CN111608521A

CN111608521A - Cover opening device for chamber and semiconductor processing equipment

Info

Publication number: CN111608521A
Application number: CN201910134072.8A
Authority: CN
Inventors: 孙晋博; 孙志坤
Original assignee: Beijing Naura Microelectronics Equipment Co Ltd
Current assignee: Beijing Naura Microelectronics Equipment Co Ltd
Priority date: 2019-02-22
Filing date: 2019-02-22
Publication date: 2020-09-01

Abstract

The invention discloses a cover opening device and semiconductor processing equipment. Comprises a rotating mechanism; the transmission mechanism comprises a driving rotating shaft and a driven rotating shaft which is sleeved on the inner side of the driving rotating shaft and is rotatably connected with the driving rotating shaft, the driving rotating shaft is connected with the rotating mechanism, and the driven rotating shaft is used for being connected with the cover plate; at least one sealing cavity is arranged between the driving rotating shaft and the driven rotating shaft, each sealing cavity comprises at least two sub-cavities which are separated and communicated with each other, and fluid is contained in the sub-cavities, so that when the movement working condition of the driving rotating shaft is suddenly changed along a first preset direction, damping fluid flowing along a second preset direction can be formed between the sub-cavities in each sealing cavity, and the movement of the driven rotating shaft is gentle; wherein the first predetermined direction is opposite to or the same as the second predetermined direction. The damping fluid formed in each sub-cavity can ensure that the driven rotating shaft moves smoothly, reduce the phenomenon of rapid stop, and prevent impact and damage to components.

Description

Cover opening device for chamber and semiconductor processing equipment

Technical Field

The invention relates to the technical field of semiconductor equipment, in particular to a cover opening device for a cavity and semiconductor processing equipment.

Background

In semiconductor equipment, the process requires timely sealing of the chamber to isolate heat and keep the chamber clean and contamination controlled. In a very demanding process, for example, the uniformity and cleanliness of the process are guaranteed, and the reliability and failure rate are guaranteed for a long time. Usually, a revolving door is arranged below the heating chamber to open and close the chamber, but because the revolving door is provided with a water cooling system, a horizontal adjusting system and other devices, the closed sectional area is large, and the self weight of the revolving door is heavy, the phenomenon of unstable operation is easy to occur in the process of driving the revolving door to move by an air cylinder.

The whole layout of this type of equipment is compact, and the space is restricted, and inside service temperature range is great (20 ~ 120 ℃), if use motor drive easily causes the cable to melt, and it is inconvenient to maintain, influences the reliability. Because the inside leakproofness and the cleanliness of needing control of board, from the frequency of maintaining the quantity that will minimize the device, components and parts such as cable penetrate and wear out the board inside and outside need avoid as far as possible equally. It is common to use a pneumatic cylinder to drive such a rotary gate mechanism.

However, in the process of driving the rotating door mechanism by the cylinder, the phenomenon of creeping of the cylinder may exist, and the cylinder is easy to generate the phenomenon due to the low required speed, so that the speed is not uniform. In addition, the mechanism needs to be accurately stopped at a limiting position when the stroke is finished, and the whole limiting structure is frequently impacted and easily damaged due to the large impulse of the whole rotating mechanism, so that the consistency is not easy to maintain.

Disclosure of Invention

The invention aims to solve at least one technical problem in the prior art and provides a cover opening device for a chamber and semiconductor processing equipment.

In order to achieve the above object, in a first aspect of the present invention, there is provided a cover opening device for a chamber, the cover opening device for driving a cover plate to rotate to close or open the chamber, the cover opening device comprising:

a rotation mechanism;

the transmission mechanism comprises a driving rotating shaft and a driven rotating shaft which is sleeved on the inner side of the driving rotating shaft and is rotatably connected with the driving rotating shaft, the driving rotating shaft is connected with the rotating mechanism, and the driven rotating shaft is used for being connected with the cover plate; and,

at least one sealing cavity is arranged between the driving rotating shaft and the driven rotating shaft, each sealing cavity comprises at least two sub-cavities which are spaced and communicated with each other, and fluid is contained in each sub-cavity, so that when the movement working condition of the driving rotating shaft is suddenly changed along a first preset direction, damping fluid flowing along a second preset direction can be formed between the sub-cavities in each sealing cavity, and the movement of the driven rotating shaft is smoothed; wherein the first predetermined direction is opposite to or the same as the second predetermined direction.

Optionally, at least one partition is disposed in each of the sealed chambers to divide the sealed chambers into different sub-chambers.

