CN111632948A - High-speed rotating cleaning machine for crystal plate - Google Patents
High-speed rotating cleaning machine for crystal plate Download PDFInfo
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- CN111632948A CN111632948A CN202010530690.7A CN202010530690A CN111632948A CN 111632948 A CN111632948 A CN 111632948A CN 202010530690 A CN202010530690 A CN 202010530690A CN 111632948 A CN111632948 A CN 111632948A
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- Prior art keywords
- cleaning
- driving
- placing
- seat
- jacking
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- 238000004140 cleaning Methods 0.000 title claims abstract description 134
- 239000013078 crystal Substances 0.000 title claims abstract description 50
- 230000007246 mechanism Effects 0.000 claims abstract description 48
- 230000001360 synchronised effect Effects 0.000 claims description 21
- 230000005540 biological transmission Effects 0.000 claims description 17
- 239000007788 liquid Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000005406 washing Methods 0.000 claims description 2
- 238000010926 purge Methods 0.000 claims 2
- 230000000694 effects Effects 0.000 abstract description 14
- 238000000034 method Methods 0.000 abstract description 10
- 230000008569 process Effects 0.000 abstract description 9
- 230000006872 improvement Effects 0.000 description 12
- 238000004506 ultrasonic cleaning Methods 0.000 description 6
- 238000002791 soaking Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003340 mental effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
- B08B9/20—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought
- B08B9/28—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus cleaning by splash, spray, or jet application, with or without soaking
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
- B08B9/20—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought
- B08B9/36—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus cleaning by using brushes
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Liquid Crystal (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention relates to the technical field of automatic cleaning machines, in particular to a high-speed rotating cleaning machine for a crystal plate, which comprises a rack, a support frame arranged on the rack, a placing mechanism arranged on the support frame and used for placing the crystal plate, a driving mechanism arranged on the support frame and used for driving the placing mechanism, and a cleaning mechanism used for cleaning the crystal plate; the cleaning mechanism comprises an upper cleaning device and a lower cleaning device; the high-speed rotation cleaning device adopts a high-speed rotation driving structure to drive the crystal disc to rotate to clean the two sides of the crystal disc, and the two sides of the crystal disc are cleaned in a high-speed rotation mode through the cooperation of the upper cleaning roller and the lower cleaning roller in the high-speed rotation process, so that the cleaning effect is good, and the high-speed rotation cleaning is more thorough.
Description
Technical Field
The invention relates to the technical field of automatic cleaning machines, in particular to a crystal plate high-speed rotating cleaning machine.
Background
Automation technology is widely used in industry, agriculture, military, scientific research, transportation, commerce, medical treatment, services, and home. The automatic technology can not only liberate people from heavy physical labor, partial mental labor and severe and dangerous working environments, but also expand the functions of human organs, greatly improve the labor productivity and enhance the ability of human to know the world and transform the world. Large plants in automation systems are also referred to as automation devices. Refers to a process in which a machine or apparatus automatically operates or controls according to a prescribed program or instruction without human intervention.
The crystal plate is used as a carrier of an electronic element, can be recycled, and needs to be cleaned after one time; in the prior art, degumming is carried out manually or manually after soaking for a certain time. This mode needs a large amount of time and manpower, soaks at first and needs very long soaking time can wash, and the manual cleaning degree of difficulty is higher, consequently washs the efficiency that improves to the crystal dish and needs to make further improvement design.
Disclosure of Invention
In order to solve the problems, the invention provides the high-speed rotation cleaning machine for the crystal disc, which adopts a high-speed rotation driving structure to drive the crystal disc to rotate so as to clean the two sides of the crystal disc, and the two sides of the crystal disc are cleaned in a high-speed rotation manner through the matching of an upper cleaning roller and a lower cleaning roller in the high-speed rotation process, so that the cleaning effect is good, and the high-speed rotation cleaning is more thorough.
