Disclosure of Invention
The invention provides a high-density SiBCN ceramic material and a preparation method thereof, aiming at solving the problems of low density, small size and low production efficiency of the SiBCN ceramic material prepared by the existing mechanical alloying-hot pressing sintering method.
A high-density SiBCN ceramic material is prepared from silicon powder of cubic system, graphite powder and hexagonal boron nitride powder;
the molar ratio of Si in the silicon powder of the cubic system to C in the graphite powder is 1 (0.05-2); the molar ratio of Si in the cubic silicon powder to B in the hexagonal boron nitride powder is 1 (0.5-2);
the grain diameter of the silicon powder of the cubic system is 1-50 mu m; the particle size of the graphite powder is 1-10 mu m; the grain diameter of the hexagonal boron nitride powder is 1-10 μm.
A preparation method of a high-density SiBCN ceramic material comprises the following steps:
1. weighing cubic silicon powder, graphite powder and hexagonal boron nitride powder;
the molar ratio of Si in the silicon powder of the cubic system to C in the graphite powder is 1 (0.05-2); the molar ratio of Si in the cubic silicon powder to B in the hexagonal boron nitride powder is 1 (0.5-2);
the grain size of the silicon powder of the cubic system is 1-50 mu m; the particle size of the graphite powder is 1-10 mu m; the particle size of the hexagonal boron nitride powder is 1-10 mu m;
2. putting the weighed cubic silicon powder, graphite powder and hexagonal boron nitride powder into a ball milling tank, and carrying out ball milling for 1-50 h under the conditions of argon atmosphere, the diameter of a milling ball of 3-10 mm and the mass ratio of ball materials of (5-100): 1 to obtain amorphous SiBCN powder;
3. under the conditions that the sintering temperature is 1500-1700 ℃ and the sintering pressure is 20-80 MPa, carrying out hot-pressing pre-sintering on the amorphous SiBCN powder for 10-60 min to obtain an amorphous/nanocrystalline silicon boron carbon nitrogen ceramic blank;
4. polishing the upper surface and the lower surface of an amorphous/nanocrystalline silicon boron carbon nitrogen ceramic blank, cleaning and drying to obtain a pretreated silicon boron carbon nitrogen ceramic blank, welding and sealing one or more pretreated silicon boron carbon nitrogen ceramic blanks into a hot isostatic pressing package under a vacuum environment to obtain a packaged ceramic blank, carrying out hot isostatic pressing sintering on the packaged ceramic blank for 10-60 min under the conditions that the sintering temperature is 1700-2000 ℃ and the sintering pressure is 150-190 MPa to obtain a packaged ceramic blank after hot isostatic pressing, removing the hot isostatic pressing package, and obtaining the high-density SiBCN ceramic material.
The beneficial effects of the invention are:
1. the high-density SiBCN ceramic material has low raw material cost and is easily and directly available from the market.
2. The hot isostatic pressing technology integrates the advantages of hot pressing and isostatic pressing, and can simultaneously apply high temperature (the highest temperature can be applied in the ceramic sintering process)Up to 2000 ℃ and equally high pressures (up to 200 MPa). The invention adopts the combination of the hot isostatic pressing sintering technology and the mechanical alloying technology to prepare the high-density SiBCN ceramic material, and solves the problems that the prior mechanical alloying-hot pressing sintering method for preparing the SiBCN ceramic material has low relative density (85 percent) and small size
The production efficiency is low. The density of the SiBCN ceramic material sintered by the hot isostatic pressing technology can reach more than 96 percent of the theoretical density, and the maximum size reaches
At present, the SiBCN ceramics with the same size of five blocks can be obtained at most by single sintering, the application of the practical engineering of the SiBCN ceramics can be met, the sintering efficiency of the SiBCN ceramics is obviously improved, the production cost is reduced, the subsequent machining can be effectively reduced by adopting the hot isostatic pressing near-net forming technology, and the cost is favorably reduced.
When preparing Si blocks with high density simultaneously 2 BC 3 When the N ceramic material is used, the density is 2.74g/cm according to analysis and test 3 ~2.83g/cm 3 Hardness of 10.80-11.02 GPa, bending strength of 404.0-471.5 MPa, elastic modulus of 300.2-311.8 GPa, and fracture toughness of 3.52 MPa-m 1/2 ~5.13MPa·m 1/2 Mechanical property far superior to that of Si prepared by mechanical alloying-hot pressing sintering 2 BC 3 N ceramic material.