Optionally, the driving rotation shaft comprises a first inner side wall proximal to the driven rotation shaft and a first outer side wall distal from the driven rotation shaft;

the driven rotating shaft comprises a second outer side wall close to the driving rotating shaft and a second inner side wall far away from the driving rotating shaft; wherein,

the seal cavity is a seal groove which is concave from the first inner side wall to the direction close to the first outer side wall, the separator is a boss which is convex from the second outer side wall to the direction far away from the second inner side wall, the boss is inserted into the corresponding seal groove, and a gap is formed between the boss and the seal groove along the radial direction of the active rotating shaft.

Optionally, the number of the seal groove and the bosses is a plurality of, and the seal groove is arranged along the circumference of the first inner side wall at equal intervals, and the bosses are arranged along the circumference of the second outer side wall at equal intervals.

Optionally, each sealing groove corresponds to one boss.

the seal cavity is a seal groove which is concave from the second outer side wall to the direction close to the second inner side wall, the separator is a boss which is convex from the first inner side wall to the direction far away from the first outer side wall, the boss is inserted into the corresponding seal groove, and a gap is formed between the boss and the seal groove along the radial direction of the active rotating shaft.

Optionally, the boss is provided with a damping hole for communicating two adjacent sub-chambers.

Optionally, at least one damping member is further disposed in each of the sealing cavities, and the damping member can act on the driven rotating shaft in cooperation with the damping fluid to smooth the movement of the driven rotating shaft.

Optionally, when the seal cavity is a seal groove and the isolating piece is a boss, the damping piece is clamped between the boss top wall and the seal groove bottom wall.

Optionally, the rotation mechanism comprises:

a rotating cylinder;

and the first end of the rotating arm is fixedly connected with the cylinder body of the rotating cylinder, and the second end of the rotating arm is fixedly connected with the driving rotating shaft.

In a second aspect of the present invention, there is provided a semiconductor processing apparatus, comprising a chamber, a cover plate and a cover opening device for driving the cover plate to rotate to close or open the chamber, wherein the cover opening device adopts the cover opening device described above.

The invention discloses a cover opening device and semiconductor processing equipment, which comprise a rotating mechanism; the transmission mechanism comprises a driving rotating shaft and a driven rotating shaft which is sleeved on the inner side of the driving rotating shaft and is rotatably connected with the driving rotating shaft, the driving rotating shaft is connected with the rotating mechanism, and the driven rotating shaft is used for being connected with the cover plate; at least one sealing cavity is arranged between the driving rotating shaft and the driven rotating shaft, each sealing cavity comprises at least two sub-cavities which are spaced and communicated with each other, and fluid is contained in each sub-cavity, so that when the movement working condition of the driving rotating shaft is suddenly changed along a first preset direction, damping fluid flowing along a second preset direction can be formed between the sub-cavities in each sealing cavity, and the movement of the driven rotating shaft is smoothed; wherein the first predetermined direction is opposite to or the same as the second predetermined direction. According to the cover opening device, when the motion condition of the driving rotating shaft is suddenly changed due to sudden change of the load, the damping fluid formed in each sub-chamber can be used for avoiding the phenomenon that the driven rotating shaft suddenly changes the motion working condition, so that the driven rotating shaft can smoothly move, the phenomenon of rapid stop is reduced when the stroke is finished, impact is prevented, parts are prevented from being damaged, the service life of the cover opening device is prolonged, and the maintenance cost of the cover opening device is reduced.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

fig. 1 is an assembly view of a chamber, a cover plate and a cover opening device according to a first embodiment of the present invention;

fig. 2 is a sectional view of a chamber, a cover and a lid opening device according to a second embodiment of the present invention;

fig. 3 is a sectional view of a cap opening device at a driving rotation shaft and a driven rotation shaft in a third embodiment of the present invention;

fig. 4 is a sectional view of the cap opening device at the driving rotation shaft and the driven rotation shaft in the fourth embodiment of the present invention.

Description of the reference numerals

100: a cap opening device;

110: a rotation mechanism;

111: a rotating cylinder;

112: a rotating arm;

120: a transmission mechanism;

121: a driving rotating shaft;

121 a: a first inner side wall;

121 b: a first outer side wall;

122: a driven rotating shaft;

122 a: a second exterior sidewall;

122 b: a second inner side wall;

131: a first sealed chamber;

131 a: a first sub-chamber;

131 b: a second sub-chamber;

132: a second sealed chamber;

132 a: a third sub-chamber;

132 b: a fourth sub-chamber;

133: a third sealed chamber;

133 a: a fifth sub-chamber;

133 b: a sixth sub-chamber;

134: a fourth sealed chamber;

134 a: a seventh sub-chamber;

134 b: an eighth sub-chamber;

141: a first spacer;

142: a second spacer;

143: a third spacer;

144: a fourth spacer;

151: a first damping member;

152: a second damping member;

153: a third damping member;

154: a fourth damping member;

200: a cover plate;

300: a chamber.

