CN111624691B - Metal reflector and manufacturing method thereof - Google Patents
Metal reflector and manufacturing method thereof Download PDFInfo
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- CN111624691B CN111624691B CN202010447708.7A CN202010447708A CN111624691B CN 111624691 B CN111624691 B CN 111624691B CN 202010447708 A CN202010447708 A CN 202010447708A CN 111624691 B CN111624691 B CN 111624691B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0808—Mirrors having a single reflecting layer
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
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Abstract
The invention discloses a metal reflector, which comprises a closed base body, a mirror surface arranged on one end surface of the base body, an internal interlayer lightweight structure and a back plate on the other end surface of the base body, wherein the mirror surface is provided with a plurality of grooves; the mirror surface comprises a surface modification layer, a reflection layer and a protection layer, wherein the protection layer is the outermost layer; the sandwich light-weight structure comprises a plurality of cavities and through holes connected through the cavities. The interlayer lightweight structure in the metal reflector is more flexible by adopting an additive manufacturing process, so that the metal reflector not only meets the high-rigidity design of the reflector, but also is lightened due to the interlayer lightweight structure, and is an integrated design, the design of the surface modification layer ensures that the RMS value of the deviation value defined as the precision from an ideal surface is better than 1/10 lambda, and the lambda is 632.8 nm; the design of the transition layer enhances the chemical and mechanical durability of the metal mirror and improves the bond strength between the metal mirror substrate and the surface modification layer.
Description
Technical Field
The invention relates to the field of reflectors, in particular to a metal reflector.
Background
The catadioptric optical system is widely applied to the fields of aerial measurement, remote sensing and the like. With the rapid development of aviation science and technology, the catadioptric optical system of the airborne photoelectric remote sensing equipment develops towards the direction of dexterity, light weight and high resolution, and higher requirements are put forward on the volume, the weight and the like of the catadioptric optical system. With the increasing demand for practicality and rapidity of the fold-back type optical system, it is becoming more and more important to study optical elements that can be used in various wavelength bands.
At present, a medium-small-caliber metal reflector machined by a traditional machining method is gradually applied to a catadioptric optical system, and the medium-small-caliber metal reflector has the advantages of being good in machining manufacturability, low in material price and the like. However, due to the limitation of the traditional machining mode, the light weight and high rigidity of the metal reflector are difficult to meet at the same time, so that the existing metal reflector is difficult to meet the application in a visible light optical system with stricter surface shape precision requirements.
In order to solve the problem, the prior art adopts a mode of processing a through hole on the side surface of the reflector to lighten the reflector, the reflector is made of a metal material, and when the caliber of the reflector is not large, the processing requirement of the reflector can be met. When the mirror aperture is large, it is difficult to machine the mirror in a lightweight manner by machining a through hole in the side surface of the mirror, and the through hole may have a taper. Meanwhile, the light weight rate of the light weight structure form of the reflector is low.
Disclosure of Invention
The invention aims to at least solve one of the technical problems in the prior art and provides a metal reflector, which has a lighter structure and is simplified in the preparation process through the processing technology of additive manufacturing.
The invention is realized by the following technical scheme:
a metal reflector comprises a closed base body, a mirror surface arranged on one end surface of the base body, an internal interlayer lightweight structure and a back plate on the other end surface of the base body; the mirror surface comprises a surface modification layer, a reflection layer and a protection layer, wherein the protection layer is the outermost layer; the sandwich light-weight structure comprises a plurality of cavities and through holes connected through the cavities.
Preferably, the mirror plate further comprises a transition layer arranged on the innermost layer of the mirror plate, wherein the transition layer is used for increasing the bonding strength of the substrate and the surface modification layer.
Preferably, the cavity forms a triangular honeycomb structure, and the through holes are arranged on the vertical surface of the cavity and communicated with each other to form a plurality of single-route powder discharge channels.
Preferably, the side surface of the base body is provided with powder discharging holes which correspond to two ends of each powder discharging channel one to one.
Preferably, the substrate is made of aluminum alloy.
Preferably, the surface modification layer is made of pure Al.