The technical scheme adopted by the invention is as follows: a high-speed rotating cleaning machine for a crystal plate comprises a rack, a supporting frame arranged on the rack, a placing mechanism arranged on the supporting frame and used for placing the crystal plate, a driving mechanism arranged on the supporting frame and used for driving the placing mechanism, and a cleaning mechanism used for cleaning the crystal plate;
the further improvement of the scheme is that the cleaning mechanism comprises an upper cleaning device and a lower cleaning device;
the upper cleaning device comprises a swing arm, a swing driving assembly for driving the swing arm and an upper cleaning roller arranged on the swing arm;
the further improvement of the scheme is that the lower part cleaning device comprises a jacking assembly arranged in the support frame, a transmission seat connected with the jacking assembly and a lower part cleaning roller arranged on the transmission seat, and the upper part cleaning roller corresponds to the lower part cleaning roller.
The further improvement to the above scheme is that the rack is provided with a tank body for containing the cleaning liquid below the support frame, and each tank body is connected with a water pump.
The further improvement of the scheme is that the rack is provided with an ultrasonic cleaning machine on one side of the support frame, and the ultrasonic cleaning machine comprises a cleaning chamber, a placing table arranged in the cleaning chamber and used for placing a crystal disc and a lifting driving seat used for driving the placing table to lift.
The further improvement of the scheme is that the lifting driving seat comprises an outer shaft sleeve, an inner shaft sleeve arranged in the outer shaft sleeve, a lifting shaft arranged in the inner diameter of the inner shaft sleeve, a rotating motor used for driving the inner shaft sleeve to rotate and a lifting cylinder used for driving the lifting shaft, and the inner shaft sleeve is connected with the placing table.
The further improvement of the above scheme is that the placing mechanism comprises a plurality of groups of support shafts arranged annularly, a rotating shaft rotatably arranged in the support shafts and a placing seat arranged at the top end of the rotating shaft, and the placing seat is provided with a placing groove for placing the crystal disc.
The further improvement of the scheme is that the supporting shaft is uniformly distributed with six groups in the circumferential direction by taking the lower cleaning device as a center, and each group is provided with a rotating shaft, a placing seat and a placing groove.
The further improvement of the scheme is that a plurality of bearings are installed on the inner diameter of the supporting shaft, and the rotating shaft is rotatably installed on the bearings.
The further improvement of the scheme is that the driving mechanism comprises a driving motor and a first synchronous wheel connected with the driving motor, the first synchronous wheel is in transmission connection with a synchronous belt, the synchronous belt is in synchronous connection with a second synchronous wheel, and the second synchronous wheel is connected with the rotating shaft.
The further improvement of the scheme is that the driving motor is connected with a linkage structure in a driving mode, the linkage structure is connected with a first synchronous wheel, and the synchronous wheel is provided with a guide wheel.
The jacking assembly comprises a jacking guide shaft, a movable frame capable of moving on the jacking guide shaft and a jacking driving cylinder for driving the jacking guide shaft to jack, and the transmission seat is mounted on the movable frame;
the further improvement of the scheme is that the outer diameters of the upper cleaning roller and the lower cleaning roller are both provided with brushes.
The invention has the beneficial effects that:
compared with the traditional method of cleaning by manual operation, the invention adopts a high-speed rotation driving structure to drive the crystal disc to rotate to clean the two sides of the crystal disc, and the upper cleaning roller and the lower cleaning roller are matched in the high-speed rotation process to clean the two sides of the crystal disc by high-speed rotation, so that the cleaning effect is good, and the high-speed rotation cleaning is more thorough. The device comprises a rack, a support frame arranged on the rack, a placing mechanism arranged on the support frame and used for placing a crystal plate, a driving mechanism arranged on the support frame and used for driving the placing mechanism, and a cleaning mechanism used for cleaning the crystal plate. The crystal plate is placed on the placing mechanism in the cleaning process, the driving mechanism drives the placing mechanism to drive the crystal plate to rotate, and under the condition of high-speed rotation, the crystal plate is cleaned through the cleaning mechanism, so that the cleaning effect is good.
