CN111638196A - Nano-flow channel-resonant cavity coupling structure for measuring micro-displacement of fluorescent substance - Google Patents
Nano-flow channel-resonant cavity coupling structure for measuring micro-displacement of fluorescent substance Download PDFInfo
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Abstract
The invention belongs to the field of fluorescence detection, and aims to solve the problem that the micro-displacement and the moving speed of a fluorescent substance are difficult to accurately measure in the prior art, and provides a nano-flow channel-resonant cavity coupling structure for measuring the micro-displacement of the fluorescent substance. The invention has simple structure and can be applied to the field of fluorescent substance micro-displacement and moving speed detection.
Description
Technical Field
The invention belongs to the field of fluorescence detection, and particularly relates to a nano-flow channel-annular resonant cavity coupling structure for measuring micro-displacement of a fluorescent substance, which can be applied to the field of detection of micro-displacement and moving speed of the fluorescent substance.
Background
Fluorescent label detection technology is widely applied to the field of life science due to the advantages of convenient operation, high sensitivity and the like. The quantum dots have incomparable advantages of the traditional fluorescent dyes, such as broadband excitation narrow-band emission, high luminous intensity, good biocompatibility, good light stability and the like, and are widely applied to fluorescent marker detection. The real-time tracking of the quantum dots is helpful for detailed study of the diffusion and dispersion characteristics on the micrometer and nanometer scales, and has important significance for studying the flow of microorganisms and the flow behavior of solution in a micro-nano flow device.
There are different measurement methods for measuring the micro-displacement and the moving speed of the fluorescent substance, and L Cui et al utilize a photoelectric combination method to realize the monitoring of the fluorescent substance and the measurement of the moving speed by using a microelectrode array to make fluorescent particles move and using two embedded optical fibers to detect the change of the fluorescence intensity. However, this method is limited to the spacing of the two embedded fibers and does not allow real-time measurement of the phosphor velocity.
Particle Image Velocimetry (PIV), a commonly used method of measuring particle movement and solution velocity fields, is widely used. Santiago and Meinhart et al use 100-300 nm diameter fluorescently labeled polymer particles to measure to obtain particle displacement information and solution velocity field information. Zettner, Jin, Sadr et al then use evanescent waves generated by total reflection of light between two media of different refractive indices to excite fluorescent particles. The method realizes near-wall measurement, reduces observation thickness and improves resolution. However, the diameter of the fluorescent particles used in the method is between 100-300 nm, and the fluorescent particles have an order of magnitude with the evanescent field, even have a larger range than the evanescent field, and in addition, the interaction between the larger fluorescent particles and the fluid may exist, which affects the precision of the final measurement result, and the real flow characteristic of the solution cannot be well reflected. ShahramPouya et al, in a manner of exciting small-sized quantum dots by using total internal reflection evanescent waves, perform continuous imaging by using an imaging system, and finally integrate the obtained images to obtain the movement trajectory of the particles, thereby obtaining information such as the movement speed of the particles. Also in this way particle monitoring and flow rate measurement can be achieved. However, for extremely small tracer particles, because of the low fluorescence intensity and the propagation in all directions, an exposure time of several milliseconds is required to reliably image the particles, but particle motion during camera exposure can result in blurring of the image. And the accuracy of particle image velocimetry is also influenced by post-image processing, and the measurement system is more complex.
The resonant cavity has a simple structure, is very sensitive to the change of a surrounding medium due to the high Q value, the small mode volume and the strong evanescent field, and is widely applied to the sensing field. Many research groups have developed different sensors, such as refractive index/concentration sensors, temperature sensors, etc., using the characteristics of the ring resonator, and have implemented the detection of the presence and size of the fine particles. However, no report exists at present that the resonant cavity is applied to a micro-nano structure for measuring the displacement and the moving speed of the fluorescent substance.
Disclosure of Invention
The invention overcomes the defects of the prior art, and solves the technical problems that: the nano-flow channel-resonant cavity coupling structure is simple in structure and capable of accurately measuring the micro-displacement of the fluorescent substance in real time.