3. The high-density SiBCN ceramic material has large size and the maximum size reaches
And the SiBCN ceramic material with five block sizes can be prepared at the same time by one-time sintering at present, which cannot be obtained by the prior preparation method and can meet the application requirements of certain special parts in aviation and aerospace. The high-density SiBCN ceramic material obtained by the invention not only has good mechanical property, but also has good processability, and can be processed by conventional processing means such as turning, milling, grinding and the likeTherefore, the method can be practically applied to high-temperature structural components.
Detailed Description
The technical solution of the present invention is not limited to the specific embodiments listed below, and includes any combination of the specific embodiments.
The first embodiment is as follows: the embodiment provides a high-density SiBCN ceramic material which is prepared from cubic silicon powder, graphite powder and hexagonal boron nitride powder;
the molar ratio of Si in the silicon powder of the cubic system to C in the graphite powder is 1 (0.05-2); the molar ratio of Si in the cubic silicon powder to B in the hexagonal boron nitride powder is 1 (0.5-2);
the grain size of the silicon powder of the cubic system is 1-50 mu m; the particle size of the graphite powder is 1-10 mu m; the particle size of the hexagonal boron nitride powder is 1-10 mu m.
The beneficial effects of the embodiment are as follows:
1. the high-density SiBCN ceramic material has low raw material cost and is easy to obtain directly from the market.
2. The hot isostatic pressing technology integrates the advantages of hot pressing and isostatic pressing, and can simultaneously apply high temperature (up to 2000 ℃) and equal high pressure (up to 200 MPa) in the ceramic sintering process. The embodiment adopts the combination of the hot isostatic pressing sintering technology and the mechanical alloying technology to prepare the high-density SiBCN ceramic material, and solves the problems that the prior mechanical alloying-hot pressing sintering method for preparing the SiBCN ceramic material has low relative density (85 percent) and small size
The production efficiency is low. The density of the SiBCN ceramic material sintered by the hot isostatic pressing technology can reach more than 96 percent of the theoretical density, and the maximum size reaches
At present, the SiBCN ceramics with five sizes and the same size can be obtained at most by single sintering, the application of the practical SiBCN ceramics engineering can be met, the sintering efficiency of the SiBCN ceramics is obviously improved, the production cost is reduced, the hot isostatic pressing near-net forming technology is adopted, the subsequent machining can be effectively reduced, and the cost is favorably reduced.
When preparing Si blocks with high density simultaneously 2 BC 3 When the N ceramic material is used, the density is 2.74g/cm according to analysis and test 3 ~2.83g/cm 3 Hardness of 1080 GPa-11.02 GPa, bending strength of 404.0 MPa-471.5 MPa, elastic modulus of 300.2 GPa-311.8 GPa, and fracture toughness of 3.52 MPa.m 1/2 ~5.13MPa·m 1/2 Mechanical property far superior to that of Si prepared by mechanical alloying-hot pressing sintering 2 BC 3 N ceramic material.
3. The high-density SiBCN ceramic material has large size and the maximum size reaches
And the SiBCN ceramic material with five block sizes can be prepared at the same time by one-time sintering at present, which cannot be obtained by the prior preparation method and can meet the application requirements of certain special parts in aviation and aerospace. The high-density SiBCN ceramic material obtained by the embodiment has good mechanical property and good machinability, can be machined by conventional machining means such as turning, milling and grinding, and can be practically applied to high-temperature structural components.