In addition, the cleaning mechanism comprises an upper cleaning device and a lower cleaning device; the upper cleaning device comprises a swing arm, a swing driving assembly for driving the swing arm and an upper cleaning roller arranged on the swing arm; lower part belt cleaning device is including installing jacking subassembly in the support frame, the transmission seat that links to each other with the jacking subassembly and installing in the lower part cleaning roller of transmission seat, upper portion cleaning roller corresponds with lower part cleaning roller, and upper portion washs and carries out the brush through swing arm structure cooperation upper portion cleaning roller to the crystal dish and washs, and the lower part is washd and is carried out the brush through jacking subassembly cooperation lower part cleaning roller to the lower surface of crystal dish and washs, and the cleaning performance is good.
Drawings
FIG. 1 is a schematic structural view of a high-speed rotary cleaning machine according to the present invention;
FIG. 2 is a schematic view of an ultrasonic cleaning machine of the high speed rotary cleaning machine of FIG. 1;
FIG. 3 is a schematic view of the placement mechanism and the lower cleaning device of the high speed rotary cleaning machine of FIG. 1;
FIG. 4 is a schematic view of the drive mechanism of the high speed rotary washer of FIG. 1;
fig. 5 is a schematic view of the upper wash roller of the high-speed rotary washer of fig. 1.
Description of reference numerals: the ultrasonic cleaning machine comprises a frame 100, a tank 110, a water pump 120, a support frame 200, a placing mechanism 300, a support shaft 310, a rotating shaft 320, a placing seat 330, a placing groove 340, a driving mechanism 400, a driving motor 410, a linkage structure 411, a first synchronizing wheel 420, a synchronous belt 430, a guide wheel 431, a second synchronizing wheel 440, a cleaning mechanism 500, an upper cleaning device 510, a swing arm 511, a swing driving assembly 512, an upper cleaning roller 513, a lower cleaning device 520, a lifting assembly 521, a lifting guide shaft 521a, a movable frame 521b, a lifting driving cylinder 521c, a movable frame 521b, a transmission seat 522, a lower cleaning roller 523, an ultrasonic cleaning machine 600, a cleaning chamber 610, a placing table 620, a lifting driving seat 630, an outer shaft sleeve 631, an inner shaft sleeve 632, a lifting shaft 633, a rotating motor 634 and a lifting cylinder 635.
Detailed Description
The invention will be further described with reference to the accompanying drawings.
As shown in fig. 1 to 5, a high-speed rotating cleaning machine for a wafer tray comprises a frame 100, a supporting frame 200 mounted on the frame 100, a placing mechanism 300 mounted on the supporting frame 200 for placing the wafer tray, a driving mechanism 400 mounted on the supporting frame 200 for driving the placing mechanism 300, and a cleaning mechanism 500 for cleaning the wafer tray.
The rack 100 is provided with a tank 110 for containing cleaning liquid below the supporting frame 200, each tank 110 is connected with a water pump 120, the tanks 110 and the water pumps 120 of a plurality of groups are matched, a nozzle can be connected to spray cleaning liquid on the crystal plate, a plurality of groups of structures are adopted, the cleaning liquid can be replaced or sequentially and alternately cleaned according to different cleaning conditions, the cleaning is convenient, and the cleaning effect is good.
Referring to fig. 2, an ultrasonic cleaner 600 is disposed on one side of the supporting frame 200 of the rack 100, the ultrasonic cleaner 600 includes a cleaning chamber 610, a placing table 620 disposed in the cleaning chamber 610 and used for placing a wafer tray, and a lifting driving seat 630 used for driving the placing table 620 to lift, and particularly, the ultrasonic cleaner 600 is disposed in cooperation with a high-speed rotating cleaner, and after cleaning by high-speed rotation, cleaning is performed by ultrasonic waves, so that the two units are disposed together, and the space and cost of the apparatus are saved. Particularly, a placing table 620 is arranged in the cleaning chamber 610 and used for placing a crystal plate, and the placing table 620 is driven to lift through a lifting driving seat 630 in the ultrasonic cleaning process so as to improve the cleaning effect.