A manufacturing method of the metal reflector comprises the following steps:
firstly, additive manufacturing is carried out on a base plate to form a mirror surface, an interlayer lightweight structure and a back plate;
secondly, performing semi-finishing on the substrate, processing the mirror surface, the side surface of the substrate and the back plate, and reserving finishing allowance on each surface;
step three, performing finish machining on the base body, and performing finish machining on the mirror surface, the side surface of the base body and the reserved finish machining allowance of the back plate;
fourthly, performing high-low temperature cyclic stress relief treatment on the matrix;
step five, processing the mirror surface in a single-point diamond turning mode;
sixthly, performing modified coating on the mirror surface, and performing modification treatment on a surface modified layer by a vacuum ion beam assisted deposition method;
step seven, polishing the mirror surface;
step eight, plating a reflecting layer on the substrate;
and step nine, coating a protective layer on the substrate.
Preferably, the additive manufacturing process comprises the steps of:
step one, carrying out three-dimensional design on the base body and a supporting structure for supporting the base body, and exporting an STL file, wherein a certain included angle is formed between the mirror surface and a substrate through the supporting structure;
inputting the STL file into additive manufacturing equipment, setting laser processing power to be 400W, setting laser spot diameter to be 100-500 mu m, laser wavelength to be 1060-1110 nm, scanning speed to be 980mm/s, scanning interval to be 0.11mm, printing thickness of each layer to be 60-100 mu m, forming a base body and a supporting structure on an additive manufacturing substrate, and then exporting the STL format file for later use;
cleaning and discharging powder from the base body, and discharging the powder which is not melted in the internal lightweight structure through a blower;
step four, separating the substrate, the supporting structure and the substrate by wire cutting;
and fifthly, carrying out heat treatment on the matrix.
Preferably, the heat treatment includes solution treatment and aging treatment.
Preferably, the method further comprises the step of coating a transition layer on the metal reflector, wherein the transition layer is arranged before the surface modification layer is coated.
Has the advantages that: the interlayer lightweight structure in the metal reflector is more flexible by adopting an additive manufacturing process, so that the metal reflector not only meets the high-rigidity design of the reflector, but also is lightened due to the interlayer lightweight structure, and is an integrated design, the design of the surface modification layer ensures that the RMS value of the deviation value defined as the precision from an ideal surface is better than 1/10 lambda, and the lambda is 632.8 nm; the design of the transition layer enhances the chemical and mechanical durability of the metal mirror and improves the bond strength between the metal mirror substrate and the surface modification layer.
The processing method of the metal reflector enables the reflector to be formed without a rough processing procedure, and shortens the process flow. By adopting the special modification process, the RMS value of the surface shape after the modified coating is superior to 1/10 lambda, the second single-point turning is not needed, the second single-point turning after the modification of the traditional aluminum alloy reflector is reduced, the processing process is simplified, and the period is saved.
Drawings
The following detailed description of embodiments of the invention is provided in conjunction with the appended drawings, in which:
FIG. 1 is an overall and internal schematic view of one embodiment of the present invention;
FIG. 2 is an isometric view of one of the embodiments of the invention;
FIG. 3 is a front view of one of the embodiments of the present invention;
FIG. 4a is a cross-sectional view of FIG. 3;
FIG. 4b is a schematic view of the powder discharge structure of FIG. 4 a;
FIG. 5 is a schematic structural diagram of an embodiment of the present invention;
FIG. 6 is a schematic illustration of additive manufacturing of a substrate according to one embodiment of the present invention;
FIG. 7 is a flowchart of a manufacturing method according to one embodiment of the present invention.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 and 5, a metal reflector comprises a closed base body 1, a mirror surface 2 arranged on one end surface of the base body 1, an internal interlayer lightweight structure and a back plate 4 on the other end surface; the mirror surface 2 comprises a surface modification layer 11, a reflection layer 12 and a protection layer 13, wherein the protection layer 13 is the outermost layer; the sandwich lightweight structure includes a plurality of cavities 31 and through-holes 32 connected through the cavities 31. The shape of the substrate 1 can be a cylindrical closed structure, one surface of the cylinder is a mirror surface 2, the other surface is a back plate 4, and the material of the substrate 1 can be AlSi10Mg、AlSi12And the like, or other aluminum alloy materials. The arrangement of the mirror surface 2 may be planar, spherical or aspherical. In order to expand the application range of the metal reflector, in some field lens applications, due to the influence of external factors, the adhesion degree and the mechanical and chemical durability between the substrate 1 and the surface modification layer 11 need to be enhanced, at this time, the transition layer 14 can be formed on the substrate 1, and the material of the transition layer 14 is Al2O3The thickness of the transition layer 14 may be set between 5-30 nm.
