CN111678634A - Electronic skin capable of realizing fine identification of multidimensional mechanical signals - Google Patents
Electronic skin capable of realizing fine identification of multidimensional mechanical signals Download PDFInfo
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- CN111678634A CN111678634A CN202010483793.2A CN202010483793A CN111678634A CN 111678634 A CN111678634 A CN 111678634A CN 202010483793 A CN202010483793 A CN 202010483793A CN 111678634 A CN111678634 A CN 111678634A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
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Abstract
The invention belongs to the field of electronic skin, relates to a sensor, microelectronics and a piezoelectric material, and particularly relates to electronic skin capable of accurately identifying multidimensional mechanical signals. According to the invention, an electronic element TFT imaged by a display is applied to an electronic skin as a capacitive sensor, when an external object is contacted with an upper electrode, the capacitance above a TFT circuit is changed, the capacitance contacted with a TFT sensing area is obviously different from the capacitance not contacted with the sensing area, and the normalized data of the difference points are subjected to gray scale image display, so that the surface appearance pattern of the external object is reflected, and the external continuous static force stimulation is visualized; and the electronic skin has high resolution, and quasi-static force perception and visual representation of external stimulation are realized. Then the electronic skin self-driving is realized by combining with the piezoelectric sensor, the static force visualization and the instantaneous dynamic force stimulation are realized by responding to the external continuous static force stimulation.
Description
Technical Field
The invention belongs to the field of electronic skin, relates to a sensor, microelectronics and a piezoelectric material, and particularly relates to electronic skin capable of accurately identifying multidimensional mechanical signals.
Background
The skin is an organ that is wrapped around the body surface and has the functions of regulating body temperature, sensing external stimuli and the like. Understanding skin characteristics, and preparing electronic skin with skin function is one of the current research hotspots. Moreover, as electronic skins are applied more and more widely in the fields of artificial intelligence, medical treatment, aerospace and the like, electronic skins with the performances of flexible self-driving, high sensitivity, multifunctional perception and the like become the core focus of such research.
In recent years, with the intensive research of the above concerns, electronic skin technology has been rapidly developed. However, the following problems still exist to limit the development of electronic skins: the electronic skin has a single function, real skin can sense external dynamic force stimulation (mechanical and thermal stimulation) and realize static force sensing and visualization through continuous touch, but the current electronic skin cannot simultaneously respond to the external continuous static force stimulation, static force visualization and instantaneous dynamic force stimulation and cannot accurately simulate skin touch. In 2015, the sensitive layer material of the electronic skin was prepared by Jonghwa Park et al, a Korean scientist, into an epidermal-dermal interlocking microstructure as the human fingertip structure, which can enhance the electronic skin's sensing of static and dynamic mechanical signals, thereby realizing for the first time that the electronic skin can detect and distinguish various spatiotemporal tactile stimuli, including static and dynamic pressure, vibration and temperature sensing. However, the microstructure preparation process is complicated, and the accuracy of static force recognition is not high. Therefore, in order to improve the use convenience and the bionic precision of the electronic skin, it is necessary to prepare a self-driven and multifunctional integrated electronic skin with fine and identifiable multidimensional mechanical signals.
Disclosure of Invention
Aiming at the problems or the defects, the electronic skin can not self-supply power at present, and can not respond to external continuous static force stimulation and instantaneous dynamic force stimulation (mechanical and thermal stimulation) simultaneously. The invention provides an electronic skin capable of finely identifying multidimensional mechanical signals.
In order to achieve the purpose, the invention adopts the technical scheme that:
an arrayed Thin Film Transistor (TFT) device, a PVDF-TrFE piezoelectric film and an upper electrode are sequentially stacked from bottom to top, and the electronic skin can be identified accurately through multidimensional mechanical signals.
The arrayed thin film transistor TFT device comprises a substrate (1-1), arrayed TFT circuits (1-2) and arrayed electrodes (1-3) which correspond to the arrayed TFT circuits (1-2) one to one, wherein the substrate (1-1), the arrayed TFT circuits (1-2) are sequentially stacked from bottom to top. The arrayed TFT circuit (1-2) is prepared by adopting a thin film preparation technology.