The second embodiment is as follows: the embodiment provides a preparation method of a high-density SiBCN ceramic material, which is completed by the following steps:
1. weighing cubic silicon powder, graphite powder and hexagonal boron nitride powder;
the molar ratio of Si in the silicon powder of the cubic system to C in the graphite powder is 1 (0.05-2); the molar ratio of Si in the cubic silicon powder to B in the hexagonal boron nitride powder is 1 (0.5-2);
the grain size of the silicon powder of the cubic system is 1-50 mu m; the particle size of the graphite powder is 1-10 mu m; the grain diameter of the hexagonal boron nitride powder is 1-10 mu m;
2. putting the weighed cubic silicon powder, graphite powder and hexagonal boron nitride powder into a ball milling tank, and carrying out ball milling for 1-50 h under the conditions of argon atmosphere, the diameter of a milling ball of 3-10 mm and the mass ratio of ball materials of (5-100): 1 to obtain amorphous SiBCN powder;
3. under the conditions that the sintering temperature is 1500-1700 ℃ and the sintering pressure is 20-80 MPa, carrying out hot-pressing pre-sintering on the amorphous SiBCN powder for 10-60 min to obtain an amorphous/nanocrystalline silicon boron carbon nitrogen ceramic blank;
4. polishing the upper surface and the lower surface of an amorphous/nanocrystalline silicon boron carbon nitrogen ceramic blank, cleaning and drying to obtain a pretreated silicon boron carbon nitrogen ceramic blank, welding and sealing one or more pretreated silicon boron carbon nitrogen ceramic blanks into a hot isostatic pressing package under a vacuum environment to obtain a packaged ceramic blank, carrying out hot isostatic pressing sintering on the packaged ceramic blank for 10-60 min under the conditions that the sintering temperature is 1700-2000 ℃ and the sintering pressure is 150-190 MPa to obtain a packaged ceramic blank after hot isostatic pressing, removing the hot isostatic pressing package, and obtaining the high-density SiBCN ceramic material.
The third concrete implementation mode: the second embodiment is different from the first embodiment in that: the purity of the cubic system silicon powder in the step one is 99-99.9%; the purity of the graphite powder in the first step is 99-99.9%; the purity of the hexagonal boron nitride powder in the step one is 98-99.9%. The rest is the same as the second embodiment.
The fourth concrete implementation mode: this embodiment is different from the second or third embodiment in that: and the ball milling tank in the second step is a vibration type ball milling tank or a planetary type ball milling tank. The others are the same as in the second or third embodiment.
The fifth concrete implementation mode is as follows: the second to fourth differences between this embodiment and the specific embodiments are: and the hot isostatic pressing sheath in the fourth step is a carbon film sheath, a glass sheath or a metal sheath. The other points are the same as those in the second to fourth embodiments.
The sixth specific implementation mode: the present embodiment is different from one of the second to fifth embodiments in that: in the second step, ball milling is carried out for 15 to 35 hours under the conditions of argon atmosphere, the diameter of a grinding ball is 5 to 8mm, and the mass ratio of the ball to the material is (10 to 90): 1. The rest is the same as the second to fifth embodiments.
The seventh embodiment: the present embodiment is different from one of the second to sixth embodiments in that: and in the fourth step, under the conditions that the sintering temperature is 2000 ℃ and the sintering pressure is 150MPa, carrying out hot isostatic pressing sintering on the ceramic blank packaged by the sheath for 30min. The other points are the same as those in the second to sixth embodiments.
The specific implementation mode is eight: the present embodiment is different from one of the second to seventh embodiments in that: and in the fourth step, carrying out hot isostatic pressing sintering on the ceramic blank packaged by the sheath for 30min under the conditions that the sintering temperature is 1900 ℃ and the sintering pressure is 190 MPa. The other points are the same as those in the second to seventh embodiments.
The specific implementation method nine: the present embodiment differs from the second to eighth embodiments in that: and in the fourth step, under a vacuum environment, laminating, welding and sealing five pretreated silicon-boron-carbon-nitrogen ceramic blanks into a hot isostatic pressing sheath to obtain the ceramic blanks packaged by the sheath. The other points are the same as those in the second to eighth embodiments.
The detailed implementation mode is ten: the present embodiment differs from one of the second to ninth embodiments in that: when the five pretreated silicon-boron-carbon-nitrogen ceramic blanks are stacked, the silicon-boron-carbon-nitrogen ceramic blanks are separated by a BN sheet with the thickness of 1mm, and after the blanks are stacked, a BN isolating layer with the thickness of 1.5mm is arranged between the blanks and the hot isostatic pressing sheath. The other points are the same as those in the second to ninth embodiments.