In order to solve the technical problems, the invention adopts the technical scheme that: a nano-flow channel-resonant cavity coupling structure for measuring micro-displacement of a fluorescent substance comprises a nano-flow channel, an annular resonant cavity and a waveguide, wherein the nano-flow channel and the waveguide are respectively arranged on two sides of the annular resonant cavity, and a biological solution containing the fluorescent substance is filled in the nano-flow channel.
The refractive indexes of the nano-flow channel, the annular resonant cavity and the waveguide are 2.8-3.3.
The width d1 of the flow receiving channel is 50-150 nm, the thickness of two side walls is 50-75 nm, and the total width d5 is 150-300 nm.
The refractive index of the biological solution filled in the nano-flow channel is 1.33-1.5.
The fluorescent substance in the biological solution is quantum dots, fluorescent dye or up-conversion nanoparticles, and the horizontal distance between the fluorescent substance and the center of the annular resonant cavity is 0-1 mu m.
The distance d2 between the nano-flow channel and the annular resonant cavity is 150-250 nm.
The outer diameter R1 and the inner diameter R2 of the annular resonant cavity are respectively 2.27-2.33 mu m and 2.07-2.13 mu m.
The distance d3 between the annular resonant cavity and the waveguide is 200-300 nm.
The waveguide width d6 is 150-300 nm.
The nano-flow channel, the annular resonant cavity and the waveguide are arranged in the same plane, and the nano-flow channel and the waveguide are arranged in parallel.
Compared with the prior art, the invention has the following beneficial effects: the invention provides a nano-flow channel-annular resonant cavity coupling structure for measuring micro-displacement of a fluorescent substance, wherein fluorescence realizes a good coupling effect between the nano-flow channel and the annular resonant cavity coupling structure, light emitted by quantum dots can realize reverse coupling in the annular resonant cavity along with the movement of the quantum dots in a certain range of the nano-flow channel, then the light is coupled into a waveguide for output, and the micro-displacement of the fluorescent substance is measured by detecting the optical power output by the waveguide in real time. Compared with the prior art, the accurate detection of the micro-displacement of the fluorescent material is realized through the nano-flow channel-annular resonant cavity coupling structure with a simple structure.
Drawings
FIG. 1 is a schematic two-dimensional cross-sectional view of a nanoflow channel-resonator coupling structure for measuring fluorescent substance micro-displacement according to an embodiment of the present invention;
FIG. 2 is a schematic diagram illustrating the principle of measuring the micro-displacement of a fluorescent substance according to an embodiment of the present invention;
FIG. 3 is a graph showing the variation of the optical power output from the waveguide port 2 with the variation of the wavelength when the horizontal distance d4 between the quantum dot and the center of the ring resonator changes in the nanoflow channel;
FIG. 4 is a diagram of an electric field distribution when a quantum dot in a nano-flow channel is horizontally apart from the center of a ring resonator by a distance d4=1 μm;
FIG. 5 is a diagram of an electric field distribution when a quantum dot in a nano-flow channel is horizontally separated from the center of a ring resonator by a distance d4=0.5 μm;
FIG. 6 is a diagram of an electric field distribution when a quantum dot in a nano-flow channel is horizontally apart from the center of a ring resonator by a distance d4=0 μm;
FIG. 7 is a graph of the peak optical power output by the second port of the waveguide as a function of the horizontal distance d4 between the quantum dot and the center of the ring cavity;
FIG. 8 is a graph showing the variation of the peak optical power output from the second port of the waveguide with the variation of the horizontal distance d4 between the quantum dot and the center of the ring resonator when the distance d2 between the nanoflow channel and the ring resonator is 150nm, 200nm, and 250nm, respectively;
FIG. 9 is a graph showing the peak optical power output from the second port of the waveguide as a function of the horizontal distance d4 between the quantum dot and the center of the ring resonator when the refractive index of the coupled structure of the nanoflow channel and the ring resonator is 2.8, 2.915, 3.1 and 3.3, respectively;
in the figure, 2 is the second port, 3 is the first port, 4 is the nano-flow channel, 5 is the ring resonator, 6 is the waveguide, 7 is the quantum dot.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments; all other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, an embodiment of the present invention provides a nano-flow channel-resonant cavity coupling structure for measuring micro-displacement of a fluorescent substance, including a nano-flow channel 4, an annular resonant cavity 5 and a waveguide 6, where the nano-flow channel 4 and the waveguide 6 are respectively disposed on two sides of the annular resonant cavity 5, and the nano-flow channel 4 is filled with a biological solution containing a fluorescent substance. The detector is positioned at the second port 2 of the waveguide 6, namely, the fluorescent substance and the detector in the biological solution are respectively positioned at two sides of the annular resonant cavity.