In a preferred embodiment, as shown in fig. 1, 4a and 4b, the cavity 31 is formed in a triangular honeycomb structure, and the through holes 32 are arranged on the vertical surface of the cavity 31 and communicated with the powder discharging channels forming a plurality of single routes. The side of the base body 1 is provided with powder discharging holes 33 which correspond to two ends of each powder discharging channel one by one. The triangular honeycomb cavity 31 structure enables the metal reflector to be stronger in rigidity and lighter in weight; the cross section of the cavity 31 is triangular, the space of the cavity 31 is triangular prism-shaped, the cross section of each group of triangular honeycomb structures is hexagonal formed by six triangular uniform parts, the through holes 32 can be circular, the circular through holes are not easy to accumulate powder at the corners of the through holes compared with polygonal through holes, and the through holes 32 can also be elliptical; the through holes 32 are arranged to form a single path of powder discharging passage between the cavities 31. Of course, the cavities 31 may also be cubes, which are uniformly distributed in the substrate 1, and the cubes are uniformly distributed in multiple rows and columns, and the vertical surface between the cavities 31 in each row or each column is provided with a circular through hole 32, a single-path powder discharge channel is formed between the through hole 32 and the cavity 31, and then two corresponding powder discharge holes 33 are provided at two ports corresponding to the powder discharge channel. Fig. 5 is a walking diagram of the powder discharge channel, which can discharge powder in the direction marked by an arrow or in the opposite direction, but each channel is a single channel and is not compounded with other channels, so that powder in multiple channels is prevented from extruding the same through hole 32 to block the through hole 32. In the design, part of the edge cavity 31 of the cavity 31 in the base body 1 is not in the powder discharge channel, the cavities 31 can be respectively and directly communicated with the powder discharge holes 33 arranged on the side surface of the base body 1, a topological optimization structure can be adopted in the design of the sandwich light-weight structure 3, the material distribution is taken as an optimization object, the surface shape precision is taken as an optimization target, and the optimal structure distribution scheme is found through topological optimization calculation. In a preferred embodiment, the surface modification layer 11 is made of 99.99% pure aluminum, the thickness of the coating film is 10 μm, the surface modification layer 11 of pure aluminum can realize subsequent optical processing, and the surface shape precision RMS value after the coating film is modified can be better than 1/10 λ, and λ is 632.8 nm. The substrate 1 is made of aluminum alloy. Compared with other materials, the base body 1 made of the aluminum alloy material has the characteristics of high rigidity and light weight.
A preferred embodiment, fig. 1-7, a method of manufacturing the above-described metal mirror, the method comprising the steps of:
firstly, performing additive manufacturing on a substrate 1 on a substrate 6 to form a mirror surface 2, an interlayer lightweight structure and a back plate 4; additive manufacturing as referred to herein is 3D printing technology.
And step two, performing semi-finishing on the substrate 1, processing the mirror surface 2, the side surface of the substrate 1 and the back plate 4, and reserving processing allowance of 1mm on each surface.
Step three, performing finish machining on the base body 1, and performing finish machining on the mirror surface 2, the side surface of the base body 1 and the reserved finish machining allowance of the back plate 4; and reserving 0.2mm of optical processing allowance on the mirror surface 2.
Fourthly, performing high-low temperature cyclic stress relief treatment on the matrix 1; and performing high-low temperature cyclic stress relief treatment for 3 times at-55-70 ℃, and relieving internal stress of the reflector and machining residual stress.
Step five, processing the mirror surface 2 in a single-point diamond turning mode; the RMS value of the profile of the metal mirror surface 2 was λ/10, and the PV value was λ/2(λ 632.8 nm).
Sixthly, performing modified coating on the mirror surface 2, and performing modification treatment on a surface modified layer by a vacuum ion beam assisted deposition method; the surface modification layer 11 is made of 99.99% pure aluminum, ion beam assisted deposition is adopted, the electron beam evaporation plating temperature is 1100-1200 ℃, a boron nitride crucible is adopted, the thickness of the surface modification layer 11 is 5-15 mu m, and the growth rate is 1 nm/s-1.2 nm/s. The surface shape RMS value after the modified coating is better than 1/10 lambda; if the bonding strength between the substrate 1 and the surface modification layer 11 is not enough, a transition layer 14 needs to be arranged, and the transition layer 14 is also prepared by an ion beam assisted deposition method; the material of the transition layer 14 may be Al2O3Or nickel, which can serve to connect the surface modification layer 11 with the substrate 1, so that the surface modification layer 11 can be adhered to the substrate 1; however, the material of the substrate 1 manufactured at present is AlSi10Mg、AlSi12For example, the transition layer 14 may not be provided because pure Al material can be directly processed as a modified layer onto the substrate 1 and the connection is stable.