Detailed Description

The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.

In a first aspect of the present invention, please refer to fig. 1 and 2, which relate to a cover opening device 100 for a chamber, the cover opening device 100 is used for driving a cover plate 200 to rotate to close or open a chamber 300. The cap opening device 100 includes a rotation mechanism 110 and a transmission mechanism 120. The transmission mechanism 120 includes a driving rotation shaft 121 and a driven rotation shaft 122 sleeved on the inner side of the driving rotation shaft 121 and rotatably connected therewith, the driving rotation shaft 121 is connected with the rotation mechanism 110, and the driven rotation shaft 122 is used for being connected with the cover plate 200.

Referring to fig. 3, four seal cavities, namely a first seal cavity 131, a second seal cavity 132, a third seal cavity 133 and a fourth seal cavity 134, may be disposed between the driving rotation shaft 121 and the driven rotation shaft 122, but the present invention is not limited thereto, and one, three or more than three seal cavities may be disposed between the driving rotation shaft 121 and the driven rotation shaft 122 according to actual requirements. First sealed chamber 131 may include two sub-chambers, first sub-chamber 131a and second sub-chamber 131b, that are spaced apart and in communication with each other. The second sealed chamber 132 may include two sub-chambers, a third sub-chamber 132a and a fourth sub-chamber 132b, which are spaced apart and communicate with each other. The third sealed chamber 133 may include two sub-chambers, namely a fifth sub-chamber 133a and a sixth sub-chamber 133b, which are spaced apart and communicate with each other. The fourth sealed cavity 134 may include two sub-cavities that are arranged at intervals and are communicated with each other, namely a seventh sub-cavity 134a and an eighth sub-cavity 134b, but the present invention is not limited thereto, and a person skilled in the art may arrange three or more sub-cavities in each sealed cavity according to actual needs, and the number of the sub-cavities arranged in each sealed cavity may be the same or different, and may specifically be determined according to actual needs. Each subchamber contains a fluid (e.g., a gas).

With continuing reference to fig. 2 and fig. 3, it is assumed that the driving rotation shaft 121 is driven by the rotation mechanism 110 to rotate clockwise, and accordingly, the driven rotation shaft 122 is also driven by the driving rotation shaft 121 to rotate clockwise. If the load of the driven rotating shaft 122 is suddenly reduced at a certain driving time point, and the driving rotating shaft 121 suddenly accelerates due to the sudden reduction of the load, if the structures of the sealing cavities as shown in fig. 3 are not provided, the driven rotating shaft 122 is driven by the driving rotating shaft 121, and the sudden acceleration also synchronously occurs, so that the movement condition of the driven rotating shaft 122 is easily not smooth. However, in the present embodiment, when the driving rotation shaft 121 suddenly accelerates, the pressure in the first sub-chamber 131a is greater than the pressure in the second sub-chamber 131b, the pressure in the third sub-chamber 132a is greater than the pressure in the fourth sub-chamber 132b, the pressure in the fifth sub-chamber 133a is greater than the pressure in the sixth sub-chamber 133b, and the pressure in the seventh sub-chamber 134a is greater than the pressure in the eighth sub-chamber 134b, so that the fluid flows from the first sub-chamber 131a to the second sub-chamber 131b, from the third sub-chamber 132a to the fourth sub-chamber 132b, from the fifth sub-chamber 133a to the sixth sub-chamber 133b, and from the seventh sub-chamber 134a to the eighth sub-chamber 134b, and the damping fluid flows in the counterclockwise direction is formed. Like this, can provide the damping for driven rotation axis 122, can avoid driven rotation axis 122 to change the phenomenon of motion operating mode suddenly and take place, ensure that driven rotation axis 122 can the gentle motion to reduce the phenomenon of rapid stop when the stroke ends, prevent to take place the impact, damage the part, improve the life of device 100 of uncapping, reduce the maintenance cost of device 100 of uncapping.