Specifically, in this embodiment, the refractive index of the biological solution filled in the nanofluid channel 4 is 1.33 to 1.5. The fluorescent substance in the biological solution is quantum dots, fluorescent dye or up-conversion nanoparticles.
Specifically, in this embodiment, the nanoflow channel 4, the ring resonator 5, and the waveguide 6 are disposed in the same plane, and the nanoflow channel 4 and the waveguide 6 are disposed in parallel.
Specifically, in the present embodiment, the refractive indexes of the nanoflow channel 4, the ring resonator 5 and the waveguide 6 are 2.8 to 3.3. Further, in this embodiment, the material used for the coupling structure may be aluminum arsenide or aluminum gallium arsenide.
Specifically, in the embodiment, the width d1 of the nanoflow channel is 50 to 150nm, the thicknesses of the two side walls are 50 to 75nm, the total width d5 is 150 to 300nm, the filling solution in the nanoflow channel is a biological solution, and the refractive index is 1.33 to 1.5. The fluorescent substance in the biological solution is quantum dots, fluorescent dye or up-conversion nanoparticles, and the horizontal distance d4 between the fluorescent substance and the center of the annular resonant cavity 5 is 0-1 mu m. The distance d2 between the nanoflow channel 4 and the ring resonator 5 is 150-250 nm.
Specifically, in the present embodiment, the outer diameter R1 and the inner diameter R2 of the ring resonator 5 are 2.27 to 2.33 μm and 2.07 to 2.13 μm, respectively. The distance d3 between the annular resonant cavity 4 and the waveguide 6 is 200-300 nm.
Specifically, in the embodiment, the width d6 of the waveguide 6 is 150-300 nm.
As shown in fig. 2, for the working principle diagram of the nano-flow channel-ring resonator coupling structure for measuring the micro-displacement of the fluorescent substance provided in this embodiment, as shown in a in the figure, the fluorescence emitted by the quantum dots 7 is coupled into the ring resonator 5 from the nano-flow channel 4, propagates in the ring resonator 5 in the clockwise direction, and is then output from the first port 3 of the waveguide 6; as shown in b, as the quantum dot 7 is close to the center of the ring resonator 5 in the nanoflow channel 4 along the horizontal direction, the fluorescence emitted by the quantum dot 7 can be coupled in the ring resonator 5 in the opposite direction, and then coupled into the waveguide 6, and respectively output along the second port 2 and the third port 3 of the waveguide 6, and by detecting the optical power output from the second port 2 in real time, the real-time accurate measurement of the quantum dot micro-displacement can be realized.
As shown in fig. 3, it is a graph of the optical power output by the second port 2 of the waveguide varying with the wavelength when the horizontal distance d4 between the quantum dot 7 and the center of the ring resonator 5 in the nanoflow channel 4 varies; as shown in fig. 4, 5 and 6, the electric field distribution diagrams are respectively the horizontal distances d4=1 μm, d4=0.5 μm and d4=0 μm from the center of the ring-shaped resonant cavity 5 of the quantum dot 7 in the nanoflow channel 4. As can be seen from fig. 3 to fig. 6, in the embodiment of the present invention, as the horizontal distance d4 between the quantum dot and the center of the ring resonator gradually decreases from 1 μm, the optical power of the second port 2 continuously increases.