The concrete implementation mode eleven: this embodiment is different from the second to tenth embodiments in that: and in the second step, ball milling is carried out for 20 hours under the conditions of argon atmosphere, the diameter of a grinding ball is 6mm and the mass ratio of the ball material is 50. The others are the same as in the second to tenth embodiments.
The detailed implementation mode is twelve: this embodiment is different from one of the second to eleventh embodiments in that: in the second step, ball milling is carried out for 35 hours under the conditions that the argon atmosphere, the diameter of a grinding ball is 8mm and the mass ratio of the ball material is 10. The other is the same as in embodiments two to eleven.
The specific implementation mode is thirteen: this embodiment is different from one of the second to twelfth embodiments in that: and in the second step, ball milling is carried out for 15 hours under the conditions of argon atmosphere, the diameter of a grinding ball is 5mm and the mass ratio of the ball material is 90. The rest is the same as the second to twelfth embodiments.
The specific implementation mode fourteen are as follows: this embodiment is different from one of the second to thirteenth embodiments in that: in the third step, the amorphous SiBCN powder is hot-pressed and presintered for 30min under the conditions that the sintering temperature is 1800 ℃ and the sintering pressure is 30 MPa. The others are the same as in embodiments two to thirteen.
The concrete implementation mode is fifteen: this embodiment is different from the embodiment in one of two to fourteen: in the third step, under the conditions that the sintering temperature is 1700 ℃ and the sintering pressure is 20MPa, the amorphous SiBCN powder is subjected to hot-pressing pre-sintering for 20min. The others are the same as the embodiments two to fourteen.
The specific implementation modes are sixteen: the present embodiment differs from one of the second to fifteenth embodiments in that: in the third step, under the conditions that the sintering temperature is 1500 ℃ and the sintering pressure is 80MPa, the amorphous SiBCN powder is subjected to hot-pressing pre-sintering for 20min. The others are the same as in embodiments two to fifteen.
Seventeenth embodiment: this embodiment differs from the second to sixteenth embodiment in that: in the third step, under the conditions that the sintering temperature is 1700 ℃ and the sintering pressure is 60MPa, the amorphous SiBCN powder is subjected to hot-pressing pre-sintering for 30min. The rest is the same as the second to sixteenth embodiments.
Eighteen specific embodiments: this embodiment is different from one of the second to seventeenth embodiments in that: and in the fourth step, carrying out hot isostatic pressing sintering on the ceramic blank packaged by the sheath for 45min under the conditions that the sintering temperature is 1800 ℃ and the sintering pressure is 190 MPa. The other is the same as in the second to seventeenth embodiments.
The detailed embodiment is nineteen: this embodiment differs from one of the second to eighteen embodiments in that: and in the fourth step, under the conditions that the sintering temperature is 1700 ℃ and the sintering pressure is 190MPa, carrying out hot isostatic pressing sintering on the ceramic blank packaged by the sheath for 60min. The others are the same as the embodiments twenty to eighteen.
The following examples were used to demonstrate the beneficial effects of the present invention:
the first embodiment is as follows:
a preparation method of a high-density SiBCN ceramic material comprises the following steps:
1. weighing cubic silicon powder, graphite powder and hexagonal boron nitride powder;
the molar ratio of Si in the cubic silicon powder to C in the graphite powder is 2; the molar ratio of Si in the cubic silicon powder to B in the hexagonal boron nitride powder is 2;
the grain diameter (D90) of the silicon powder of the cubic system is 45 mu m; the median particle size of the graphite powder is 2.0 mu m; the average grain diameter of the hexagonal boron nitride powder is 5.1 mu m;
2. putting the weighed cubic silicon powder, graphite powder and hexagonal boron nitride powder into a ball milling tank, and carrying out ball milling for 40h under the conditions of argon atmosphere, grinding ball diameter of 5mm and ball material mass ratio of 20;
3. under the conditions that the sintering temperature is 1700 ℃ and the sintering pressure is 60MPa, the amorphous SiBCN powder is subjected to hot-pressing presintering for 30min to obtain flaky amorphous/nanocrystalline Si 2 BC 3 N ceramic green bodies;
4. flake amorphous/nanocrystalline Si 2 BC 3 Polishing the upper and lower surfaces of the N ceramic blank, cleaning and drying to obtain pretreated Si 2 BC 3 N ceramic blank, in vacuum environment, five pretreated Si pieces 2 BC 3 The N ceramic blanks are stacked and welded and sealed in a hot isostatic pressing sheath to obtain Si packaged by the sheath 2 BC 3 The N ceramic blank is prepared by wrapping and packaging the encapsulated Si under the conditions that the sintering temperature is 1900 ℃ and the sintering pressure is 190MPa 2 BC 3 Carrying out hot isostatic pressing sintering on the N ceramic blank for 30min to obtain the hot isostatic pressed packaged Si 2 BC 3 Removing the hot isostatic pressing sheath from the N ceramic blank to obtain five pieces of high-density Si 2 BC 3 N ceramic material.