It can be understood that, assuming that the load of the driven rotating shaft 122 is suddenly increased at a certain driving time point, the driving rotating shaft 121 is suddenly decelerated due to the sudden load increase, and at this time, the direction of the damping fluid is opposite to the above, that is: the fluid flows to first subchamber 131a from second subchamber 131b, fourth subchamber 132b flows to third subchamber 132a, sixth subchamber 133b flows to fifth subchamber 133a and eighth subchamber 134b flows to seventh subchamber 134a, form the damping fluid that flows along the clockwise, thus, can provide buffering damping for driven rotation shaft 122, can avoid driven rotation shaft 122 to change the phenomenon of motion operating mode suddenly and take place, ensure that driven rotation shaft 122 can move smoothly, so that reduce the phenomenon of rapid stop when the stroke ends, prevent the impact, damage the part, improve the life of uncapping device 100, reduce the maintenance cost of uncapping device 100.

It should be noted that, there is no limitation on the structure of the rotatable connection between the driving rotating shaft 121 and the driven rotating shaft 122, for example, the driving rotating shaft 121 may be rotatably connected to the driven rotating shaft 122 through a bearing or a bearing-like structure. Of course, the present invention is not limited to this, and those skilled in the art may select or design some other rotation connection structures to realize the rotatable connection between the driving rotation shaft 121 and the driven rotation shaft 122 according to actual needs.

With continued reference to fig. 1, a partition is disposed within each of the sealed chambers to divide the sealed chambers into different sub-chambers.

Specifically, a first partition 141 is disposed in the first sealing chamber 131, a second partition 142 is disposed in the second sealing chamber 132, a third partition 143 is disposed in the third sealing chamber 133, and a fourth partition 144 is disposed in the fourth sealing chamber 134. Of course, the present invention is not limited thereto, and a plurality of partitions may be provided in each of the sealed chambers so as to partition the sealed chamber into a plurality of sub-chambers.

Referring to fig. 1, the driving rotating shaft 121 includes a first inner sidewall 121a close to the driven rotating shaft 122 and a first outer sidewall 121b far from the driven rotating shaft 122. The driven rotation shaft 122 includes a second outer sidewall 122a close to the driving rotation shaft 121 and a second inner sidewall 122b far from the driving rotation shaft 121. The sealing cavity is a sealing groove recessed from the first inner sidewall 121a to a direction close to the first outer sidewall 121b, the spacer is a boss protruding from the second outer sidewall 122a to a direction away from the second inner sidewall 122b, the boss is inserted into the corresponding sealing groove, and a gap is formed between the boss and the sealing groove in a radial direction along the driving rotation shaft 122, and the gap can allow fluid to flow in different sub-chambers.

Of course, the positions of the groove and the boss may be interchanged, that is, the seal cavity is a seal groove recessed from the second outer sidewall 122a toward the direction close to the second inner sidewall 122b, and the spacer is a boss protruding from the first inner sidewall 121a toward the direction away from the first outer sidewall 121 b.

Referring to fig. 3, the number of the seal grooves and the bosses is plural, and in order to make the movement of the driven rotation shaft 122 more gradual, the plurality of seal grooves are disposed at equal intervals in the circumferential direction of the first inner sidewall 121a, and the plurality of bosses are disposed at equal intervals in the circumferential direction of the second outer sidewall 122 a. Also, as shown in fig. 3, there may be one boss for each groove, although the present invention is not limited thereto.

In addition, damping holes (not shown in the figures) communicating two adjacent sub-chambers can be arranged on the boss, so that the damping fluid can flow between two adjacent sub-chambers through the gap between the boss and the sealing groove to generate a damping force, and can also flow between two adjacent sub-chambers through the damping holes to generate the damping force.

The inventor of the present invention has found through debugging that, in the debugging process, when the motion is slow, the resistance generated by the fluid may not be enough to make the driving rotation shaft drive the driven rotation shaft to move, please refer to fig. 4, assuming that the driving rotation shaft 121 moves clockwise, the fluid in the first sub-chamber 131a, the third sub-chamber 132a, the fifth sub-chamber 133a and the seventh sub-chamber 134a will be discharged at the beginning stage, and further the buffering effect in the motion process is affected, because the whole process needs to complete the whole motion within 15 seconds, the motion speed cannot be too slow, otherwise, the motion cannot be completed within the specified time.

To this end, the inventor of the present invention further improves the uncapping device 100 described above with respect to the above phenomenon, and at least one damping member is further provided in each of the sealed cavities, and the damping member is capable of acting on the driven rotation shaft in cooperation with the damping air flow to smooth the movement of the driven rotation shaft.