As shown in fig. 7, the peak value of the optical power output from the second port 2 is a graph of the change of the horizontal distance d4 between the quantum dot 7 and the ring resonator 5. As can be seen from the figure, the peak value of the optical power output by the second port 2 in the embodiment of the present invention can well correspond to the position of the quantum dot in the nanoflow channel, and therefore, the nanoflow channel-ring resonator coupling structure for measuring the fluorescent substance micro-displacement provided by the embodiment of the present invention can realize the real-time accurate detection of the fluorescent substance micro-displacement. In fig. 3 to 7, the distance d2 between the corresponding nanoflow channel 4 and the ring resonator 5 is 200nm, the distance d3 between the ring resonator 4 and the waveguide 6 is 250nm, and the refractive index of the nanoflow channel-ring resonator coupling structure is 2.915.
As shown in fig. 8, which is a graph of the peak value of the optical power output by the second port 2 varying with the horizontal distance d4 between the quantum dot 7 and the ring resonator 5 when the distance d2 between the nanoflow channel 4 and the ring resonator 5 is 150nm, 200nm, and 250nm, respectively, it can be seen from the graph that the sensitivity of the micro-displacement sensing of the fluorescent substance in the embodiment of the present invention can be improved by reducing the distance between the nanoflow channel and the ring resonator. In fig. 8, the refractive index of the corresponding nanoflow channel-ring resonator coupling structure is 2.915.
As shown in fig. 9, which is a graph of the change of the peak value of the optical power output by the second port 2 with the change of the horizontal distance d4 between the quantum dot 7 and the ring resonator 5 when the refractive indexes of the nano-flow channel-ring resonator coupling structure of the embodiment of the present invention are 2.8, 2.915, 3.1, and 3.3, respectively, it can be seen that the embodiment of the present invention can achieve the real-time accurate detection of the micro-displacement of the fluorescent material when the refractive index of the coupling structure is 2.8 to 3.3. In FIG. 9, the distance d2 between the nanoflow channel 4 and the ring resonator 5 is 200nm, and the distance d3 between the ring resonator 4 and the waveguide 6 is 250 nm.
In fig. 3 to 9, the width d1 of the corresponding nanoflow channel is 100nm, the thickness of both side walls is 50nm, the total width d5 is 200nm, the outer diameter R1 and the inner diameter R2 of the ring resonator 5 are 2.3 μm and 2.1 μm, respectively, and the width d6 of the waveguide 6 is 200 nm.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. The nano-flow channel-resonant cavity coupling structure for measuring the micro-displacement of the fluorescent material is characterized by comprising a nano-flow channel (4), an annular resonant cavity (5) and a waveguide (6), wherein the nano-flow channel (4) and the waveguide (6) are respectively arranged on two sides of the annular resonant cavity (5), and the nano-flow channel (4) is filled with a biological solution containing the fluorescent material.
2. The structure of claim 1, wherein the refractive index of the nanoflow channel (4), the ring resonator (5) and the waveguide (6) is 2.8-3.3.
3. The structure of claim 1, wherein the width d1 of the nanoflow channel (4) is 50-150 nm, the thickness of the two side walls is 50-75 nm, and the total width d5 is 150-300 nm.
4. The structure of claim 1, wherein the refractive index of the biological solution filled in the nanoflow channel (4) is 1.33-1.5.
5. The structure of claim 1, wherein the fluorescent substance in the biological solution is quantum dot, fluorescent dye or upconversion nanoparticle, and the horizontal distance between the fluorescent substance and the center of the ring-shaped resonant cavity (5) is 0-1 μm.
6. The structure of claim 1, wherein the distance d2 between the nanoflow channel (4) and the ring resonator (5) is 150-250 nm.
7. The structure of claim 1, wherein the outer diameter R1 and the inner diameter R2 of the ring resonator (5) are 2.27 to 2.33 μm and 2.07 to 2.13 μm, respectively.
8. The structure of claim 1, wherein the distance d3 between the ring resonator (5) and the waveguide (6) is 200-300 nm.
9. The structure of claim 1, wherein the width d6 of the waveguide (6) is 150-300 nm.
10. The structure of claim 1, wherein the nanoflow channel-cavity coupling structure (4), the ring-shaped cavity (5) and the waveguide (6) are disposed in the same plane, and the nanoflow channel (4) and the waveguide (6) are disposed in parallel.
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