-25 |
| JP2019137587A (en) | 2019-08-22 |
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