Step seven, polishing the mirror surface 2; the RMS value of the processing surface shape is better than lambda/40, and the PV value is better than lambda/8 (lambda is 632.8 nm).
And step eight, plating a reflecting layer 12 on the substrate 1.
Step nine, a protective layer 13 is coated on the substrate 1.
Wherein the thickness of the film layer of the reflecting layer 1 is 210 nm-230 nm, and the material of the reflecting layer 12 is Ag, Au or Al, etc. For the protective layer 13, the thickness of the film layer is 160 nm-180 nm, and the protective layer 13 is the outermost layer of the metal reflector and plays a role in protecting the metal reflector.
The additive manufacturing process comprises the following steps:
step one, three-dimensional design of the base body and a supporting structure 5 for supporting the base body is carried out, an STL file is exported, and a certain included angle is formed between the mirror surface 2 and a substrate 6 through the supporting structure 5;
and step two, inputting the STL file into additive manufacturing equipment, wherein the additive manufacturing equipment is an EOS3D printer, the laser processing power is set to be 400W, the diameter of a laser spot is 100-500 mu m, the laser wavelength is 1060-1110 nm, the scanning speed is 980mm/s, the scanning interval is 0.11mm, the printing thickness of each layer is 60-100 mu m, and a base body 1 and a supporting structure 5 are formed on an additive manufacturing substrate 6.
As shown in fig. 6, the supporting structure 5 is designed to be light, the supporting structure 5 is printed on the substrate 6, the surface of the supporting structure 5 for supporting the base body forms an angle of 30 ° with the horizontal plane of the substrate, which may be designed according to the convenience of use or may be an included angle of other angles, and the mirror surface 2 of the base body 1 is a surface far from the supporting structure 5.
Step three, cleaning and discharging powder from the substrate 1, and discharging unfused powder in an internal lightweight structure through a blower;
step four, separating the substrate 1, the supporting structure 5 and the substrate 6 by wire cutting;
and step five, carrying out heat treatment on the matrix 1. The heat treatment comprises solution treatment and aging treatment, wherein the solution treatment is firstly carried out, the temperature is heated to 529 +/-5 ℃, the heat preservation is carried out for 2 hours, then quenching is carried out, the steel plate is rapidly placed in quenching liquid within 10 seconds, the aging treatment is carried out after the solution treatment, the aging temperature is 177 +/-5 ℃, and the heat preservation is carried out for 8 hours.
The method also comprises the step of coating a transition layer 14 on the metal reflector, wherein the coating of the transition layer 14 is arranged before the coating treatment of the surface modification layer 11. Determining whether to arrange the transition layer 14 according to the requirements of adhesive strength and durability, if the transition layer 14 is arranged, plating the transition layer 14 on the substrate 1 by a vacuum ion beam assisted deposition method after single-point diamond turning and before surface modification layer plating, wherein the material of the transition layer 14 is Al2O3The thickness of the transition layer 14 is 5-30nm, and the transition layer 14 can enhance the chemical and mechanical durability of the metal reflector and improve the bonding strength between the additive manufacturing metal reflector substrate 1 and the surface modification layer 11.
According to the invention, the metal reflector is sealed by the interlayer lightweight structure 3 in an additive manufacturing mode, and the interlayer lightweight structure 3 is designed to be denser at the part close to the reflector surface 2 and loose at the other side according to requirements in the additive manufacturing process, so that the requirements of higher metal reflector for light weight and rigidity of the metal reflector are met.
The above embodiments are not limited to the technical solutions of the embodiments themselves, and the embodiments may be combined with each other into a new embodiment. The above embodiments are only for illustrating the technical solutions of the present invention and are not limited thereto, and any modification or equivalent replacement without departing from the spirit and scope of the present invention should be covered within the technical solutions of the present invention.