The lifting driving seat 630 comprises an outer shaft sleeve 631, an inner shaft sleeve 632 arranged in the outer shaft sleeve 631, a lifting shaft 633 arranged in the inner diameter of the inner shaft sleeve 632, a rotating motor 634 used for driving the inner shaft sleeve 632 to rotate and a lifting cylinder 635 used for driving the lifting shaft 633, wherein the inner shaft sleeve 632 is connected with the placing table 620, the lifting cylinder 635 drives the lifting shaft 633 to drive the placing table 620 to lift, the outer shaft sleeve 631 is used for supporting a structure, the inner shaft sleeve 632 is used for driving the rotating shaft to rotate, and the rotating motor 634 is used for driving the rotating shaft to rotate.
Referring to fig. 3, the placing mechanism 300 includes a plurality of sets of supporting shafts 310 arranged in an annular direction, a rotating shaft 320 rotatably installed in the supporting shafts 310, and a placing seat 330 installed at the top end of the rotating shaft 320, wherein the placing seat 330 is provided with a placing groove 340 for placing a crystal disc, specifically, the placing groove 340 is used for placing the crystal disc, the rotating shaft 320 drives the placing seat 330 to rotate, the crystal disc is driven to rotate in the rotating process, the rotating stability is good, the rotating efficiency is high, and the cleaning effect is improved.
A plurality of bearings are installed to back shaft 310 internal diameter, rotation axis 320 rotatable mounting is in the bearing, guarantees through the bearing that rotation axis 320 can the fast revolution, and the rotational stability is good, realizes high-speed rotatory washing, and the cleaning performance is good.
Referring to fig. 4, the driving mechanism 400 includes a driving motor 410 and a first synchronizing wheel 420 connected to the driving motor 410, the first synchronizing wheel 420 is connected to a synchronizing belt 430 in a transmission manner, the synchronizing belt 430 is connected to a second synchronizing wheel 440 in a synchronization manner, the second synchronizing wheel 440 is connected to the rotating shaft 320, the rotating shaft 320 is driven to rotate under the driving action of the driving motor 410 driving the synchronizing wheel and the synchronizing belt 430, and the driving effect is good, the transmission efficiency is high, and the stability is good.
The driving motor 410 is connected with a linkage structure 411 in a driving mode, the linkage structure 411 is connected with a first synchronous wheel 420, the synchronous wheel 430 is provided with a guide wheel 431, and the linkage structure 411 can be used for accelerating transmission so as to achieve high-speed cleaning.
Referring to fig. 3 and 5, the cleaning mechanism 500 includes an upper cleaning device 510 and a lower cleaning device 520; the upper cleaning device 510 comprises a swing arm 511, a swing driving assembly 512 for driving the swing arm 511, and an upper cleaning roller 513 mounted on the swing arm 511; the lower cleaning device 520 comprises a jacking assembly 521 arranged in the support frame 200, a transmission seat 522 connected with the jacking assembly 521, and a lower cleaning roller 523 arranged on the transmission seat 522, the upper cleaning roller 513 corresponds to the lower cleaning roller 523, and the swing driving assembly 512 is driven by a motor. The upper part is cleaned by matching the swing arm 511 structure with the upper cleaning roller 513 to brush the crystal plate, and the lower part is cleaned by matching the jacking assembly 521 with the lower cleaning roller 523 to brush the lower surface of the crystal plate, so that the cleaning effect is good.