Step four, five pretreated Si 2 BC 3 Lamination of N ceramic green bodies, si 2 BC 3 The N ceramic blanks are separated by BN sheets with the thickness of 1mm to prevent bonding between the sheets in the hot isostatic pressing process, and meanwhile, after the blanks are stacked, a BN isolating layer with the thickness of 1.5mm is arranged between the blanks and the hot isostatic pressing sheath to prevent bonding between the sheetsDuring the hot isostatic pressing process, the blank and the sheath react or bond.
The purity of the cubic system silicon powder in the first step is 99.5%; the purity of the graphite powder in the step one is 99.9%; the purity of the hexagonal boron nitride powder in the step one is 98%.
And the ball milling tank in the step two is a planetary ball milling tank.
And the hot isostatic pressing sheath in the fourth step is a metal molybdenum sheath.
The silicon powder of cubic system described in the first step of this embodiment is purchased from jin research materials science and technology ltd, beijing, and has a model number of C-Si-45.
FIG. 1 shows encapsulated Si obtained in step four of the example 2 BC 3 A real object diagram of the N ceramic blank; FIG. 2 shows a hot isostatically pressed capsule encapsulated Si obtained in step four of the example 2 BC 3 A real object diagram of the N ceramic blank; as can be seen from the figure, after the hot isostatic pressing treatment, the size change of the metal sheath is obvious, the radial shrinkage of the middle part of the sheath is obvious, the radial shrinkage of the upper end part and the lower end part of the sheath is small, and the height of the sheath is also obviously reduced.
FIG. 3 illustrates one embodiment of a one step post-four hot isostatic pressing capsule packaging Si 2 BC 3 Removing the sheath of the N ceramic blank, and then removing five pieces of high-density Si 2 BC 3 N physical diagrams of ceramic material stacks; it can be seen from the figure that after the hot isostatic pressing treatment, the sizes of the ceramic blanks are changed and slightly different, which is determined by the distribution of the pressure field inside the capsule during the hot isostatic pressing treatment, and the more the size of the ceramic blanks is shrunk, the more the hot isostatic pressing treatment effect is obvious, and the higher the density of the ceramic is. Because a BN isolation layer is arranged between the sheath and the SiBCN ceramic blank, after hot isostatic pressing treatment, the shrinkage conditions of the blank materials are slightly different; due to the existence of BN layer, five pieces of high-density Si appear after the sheath is removed 2 BC 3 The physical diagram of the N ceramic material stack is different from the shape before the jacket is removed.
FIG. 4 shows a sheet-like amorphous/amorphous alloy before and after HIP treatment in example INanocrystalline Si 2 BC 3 N ceramic green body and highly dense Si 2 BC 3 Material object diagram of N ceramic material, 1 is the flake amorphous/nanocrystalline Si prepared in step three 2 BC 3 N ceramic blank, 2 is the high compact Si that step four prepared 2 BC 3 N ceramic material; it can be seen that after the hot isostatic pressing treatment, the ceramic sheet was reduced from 32mm to 29.4mm in diameter, as measured for the sample with the largest radial shrinkage, and significant radial shrinkage occurred.
FIG. 5 shows the sheet-like amorphous/nanocrystalline Si prepared in the third step of the example 2 BC 3 N is a topography map of the polished surface of the ceramic blank; FIG. 6 shows the highly dense Si prepared in example one 2 BC 3 N is a topography map of the polished ceramic material surface; it can be seen that the surface of the SiBCN ceramic material becomes significantly dense after the hot isostatic pressing treatment.