The PVDF-TrFE piezoelectric film responds to external dynamic force change and is converted into electric energy, and electronic skin self-driving is achieved.
Further, the PVDF-TrFE piezoelectric film is subjected to in-situ polarization by in-situ polarization equipment, so that the piezoelectric coefficient of the PVDF-TrFE piezoelectric film is improved.
Further, the upper electrode is a silver Ag electrode.
In principle, the capacitive electronic skin of the present invention exhibits good sensitivity to sustained static stimuli, whereas piezoelectric electronic skin can respond not only to transient dynamic stimuli (mechanical and thermal stimuli) but also convert these stimuli into electrical energy. When an external object is in contact with the upper electrode, the capacitance above the TFT circuit is changed, the capacitance in contact with the TFT sensing area and the capacitance not in contact with the sensing area present obvious difference, and the normalized data of the difference points are subjected to gray scale image display by utilizing a post-processing circuit, so that the surface appearance pattern of the external object is reflected, and the external continuous static force stimulation is visualized; therefore, the electronic skin has high resolution, and quasi-static force perception and visual representation of external stimulation are achieved. Meanwhile, the PVDF-TrFE piezoelectric film after in-situ polarization has higher piezoelectric coefficient, can respond to external dynamic force change, can convert the stimulation into electric energy, and realizes electronic skin self-driving.
Each pixel point of the arrayed TFT device is provided with a semiconductor switch, and each pixel point can be directly controlled through a point pulse, so that each node is relatively independent and can be continuously controlled, and the arrayed TFT device is an important electronic element for display imaging. However, no one has used a large-area aligned TFT as an electronic skin substrate, so that the electronic skin has high resolution, and quasi-static force perception and visual representation of external stimulation are achieved.
In summary, the invention applies the important electronic element TFT for display imaging to the electronic skin as a capacitive sensor, and by using the sensor in combination with a piezoelectric sensor, the electronic skin is self-driven, and static force visualization and instantaneous dynamic force stimulation (mechanical and thermal stimulation) are realized in response to external continuous static force stimulation.
Drawings
FIG. 1 is a two-dimensional schematic diagram of an arrayed Thin Film Transistor (TFT) device structure of the present invention;
FIG. 2 is a two-dimensional schematic of the overall structure of the present invention;
FIG. 3 is a schematic diagram of the static force sensing operation of the present invention;
FIG. 4 is a diagram of the dynamic force sensing operation of the present invention;
FIG. 5 is a static force sensing data graph according to an embodiment of the present invention;
FIG. 6 is a graph of dynamic force sensing data for an embodiment of the present invention;
reference numerals: 1-1 substrate; 1-2 arrayed TFT circuits; 1-3 arrayed electrodes; 2-1PVDF-TrFE piezoelectric film; 2-2 upper electrode; 3-1 external object contacted by the electronic skin; 4-1 external dynamic force.
Detailed Description
In order to make the aforementioned functions and structures of the present invention comprehensible, the present invention is specifically described below with reference to the accompanying drawings and specific examples, which are provided for further explanation of the present invention and do not limit the present invention itself, and those skilled in the art may make modifications and adjustments according to the present invention.
In the embodiment, the electronic skin capable of accurately recognizing multidimensional mechanical signals is prepared by the following process:
step 1, mixing PVDF-TrFE and butanone according to the proportion of 5.52g/20ml, continuously stirring for 12 hours at the speed of 500rmp by using a magnetic stirrer at room temperature, reducing the stirring speed to 60rmp after the PVDF-TrFE and the butanone are fully dissolved, and slowly stirring for 1 hour for defoaming treatment;
and 2, coating a layer of PVDF-TrFE solution prepared in the step 1.1 on the upper surface of an arrayed Thin Film Transistor (TFT) device, namely the upper surface of 1-3, by adopting a scraper coating method, then putting the PVDF-TrFE solution into a vacuum drying oven, and carrying out vacuum drying for 5 minutes at room temperature to rapidly volatilize butanone so as to form a piezoelectric film of 10-30 mu m.