The jacking assembly 521 comprises a jacking guide shaft 521a, a movable frame 521b which can be moved on the jacking guide shaft 521a, and a jacking driving cylinder 521c for driving the jacking guide shaft 521a to jack, and the transmission seat 522 is mounted on the movable frame 521 b; drive actuating cylinder 521c through the jacking and drive adjustable shelf 521b, the stability of jacking is guaranteed through the effect of jacking guiding axle 521a to adjustable shelf 521b, and it is effectual to transmit, and structural reliability is strong.
The outer diameters of the upper cleaning roller 513 and the lower cleaning roller 523 are respectively provided with a brush, the brushes are arranged for cleaning, the cleaning is more thorough, and the cleaning effect is better.
The high-speed rotary cleaning device adopts a high-speed rotary driving structure to drive the crystal disc to rotate to clean the two sides of the crystal disc, and the two sides of the crystal disc are cleaned in a high-speed rotary mode through the cooperation of the upper cleaning roller 513 and the lower cleaning roller 523 in the high-speed rotary process, so that the cleaning effect is good, and the high-speed rotary cleaning is more thorough. Specifically, the rack 100, the support frame 200 mounted on the rack 100, the placing mechanism 300 mounted on the support frame 200 for placing the wafer tray, the driving mechanism 400 mounted on the support frame 200 for driving the placing mechanism 300, and the cleaning mechanism 500 for cleaning the wafer tray are provided. The crystal plate is placed on the placing mechanism 300 in the cleaning process, the driving mechanism 400 drives the placing mechanism 300 to drive the crystal plate to rotate, and under the condition of high-speed rotation, the crystal plate is cleaned through the cleaning mechanism 500, so that the cleaning effect is good.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the present invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. The utility model provides a high-speed rotatory cleaning machine of crystal dish which characterized in that: the device comprises a rack, a supporting frame arranged on the rack, a placing mechanism arranged on the supporting frame and used for placing a crystal disc, a driving mechanism arranged on the supporting frame and used for driving the placing mechanism, and a cleaning mechanism used for cleaning the crystal disc;
the cleaning mechanism comprises an upper cleaning device and a lower cleaning device;
the upper cleaning device comprises a swing arm, a swing driving assembly for driving the swing arm and an upper cleaning roller arranged on the swing arm;
the lower part belt cleaning device is including installing the jacking subassembly in the support frame, the transmission seat that links to each other with the jacking subassembly and installing the lower part cleaning roller in the transmission seat, upper portion cleaning roller corresponds with lower part cleaning roller.
2. The wafer high-speed spin washer of claim 1, wherein: the frame is located the support frame below and is provided with the jar body that is used for holding the washing liquid, and every group jar body all is connected with the water pump.
3. The wafer high-speed spin washer of claim 1, wherein: the frame is located support frame one side and is provided with ultrasonic cleaner, ultrasonic cleaner includes the purge chamber, sets up and places the platform that is used for placing the crystal dish in the purge chamber and is used for the drive to place the lift drive seat that the platform goes up and down.
4. The wafer high-speed spin washer of claim 3, wherein: the lifting driving seat comprises an outer shaft sleeve, an inner shaft sleeve arranged in the outer shaft sleeve, a lifting shaft arranged in the inner diameter of the inner shaft sleeve, a rotating motor used for driving the inner shaft sleeve to rotate and a lifting cylinder used for driving the lifting shaft, and the inner shaft sleeve is connected with the placing table.
5. The wafer high-speed spin washer of claim 1, wherein: the placing mechanism comprises a plurality of groups of supporting shafts arranged in the circumferential direction, a rotating shaft rotatably arranged in the supporting shafts and a placing seat arranged at the top end of the rotating shaft, and the placing seat is provided with a placing groove used for placing the crystal disc.
6. The wafer high-speed spin washer of claim 5, wherein: six groups of support shafts are uniformly distributed in the circumferential direction by taking the lower cleaning device as a center, and each group is provided with a rotating shaft, a placing seat and a placing groove.