Referring to fig. 4, a first damping member 151 is disposed in the first sealing chamber 131, a second damping member 152 is disposed in the second sealing chamber 132, a third damping member 153 is disposed in the third sealing chamber 133, and a fourth damping member 154 is disposed in the fourth sealing chamber 134. Of course, the present invention is not limited to this, and those skilled in the art may arrange two or more damping members in each sealing chamber according to actual needs. In the embodiment, assuming that the special working condition needs to be completed at a slower speed, the driving force can be provided by the resistance generated by each damping member during the slow movement due to the smaller driving impulse, so as to avoid the early consumption of the fluid in the closed cavity. When the load is suddenly changed and the resistance generated by each damping member is not enough to synchronize the operation of the driving rotating shaft 121 and the driven rotating shaft 122, the resistance of the air flow can still buffer the relative movement of the driving rotating shaft 121 and the driven rotating shaft 122, thereby achieving the effect of smooth movement.

It should be noted that, the specific material of the damping member is not limited, for example, the damping member may be made of rubber, and of course, besides rubber, other materials with damping properties may be selected by those skilled in the art.

With continued reference to fig. 3, each damping element may be sandwiched between the boss top wall and the seal groove bottom wall. That is, in this embodiment, the damping member is only located in the gap between the boss and the seal groove, so that the manufacturing cost of the damping member can be reduced, and at the same time, the damping member can be further provided to reduce the gap, so that the fluid in the sub-chamber can be prevented from being consumed earlier.

Referring to fig. 1 and 2, the rotating mechanism 110 includes a rotating cylinder 111 and a rotating arm 112. Wherein, the first end of the rotating arm 112 is fixedly connected with the cylinder body of the rotating cylinder 111, and the second end of the rotating arm 112 is fixedly connected with the active rotating shaft 121. The means of securing the connection includes, but is not limited to, bolting.

It should be noted that the rotating mechanism 110 is not limited to the structure of the rotating cylinder 111, and those skilled in the art can select other driving mechanisms capable of implementing rotation according to actual needs, for example, the rotating mechanism 110 may also be a gear driving mechanism, a sprocket driving mechanism, and the like.

In a second aspect of the present invention, referring to fig. 1, a semiconductor processing apparatus is provided, which includes a chamber 300, a lid 200, and a lid opening device 100 for driving the lid 200 to rotate to close or open the chamber 300, wherein the lid opening device 100 is the lid opening device 100 described above.

The semiconductor processing equipment with the structure of the embodiment is provided with the cap opening device 100, when the motion condition of the driving rotating shaft 121 is suddenly changed due to sudden change of load, the damping fluid formed in each sub-chamber can be used, the phenomenon that the driven rotating shaft 122 suddenly changes the motion working condition can be avoided, the driven rotating shaft 122 can be ensured to move smoothly, so that the phenomenon of sudden stop is reduced when the stroke is finished, impact is prevented from occurring, parts are damaged, the service life of the cap opening device 100 is prolonged, and the maintenance cost of the cap opening device 100 is reduced.

It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.

Claims

1. An uncovering device for a chamber, the uncovering device is used for driving a cover plate to rotate so as to close or open the chamber, and the uncovering device is characterized by comprising:

a rotation mechanism;

2. A door opener according to claim 1, wherein at least one partition is provided in each of the sealed chambers to partition the sealed chamber into different sub-chambers.

3. The door opener according to claim 2, wherein the driving rotation shaft includes a first inner side wall close to the driven rotation shaft and a first outer side wall remote from the driven rotation shaft;

4. The door opener according to claim 3, wherein the number of the seal groove and the number of the boss are plural, and the plurality of seal grooves are provided at equal intervals in the circumferential direction of the first inner side wall, and the plurality of bosses are provided at equal intervals in the circumferential direction of the second outer side wall.

5. The door opener according to claim 4, wherein each of the seal grooves corresponds to one of the bosses.

6. The door opener according to claim 2, wherein the driving rotation shaft includes a first inner side wall close to the driven rotation shaft and a first outer side wall remote from the driven rotation shaft;

7. A cap release device according to claim 3 or 6, wherein the boss is provided with a damping hole communicating two adjacent sub-chambers.

8. The door uncovering device according to any one of claims 1 to 6, wherein at least one damping member is further provided in each of said sealed chambers, said damping member being capable of acting together with said damping fluid on said driven rotation shaft to smooth the movement of said driven rotation shaft.

9. The door opener according to claim 8, wherein when the seal cavity is a seal groove and the spacer is a boss, the damper is interposed between a top wall of the boss and a bottom wall of the seal groove.

10. The door uncovering device according to claim 1, wherein said rotation mechanism comprises:

a rotating cylinder;

11. A semiconductor processing apparatus comprising a chamber, a lid plate, and a lid opening device for driving the lid plate to rotate to close or open the chamber, wherein the lid opening device is the lid opening device according to any one of claims 1 to 10.