Step 3, putting the product obtained in the step 1.2 into an oven for annealing for 1h, and finally naturally cooling to 25 ℃; secondly, carrying out in-situ polarization on the prepared PVDF-TrFE film by using in-situ polarization equipment to improve the piezoelectric coefficient of the piezoelectric film to D33＝25pC/N。
And 4, finally sputtering a layer of silver (Ag) on the PVDF-TrFE piezoelectric film by magnetron sputtering to be used as an upper electrode 2-2, as shown in figure 2.
And (4) building an electronic skin static force testing platform. An object with a texture is placed on the prepared electronic skin to stimulate the surface of the electronic skin, as shown in fig. 3. And then debugging corresponding TFT imaging software, and observing the recognition effect of the electronic skin on the external static force.
The perception of static force by the electronic skin is analyzed. When the external stimulus is continuous static force, the lower surface of the object is in contact with a silver (Ag) electrode to cause the capacitance above the TFT to change, the capacitance in contact with the TFT sensing area is obviously different from the capacitance not in contact with the sensing area, and the normalized data at different points are subjected to gray-scale image display by utilizing a post-processing circuit, so that the surface appearance graph of the object is reflected, and the external continuous static force stimulus is visualized. As shown in fig. 5, the present embodiment can realize clear imaging of the cicada wing with very light weight, and the sensing precision reaches 50 μm.
And (4) building an electronic skin dynamic force testing platform. The electronic skin is placed on a horizontal operating platform of a servo motor and connected with a voltage acquisition card, and then a probe of the servo motor is adjusted to press the surface of the electronic skin, as shown in fig. 4. And observing the recognition effect of the electronic skin on the external dynamic force.
The perception of dynamic forces by the electronic skin is analyzed. Analyzing the voltage data of the voltage acquisition card shows that the invention can respond to the external stimulus instantly, and because the invention takes the large-area arrayed TFT as the substrate, the voltage signals can be synchronously output when pressing different places, as shown in figure 6, and the output peak voltage can reach 1.3mV, thus realizing the space perception function of the electronic skin.
According to the embodiment, the electronic element TFT for display imaging is applied to the electronic skin to serve as a capacitive sensor, and then the electronic skin is combined with the piezoelectric sensor to realize self-driving of the electronic skin, response to external continuous static force stimulation, and static force visualization and instantaneous dynamic force stimulation.
Claims (4)
1. A multidimensional mechanical signal fine identifiable electronic skin is characterized in that: the array thin film transistor TFT device, the PVDF-TrFE piezoelectric film and the upper electrode are sequentially stacked from bottom to top;
the arrayed thin film transistor TFT device comprises a substrate (1-1), arrayed TFT circuits (1-2) and arrayed electrodes (1-3) which correspond to the arrayed TFT circuits (1-2) one to one, wherein the substrate (1-1), the arrayed TFT circuits (1-2) are sequentially stacked from bottom to top.
The PVDF-TrFE piezoelectric film responds to external dynamic force change and is converted into electric energy, and electronic skin self-driving is achieved.
2. The multi-dimensional mechanical signal fine identifiable electronic skin of claim 1, wherein: and the PVDF-TrFE piezoelectric film is subjected to in-situ polarization by in-situ polarization equipment, so that the piezoelectric coefficient of the PVDF-TrFE piezoelectric film is improved.
3. The multi-dimensional mechanical signal fine identifiable electronic skin of claim 1, wherein: the upper electrode is a silver Ag electrode.
4. The multi-dimensional mechanical signal fine identifiable electronic skin of claim 1, wherein:
when an external object is in contact with the upper electrode, the capacitance above the TFT circuit is changed, the capacitance in contact with the TFT sensing area and the capacitance not in contact with the sensing area present obvious difference, and the normalized data at different points are subjected to gray scale image display by utilizing a post-processing circuit, so that the surface appearance pattern of the external object is reflected, and the external continuous static force stimulation is visualized; therefore, the electronic skin has high resolution, and quasi-static force perception and visual representation of external stimulation are realized; meanwhile, the PVDF-TrFE piezoelectric film can respond to external dynamic force changes, and can convert the stimulation into electric energy to realize electronic skin self-driving.
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Application publication date: 20200918 |