Claims (4)
1. A metal reflector is characterized by comprising a closed base body, a mirror surface arranged on one end surface of the base body, an internal interlayer lightweight structure and a back plate arranged on the other end surface of the base body, wherein the interlayer lightweight structure and the back plate are integrally formed on the base body;
the mirror surface comprises a surface modification layer, a reflection layer and a protection layer, wherein the protection layer is the outermost layer; the substrate is made of aluminum alloy, the surface modification layer is made of pure Al, and the thickness of the surface modification layer is 5-15 mu m; the metal reflector further comprises a transition layer arranged on the innermost layer of the mirror surface, the transition layer is used for increasing the bonding strength of the substrate and the surface modification layer, and the transition layer is made of Al2O3Or nickel with a thickness of 5-30 nm;
the sandwich lightweight structure comprises a plurality of cavities and through holes connected through the cavities, the cavities form a triangular honeycomb structure, the through holes are formed in the vertical faces of the cavities and communicated with powder discharging channels forming a plurality of single routes, and powder discharging holes corresponding to two ends of each powder discharging channel in a one-to-one mode are formed in the side face of the base body.
2. A method of manufacturing a metal mirror according to claim 1, comprising the steps of:
the manufacturing method comprises the following steps that firstly, additive manufacturing is carried out on a base body on a closed base body, a mirror face, an interlayer lightweight structure and a back plate are formed, and the interlayer lightweight structure and the back plate are integrally formed on the base body;
secondly, performing semi-finishing on the substrate, processing the mirror surface, the side surface of the substrate and the back plate, and reserving finishing allowance on each surface;
step three, performing finish machining on the base body, and performing finish machining on the mirror surface, the side surface of the base body and the reserved finish machining allowance of the back plate;
performing high-low temperature cyclic stress relief treatment on the substrate, wherein the treatment temperature is-55-70 ℃, and relieving internal stress of the reflector and machining residual stress;
step five, processing the mirror surface in a single-point diamond turning mode;
sixthly, performing modified coating on the mirror surface, and performing modified treatment on a surface modified layer by a vacuum ion beam assisted deposition method, wherein the surface modified layer is made of pure aluminum, the electron beam evaporation plating temperature is 1100-1200 ℃, a boron nitride crucible is adopted, the thickness of the surface modified layer is 5-15 mu m, and the growth rate is 1 nm/s-1.2 nm/s;
step seven, polishing the mirror surface;
step eight, plating a reflecting layer on the substrate;
step nine, plating a protective layer on the substrate;
the manufacturing method of the metal reflector further comprises the step of coating a transition layer on the metal reflector, wherein the transition layer coating is arranged before the surface modification layer coating treatment, the transition layer is used for increasing the bonding strength of the substrate and the surface modification layer, and the transition layer is Al2O3 or nickel and is 5-30nm thick.
3. A method of manufacturing a metal mirror according to claim 2, wherein the process of additive manufacturing comprises the steps of:
step one, carrying out three-dimensional design on the base body and a supporting structure for supporting the base body, and exporting an STL file, wherein a certain included angle is formed between the mirror surface and a substrate through the supporting structure;
inputting the STL file into additive manufacturing equipment, setting laser processing power to be 400W, setting laser spot diameter to be 100-500 mu m, laser wavelength to be 1060-1110 nm, scanning speed to be 980mm/s, scanning interval to be 0.11mm, printing thickness of each layer to be 60-100 mu m, and forming a base body and a supporting structure on an additive manufacturing substrate;
cleaning and discharging powder from the base body, and discharging the powder which is not melted in the internal lightweight structure through a blower;
step four, separating the substrate, the supporting structure and the substrate by wire cutting;
and fifthly, carrying out heat treatment on the matrix.
4. The method of manufacturing a metal mirror according to claim 3, wherein the heat treatment comprises solution treatment and aging treatment.
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| CN112904467A (en) * | 2021-01-29 | 2021-06-04 | 中国科学院西安光学精密机械研究所 | Metal reflector with internal bionic lattice structure and processing method thereof |
| CN114012511B (en) * | 2021-09-30 | 2023-09-19 | 中国航空工业集团公司洛阳电光设备研究所 | Titanium alloy nickel plating reflecting mirror and low-stress polishing method thereof |
| CN114252944A (en) * | 2021-12-10 | 2022-03-29 | 中国科学院长春光学精密机械与物理研究所 | Lightweight reflector structure based on additive manufacturing technology |
| CN114325905B (en) * | 2021-12-28 | 2023-06-16 | 中国科学院长春光学精密机械与物理研究所 | Optical-mechanical integrated reflecting mirror assembly and manufacturing method thereof |
| CN114326067B (en) * | 2021-12-30 | 2023-04-18 | 中国科学院长春光学精密机械与物理研究所 | Novel ray apparatus front group structure |
| CZ2022529A3 (en) * | 2022-12-16 | 2023-08-16 | Fyzikální ústav AV ČR, v.v.i. | Composite material |
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