FIG. 7 shows the preparation of amorphous/nanocrystalline Si flakes in one step three 2 BC 3 N ceramic blank fracture morphology graph; FIG. 8 shows the highly dense Si prepared in example one 2 BC 3 N is a fracture morphology diagram of the ceramic material; as can be seen from the figure, after the hot isostatic pressing treatment, the grains at the port are changed from equiaxed to lamellar, the size of the grains is increased, and the lamellar is pulled out at the fracture, which is beneficial to improving the fracture toughness of the material.
The high-density Si prepared in this example was tested 2 BC 3 The density of the N ceramic material is up to 2.83g/cm 3 99.6% of theoretical density, 11.02GPa of hardness, 471.5MPa of bending strength, 311.8GPa of elastic modulus and 5.13 MPa.m of fracture toughness 1/2 。
Example two:
a preparation method of a high-density SiBCN ceramic material comprises the following steps:
1. weighing cubic silicon powder, graphite powder and hexagonal boron nitride powder;
the molar ratio of Si in the silicon powder of the cubic system to C in the graphite powder is 2; the molar ratio of Si in the cubic silicon powder to B in the hexagonal boron nitride powder is 2;
the grain diameter (D90) of the silicon powder of the cubic system is 45 mu m; the median particle size of the graphite powder is 2.0 mu m; the average grain diameter of the hexagonal boron nitride powder is 5.1 mu m;
2. putting the weighed cubic silicon powder, graphite powder and hexagonal boron nitride powder into a ball milling tank, and carrying out ball milling for 40h under the conditions of argon atmosphere, grinding ball diameter of 5mm and ball material mass ratio of 20;
3. under the conditions that the sintering temperature is 1700 ℃ and the sintering pressure is 60MPa, the amorphous SiBCN powder is subjected to hot-pressing presintering for 30min to obtain amorphous/nanocrystalline Si 2 BC 3 N ceramic green bodies;
4. amorphous/nanocrystalline Si 2 BC 3 Polishing the upper and lower surfaces of the N ceramic blank, cleaning and drying to obtain pretreated Si 2 BC 3 N ceramic blank, in vacuum environment, five pretreated Si pieces 2 BC 3 The N ceramic blanks are stacked and welded and sealed in a hot isostatic pressing sheath to obtain Si packaged by the sheath 2 BC 3 The N ceramic blank is prepared by wrapping and packaging the packaged Si under the conditions that the sintering temperature is 1700 ℃ and the sintering pressure is 190MPa 2 BC 3 Carrying out hot isostatic pressing sintering on the N ceramic blank for 30min to obtain the hot isostatic pressed packaged Si 2 BC 3 Removing the hot isostatic pressing sheath from the N ceramic blank to obtain five pieces of high-density Si 2 BC 3 N ceramic material.
Step four, five pretreated Si 2 BC 3 Lamination of N ceramic green bodies, si 2 BC 3 The N ceramic blanks are separated by BN sheets with the thickness of 1mm so as to prevent bonding between the sheets in the hot isostatic pressing process, and meanwhile, after the blanks are stacked, a BN isolating layer with the thickness of 1.5mm is arranged between the blanks and the hot isostatic pressing sheath so as to prevent reaction or bonding between the blanks and the sheath in the hot isostatic pressing process.
The purity of the cubic system silicon powder in the first step is 99.5 percent; the purity of the graphite powder in the step one is 99.9%; the purity of the hexagonal boron nitride powder in the first step is 98%.
And in the second step, the ball milling tank is a planetary ball milling tank.
And the hot isostatic pressing sheath in the fourth step is a metal molybdenum sheath.
The silicon powder of cubic system described in the first step of this embodiment is purchased from jin research new materials science and technology ltd, beijing, and has a model number of C-Si-45.
FIG. 9 shows the highly dense Si prepared in example two
2 BC
3 N physical representation of the ceramic material; as can be seen from the figure, the highly dense Si prepared in this example
2 BC
3 The size of the N ceramic material can reach
The high-density Si prepared in this example was tested 2 BC 3 The density of the N ceramic material is 2.82g/cm at most 3 99.3% of theoretical density, 10.80GPa of hardness, 404.0MPa of bending strength, 300.2GPa of elastic modulus and 3.52 MPa.m of fracture toughness 1/2 。