7. The wafer high-speed spin washer of claim 6, wherein: the inner diameter of the supporting shaft is provided with a plurality of bearings, and the rotating shaft is rotatably arranged on the bearings.
8. The wafer high-speed spin washer of claim 7, wherein: the driving mechanism comprises a driving motor and a first synchronous wheel connected with the driving motor, the first synchronous wheel is in transmission connection with a synchronous belt, the synchronous belt is in synchronous connection with a second synchronous wheel, and the second synchronous wheel is connected with the rotating shaft.
9. The wafer high-speed spin washer of claim 8, wherein: the driving motor is connected with a linkage structure in a driving mode, the linkage structure is connected with a first synchronous wheel, and the synchronous wheel is provided with a guide wheel.
10. The wafer high-speed spin washer of claim 1, wherein: the jacking assembly comprises a jacking guide shaft, a movable frame capable of moving on the jacking guide shaft and a jacking driving cylinder for driving the jacking guide shaft to jack, and the transmission seat is mounted on the movable frame;
the outer diameters of the upper cleaning roller and the lower cleaning roller are both provided with brushes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010530690.7A CN111632948A (en) | 2020-06-11 | 2020-06-11 | High-speed rotating cleaning machine for crystal plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010530690.7A CN111632948A (en) | 2020-06-11 | 2020-06-11 | High-speed rotating cleaning machine for crystal plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111632948A true CN111632948A (en) | 2020-09-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010530690.7A Pending CN111632948A (en) | 2020-06-11 | 2020-06-11 | High-speed rotating cleaning machine for crystal plate |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101609791A (en) * | 2008-06-18 | 2009-12-23 | 东京毅力科创株式会社 | Base plate cleaning device, substrate-cleaning method and storage medium |
| CN104275317A (en) * | 2013-07-03 | 2015-01-14 | 株式会社荏原制作所 | Substrate cleaning apparatus and substrate cleaning method |
| CN204685614U (en) * | 2015-06-09 | 2015-10-07 | 孟永江 | A kind of glass plate cleaning device |
| CN204710776U (en) * | 2015-06-01 | 2015-10-21 | 上海联泰三维科技有限公司 | The cleaning device of photocureable rapid shaping part |
| CN207325477U (en) * | 2017-09-22 | 2018-05-08 | 东莞市利豪捷电子科技有限公司 | A kind of pushing meanss of glass ultrasonic cleaning machine |
| WO2019208265A1 (en) * | 2018-04-27 | 2019-10-31 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate treatment device and substrate treatment method |
| CN212633660U (en) * | 2020-06-11 | 2021-03-02 | 东莞市日和自动化设备有限公司 | High-speed rotating cleaning machine for crystal plate |
-
2020
- 2020-06-11 CN CN202010530690.7A patent/CN111632948A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101609791A (en) * | 2008-06-18 | 2009-12-23 | 东京毅力科创株式会社 | Base plate cleaning device, substrate-cleaning method and storage medium |
| CN104275317A (en) * | 2013-07-03 | 2015-01-14 | 株式会社荏原制作所 | Substrate cleaning apparatus and substrate cleaning method |
| CN204710776U (en) * | 2015-06-01 | 2015-10-21 | 上海联泰三维科技有限公司 | The cleaning device of photocureable rapid shaping part |
| CN204685614U (en) * | 2015-06-09 | 2015-10-07 | 孟永江 | A kind of glass plate cleaning device |
| CN207325477U (en) * | 2017-09-22 | 2018-05-08 | 东莞市利豪捷电子科技有限公司 | A kind of pushing meanss of glass ultrasonic cleaning machine |
| WO2019208265A1 (en) * | 2018-04-27 | 2019-10-31 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate treatment device and substrate treatment method |
| CN212633660U (en) * | 2020-06-11 | 2021-03-02 | 东莞市日和自动化设备有限公司 | High-speed rotating cleaning machine for crystal plate |
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